CN106328716A - 薄膜晶体管和利用其检测压力的方法、以及触控装置 - Google Patents
薄膜晶体管和利用其检测压力的方法、以及触控装置 Download PDFInfo
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Abstract
一种薄膜晶体管和利用其检测压力的方法、以及触控装置,该薄膜晶体管包括:有源层;源极和漏极,其彼此间隔开并且都与所述有源层连接;第一绝缘层,其与所述有源层层叠设置;以及压电层,其与所述源极和所述漏极间隔开并且通过所述第一绝缘层与所述有源层间隔开。
Description
技术领域
本发明的实施例涉及一种薄膜晶体管和利用其检测压力的方法、以及触控装置。
背景技术
目前,触控技术已广泛应用在手机、平板电脑等电子设备中。触控技术提供了一种高效、便利的人机交互方式,其基本原理是以捕捉触摸物(例如人体手指或触控笔)的触摸、动作信息为出发点,将获取的触摸及动作信息转化为电信号并加以判断识别,以实现控制功能。
发明内容
本发明实施例提供一种薄膜晶体管和利用其检测压力的方法、以及触控装置。
本发明的至少一个实施例提供一种薄膜晶体管,其包括:有源层;源极和漏极,其彼此间隔开并且都与所述有源层连接;第一绝缘层,其与所述有源层层叠设置;以及压电层,其与所述源极和漏极间隔开并且通过所述第一绝缘层与所述有源层间隔开。
例如,所述的薄膜晶体管还包括栅极和第二绝缘层,所述第二绝缘层将所述栅极与所述有源层间隔开,并且在垂直于所述有源层的方向上,所述第二绝缘层和所述第一绝缘层分别设置于所述有源层的相对的两侧。
例如,在垂直于所述有源层的方向上,所述第一绝缘层设置于所述源极和漏极所在层与所述压电层之间。
例如,在从所述源极到所述漏极的方向上,所述压电层的尺寸大于或等于所述源极和所述漏极之间的距离。
例如,在所述压电层被施加压力的情况下,所述压电层被配置为所述薄膜晶体管的栅极。
例如,所述的薄膜晶体管还包括承载所述有源层、源极、漏极、第一绝缘层和压电层的承载基板,所述压电层设置于所述有源层的远离所述承载基板的一侧。
例如,所述压电层位于所述源极和所述漏极所在层的远离所述有源层的一侧。
例如,所述压电层的材料包括柔性压电材料。
例如,所述压电层的材料包括高分子压电材料。
本发明的至少一个实施例还提供一种以上任一项所述的薄膜晶体管检测压力的方法,该方法包括:检测所述薄膜晶体管的源极和漏极之间的电流值;以及根据所述电流值判断所述薄膜晶体管的压电层是否被施加压力或者所述压电层被施加的压力的大小。
本发明的至少一个实施例还提供一种触控装置,其包括多个以上所述的薄膜晶体管,所述多个薄膜晶体管的压电层彼此间隔开。
例如,所述的触控装置还包括:多条第一信号线,其分别与所述多个薄膜晶体管的源极连接;以及多条第二信号线,其分别与所述多个薄膜晶体管的漏极连接,所述第二信号线与所述第一信号线的延伸方向相交。
例如,所述薄膜晶体管还包括第二绝缘层以及栅极,所述第二绝缘层设置于所述有源层上,所述栅极通过所述第二绝缘层与所述有源层间隔开。所述触控装置还包括:多条第一信号线,其分别与所述多个薄膜晶体管的源极连接;多条第二信号线,其分别与所述多个薄膜晶体管的漏极连接;以及多条第三信号线,其分别与所述多个薄膜晶体管的栅极连接,所述第三信号线的延伸方向与所述第一信号线或所述第二信号线的延伸方向相交。
本发明实施例采用压电式感应检测手段,在薄膜晶体管中设置有压电层,该压电层可以作为该薄膜晶体管的栅极,在该压电层被施加压力的情况下,由于压电效应,该压电层的两侧产生正、负电荷,产生的电荷量与施加的压力成正比,使薄膜晶体管的源极和漏极之间的电流发生变化。根据源极和漏极之间的电流可以进行压力检测,以判断压电层是否被施加压力以实现触摸定位或者判断被施加的压力的大小。
附图说明
为了更清楚地说明本发明实施例的技术方案,下面将对实施例的附图作简单地介绍,显而易见地,下面描述中的附图仅仅涉及本发明的一些实施例,而非对本发明的限制。
图1为本发明实施例提供的薄膜晶体管的剖视示意图;
