CN106289214B - A kind of anti-HI high impact S-shaped spring beam MEMS annular vibration gyro resonance minor structure - Google Patents
A kind of anti-HI high impact S-shaped spring beam MEMS annular vibration gyro resonance minor structure Download PDFInfo
- Publication number
- CN106289214B CN106289214B CN201610918609.6A CN201610918609A CN106289214B CN 106289214 B CN106289214 B CN 106289214B CN 201610918609 A CN201610918609 A CN 201610918609A CN 106289214 B CN106289214 B CN 106289214B
- Authority
- CN
- China
- Prior art keywords
- overarm
- spoke
- resilient support
- anchor point
- cylindrical center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Micromachines (AREA)
Abstract
The present invention relates to MEMS oscillation gyro, specifically a kind of anti-HI high impact S-shaped spring beam MEMS annular vibration gyro resonance minor structure.The present invention solves the problems, such as that existing MEMS oscillation gyro shock resistance is poor.A kind of anti-HI high impact S-shaped spring beam MEMS annular vibration gyro resonance minor structure, including the resilient support overarm of circular tuned mass, cylindrical center anchor point, spoke-like；Wherein, cylindrical center anchor point is located at the inner cavity of circular tuned mass, and the axis of cylindrical center anchor point and the axis of circular tuned mass overlap；The number of spoke-like resilient support overarm is eight, and eight spoke-like resilient support overarms surround the axis equidistant arrangement of cylindrical center anchor point；Each spoke-like resilient support overarm is made of the first sheet like flexible support overarm, the overarm of S-shaped resilient support, the support overarm of the second sheet like flexible.The present invention is suitable for the fields such as weapon guidance, aerospace, auto industry, biomedicine, consumer electronic.
Description
Technical field
The present invention relates to MEMS oscillation gyro, specifically a kind of anti-HI high impact S-shaped spring beam MEMS annular vibration gyro is humorous
Oscillator structure.
Background technique
MEMS oscillation gyro is a kind of Inertial Sensor Unit based on Coriolis effect, can detecte the angle of rotating object
Degree or angular speed.MEMS oscillation gyro have many advantages, such as small in size, light weight, it is low in energy consumption, can be mass, is cheap, can
To be widely used in the fields such as weapon guidance, aerospace, auto industry, biomedicine, consumer electronic, have extremely extensively
Application prospect.The working principle of MEMS oscillation gyro is as follows: there are two resonance frequencies identical intrinsic four for MEMS oscillation gyro
One of flexural vibration mode can be used as driven-mode, another flexural vibration mode by antinode flexural vibration mode
As sensed-mode；When not having turning rate input, the harmonic oscillator of MEMS oscillation gyro is driving under the action of driving electrodes
The detecting electrode output of Modality work, MEMS oscillation gyro is zero；When there is turning rate input, the harmonic oscillator of MEMS oscillation gyro
It works under Coriolis force effect in sensed-mode, the detecting electrode of MEMS oscillation gyro exports corresponding speed letter at this time
Input angular velocity can be obtained through the resolving of gyro peripheral circuit in breath.However practice have shown that, existing MEMS oscillation gyro is humorous due to its
The geometry of oscillator is limited, the problem of generally existing shock resistance difference.It is necessary to invent a kind of completely new harmonic oscillator thus
Structure, to solve the problems, such as that existing MEMS oscillation gyro shock resistance is poor.
Summary of the invention
The present invention is poor in order to solve the problems, such as existing MEMS oscillation gyro shock resistance, provides a kind of anti-HI high impact S
Shape spring beam MEMS annular vibration gyro resonance minor structure.
The present invention is achieved by the following technical scheme:
A kind of anti-HI high impact S-shaped spring beam MEMS annular vibration gyro resonance minor structure, including circular tuned mass, circle
Cylindrical central anchor point, spoke-like resilient support overarm；
Wherein, cylindrical center anchor point is located at the inner cavity of circular tuned mass, and the axis of cylindrical center anchor point with
The axis of circular tuned mass overlaps；The number of spoke-like resilient support overarm is eight, and eight spoke-like elasticity
Support overarm surrounds the axis equidistant arrangement of cylindrical center anchor point；
Each spoke-like resilient support overarm is by the first sheet like flexible support overarm, the overarm of S-shaped resilient support, second
Shape resilient support overarm is constituted；The lateral surface of the tail end and cylindrical center anchor point of the support overarm of first sheet like flexible is fixed；S-shaped
The head end of the tail end and the support overarm of the first sheet like flexible that flexibly support overarm is fixed；The tail end of second sheet like flexible support overarm
It is fixed with the head end of S-shaped resilient support overarm；The head end of second sheet like flexible support overarm and the inside of circular tuned mass
Face is fixed.
