CN204792698U - Diamond wire cutting silicon chip coolant liquid recovery system - Google Patents

Abstract

The utility model discloses a cooling liquid recovery system for diamond wire cutting silicon wafers, which comprises solar silicon wafer cutting equipment, a cooling liquid supply pump, a cooling liquid recovery pump, a cooling liquid barrel and a single crystal raw material warehouse, and also includes a waste liquid collection pool , filter device, blending box, silicon powder collection box, overflow outlet and replenishment port are also provided on the coolant barrel. Advantages: Through the system of the utility model, the cooling liquid can be recycled. At the same time, the cooling liquid is filtered from time to time, reducing the silicon powder content in the cooling liquid and improving the quality of the cooling liquid. Therefore, the cutting environment can be effectively improved, and the cutting of silicon wafers can be improved. It can effectively recycle cooling water and concentrated coolant, reduce the amount of sewage discharge; it can reduce the use of cooling water and concentrated coolant, and reduce production costs; since the replacement of coolant does not require manual operation, the labor intensity of employees can be reduced.

Description

Diamond wire cutting silicon wafer coolant recovery system

Technical field:

The utility model relates to a cooling liquid recovery system, in particular to a diamond wire cutting silicon chip cooling liquid recovery system.

Background technique

At present, the cooling liquid used in the solar silicon wafer diamond wire cutting cooling system is composed of pure water and concentrated coolant in a certain ratio. The cooling cycle system is 200-400L at a time, and it is usually replaced once after cutting. During the cutting process, the particles on the surface of the diamond wire grind the silicon rod, and the heat generated is taken away by the cooling liquid. The silicon powder is suspended in the cooling liquid. This unstable suspension is easy to precipitate or harden on the surface of the equipment, and with time As the cutting time increases, the concentration of silicon powder in the cooling liquid continues to rise. Usually, after one cut, the silicon powder content in the cooling liquid is as high as 5-8%. When the silicon powder content in the cooling liquid is greater than 2%, the silicon powder is very easy to precipitate, and it is easy to cause blockage to equipment, cooling liquid pipelines and filtration systems.

Utility model content:

The purpose of the utility model is to provide a diamond wire cutting silicon wafer coolant recovery system.

The utility model is implemented by the following technical scheme: diamond wire cutting silicon chip coolant recovery system, which includes solar silicon chip cutting equipment, coolant supply pump, coolant recovery pump, coolant bucket and single crystal raw material warehouse, the coolant The liquid supply port of the barrel is connected to the inlet of the cooling liquid supply pump, the outlet of the cooling liquid supply pump is connected to the cooling liquid inlet of the solar silicon wafer cutting equipment, and the cooling liquid outlet of the solar silicon wafer cutting equipment is connected to the The inlet of the cooling liquid recovery pump is connected, the outlet of the cooling liquid recovery pump is connected to the liquid return port of the cooling liquid barrel, and it also includes a waste liquid collection tank, a filter device, a blending box, and a silicon powder collection box, The coolant tank is also provided with an overflow outlet and a replenishment port, the overflow outlet is connected to the inlet of the waste liquid collection tank, and the outlet of the waste liquid collection tank is connected to the inlet of the filter device, so The coolant outlet of the filtering device is connected to the inlet of the mixing box, the outlet of the mixing box is connected to the liquid replenishment port, the silicon powder outlet of the filtering device is connected to the inlet of the silicon powder collection box, and the The outlet of the silicon powder collection box is connected with the feed inlet of the single crystal raw material bin.

The filter device includes a filter press and a fine filter, the outlet of the waste liquid collection tank is connected to the inlet of the filter press, the cooling liquid outlet of the filter press is connected to the inlet of the fine filter, and the The outlet of the fine filter is connected with the inlet of the blending box, and the silicon powder outlet of the filter press is connected with the inlet of the silicon powder collection box.

A solenoid valve and a flow meter are provided at the liquid replenishment port, and the solenoid valve is electrically connected to the flow meter.

The advantages of the utility model: through the system of the utility model, the recycling of the coolant can be realized. At the same time, the coolant is filtered from time to time, reducing the silicon powder content in the coolant and improving the quality of the coolant. Therefore, the cutting environment is effectively improved. Improve the qualification rate of cutting silicon wafers; effectively recycle cooling water and concentrated coolant, reduce sewage discharge; reduce the use of cooling water and concentrated coolant, reduce production costs; because the replacement of coolant does not require manual operation, it can reduce the number of employees Labor intensity.

Description of drawings:

Figure 1 is a schematic diagram of the overall structure of the utility model.

Solar wafer cutting equipment 1, coolant supply pump 2, coolant recovery pump 3, coolant barrel 4, single crystal raw material warehouse 5, waste liquid collection pool 6, filter device 7, blending box 8, silicon powder collection box 9, Overflow outlet 10, liquid replenishment port 11, filter press 12, fine filter 13, solenoid valve 14, flow meter 15, coolant purification pump 16.

