CN106248265A - A kind of diffused-silicon pressure pick-up device - Google Patents
A kind of diffused-silicon pressure pick-up device Download PDFInfo
- Publication number
- CN106248265A CN106248265A CN201610799884.0A CN201610799884A CN106248265A CN 106248265 A CN106248265 A CN 106248265A CN 201610799884 A CN201610799884 A CN 201610799884A CN 106248265 A CN106248265 A CN 106248265A
- Authority
- CN
- China
- Prior art keywords
- test
- fishplate bar
- pressure
- silicon
- diffused
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 43
- 239000010703 silicon Substances 0.000 title claims abstract description 43
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 19
- 238000009792 diffusion process Methods 0.000 claims abstract description 6
- 239000012528 membrane Substances 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 9
- 238000007789 sealing Methods 0.000 abstract description 6
- 239000000428 dust Substances 0.000 abstract description 5
- 238000010276 construction Methods 0.000 abstract description 3
- 101150038956 cup-4 gene Proteins 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002372 labelling Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses a kind of diffused-silicon pressure pick-up device, the middle part of pressure fishplate bar vertically extends air laterally and connects skirt, pressure fishplate bar twist-on is in test housing, pressure fishplate bar is provided with O-ring seal with the contact position of test housing, the medial surface of pressure fishplate bar is fixed with test silicon cup, test silicon cup bridge joint connects the outfan of skirt at air, test silicon cup upper surface is bonded with diaphragm, four diffusion resistances connected in rectifier circuit it are provided with on diaphragm, two outfans of rectifier circuit are connected to test leading-out terminal by wire, two test leading-out terminals extend vertically through out from the both sides of pressure fishplate bar.This practicality is greatly improved its sealing effectiveness, it is ensured that measuring accuracy, and is provided with airstrainer, prevents the engaged test silicon cup of dust, improves test effect, simple in construction, easily realizes, have a good application prospect.
Description
Technical field
The present invention relates to stress test technical field, be specifically related to a kind of diffused-silicon pressure pick-up device.
Background technology
Diffused-silicon pressure pick-up device, have reliable operation, stable performance, easy to install, volume is little, lightweight,
The high point of the ratio of performance to price, therefore, is used widely in various positive/negative pressures are measured.But, existing diffused-silicon pressure
Pick-up device, structure is complicated, is not convenient to use, and sealing is the best, easily causes measurement error.
Summary of the invention
It is an object of the invention to overcome existing diffused-silicon pressure pick-up device, structure is complicated, is not convenient to use, and seals
Property is the best, the problem easily causing measurement error.The diffused-silicon pressure pick-up device of the present invention, at pressure fishplate bar and test housing
Between increase O-ring seal, pressure fishplate bar run through test leading-out terminal upper edge be provided with gasket seal, be greatly improved it
Sealing effectiveness, it is ensured that measuring accuracy, and it is provided with airstrainer, prevent the engaged test silicon cup of dust, improve test effect,
Simple in construction, easily realizes, and has a good application prospect.
In order to achieve the above object, the technical solution adopted in the present invention is:
A kind of diffused-silicon pressure pick-up device, it is characterised in that: include that cross section is T-shaped pressure fishplate bar, described pressure fishplate bar
Middle part vertically extends air laterally and connects skirt, described pressure fishplate bar twist-on in test housing, described pressure fishplate bar and survey
The contact position of examination housing is provided with O-ring seal, and the medial surface of described pressure fishplate bar is fixed with test silicon cup, described test silicon cup
Bridge joint connects the outfan of skirt at air, and described test silicon cup upper surface is bonded with diaphragm, described diaphragm is provided with in rectification
Four diffusion resistances that bridge circuit connects, two outfans of described rectifier circuit are connected to test by wire and draw
Terminal, two test leading-out terminals extend vertically through out from the both sides of pressure fishplate bar.
Aforesaid a kind of diffused-silicon pressure pick-up device, it is characterised in that: described pressure fishplate bar runs through test leading-out terminal
Upper edge be provided with gasket seal.
