CN103940514B - A kind of broadband close shot ultraviolet imagery spectral device - Google Patents
A kind of broadband close shot ultraviolet imagery spectral device Download PDFInfo
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- CN103940514B CN103940514B CN201410177962.4A CN201410177962A CN103940514B CN 103940514 B CN103940514 B CN 103940514B CN 201410177962 A CN201410177962 A CN 201410177962A CN 103940514 B CN103940514 B CN 103940514B
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Abstract
The invention provides a kind of broadband close shot ultraviolet imagery spectral device, relate to photoelectric field, in wider ultraviolet spectral range, the problem of target cannot be detected in order to solve ultraviolet imagery spectral device delicately.Described device comprises: scanner section, for scanning sample with default step-length; Preposition imaging section, carries out zoom and focusing for the described reflected light by reflection mode described scanner section being scanned generation at every turn; Interference part, for becoming the first image and the second image respectively by the reflected light produced from described preposition imaging section, each scanning; Wherein, the picture material often organizing described first image is identical with the picture material of described second image, phase preset phase; Described relay imaging portion, interferes into the 3rd image for often organizing described first image with reflection mode with described second imaging importing; Described probe portion, for being converted to electric signal by the light signal of each described 3rd image after superposition interference and carrying out data processing.
Description
Technical field
The present invention relates to field of photoelectric technology, particularly relate to a kind of broadband close shot ultraviolet imagery spectral device.
Background technology
Imaging spectral technology, as the new technology in the fields such as target detection, testing of materials and analysis, owing to possessing high light flux, high spectral resolution, receives the extensive concern of countries in the world.At present, in fields such as material evidence qualification, trace detection, public safeties, the existing visible ray that works in infrared band, adopts the imaging spectrometer application example of the technology such as dispersion, liquid crystal tunable filter, interference imaging.Wherein interference imaging spectral technology can obtain the Interferogram of whole detector array plane, possesses high light flux, high-resolution feature, has higher using value.
Wherein, detect in application at close-range target, usually more pay close attention to the image detail of measured target, therefore need to obtain high-resolution image.The ultraviolet of current use, visible ray, near infrared imaging spectrometer, mainly to observe measured target for the purpose of the spectrum picture of particular range of wavelengths.Because ultraviolet band internal object radiation signal ratio is visible and weak 2 to 3 magnitudes of near-infrared band, when interference imaging spectral technology is applied in ultraviolet regime, the impact suppressing the long-wave signal such as visible ray, near infrared must be managed.But if adopt ultraviolet filter filter type to suppress visible ray and near infrared light, then the bandwidth due to ultraviolet filter is narrower, cannot meet the detection to the wide wavelength coverage of ultraviolet; If adopt lens and ultraviolet anti-reflection film to increase the transmission of ultraviolet light, then because optical material has stronger absorption to ultraviolet band, the energy that ultraviolet imagery detector can be caused to receive is weak, and the dynamic range of detectable signal is little.In a word, existing ultraviolet imagery spectral device cannot detect echo signal delicately in wider ultraviolet spectral range.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of broadband close shot ultraviolet imagery spectral device, cannot detect the problem of echo signal in order to solve prior art medium ultraviolet imaging spectral device in wider ultraviolet spectral range delicately.
A kind of broadband close shot ultraviolet imagery spectral device, comprising: light source, for sample irradiating ultraviolet light; Scanner section, for scanning described sample with default step-length, to make the reflected light of the part scanned for each time respectively by the imaging on interference part of preposition imaging section; Described preposition imaging section, is focused for the described reflected light by reflection mode described scanner section being scanned generation at every turn, to make described reflected light in the imaging of described interference part; Described interference part, for the reflected light produced from described preposition imaging section, each scanning is become the first image and the second image respectively, and often will organize described first image and described second image transfer to relay imaging portion; Wherein, the picture material often organizing described first image is identical with the picture material of described second image, phase preset phase; Described relay imaging portion, for will often organize with reflection mode described first image interfere into the 3rd image with described second imaging importing and described 3rd image transfer to probe portion; Described probe portion, for being converted to the light signal of each described 3rd image after superposition interference electric signal and carrying out data processing, to obtain the image information of described sample under each spectral wavelength.
