CN106335902B - 一种碳化硅微粉的回收方法 - Google Patents
一种碳化硅微粉的回收方法 Download PDFInfo
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- CN106335902B CN106335902B CN201610717361.7A CN201610717361A CN106335902B CN 106335902 B CN106335902 B CN 106335902B CN 201610717361 A CN201610717361 A CN 201610717361A CN 106335902 B CN106335902 B CN 106335902B
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- CN
- China
- Prior art keywords
- slurry
- silicon carbide
- carbide micro
- powder
- recovery method
- Prior art date
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- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 63
- 239000000843 powder Substances 0.000 title claims abstract description 53
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 37
- 238000000034 method Methods 0.000 title claims abstract description 25
- 238000011084 recovery Methods 0.000 title claims abstract description 20
- 239000002002 slurry Substances 0.000 claims abstract description 54
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims abstract description 37
- 239000003513 alkali Substances 0.000 claims abstract description 29
- 238000004140 cleaning Methods 0.000 claims abstract description 29
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims abstract description 24
- 238000001354 calcination Methods 0.000 claims abstract description 17
- 239000002994 raw material Substances 0.000 claims abstract description 16
- 238000002156 mixing Methods 0.000 claims abstract description 14
- 239000000463 material Substances 0.000 claims abstract description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 10
- 238000001035 drying Methods 0.000 claims abstract description 9
- 239000002253 acid Substances 0.000 claims abstract description 7
- 239000012535 impurity Substances 0.000 claims abstract description 6
- 238000003756 stirring Methods 0.000 claims abstract description 6
- 235000011121 sodium hydroxide Nutrition 0.000 claims description 13
- 238000005554 pickling Methods 0.000 claims description 8
- 230000018044 dehydration Effects 0.000 claims description 2
- 238000006297 dehydration reaction Methods 0.000 claims description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims 1
- 229910052708 sodium Inorganic materials 0.000 claims 1
- 239000011734 sodium Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 12
- 238000004064 recycling Methods 0.000 abstract description 6
- 239000000047 product Substances 0.000 description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 238000005520 cutting process Methods 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 239000010865 sewage Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910003978 SiClx Inorganic materials 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 239000002910 solid waste Substances 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 238000002224 dissection Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/40—Electric properties
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/80—Compositional purity
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- Carbon And Carbon Compounds (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201610717361.7A CN106335902B (zh) | 2016-08-24 | 2016-08-24 | 一种碳化硅微粉的回收方法 |
Applications Claiming Priority (1)
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CN201610717361.7A CN106335902B (zh) | 2016-08-24 | 2016-08-24 | 一种碳化硅微粉的回收方法 |
Publications (2)
Publication Number | Publication Date |
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CN106335902A CN106335902A (zh) | 2017-01-18 |
CN106335902B true CN106335902B (zh) | 2019-02-19 |
Family
ID=57825745
Family Applications (1)