Aforesaid a kind of diffused-silicon pressure pick-up device, it is characterised in that: described test leading-out terminal uses conductive copper sheet
Make.
Aforesaid a kind of diffused-silicon pressure pick-up device, it is characterised in that: described diaphragm is p-type or N-type conductive membrane layer.
Aforesaid a kind of diffused-silicon pressure pick-up device, it is characterised in that: described air is provided with one layer of sky in connecing skirt
Gas drainage screen.
Aforesaid a kind of diffused-silicon pressure pick-up device, it is characterised in that: the thickness of described diaphragm is between 0.3-1mm.
The invention has the beneficial effects as follows: the diffused-silicon pressure pick-up device of the present invention, pressure fishplate bar with test housing it
Between increase O-ring seal, pressure fishplate bar run through test leading-out terminal upper edge be provided with gasket seal, be greatly improved the close of its
Envelope effect, it is ensured that measuring accuracy, and it is provided with airstrainer, prevent the engaged test silicon cup of dust, improve test effect, knot
Structure is simple, easily realizes, has a good application prospect.
Accompanying drawing explanation
Fig. 1 is the structural representation of the diffused-silicon pressure pick-up device of the present invention.
In accompanying drawing, the implication of labelling is as follows:
1: pressure fishplate bar;2: test housing;3: O-ring seal;4: test silicon cup;5: diaphragm;6: diffusion resistance;7: test is drawn
Terminal;8: gasket seal;9: airstrainer;10: air connects skirt.
Detailed description of the invention
Below in conjunction with Figure of description, the present invention is further illustrated.
As it is shown in figure 1, the diffused-silicon pressure pick-up device of the present invention, it is T-shaped pressure fishplate bar 1 including cross section, described pressure
The middle part of power fishplate bar 1 vertically extends air laterally and connects skirt 10, and described pressure fishplate bar 1 twist-on is in test housing 2, described
Pressure fishplate bar 1 is provided with O-ring seal 3 with the contact position of test housing 2, it is achieved the sealing of the first order, described pressure fishplate bar 1
Medial surface is fixed with test silicon cup 4, and described test silicon cup 4 bridges the outfan connecing skirt 10 at air, on described test silicon cup 4
Surface is bonded with diaphragm 5, and diaphragm 5 is p-type or N-type conductive membrane layer, and thickness is between 0.3-1mm, ultra-thin conductive membrane layer
The effect forming semiconductor gauge is more preferable, when ambient pressure connect by air skirt 10 be transported on test silicon cup 4 time, diaphragm
5 deformation that can induce it accurately, and, diaphragm 5 is provided with four diffusion resistances 6 connected in rectifier circuit,
Two outfans of described rectifier circuit by wire be connected to test leading-out terminal 7, two test leading-out terminal 7 from
The both sides of pressure fishplate bar 1 extend vertically through out, and diffusion resistance 6, for the effect of deformation is converted to the signal of telecommunication, is drawn by test
Terminal 7 exports.
Described pressure fishplate bar 1 runs through the upper edge of test leading-out terminal 7 and is provided with gasket seal 8, it is achieved the sealing of the second level,
Described test leading-out terminal 7 uses conductive copper sheet to make, and improves the reliability of signal of telecommunication transmission.
Described air is provided with a layer of air drainage screen 9 in connecing skirt 10, prevent the engaged test silicon cup of dust, affect shape
Become effect, in order to ensure test effect.
In sum, the diffused-silicon pressure pick-up device of the present invention, increase between pressure fishplate bar and test housing and seal
Cushion rubber, the upper edge running through test leading-out terminal at pressure fishplate bar is provided with gasket seal, is greatly improved its sealing effectiveness, it is ensured that
Measuring accuracy, and it is provided with airstrainer, prevent the engaged test silicon cup of dust, improve and test effect, simple in construction, easily
Realize, have a good application prospect.
