CN204792698U - Diamond wire cutting silicon chip coolant liquid recovery system - Google Patents
Diamond wire cutting silicon chip coolant liquid recovery system Download PDFInfo
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- CN204792698U CN204792698U CN201520488983.8U CN201520488983U CN204792698U CN 204792698 U CN204792698 U CN 204792698U CN 201520488983 U CN201520488983 U CN 201520488983U CN 204792698 U CN204792698 U CN 204792698U
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Abstract
The utility model discloses a diamond wire cutting silicon chip coolant liquid recovery system, it includes solar energy silicon chip cutting equipment, coolant liquid feed pump, coolant liquid recovery pump, coolant liquid bucket and the former feed bin of single crystal, it still including waste liquid collecting pit, filter equipment, allotment case, silica flour collecting box, still is equipped with overflow export and fluid infusion mouth on the coolant liquid bucket. The advantage: through the utility model discloses the system can realize the cyclic utilization of coolant liquid, and simultaneously, the coolant liquid is filtered often, reduces silica flour content in the coolant liquid, improves the quality of coolant liquid, and consequently, effectual improvement cutting environment promotes the qualification rate of cutting silicon chip, but effective recycling utilizes cooling water and concentrated coolant liquid, reduces the blowdown flow rate, the use amount of reducible cooling water and concentrated cooling agent, reduction in production cost, because the coolant liquid is changed and need not manual operation, can reduce staff intensity of labour.
Description
Technical field:
The utility model relates to a kind of cooling fluid recovery system, particularly relates to a kind of diamond wire saw silicon chip cooling fluid recovery system.
Background technology
At present, the cooling fluid that solar silicon wafers diamond wire cutting cooling system adopts be pure water with concentrated cooling agent by a certain percentage proportioning form, the dosing of this cooling recirculation system is 200-400L, usually cuts a cutter and carries out changing once.In cutting process, diamond wire surface particles is ground silicon rod, the heat produced is taken away by cooling fluid, silica flour is suspended in cooling fluid, the suspension of this instability very easily precipitates or hardens in equipment surface, and along with the increase of clipping time, in cooling fluid, silica flour concentration constantly rises, after usual cutting one cutter, in cooling fluid, silica flour content is up to 5-8%.After in cooling fluid, silica flour content is greater than 2%, silica flour very easily precipitates, and easily results in blockage to equipment, coolant duct and filtration system.
Utility model content:
The purpose of this utility model is to provide a kind of diamond wire saw silicon chip cooling fluid recovery system.
The utility model is implemented by following technical scheme: diamond wire saw silicon chip cooling fluid recovery system, it comprises solar power silicon sheet cutting equipment, cooling fluid supply pump, cooling fluid recovery pump, cooling fluid bucket and crystal raw material storehouse, the supply opening of described cooling fluid bucket is connected with the import of described cooling fluid supply pump, described cooling fluid supply delivery side of pump is connected with the cooling liquid inlet of described solar power silicon sheet cutting equipment, the cooling liquid outlet of described solar power silicon sheet cutting equipment is connected with the import of described cooling fluid recovery pump, described cooling fluid reclaims delivery side of pump and is connected with the liquid return hole of described cooling fluid bucket, it also includes waste collection pond, filter, allotment case, silica flour collecting box, described cooling fluid bucket is also provided with overflow outlet and fluid infusion mouth, described overflow outlet is connected with the import in described waste collection pond, the outlet in described waste collection pond is connected with the import of described filter, the cooling liquid outlet of described filter is connected with the import of described allotment case, the outlet of described allotment case is connected with described fluid infusion mouth, the silica flour outlet of described filter is connected with the import of described silica flour collecting box, the outlet of described silica flour collecting box is connected with the charging aperture in described crystal raw material storehouse.
Described filter comprises filter press and fine filter, the outlet in described waste collection pond is connected with the import of described filter press, the cooling liquid outlet of described filter press is connected with the import of described fine filter, the outlet of described fine filter is connected with the import of described allotment case, and the silica flour outlet of described filter press is connected with the import of described silica flour collecting box.
Described fluid infusion mouth place is provided with electromagnetically operated valve and flowmeter, and described electromagnetically operated valve is electrically connected with described flowmeter.
Advantage of the present utility model: by the utility model system, can realize recycling of cooling fluid, simultaneously, cooling fluid is filtered constantly, reduces silica flour content in cooling fluid, improves the quality of cooling fluid, therefore, effectively improve cutting environment, promote the qualification rate of cutting silicon wafer; Can effective recycling cooling water and concentrated cooling fluid, reduce blowdown flow rate; The use amount of cooling water and concentrated cooling agent can be reduced, reduce production cost; Because cooling fluid is changed without the need to manual operation, staff labor intensity can be reduced.
Accompanying drawing illustrates:
Fig. 1 is overall structure schematic diagram of the present utility model.
Solar power silicon sheet cutting equipment 1, cooling fluid supply pump 2, cooling fluid recovery pump 3, cooling fluid bucket 4, crystal raw material storehouse 5, waste collection pond 6, filter 7, allotment case 8, silica flour collecting box 9, overflow outlet 10, fluid infusion mouth 11, filter press 12, fine filter 13, electromagnetically operated valve 14, flowmeter 15, cooling fluid self-fractionating pump 16.
Specific embodiment:
As shown in Figure 1, diamond wire saw silicon chip cooling fluid recovery system, it comprises solar power silicon sheet cutting equipment 1, cooling fluid supply pump 2, cooling fluid recovery pump 3, cooling fluid bucket 4 and crystal raw material storehouse 5, the supply opening of cooling fluid bucket 4 is connected with the import of cooling fluid supply pump 2, the outlet of cooling fluid supply pump 2 is connected with the cooling liquid inlet of solar power silicon sheet cutting equipment 1, the cooling liquid outlet of solar power silicon sheet cutting equipment 1 is connected with the import of cooling fluid recovery pump 3, the outlet of cooling fluid recovery pump 3 is connected with the liquid return hole of cooling fluid bucket 4, the current of cooling fluid recovery pump 3 can make the cooling fluid in cooling fluid bucket 4 rotate and form eddy current, and then cooling fluid can fully be mixed, it also includes waste collection pond 6, filter 7, allotment case 8, silica flour collecting box 9, cooling fluid bucket 4 is also provided with overflow outlet 10 and fluid infusion mouth 11, overflow outlet 10 is connected with the import in waste collection pond 6, the outlet in waste collection pond 6 is connected by the import of cooling fluid self-fractionating pump 16 with filter 7, the cooling liquid outlet of filter 7 is connected with the import of allotment case 8, the outlet of allotment case 8 is connected with fluid infusion mouth 11, fluid infusion mouth 11 place is provided with electromagnetically operated valve 14 and flowmeter 15, electromagnetically operated valve 14 is electrically connected with flowmeter 15, by the keying of flowmeter 15 Controlling solenoid valve 14, the silica flour outlet of filter 7 is connected with the import of silica flour collecting box 9, and the outlet of silica flour collecting box 9 is connected with the charging aperture in crystal raw material storehouse 5, filter 7 comprises filter press 12 and fine filter 13, the outlet in waste collection pond 6 is connected with the import of filter press 12, the cooling liquid outlet of filter press 12 is connected with the import of fine filter 13, the outlet of fine filter 13 is connected with the import of allotment case 8, and the silica flour outlet of filter press 12 is connected with the import of silica flour collecting box 9.
Operation principle: the cooling fluid in cooling fluid bucket 4 pumps into solar power silicon sheet cutting equipment 1 by cooling fluid supply pump 2, it is inner that used for solar power silicon sheet cutting equipment 1 old cooling fluid is pumped into cooling fluid bucket 4 by cooling fluid recovery pump 3, cooling fluid in cooling fluid bucket 4 forms eddy current under the effect of cooling fluid recovery pump 3, and then old cooling fluid is fully mixed with the cooling fluid of cooling fluid bucket 4 inside; Along with adding of old cooling fluid, in cooling fluid bucket 4, abundant mixed cooling fluid carries out overflow, to ensure that the liquid level in cooling fluid bucket 4 remains unchanged by overflow outlet 10; Filter press 12 is pumped into by cooling fluid self-fractionating pump 16 after cooling fluid after overflow enters waste collection pond 6, the silica flour leached by filter press 12 enters crystal raw material storehouse 5 after being introduced into silica flour collecting box 9 again, and the silica flour of silica flour collecting box 9 is made silicon raw material by purifying and re-used; Cooling fluid through filter press 12 filtration enters after fine filter 13 filters again and enters allotment case 8; Cooling fluid in allotment case 8 enters cooling fluid bucket 4 through fluid infusion mouth 11 and reuses, and the cooling fluid newly filled into fully can mix with the cooling fluid in cooling fluid bucket 4 under the effect of cooling fluid recovery pump 3.
Claims (3)
1. diamond wire saw silicon chip cooling fluid recovery system, it comprises solar power silicon sheet cutting equipment, cooling fluid supply pump, cooling fluid recovery pump, cooling fluid bucket and crystal raw material storehouse, the supply opening of described cooling fluid bucket is connected with the import of described cooling fluid supply pump, described cooling fluid supply delivery side of pump is connected with the cooling liquid inlet of described solar power silicon sheet cutting equipment, the cooling liquid outlet of described solar power silicon sheet cutting equipment is connected with the import of described cooling fluid recovery pump, described cooling fluid reclaims delivery side of pump and is connected with the liquid return hole of described cooling fluid bucket, it is characterized in that, it also includes waste collection pond, filter, allotment case, silica flour collecting box, described cooling fluid bucket is also provided with overflow outlet and fluid infusion mouth, described overflow outlet is connected with the import in described waste collection pond, the outlet in described waste collection pond is connected with the import of described filter, the cooling liquid outlet of described filter is connected with the import of described allotment case, the outlet of described allotment case is connected with described fluid infusion mouth, the silica flour outlet of described filter is connected with the import of described silica flour collecting box, the outlet of described silica flour collecting box is connected with the charging aperture in described crystal raw material storehouse.
