CN111156979B - MEMS gyroscope - Google Patents
MEMS gyroscope Download PDFInfo
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- CN111156979B CN111156979B CN201911416888.6A CN201911416888A CN111156979B CN 111156979 B CN111156979 B CN 111156979B CN 201911416888 A CN201911416888 A CN 201911416888A CN 111156979 B CN111156979 B CN 111156979B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/02—Rotary gyroscopes
- G01C19/04—Details
- G01C19/16—Suspensions; Bearings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/02—Rotary gyroscopes
- G01C19/42—Rotary gyroscopes for indicating rate of turn; for integrating rate of turn
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Abstract
The invention discloses an MEMS gyroscope, which relates to a gyroscope; the resonator comprises a harmonic oscillator and a plurality of external electrodes, wherein the external electrodes are distributed on the periphery of the harmonic oscillator in a circumferential array manner, the harmonic oscillator is in a disc-shaped net structure with an axial symmetry, the harmonic oscillator comprises an anchor point structure and a spiral line structure which are positioned at the center of the harmonic oscillator, the spiral line structure is fixedly connected with the anchor point structure, and the spiral line structure is interwoven into a net shape by a plurality of spiral line units in a circumferential array manner according to the anchor point structure; based on the advantages of the disc-type gyroscope, the spiral line structure is formed by circumferentially arraying spiral line units according to starting points, anchor points are arranged in the spiral line structure, measures such as simplifying spiral line sections and the like are adopted to reduce the process difficulty, micro-nano processing is facilitated, the width h of resonator deformation can be reduced, and the Q is further increasedTED(ii) a The invention utilizes the symmetrical characteristic of the spiral line structure to realize that the gyro driving mode and the detection mode have large quality factors and degenerate vibration modes and conform to the Cogowski effect.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to a gyroscope, in particular to a MEMS gyroscope.
[ background of the invention ]
The MEMS gyroscope has very wide application in the consumer electronics market due to the advantages of small size, low power consumption, easy processing and the like, and in recent years, the MEMS resonant gyroscope is also applied in the navigation field of automobile autopilot and the like along with the gradual improvement of the precision of the MEMS gyroscope.
The gyroscope quality factor is a key parameter for representing energy loss during the resonance operation of the gyroscope, and the quality factor is one of indirect evaluation gyroscope performance indexes. Common energy loss mechanisms include air damping losses, surface losses, anchor point losses, electronics damping, and thermoelastic damping losses. Since the gyroscope is packaged in high vacuum, thermoelastic damping can be regarded as a main energy loss source in operation, and thermoelastic quality factor QTEDRepresents the upper limit of the gyroscope figure of merit. In the case of a one-dimensional beam, the thermoelastic quality factor QTEDThe calculation model is as follows:
wherein f is0And frelaxRespectively, the resonant frequency and the heat release frequency. E is Young's modulus and α is the linear coefficient of thermal diffusion. T is0Is the equivalent temperature of the beam, CvThe specific heat capacity, k the thermal conductivity and h the width in the direction of flexural deformation. By the formula, QTEDWith f0/frelaxThe variation of (a) is shown in fig. 1.
For silicon materials commonly used for gyroscopes, the typical thermal release frequency f of the MEMS resonatorrelax>2MHz, much greater than the vibration frequency of a typical gyroscope. Therefore, to increase QTEDCan increase the heat release frequency f of the gyroscoperelax. And according to the heat release frequency frelaxThe width h of the resonator distortion can be reduced, and the Q can be increasedTED. Therefore, the slot and hole optimization is carried out on the flexible deformation entity in the gyroscope structure, so that the gyroscope Q is improved through comprehensive analysisTEDThe effective scheme of (1).
The MEMS gyroscope is a vibrating gyroscope based on the Coriolis force, and the common wired vibrating tuning fork type gyroscope and the disc-shaped gyroscope are two types. Among them, the disk gyroscope has the potential to become a high-performance gyroscope due to the characteristics of mode self-matching, low temperature drift, low anchor point loss and the like. But the space layout is limited to be small, so that the quality factor of the disc-shaped gyroscope is low, and at present, the disc-shaped gyroscope achieves high performance less frequently.
[ summary of the invention ]
The present invention is directed to a MEMS gyroscope, which overcomes the above-mentioned drawbacks of the prior art and can raise the Q of the gyroscopeTEDThereby achieving high performance of the disk gyroscope.
The MEMS gyroscope comprises a harmonic oscillator and a plurality of external electrodes, wherein the external electrodes are distributed on the periphery of the harmonic oscillator in a circumferential array manner, the harmonic oscillator is in a disc-shaped net structure with symmetrical axes, the harmonic oscillator comprises an anchor point structure and a spiral line structure, the anchor point structure and the spiral line structure are positioned in the center of the harmonic oscillator, the spiral line structure is fixedly connected with the anchor point structure, and the spiral line structure is woven into a net shape by a plurality of spiral line units in a circumferential array manner according to the anchor point structure;
the helix unit includes certainly same starting point end first helix and the second helix that extends towards opposite direction on the anchor point structure, the direction of rotation of first helix and second helix is opposite, first helix and second helix extend towards same termination end and be in the termination end links to each other, first helix with the second helix intersects in being located the starting point end is kept away from the nodical point of termination end one side, the starting point end the termination end reaches nodical collineation, first helix and second helix are about the initiating end and terminate the line axial symmetry between the end, the anchor point structure covers the part helix unit, external electrode is fixed in the termination end.
As a further improvement of the present invention, two adjacent first spiral lines are parallel and equal in length.
As a further improvement of the present invention, the spiral line between the starting end and the intersection point forms a first closed structure, the spiral line between the intersection point and the terminating end forms a second closed structure, and the first closed structure and the second closed structure are two heart-shaped structures with opposite directions.
As a further improvement of the invention, the helical line structure is a helical net structure formed by intersecting a plurality of helical line units, and the helical net structure comprises polygonal holes.
As a further improvement of the invention, the hole is internally provided with a spoke structure which is positioned at the acute angle part of the hole and is connected with two adjacent sides forming the acute angle.
As a further improvement of the present invention, the spiral mesh structure is a honeycomb shape, the honeycomb-shaped spiral line structure has a plurality of honeycomb-shaped sub-units, the honeycomb-shaped sub-units include spiral lines and connecting beams extending along the radial direction of the anchor point structure, and the holes are surrounded by the connecting beams and the spiral lines in an end-to-end connection manner and are in a hexagonal structure.
As a further improvement of the invention, the connecting beam is a straight beam, and the connecting beam is radially connected with a node formed by intersecting spiral line units.
As a further improvement of the invention, a hanging mass block is arranged in the spiral line structure.
As a further improvement of the invention, the hanging mass block is connected with the connecting beam, the hanging mass block is in an axisymmetric structure, and the symmetric axis is overlapped with the straight line of the connecting beam.
As a further improvement of the invention, an internal electrode is arranged in the spiral line structure.
As a further improvement of the invention, the internal electrodes are uniformly distributed in the spiral line structure in a circumferential array with the anchor point structure as the center, and the internal electrodes are positioned on the inner side of the hanging mass block.
The invention has the beneficial effects that: the invention provides an MEMS gyroscope based on the advantages of a disc gyroscope; the spiral line structure is formed by interweaving the spiral line units into a net shape according to the circumferential array of the starting points, an anchor point structure is arranged in the spiral line structure, the measures such as simplifying the spiral line section and the like are adopted to reduce the process difficulty, facilitate the micro-nano processing, reduce the width h of the resonator deformation at the same time,further increase QTED(ii) a Meanwhile, the spiral line in the spiral line structure is easy to deform in the driving mode direction due to the characteristic that the circular arc of the spiral line gradually opens, so that stress concentration can be reduced; the invention utilizes the symmetrical characteristic of the spiral line structure to realize that the gyro driving mode and the detection mode have large quality factors and degenerate vibration modes and conform to the Cogowski effect.
[ description of the drawings ]
FIG. 1 is a diagram of the thermo-elastic quality factor Q in the background of the inventionTEDWith f0/frelaxA graph of the variation relationship of (c).
Fig. 2 is a schematic view of the spiral network structure of the present invention.
Fig. 3 is a schematic structural diagram of the spiral mesh structure in the driving mode of the present invention.
Fig. 4 is a schematic structural diagram of a spiral mesh structure in a detection mode of the present invention.
FIG. 5 is a schematic view of a partial spoke construction of the present invention.
FIG. 6 is a schematic diagram of the structure of the honeycomb helix structure of the present invention.
Fig. 7 is a schematic diagram of the structure of a honeycomb shaped sub-unit of the present invention.
Fig. 8 is a schematic structural diagram of a honeycomb-shaped helical line structure in the driving mode of the present invention.
FIG. 9 is a schematic diagram of a honeycomb helix structure in a detection mode of the present invention.
Fig. 10 is a schematic view of the structure of fig. 6 with internal electrodes and suspended mass.
Figure 11 is an enlarged view of a portion of the suspended mass of figure 10.
Fig. 12 is a schematic structural diagram of a honeycomb-shaped helical line structure with suspended masses in the driving mode of the present invention.
FIG. 13 is a schematic diagram of a honeycomb helix structure with suspended masses in the detection mode of the present invention.
Wherein, 1, anchor point structure; 2. a helical mesh structure; 21. a first spiral line;
22. a second spiral line; 3. an external electrode; 4. a spoke structure; 5. a honeycomb-shaped helical wire structure;
51. a honeycomb-shaped subunit; 52. a connecting beam; 6. an internal electrode; 7. a mass is suspended.
[ detailed description ] embodiments
The following describes 4 embodiments of the present invention in detail with reference to the accompanying drawings.
the MEMS gyroscope of this embodiment, including harmonic oscillator and 16 external electrodes 3, external electrodes 3 are that the circumference array distributes in harmonic oscillator 6 periphery, the harmonic oscillator is the disc network structure of axle center symmetry, the harmonic oscillator is including anchor point structure 1 and the helix structure that is located the harmonic oscillator center, helix structure and anchor point fixed connection, the helix structure carries out the circumference array by 16 helix units according to the starting point and constitutes, and every helix unit corresponds an external electrodes 3.
Referring to fig. 2, the helical line structure is a helical mesh structure 2 woven by a plurality of helical line unit circumferential arrays, the first helical line 21 is parallel and equal in length, the helical mesh structure further includes a parallelogram hole formed by a plurality of helical lines, the helical line units include a first helical line 21 and a second helical line 22 extending from a same starting point end a on the anchor point structure 1 in opposite directions, the rotation directions of the first helical line 21 and the second helical line 22 are opposite, the first helical line 21 and the second helical line 22 extend toward a same terminating end C and are connected to each other at the terminating end C, the first helical line 21 and the second helical line 32 intersect at a point B at which the starting point end a is far away from the terminating end C, the starting point end a, the terminating end C and the intersecting point B are collinear, first helix 21 and second helix 32 are about the line axial symmetry between initiating terminal A and the termination end C, anchor point 1 covers part helix unit, external electrode 3 is fixed in termination end C. The two spiral lines between the point a and the point B form a first closed structure, the two spiral lines between the point B and the point C form a second closed structure, the first closed structure and the second closed structure are two heart-shaped structures with opposite directions, and the heart-shaped structure is specifically a shape formed by bending and extending two C-shaped arc lines from the same starting point to the same end point. In this embodiment, the helical mesh structure 2 is composed of a plurality of helical line units, which have high symmetry and the helical line has the characteristic of gradually opening the arc, so that the stress concentration is reduced.
Due to the symmetry of the helical net structure 2, the net gyroscope based on the combination of the helical lines has two modes with the same mode shape, the first mode is the mode shape along 0 °/90 °, as shown in fig. 3, and is generally called as the driving mode; the second mode is the mode shape along 45 °/135 °, as shown in fig. 4, and is commonly referred to as the detection mode; the helical network structure 2 is easily deformed in the driving mode direction due to the involute characteristic of the helical arc, and reduces stress concentration.
The detection principle of the mesh gyroscope based on the spiral combination under the action of the external angular velocity ω can be expressed as follows: under the excitation of external driving force, the gyroscope vibrates according to a driving mode. At this time, when the gyro is subjected to the external angular velocity ω, the angular velocity ω generates a coriolis force resultant force in the 45 °/135 ° direction, and the gyro vibrates in the 45 °/135 ° direction with the mode shape of the detection mode by the coriolis force resultant force. By detecting the vibration displacement of the helical mesh structure 2 in the detection mode, the magnitude of the angular velocity ω can be obtained.
A plurality of external electrodes 3 are distributed outside the spiral net structure 2, an external capacitor is formed between the external electrodes 3 and the spiral net structure 2, and the external capacitor is realized by the external capacitor: a) generating a driving force required for forcing the gyroscope to vibrate in a mode shape of a driving mode; b) detecting a displacement in the detection direction; c) the frequency of the driving mode and the frequency of the detection mode are the same through the regulation and control of the external electrode 3; d) suppressing quadrature errors of the gyroscope.
the present embodiment has substantially the same structure as embodiment 1, except that: spoke structures 4 are arranged in holes formed by the intersection of the spiral line structures 2, and the spoke structures 4 are positioned at acute angles of the holes and are connected with two adjacent sides forming the acute angles; specifically, the spoke structures 4 are located at acute angles on the left side and the right side of a hole of a parallelogram, the spoke structures 4 are in a straight beam shape, after the spoke structures 4 are added, the hole structures of the parallelogram are all obtuse-angle hexagons, and other deformation improvements made on the spoke structures 4 enable the hole with the acute-angle structure to be deformed into the hole with the obtuse-angle structure. The spoke structure 4 can reduce the processing degree of difficulty a little, weakens the influence of the sharp angle structure of net node department in the spiral network structure 2 to the performance to the accessible changes the size of spoke structure 4 everywhere, and then adjusts the frequency of drive mode and detection mode, in order to reach the accurate matching of mode.
the helical structure proposed in the present embodiment is a honeycomb-shaped helical structure 5, the honeycomb-shaped helical structure 5 being constituted by a deformation treatment of the helical mesh structure 2, the deformation treatment including connecting nodes of the helical mesh structure 2 in the radial direction of the anchor point structure using the connecting beams 52 and removing the helical line intersecting between circumferentially adjacent connecting beams 52, thereby forming honeycomb-shaped sub-units surrounded by the left and right connecting beams 52 and the upper and lower spiral line units, the honeycomb-shaped sub-unit comprises a spiral and connecting beams 52 extending in radial direction of the anchor point, the holes are surrounded by the connecting beams 52 and the spiral lines in an end-to-end connection mode and are in a hexagonal structure, the connecting beams 52 are linear beams, the honeycomb-shaped spiral line structure 5 is provided with 6 layers of honeycomb-shaped sub-unit annular belts, each layer of honeycomb-shaped sub-unit annular belt is composed of 16 honeycomb-shaped sub-units 51, and each honeycomb-shaped sub-unit 51 is composed of a connecting beam 52 and a spiral line unit; the connecting beam 52 is a linear beam, the connecting beam 52 is radially connected with a node formed by intersecting spiral line units, the honeycomb-shaped gyroscope based on spiral line combination has two modes with the same vibration mode, as shown in fig. 8, the first mode is the vibration mode along 0 °/90 °; as shown in fig. 9, the second mode is a mode shape along 45 °/135 °, and the detection principle of the gyro structure under the action of the external angular velocity ω can be analogized to that of embodiment 1.
The honeycombed spiral line structure 5 of this embodiment can reduce the processing degree of difficulty a little, weakens the influence of the sharp angle structure of net node department in the spiral network structure 2 to the performance.
Implementation 4, as illustrated in fig. 10-13:
the present embodiment has substantially the same structure as embodiment 3, except that: a hanging mass block 7 is arranged in the spiral line structure, and the hanging mass block 7 is located in a non-deformation area of the spiral line structure. The suspended mass blocks 7 are of a butterfly-shaped symmetrical structure with a small middle and two large ends, the suspended mass blocks 7 are adaptive to the size of the honeycomb-shaped sub-units 51, the gravity points of the suspended mass blocks 7 are connected with the connecting beam 52, the honeycomb-shaped sub-units 51 can be filled in the left half part of one suspended mass block 7 and the right half part of the other adjacent suspended mass block 7, the suspended mass blocks 7 are sequentially arranged, and therefore a sensitive mass block girdle with the anchor point structure 1 as the center is formed, and the embodiment is provided with 3 layers of sensitive mass block girdle; be equipped with internal electrode 6 in the helical line structure, it is similar with hanging quality piece 7, internal electrode 6 uses anchor point structure 1 to form the internal electrode clitellum in the helical line structure as central circumference array evenly distributed, and this embodiment is equipped with the internal electrode clitellum on 1 layer, internal electrode 6 is located hang the inboard of quality piece 7.
This embodiment also has two modes with the same mode shape, as shown in fig. 12, the first mode is the mode shape along 0 °/90 °; as shown in fig. 13, the second mode is a mode shape along 45 °/135 °, and the detection principle of the gyro structure under the action of the external angular velocity ω can be analogized to embodiment 3.
By adding the suspension mass block 7 in the honeycomb-shaped gyroscope, the effective quality of the structure can be improved, and the thermoelastic quality factor Q is improvedTED(ii) a The working capacitance is increased, so that the driving and detecting effects of the external electrode 3 on the harmonic oscillator of the embodiment are greatly improved.
While the foregoing is directed to embodiments of the present invention, it will be understood by those skilled in the art that various changes may be made without departing from the spirit and scope of the invention.
Claims (11)
1. An MEMS gyroscope comprises a harmonic oscillator and a plurality of external electrodes, wherein the external electrodes are distributed on the periphery of the harmonic oscillator in a circumferential array mode, and the MEMS gyroscope is characterized in that: the harmonic oscillator is of a disc-shaped net structure with symmetrical axes, the harmonic oscillator comprises an anchor point structure and a spiral line structure, the anchor point structure and the spiral line structure are positioned in the center of the harmonic oscillator, the spiral line structure is fixedly connected with the anchor point structure, the spiral line structure is a spiral net structure formed by intersecting a plurality of spiral line units or a honeycomb-shaped spiral line structure formed by deforming the spiral net structure, and when the spiral line structure is of the spiral net structure, the spiral line structure is formed by interweaving a plurality of spiral line units into a net shape in a circumferential array mode according to the anchor point structure;
the helix unit includes certainly same starting point end first helix and the second helix that extends towards opposite direction on the anchor point structure, the direction of rotation of first helix and second helix is opposite, first helix and second helix extend towards same termination end and be in the termination end links to each other, first helix with the second helix intersects in being located the starting point end is kept away from the nodical point of termination end one side, the starting point end the termination end reaches nodical collineation, first helix and second helix are about the initiating end and terminate the line axial symmetry between the end, the anchor point structure covers the part helix unit, external electrode is fixed in the termination end.
2. A MEMS gyroscope according to claim 1, wherein: two adjacent first spiral lines are parallel and equal in length.
3. A MEMS gyroscope according to claim 1, wherein: the first spiral line and the second spiral line between the starting point end and the intersection point form a first closed structure, the first spiral line and the second spiral line between the intersection point and the termination end form a second closed structure, and the first closed structure and the second closed structure are heart-shaped structures with opposite directions.
4. A MEMS gyroscope according to claim 1, wherein: the spiral mesh structure includes polygonal holes.
5. A MEMS gyroscope according to claim 4, wherein: the spoke structure is arranged in the hole, is positioned at the acute angle part of the hole and is connected with two adjacent side edges forming the acute angle.
6. A MEMS gyroscope according to claim 4, wherein: honeycombed helix structure has a plurality of honeycombed subelements, honeycombed subelement includes the helix and follows anchor point structure's radial extending's tie-beam, the hole by tie-beam and helix end to end constitute and enclose and be the hexagon structure.
7. A MEMS gyroscope according to claim 6, wherein: the connecting beam is a linear beam, and the connecting beam is radially connected with a node formed by intersecting the spiral line units.
8. A MEMS gyroscope according to claim 6, wherein: a hanging mass block is arranged in the spiral line structure.
9. A MEMS gyroscope according to claim 8, wherein: the suspension mass block is connected with the connecting beam, the suspension mass block is of an axisymmetric structure, and the symmetric axis is overlapped with the straight line where the connecting beam is located.
10. A MEMS gyroscope according to any of claims 8 to 9, wherein: an internal electrode is arranged in the spiral line structure.
11. A MEMS gyroscope according to claim 10, wherein: the internal electrodes are uniformly distributed in the spiral line structure in a circumferential array by taking the anchor point structure as a center, and the internal electrodes are positioned on the inner side of the hanging mass block.
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