CN106361373A - Two-dimensional planar array ultrasonic transducer and manufacturing method thereof - Google Patents
Two-dimensional planar array ultrasonic transducer and manufacturing method thereof Download PDFInfo
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Abstract
The invention provides a two-dimensional planar array ultrasonic transducer and a manufacturing method thereof. The two-dimensional planar array ultrasonic transducer comprises an outer shell, a piezoelectric material, a grid and pin headers; the outer shell is of a hollow cavity structure, and consists of a bottom plate, a top plate and four side plates; the piezoelectric material is fixed to the bottom plate; the surface, facing the cavity, of the piezoelectric material is divided into M*N piezoelectric array elements which are arranged into a piezoelectric array; a common electrode is arranged on the other surface of the piezoelectric material; the grid is arranged on the piezoelectric array; M*N mesh holes corresponding to the piezoelectric array elements are formed in the grid; the pin headers are inserted into the mesh holes and are connected with the piezoelectric array elements; each piezoelectric array element is connected to an external cable or a wiring board through the corresponding pin header which is connected with the piezoelectric array element. According to the two-dimensional planar array ultrasonic transducer and the manufacturing method thereof, the problems that leading wires of the piezoelectric array elements are reliable, the consumed time is long and the cost is high can be solved; the use performance of a two-dimensional planar array probe is improved; the outer shell is adopted to serve as the support of the planer array probe; a backing is not required to be designed; high sensitivity of the planer array probe can be maintained.
Description
Technical field
The application is related to ultrasonic transducer technology, particularly to a kind of two-dimensional array ultrasonic transducer and preparation method thereof.
Background technology
Ultrasonic transducer is, in ultrasonic frequency range, the signal of telecommunication of alternation is converted into acoustical signal or by extraneous sound field
In acoustical signal be converted to the energy conversion device of the signal of telecommunication, as the Primary Component in ultrasonic technique, its performance quality is directly
It is related to effect and the range of applications of ultrasound technology.In recent years, ultrasonic three-dimensional imaging and three dimensions Sound stimulat, sound behaviour
Control, the demand of sound treatment increasingly increase, and require more and more higher to the performance reliability of two-dimensional array ultrasonic transducer.
The core of ultrasonic transducer is face battle array probe, and a face battle array probe is generally by one to thousands of single piezoelectricity battle array
Unit's composition, it is then that the both positive and negative polarity of piezoelectricity array element is connected to external cable or patch panel that the electrode of each piezoelectricity array element is drawn,
When the array element number of ultrasonic transducer is more huge, it is each array element independent patch according to the full mode of connection, makes each battle array
Unit all produces independent pulse signal, and in actual fabrication process, because the size of single array element is less, array element wiring just seems non-
Often difficult and it is difficult to ensure that concordance, its preparation expense also greatly improves.
Face battle array probe generally comprises backing, piezoelectric, matching layer and acoustic lens, and back lining materials are arranged at piezoelectric
The back side, its role is to using its damping action so that the resonant process of piezoelectric terminates as early as possible, to improve ultrasonic transducer
Axial resolution, but arrayed ultrasonic transducer, because array element is highly split, backing be generally used for the structure of piezoelectric according to
Support, and typically can only adopt Low ESR, highly attenuating back lining materials, so that most acoustic energy is through piezoelectric front surface spoke
Penetrate, keep high sensitivity, but the use of back lining materials, still can reduce the sensitivity of piezoelectric.
Content of the invention
The embodiment of the present application provides a kind of two-dimensional array ultrasonic transducer and preparation method thereof, to solve piezoelectricity array element negative line
Unreliable, time-consuming and the problem of high cost, improve two-dimensional array probe serviceability.