图2为本发明实施例提供的薄膜晶体管的等效电路图;
图3为本发明实施例提供的一种IDS检测电路的示意图;
图4a为本发明实施例提供的触控装置的俯视示意图一;
图4b为本发明实施例提供的触控装置的俯视示意图二;
图5为本发明实施例提供的触控装置的剖视示意图。
具体实施方式
为使本发明实施例的目的、技术方案和优点更加清楚,下面将结合本发明实施例的附图,对本发明实施例的技术方案进行清楚、完整地描述。显然,所描述的实施例是本发明的一部分实施例,而不是全部的实施例。基于所描述的本发明的实施例,本领域普通技术人员在无需创造性劳动的前提下所获得的所有其他实施例,都属于本发明保护的范围。
除非另外定义,本公开使用的技术术语或者科学术语应当为本发明所属领域内具有一般技能的人士所理解的通常意义。本公开中使用的“第一”、“第二”以及类似的词语并不表示任何顺序、数量或者重要性,而只是用来区分不同的组成部分。“包括”或者“包含”等类似的词语意指出现该词前面的元件或者物件涵盖出现在该词后面列举的元件或者物件及其等同,而不排除其他元件或者物件。“连接”或者“相连”等类似的词语并非限定于物理的或者机械的连接,而是可以包括电性的连接,不管是直接的还是间接的。“上”、“下”、“左”、“右”等仅用于表示相对位置关系,当被描述对象的绝对位置改变后,则该相对位置关系也可能相应地改变。
下面结合附图,对本发明实施例提供的薄膜晶体管和利用该薄膜晶体管检测压力的方法以及触控装置进行详细说明。
如图1所示,本发明的至少一个实施例提供一种薄膜晶体管100,其包括:有源层40;源极51和漏极52,其彼此间隔开并且都与有源层40连接;第一绝缘层60,其与有源层40层叠设置;以及压电层70,其与源极51和漏极52间隔开(例如通过第一绝缘层60与源极51和漏极52间隔开)、包括在平行于有源层40的方向上位于源极51和漏极52之间的部分并且通过第一绝缘层60与有源层40间隔开。
例如,源极51和漏极52可以设置于有源层40的上方或者下方;例如,压电层70也可以设置于有源层40的上方或者下方。
本发明实施例采用压电式感应检测手段,在薄膜晶体管100中设置有压电层70,该压电层70可以作为该薄膜晶体管100的栅极,在该压电层70被施加压力的情况下,由于压电效应,该压电层70的两侧产生正、负电荷(即产生栅极电压),产生的电荷量与施加的压力成正比,使得薄膜晶体管100的源极51和漏极52之间的电流发生变化。根据源极51和漏极52之间的电流可以进行压力检测,以判断压电层70是否被施加压力或者判断被施加的压力的大小。
例如,本发明的至少一个实施例提供的薄膜晶体管100还包括第二绝缘层30以及栅极20,栅极20通过第二绝缘层30与有源层40间隔开,并且在垂直于有源层40的方向上(即在图1中的垂直方向上),第二绝缘层30和第一绝缘层60分别设置于有源层40的相对的两侧。也就是说,在垂直于有源层40的方向上,压电层70与栅极20分别设置于有源层40的两侧。在这种情况下,该薄膜晶体管100为具有压电特性的双栅极薄膜晶体管。
例如,在垂直于有源层40的方向上,第一绝缘层60设置于源极51和漏极52所在层与压电层70之间。
例如,在从源极51到漏极52的方向上,压电层70的尺寸d1大于或等于源极51和漏极52之间的距离d2,这样有利于压电层70覆盖有源层40的整个沟道区域,从而在压电层70被施加压力的情况下使源极51和漏极52之间导通以产生沟道电流。
例如,继续参见图1,本发明的至少一个实施例提供的薄膜晶体管100还包括承载有源层40、源极51、漏极52、第一绝缘层60和压电层70的承载基板10,压电层70设置于有源层40的远离承载基板10的一侧。由于压电层70设置于有源层40的上侧,在薄膜晶体管100被用户触摸时,压电层70距离用户的手指较近,因而压电层70容易被施加压力,从而有利于提高压力检测性能。
例如,在压电层70设置于有源层40的远离承载基板10的一侧的情况下,压电层70位于源极51和漏极52所在层的远离有源层40的一侧。在压电层70设置于有源层40的上侧的基础上,通过将压电层70设置于源极51以及漏极52所在层的上侧,进一步有利于压电层70被施加压力,从而进一步提高压力检测性能。
例如,压电层70的材料包括柔性压电材料。由于柔性材料具有柔软、不易碎的优点,通过采用柔性压电材料,使得本发明实施例尤其适用于柔性显示屏的触摸检测。
例如,压电层70的材料包括高分子压电材料,例如聚偏二氟乙烯(PVDF)或类似材料。PVDF是一种柔软的压电材料,具有不易破碎、防水、频率响应较宽等优点,并且该材料可通过常用的薄膜晶体管制程制作形成,例如,在形成薄膜晶体管的栅极20、第二绝缘层30、有源层40、源极51、漏极52以及第一绝缘层60之后,通过在第一绝缘层60上形成PVDF膜层即可得到如图1所示的薄膜晶体管100。
例如,本发明实施例中,有源层40的材料可以为非晶硅、多晶硅或金属氧化物半导体等半导体材料;源极51、漏极52和栅极20可以采用铝、铝钕合金、铜、钛、钼、钼铌合金等金属材料制作;第一绝缘层60和第二绝缘层30可以为有机绝缘层、无机绝缘层或者二者的叠层。本发明实施例中各部件的材料包括但不限于所列举的材料。
本发明的至少一个实施例还提供一种利用以上任一项实施例提供的薄膜晶体管100检测压力的方法,该方法包括:检测如图1所示的薄膜晶体管100的源极51和漏极52之间的电流值;以及根据该电流值判断薄膜晶体管100的压电层70是否被施加压力或者压电层70被施加的压力的大小。
下面结合图2和图3对利用本发明实施例提供的薄膜晶体管实现压力检测的原理进行说明。
对于本发明任一实施例提供的薄膜晶体管100,如图1所示,在第一绝缘层60设置于源极51和漏极52所在层与压电层70之间并且压电层70与栅极20分别设置于有源层40的两侧的情况下,薄膜晶体管100的等效电路图可以如图2所示,该薄膜晶体管100等效为一个双栅极薄膜晶体管,其包括第二栅极、源极、漏极、第一栅极和电容,该电容与第一栅极、源极和漏极连接;图1所示的压电层70等效为该第一栅极,第一绝缘层60和压电层70整体上等效为该第一栅极和电容,图1所示的栅极20、源极51和漏极52分别对应图2中的第二栅极、源极和漏极。
根据图2所示的等效电路图可知,源极、漏极之间的电流值(即沟道电流)IDS受第一栅极(即压电层70)和第二栅极(即栅极20)的共同影响,并且可以得出:
在以上公式中,μFE是有源层的载流子迁移率,Ci是第二绝缘层的寄生电容,W、L分别是薄膜晶体管的宽和长,VGS是第二栅极和源极间的电压,VT是薄膜晶体管的阈值电压。
由于该薄膜晶体管是一个双栅极薄膜晶体管,因此阈值电压VT由第二栅极和第一栅极这两部分形成的阈值电压组成,即VT=VT0+VPG。在该公式中,VT0是第二栅极形成的阈值电压,该阈值电压由第二栅极(即图1中的栅极20)的设计参数和工艺制程决定;VPG是第一栅极(即图1中的压电层70)形成的阈值电压,VPG和压电层被施加的压力有关,即:
在以上公式中,Ctop是第一绝缘层的寄生电容,d33是压电层的压电系数并且由压电层材料本身决定,F是压电层被施加的压力。
从以上关于IDS和VPG的公式可以看出,当薄膜晶体管在同样的VGS电压作用下并且源极和漏极之间的电压差(VDS)也保持不变时,压电层70被施加的压力不同,则源极和漏极之间的电流IDS也不同(根据以上公式可知,电流IDS随着压力F的增大而减小)。因此,通过检测IDS的大小,即可确定压电层是否被施加压力或者被施加的压力的大小。
例如,根据薄膜晶体管的源、漏极之间的电流值IDS确定压电层是否被施加压力或者被施加的压力的大小,可以通过将IDS转化为电压进行检测的方式实现。图3为本发明实施例提供的一种IDS检测电路的示意图。如图3所示,源极被施加电压VDD,漏极连接电阻R,在压力F的作用下,沟道电流IDS从漏极流出后流入电阻R,电压Vd=IDS*R,Vd经过运算放大器放大后得到Vout,之后Vout被输入处理器进行计算。通过计算值可建立Vout与压电层被施加的压力F之间的关系,从而确定出压力F的大小。
