CN106312697A - High-precision rectangular optical wedge machining method - Google Patents
High-precision rectangular optical wedge machining method Download PDFInfo
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- CN106312697A CN106312697A CN201610912526.6A CN201610912526A CN106312697A CN 106312697 A CN106312697 A CN 106312697A CN 201610912526 A CN201610912526 A CN 201610912526A CN 106312697 A CN106312697 A CN 106312697A
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- Prior art keywords
- wedge
- angle
- precision
- machining
- rectangular optical
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
Abstract
The invention discloses a high-precision rectangular optical wedge machining method. The high-precision rectangular optical wedge machining method comprises the steps that interferometry analysis is conducted for the transmission surface shape and the wedge angle of a wedge plate to be machined, so that equivalent surface shape errors are worked out; and the precision of the transmission surface shape and the precision of the wedge angle of the wedge plate are made to meet index requirements through a numerical-control machining technological process. By the adoption of the high-precision rectangular optical wedge machining method, the problem that in the machining process of a rectangular optical wedge, the transmission surface shape and the wedge angle are difficult to control due to the fact that the length-width ratio of the rectangular optical wedge is large is solved; and compared with a traditional single-piece machining method, no special tool is needed, so that the machining efficiency is improved, the machining cost is reduced, the optical wedge machining efficiency is effectively improved, and high-precision machining for the transmission surface shape and the wedge angle of the optical wedge is achieved.
Description
Technical field
The present invention relates to optical manufacturing field, the processing method being specifically related to a kind of high accuracy rectangular optical wedge.
Background technology
The work surface of refracting prisms is referred to as plane of refraction, and the intersection of 2 plane of refraction claims refracting edge, adjacent plane of refraction
Angle is referred to as refracting angle, and refracting prisms when refracting angle is the least are referred to as wedge, utilizes the refrangibility of prism to realize light path
Deviation, thus realize providing different Angle Position light source.Because it is adjusted at optical maser wavelength tuning, aberration control, holography, laser facula
The aspect such as whole has important use to be widely studied.The spy that accuracy is high and degree of freedom is big due to wedge birefringence photocontrol
Point, it is used in tracking successively and is visited with guidance system, laser radar system, the test system of laser satellite-to-satellite communication, OCT scan
In examining system, and Laser Scanning Confocal Microscope system.Therefore, in order to realize these application, need to ensure the high accuracy processing of the angle of wedge,
To realize the accurate control of wedge birefringence light.
Traditional wedge angle of wedge is processed and is generally divided into following two:
(1) key groove is ground with directional light rubber cushion plate.Needed for this method mainly grinds out a part on mirror disk
The key groove wanted.Adding and first can polish first by conventional method man-hour, its F-number should ensure that optical cement and key groove precision.And
When processing second, available optical cement the first mirror polish goes out required key groove, and Fig. 1 is shown in by schematic diagram.
(2) key groove is ground with Wedge gripping.The feature of this processing method be utilize part and fixture combination after, part
The relation of the completion angle of wedge and the angle of wedge alternate interior angle each other of fixture be processed, when after part and fixture optical cement, grind off excess portion
Point, so that part reaches required key groove.For high-precision wedge, generally use glass fixture, schematic diagram
See Fig. 2.First by the method processing general parallel plane mirror, throw first, then utilize this face to form one with fixture optical cement
Body, then assembly optical cement is processed on directional light rubber cushion plate, add and should strictly control parallel error man-hour, simultaneously by amendment
Aperture ensures angle of wedge precision within second level.
Both the above method, although high-precision wedge can be processed, but be both in circular wedge-shaped mirrors.Right
In having large scale, high length to width aspect ratio, for especially long side direction is the rectangular optical wedge of micro-angle of wedge, it is impossible to be suitable for.And use
The rectangular optical wedge of separator processing, although can obtain higher one side surface figure accuracy, but it is difficult to ensure that its pass through surface figure accuracy with
And angle of wedge precision, it more difficult to ensure the direction of the angle of wedge.
Summary of the invention
It is an object of the invention to the processing method being to provide a kind of rectangular optical wedge, solve the rectangular optical wedge course of processing
In, owing to its length-width ratio is compared with causing greatly through face shape and the unmanageable problem of the angle of wedge；And compared with tradition monolithic processing method,
Without special tooling, thus improve working (machining) efficiency and reduce processing cost.
For realizing above-mentioned technical purpose, the present invention surveys by wedge to be processed carries out the interference of transmission plane shape and the angle of wedge
Component analysis, is gone out equivalence face shape error by computed in software；Use numerical control processing technology flow process complete the transmission surface figure accuracy of wedge with
And the precision of the angle of wedge meets index request.Work flow comprises the following steps, and sees Fig. 1:
Step 1) wedge to be processed is carried out the measurement analysis of transmission plane shape and the angle of wedge, concrete use laser plane to interfere
Instrument, with reference to the measuring method in " Angle Measurement MetroPro Application ", measures and obtains the saturating of wedge
Penetrating face shape and the angle of wedge, analyze the Wedge X and Wedge Y obtaining rectangle wedge, wherein Wedge X is that wedge is in length side
To observed dip amount, wherein Wedge Y be the wedge observed dip amount at width, the most respectively wedge the angle of wedge and
Tower is poor.