When work, the lower end surface of cylindrical center anchor point is bonded with the substrate of glass of MEMS oscillation gyro.Circular resonance
The lateral surface of quality is equipped with the arc-shaped electrode that eight central angles are 40 degree, glass of eight arc-shaped electrodes equally with MEMS oscillation gyro
The bonding of glass substrate, and the position of eight arc-shaped electrodes and the position of eight spoke-like resilient support overarms correspond (such as Fig. 3 institute
Show).Wherein four arc-shaped electrodes are as driving electrodes, and four additional arc-shaped electrode is as detecting electrode, and four driving electrodes
It is staggered with four detecting electrodes.The present invention maintains four antinodes that circumferential wave number is 2 to vibrate under the action of control system.Tool
Body running process is as follows: when not having turning rate input, the present invention makees face under the excitation of four driving electrodes, with driven-mode
Interior four antinodes bending vibration (as shown in Figure 4), four detecting electrodes are located at the node of four antinode bending vibrations at this time, MEMS vibration
The output of dynamic gyro is zero.When there is turning rate input, the present invention is made four in face under coriolis force coupling with sensed-mode
Antinode bending vibration (as shown in Figure 5), four detecting electrodes are located at the antinode of four antinode bending vibrations at this time, and Oscillation Amplitude
Related to input angular velocity, MEMS oscillation gyro measures input angular velocity in real time.
Based on the above process, a kind of anti-HI high impact S-shaped spring beam MEMS annular vibration gyro harmonic oscillator of the present invention
Structure has following advantage by using the S-shaped elastic beam structure of high-aspect-ratio: first, the present invention is in two operation modes
Tuned mass under (driven-mode and sensed-mode) is equal, thus on the one hand makes two operation modes (driven-mode and inspections
Survey mode) resonance frequency matches be easier, on the other hand realize two operation modes (driven-mode and sensed-mode)
Damp Natural matching.Second, resonance structure of the invention is a high-aspect-ratio entirety, so that MEMS oscillation gyro is anti-
Impact property greatly improves.
Structure of the invention is reasonable, ingenious in design, efficiently solves the problems, such as that existing MEMS oscillation gyro shock resistance is poor,
Suitable for fields such as weapon guidance, aerospace, auto industry, biomedicine, consumer electronics.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention.
Fig. 2 is the structural schematic diagram of spoke-like resilient support overarm in the present invention.
Fig. 3 is working condition of the invention with reference to figure.
Fig. 4 is vibration shape schematic diagram of the present invention under driven-mode.
Fig. 5 is vibration shape schematic diagram of the present invention under sensed-mode.
In figure: 1- annular shape tuned mass, 2- cylindrical center anchor point, the resilient support overarm of 3- spoke-like, 31- first
Shape resilient support overarm, the resilient support overarm of 32-S shape, the support overarm of the second sheet like flexible of 33-, 4- arc-shaped electrode.
Specific embodiment
A kind of anti-HI high impact S-shaped spring beam MEMS annular vibration gyro resonance minor structure, including circular tuned mass 1,
Cylindrical center anchor point 2, spoke-like resilient support overarm 3；
Wherein, cylindrical center anchor point 2 is located at the inner cavity of circular tuned mass 1, and the axis of cylindrical center anchor point 2
It overlaps with the axis of circular tuned mass 1；The number of spoke-like resilient support overarm 3 is eight, and eight spoke-likes
Resilient support overarm 3 surrounds the axis equidistant arrangement of cylindrical center anchor point 2；
Each spoke-like resilient support overarm 3 by the first sheet like flexible support overarm 31, S-shaped resilient support overarm 32,
Second sheet like flexible support overarm 33 is constituted；The tail end of first sheet like flexible support overarm 31 is outer with cylindrical center anchor point 2
Side is fixed；The tail end of S-shaped resilient support overarm 32 and the head end of the first sheet like flexible support overarm 31 are fixed；Second sheet bullet
Property support overarm 33 tail end and S-shaped resilient support hang oneself from a beam 32 head end fix；The head end of second sheet like flexible support overarm 33
It is fixed with the medial surface of circular tuned mass 1.