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CN201610717361.7A Active CN106335902B (zh) | 2016-08-24 | 2016-08-24 | 一种碳化硅微粉的回收方法 |
Country Status (1)
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CN (1) | CN106335902B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107792859A (zh) * | 2017-11-09 | 2018-03-13 | 新沂市宏润石英硅微粉有限公司 | 一种环保硅微粉的回收方法 |
CN108892142B (zh) * | 2018-07-24 | 2021-09-14 | 通化宏信研磨材有限责任公司 | 一种亚微米碳化硅超细粉体的提纯方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101244823A (zh) * | 2008-02-20 | 2008-08-20 | 江南大学 | 从硅片切割加工副产物中回收碳化硅的方法 |
CN102060297A (zh) * | 2010-11-26 | 2011-05-18 | 临沭山田研磨材有限公司 | 一种碳化硅微粉和燃料柴油的提取方法 |
CN102399618A (zh) * | 2011-10-08 | 2012-04-04 | 江苏佳宇资源利用股份有限公司 | 一种从晶硅切割废砂浆中资源化回收碳化硅组份的方法 |
CN102951641A (zh) * | 2012-11-01 | 2013-03-06 | 临沭山田研磨材有限公司 | 节水环保型硅晶片线切割用碳化硅微粉的制备方法 |
CN103232039A (zh) * | 2013-05-16 | 2013-08-07 | 周彬 | 碳化硅滤饼旋流提纯工艺 |
CN103303924A (zh) * | 2013-06-25 | 2013-09-18 | 佳明新材料科技有限公司 | 一种碳化硅微粉再回收工艺流程 |
CN105621414A (zh) * | 2015-03-11 | 2016-06-01 | 辽宁工业大学 | 一种从晶硅线切割废砂浆中回收碳化硅的方法 |
-
2016
- 2016-08-24 CN CN201610717361.7A patent/CN106335902B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101244823A (zh) * | 2008-02-20 | 2008-08-20 | 江南大学 | 从硅片切割加工副产物中回收碳化硅的方法 |
CN102060297A (zh) * | 2010-11-26 | 2011-05-18 | 临沭山田研磨材有限公司 | 一种碳化硅微粉和燃料柴油的提取方法 |
CN102399618A (zh) * | 2011-10-08 | 2012-04-04 | 江苏佳宇资源利用股份有限公司 | 一种从晶硅切割废砂浆中资源化回收碳化硅组份的方法 |
CN102951641A (zh) * | 2012-11-01 | 2013-03-06 | 临沭山田研磨材有限公司 | 节水环保型硅晶片线切割用碳化硅微粉的制备方法 |
CN103232039A (zh) * | 2013-05-16 | 2013-08-07 | 周彬 | 碳化硅滤饼旋流提纯工艺 |
CN103303924A (zh) * | 2013-06-25 | 2013-09-18 | 佳明新材料科技有限公司 | 一种碳化硅微粉再回收工艺流程 |
CN105621414A (zh) * | 2015-03-11 | 2016-06-01 | 辽宁工业大学 | 一种从晶硅线切割废砂浆中回收碳化硅的方法 |
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Inventor after: Liu Wenbing Inventor after: Gong Zhigang Inventor after: Ma Guangming Inventor after: Hao Wenhu Inventor after: Gong Xingyu Inventor after: Chen Guanyu Inventor after: Yu Qi Inventor after: Yan Fanlong Inventor after: Yin Lina Inventor before: Liu Wenbing Inventor before: Gong Zhigang Inventor before: Zhou Qiang Inventor before: Ma Guangming Inventor before: Hao Wenhu |
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Effective date of registration: 20180411 Address after: 276700 Linshu City, Linyi province Linshu County, the town of the village after the high lake Applicant after: SHANTIAN ABRASIVE CO.,LTD. Applicant after: SHANDONG SHANTIAN NEW MATERIAL SCIENTIFIC RESEARCH Co.,Ltd. Address before: 276700 Linshu City, Linyi province Linshu County, the town of the village after the high lake Applicant before: SHANTIAN ABRASIVE CO.,LTD. |
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Address after: 276700 Hou Gao Hu Village, Linshu Town, Linshu County, Linyi, Shandong Patentee after: Yamada New Material Group Co.,Ltd. Patentee after: SHANDONG SHANTIAN NEW MATERIAL SCIENTIFIC RESEARCH Co.,Ltd. Address before: 276700 Hou Gao Hu Village, Linshu Town, Linshu County, Linyi, Shandong Patentee before: SHANTIAN ABRASIVE CO.,LTD. Patentee before: SHANDONG SHANTIAN NEW MATERIAL SCIENTIFIC RESEARCH Co.,Ltd. |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A recovery method of silicon carbide powder Effective date of registration: 20220111 Granted publication date: 20190219 Pledgee: Shandong Linshu Rural Commercial Bank Co.,Ltd. Pledgor: Yamada New Material Group Co.,Ltd. Registration number: Y2022980000330 |
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Granted publication date: 20190219 Pledgee: Shandong Linshu Rural Commercial Bank Co.,Ltd. Pledgor: Yamada New Material Group Co.,Ltd. Registration number: Y2022980000330 |
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