To achieve these goals, a kind of two-dimensional array ultrasonic transducer, this two-dimensional array are embodiments provided
Ultrasonic transducer includes:
Shell, is hollow cavity body structure, and described shell is made up of base plate, top board and four side plates；
Piezoelectric, is fixed on described base plate, described piezoelectric divided go out m*n piezoelectricity array element arrangement
Piezoelectric-array, described piezoelectric is provided with array element electricity corresponding with described m*n piezoelectricity array element respectively towards on the face of cavity
Pole, another side is provided with public electrode；
Grid, is arranged on described piezoelectric, and described grid is provided with the m*n net corresponding with piezoelectricity array element
Hole；
Multiple pricking with needle, insert in corresponding described mesh respectively, correspond with described piezoelectricity array element and electrically connect, each institute
State piezoelectricity array element and pass through the externally connected cable of connected pricking with needle or patch panel.
In one embodiment, this two-dimensional array ultrasonic transducer also includes: be sequentially stacked described public electrode one side
Join layer and the acoustic lens material for focusing on.
In one embodiment, between adj acent piezoelectric array element, fill decoupling material, for supporting described piezoelectric-array and reducing institute
State interfering between piezoelectricity array element.
In one embodiment, in described mesh, insert conducting resinl, described pricking with needle is by described conducting resinl with piezoelectricity array element one by one
Electrical connection.
In one embodiment, the arrangement mode of described pricking with needle is the array arrangement of m*n, single pricking with needle arrangement, or double pricking with needle
Arrangement.
In one embodiment, between described single pricking with needle or double pricking with needle, fixation is pressed by a briquetting.
In one embodiment, the side plate of the both sides of described pricking with needle and described shell is fixed by glue.
In one embodiment, the hollow parts of described hollow cavity are smaller in size than the overall size of described piezoelectric.
In one embodiment, between the side wall of the cavity of described base plate and described piezoelectric, setting gap is in order to fill epoxy
Glue, is used for fixing described piezoelectric.
In one embodiment, the inner side of described base plate is provided with stage portion, for carrying described piezoelectric.
In one embodiment, the externally connected cable of described pricking with needle.
In one embodiment, the top of described pricking with needle is plugged with mother row, and described pricking with needle is described by the female connection of described grafting row
External cable.
In one embodiment, described shell and contact pin select magnetic compatible material to prepare.
To achieve these goals, the embodiment of the present invention additionally provides a kind of making side of two-dimensional array ultrasonic transducer
Method, the manufacture method of this two-dimensional array ultrasonic transducer includes:
Prepare the shell of described two-dimensional array ultrasonic transducer；
The piezoelectric being partitioned into piezoelectricity array element is fixed on described base plate, makes described array element electrode towards described base plate
Cavity, described piezoelectric-array forms by the arrangement of m*n piezoelectricity array element；
Described in the array element electrode of described piezoelectric face on grid is set, and insert in the mesh of described grid
Conducting resinl；
Insert described pricking with needle in described mesh, the spacing of described pricking with needle is identical with the spacing of described piezoelectricity array element；
Four described side plates are fixed on described base plate, and by glue, described pricking with needle are fixed with described side wall；
Described pricking with needle is connected with External cable, more described shell is packaged.
In one embodiment, this manufacture method also includes: on the face at the piezoelectricity array element place of described piezoelectric, setting is single
Layer or the matching layer of multiple-level stack.
In one embodiment, this manufacture method also includes: is provided for the acoustic lens material focusing on described matching layer.
In one embodiment, described pricking with needle is connected with External cable, comprising: female in the top grafting row of described pricking with needle, leads to
Cross described row mother to be connected pricking with needle with described External cable.
In one embodiment, in the mesh of described grid, insert conducting resinl, comprising: by point gum machine described grid net
In the hole carries out quantitative point glue.
In one embodiment, in the mesh of described grid, insert conducting resinl, comprising: on grid, lay thin film, will
Described conductive glue, on described grid, tears described thin film off again after striking off described grid, described thin film does not cover described net
Hole.
In one embodiment, described pricking with needle is single pricking with needle or double pricking with needle, after described mesh inserts described pricking with needle, should
The manufacture method of two-dimensional array ultrasonic transducer also includes: solid by being pressed by briquetting between described single pricking with needle or double pricking with needle
Fixed.