Step 2) judge whether face shape error reaches processing request, if reaching requirement, terminate processing, otherwise according to measurement
The transmission plane shape of gained and the angle of wedge, calculate the face shape error of equivalence.
Step 3) wedge is fixed in numerical control machine tool in the heart, according to the equivalent face shape error of wedge, wedge is carried out
Polishing；
Step 4) after a polishing cycle terminate, return step 1).
Wherein, equivalent face shape error calculation method is as follows:
W=WT+WX+WY,
High accuracy wedge processing method according to claim 1, it is characterised in that the described equivalence calculating wedge
Face shape error W, formula is as follows:
W=WT+WX+WY,
In formula, WTFor the transmission plane shape of the wedge reality that interferometer records, WX=LL × tan (Wedge X-Wedge X0),
WY=WW × tan (Wedge Y-Wedge Y0)；Wherein, LL is the length of wedge, and WW is the width of wedge, and unit is μm,
Wedge X is the wedge observed dip amount at length direction, and Wedge Y is the wedge observed dip amount at width；Wedge
X0 is the wedge theoretical tilt amount at length direction, and Wedge Y0 is the wedge theoretical tilt amount at width, and unit is the second.
The advantage of patent of the present invention is:
(1) present invention employs digital control processing mode, it is not necessary to complicated and high-precision frock clamp, reduce and be processed into
This.
(2) present invention is according to measuring the transmission plane shape of gained and the angle of wedge, is calculated the face of equivalence needed for digital control processing
Shape error.
(3) present invention utilizes Digit Control Machine Tool, compared with traditional processing method, angle of wedge error and tower difference is incorporated into
Cross in face shape error, by the equivalence of processing rectangular optical wedge through face shape error, complete the processing of the transmission plane shape of wedge simultaneously
And the high-accuracy processing of the angle of wedge, thus, improve the working (machining) efficiency of wedge.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of tradition wedge angle of wedge processing, and the most left figure is front view, and right figure is cross section view.
Fig. 2 is the Wedge gripping schematic diagram grinding key groove, and the most left figure is front view and the cross section view of a kind of fixture,
Right figure is front view and the cross section view of another kind of fixture.
Fig. 3 is the flow process chart of high accuracy rectangular optical wedge processing.
Fig. 4 is the interferometry schematic diagram of high accuracy rectangular optical wedge.
Detailed description of the invention
Below with reference to the accompanying drawings and in conjunction with the embodiments the invention will be further described, but should not limit the guarantor of the present invention with this
Protect scope.
Processing instance illustrates:
1. material: fused quartz JGS1
2. overall dimensions: bore 400mm × 60mm, tolerance be-0.1mm to-0.2mm, effective clear aperture 380mm ×
50mm, thickness 15mm；
3. transmission wavefront PV is less than 0.2 λ (@633nm)；
4. wedge angle1It is 3 "-5 "；
5. tower difference π < 0.4 ".
Shown in Figure 3, the processing method of a kind of high accuracy rectangular optical wedge, comprise the following steps:
Step 1) wedge to be processed is carried out the measurement analysis of transmission plane shape and the angle of wedge, concrete use Zygo laser plane
Interferometer, sees Fig. 4, with reference to the measuring method in " Angle Measurement MetroPro Application ", measures
Obtain transmission plane shape and the angle of wedge of wedge, obtain the Wedge X=2.39 of rectangle wedge " and Wedge Y=1.11 ", i.e.
Wedge angle1And tower difference π.
Step 2) judge whether face shape error reaches processing request, if reaching requirement, terminate processing, otherwise according to measurement
The transmission plane shape of gained and the angle of wedge calculate the face shape error of equivalence, i.e. according to index, make Wedge X0=4 ", Wedge Y0=
0, then Wedge Angle Deviation is Wedge X-Wedge X0=-1.61 ", tower difference deviation is Wedge Y-Wedge Y0=1.11 ", then count
Calculate the equivalent face shape error obtaining wedge, be output as the data form needed for machine tooling.
Step 3) wedge is fixed in numerical control machine tool in the heart, according to the equivalent face shape error of wedge, wedge is carried out
Polishing；
Step 4) after a polishing cycle terminate, return step 1).
Final processing result is: transmission wavefront PV is 0.136 λ (@633nm), wedge angle1It is 3.2 ", tower difference π is 0.11 ".
