CN106216314B - A kind of manufacture of solar cells technique pinion and-rack silicon chip cleaning device - Google Patents
A kind of manufacture of solar cells technique pinion and-rack silicon chip cleaning device Download PDFInfo
- Publication number
- CN106216314B CN106216314B CN201610686759.9A CN201610686759A CN106216314B CN 106216314 B CN106216314 B CN 106216314B CN 201610686759 A CN201610686759 A CN 201610686759A CN 106216314 B CN106216314 B CN 106216314B
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- Prior art keywords
- service sink
- rack
- silicon chip
- manufacture
- solar cells
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- 238000004140 cleaning Methods 0.000 title claims abstract description 48
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 33
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 33
- 239000010703 silicon Substances 0.000 title claims abstract description 33
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 238000000034 method Methods 0.000 title claims abstract description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 29
- 238000010438 heat treatment Methods 0.000 claims abstract description 21
- 238000011084 recovery Methods 0.000 claims description 10
- 229910000831 Steel Inorganic materials 0.000 claims description 5
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 5
- 238000007747 plating Methods 0.000 claims description 5
- 239000010959 steel Substances 0.000 claims description 5
- 239000011701 zinc Substances 0.000 claims description 5
- 229910052725 zinc Inorganic materials 0.000 claims description 5
- 238000004064 recycling Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 12
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 230000005611 electricity Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 206010037660 Pyrexia Diseases 0.000 description 1
- 230000034303 cell budding Effects 0.000 description 1
- 230000002925 chemical effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The present invention relates to a kind of silicon chip cleaning device more particularly to a kind of manufacture of solar cells technique pinion and-rack silicon chip cleaning devices.The technical problem to be solved in the present invention is to provide a kind of cleanings completely, the manufacture of solar cells technique pinion and-rack silicon chip cleaning device that cleaning speed is fast, simple in structure.In order to solve the above-mentioned technical problem, the present invention provides such a manufacture of solar cells technique pinion and-rack silicon chip cleaning devices, include bottom plate, left frame, sliding rail, sliding block, spring, mounting base, eccentric wheel, gear, heater strip, nut, heating device, lead screw, bearing block, water inlet pipe, the first electrically-controlled valve, service sink, rack, oscillating rod, motor, outlet pipe and the second electrically-controlled valve, central symmetry is equipped with spring at the top of bottom plate, spring top is equipped with service sink, and service sink bottom right side is equipped with outlet pipe.Invention achieves cleanings completely, the effect that cleaning speed is fast, simple in structure.
Description
Technical field
The present invention relates to a kind of silicon chip cleaning device more particularly to a kind of manufacture of solar cells technique pinion and-racks
Silicon chip cleaning device.
Background technology
Solar cell is also known as " solar chip " or " photocell ", is a kind of photoelectricity using the sunlight direct generation of electricity
Wafer.As long as the illumination that it is satisfied certain illumination conditions is arrived, moment output voltage and can have the case where circuit
Lower generation electric current.Physically it is being known as photovoltaic light, abbreviation photovoltaic.Solar cell is by photoelectric effect or light
Chemical effect is directly converted to luminous energy in the device of electric energy.Using the thin-film type solar cell of photoelectric effect work as mainstream, and
With the implementation solar cell of photochemical effect work then also in the budding stage.With the continuous hair of solar cell industry
Exhibition, interior industry competition are also constantly aggravating, and M＆A integration and capital operation are increased between large-sized solar battery enterprise, domestic excellent
Elegant manufacture of solar cells enterprise more and more payes attention to the research to industry market, is especially purchased to industrial development environment and product
The further investigation of buyer.Just because of this, the outstanding solar cell brand in large quantities of country emerges rapidly, is increasingly becoming the sun
Outstanding figure in energy battery industry.
Solar panel be by absorb sunlight, solar radiant energy is straight by photoelectric effect or photochemical effect
It connecing or indirect conversion is at the device of electric energy, the main material of most of solar panel is " silicon ", but because cost of manufacture is very big,
So that it largely can't widely and commonly be used.For common batteries and recyclable rechargeable battery, the sun
Energy battery belongs to the green product of more energy efficient environmental protection.