Using the present invention, carry out the piezoelectricity array element gage system of contact pin by using grid, instead of traditional piezoelectricity battle array
The gage system of unit's welding, can solve the problems, such as that piezoelectricity array element negative line is unreliable, time-consuming and high cost.The present invention also designs
The support that special shell is popped one's head in as face battle array, need not redesign backing, face battle array probe can be made to keep its high sensitivity, carry
The high serviceability of two-dimensional array probe.The present invention can prepare shell and contact pin from magnetic compatible material, is had with making
The ultrasonic transducer of magnetic compatibility performance, is used for being placed in magnetic resonance system, is used cooperatively with magnetic resonance system.
Brief description
In order to be illustrated more clearly that the embodiment of the present application or technical scheme of the prior art, below will be to embodiment or existing
Have technology description in required use accompanying drawing be briefly described it should be apparent that, drawings in the following description be only this
Some embodiments of application, for those of ordinary skill in the art, on the premise of not paying creative work, acceptable
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is the two-dimensional array ultrasonic transducer structures schematic diagram of the embodiment of the present invention；
Fig. 2 and Fig. 3 is the structural representation of the base plate of the embodiment of the present invention；
Fig. 4 is the manufacture method flow chart of the two-dimensional array ultrasonic transducer of the embodiment of the present invention；
Fig. 5 is the scheme of installation of the piezoelectric of the embodiment of the present invention；
Fig. 6 is the scheme of installation of the grid of the embodiment of the present invention；
Fig. 7 a and Fig. 7 b is the operation chart inserting pricking with needle in the embodiment of the present invention
Fig. 8 is the two-dimensional array ultrasonic transducer outer enclosure schematic diagram of the embodiment of the present invention.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present application, the technical scheme in the embodiment of the present application is carried out clear, complete
Site preparation describes it is clear that described embodiment is only some embodiments of the present application, rather than whole embodiments.It is based on
Embodiment in the application, it is every other that those of ordinary skill in the art are obtained under the premise of not making creative work
Embodiment, broadly falls into the scope of the application protection.
Fig. 1 is the two-dimensional array ultrasonic transducer structures schematic diagram of the embodiment of the present invention, includes as shown in Figure 1: shell, pressure
Electric material 13, grid 14 and multiple pricking with needle 15.
As shown in Figures 2 and 3, shell is hollow cavity body structure, and this shell is by base plate 11, top board 10 and four side plates 12
Composition.
As shown in figure 1, piezoelectric 13 is fixed on base plate 11, piezoelectric 13 divided go out m*n piezoelectricity array element row
The piezoelectric-array of cloth, piezoelectric 13 is provided with array element corresponding with m*n piezoelectricity array element respectively towards on the face of cavity
Electrode, another side is provided with public electrode (not shown).
Grid 14 is arranged on piezoelectric 13, and grid 14 is provided with the m*n mesh corresponding with piezoelectricity array element.
This grid can be using insulant preparation.
Multiple pricking with needle 15 insert in corresponding mesh respectively, and with piezoelectricity array element correspond electrically connect, and with piezoelectricity battle array
Unit connects, and each piezoelectricity array element passes through the externally connected cable of connected pricking with needle or patch panel.The top of pricking with needle 15 can
Female with the row of being plugged with, pricking with needle 15 connects external cable or patch panel by grafting row is female.
In one embodiment, on the face at the public electrode place of piezoelectric, it is sequentially stacked matching layer 16 and is used for focusing on
Acoustic lens material 17, wherein, matching layer 16 can be the multilamellar of monolayer or stacking.
It is filled with decoupling material between the piezoelectricity array element being partitioned into, for supporting piezoelectric-array, piezoelectricity battle array can also be reduced
Interfering between unit.
Conducting resinl can be inserted, all pricking with needle 15 are passed through conducting resinl and electrically connected with piezoelectricity array element one-to-one corresponding in mesh.?
In the present invention, grid is used for limiting the flowing of conducting resinl and plays positioning action for pricking with needle, and grid and piezoelectric are only thing
Reason contact, therefore, the mobility of conducting resinl is unsuitable excessive.
