CN106291142B - Piezoelectric ceramic and piezoelectric semiconductor test piece diversity polarization experimental system - Google Patents
Piezoelectric ceramic and piezoelectric semiconductor test piece diversity polarization experimental system Download PDFInfo
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- CN106291142B CN106291142B CN201610830844.8A CN201610830844A CN106291142B CN 106291142 B CN106291142 B CN 106291142B CN 201610830844 A CN201610830844 A CN 201610830844A CN 106291142 B CN106291142 B CN 106291142B
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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- G01R29/22—Measuring piezoelectric properties
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Abstract
The piezoelectric ceramic and piezoelectric semiconductor test piece diversity polarization experiment system comprises an installation frame and a polarization box, wherein a multi-channel high-voltage power supply and a motor reducer are arranged on the installation frame, an opening is formed in the top of the polarization box, a lifting mechanism located in the polarization box is connected to the main shaft of the motor reducer in a transmission manner, a multi-station clamping device arranged on the lifting mechanism is arranged in the polarization box, the multi-station clamping device is located below the opening, a box cover used for plugging the opening is arranged on the multi-station clamping device, and replaceable polarization pressure heads with different structures are arranged in the multi-station clamping device; a thermocouple is inserted in the polarization box. The invention can realize the simultaneous polarization of a plurality of piezoelectric ceramic and piezoelectric semiconductor test pieces, and can apply different voltages to the piezoelectric ceramic and piezoelectric semiconductor test pieces respectively, thereby ensuring better polarization consistency, greatly reducing experimental errors caused by environmental condition changes, and fully improving the efficiency, safety and consistency of preparing the piezoelectric ceramic and piezoelectric semiconductor test pieces in a laboratory.
Description
Technical Field
The invention belongs to the technical field of polarization of piezoelectric ceramic materials, and particularly relates to a diversity polarization experiment system for piezoelectric ceramic and piezoelectric semiconductor test pieces.
Background
The piezoelectric ceramic is a functional ceramic material capable of converting mechanical energy and electric energy into each other, is widely applied to high and new technical fields such as mobile communication, satellite broadcasting, electronic equipment, instruments and meters, biology, aerospace and the like, and is an indispensable modern key material at present. With the rapid development of scientific technology, many electronic and electrical devices have higher and higher requirements on the selected piezoelectric devices, and the piezoelectric materials are required to have greater adaptability in the aspects of use range and use environment, so that it is urgent to develop novel piezoelectric materials with higher curie temperature, larger piezoelectric constant and higher mechanical strength. Japan and the united states are major production countries of high-grade electronic components, and almost all of japan major companies and many of europe and the united states of america have put a great deal of effort into the development of piezoelectric ceramics.
With the rapid development of piezoelectric materials and semiconductor material technology, a semiconductor material having piezoelectric properties, i.e., a piezoelectric semiconductor, such as GaN, AlN, ZnO, etc., has been discovered. The piezoelectric semiconductor has the double physical characteristics of the piezoelectric material and the semiconductor material, and also has the advantages of high thermal conductivity, high electronic saturation, high drift velocity, large critical breakdown voltage and the like, so the piezoelectric semiconductor becomes an ideal material for developing high-frequency high-power, high-temperature-resistant and anti-radiation semiconductor microelectronic devices and circuits, and has great importance in the fields of aerospace, military, satellite communication, automobiles, oil exploitation and the like, and has wide application prospect.
The piezoelectric performance is a crucial parameter of the piezoelectric ceramic and the piezoelectric semiconductor device, and the piezoelectric performance is directly related to the polarization process of the piezoelectric material, so the most important step for improving the piezoelectric performance of the piezoelectric ceramic and the piezoelectric semiconductor device is to develop the polarization technology of the piezoelectric ceramic and the piezoelectric semiconductor material. The research on the novel piezoelectric ceramic and semiconductor elements requires a great deal of tests on different materials and processes, and the characteristics of the elements are researched through the test results. However, unlike large-scale industrial production, the test pieces are polarized under laboratory conditions, the thickness and the material of each test piece may be different, each test piece needs to select proper electric field intensity, polarization time and polarization temperature to enable the test piece to have the best performance, moreover, the piezoelectric ceramic is a dielectric material, the piezoelectric semiconductor material has conductivity, and the polarization of the piezoelectric ceramic and the polarization of the piezoelectric semiconductor material are greatly different, so that according to conventional setting, high voltage required by polarization cannot be applied due to the conduction of the piezoelectric semiconductor, the internal field intensity of the material cannot reach the polarization condition, the electric domain is difficult to deflect, and the polarization cannot reach saturation. Therefore, the development of the diversified polarization experiment system has very important scientific significance and practical value, and all piezoelectric materials with different sizes and shapes requiring different polarization conditions can be synchronously polarized.