Optionally, described preposition imaging section comprises Cassegrain (Cassegrain) double mirror, and described relay imaging portion comprises Ao Funa (Offner) three catoptron.
Optionally, described Cassegrain's double mirror or described Ao Funa tri-catoptron are provided with broadband high-reflecting film.
Further, described scanner section, also for scanning described sample with default step-length, the fluorescence excited to make the part scanned for each time is respectively by the imaging on interference part of preposition imaging section; Described preposition imaging section, is focused specifically for the described reflected light by reflection mode described scanner section being scanned generation at every turn, to make described reflected light together with described fluorescence in the imaging of described interference part together with described fluorescence; Described interference part, specifically for the reflected light that will produce from described preposition imaging section, each scanning together with fluorescence, become described first image and described second image respectively, and often will organize described first image and described second image transfer to described relay imaging portion.
Concrete, each described 3rd image after superposition interference comprises two-dimensional image information and the one dimension interference fringe information of described measured target.
Optionally, described sample is 0 to 10 meter to the light path of described probe portion.
Optionally, described interference part comprises without slit amplitude-splittine interference structure.
Optionally, describedly beam splitter prism interference structure or triangle common path interference structure is comprised without slit amplitude-splittine interference structure.
The broadband close shot ultraviolet imagery spectral device that the embodiment of the present invention provides, the reflected light that scanner section can be scanned generation with reflection mode by its preposition imaging section is at every turn focused, thus the first image and the second image is become respectively in interference part, relay imaging portion often will organize described first image with reflection mode again and interfere into the 3rd image with described second imaging importing, and will be converted to electric signal by the light signal of probe portion by each 3rd image after superposition interference and be carried out data processing.Because preposition imaging section and relay imaging portion are all the mode imagings of reflecting, ultraviolet light is not from imaging device transmission, doing so avoids the absorption of imaging device for each wave band ultraviolet light itself, greatly extend the wavelength band of imageable ultraviolet light, in addition, reflection configuration also avoid the dispersion phenomenon that can produce when using lens, thus substantially increases ultraviolet imagery quality and interference fringe quality, make spectrum picture more clear, spectroscopic data is more accurate; And interference part realize under the condition not utilizing slit interfere more UV energy can be made to enter probe portion, obtain Interferogram in ultraviolet broadband breakthroughly, thus realize within the scope of ultraviolet wide-band spectrum, detect echo signal delicately.
Accompanying drawing explanation
Fig. 1 is a kind of structural representation of the broadband close shot ultraviolet imagery spectral device that embodiments of the invention provide;
Fig. 2 is the another kind of structural representation of the broadband close shot ultraviolet imagery spectral device that embodiments of the invention provide.
Embodiment
The invention provides a kind of broadband close shot ultraviolet imagery spectral device, below in conjunction with accompanying drawing, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, do not limit the present invention.
As shown in Figure 1, embodiments of the invention provide a kind of broadband close shot ultraviolet imagery spectral device, comprising: light source 1, for sample S irradiating ultraviolet light; Scanner section 2, for scanning sample S with default step-length, to make the reflected light of the part scanned for each time respectively by the imaging on interference part 4 of preposition imaging section 3; Preposition imaging section 3, for focusing the scanner section 2 described reflected light that scanning produces at every turn, to make described reflected light in interference part 4 imaging by reflection mode; Interference part 4, for the reflected light that will produce from preposition imaging section 3, each scanning respectively by 4 one-tenth, interference part first image and the second image, and often will organize described first image and described second image transfer to relay imaging portion 5; Wherein, the picture material often organizing described first image is identical with the picture material of described second image, phase preset phase; Relay imaging portion 5, for will often organize with reflection mode described first image interfere into the 3rd image with described second imaging importing and described 3rd image transfer to probe portion 6; Probe portion 6, for being converted to the light signal of each described 3rd image after superposition interference electric signal and carrying out data processing, to obtain the image information of sample S under each spectral wavelength.