Claims (2)
1. the processing method of a high accuracy rectangular optical wedge, it is characterised in that comprise the following steps:
Step 1) use laser plane interferometer that wedge to be processed carries out the measurement of transmission plane shape and the angle of wedge, obtain to be processed
The transmission plane shape of wedge and the angle of wedge, obtain the long side direction angle of wedge and the short side direction angle of wedge of rectangle wedge after analysis；
Step 2) judge whether face shape error reaches processing request, if reaching requirement, terminate processing, otherwise according to measuring gained
Transmission plane shape and the angle of wedge, calculate wedge equivalent face shape error；
Step 3) wedge is fixed in numerical control machine tool in the heart, according to the equivalent face shape error of wedge, wedge is thrown
Light；
Step 4) after a polishing cycle terminate, return step 1).
High accuracy wedge processing method the most according to claim 1, it is characterised in that the described equivalent face calculating wedge
Shape error W, formula is as follows:
W=WT+WX+WY,
In formula, WTFor the transmission plane shape of the wedge reality that interferometer records, WX=LL × tan (Wedge X-Wedge X0), WY=
WW×tan(Wedge Y-Wedge Y0)；Wherein, LL is the length of wedge, and WW is the width of wedge, and unit is μm, Wedge X
For wedge in the observed dip amount of length direction, Wedge Y is the wedge observed dip amount at width；Wedge X0 is wedge
Plate is in the theoretical tilt amount of length direction, and Wedge Y0 is the wedge theoretical tilt amount at width, and unit is degree.
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| CN201610912526.6A CN106312697B (en) | 2016-10-20 | 2016-10-20 | A kind of processing method of high-precision rectangular optical wedge |
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| CN201610912526.6A CN106312697B (en) | 2016-10-20 | 2016-10-20 | A kind of processing method of high-precision rectangular optical wedge |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101088705A (en) * | 2007-02-14 | 2007-12-19 | 长春设备工艺研究所 | Efficient numerically controlled polishing process and apparatus for great aperture aspherical optical elements |
| CN102770253A (en) * | 2010-03-02 | 2012-11-07 | 微软公司 | Fabrication of an optical wedge |
| CN103308281A (en) * | 2013-05-30 | 2013-09-18 | 中国科学院上海光学精密机械研究所 | Detection device and detection method for wedge-shaped lens |
| CN103630073A (en) * | 2013-11-11 | 2014-03-12 | 中国科学院上海光学精密机械研究所 | Wedge-shaped lens detecting and correcting method |
| CN103769975A (en) * | 2014-01-07 | 2014-05-07 | 苏州大学 | Marking method for optical machining polishing |
| CN103791858A (en) * | 2014-01-26 | 2014-05-14 | 中国人民解放军国防科学技术大学 | Common light path laser interference device for small-angle measurement and measuring method |
| CN104459840A (en) * | 2014-10-29 | 2015-03-25 | 中国航空工业集团公司洛阳电光设备研究所 | Optical wedge and machining method |
| CN104772661A (en) * | 2015-04-01 | 2015-07-15 | 中国科学院上海光学精密机械研究所 | Full-band high-precise machining method for aspheric surface optical element |
-
2016
- 2016-10-20 CN CN201610912526.6A patent/CN106312697B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101088705A (en) * | 2007-02-14 | 2007-12-19 | 长春设备工艺研究所 | Efficient numerically controlled polishing process and apparatus for great aperture aspherical optical elements |
| CN102770253A (en) * | 2010-03-02 | 2012-11-07 | 微软公司 | Fabrication of an optical wedge |
| CN103308281A (en) * | 2013-05-30 | 2013-09-18 | 中国科学院上海光学精密机械研究所 | Detection device and detection method for wedge-shaped lens |
| CN103630073A (en) * | 2013-11-11 | 2014-03-12 | 中国科学院上海光学精密机械研究所 | Wedge-shaped lens detecting and correcting method |
| CN103769975A (en) * | 2014-01-07 | 2014-05-07 | 苏州大学 | Marking method for optical machining polishing |
| CN103791858A (en) * | 2014-01-26 | 2014-05-14 | 中国人民解放军国防科学技术大学 | Common light path laser interference device for small-angle measurement and measuring method |
| CN104459840A (en) * | 2014-10-29 | 2015-03-25 | 中国航空工业集团公司洛阳电光设备研究所 | Optical wedge and machining method |
| CN104772661A (en) * | 2015-04-01 | 2015-07-15 | 中国科学院上海光学精密机械研究所 | Full-band high-precise machining method for aspheric surface optical element |
Non-Patent Citations (3)
| Title |
|---|
| 《光学零件工艺手册》编写组: "《光学零件工艺手册》", 30 April 1977 * |
| 邵平等: "高功率激光装置终端楔形透镜的测量与调试", 《中国激光》 * |
| 马春桃等: "斜入射法检测平面反射镜的面形误差", 《激光与光电子进展》 * |
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