The ultimate principle of the present invention, principal character and advantage have more than been shown and described.The technical staff of the industry should
Understanding, the present invention is not restricted to the described embodiments, and the simply explanation present invention's described in above-described embodiment and description is former
Reason, without departing from the spirit and scope of the present invention, the present invention also has various changes and modifications, these changes and improvements
Both fall within scope of the claimed invention.Claimed scope is by appending claims and equivalent circle thereof
Fixed.
Claims (6)
1. a diffused-silicon pressure pick-up device, it is characterised in that: including that cross section is T-shaped pressure fishplate bar (1), described pressure connects
The middle part of plate (1) vertically extends air laterally and connects skirt (10), described pressure fishplate bar (1) twist-on in test housing (2),
Described pressure fishplate bar (1) is provided with O-ring seal (3), the medial surface of described pressure fishplate bar (1) with the contact position of test housing (2)
Being fixed with test silicon cup (4), described test silicon cup (4) bridge joint connects the outfan of skirt (10), described test silicon cup (4) at air
Upper surface is bonded with diaphragm (5), and described diaphragm (5) is provided with four diffusion resistances (6) connected in rectifier circuit, described
Two outfans of rectifier circuit by wire be connected to test leading-out terminal (7), two test leading-out terminal (7) from
The both sides of pressure fishplate bar (1) extend vertically through out.
A kind of diffused-silicon pressure pick-up device the most according to claim 1, it is characterised in that: described pressure fishplate bar (1) is passed through
The upper edge wearing test leading-out terminal (7) is provided with gasket seal (8).
A kind of diffused-silicon pressure pick-up device the most according to claim 1, it is characterised in that: described test leading-out terminal
(7) conductive copper sheet is used to make.
A kind of diffused-silicon pressure pick-up device the most according to claim 1, it is characterised in that: described diaphragm (5) be p-type or
N-type conductive membrane layer.
A kind of diffused-silicon pressure pick-up device the most according to claim 1, it is characterised in that: described air connects skirt (10)
Inside it is provided with a layer of air drainage screen (9).
A kind of diffused-silicon pressure pick-up device the most according to claim 4, it is characterised in that: the thickness of described diaphragm (5)
Between 0.3-1mm.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610799884.0A CN106248265A (en) | 2016-08-30 | 2016-08-30 | A kind of diffused-silicon pressure pick-up device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610799884.0A CN106248265A (en) | 2016-08-30 | 2016-08-30 | A kind of diffused-silicon pressure pick-up device |
Publications (1)
Publication Number | Publication Date |
---|---|
CN106248265A true CN106248265A (en) | 2016-12-21 |
Family
ID=57598490
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610799884.0A Pending CN106248265A (en) | 2016-08-30 | 2016-08-30 | A kind of diffused-silicon pressure pick-up device |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN106248265A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106989851A (en) * | 2017-05-05 | 2017-07-28 | 芜湖市海联机械设备有限公司 | A kind of force snesor |
CN112304475A (en) * | 2020-10-20 | 2021-02-02 | 苏丽霞 | Controllable contact pin type pressure sensor for pressure detection |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN87209309U (en) * | 1987-06-20 | 1988-05-18 | 北京半导体器件十厂 | Silicon piezo-risistive baroceptor |
CN2211601Y (en) * | 1994-05-20 | 1995-11-01 | 上海天水电器厂 | Pressure transducer |
CN202582822U (en) * | 2012-05-24 | 2012-12-05 | 江苏润仪仪表有限公司 | Anti-blocking diffused silicon capacitance intelligent pressure transmitter |