Specific examples:

As shown in Figure 1, the cooling liquid recovery system for diamond wire cutting silicon wafers includes solar silicon wafer cutting equipment 1, cooling liquid supply pump 2, cooling liquid recovery pump 3, cooling liquid tank 4 and single crystal raw material warehouse 5, cooling liquid The liquid supply port of barrel 4 is connected to the inlet of coolant supply pump 2, the outlet of coolant supply pump 2 is connected to the coolant inlet of solar silicon wafer cutting equipment 1, and the coolant outlet of solar silicon wafer cutting equipment 1 is connected to the coolant recovery The inlet of the pump 3 is connected, and the outlet of the coolant recovery pump 3 is connected to the liquid return port of the coolant barrel 4. The water flow of the coolant recovery pump 3 can make the coolant in the coolant barrel 4 rotate to form a vortex, and then the coolant can Fully mixed; it also includes a waste liquid collection tank 6, a filter device 7, a blending box 8, a silicon powder collection box 9, and the coolant barrel 4 is also provided with an overflow outlet 10 and a liquid replenishment port 11, and the overflow outlet 10 is connected to the waste The inlet of the liquid collection tank 6 is connected, the outlet of the waste liquid collection tank 6 is connected with the inlet of the filter device 7 through the cooling liquid purification pump 16, the cooling liquid outlet of the filter device 7 is connected with the inlet of the mixing box 8, and the outlet of the mixing box 8 is connected with the The liquid replenishment port 11 is connected, and the liquid replenishment port 11 is provided with a solenoid valve 14 and a flow meter 15, the solenoid valve 14 is electrically connected with the flow meter 15, and the opening and closing of the solenoid valve 14 is controlled by the flow meter 15; the silicon powder outlet of the filter device 7 is connected to the silicon powder The inlet of the powder collection box 9 is connected, the outlet of the silicon powder collection box 9 is connected with the feed port of the single crystal raw material bin 5; the filter device 7 includes a filter press 12 and a fine filter 13, and the outlet of the waste liquid collection tank 6 is connected with the filter press. The inlet of filter press 12 is connected, the coolant outlet of filter press 12 is connected with the inlet of fine filter 13, the outlet of fine filter 13 is connected with the inlet of blending box 8, the outlet of silicon powder of filter press 12 is connected with the inlet of silicon powder collection box 9 import connection.

Working principle: The coolant in the coolant bucket 4 is pumped into the solar wafer cutting equipment 1 by the coolant supply pump 2, and the coolant recovery pump 3 pumps the used coolant of the solar wafer cutting equipment 1 into the coolant bucket 4, the coolant in the coolant barrel 4 forms a vortex under the action of the coolant recovery pump 3, and then the old coolant is fully mixed with the coolant inside the coolant barrel 4; with the addition of the old coolant, the coolant The fully mixed coolant in the barrel 4 overflows from the overflow outlet 10 to ensure that the liquid level in the coolant barrel 4 remains unchanged; the overflowed coolant enters the waste liquid collection tank 6 and is pumped by the coolant purification pump 16 is pumped into the filter press 12, and the silicon powder filtered out by the filter press 12 first enters the silicon powder collection box 9 and then enters the single crystal raw material warehouse 5, and the silicon powder in the silicon powder collection box 9 can be purified and made into silicon raw material again. Utilization; the coolant filtered by the filter press 12 enters the fine filter 13 to filter again and then enters the allocation box 8; the coolant in the allocation box 8 enters the coolant barrel 4 through the liquid replenishment port 11 and is reused, and the newly replenished coolant Under the action of the coolant recovery pump 3 , it can be fully mixed with the coolant in the coolant barrel 4 .

Claims (3)

1. diamond wire saw silicon chip cooling fluid recovery system, it comprises solar power silicon sheet cutting equipment, cooling fluid supply pump, cooling fluid recovery pump, cooling fluid bucket and crystal raw material storehouse, the supply opening of described cooling fluid bucket is connected with the import of described cooling fluid supply pump, described cooling fluid supply delivery side of pump is connected with the cooling liquid inlet of described solar power silicon sheet cutting equipment, the cooling liquid outlet of described solar power silicon sheet cutting equipment is connected with the import of described cooling fluid recovery pump, described cooling fluid reclaims delivery side of pump and is connected with the liquid return hole of described cooling fluid bucket, it is characterized in that, it also includes waste collection pond, filter, allotment case, silica flour collecting box, described cooling fluid bucket is also provided with overflow outlet and fluid infusion mouth, described overflow outlet is connected with the import in described waste collection pond, the outlet in described waste collection pond is connected with the import of described filter, the cooling liquid outlet of described filter is connected with the import of described allotment case, the outlet of described allotment case is connected with described fluid infusion mouth, the silica flour outlet of described filter is connected with the import of described silica flour collecting box, the outlet of described silica flour collecting box is connected with the charging aperture in described crystal raw material storehouse.

2. diamond wire saw silicon chip cooling fluid recovery system according to claim 1, it is characterized in that, described filter comprises filter press and fine filter, the outlet in described waste collection pond is connected with the import of described filter press, the cooling liquid outlet of described filter press is connected with the import of described fine filter, the outlet of described fine filter is connected with the import of described allotment case, and the silica flour outlet of described filter press is connected with the import of described silica flour collecting box.

3. diamond wire saw silicon chip cooling fluid recovery system according to claim 1, is characterized in that, described fluid infusion mouth place is provided with electromagnetically operated valve and flowmeter, and described electromagnetically operated valve is electrically connected with described flowmeter.