The broadband close shot ultraviolet imagery spectral device that the embodiment of the present invention provides, scanner section 2 reflected light that scanning produces at every turn can be focused with reflection mode by its preposition imaging section 3, thus become the first image and the second image respectively in interference part 4, relay imaging portion 5 often will organize described first image with reflection mode again and interfere into the 3rd image with described second imaging importing, and will be converted to electric signal by the light signal of probe portion 6 by each 3rd image after superposition interference and be carried out data processing.Because preposition imaging section 3 and relay imaging portion 5 are all the mode imagings of reflecting, ultraviolet light is not from imaging device transmission, doing so avoids the absorption of imaging device for each wave band ultraviolet light itself, greatly extend the wavelength band of imageable ultraviolet light, in addition, reflection configuration also avoid the dispersion phenomenon that can produce when using lens, thus substantially increases ultraviolet imagery quality and interference fringe quality, make spectrum picture more clear, spectroscopic data is more accurate; And interference part realize under the condition not utilizing slit interfere more UV energy can be made to enter probe portion, obtain Interferogram in ultraviolet broadband breakthroughly, thus realize within the scope of ultraviolet wide-band spectrum, detect echo signal delicately.
Broadband close shot ultraviolet imagery spectral device of the present invention, be operated in that emittance is weak, the absorbable ultraviolet band of spectral energy, imaging can be carried out to the image in target wave band, therefore light source 1 wants the illumination that can provide target ultraviolet band, and in order to not omit the image-forming information in target zone on any wavelength, preferably, light source 1 can be any light source that can provide continuous outgoing spectrum, and embodiments of the invention do not limit this.
In close shot imaging, after the ultraviolet lighting that light source 1 sends is mapped to sample S, need finally to incide in probe portion 6 through a series of optical device.Sample S can be 0 to 10 meter to the light path of probe portion 6.In these optical device, the direction of propagation for changing light had, have for imaging.In the device of the direction of propagation for changing light, scanner section 2 plays vital effect, it progressively can make the light reflection ultraviolet of the different piece of sample S incide preposition imaging section 3 by scanning, thus makes sample S form a series of images corresponding with sweep test in probe portion 6.Optionally, preposition imaging section 3 can comprise the various catoptron that can realize imaging function, embodiments of the invention do not limit this, but catoptric imaging function can be realized with relatively simple structure to make preposition imaging section 3, in one embodiment of the invention, preposition imaging section 3 preferably includes Cassegrain's double mirror.Same, relay imaging portion 5 also can comprise any catoptron with image transfer function, is preferably Ao Funa tri-catoptron.
Adopt reflection configuration can reduce the absorption of whole imaging device to ultraviolet light, enable imaging device imaging in wider ultraviolet spectral range.Further, in order to better suppress the interference of visible ray and near infrared light, broadband high-reflecting film can also be set on one of them reflecting surface of Cassegrain's double mirror, to make ultraviolet light then be absorbed by high efficiency reflection visible ray and near infrared light.Certainly, on certain reflecting surface that broadband high-reflecting film also can be arranged on Ao Funa tri-catoptron or other media, as long as the medium in light path.
The imaging device that embodiments of the invention provide is that the image information and interference fringe information by detecting sample realizes distinguishing imaging to the image under continuous spectrum, therefore except needing the sweep test in preposition imaging section 3 couples of sample S to carry out except imaging, also needing interference part 4 to assist and forming interference fringe.
According to physics principle, interference is that identical by frequency, that amplitude same phase is different optical superposition is formed.Therefore, as long as the reflected light of incidence can be divided into two bundles that frequency is identical, amplitude is identical, phase place is different by interference part 4, then allow this two-beam mutually superpose, interference part 4 can for realizing the arbitrary structures of above-mentioned functions.Such as, interference part 4 can comprise various without slit amplitude-splittine interference structure, and as beam splitter prism interference structure or triangle common path interference structure etc., embodiments of the invention do not limit this.In one embodiment of the invention, can utilize the structures such as semi-transparent semi-reflecting film that the reflected light inciding interference part 4 is divided into two parts, two parts reflected light forms the first image and second image of band preset phase difference respectively in interference part 4, thus realizes interfering.Relay imaging portion 5 these two image transfer to the detector of probe portion 6 will can also superpose the 3rd image forming band interference fringe.Through the scanning of scanner section 2 couples of sample S, a series of 3rd image of sample S corresponding formation in probe portion 6, wherein each 3rd image comprises the two-dimensional image information of sample S and corresponding one dimension interference fringe information, carry out data processing by interrelated for this series of 3rd image, the image information of sample S under each spectral wavelength can be obtained.