CN203337312U (en) * | 2013-06-27 | 2013-12-11 | 北京强度环境研究所 | Surface pressure sensor having waterproof ventilation structure |
CN204027754U (en) * | 2014-09-05 | 2014-12-17 | 沈阳市传感技术研究所 | The film isolated form gauge pressure transducer of external balance chamber |
CN104729783A (en) * | 2013-12-20 | 2015-06-24 | 西安瑞驰信息技术有限公司 | Long-life and high-reliability pressure sensor adopting novel sealing element |
CN205403266U (en) * | 2016-03-16 | 2016-07-27 | 温州海纳机车部件有限公司 | Novel multi -functional high -efficient heat dissipation condenser |
CN206002230U (en) * | 2016-08-30 | 2017-03-08 | 张子青 | A kind of diffused-silicon pressure pick-up device |
-
2016
- 2016-08-30 CN CN201610799884.0A patent/CN106248265A/en active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN87209309U (en) * | 1987-06-20 | 1988-05-18 | 北京半导体器件十厂 | Silicon piezo-risistive baroceptor |
CN2211601Y (en) * | 1994-05-20 | 1995-11-01 | 上海天水电器厂 | Pressure transducer |
CN202582822U (en) * | 2012-05-24 | 2012-12-05 | 江苏润仪仪表有限公司 | Anti-blocking diffused silicon capacitance intelligent pressure transmitter |
CN203337312U (en) * | 2013-06-27 | 2013-12-11 | 北京强度环境研究所 | Surface pressure sensor having waterproof ventilation structure |
CN104729783A (en) * | 2013-12-20 | 2015-06-24 | 西安瑞驰信息技术有限公司 | Long-life and high-reliability pressure sensor adopting novel sealing element |
CN204027754U (en) * | 2014-09-05 | 2014-12-17 | 沈阳市传感技术研究所 | The film isolated form gauge pressure transducer of external balance chamber |
CN205403266U (en) * | 2016-03-16 | 2016-07-27 | 温州海纳机车部件有限公司 | Novel multi -functional high -efficient heat dissipation condenser |
CN206002230U (en) * | 2016-08-30 | 2017-03-08 | 张子青 | A kind of diffused-silicon pressure pick-up device |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106989851A (en) * | 2017-05-05 | 2017-07-28 | 芜湖市海联机械设备有限公司 | A kind of force snesor |
CN112304475A (en) * | 2020-10-20 | 2021-02-02 | 苏丽霞 | Controllable contact pin type pressure sensor for pressure detection |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN202382900U (en) | Absolute pressure packaging structure for strain pressure transducer and strain pressure transducer | |
CN104062045B (en) | A kind of piezoresistive pressure sensor and its manufacture method | |
CN106501340B (en) | The detection method of electrode, ion-sensitive sensor, capacitor and ionic activity | |
CN106672894B (en) | A kind of curvature sensor based on flexible base board mems switch structure | |
CN209043232U (en) | A kind of integrated foil resistance strain gauge for torque sensor | |
CN106248265A (en) | A kind of diffused-silicon pressure pick-up device | |
CN109696273B (en) | Automobile brake boosting vacuum pressure sensor device | |
CN206002230U (en) | A kind of diffused-silicon pressure pick-up device | |
CN206930412U (en) | Integrated package casing sealing property detection fixture | |
CN109813507A (en) | A kind of flexible-packed battery leak test method and mechanism | |
CN110174209A (en) | Media-isolated pressure sensor | |
CN210834018U (en) | Sealing ring and sealing leakage detection equipment | |
CN207423260U (en) | A kind of pressure and temp senses module | |
CN202267554U (en) | Silicon piezoresistive type pressure sensor chip with shielding layer | |
CN102435381B (en) | Liquid-state metallic sodium experiment loop pressure sensor | |
CN209470838U (en) | A kind of flexible-packed battery leak test mechanism | |
CN103017971A (en) | Gas pressure sensor | |
CN202693165U (en) | Differential pressure testing device | |
CN104729783A (en) | Long-life and high-reliability pressure sensor adopting novel sealing element | |
CN205642678U (en) | Multi -seal type pressure sensor | |
CN210347515U (en) | Liquid leakage detection sensor | |
CN105157905A (en) | High-precision gas pressure sensor | |
CN203705111U (en) | Pressure transmitter | |
CN208635813U (en) | A kind of aggregate flush type piezoelectric transducer | |
CN209069886U (en) | A kind of probe encapsulating structure |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20161221 |
|
RJ01 | Rejection of invention patent application after publication |