When it is implemented, the size of eight spoke-like resilient support overarms 3 is consistent, and eight spoke-like resilient support overarms
3 height is equal with the height of circular tuned mass 1.2, eight circular tuned mass 1, cylindrical center anchor point spokes
Shape resilient support overarm 3 is all made of monocrystalline silicon piece and is process, and circular tuned mass 1, cylindrical center anchor point 2, eight
Spoke-like resilient support overarm 3 is integrated using Bulk micro machining manufacture.
Claims (1)
1. a kind of anti-HI high impact S-shaped spring beam MEMS annular vibration gyro resonance minor structure, it is characterised in that: including circular humorous
It shakes quality (1), cylindrical center anchor point (2), spoke-like resilient support overarm (3)；
Wherein, cylindrical center anchor point (2) is located at the inner cavity of circular tuned mass (1), and the axis of cylindrical center anchor point (2)
Line and the axis of circular tuned mass (1) overlap；The number of spoke-like resilient support overarm (3) is eight, and eight
Spoke-like resilient support overarm (3) surrounds the axis equidistant arrangement of cylindrical center anchor point (2)；
Each spoke-like resilient support overarm (3) supports overarm (31), S-shaped resilient support overarm by the first sheet like flexible
(32), the second sheet like flexible support overarm (33) is constituted；The tail end and cylindrical center of first sheet like flexible support overarm (31)
The lateral surface of anchor point (2) is fixed；The head end of the tail end of S-shaped resilient support overarm (32) and the first sheet like flexible support overarm (31)
It is fixed；The head end that the tail end of second sheet like flexible support overarm (33) flexibly supports overarm (32) with S-shaped is fixed；Second sheet bullet
Property support overarm (33) head end with annular shape tuned mass (1) medial surface fix；
The size of eight spoke-likes resilient support overarm (3) is consistent, and the height of eight spoke-likes resilient support overarms (3) with
The height of circular tuned mass (1) is equal；
Circular tuned mass (1), cylindrical center anchor point (2), eight spoke-like resilient support overarms (3) are all made of monocrystalline silicon
Piece is process, and annular shape tuned mass (1), cylindrical center anchor point (2), eight spoke-likes flexibly support overarm (3) and adopt
It is manufactured and is integrated with Bulk micro machining；
The lower end surface of cylindrical center anchor point is bonded with the substrate of glass of MEMS oscillation gyro；The lateral surface of circular tuned mass
The arc-shaped electrode for being 40 degree equipped with eight central angles, eight arc-shaped electrodes are equally bonded with the substrate of glass of MEMS oscillation gyro,
And the position of eight arc-shaped electrodes and the position of eight spoke-like resilient support overarms correspond；Wherein four arc-shaped electrodes are made
For driving electrodes, four additional arc-shaped electrode is as detecting electrode, and four driving electrodes and four detecting electrodes are staggered；
When not having turning rate input, under the excitation of four driving electrodes, four antinode bending vibration in face is made with driven-mode,
Four detecting electrodes are located at the node of four antinode bending vibrations at this time, and the output of MEMS oscillation gyro is zero；When there is angular speed
When input, under coriolis force coupling, four antinode bending vibration in face is made with sensed-mode, four detecting electrodes are located at this time
At the antinode of four antinode bending vibrations, and Oscillation Amplitude is related to input angular velocity, and MEMS oscillation gyro measures input angle in real time
Speed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610918609.6A CN106289214B (en) | 2016-10-21 | 2016-10-21 | A kind of anti-HI high impact S-shaped spring beam MEMS annular vibration gyro resonance minor structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610918609.6A CN106289214B (en) | 2016-10-21 | 2016-10-21 | A kind of anti-HI high impact S-shaped spring beam MEMS annular vibration gyro resonance minor structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106289214A CN106289214A (en) | 2017-01-04 |
| CN106289214B true CN106289214B (en) | 2019-03-05 |