It should be noted that, certain part of measured target S can only be imaged onto on the ad-hoc location of the detector of probe portion 6 by scanner section 2 at every turn.Image for every part of sample S all needs the direction imaging successively along image movement during scanning on the detector of probe portion 6, in twice adjacent imaging, the corresponding imaging moiety of sample S all moves the distance of a pixel on the detector of probe portion 6, and the spectral image information finally obtained is just accurate.Therefore, the step-length of scanner section 2 needs precise hard_drawn tuhes.
Further, in UV wavelength range, some measured target S can inspire the fluorescence of specific wavelength by ultraviolet source irradiation, because the wavelength of these fluorescence has specificity, and with the ultraviolet light irradiated has corresponding relation, therefore, if fluorescence spectrum image can be distinguished from spectrum picture, the discriminating of measured target will be contributed to.But fluorescent effect is the light exciting outgoing after measured target absorption luminous energy, and wavelength of fluorescence is different from reflected light wavelength usually, and the ultraviolet spectrum imaging device that therefore wave band is narrower possibly cannot detect reflected light and fluorescence simultaneously.But the broadband close shot ultraviolet imagery spectral device that embodiments of the invention provide, can be good at obtaining reflected light image and fluoroscopic image clearly owing to having wider response wave band simultaneously.
Specifically, scanner section 2 is also for scanning sample S with default step-length, and the fluorescence excited to make the part scanned for each time is respectively by the imaging on interference part 4 of preposition imaging section 3; Accordingly, preposition imaging section 3 specifically for the reflected light scanning generation being focused together with fluorescence by reflection mode at every turn, to make described reflected light together with described fluorescence in interference part 4 imaging; Interference part 4 specifically for the reflected light that will produce from preposition imaging section 3, each scanning together with fluorescence, can become the first image and the second image respectively, and often will organize the first image and the second image transfer to relay imaging portion 5.Like this, just simultaneously containing reflected light information and fluorescence information in the 3rd image being delivered to probe portion 6, thus the detection for predetermined substance is effectively realized.
Below by specific embodiment, broadband close shot ultraviolet imagery spectral device provided by the invention is described in detail.
As shown in Figure 2, the invention provides a kind of ultraviolet broadband close shot mixed light inteference imaging spectral apparatus, comprise ultra violet illumination structure 81, pendulum scarnning mirror system 82, preposition close shot image-forming objective lens 83, interferometric optical structure 84, relay imaging object lens 85 and ultraviolet array image-forming and data handling system 86.
The course of work of ultraviolet broadband close shot mixed light inteference imaging spectral apparatus of the present invention is: close-range target 812 image forms the optical imagery that a width is mixed by reflected light and fluorescence excitation under the irradiation of broadband W lighting source 811, this image enters preposition close shot image-forming objective lens 83 after overswing scarnning mirror system 82, and then focal imaging is in interferometric optical structure 84; Interferometric optical structure 84 and relay imaging object lens 85 jointly convert above-mentioned image to a width and comprise the optical imagery of close-range target two-dimensional image information and one dimension interference fringe information simultaneously and focus on ultraviolet focal-plane detector array surface 861, are then converted to a width digitizing interference image by data Collection & Processing System 863; By pendulum scarnning mirror system 82, one-dimensional scanning is carried out to above-mentioned close-range target, can interference image sequence be collected and form a set of interference image cube; This cube metadata is after data Collection & Processing System 863 carries out the steps such as filtering, Fourier transform, spectrum correction, the a set of spectral image cube of final formation, therefrom can extract the two-dimensional image information of close-range target, reflected light spectral information and fluorescence spectrum information.
