CN106290227A - A kind of THz wave reflection imaging device and method - Google Patents
A kind of THz wave reflection imaging device and method Download PDFInfo
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- CN106290227A CN106290227A CN201610728602.8A CN201610728602A CN106290227A CN 106290227 A CN106290227 A CN 106290227A CN 201610728602 A CN201610728602 A CN 201610728602A CN 106290227 A CN106290227 A CN 106290227A
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- 238000003384 imaging method Methods 0.000 title claims abstract description 60
- 238000000034 method Methods 0.000 title abstract description 6
- 230000000694 effects Effects 0.000 claims abstract description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 239000011358 absorbing material Substances 0.000 claims description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 230000011514 reflex Effects 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 5
- 239000007769 metal material Substances 0.000 abstract description 4
- 238000002372 labelling Methods 0.000 description 6
- 238000010276 construction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 238000002059 diagnostic imaging Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a kind of THz wave reflection imaging device, including the THz source being successively set in same Terahertz light path, beam splitter, collimation focusing system and sample positioning device, the THz wave of sample reflection is reflected through beam splitter, entering into detector, detector receives the THz wave carrying sample signal.It is fixedly installed in the imaging region of sample the higher metal material of THz wave reflecting effect as telltale mark, presets the relative position with sample.Owing to specifically labelled reflecting effect is higher, imaging can be understood when THz wave imaging, by the physical location of telltale mark and sample as standard, the image of sample in imaging is may determine that by specifically labelled imaging position, obtain sample picture size more accurately, improve the accuracy of THz wave detection.The present invention also provides for a kind of THz wave catoptric imaging method, can realize identical technique effect.
Description
Technical field
The present invention relates to imaging detection technology field, furthermore relate to a kind of THz wave reflection imaging device
And method.
Background technology
THz wave refers to frequency electromagnetic wave (1THz in the range of 0.1THz～10THz (wavelength is 30～3000um)
=1012Hz), THz wave occupies the most special position in electromagnetic spectrum, its long-wave band direction and millimeter wave (submillimeter
Ripple) coincide, and coincide with infrared ray in short-wave band direction.
THz wave location is exactly in the relatively good microwave and millimeter wave of scientific technological advance and infrared ray
Between, form " blank " relatively fallen behind；The long wave direction of Terahertz principally falls into electronics category, and its shortwave side
To then principally falling into photonic propulsion category, thus between electronics and photonic propulsion, form one " blank ".Due to THz wave institute
The position of the special electromagnetic wave spectrum at place, it has the most superior characteristic, has very important science and using value so that full generation
Various countries of boundary all give concern greatly to it.Wherein the U.S., Europe and Japan particularly pay attention to.
The special performance of Terahertz is to broadband connections, radar, electronic countermeasure, ELECTROMAGNETIC WEAPON, astronomy, medical imaging, nothing
The fields such as detection, safety inspection of damaging bring far-reaching influence.But when carrying out catoptric imaging currently with Terahertz, often exist
Location is not accurate, and location dimension is difficult to accurately judge, image quality is difficult to the shortcoming assessed.
Summary of the invention
The invention provides a kind of THz wave reflection imaging device, it is possible to be accurately implemented as location, more accurately
Ground judges picture size.Concrete scheme is as follows:
A kind of THz wave reflection imaging device, including the THz source being set in turn in same light path, beam splitter, standard
Straight focusing system and sample positioning device, also include the detector being arranged on described beam splitter reflected light path；Described sample is fixed
Position device includes the fixed plate for fixing sample, is fixedly installed the location of metal in the imaging region of described sample
Labelling.
Alternatively, described telltale mark is at least provided with two, and described sample is each described between telltale mark.
Alternatively, described fixed plate is more than described sample, and multiple described telltale marks may be contained within described fixed plate
On.
Alternatively, described specifically labelled concrete shape is cross, T-shaped, X-shaped or annular；Described telltale mark
Material be gold, silver or aluminum.
Alternatively, described beam splitter is the lens through special handling or plated film, and a face of described beam splitter occurs to divide
Light action, transmission light is 1: 1 with the accounting of reflection light.
Alternatively, described sample positioning device also includes that kinetic control system, described kinetic control system can drive institute
State fixed plate, described telltale mark and sample synchronous translational.
Alternatively, described fixed plate arranging THz wave absorbing material, the thickness of described THz wave absorbing material is big
In equal to 10mm.