Family
ID=57719236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610918609.6A Active CN106289214B (en) | 2016-10-21 | 2016-10-21 | A kind of anti-HI high impact S-shaped spring beam MEMS annular vibration gyro resonance minor structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106289214B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019032177A1 (en) * | 2017-08-08 | 2019-02-14 | Hrl Laboratories, Llc | High quality factor mems silicon flower-of-life vibratory gyroscope |
| CN107607100B (en) * | 2017-10-19 | 2019-09-27 | 北方电子研究院安徽有限公司 | A kind of silicon micro mechanical angular oscillation gyro shock resistance elastic bolster guide structure |
| CN111156979B (en) * | 2019-12-31 | 2022-03-04 | 瑞声科技（南京）有限公司 | MEMS gyroscope |
| CN213120571U (en) * | 2020-07-09 | 2021-05-04 | 瑞声科技（南京）有限公司 | Gyroscope |
| CN112857352B (en) * | 2021-04-15 | 2022-03-25 | 中北大学 | Redundant double-ring type micromechanical gyroscope structure with good impact resistance |
| CN114217093B (en) * | 2021-06-21 | 2024-04-26 | 西北工业大学 | Annular coupling system suitable for MEMS modal localization sensor |
| CN114485600B (en) * | 2022-03-15 | 2022-09-13 | 重庆天箭惯性科技股份有限公司 | Integrated gyro with multi-anchor-point high-strength multi-fluctuation annular structure |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104283460A (en) * | 2014-10-11 | 2015-01-14 | 北京工业大学 | High-efficiency multidirectional vibration energy collection device |
-
2016
- 2016-10-21 CN CN201610918609.6A patent/CN106289214B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104283460A (en) * | 2014-10-11 | 2015-01-14 | 北京工业大学 | High-efficiency multidirectional vibration energy collection device |
Non-Patent Citations (1)
| Title |
|---|
| "Structure design and simulation of MEMS vibrating ring gyroscope";Kou Zhi-wei etal.;《Journal of Measurement Science and Instrumentation》;20160331;第7卷(第1期);第78-83页 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106289214A (en) | 2017-01-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106289214B (en) | A kind of anti-HI high impact S-shaped spring beam MEMS annular vibration gyro resonance minor structure | |
| CN106289215B (en) | A kind of holohedral symmetry U-shaped beam MEMS annular vibration gyro resonance minor structure | |
| TWI647425B (en) | Improved gyroscope structure and gyroscope | |
| CN106643685A (en) | Brand new U-shaped foldable beam silicon micro-annular vibration gyroscope | |
| FI127203B (en) | Vibrating micromechanical sensor of the angular velocity | |
| CN104165624B (en) | Sidewall piezoelectric-driven ring vibrating gyroscope and driving and detection method | |
| CN106643686A (en) | Silicon microring vibrating gyroscope harmonic oscillator structure of all symmetrical folding elastic beam | |
| FI126070B (en) | Improved ring gyroscope design and gyroscope | |
| RU2009144800A (en) | ROTATION SPEED SENSOR | |
| CN101261126B (en) | Micro- solid mode gyroscope | |
| CN102297690A (en) | Piezoelectricity driven capacitance detecting two-axis gyroscope | |
| CN105043369B (en) | A kind of outer rim fixed laser processing polycyclic gyro of Piezoelectric Driving and preparation method thereof | |
| CN102353369B (en) | Combination type quartz cup-shaped fluctuation top harmonic oscillator | |
| WO2010016093A1 (en) | Rotational vibration gyro | |
| JP2005241500A (en) | Angular velocity sensor | |
| TW201716748A (en) | Dual-axis ultra-robust rotation rate sensor for automotive applications | |
| CN101398305B (en) | Piezo-electricity micro-solid mode gyroscope with concentrated mass blocks | |
| CN106100440A (en) | A kind of based on out-of-plane bending vibration mode high speed rotating ultrasound electric machine | |
| RU2012129338A (en) | VIBRATION TRANSPORTING MACHINE | |
| CN103575262B (en) | Wave quality and strengthen piezoelectric acoustic solid fluctuation disc micro-gyroscope | |
| CN106123884A (en) | A kind of highly sensitive MEMS annular vibration gyro harmonic oscillator structure | |
| CN102297689B (en) | Electrostatically driven piezoelectric detection closed loop controlled micro-solid modal gyro | |
| US11585659B2 (en) | MEMS wave gyroscope | |
| CN104215234B (en) | A kind of method that utilization binodal point electrode eliminates cylindrical shell gyro temperature drift | |
| RU161310U1 (en) | SENSITIVE ELEMENT OF ANGULAR SPEED SENSOR |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |