CN108732122A - A kind of terahertz imaging accurate positioning method based on surface plasmons - Google Patents
A kind of terahertz imaging accurate positioning method based on surface plasmons Download PDFInfo
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- CN108732122A CN108732122A CN201710241155.8A CN201710241155A CN108732122A CN 108732122 A CN108732122 A CN 108732122A CN 201710241155 A CN201710241155 A CN 201710241155A CN 108732122 A CN108732122 A CN 108732122A
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- 238000003384 imaging method Methods 0.000 title claims abstract description 65
- 238000000034 method Methods 0.000 title claims abstract description 18
- 230000000737 periodic effect Effects 0.000 claims abstract description 50
- 229910052751 metal Inorganic materials 0.000 claims abstract description 13
- 239000002184 metal Substances 0.000 claims abstract description 13
- 238000001328 terahertz time-domain spectroscopy Methods 0.000 claims abstract description 9
- 238000012360 testing method Methods 0.000 claims abstract description 7
- 230000005284 excitation Effects 0.000 claims abstract description 5
- 230000005540 biological transmission Effects 0.000 claims abstract description 4
- 238000004519 manufacturing process Methods 0.000 claims abstract description 4
- 239000000463 material Substances 0.000 claims description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 238000002360 preparation method Methods 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 210000002381 plasma Anatomy 0.000 claims 1
- 239000000523 sample Substances 0.000 description 10
- 230000005684 electric field Effects 0.000 description 8
- 238000009826 distribution Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 6
- 238000005530 etching Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 235000012489 doughnuts Nutrition 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 229940079593 drug Drugs 0.000 description 2
- 206010018325 Congenital glaucomas Diseases 0.000 description 1
- 206010012565 Developmental glaucoma Diseases 0.000 description 1
- 208000007157 Hydrophthalmos Diseases 0.000 description 1
- 201000001024 buphthalmos Diseases 0.000 description 1
- 238000005094 computer simulation Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
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- Toxicology (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The terahertz imaging accurate positioning method based on surface plasmons that the invention discloses a kind of.This approach includes the following steps：First, the manufacturing cycle structure on metal film, the periodic structure can be in terahertz wave band excitating surface plasma waves；Secondly so that object under test and the relative position of the periodic structure are fixed；Finally, the electromagnetic wave incident that terahertz time-domain spectroscopy instrument is sent out is to above-mentioned periodic structure, to go out surface plasma-wave in the periodic structure surface excitation, and then obtain the imaging figure of the periodic structure sub-wavelength dimensions, according to the relative position of object under test and the periodic structure, measuring targets are positioned and are imaged.The point that service life structure prepares two known spacing obtains the engineer's scale during terahertz imaging using the distance of this point-to-point transmission as the engineer's scale of image.The present invention realizes the terahertz imaging precise positioning of sub-wavelength dimensions, and by preparing engineer's scale, the specific size of subsidiary imageable target.
Description
Technical field
The present invention relates to electromagnetic fields and matter interaction and THz imaging technology field, especially a kind of to be based on table
The terahertz imaging accurate positioning method of face plasmon.
Background technology
It is widely used THz imaging technology in recent years to carry out imaging using terahertz time-domain spectroscopic technology, is based on this
The imaging system built can be divided into transmission-type and reflective according to the difference of light path, and wherein, most of transmission-types imagings system
System needs additional probe unit, wherein needing probe to be tightly attached to sample surfaces is scanned imaging, total system is complex,
Therefore reflective imaging system is more universal.Terahertz time-domain spectroscopy imaging system based on this has been widely used at present
In the application of biomedical imaging, the detection of drugs drug and space material nondestructive inspection.However, terahertz imaging faces at present
A problem be that its resolution ratio is limited by Terahertz wavelength and can only achieve hundreds of microns to several millimeters of magnitude.
In existing imaging process, due to being limited by the time-domain spectroscopy instrument image scanning time, waited for being accurately positioned
It surveys in the position of object, needs to spend longer time.Simultaneously as object to be imaged is usually compared with wisp, imaging process
In treat imaging object Location-Unknown, cause the figure of actual imaging to be significantly larger than the real area of object to be imaged, cause into
As the time it takes is longer.
Invention content
Present invention aims at a kind of simplicity of offer, quickly the terahertz imaging based on surface plasmons is accurately fixed
Position method, and the terahertz imaging based on surface plasmons engineer's scale preparation method.