Alternatively, described fixed plate inner hollow, it is filled with water.
Alternatively, described fixed plate arranges spongy layer behind.
Additionally, the present invention also provides for a kind of THz wave catoptric imaging method, around sample, it is fixedly installed two
Or the telltale mark of above metal, make described sample between described telltale mark；Adjust collimation focusing system and/or
Sample positioning device, makes THz wave focus on a described telltale mark at edge, and mobile example positioner makes too
Hertz wave scans described sample and all of described telltale mark；The THz wave of reflex circuit through detector receive after by
Image processing system generates image.
The invention discloses a kind of THz wave reflection imaging device, including being successively set in same Terahertz light path
THz source, beam splitter, collimation focusing system and sample positioning device, THz source is rolled over through beam splitter after generating THz wave
Penetrate continuation forward, collimation focusing system after being focused, arrive sample, the sample reflected terahertz hereby former road of ripple tailing edge
Returning, again pass by collimation focusing system, when again passing by beam splitter, a part of THz wave is reflected, and enters into beam splitter anti-
Penetrate the detector in light path, detector receive the THz wave carrying sample signal, can give birth to after being calculated analytically
Become image.The sample positioning device of the present invention includes that fixed plate, fixed plate are used for fixing sample, in the imaging of sample
The telltale mark of metal it is fixedly installed in region.The metal material to THz wave reflecting effect is higher is selected to mark as location
Note, is fixed in the imaging region that THz wave is final, and presets the relative position with sample.Due to telltale mark
Reflecting effect higher, imaging can be understood when THz wave imaging, be made by the physical location of telltale mark and sample
For standard, specifically labelled imaging position may determine that the image of sample in imaging, obtain sample more smart
Accurate picture size, improves the accuracy of THz wave detection.
The present invention also provides for a kind of THz wave catoptric imaging method, it is possible to accurately realizes location, more accurately sentences
Determine the picture size of sample.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
In having technology to describe, the required accompanying drawing used is briefly described, it should be apparent that, the accompanying drawing in describing below is only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, it is also possible to
Other accompanying drawing is obtained according to these accompanying drawings.
The structure chart of the THz wave reflection imaging device that Fig. 1 provides for the present invention；
Fig. 2 A is the internal Facad structure figure filling water of fixed plate；
Fig. 2 B is the internal construction profile filling water of fixed plate；
Fig. 3 A is the location diagram that two Airy disks can clearly be differentiated；
Fig. 3 B is the location diagram that two Airy disks be able to be differentiated；
Two unresolvable location diagrams of Airy disk of Fig. 3 C；
Fig. 4 A is the Facad structure figure that fixed plate arranges spongy layer behind；
Fig. 4 B is the construction profile that fixed plate arranges spongy layer behind.
Wherein:
THz source 1, beam splitter 2, collimation focusing system 3, sample positioning device 4, fixed plate 41, telltale mark 42, fortune
Autocontrol system 43, detector 5, sample 6, image processing system 7.
Detailed description of the invention
The core of the present invention is to provide a kind of THz wave reflection imaging device and method, it is possible to it is fixed accurately to realize
Position, more accurately judges the picture size of sample.The imaging device of the present invention utilizes the reflection effect of THz wave to enter
Row imaging, is primarily adapted for use in the material that detection is stronger to THz wave reflecting effect.
In order to make those skilled in the art be more fully understood that technical scheme, below in conjunction with accompanying drawing with concrete
Embodiment, THz wave reflection imaging device and method to the application are described in detail explanation.
As it is shown in figure 1, the structure drawing of device of the THz wave reflection imaging device provided for the present invention.Including setting gradually
The groups such as THz source 1, beam splitter 2, collimation focusing system 3 and the sample positioning device 4 in THz wave same propagation light path
Part, the most above-mentioned four hyte parts may be contained within same optical axis.This imaging device also includes the reflection being arranged on beam splitter 2
Detector 5 in light path, detector 5 is for receiving the terahertz wave signal of reflection.Sample positioning device 4 includes for fixing quilt
The fixed plate 41 of test sample product 6, after fixed plate 41 is arranged on sample 6.Also fix in the imaging region of sample 6 and set
Being equipped with the telltale mark 42 of metal material, the metal material selected by telltale mark 42 can be believed by reflected terahertz hereby ripple effectively
Number.