The polarization treatment of the test piece has two modes, one mode is silicon oil polarization, and the polarization process is 90-150 ℃, 2-4 KV/mm and 2-4 min; one is air polarization, the polarization voltage is generally several times of a coercive field, and the polarization time is 10-20 min. After polarization, the test piece should be placed for 24h and then subjected to experimental test.
The purpose of polarization is to deflect the domain to achieve saturation polarization strength, the domain is deflected quickly under high voltage, and considering that the semiconductor is easy to break down under high voltage, generally, the polarization voltage is reduced, the polarization time is prolonged, the polarization temperature is increased, and the deflection of the domain can be promoted under high temperature. Whether polarization or air polarization in silicone oil depends on polarization voltage, and when the polarization voltage is higher, air can be punctured to cause surface discharge, so that a sample is damaged, and the silicone oil polarization is generally adopted.
The crystal grains in the piezoelectric material have a plurality of spontaneous polarization electric domains, when no external electric field is applied, the electric domains are randomly distributed in the crystal, the polarization effects of the electric domains are mutually counteracted, the polarization intensity in the piezoelectric ceramic is zero, and therefore the original piezoelectric ceramic material and the original piezoelectric semiconductor material are neutral and do not have piezoelectric properties. When an external electric field is applied to the test piece, the polarization direction of the electric domain rotates and tends to be arranged along the direction of the external electric field, so that the material is polarized. The stronger the external electric field is, more electric domains are more completely turned to the direction of the external electric field, when the intensity of the external electric field is large enough to make the polarization of the material reach the saturation degree, namely, all the electric domain polarization directions are orderly consistent with the external electric field direction, after the external electric field is removed, the polarization direction of the electric domains is basically unchanged, and then the material has the piezoelectric property, namely, the polarization process of the piezoelectric ceramic. The polarization experiment system is a device for completing the polarization process of the material with piezoelectric property.
The prior piezoelectric material polarization device has the following technical problems in the working and using process: 1. the novel piezoelectric semiconductor material test piece cannot be polarized; 2. only one test piece can be clamped at a time, so that the polarization efficiency is low; 3. the chuck and the clamping piece of the polarization device can not be replaced, so that the shape and the size of the piezoelectric ceramic test piece are greatly limited, and a certain experimental error is generated; 4. the temperature change of the silicone oil contained in the closed container (polarization box) is large, the heat preservation effect is poor, the temperature is not easy to control, and the polarization effect is poor; 5. because the voltage of the polarization operation is high voltage, the piezoelectric ceramic test piece is put into or taken out of the closed container by manual operation, and the potential safety hazard is large.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides a piezoelectric ceramic and piezoelectric semiconductor test piece diversity polarization experiment system which can clamp a plurality of piezoelectric ceramic test pieces at one time and polarize the piezoelectric ceramic test pieces simultaneously, is suitable for clamping piezoelectric ceramic test pieces with different shapes and sizes, has small error and controllable silicon oil temperature, can automatically take and place the test pieces and is safe and reliable.
In order to solve the technical problems, the invention adopts the following technical scheme: the piezoelectric ceramic and piezoelectric semiconductor test piece diversity polarization experiment system comprises an installation frame and a polarization box, wherein a multi-channel high-voltage power supply and a motor reducer are arranged on the installation frame, an opening is formed in the top of the polarization box, a main shaft of the motor reducer is connected with a lifting mechanism located in the polarization box in a transmission manner, a multi-station clamping device arranged on the lifting mechanism is arranged in the polarization box, the multi-station clamping device is located below the opening, and a box cover used for blocking the opening is arranged on the multi-station clamping device; a thermocouple is inserted in the polarization box.
The lifting mechanism comprises a lead screw and a guide pillar which are arranged along the vertical direction, the lead screw and the guide pillar are respectively arranged on the left side and the right side in the polarization box, the upper end of the lead screw is coaxially provided with an optical axis, the upper end of the optical axis penetrates through the top of the polarization box and is in transmission connection with a main shaft of a motor speed reducer through a coupler, the left side of the bottom in the polarization box is provided with a bearing seat, the lower end of the lead screw is rotatably connected in the bearing seat, the upper end of the guide pillar is fixedly connected with the top of the polarization box through a mounting bolt, and the lower end of the guide pillar is fixedly connected with the side wall of the polarization box through a fixed connecting piece; the screw rod is in threaded connection with a nut, the guide pillar is sleeved with a horizontally arranged support plate in a penetrating manner, and the left side of the support plate is fixedly connected with the right side of the nut;
the multi-station clamping device is fixedly arranged on the supporting plate.