Realize that the technical solution of the object of the invention is：A kind of terahertz imaging based on surface plasmons is accurate
Localization method includes the following steps：
First, the manufacturing cycle structure on metal film, the periodic structure can be in terahertz wave band excitating surfaces etc.
Ion wave；
Secondly so that object under test and the relative position of the periodic structure are fixed；
Finally, the electromagnetic wave incident that terahertz time-domain spectroscopy instrument is sent out is to above-mentioned periodic structure, in the periodicity
Body structure surface inspires surface plasma-wave, and then obtains the imaging figure of the periodic structure sub-wavelength dimensions, according to be measured
The relative position of object and the periodic structure, measuring targets are positioned and are imaged.
Further, the periodic structure is circular periodical structure, triangular shaped periods structure, parallelogram period
Structure, polygon periodic structure, striated periodic structure.
Further, the periodic structure is the periodical concentric structure being made of multiple circles, the concentric circles
Round quantity is 2 or more in structure, and the circular diameter of most inner side is equal with adjacent circular spacing, ranging from 0.2~
0.4mm。
Further, the material of the metal film is gold, silver, copper or aluminium.
Further, the electromagnetic wave that the terahertz time-domain spectroscopy instrument is sent out, frequency range are 100~1000GHz.
Further, the periodic structure be etched in metal film a surface or two surfaces.
A kind of engineer's scale preparation method of the terahertz imaging based on surface plasmons, includes the following steps：
Using in claim 1 periodic structure prepare two known spacing point, using the distance of this point-to-point transmission as
The engineer's scale of image obtains the engineer's scale during terahertz imaging.
Compared with prior art, the present invention its remarkable advantage is：(1) specific fine by etching in material surface
Structure (being typically periodic sub-wavelength structure) realizes sub-wavelength imaging, and the high-precision to realize sub-wavelength dimensions is accurately fixed
Position；(2) sub-wavelength that fixed identical two periodic structures of spacing are realized is utilized to be imaged, by accurately measuring two periods
Property the distance between structure, realize the accurate scale of terahertz imaging, be of great significance for auxiliary terahertz imaging；
(3) time for finding object to be imaged during terahertz imaging is greatly optimized, is made using set periodic structure
For the label of target to be imaged, the imaging of target to be imaged can be realized rapidly；(4) can be during imaging rapidly
The accurate measurement process of scale of imaging object is treated in completion, and the detection and measurement to terahertz imaging object provide huge facility；
(5) current terahertz time-domain spectroscopy system is combined so that the technology can be put into most Product Process, be greatly expanded
The application range of surface plasmons has improved terahertz imaging systematic difference range and foreground.
Description of the drawings
Fig. 1 is that the present invention is based on the schematic diagrames of the terahertz imaging accurate positioning method of surface plasmons.
Fig. 2 is the schematic diagram that periodic structure is etched in a metal structure, wherein (a) is to etch week in a metal film
The processing graphics of phase structure, (b) be copper film surface etching periodic structure actual sample figure, be (c) institute's etch structures
Side cutaway view.
Fig. 3 be using Fig. 2 periodic structures 140GHz excitation under the obtained electric field strength distribution map of experiment test.
Fig. 4 is the electric field emulated using FDTD Solutions under 140GHz excitations using Fig. 2 periodic structures
Field intensity map.
Fig. 5 is that two circular ring structures completely the same with periodic structure shown in Fig. 2 are designed at a distance from 8mm
The simulation architecture figure come.
Fig. 6 be using Fig. 5 structure 140GHz excitation under gained electric field strength distribution map.
Specific implementation mode
In order to improve the resolution ratio of terahertz imaging system, it has been found that if excited in body surface to be imaged
Surface plasma-wave, to break through diffraction limit, realizes sub- wave then the resolution ratio of terahertz imaging can greatly improve
Long imaging.It (is typically periodically sub- wave by etching specific fine structure specifically to utilize in a material surface
Long structure) realize sub-wavelength imaging, to realize that the high-precision of sub-wavelength dimensions is accurately positioned；The fixed phase of spacing is utilized simultaneously
The sub-wavelength imaging that two same periodic structures are realized, is realized too by accurately measuring the distance between two periodic structures
The imaging of the engineer's scale of hertz imaging.
A kind of terahertz imaging accurate positioning method based on surface plasmons, includes the following steps：
First, the manufacturing cycle structure on metal film, the periodic structure can be in terahertz wave band excitating surfaces etc.
Ion wave；
Secondly so that object under test and the relative position of the periodic structure are fixed；
Finally, the electromagnetic wave incident that terahertz time-domain spectroscopy instrument is sent out is to above-mentioned periodic structure, in the periodicity
Body structure surface inspires surface plasma-wave, and then obtains the imaging figure of the periodic structure sub-wavelength dimensions, according to be measured
The relative position of object and the periodic structure, measuring targets are positioned and are imaged.
Further, the periodic structure is circular periodical structure, triangular shaped periods structure, parallelogram period
Structure, polygon periodic structure, striated periodic structure.
Further, the periodic structure is the periodical concentric structure being made of multiple circles, the concentric circles
Round quantity is 2 or more in structure, and the circular diameter of most inner side is equal with adjacent circular spacing, ranging from 0.2~
0.4mm。
Further, the material of the metal film is gold, silver, copper or aluminium.
Further, the electromagnetic wave that the terahertz time-domain spectroscopy instrument is sent out, frequency range are 100~1000GHz.
Further, the periodic structure be etched in metal film a surface or two surfaces.
A kind of engineer's scale preparation method of the terahertz imaging based on surface plasmons, includes the following steps：
Using in claim 1 periodic structure prepare two known spacing point, using the distance of this point-to-point transmission as
The engineer's scale of image obtains the engineer's scale during terahertz imaging.
In order to know more about the technology contents of the present invention, spy lifts specific embodiment and institute's accompanying drawings is coordinated to be described as follows.
Embodiment 1
The present embodiment by typical metal periodicity buphthalmos micro-nano structure excitating surface plasma wave, realize reach into
The sub-wavelength of ejected wave wavelength 1/10th is imaged.It, can be in terahertz imaging system meanwhile using structure proposed by the present invention
It is accurately positioned target location to be imaged, the time required to imageable target positioning is greatly reduced.Corresponding structure setting is become into mark
Ruler is spent, the measurement of the size of target to be imaged can be completed while imaging, imageable target information receipts are treated in raising
Collect efficiency.
As shown in Figure 1, preferred embodiment according to the present invention, a kind of in a kind of Terahertz based on surface plasmons
Imaging is accurately positioned and the measurement method of engineer's scale, includes the following steps：
Periodical circular ring structure is etched in a material surface, wherein in the terahertz electromagnetic wave incidence feelings of 140GHz frequencies
Under condition, the design parameter of etch structures is, using Fig. 2 as specific example, wherein Fig. 2 (a) is processed sample graphics；Fig. 2 (b)
For the practical optical microscope of processed sample；Fig. 2 (c) is sample side view, circular diameter a=centered on design parameter therein
0.1mm, etching cycle p=0.2mm, etched width w=0.1mm, etch depth d=1.68um；O is sample centre bit
It sets；The wave vector of K incident electromagnetic waves；Kx is the component that the incidence wave wave vector is propagated along surface, and θ is incidence wave and sample
The angle of normal normal direction.
Fig. 3 sees at 140GHz in the electric-field intensity distribution of the middle section of structure shown in figure 2 above, each square
The length of side of square is 0.2mm, and in above-mentioned image, the donut that the distribution situation of electric field at this time is formed is with about
The interval of 0.2mm sequentially forms annulus distribution, while can obtain the minimum interval that can be distinguished according to above-mentioned electric field coloured picture
About 0.2mm, therefore illustrate that the resolution ratio of obtained image with this configuration is about 0.2mm.The imaging obtained at this time
Resolution ratio is less than the wavelength 2.143mm's of incidence wave, this is because the surface etc. that incidence wave is excited on sample structure surface
The reason of ion wave, imaging resolution at this time is to be critically dependent on excited surface plasma-wave wavelength.Therefore, by this
Structure realizes the imaging of the sub-wavelength under 140GHz frequencies.
Fig. 4 is the body structure surface electric-field intensity distribution figure for the emulation done using simulation software according to Fig. 2 structures.
Fig. 5 is to etch two identical donut structure charts shown in Fig. 2 in a material surface, wherein being apart
8mm, as ratio scale during terahertz imaging
The positions Fig. 6 utilize Fig. 5 structures, the surface electric field distribution gone out using Computer Simulation that can significantly obtain an essence
The very high ratio scale at a distance of 8mm of degree.
Although the present invention has been disclosed as a preferred embodiment, however, it is not to limit the invention.Skill belonging to the present invention
Has usually intellectual in art field, without departing from the spirit and scope of the present invention, when can be used for a variety of modifications and variations.Cause
This, the scope of protection of the present invention is defined by those of the claims.
Claims (7)
1. a kind of terahertz imaging accurate positioning method based on surface plasmons, which is characterized in that include the following steps：
First, the manufacturing cycle structure on metal film, the periodic structure can be in terahertz wave band excitating surface plasmas
Wave；
Secondly so that object under test and the relative position of the periodic structure are fixed；
Finally, the electromagnetic wave incident that terahertz time-domain spectroscopy instrument is sent out is to above-mentioned periodic structure, in the periodic structure
Surface excitation goes out surface plasma-wave, and then obtains the imaging figure of the periodic structure sub-wavelength dimensions, according to object under test
With the relative position of the periodic structure, measuring targets are positioned and are imaged.
2. the terahertz imaging accurate positioning method according to claim 1 based on surface plasmons, feature exist
In the periodic structure is circular periodical structure, triangular shaped periods structure, parallelogram periodic structure, polygon week
Phase structure, striated periodic structure.
3. the terahertz imaging accurate positioning method according to claim 1 or 2 based on surface plasmons, feature
It is, the periodic structure is the periodical concentric structure being made of multiple circles, round number in the concentric structure
Amount is 2 or more, and the circular diameter of most inner side is equal with adjacent circular spacing, ranging from 0.2~0.4mm.
4. the terahertz imaging accurate positioning method according to claim 1 or 2 based on surface plasmons, feature
It is, the material of the metal film is gold, silver, copper or aluminium.
5. the terahertz imaging accurate positioning method according to claim 1 or 2 based on surface plasmons, feature
It is, the electromagnetic wave that the terahertz time-domain spectroscopy instrument is sent out, frequency range is 100~1000GHz.
6. the terahertz imaging accurate positioning method according to claim 1 or 2 based on surface plasmons, feature
Be, the periodic structure be etched in metal film a surface or two surfaces.
7. a kind of engineer's scale preparation method of the terahertz imaging based on surface plasmons, which is characterized in that including following
Step：
The point that two known spacing are prepared using the periodic structure in claim 1, using the distance of this point-to-point transmission as imaging
The engineer's scale of image obtains the engineer's scale during terahertz imaging.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104950545A (en) * | 2014-03-26 | 2015-09-30 | 南京理工大学 | Method for motivating surface plasma waves and excimers on non-metallic material and medium interfaces |
| JP2016157049A (en) * | 2015-02-26 | 2016-09-01 | 大学共同利用機関法人自然科学研究機構 | Sub-wavelength structure element |
| CN106154381A (en) * | 2016-07-26 | 2016-11-23 | 上海理工大学 | Two dimension buphthalmos structure Terahertz cdma system time-domain encoder and decoder |
| CN106290227A (en) * | 2016-08-25 | 2017-01-04 | 成都曙光光纤网络有限责任公司 | A kind of THz wave reflection imaging device and method |
| CN106290226A (en) * | 2016-09-19 | 2017-01-04 | 成都曙光光纤网络有限责任公司 | A kind of Terahertz transmission imaging device and method |
-
2017
- 2017-04-13 CN CN201710241155.8A patent/CN108732122A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104950545A (en) * | 2014-03-26 | 2015-09-30 | 南京理工大学 | Method for motivating surface plasma waves and excimers on non-metallic material and medium interfaces |
| JP2016157049A (en) * | 2015-02-26 | 2016-09-01 | 大学共同利用機関法人自然科学研究機構 | Sub-wavelength structure element |
| CN106154381A (en) * | 2016-07-26 | 2016-11-23 | 上海理工大学 | Two dimension buphthalmos structure Terahertz cdma system time-domain encoder and decoder |
| CN106290227A (en) * | 2016-08-25 | 2017-01-04 | 成都曙光光纤网络有限责任公司 | A kind of THz wave reflection imaging device and method |
| CN106290226A (en) * | 2016-09-19 | 2017-01-04 | 成都曙光光纤网络有限责任公司 | A kind of Terahertz transmission imaging device and method |
Non-Patent Citations (1)
| Title |
|---|
| 朱德锋: "太赫兹波在亚波长结构表面的共振与散射实验研究", 《万方数据》 * |
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