When inserting conducting resinl, it is necessary to assure the upper and lower surface of grid can not have conducting resinl, otherwise two array elements can be connected
Get up, when being embodied as, inserting conducting resinl in the mesh of grid can obtain at least through the following two kinds method:
Method one: quantitative point glue is carried out in the mesh of described grid by point gum machine.
Method two: lay thin film on grid 14, by conductive glue on grid 14, tear off again after striking off grid
Thin film.It should be noted that thin film does not cover described mesh.
Pricking with needle 15 can be multiple arrangement modes, for example, array arrangement of m*n, single arrangement, or double arrangement.Pricking with needle
During for single pricking with needle or double pricking with needle, between single pricking with needle or double pricking with needle, fixation is pressed by briquetting 18.The both sides of pricking with needle with
The side plate of shell is fixed by glue.
In an alternative embodiment, can replace in pricking with needle interpenetration network using the circuit board of the empty design of thread, circuit board it
Between positioned using briquetting, the magnetic compatibling problem of pricking with needle so, need not be considered.
In one embodiment, the hollow parts size of hollow cavity can be less than the overall size of piezoelectric.
In one embodiment, between the side wall of the cavity of base plate and piezoelectric, setting gap, in order to fill epoxy glue, is used
In fixing piezoelectric.
The fixed form of piezoelectric and base plate has multiple, in an embodiment, can arrange stage portion in the inner side of base plate,
Carry piezoelectric with this stage portion.
In one embodiment, shell and contact pin select magnetic compatible material to prepare, and for example, shell adopts plastic production, pricking with needle
Made using pure copper material.
The two-dimensional array ultrasonic transducer of the present invention, carries out the piezoelectricity array element gage system of contact pin, replaces by using grid
The gage system of generation traditional piezoelectricity array element welding, can solve that piezoelectricity array element negative line is unreliable, time-consuming and high cost
Problem.The present invention have also been devised the support that special shell is popped one's head in as face battle array, need not redesign backing, can make face battle array probe
Keep its high sensitivity, improve the serviceability of two-dimensional array probe.The present invention can prepare shell from magnetic compatible material
And contact pin, to make the ultrasonic transducer with magnetic compatibility performance, it is used for being placed in magnetic resonance system, enters with magnetic resonance system
Row uses cooperatively.
Fig. 4 is the manufacture method flow chart of the two-dimensional array ultrasonic transducer of the embodiment of the present invention, for making shown in Fig. 1
Two-dimensional array ultrasonic transducer, as shown in figure 1, this manufacture method includes:
S401: prepare the shell of described two-dimensional array ultrasonic transducer.
As shown in figure 3, being hollow cavity body structure, hollow parts size can be less than the whole of piezoelectric to the base plate of shell
Body size, but the array element part of piezoelectric can all expose that (piezoelectric, in addition to piezoelectricity array element part, can also be arranged
Have part surplus), cavity portion can place piezoelectric, can arrange gap between the side wall of base plate cavity and piezoelectric, uses
Fix piezoelectric to fill epoxy glue.
S402: the piezoelectric being partitioned into piezoelectricity array element and public electrode is fixed on base plate as shown in Figure 2, makes institute
State the cavity towards base plate for the array element electrode, as shown in Figure 5.
In one embodiment, after s402, can piezoelectric public electrode be located face on setting monolayer or
The matching layer of multiple-level stack；The acoustic lens material focusing on is provided on described matching layer.
S403: on the face at the array element electrode place of described piezoelectric, grid is set, and in the mesh of described grid
Insert conducting resinl.
As shown in fig. 6, grid can using insulant preparation, and be provided with corresponding with the m*n array element of piezoelectric
M*n mesh.Usually, (upper and lower surface of grid can not can to insert conducting resinl in mesh by following two modes
Have conducting resinl, otherwise two array elements can be coupled together):
Method one, pass through point gum machine quantitative point glue；
2nd, disposable frictioning.The mode of frictioning first can lay thin film (thin film is unable to overlay mesh) on grid,
Conductive glue is struck off on grid, then tears thin film off.
In the present invention, grid is used for limiting the flowing of conducting resinl and playing positioning action, grid and piezoelectricity for pricking with needle
Material is only physical contact, and therefore, the mobility of conducting resinl is unsuitable excessive.