The multi-station clamping device comprises a lower polytetrafluoroethylene insulation board and an upper polytetrafluoroethylene insulation board which are horizontally arranged, the upper polytetrafluoroethylene insulation board is fixedly arranged on the upper surface of the supporting board through a connecting bolt, a copper plate is arranged on the upper surface of the upper polytetrafluoroethylene insulation board, a negative terminal is arranged on one side edge of the copper plate, and the lower surface of the upper polytetrafluoroethylene insulation board is fixedly connected with the upper surface of the copper plate through at least two connecting posts; at least three through holes are uniformly formed in the upper polytetrafluoroethylene insulation plate, and a positive elastic pressing device in top press fit with the upper surface of the copper plate penetrates through each through hole.
Anodal elasticity collet includes conducting rod and polarization pressure head, the conducting rod is worn to establish in the through-hole, the terminal surface is equipped with the bottom under the conducting rod, the equal open recess in left side and right side, polarization pressure head is along controlling the direction interference fit in the recess, the conducting rod lower extreme is equipped with along the fore-and-aft direction level and polarizes pressure head and the anti-loosening pin of conducting rod series connection as an organic whole, the cover is equipped with the spring on the conducting rod, spring upper end and lower extreme respectively with last polytetrafluoroethylene insulation board lower surface and polarize pressure head roof pressure cooperation, polarize pressure head lower surface is equipped with the silvered film, conducting rod upper end lateral part is equipped with the spacing ring and is located the handle of spacing ring top, the conducting rod up end is connected with the anodal terminal with the axial.
The polarization pressure head is divided into two forms according to polarization materials; if the polarization test piece is made of piezoelectric ceramic materials, the polarization pressure head is made of conventional brass alloy according to the design size; if the polarization test piece is made of piezoelectric semiconductor materials, a layer of polytetrafluoroethylene film is arranged on the bottom surface of the polarization pressure head, the upper surface of the polytetrafluoroethylene film is attached to the bottom surface of the polarization pressure head, and the lower surface of the polytetrafluoroethylene film is in direct contact with the polarization materials.
The case lid is including being the lid of cartridge type and being annular clamp plate, and lid lower extreme inner wall glues as an organic whole with last polytetrafluoroethylene insulation board edge all around, and the contact of lid outer wall and open-ended inner wall, clamp plate level set up, lid upper end border and the inner circle fixed connection of clamp plate, and the clamp plate lower surface is equipped with the polarization case upper surface pressfitting complex seal ring around the opening, and the seal ring lower surface is equipped with pressure sensor.
And a grounding terminal is arranged at the lower part of the outer side wall of the polarization box.
The polarization box is internally provided with a barrel, the upper end and the lower end edge of the barrel are respectively fixedly connected with the lower surface of the top and the lower surface of the bottom of the polarization box, an annular cavity is arranged between the outer wall of the barrel and the inner side wall of the polarization box, and heat-preservation asbestos is filled in the annular cavity.