Wherein, the ultra violet illumination light source 811 of ultra violet illumination structure 81 adopts deuterium lamp to throw light on, and has continuous print outgoing spectrum at the ultraviolet operating spectrum band of 200nm to 400nm, thus close-range target 812 is uniformly lighted.
Pendulum scarnning mirror system 82 is plane pendulum mirror 821, turntable controller 822 adopts precision rotation platform, its rotation center is positioned on optical axis, and turntable rotates and possesses hardware synchronizer with the image acquisition of ultraviolet focal-plane detector 862, effective to ensure the two-dimentional interference image collected.
Preposition close shot image-forming objective lens 83 adopts Cassegrain's double mirror structure, and two catoptrons are sphere, and the relative position of two catoptrons can adjust, and makes apparatus of the present invention realize focus function.
Interferometric optical structure 84 adopts entity Michelson (Michelson) interference structure.
Relay imaging object lens 85 adopt Ao Funa tri-to reflect and pass as structure, and two catoptrons are concentric spherical, and Ao Funa passes the imaging characteristic as structure with aberrationless, no color differnece.
The ultraviolet reflectance material that catoptron in the pendulum scarnning mirror system 82 of inteference imaging spectral apparatus, preposition close shot image-forming objective lens 83, relay imaging object lens 85 adopts all is greater than 92% at ultraviolet operating spectrum band reflectivity.And on a certain reflecting surface in pendulum scarnning mirror system 82 or preposition close shot image-forming objective lens 83 or relay imaging object lens 85, be coated with ultraviolet broadband high-reflection film, this reflective coating is greater than 97% at ultraviolet operating spectrum band reflectivity mean value, in visible ray, near infrared wavelength region, average reflectance is less than 2%, can effectively suppress the long-wave signal such as visible ray, near infrared, not lose ultraviolet band spectral information simultaneously.This ultraviolet broadband high-reflection film also can be plated in the beam splitter of interferometric optical structure 84 on the surface.
Ultraviolet array image-forming and data handling system 86 select high resolving power ultraviolet focal-plane detector 862, ultraviolet focal-plane array is 1024 × 1024 pixels, data Collection & Processing System 863 comprises flow chart of data processing, and the data processing means such as data structure foundation and storage, reflected light and fluorescence identifying.
In the present embodiment, pendulum scarnning mirror system 82 is between close-range target and preposition close shot image-forming objective lens 83, and two reflector positions of interferometric optical structure 84 are on the imaging surface of preposition close shot image-forming objective lens 83.Relay imaging object lens 85 by the imaging surface of interferometric optical structure 84 liang of catoptrons picture be imaged onto ultraviolet focal-plane battle array survey device 862 ultraviolet focal-plane array 861 on and gather.Ultra violet illumination light source 811 throws light on after close-range target 812, the reflected light of close-range target 812 and fluorescence excitation image jointly enter preposition close shot image-forming objective lens 83 after pendulum mirror 821 is turned back, after the light beam reflected through the first catoptron 831 of preposition close shot image-forming objective lens 83 is reflected by the second catoptron 832 of preposition close shot image-forming objective lens 83 outgoing to interferometric optical structure 84 and focal imaging on its two catoptron.Through two catoptrons reflection coherent light beam again after interferometric optical structure 84 outgoing to relay imaging object lens 85, outgoing after the light beam of relay imaging object lens 85 first catoptron 851 reflection again reflects via relay imaging object lens 85 first catoptron 851 after the reflection of relay imaging object lens second catoptron 852, the outgoing beam focal imaging simultaneously comprising close-range target two-dimensional image information and one dimension interference fringe information to the ultraviolet focal-plane array 861 of ultraviolet array image-forming and data handling system 86 is gathered two-dimentional interference image by ultraviolet focal-plane detector 862, then a width digitizing interference image is converted to by data Collection & Processing System 863.By pendulum scarnning mirror system 82, one-dimensional scanning is carried out to above-mentioned close-range target, can interference image sequence be collected and form a set of interference image cube.This cube metadata is after data Collection & Processing System 863 carries out the steps such as filtering, Fourier transform, spectrum correction, the a set of spectral image cube of final formation, therefrom can extract the two-dimensional image information of close-range target 812, reflected light spectral information and fluorescence spectrum information.
Although be example object, disclose the preferred embodiments of the present invention, it is also possible for those skilled in the art will recognize various improvement, increase and replacement, and therefore, scope of the present invention should be not limited to above-described embodiment.
Claims (8)
1. a broadband close shot ultraviolet imagery spectral device, is characterized in that, comprising:
Light source, for sample irradiating ultraviolet light;
Scanner section, for scanning described sample with default step-length, to make the reflected light of the part scanned for each time respectively by the imaging on interference part of preposition imaging section;
Described preposition imaging section, is focused for the described reflected light by reflection mode described scanner section being scanned generation at every turn, to make described reflected light in the imaging of described interference part;
Described interference part, for the reflected light produced from described preposition imaging section, each scanning is become the first image and the second image respectively, and often will organize described first image and described second image transfer to relay imaging portion; Wherein, the picture material often organizing described first image is identical with the picture material of described second image, phase preset phase;
Described relay imaging portion, for will often organize with reflection mode described first image interfere into the 3rd image with described second imaging importing and described 3rd image transfer to probe portion;
Described probe portion, for being converted to the light signal of each described 3rd image after superposition interference electric signal and carrying out data processing, to obtain the image information of described sample under each spectral wavelength.
2. device according to claim 1, is characterized in that, described preposition imaging section comprises Cassegrain's double mirror, and described relay imaging portion comprises Ao Funa tri-catoptron.
3. device according to claim 2, is characterized in that, described Cassegrain's double mirror or described Ao Funa tri-catoptron are provided with broadband high-reflecting film.
4. device according to claim 1, is characterized in that, described scanner section, and also for scanning described sample with default step-length, the fluorescence excited to make the part scanned for each time is respectively by the imaging on interference part of preposition imaging section; Described preposition imaging section, is focused specifically for the described reflected light by reflection mode described scanner section being scanned generation at every turn, to make described reflected light together with described fluorescence in the imaging of described interference part together with described fluorescence; Described interference part, specifically for the reflected light that will produce from described preposition imaging section, each scanning together with fluorescence, become described first image and described second image respectively, and often will organize described first image and described second image transfer to described relay imaging portion.
5. device according to claim 1, is characterized in that, each described 3rd image after superposition interference comprises two-dimensional image information and the one dimension interference fringe information of described measured target.
6. device according to claim 1, is characterized in that, described sample is 0 to 10 meter to the light path of described probe portion.
7. device according to any one of claim 1 to 6, is characterized in that, described interference part comprises without slit amplitude-splittine interference structure.
8. device according to claim 7, is characterized in that, describedly comprises beam splitter prism interference structure or triangle common path interference structure without slit amplitude-splittine interference structure.
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| CN104155000B (en) * | 2014-08-21 | 2016-05-11 | 中国科学院光电研究院 | A kind of linear gradient optical filter type multi-spectral imager based on secondary imaging |
| CN104296870A (en) * | 2014-08-21 | 2015-01-21 | 中国科学院光电研究院 | Linear gradual filter type multispectral imager based on secondary imaging |
| CN107305252B (en) * | 2016-04-25 | 2020-11-13 | 南京理工大学 | Rapid imaging method for actively extracting depth details of target |
| CN106657824A (en) * | 2016-11-22 | 2017-05-10 | 北京理工大学 | Infrared photography optical enhancement system |
| CN106679814A (en) * | 2016-11-22 | 2017-05-17 | 北京理工大学 | Microsecond infrared real-time temperature measuring system |
| CN107680063B (en) * | 2017-10-23 | 2021-03-12 | 西华大学 | Method for enhancing direct digital image |
| CN111899033B (en) * | 2020-07-09 | 2024-04-16 | 西安交通大学 | Article digital identity construction system and method based on blockchain and hyperspectrum |
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