S404: insert described pricking with needle in described mesh, the spacing of described pricking with needle is identical with the spacing of described piezoelectricity array element.Figure
7a and Fig. 7 b is the operation chart inserting pricking with needle in the embodiment of the present invention.
Pricking with needle can be array arrangement or single pricking with needle or the double pricking with needle of m*n, for single pricking with needle or double
Pricking with needle, needs to press fixation by briquetting between single pricking with needle or double pricking with needle.
Pricking with needle can be using the pricking with needle in the plug connector sold on the market, but the spacing of pricking with needle need to be with the array element of piezoelectric
Spacing is consistent, and the other end of pricking with needle can be arranged female with grafting, convenient be connected with cable, present invention is designed such that the connecing of piezoelectric
Line need not weld, and the array element solving piezoelectric is less, contact conductor problem when array number is more.
S405: four described side plates are fixed on described base plate, and by glue, described pricking with needle are fixed with side wall.
S406: described pricking with needle is connected with External cable, more described shell is packaged, two-dimensional array ultrasonic transducer
Complete.As shown in figure 8, External cable 801 is drawn from the perforate of top board 10.
In another embodiment, the top grafting row that can also state pricking with needle is female, and External cable is connected with mother row.
The two-dimensional array ultrasonic transducer manufacture method of the present invention, carries out the piezoelectricity array element lead of contact pin by using grid
Mode, instead of the gage system of traditional piezoelectricity array element welding, can solve that piezoelectricity array element negative line is unreliable, time-consuming and becomes
This high problem.The present invention have also been devised the support that special shell is popped one's head in as face battle array, need not redesign backing, can make face
Battle array probe keeps its high sensitivity, improves the serviceability of two-dimensional array probe.The present invention can select magnetic compatible material system
Standby shell and contact pin, to make the ultrasonic transducer with magnetic compatibility performance, are used for being placed in magnetic resonance system, with magnetic resonance
System is used cooperatively.
Apply specific embodiment in the application the principle of the application and embodiment are set forth, above example
Explanation be only intended to help and understand the present processes and its core concept；Simultaneously for one of ordinary skill in the art,
According to the thought of the application, all will change in specific embodiments and applications, in sum, in this specification
Hold and should not be construed as the restriction to the application.
Claims (19)
1. a kind of two-dimensional array ultrasonic transducer is it is characterised in that include:
Shell, is hollow cavity body structure, and described shell is made up of base plate, top board and four side plates；
Piezoelectric, is fixed on described base plate, described piezoelectric divided go out the arrangement of m*n piezoelectricity array element piezoelectricity
Array, described piezoelectric is provided with array element electrode corresponding with described m*n piezoelectricity array element respectively towards on the face of cavity, separately
Simultaneously it is provided with public electrode；
Grid, is arranged on described piezoelectric, and described grid is provided with the m*n mesh corresponding with piezoelectricity array element；
Multiple pricking with needle, insert in corresponding described mesh respectively, and correspond with described piezoelectricity array element and electrically connect, described in each
Piezoelectricity array element passes through the externally connected cable of connected pricking with needle or patch panel.
2. two-dimensional array ultrasonic transducer according to claim 1 is it is characterised in that also include: is sequentially stacked described
The matching layer of public electrode one side and the acoustic lens material for focusing on.
3. two-dimensional array ultrasonic transducer according to claim 1 goes it is characterised in that filling between adj acent piezoelectric array element
Coupling material, for supporting described piezoelectric-array and reducing interfering between described piezoelectricity array element.
4. two-dimensional array ultrasonic transducer according to claim 1 is it is characterised in that insert conducting resinl in described mesh,
Described pricking with needle is corresponded with piezoelectricity array element by described conducting resinl and electrically connects.
5. two-dimensional array ultrasonic transducer according to claim 1 is it is characterised in that the arrangement mode of described pricking with needle is m*
The array arrangement of n, single arrangement, or double arrangement.
6. two-dimensional array ultrasonic transducer according to claim 5 is it is characterised in that the pricking with needle or double of described single arrangement
Between the pricking with needle of row's arrangement, fixation is pressed by a briquetting.