During imaging, THz source 1 producing THz wave, THz wave is linearly propagated, and first passes through beam splitter 2, through dividing
The refraction action of bundle mirror 2 continues to propagate, and being collimated by THz wave by collimation focusing system 3 is directional light and focusing, is gathered
Burnt THz wave is mapped to sample 6, and sample 6 is fixed on ad-hoc location by sample fixing device 4, after can being focused collimation
THz wave focusing illumination.Object in sample 6 and whole imaging region can make THz wave with reflected terahertz hereby ripple
Along backtracking, again pass by collimation focusing system 3 and beam splitter 2.When again passing by beam splitter 2, a part of Terahertz wave energy
Enough being reflected, THz wave is propagated along reflected light path, carries in imaging region the THz wave of object signal by reflected light path
Detector 5 receive, and then the image in the imaging region at sample 6 place can be drawn with analytical calculation.Carry imaging area
In territory, the THz wave of object signal leaves system through the transmissive portions branch of beam splitter 2, does not enters detector 5.
Due to telltale mark 42 can reflected terahertz hereby ripple effectively, therefore telltale mark 42 can clearly imaging.Fixed
The actual relative position of position labelling 42 and sample 6 is it has been determined that can be according to both actual positional relationship, in conjunction with calmly
The image space of position labelling 42, can more easily determine image space and the size of sample 6.
Use the THz wave reflection imaging device that the present invention provides, according to the reality of telltale mark 42 with sample 6
Position relatively determines the image space of sample 6, thus realizes preferably imaging location.The material of sample 6 is different, its
The reflecting effect of THz wave also there is is the biggest difference, but the reflecting effect of telltale mark 42 is fine, can be clear from into
Picture, for reflecting effect the most well sample, can be more prone to judge according to telltale mark 42 image clearly
The image boundary of sample 6 and size.
On this basis, telltale mark 42 provided by the present invention sets at least to two, and it is fixed that sample 6 is positioned at each
Between the labelling 42 of position.If only two telltale marks 42, then lay respectively at the both sides of sample 6；If having three or more
Telltale mark 42, the most multiple telltale marks 42 can surround a region, and sample 6 is positioned at the region that telltale mark 42 surrounds
In, telltale mark 42 is respectively positioned on outside sample 6, it is to avoid the imaging on sample 6 produces impact.Above-mentioned arrangement is only
It is a kind of concrete form to be set, as long as telltale mark 42 is easy to distinguish sweep limits and sample 6 size is the most permissible, and right
Specific requirement is not had in position.
As shown in Figure 2 A, for a kind of Facad structure figure of fixed plate 41, four edges in fixed plate 41 are respectively provided with
There are four telltale marks 42.In the present invention, the area of fixed plate 41 is more than sample 6, makes the imaging region of THz wave as far as possible
Within the scope of fixed plate 41.Telltale mark 42 is preferably provided in fixed plate 41, and telltale mark 42 is positioned at fixed plate 41
Edge, does not interferes sample 6.
The concrete shape of telltale mark 42 may be configured as cross, T-shaped, X-shaped or annular, it is also possible to is other shape
Shape, identifies as long as being easy to resolution；The material of telltale mark 42 is gold, silver or aluminum, and the reflection of Terahertz is imitated by these materials
Fruit is relatively strong, and the material that the most also can be selected for other is made.Telltale mark 42 in Fig. 2 A is set to cross.By Terahertz
The each specifically labelled minimum dimension of different set of wavelength, according to Rayleigh criterion: if in the diffracted image of a point source
Centre high light just overlaps with the diffracted image dark place of another point source, it is believed that the two point source can be this optics just
Instrument is differentiated.
Two adjacent point source formation seem two diffraction spots, if the interval between two aplanatic incoherent pictures
It is located exactly at another image patch first dark ring equal to Airy disk radius, the i.e. center of an image patch, then the two point is exactly
Just can differentiate, and this distance between these 2 is exactly the reference of a kind of physical dimension of telltale mark shape size.
As shown in Fig. 3 A to Fig. 3 C, represent that two Airy disks can clearly be differentiated, be able to differentiate and unresolvable location diagram respectively.
When wavelength is different time, the beeline offered a clear explanation is the most different.When system can reach diffraction limit, if wavelength is
1.426mm, beam divergence angle is 12 °, and when space, object place is air, object space refractive index is 1, △ x=0.61*1.426/
1*sin12=4.15mm is the shortest resolution distance, and the distance of such as two hot spots is less than this 4.15mm, cannot differentiate, become
One hot spot.So in order to make the definition of telltale mark 42 be improved, such as a cross shape marks, by clockwise
Rotating, an order point above is A point, and other is respectively pressed clockwise for B, C, D.So A and B, the air line distance between D must be big
In 4.15mm, words that no, cross just can not be identified.Also having a Consideration is between labelling apparatus and sample
Distance less than this distance time, labelling apparatus just and together with sample resolution, does not has due effect.
Beam splitter 2 is the lens through special handling or plated film, in a face of beam splitter 2, light splitting effect occurs, preferably
Make transmission light with reflection light accounting be 1: 1.
It is solid that sample positioning device 4 in the present invention also includes that kinetic control system 43, kinetic control system 43 can drive
Determine plate 41, telltale mark 42 and sample 6 synchronous translational.Preferably, kinetic control system 43 is driven by two dimension linear electric motors.
At any of the above-described item and on the basis of being mutually combined, the fixed plate 41 in the present invention arranges THz wave and absorbs
Material, it is possible to reduce THz wave and reflect, reduce the interference to imaging.The thickness of THz wave absorbing material is more than or equal to
10mm, it is ensured that the effectiveness of absorption.
Specifically, the fixed plate 41 of the present invention is internal is filled with water, owing to water is the good absorber of THz wave, removes
Telltale mark 42 and sample 6 can be outside reflected terahertz hereby ripples, and other place mainly absorbs THz wave, reduces the back of the body
Scape noise, improves image quality.As shown in Fig. 2 A and Fig. 2 B, respectively the internal Facad structure figure filling water of fixed plate 41 with
Construction profile；The top of fixed plate 41 is provided with water injection hole.Fig. 4 A and Fig. 4 B represents that fixed plate 41 arranges sea behind respectively
The Facad structure figure of continuous layer and construction profile.
Compared to traditional single-point type terahertz detector catoptric imaging technology, the reflective Terahertz sample that the present invention proposes
Product positioner, owing to adding telltale mark, has locating speed fast, and location efficiency is high, it will be appreciated that sample is the most several
The advantage of what information.Owing to water and sponge have good good absorbability to THz wave, the present invention uses hollow water filling formula to fix
Plate and the fixed plate plus grade absorption sponge, it is possible to make background noise be reduced, reduce the impact of interference signal.
In order to determine the image quality of THz wave reflection imaging device, by the change of shape of telltale mark in imaging 42
It is compared to each other with actual graphical, it is possible to assess the quality of whole imaging device image quality.
Present invention also offers a kind of THz wave catoptric imaging method, be fixedly installed around sample 6 two or
The telltale mark 42 of above metal, makes sample 6 between telltale mark 42；Adjust collimation focusing system 3 and/or sample
Positioner 4, makes THz wave focus on a telltale mark 42 at edge, and mobile example positioner 4 makes Terahertz
Ripple scanning sample 6 and all of state telltale mark 42；The THz wave of reflex circuit through detector 5 receive after by image
Reason system 7 generates image.
Sample 6 first at the initial position of imaging region, THz wave after THz source 1 sends through beam splitter
2, it is divided into refraction, reflection two bundle electromagnetic wave, deflecting light beams passes through collimation focusing system, focuses on the surface of sample 6, pass through
Adjusting sample positioning device 4 makes THz wave focus at some telltale mark 42, adjusts after focusing on, if detected sample
If product 6 surface has good reflecting properties for THz wave, then THz wave will be reflected back toward in system, then
Respectively by collimation focusing system 3 and the beam splitter 2 playing turnover light path effect, it is ultimately imaged and focuses in terahertz detector 5.
Kinetic control system 43 drives sample 6 to translate, and the hot spot of focusing beats the zones of different on sample 6 surface, it is possible to
The details making whole sample or sample interior are received by detector 5, and different materials is to the reflection of THz wave and absorption
Performance is different, and the energy causing THz wave to return is different；Finally by image processing system 7, through a series of figure
After processing, obtain final image.Image processing system 7 is according to the coordinate position of each data collection point and the terahertz of every
Hereby amplitude information (being reflected as the half-tone information of each pixel in image), utilizes the stitching algorithm relevant based on region and based on spy
Levy relevant stitching algorithm, final synthesis one width THz wave reflected image.
Described above to the disclosed embodiments, makes professional and technical personnel in the field be capable of or uses the present invention.
Multiple amendment to these embodiments will be apparent from for those skilled in the art, as defined herein
General Principle, can realize without departing from the spirit or scope of the present invention in other embodiments.Therefore, this
The bright the embodiments shown herein that is not intended to be limited to, and be to fit to and principles disclosed herein and features of novelty phase
The widest consistent scope.
Claims (10)
1. a THz wave reflection imaging device, it is characterised in that include the THz source being set in turn in same light path
(1), beam splitter (2), collimation focusing system (3) and sample positioning device (4), also include being arranged at described beam splitter (2) reflection
Detector (5) in light path；Described sample positioning device (4) includes the fixed plate (41) for fixing sample (6), described
The telltale mark (42) of metal it is fixedly installed in the imaging region of sample (6).
THz wave reflection imaging device the most according to claim 1, it is characterised in that described telltale mark (42) is at least
Arranging two, described sample (6) is positioned between each described telltale mark (42).
THz wave reflection imaging device the most according to claim 2, it is characterised in that described fixed plate (41) is more than institute
Stating sample (6), multiple described telltale marks (42) may be contained within described fixed plate (41).
THz wave reflection imaging device the most according to claim 2, it is characterised in that the tool of described telltale mark (42)
Shape is cross, T-shaped, X-shaped or annular；The material of described telltale mark (42) is gold, silver or aluminum.
THz wave reflection imaging device the most according to claim 4, it is characterised in that described beam splitter (2) is for passing through
Special handling or the lens of plated film, a face generation light splitting effect of described beam splitter (2), transmission light with the accounting of reflection light is
1∶1。
THz wave reflection imaging device the most according to claim 2, it is characterised in that described sample positioning device (4)
Also include that kinetic control system (43), described kinetic control system (43) can drive described fixed plate (41), described location mark
Note (42) and sample (6) synchronous translational.
7. according to the THz wave reflection imaging device described in any one of claim 1 to 6, it is characterised in that described fixed plate
(41) arranging THz wave absorbing material on, the thickness of described THz wave absorbing material is more than or equal to 10mm.
THz wave reflection imaging device the most according to claim 7, it is characterised in that in described fixed plate (41) inside
Sky, is filled with water.
THz wave reflection imaging device the most according to claim 7, it is characterised in that described fixed plate (41) sets behind
Put spongy layer.
10. a THz wave catoptric imaging method, it is characterised in that including:
Around sample (6), it is fixedly installed the telltale mark (42) of two or more metal, makes described sample (6) position
Between described telltale mark (42)；Adjust collimation focusing system (3) and/or sample positioning device (4), make THz wave focus on
On a described telltale mark (42) at edge, mobile described sample positioning device (4), make THz wave scan described quilt
Test sample product (6) and all of described telltale mark (42)；The THz wave of reflex circuit through detector (5) receive after by image
Reason system (7) generates image.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106580264A (en) * | 2017-01-16 | 2017-04-26 | 天津大学 | Terahertz wave attenuation total reflection imaging-based cerebral trauma tissue detection device |
| CN106681015A (en) * | 2017-01-09 | 2017-05-17 | 成都曙光光纤网络有限责任公司 | Automatic focusing device and method suitable for reflection-type TeraHertz wave system |
| CN108507970A (en) * | 2018-06-05 | 2018-09-07 | 中国工程物理研究院激光聚变研究中心 | Terahertz test sample device |
| CN108732122A (en) * | 2017-04-13 | 2018-11-02 | 南京理工大学 | A kind of terahertz imaging accurate positioning method based on surface plasmons |
| CN109297925A (en) * | 2018-10-09 | 2019-02-01 | 天津大学 | A kind of Terahertz high-resolution fast imaging device based on splits' positions perception |
| CN109884065A (en) * | 2018-09-05 | 2019-06-14 | 中国航发动力股份有限公司 | A method of element groove is detected using plane mirror |
| CN113507030A (en) * | 2021-06-09 | 2021-10-15 | 北京航空航天大学合肥创新研究院(北京航空航天大学合肥研究生院) | Self-rotating terahertz generation device |
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