2. diamond wire saw silicon chip cooling fluid recovery system according to claim 1, it is characterized in that, described filter comprises filter press and fine filter, the outlet in described waste collection pond is connected with the import of described filter press, the cooling liquid outlet of described filter press is connected with the import of described fine filter, the outlet of described fine filter is connected with the import of described allotment case, and the silica flour outlet of described filter press is connected with the import of described silica flour collecting box.
3. diamond wire saw silicon chip cooling fluid recovery system according to claim 1, is characterized in that, described fluid infusion mouth place is provided with electromagnetically operated valve and flowmeter, and described electromagnetically operated valve is electrically connected with described flowmeter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520488983.8U CN204792698U (en) | 2015-07-08 | 2015-07-08 | Diamond wire cutting silicon chip coolant liquid recovery system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520488983.8U CN204792698U (en) | 2015-07-08 | 2015-07-08 | Diamond wire cutting silicon chip coolant liquid recovery system |
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| CN204792698U true CN204792698U (en) | 2015-11-18 |
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| CN201520488983.8U Active CN204792698U (en) | 2015-07-08 | 2015-07-08 | Diamond wire cutting silicon chip coolant liquid recovery system |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106378876A (en) * | 2016-09-23 | 2017-02-08 | 镇江环太硅科技有限公司 | Diamond wire slicing cooling liquid integrated treatment method for sapphire and silicon wafers |
| CN108164020A (en) * | 2017-12-28 | 2018-06-15 | 洛阳阿特斯光伏科技有限公司 | A kind of diamond wire sliced crystal silicon production line uses water method and water system |
| CN108383123A (en) * | 2018-03-20 | 2018-08-10 | 山东大海新能源发展有限公司 | The processing of waste liquid utilizes method and system after a kind of Buddha's warrior attendant wire cutting |
| CN108858832A (en) * | 2018-08-27 | 2018-11-23 | 苏州赛森电子科技有限公司 | Cutting fluid cooling device and cooling method for silicon wafer cutting machine |
| CN112297260A (en) * | 2019-07-29 | 2021-02-02 | 内蒙古中环光伏材料有限公司 | Method for controlling silicon powder concentration in solar silicon wafer cutting process |
| CN115193101A (en) * | 2021-04-09 | 2022-10-18 | 中国矿业大学 | Method for recovering linear cutting cooling liquid |
-
2015
- 2015-07-08 CN CN201520488983.8U patent/CN204792698U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106378876A (en) * | 2016-09-23 | 2017-02-08 | 镇江环太硅科技有限公司 | Diamond wire slicing cooling liquid integrated treatment method for sapphire and silicon wafers |
| CN106378876B (en) * | 2016-09-23 | 2019-02-05 | 镇江环太硅科技有限公司 | A kind of sapphire and silicon wafer are sliced coolant liquid integrated sewage treatment method with diamond wire |
| CN108164020A (en) * | 2017-12-28 | 2018-06-15 | 洛阳阿特斯光伏科技有限公司 | A kind of diamond wire sliced crystal silicon production line uses water method and water system |
| CN108383123A (en) * | 2018-03-20 | 2018-08-10 | 山东大海新能源发展有限公司 | The processing of waste liquid utilizes method and system after a kind of Buddha's warrior attendant wire cutting |
| CN108858832A (en) * | 2018-08-27 | 2018-11-23 | 苏州赛森电子科技有限公司 | Cutting fluid cooling device and cooling method for silicon wafer cutting machine |
| CN112297260A (en) * | 2019-07-29 | 2021-02-02 | 内蒙古中环光伏材料有限公司 | Method for controlling silicon powder concentration in solar silicon wafer cutting process |
| CN115193101A (en) * | 2021-04-09 | 2022-10-18 | 中国矿业大学 | Method for recovering linear cutting cooling liquid |
| CN115193101B (en) * | 2021-04-09 | 2024-02-13 | 中国矿业大学 | Method for recovering wire cutting cooling liquid |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191209 Address after: 214200 Guodian photovoltaic plant, Dongyi Avenue, Yixing Economic and Technological Development Zone, Yixing City, Wuxi City, Jiangsu Province Patentee after: Wuxi middle ring application materials Co., Ltd. Address before: 010070 the Inner Mongolia Autonomous Region Hohhot City Jingqiao Development Zone Bao Montreal Street No. 18 Patentee before: Inner Mongolia Zhonghuan Photovoltaic Material Co., Ltd. |
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| TR01 | Transfer of patent right |