CN106312697B - A kind of processing method of high-precision rectangular optical wedge - Google Patents
A kind of processing method of high-precision rectangular optical wedge Download PDFInfo
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- CN106312697B CN106312697B CN201610912526.6A CN201610912526A CN106312697B CN 106312697 B CN106312697 B CN 106312697B CN 201610912526 A CN201610912526 A CN 201610912526A CN 106312697 B CN106312697 B CN 106312697B
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- wedge
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- face shape
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of processing methods of high-precision rectangular optical wedge, are analyzed by the interferometry for carrying out transmission plane shape and the angle of wedge to wedge to be processed, calculate equivalent face shape error；The precision of the transmission surface figure accuracy and the angle of wedge of completing wedge using numerical control processing technology process meets index request.The present invention solves in rectangular optical wedge process, the problem for causing to be difficult to control through face shape and the angle of wedge since its length and width is bigger；And compared with traditional monolithic processing method, it is not necessarily to special tooling, to improve processing efficiency and reduce processing cost, effectively raises wedge processing efficiency, and realizes the high-precision processing for transmiting surface figure accuracy and angle of wedge precision to wedge.
Description
Technical field
The present invention relates to optical manufacturing fields, and in particular to a kind of processing method of high-precision rectangular optical wedge.
Background technique
The working face of refracting prisms is known as plane of refraction, and the intersection of 2 plane of refraction claims refracting edge, adjacent plane of refraction
Angle is known as refracting angle, and refracting prisms when refracting angle very little are known as wedge, realizes optical path using the refractiveness of prism
Deviation provides different Angle Position light sources to realize.Because it is in optical maser wavelength tuning, aberration control, holography, laser facula tune
It is whole etc. to have important use and be widely studied.Due to the big spy of the accuracy height and freedom degree of wedge birefringence photocontrol
Point is used in tracking successively and is visited with guidance system, laser radar system, the test macro of laser satellite-to-satellite communication, OCT scan
In examining system and Laser Scanning Confocal Microscope system.Therefore, in order to realize these applications, need to guarantee the high-precision processing of the angle of wedge,
To realize the accurate control of wedge birefringence light.
Traditional wedge angle of wedge processing is generally divided into following two:
(1) key groove is ground with directional light rubber cushion plate.This method is mainly ground out needed for a part on mirror disk
The key groove wanted.The first face first can be polished by conventional method when processing, F-number should ensure that optical cement and wedge-shaped angular accuracy.And
When processing the second face, key groove required for polishing out using the first face of optical cement, schematic diagram is shown in Fig. 1.
(2) key groove is ground with Wedge gripping.The characteristics of this processing method is part after utilizing part and fixture combination
The completion angle of wedge and the relationship of angle of wedge alternate interior angle each other of fixture processed, after part and fixture optical cement, grind off excess portion
Point, so that part be made to reach required key groove.For high-precision wedge, glass fixture, schematic diagram are generallyd use
See Fig. 2.First with the method for processing general parallel plane mirror, the first face is thrown, then utilizes the face and fixture optical cement composition one
Body, then assembly optical cement is processed on directional light rubber cushion plate, when processing, answer strict control parallel error, while passing through modification
Aperture come guarantee the angle of wedge the second grade within precision.
Both the above method, although high-precision wedge can be processed, both in circular wedge-shaped mirrors.It is right
In with large scale, larger length and width ratio, especially longitudinal direction are that can not be applicable in for the rectangular optical wedge of micro- angle of wedge.And it uses
Separator processing rectangular optical wedge, although can obtain higher single side surface figure accuracy, it is difficult to ensure that its penetrate surface figure accuracy with
And angle of wedge precision, it more difficult to guarantee the direction of the angle of wedge.
Summary of the invention
The purpose of the invention is to provide a kind of processing methods of rectangular optical wedge, solve rectangular optical wedge process
In, the problem uncontrollable through face shape and the angle of wedge is caused since its length and width is bigger；And compared with traditional monolithic processing method,
Without special tooling, to improve processing efficiency and reduce processing cost.
To realize the above-mentioned technical purpose, the present invention is surveyed by the interference for carrying out transmission plane shape and the angle of wedge to wedge to be processed
Amount analysis, calculates equivalent face shape error by software；Use numerical control processing technology process complete wedge transmission surface figure accuracy with
And the precision of the angle of wedge meets index request.Processing flow includes the following steps, referring to Fig. 1:
The measurement that step 1) carries out transmission plane shape and the angle of wedge to wedge to be processed is analyzed, and is specifically interfered using laser plane
Instrument, with reference to the measurement method in " Angle Measurement MetroPro Application ", measurement obtains the saturating of wedge
Face shape and the angle of wedge are penetrated, analysis obtains Wedge X and the Wedge Y of rectangle wedge, and wherein Wedge X is wedge in length side
To observed dip amount, wherein Wedge Y be wedge width direction observed dip amount, i.e., respectively the angle of wedge of wedge and
Tower is poor.
Step 2) judges whether face shape error reaches processing request, terminates to process if reaching requirement, otherwise according to measurement
Resulting transmission plane shape and the angle of wedge, calculate equivalent face shape error.
Wedge is fixed on numerical control machine tool center by step 3), is carried out according to the equivalent face shape error of wedge to wedge
Polishing；
After polishing cycle of step 4), return step 1).
Wherein, equivalent face shape error calculation method is as follows:
W=WT+WX+WY,
High-precision wedge processing method according to claim 1, which is characterized in that described calculates the equivalent of wedge
Face shape error W, formula are as follows:
W=WT+WX+WY,
In formula, WTFor the actual transmission plane shape of wedge that interferometer measures, WX=LL × tan (Wedge X-Wedge X0),
WY=WW × tan (Wedge Y-Wedge Y0)；Wherein, LL be wedge length, WW be wedge width, unit be μm,
Wedge X is observed dip amount of the wedge in length direction, and Wedge Y is observed dip amount of the wedge in width direction；Wedge
X0 is theoretical tilt amount of the wedge in length direction, and Wedge Y0 is wedge in the theoretical tilt amount of width direction, and unit is the second.
The advantages of the invention patent, is:
(1) present invention employs numerical control processing modes, do not need complicated and high-precision frock clamp, reduce and be processed into
This.
(2) face equivalent needed for numerical control processing is calculated according to resulting transmission plane shape and the angle of wedge is measured in the present invention
Shape error.
(3) angle of wedge error and tower difference are introduced into compared with traditional processing method by the present invention using numerically-controlled machine tool
It crosses in face shape error, equivalent by processing rectangular optical wedge penetrates face shape error, is completed at the same time the processing of the transmission plane shape of wedge
And the high-accuracy processing of the angle of wedge, thus, improve the processing efficiency of wedge.
Detailed description of the invention
Fig. 1 is the schematic diagram of traditional wedge angle of wedge processing, and wherein left figure is front view, and right figure is cross section view.
Fig. 2 is the Wedge gripping schematic diagram for grinding key groove, and wherein left figure is the front view and cross section view of a kind of fixture,
Right figure is the front view and cross section view of another fixture.
Fig. 3 is the flow process chart of high-precision rectangular optical wedge processing.
Fig. 4 is the interferometry schematic diagram of high-precision rectangular optical wedge.
Specific embodiment
Below with reference to the accompanying drawings and in conjunction with the embodiments the invention will be further described, but guarantor of the invention should not be limited with this
Protect range.
Processing instance explanation:
1. material: fused quartz JGS1
2. overall dimensions: bore 400mm × 60mm, tolerance are -0.1mm to -0.2mm, effective clear aperture 380mm ×
50mm, thickness 15mm；
3. transmission wavefront PV is less than 0.2 λ (@633nm)；
4. wedge angle1It is 3 " -5 "；
5. tower difference π < 0.4 ".