本发明的至少一个实施例还提供一种触控装置,如图4a和图4b所示,该触控装置包括多个以上任一实施例提供的薄膜晶体管100,并且该多个薄膜晶体管100的压电层70彼此间隔开。该触控装置包括的薄膜晶体管100可以形成薄膜晶体管阵列,在发生触摸的情况下,根据各薄膜晶体管100输出的源、漏极之间的电流可判断出被触摸的薄膜晶体管的位置以及触摸压力的大小,根据该被触摸的薄膜晶体管的位置可以得到触摸位置。
例如,为了判断出被触摸的薄膜晶体管的位置以实现触摸定位,薄膜晶体管的信号线的设置方式可以包括以下两种方式。
方式一:如图4a所示,本发明的至少一个实施例提供的触控装置还包括多条第一信号线81和多条第二信号线82;第一信号线81分别与多个薄膜晶体管100的源极51连接(如图4a所示,每个薄膜晶体管100的源极51连接一条第一信号线81);第二信号线82分别与多个薄膜晶体管100的漏极52连接(如图4a所示,每个薄膜晶体管100的漏极52连接一条第二信号线82),第二信号线82与第一信号线81的延伸方向相交。在触摸检测过程中,例如,可以对如图4a所示的第一信号线81逐个施加源极电压以进行逐列扫描,当扫描到第j列第一信号线81时,检测该第一信号线81连接的多个薄膜晶体管100对应的第二信号线82的输出信号;若检测出该第一信号线81连接的第i行薄膜晶体管被触摸,则可确定出触摸位置的坐标为(i,j)。
方式二:如图4b所示,在薄膜晶体管100包括如图1所示的第二绝缘层30以及通过第二绝缘层30与有源层40间隔开的栅极20的情况下,本发明的至少一个实施例提供的触控装置还包括:多条第一信号线81,其分别与多个薄膜晶体管100的源极51连接;多条第二信号线82,其分别与多个薄膜晶体管100的漏极52连接;以及多条第三信号线83,其分别与多个薄膜晶体管100的栅极20连接(如图4b所示,每个薄膜晶体管100的栅极20连接一条第三信号线83),第三信号线83的延伸方向与第一信号线81或第二信号线82的延伸方向相交。例如,如图4b所示,第一信号线81与第二信号线82的延伸方向平行。在触摸检测过程中,例如,可以对第三信号线83进行逐行扫描,从而根据第三信号线83确定触摸位置的纵坐标,并根据第二信号线82确定触摸位置的横坐标,以得到触摸位置的坐标。
例如,本发明实施例可以应用于覆盖表面式(On cell)触控显示装置中。例如,如图5所示,本发明的至少一个实施例提供的触控装置还包括承载有多个像素320的阵列基板300以及与该阵列基板相对设置的对置基板200(例如,该对置基板200可以为如图1所示的承载基板10),该触控装置包括的多个薄膜晶体管100可以设置于对置基板200的远离阵列基板300的一侧。这样,在用户触摸该触控装置时,薄膜晶体管100的压电层距离用户的手指较近,有利于提高触摸定位效果。当然,本发明实施例提供的触控装置也可以应用于其他模式的触控显示装置中,只要能够实现利用压电层的压电效应并根据薄膜晶体管的位置实现触摸定位即可。
例如,本发明实施例提供的触控装置可以为液晶触控显示面板、电子纸、OLED(有机发光二极管)触控显示面板、手机、平板电脑、电视机、显示器、笔记本电脑、数码相框、导航仪等任何具有显示功能的产品或部件。
上述薄膜晶体管和利用其检测压力的方法、以及触控装置的实施例可以互相参照。此外,在不冲突的情况下,本发明的实施例及实施例中的特征可以相互组合。
以上所述仅是本发明的示范性实施方式,而非用于限制本发明的保护范围,本发明的保护范围由所附的权利要求确定。
Claims (13)
1.一种薄膜晶体管,包括:
有源层;
源极和漏极,所述源极和漏极彼此间隔并且都与所述有源层连接;
第一绝缘层,其与所述有源层层叠设置;以及
压电层,其与所述源极和所述漏极间隔开并且通过所述第一绝缘层与所述有源层间隔开。
2.根据权利要求1所述的薄膜晶体管,还包括栅极和第二绝缘层,其中,所述第二绝缘层将所述栅极与所述有源层间隔开,并且在垂直于所述有源层的方向上,所述第二绝缘层和所述第一绝缘层分别设置于所述有源层的相对的两侧。
3.根据权利要求1所述的薄膜晶体管,其中,在垂直于所述有源层的方向上,所述第一绝缘层设置于所述源极和漏极所在层与所述压电层之间。
4.根据权利要求1所述的薄膜晶体管,其中,在从所述源极到所述漏极的方向上,所述压电层的尺寸大于或等于所述源极和所述漏极之间的距离。
5.根据权利要求1至4中任一项所述的薄膜晶体管,其中,在所述压电层被施加压力的情况下,所述压电层被配置为所述薄膜晶体管的栅极。
6.根据权利要求1至4中任一项所述的薄膜晶体管,还包括承载所述有源层、源极、漏极、第一绝缘层和压电层的承载基板,其中,所述压电层设置于所述有源层的远离所述承载基板的一侧。
7.根据权利要求6所述的薄膜晶体管,其中,所述压电层位于所述源极和所述漏极所在层的远离所述有源层的一侧。
8.根据权利要求1至4中任一项所述的薄膜晶体管,其中,所述压电层的材料包括柔性压电材料。
9.根据权利要求1至4中任一项所述的薄膜晶体管,其中,所述压电层的材料包括高分子压电材料。
10.一种利用权利要求1至9中任一项所述的薄膜晶体管检测压力的方法,包括:
检测所述薄膜晶体管的源极和漏极之间的电流值;以及
根据所述电流值判断所述薄膜晶体管的压电层是否被施加压力或者所述压电层被施加的压力的大小。
11.一种触控装置,包括多个根据权利要求1或3或4所述的薄膜晶体管,其中,所述多个薄膜晶体管的压电层彼此间隔开。
12.根据权利要求11所述的触控装置,还包括:
多条第一信号线,其分别与所述多个薄膜晶体管的源极连接;以及
多条第二信号线,其分别与所述多个薄膜晶体管的漏极连接,其中,所述第二信号线与所述第一信号线的延伸方向相交。
13.根据权利要求11所述的触控装置,其中,
所述薄膜晶体管还包括第二绝缘层以及栅极,所述第二绝缘层设置于所述有源层上,所述栅极通过所述第二绝缘层与所述有源层间隔开;
所述触控装置还包括:
多条第一信号线,其分别与所述多个薄膜晶体管的源极连接;
多条第二信号线,其分别与所述多个薄膜晶体管的漏极连接;以及
多条第三信号线,其分别与所述多个薄膜晶体管的栅极连接,其中,所述第三信号线的延伸方向与所述第一信号线或所述第二信号线的延伸方向相交。
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CN107462350A (zh) * | 2017-08-17 | 2017-12-12 | 京东方科技集团股份有限公司 | 一种压电传感器、压力检测装置、制作方法及检测方法 |
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WO2018233280A1 (zh) * | 2017-06-23 | 2018-12-27 | 京东方科技集团股份有限公司 | 阵列基板、其制作方法、显示面板及显示装置 |
CN110021670A (zh) * | 2017-12-21 | 2019-07-16 | 天马日本株式会社 | 静电感测装置 |
CN110943156A (zh) * | 2019-12-24 | 2020-03-31 | 中山大学 | 一种基于压电材料的压力传感器及制备方法 |
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CN108227993B (zh) * | 2018-01-04 | 2021-01-26 | 京东方科技集团股份有限公司 | 压电检测电路、阵列、触摸面板和方法 |
US11157106B2 (en) * | 2018-11-13 | 2021-10-26 | Synaptics Incorporated | Piezoresistive sensing input device |
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CN108447433A (zh) * | 2018-02-28 | 2018-08-24 | 厦门天马微电子有限公司 | 曲面显示面板及其应力检测及电压调节方法 |
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