By adopting the technical scheme, the specific working process of the invention is as follows: firstly, a positive terminal and a negative terminal in the invention are respectively connected to a multi-channel high-voltage power supply through high-voltage leads, silicone oil is contained in a polarization box body and is heated, and the temperature of the silicone oil is monitored by a thermocouple and is kept at 80-180 ℃; the polarization clamping mechanism is provided with pressure heads in two modes according to different piezoelectric ceramic or piezoelectric semiconductor materials, the corresponding position of the pressure head is selected according to the polarization materials during clamping, a handle on an anode elastic pressing device is held by a hand to be pulled upwards, the polarization pressure head is pulled upwards to overcome the elasticity of a spring and leave the copper plate, then a piezoelectric ceramic or piezoelectric semiconductor test piece is placed on the copper plate, the handle is loosened, and the polarization pressure head presses the piezoelectric ceramic test piece onto the copper plate under the action of the elasticity of the spring; then, in this operation mode, a plurality of piezoelectric ceramic test pieces and piezoelectric semiconductor test pieces are respectively clamped between the polarization indenter and the copper plate. Then starting a motor reducer, wherein a main shaft of the motor reducer drives a lead screw to rotate through a coupler, a nut in threaded connection on the lead screw is limited by a support plate and a guide pillar, the nut moves downwards along the lead screw, and the guide pillar plays a good role in balancing and guiding up and down movement; the downstream of backup pad, drive multistation clamping device, piezoceramics test piece or piezoelectric semiconductor test piece and case lid downstream, the piezoceramics test piece submerges in silicon oil, up to the seal ring of clamp plate lower surface and the upper surface contact of polarization case, seal ring plays sealed open-ended effect, in addition, the pressure sensor that sealed pad lower surface set up, when seal ring roof pressure polarization case upper surface down, when pressure reaches the setting value, pressure sensor gives the controller with signal transmission, the controller orders motor reducer stall, the backup pad, multistation clamping device and piezoceramics test piece also stop the downstream. Then, the positive terminal and the negative terminal are charged with high voltage to perform polarization operation. In addition, because the multi-station clamping device comprises a plurality of positive elastic compactors, namely, the multi-station clamping device can simultaneously carry out polarization operation on a plurality of piezoelectric ceramic test pieces at one time, different voltages can be applied to different piezoelectric ceramic test pieces and piezoelectric semiconductor test pieces respectively, and the polarization operation of different voltages can be carried out on the piezoelectric ceramic test pieces with different structural shapes.
The corresponding pressure head is selected according to different polarization materials, the conventional pressure head is selected for polarization of the piezoelectric ceramic material, a polytetrafluoroethylene film with the thickness of 0.5 mm-1 mm is added on the bottom surface of the polarization pressure head according to the size and the shape of the bottom surface of the polarization pressure head for polarization of the piezoelectric semiconductor material, the size of the film is consistent with that of the bottom surface of the polarization pressure head, and the film is flat and smooth and is in direct contact with a test piece.
In summary, the invention has the following beneficial technical effects:
1. according to the multi-station clamping device, the polarization pressure head at the lower end of each positive electrode elastic pressing device can respectively press one piezoelectric ceramic test piece onto the copper plate, so that a plurality of piezoelectric ceramic test pieces can be polarized simultaneously, the situation that only one piezoelectric ceramic test piece can be clamped once by a traditional polarizing device is changed, the polarizing efficiency is greatly improved, and batch polarizing operation can be realized.
2. The test piece clamping device can clamp test pieces made of different piezoelectric ceramics in one step and realize synchronous polarization, different voltages can be applied respectively, and good polarization consistency is guaranteed.
3. The piezoelectric ceramic test piece has the advantages that the function of not limiting the appearance of the piezoelectric ceramic test piece is realized, the cylindrical and strip-shaped piezoelectric ceramic test pieces can be polarized by using the piezoelectric ceramic test piece polarization device, and the silver coating layer is uniformly arranged below the polarization pressure head to realize uniform electric field, so that electric breakdown is prevented, and the electric conduction efficiency is improved.
4. The invention designs that the groove arranged on the lower end surface of the conducting rod is in interference fit with the polarization pressure head and is fixed by the anti-loosening pin, so that the polarization pressure head can be firmly fixed, the polarization pressure head can be replaced, the polarization of a test piece with a series of sizes specified by the national standard and the polarization of a non-standard test piece can be realized, and the polarization pressure head can be replaced according to the size of the test piece.
5. According to the invention, the proper spring is sleeved on the conducting rod, the clamping length is self-adaptive according to the size of the test piece, and the process of simultaneously polarizing the strip test piece in the same specification and in different polarization directions can be realized, so that the influence of the different polarization directions of the test piece on the material performance can be researched, and the experimental error caused by the change of environmental conditions can be greatly reduced.
6. The system heats the polarization device through the electric furnace, uses the thermocouple thermometer to collect the temperature of the thermostatic chamber, adopts the temperature controller to realize the temperature measurement and control within 300 ℃, has the function of keeping constant temperature and displays the temperature.
7. And silicone oil is filled in the polarization box, and the silicone oil plays a role in heat conduction and insulation. Considering the temperature resistance of the used polytetrafluoroethylene material and the requirement of experiments, the general working temperature is 80-180 ℃, the temperature of the silicone oil is monitored by a thermocouple, and therefore, the silicone oil is heated by an electric furnace to be kept at the required polarization temperature of 80-180 ℃.
8. And an annular cavity formed between the cylinder and the inner side wall of the polarization box is filled with heat-insulating asbestos to realize the insulating and heat-insulating effects. When the temperature of the silicon oil in the polarization box needs to be uniformly stirred, the motor reducer can be controlled to drive the lead screw to drive the multi-station clamping device to move up and down, so that the silicon oil can be stirred, and the heating is more uniform.