It is shown in Figure 3, a kind of processing method of high-precision rectangular optical wedge, comprising the following steps:
The measurement that step 1) carries out transmission plane shape and the angle of wedge to wedge to be processed is analyzed, and Zygo laser plane is specifically used
Interferometer, referring to fig. 4, with reference to the measurement method in " Angle Measurement MetroPro Application ", measurement
The transmission plane shape and the angle of wedge of wedge are obtained, obtains Wedge X=2.39 " and the Wedge Y=1.11 " of rectangle wedge, i.e.,
Wedge angle1And tower difference π.
Step 2) judges whether face shape error reaches processing request, terminates to process if reaching requirement, otherwise according to measurement
Resulting transmission plane shape and the angle of wedge calculate equivalent face shape error, i.e., according to index, enable Wedge X0=4 ", Wedge Y0=
0, then Wedge Angle Deviation is Wedge X-Wedge X0=-1.61 ", and tower difference deviation is Wedge Y-Wedge Y0=1.11 ", then counts
Calculation obtains the equivalent face shape error of wedge, exports as data format needed for machine tooling.
Wedge is fixed on numerical control machine tool center by step 3), is carried out according to the equivalent face shape error of wedge to wedge
Polishing；
After polishing cycle of step 4), return step 1).
Final processing result are as follows: transmission wavefront PV is 0.136 λ (@633nm), wedge angle1It is 3.2 ", tower difference π is 0.11 ".
Claims (1)
1. a kind of processing method of high-precision rectangular optical wedge, which comprises the following steps:
Step 1) carries out the measurement of transmission plane shape and the angle of wedge using laser plane interferometer to wedge to be processed, obtains to be processed
The transmission plane shape and the angle of wedge of wedge obtain the longitudinal direction angle of wedge and the short side direction angle of wedge of rectangle wedge after analysis；
Step 2) judges whether face shape error reaches processing request, terminates to process if reaching requirement, otherwise according to measurement gained
Transmission plane shape and the angle of wedge, calculate the equivalent face shape error W of wedge, formula is as follows:
W=WT+WX+WY,
In formula, WTFor the actual transmission plane shape of wedge that interferometer measures, WX=LL × tan (Wedge X-Wedge X0), WY=
WW×tan(Wedge Y-Wedge Y0)；Wherein, LL be wedge length, WW be wedge width, unit be μm, Wedge X
It is wedge in the observed dip amount of length direction, Wedge Y is observed dip amount of the wedge in width direction；Wedge X0 is wedge
Plate is in the theoretical tilt amount of length direction, and Wedge Y0 is theoretical tilt amount of the wedge in width direction, and unit is degree；
Wedge is fixed on numerical control machine tool center by step 3), is thrown according to the equivalent face shape error of wedge to wedge
Light；
After polishing cycle of step 4), return step 1).
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| CN201610912526.6A CN106312697B (en) | 2016-10-20 | 2016-10-20 | A kind of processing method of high-precision rectangular optical wedge |
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| CN201610912526.6A CN106312697B (en) | 2016-10-20 | 2016-10-20 | A kind of processing method of high-precision rectangular optical wedge |
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| CN106312697B true CN106312697B (en) | 2019-04-19 |
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| CN102770253A (en) * | 2010-03-02 | 2012-11-07 | 微软公司 | Fabrication of an optical wedge |
| CN103769975A (en) * | 2014-01-07 | 2014-05-07 | 苏州大学 | Marking method for optical machining polishing |
| CN103791858A (en) * | 2014-01-26 | 2014-05-14 | 中国人民解放军国防科学技术大学 | Common light path laser interference device for small-angle measurement and measuring method |
| CN104459840A (en) * | 2014-10-29 | 2015-03-25 | 中国航空工业集团公司洛阳电光设备研究所 | Optical wedge and machining method |
| CN104772661A (en) * | 2015-04-01 | 2015-07-15 | 中国科学院上海光学精密机械研究所 | Full-band high-precise machining method for aspheric surface optical element |
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