7. the two-dimensional array ultrasonic transducer according to claim 5 or 6 is it is characterised in that the both sides of described pricking with needle and institute
The side plate stating shell is fixed by glue.
8. two-dimensional array ultrasonic transducer according to claim 7 is it is characterised in that the hollow parts of described hollow cavity
It is smaller in size than the overall size of described piezoelectric.
9. two-dimensional array ultrasonic transducer according to claim 1 it is characterised in that the side wall of the cavity of described base plate with
Between described piezoelectric, setting gap, in order to fill epoxy glue, is used for fixing described piezoelectric.
10. the two-dimensional array ultrasonic transducer according to claim 1 or 9 is it is characterised in that the inner side of described base plate is arranged
There is stage portion, for carrying described piezoelectric.
11. two-dimensional array ultrasonic transducers according to claim 1 are it is characterised in that the top of described pricking with needle is plugged with
Row is female, and described pricking with needle connects described external cable by described grafting row is female.
12. two-dimensional array ultrasonic transducers according to claim 1 are it is characterised in that magnetic selected by described shell and contact pin
Prepared by compatible material.
A kind of 13. manufacture methods of two-dimensional array ultrasonic transducer, are applied to the two-dimensional array ultrasonic transduction described in claim 1
Device is it is characterised in that include:
Prepare the shell of described two-dimensional array ultrasonic transducer；
The piezoelectric being partitioned into piezoelectric-array is fixed on described base plate, makes the chamber towards described base plate for the described array element electrode
Body, described piezoelectric-array is formed by m*n piezoelectricity array element arrangement；
The face that the array element electrode of described piezoelectric is located arranges grid, and inserts conduction in the mesh of described grid
Glue；
Insert described pricking with needle in described mesh, the spacing of described pricking with needle is identical with the spacing of described piezoelectricity array element；
Four described side plates are fixed on described base plate, and by glue, described pricking with needle are fixed with described side plate；
Described pricking with needle is connected with External cable, more described shell is packaged.
The manufacture method of 14. two-dimensional array ultrasonic transducers according to claim 13 is it is characterised in that also include:
The matching layer of setting monolayer or multiple-level stack on the face that the public electrode of described piezoelectric is located.
The manufacture method of 15. two-dimensional array ultrasonic transducers according to claim 14 is it is characterised in that also include:
The acoustic lens material focusing on is provided on described matching layer.
The manufacture method of 16. two-dimensional array ultrasonic transducers according to claim 13 is it is characterised in that also include: will
Described pricking with needle is connected with External cable, comprising:
Female in the top grafting row of described pricking with needle, by described row mother, pricking with needle is connected with described External cable.
The manufacture method of 17. two-dimensional array ultrasonic transducers according to claim 13 is it is characterised in that in described grid
Mesh in insert conducting resinl, comprising: quantitative point glue is carried out in the mesh of described grid by point gum machine.
The manufacture method of 18. two-dimensional array ultrasonic transducers according to claim 13 is it is characterised in that in described grid
Mesh in insert conducting resinl, comprising: on grid lay thin film, by described conductive glue on described grid, scrape
Described thin film is torn again off, described thin film does not cover described mesh after putting down described grid.
The manufacture method of 19. two-dimensional array ultrasonic transducers according to claim 13 is it is characterised in that described pricking with needle is
Single pricking with needle or double pricking with needle, after described mesh inserts described pricking with needle, also include: by described single pricking with needle or double pricking with needle
Between fixation is pressed by briquetting.
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| CN109926298B (en) * | 2017-12-18 | 2021-01-05 | 深圳先进技术研究院 | Mode conversion ultrasonic transducer and manufacturing method thereof |
| CN109939915A (en) * | 2017-12-20 | 2019-06-28 | 深圳先进技术研究院 | A kind of spliced ultrasonic transducer and preparation method thereof |
| CN108903975A (en) * | 2018-05-07 | 2018-11-30 | 华中科技大学 | A kind of high frequency ultrasound phased array array and preparation method thereof for ophthalmology |
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