9. The lifting mechanism is arranged, so that the piezoelectric ceramic test piece and the piezoelectric semiconductor can be conveniently installed, and a high-temperature piezoelectric ceramic sample which is polarized in the polarization box can be conveniently taken out. The lifting mechanism is driven by a motor reducer to drive a lead screw, so that the multi-station clamping device is lifted, and the lifting or descending process is completed within about 10 s. The stroke end of the lifting mechanism is controlled by a stroke switch, and when the multi-station clamping device rises to be about to lift out of the polarization box after polarization is completed, the polarization high-voltage power supply is automatically cut off, so that the operation safety is ensured.
10. The multi-channel high-voltage power supply is connected with the multi-channel high-voltage power supply, so that different electric fields can be applied to each piezoelectric ceramic or piezoelectric semiconductor test piece, and a plurality of piezoelectric ceramic or piezoelectric semiconductor test pieces with different thicknesses and components can be polarized simultaneously, so that the efficiency, the safety and the consistency of preparing the piezoelectric ceramic or piezoelectric semiconductor test pieces in a laboratory are greatly improved.
11. The piezoelectric ceramic test piece is provided with three layers of plates from top to bottom, the first layer is a copper plate, a negative terminal is led at the right end of the copper plate, the second layer is a lower polytetrafluoroethylene insulation plate for insulation so as to prevent other equipment such as a motor and the like from being burnt out due to short circuit, the third layer is a support plate of the invention, and in addition, a grounding terminal is additionally arranged outside a polarization box.
12. The piezoelectric ceramic test piece polarization experiment system is additionally provided with the case cover, the case cover is a concave cover, the middle of the case cover is hollow, the inner side of the bottom of the case cover is pasted with the upper polytetrafluoroethylene insulation plate together, the polarization case can be insulated, and the whole polarization case moving-out of the multi-station clamping device during taking of the piezoelectric ceramic test piece is not influenced.
Drawings
FIG. 1 is a schematic plan view of the present invention;
fig. 2 is a schematic perspective view of the multi-station clamping device of the present invention.
Detailed Description
As shown in fig. 1 and 2, the piezoelectric ceramic and piezoelectric semiconductor test piece diversity polarization experiment system comprises an installation frame 1 and a polarization box 2, wherein a multi-channel high-voltage power supply 3 and a motor reducer 4 are arranged on the installation frame 1, an opening 5 is arranged at the top of the polarization box 2, a spindle of the motor reducer 4 is connected with a lifting mechanism positioned in the polarization box 2 in a transmission manner, a multi-station clamping device arranged on the lifting mechanism is arranged in the polarization box 2 and positioned below the opening 5, and a box cover used for blocking the opening 5 is arranged on the multi-station clamping device; a thermocouple 7 is inserted in the polarization box 2.
The lifting mechanism comprises a lead screw 8 and a guide post 9 which are arranged along the vertical direction, the lead screw 8 and the guide post 9 are respectively arranged on the left side and the right side in the polarization box 2, the upper end of the lead screw 8 is coaxially provided with an optical axis 10, the upper end of the optical axis 10 penetrates through the top of the polarization box 2 and is in transmission connection with a main shaft of the motor speed reducer 4 through a coupler 11, the left side of the bottom in the polarization box 2 is provided with a bearing seat 12, the lower end of the lead screw 8 is rotatably connected in the bearing seat 12, the upper end of the guide post 9 is fixedly connected with the top of the polarization box 2 through a mounting bolt 13, and the lower end of the guide post 9 is fixedly connected with the side wall of the polarization box 2 through a fixed connecting piece 14; a nut 15 is connected to the screw rod 8 in a threaded manner, a horizontally arranged supporting plate 16 penetrates through the guide post 9, and the left side of the supporting plate 16 is fixedly connected with the right side of the nut 15; the multi-station clamping device is fixedly arranged on the supporting plate 16.
The multi-station clamping device comprises a lower polytetrafluoroethylene insulation board 17 and an upper polytetrafluoroethylene insulation board 18 which are horizontally arranged, the upper polytetrafluoroethylene insulation board 18 is fixedly arranged on the upper surface of the supporting board 16 through a connecting bolt 26, a copper board 19 is arranged on the upper surface of the upper polytetrafluoroethylene insulation board 18, a negative terminal 20 is arranged on the edge of one side of the copper board 19, and the lower surface of the upper polytetrafluoroethylene insulation board 18 is fixedly connected with the upper surface of the copper board 19 through at least two connecting columns 36; at least three through holes are uniformly formed in the upper polytetrafluoroethylene insulation plate 18, and a positive elastic pressing device in top press fit with the upper surface of the copper plate 19 penetrates through each through hole.
The positive elastic compactor comprises a conductive rod 21 and a polarization pressing head 22, the conductive rod 21 is arranged in a through hole in a penetrating mode, a groove with an opening at the bottom, the left side and the right side is formed in the lower end face of the conductive rod 21, the polarization pressing head 22 is assembled in the groove in an interference mode in the left-right direction, an anti-loosening pin 24 which enables the polarization pressing head 22 and the conductive rod 21 to be connected into a whole in series is horizontally arranged at the lower end of the conductive rod 21 in the front-back direction, a spring 25 is sleeved on the conductive rod 21, the upper end and the lower end of the spring 25 are respectively in abutting fit with the lower surface of an upper polytetrafluoroethylene insulating plate 18 and the polarization pressing head 22, a silver coating is arranged on the lower surface of the polarization pressing head 22, the polarization pressing head 22 is divided into two forms according to the polarization materials, if the polarization test piece is a piezoelectric ceramic dielectric material, the polarization pressing head is made of a conventional brass alloy according to the design size, if the polarization test piece is a piezoelectric semiconductor material, according to the size and the shape of the bottom face of the polarization pressing head, the bottom surface of the polarization pressure head is provided with a layer of polytetrafluoroethylene film with the thickness of 0.5 mm-1 mm, the film is flat and smooth, the size of the film is consistent with that of the bottom surface of the polarization pressure head, the upper surface of the polytetrafluoroethylene film is attached to the bottom surface of the polarization pressure head, the lower surface of the polytetrafluoroethylene film is in direct contact with a polarization material, the side part of the upper end of the conducting rod 21 is provided with a limiting ring 27 and a handle 28 positioned above the limiting ring 27, and the upper end surface of the conducting rod 21 is coaxially connected with a positive terminal 29. Under the action of the spring 25, the limiting ring 27 is in contact with the upper surface of the upper polytetrafluoroethylene insulation plate 18, and the outer diameter of the limiting ring 27 is smaller than that of the handle 28, so that the handle 28 is convenient to hold.
The case lid is including being lid 6 of cartridge type and being annular clamp plate 30, and 6 lower extreme inner walls of lid and the edge gluing all around of last polytetrafluoroethylene insulation board 18 are as an organic whole, the contact of 6 outer walls of lid and opening 5's inner wall, and clamp plate 30 level sets up, and 6 upper end borders of lid and clamp plate 30's inner circle fixed connection, and clamp plate 30 lower surface is equipped with and connects complex seal ring 31 with polarization case 2 upper surface pressfitting around the opening 5, and seal ring 31 lower surface is equipped with pressure sensor (not shown in the figure).
The grounding terminal 32 is arranged at the lower part of the outer side wall of the polarization box 2, so that the metal shell of the polarization box 2 is connected with a grounding body, and an electric shock caused by the fact that an operator contacts the shell of the equipment when the shell is electrified due to insulation damage is prevented.
Be equipped with barrel 33 in the polarization case 2, barrel 33 upper end and lower extreme border respectively with polarization case 2's top lower surface and bottom lower surface fixed connection, have the annular cavity between barrel 33 outer wall and the polarization case 2 inside wall, the annular cavity intussuseption is filled with heat preservation asbestos 34.
The specific working process of the invention is as follows: firstly, a positive terminal 29 and a negative terminal 20 in the invention are respectively connected to a multi-channel high-voltage power supply 3 through high-voltage leads, silicone oil is filled in a polarization box 2 and is heated, and the temperature of the silicone oil is monitored by a thermocouple 7 and is kept at 80-180 ℃; the polarization clamping mechanism is internally provided with polarization pressure heads 22 in two modes according to different piezoelectric ceramics or piezoelectric semiconductor materials, the corresponding pressure head position is selected according to the materials of the polarization test piece during clamping, firstly, a handle 28 on an anode elastic pressing device is held by a hand to pull upwards, the polarization pressure head 22 is separated from a copper plate 19 upwards by overcoming the elasticity of a spring 25, then, a piezoelectric ceramic test piece 35 is placed on the copper plate 19, the handle 28 is loosened, and the polarization pressure head 22 presses the piezoelectric ceramic test piece 35 onto the copper plate 19 under the action of the elasticity of the spring 25; in this operating mode, a plurality of piezoceramic test pieces 35 are then clamped between the polarization indenter 22 and the copper plate 19, respectively. Then the motor reducer 4 is started, a main shaft of the motor reducer 4 drives the lead screw 8 to rotate through the coupler 11, the nut 15 in threaded connection on the lead screw 8 is limited by the guide post 9 of the support plate 16, the nut 15 moves downwards along the lead screw 8, and the guide post 9 plays a good balance and guiding role in moving up and down; the downward movement of backup pad 16 drives multistation clamping device, piezoceramics test piece 35 and case lid move down, piezoceramics test piece 35 immerses in the silicon oil, until seal ring 31 of clamp plate 30 lower surface and the upper surface contact of polarization case 2, seal ring 31 plays the effect of sealed opening 5, in addition, the pressure sensor that sealed lower surface set up, when seal ring 31 roof pressure polarization case 2 upper surface down, when pressure reaches the setting value, pressure sensor gives the controller with signal transmission, the controller orders motor reducer 4 stall, backup pad 16, multistation clamping device and piezoceramics test piece 35 also stop the downward movement. Then, the positive electrode terminal 29 and the negative electrode terminal 20 are polarized by applying a high voltage. In addition, because the multi-station clamping device comprises a plurality of positive elastic compactors, that is, the polarization operation can be simultaneously carried out on a plurality of piezoelectric ceramic test pieces 35 at one time, so that different voltages can be applied to different piezoelectric ceramic test pieces 35 respectively, and the polarization operation of different voltages can be carried out on the piezoelectric ceramic test pieces 35 with different structural shapes.
For the piezoelectric semiconductor test piece, the conventional arrangement of the polarization indenter 22 is difficult to realize because the material has conductive performance, the high voltage required by the polarization of the material cannot be applied because of the conductive performance of the material, and the electric domain is difficult to deflect and the polarization is insufficient because the internal field strength of the material does not reach the polarization condition. According to the size and the shape of the bottom surface of the polarization pressure head 22, a layer of polytetrafluoroethylene film with the thickness of 0.5 mm-1 mm is added on the bottom surface of the polarization pressure head 22, the size of the film is consistent with that of the bottom surface of the polarization pressure head 22, the film is flat and smooth and is in direct contact with a test piece, the polytetrafluoroethylene has very high electric insulation performance, the breakdown strength of the polytetrafluoroethylene film can reach 50kV/mm, the high voltage required by material polarization can be applied in a mode of superposing the polytetrafluoroethylene film and the polarization pressure head 22, so that the inner part of the material can reach an electric field required by polarization, the electric domain is enabled to deflect in a consistent manner, and the polarization process of piezoelectric semiconductor materials can be realized.
Although the present invention has been described in detail with reference to the above embodiments, it should be understood by those skilled in the art that: modifications and equivalents may be made thereto without departing from the spirit and scope of the invention and it is intended to cover in the claims the invention as defined in the appended claims.
Claims (3)
1. Piezoelectric ceramic and piezoelectric semiconductor test piece diversity polarization experimental system, its characterized in that: the multi-station clamping device comprises a mounting frame and a polarization box, wherein a multi-channel high-voltage power supply and a motor speed reducer are arranged on the mounting frame, an opening is formed in the top of the polarization box, a main shaft of the motor speed reducer is connected with a lifting mechanism located in the polarization box in a transmission manner, a multi-station clamping device arranged on the lifting mechanism is arranged in the polarization box, the multi-station clamping device is located below the opening, and a box cover used for plugging the opening is arranged on the multi-station clamping device; a thermocouple is inserted in the polarization box;
the lifting mechanism comprises a lead screw and a guide pillar which are arranged along the vertical direction, the lead screw and the guide pillar are respectively arranged on the left side and the right side in the polarization box, the upper end of the lead screw is coaxially provided with an optical axis, the upper end of the optical axis penetrates through the top of the polarization box and is in transmission connection with a main shaft of a motor speed reducer through a coupler, the left side of the bottom in the polarization box is provided with a bearing seat, the lower end of the lead screw is rotatably connected in the bearing seat, the upper end of the guide pillar is fixedly connected with the top of the polarization box through a mounting bolt, and the lower end of the guide pillar is fixedly connected with the side wall of the polarization box through a fixed connecting piece; the screw rod is in threaded connection with a nut, the guide pillar is sleeved with a horizontally arranged support plate in a penetrating manner, and the left side of the support plate is fixedly connected with the right side of the nut;
the multi-station clamping device is fixedly arranged on the supporting plate; the multi-station clamping device comprises a lower polytetrafluoroethylene insulation board and an upper polytetrafluoroethylene insulation board which are horizontally arranged, the upper polytetrafluoroethylene insulation board is fixedly arranged on the upper surface of the supporting board through a connecting bolt, a copper plate is arranged on the upper surface of the upper polytetrafluoroethylene insulation board, a negative terminal is arranged on one side edge of the copper plate, and the lower surface of the upper polytetrafluoroethylene insulation board is fixedly connected with the upper surface of the copper plate through at least two connecting posts; at least three through holes are uniformly formed in the upper polytetrafluoroethylene insulation plate, and a positive elastic pressing device which is in top press fit with the upper surface of the copper plate penetrates through each through hole;
the positive elastic pressing device comprises a conductive rod and a polarization pressing head, the conductive rod is arranged in the through hole in a penetrating mode, a groove with openings on the bottom, the left side and the right side is formed in the lower end face of the conductive rod, the polarization pressing head is assembled in the groove in an interference mode in the left-right direction, an anti-loosening pin which enables the polarization pressing head and the conductive rod to be connected into a whole in series is horizontally arranged at the lower end of the conductive rod in the front-back direction, a spring is sleeved on the conductive rod, the upper end and the lower end of the spring are respectively in jacking fit with the lower surface of an upper polytetrafluoroethylene insulating plate and the polarization pressing head, a silver coating layer is arranged on the lower surface of the polarization pressing head, a limiting ring and a handle located above the limiting ring are arranged on the lateral portion of the upper end of the conductive rod, and a positive wiring terminal is coaxially connected to the upper end face of the conductive rod;
the polarization pressure head is divided into two forms according to polarization materials; if the polarization test piece is made of piezoelectric ceramic materials, the polarization pressure head is made of conventional brass alloy according to the design size; if the polarization test piece is made of piezoelectric semiconductor materials, a layer of polytetrafluoroethylene film is arranged on the bottom surface of the polarization pressure head, the upper surface of the polytetrafluoroethylene film is attached to the bottom surface of the polarization pressure head, and the lower surface of the polytetrafluoroethylene film is in direct contact with the polarization materials;
the polarization box is internally provided with a barrel, the upper end and the lower end edge of the barrel are respectively fixedly connected with the lower surface of the top and the lower surface of the bottom of the polarization box, an annular cavity is arranged between the outer wall of the barrel and the inner side wall of the polarization box, and heat-preservation asbestos is filled in the annular cavity.
2. The piezoelectric ceramic and piezoelectric semiconductor test piece diversity polarization experiment system of claim 1, wherein: the case lid is including being the lid of cartridge type and being annular clamp plate, and lid lower extreme inner wall glues as an organic whole with last polytetrafluoroethylene insulation board edge all around, and the contact of lid outer wall and open-ended inner wall, clamp plate level set up, lid upper end border and the inner circle fixed connection of clamp plate, and the clamp plate lower surface is equipped with the polarization case upper surface pressfitting complex seal ring around the opening, and the seal ring lower surface is equipped with pressure sensor.
3. The piezoelectric ceramic and piezoelectric semiconductor test piece diversity polarization experimental system according to claim 1 or 2, wherein: and a grounding terminal is arranged at the lower part of the outer side wall of the polarization box.
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| CN107192897B (en) * | 2017-07-14 | 2023-05-23 | 河南感联智能科技有限公司 | Piezoelectric semiconductor film polarization experimental device |
| CN107976589B (en) * | 2017-12-25 | 2020-01-07 | 西安交通大学 | Wide-temperature-range quasi-static d33 test system |
| CN108365085A (en) * | 2018-02-07 | 2018-08-03 | 太原理工大学 | A kind of preparation method of the nanometer Piezoelectric anisotropy film generator of conductive material doping |
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| CN111063792A (en) * | 2019-12-06 | 2020-04-24 | 湖南嘉业达电子有限公司 | High-temperature air polarization processing equipment for atomizing sheet |
| CN111554803B (en) * | 2020-05-26 | 2021-09-24 | 大连理工大学 | Piezoelectric element partition polarization device |
| CO2021011210A1 (en) * | 2021-08-25 | 2021-09-20 | Corporacion Univ Minuto De Dios Uniminuto | Polarizing device for sheets with piezoelectric properties and the process of polarizing a sheet by means of said device |
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