Currently, crystalline silicon material (including polysilicon and monocrystalline silicon) is most important photovoltaic material, and occupation rate of market exists
90% or more, and also it is still in one considerably long from now on period the mainstay material of solar cell.Polycrystalline silicon material
Production technology is rested in for a long time in 10 factory's hands of 3 countries such as U.S., day, moral, 7 companies, forms technology blockage, city
The situation of field monopolization.The demand of polysilicon mostlys come from semiconductor and solar cell.By purity requirement difference, it is divided into electronics
Grade and solar level.Wherein, 55% or so is accounted for for electronic-grade polycrystalline silicon, solar-grade polysilicon accounts for 45%, as photovoltaic produces
The fast development of industry, solar cell are higher than the growth rate of polysilicon demand the development of polycrystalline silicon semiconductor, it is contemplated that arrive
The demand of solar energy polycrystalline silicon in 2008 will be more than electronic-grade polycrystalline silicon.The total output of whole world solar cell in 1994 is only
Have a 69MW, and 2004 just close to 1200MW, just increase 17 times in short 10 years.Scholarly forecast solar photovoltaic industry
It will become one of most important basic energy resource more than nuclear power in first half 21st century.
Existing silicon chip cleaning device haves the shortcomings that cleaning is incomplete, cleaning speed is slow, complicated, therefore there is an urgent need for grind
It sends out a kind of and cleaning the manufacture of solar cells technique complete, cleaning speed is fast, simple in structure pinion and-rack Wafer Cleaning dress
It sets.
Invention content
(1) technical problems to be solved
Cleaning is incomplete, cleaning speed is slow, complicated in order to overcome existing silicon chip cleaning device to exist by the present invention
Disadvantage, the technical problem to be solved in the present invention is to provide a kind of cleanings completely, the solar cell that cleaning speed is fast, simple in structure
Production technology pinion and-rack silicon chip cleaning device.
(2) technical solution
In order to solve the above technical problem, the present invention provides such a manufacture of solar cells technique rack-and-pinion
Formula silicon chip cleaning device, include bottom plate, left frame, sliding rail, sliding block, spring, mounting base, eccentric wheel, gear, heater strip, nut,
Heating device, lead screw, bearing block, water inlet pipe, the first electrically-controlled valve, service sink, rack, oscillating rod, motor, outlet pipe and the second electricity
Valve is controlled, central symmetry is equipped with spring at the top of bottom plate, and spring top is equipped with service sink, and service sink bottom right side is equipped with outlet pipe, goes out
Water pipe is equipped with the second electrically-controlled valve, and mounting base is equipped at the top of the bottom plate between two springs, and mounting base is equipped with motor, motor front side
Equipped with eccentric wheel, bottom plate top left side is equipped with left frame and sliding rail, and left frame is located on the left of sliding rail, and bearing is arranged on the right side of left frame
, lead screw is installed between two bearings seat, nut is installed on lead screw, nut coordinates with lead screw, is equipped on the right side of nut and heats dress
It sets, heating device is looped around the surrounding of service sink, and heater strip is uniformly provided in heating device, and lead screw bottom end is connected with gear, sliding
Rail is equipped with sliding block, and sliding block is equipped with rack, rack and pinion engagement, and rack right end is hingedly connected with oscillating rod, and oscillating rod is right
End is articulated and connected with eccentric wheel eccentric position, and left frame top is equipped with water inlet pipe, and water inlet pipe is equipped with the first electrically-controlled valve, water inlet pipe position
Above service sink.
Preferably, eccentric wheel is located at service sink lower left portion, and inclining of tilting down is additionally provided on the right side of the bottom surface of service sink
Inclined-plane, inclined surface left side
Block equipped with inclined upward to the right, is additionally provided with recovery pond below service sink, recovery pond be located at inclined surface just under
Side.
Preferably, further include having air-heater, top is equipped with air-heater on the right side of service sink.
Preferably, bottom plate is high-quality steel, surface plating zinc layers.
Operation principle：When needing to clean silicon chip in manufacture of solar cells technique, worker first falls silicon chip
Enter service sink, then control the first electrically-controlled valve opening, water is flowed by water inlet pipe in service sink, reaches certain when cleaning pool inner water
When amount, the first electrically-controlled valve of control is closed, then controls heating device energization, and heater strip fever is to cleaning pool inner water heating.Then, it controls
Motor processed rotates clockwise, and motor band movable eccentric wheel rotates clockwise, when eccentric wheel, which is turned to, to be contacted with service sink bottom, bullet
Spring is stretched, while eccentric wheel drives oscillating rod left end to move right, and then is moved right on sliding rail with carry-over bar and sliding block,
Rack drives gear rotates counterclockwise, and to drive lead screw to rotate counterclockwise, drives nut therewith and device moves upwards thereon,
Control motor rotates counterclockwise, and motor band movable eccentric wheel rotates counterclockwise, when eccentric wheel, which turns to, leaves service sink bottom, bullet
Spring compresses, while eccentric wheel drives oscillating rod left end to move downward, and then is moved downward on sliding rail with carry-over bar and sliding block, tooth
Band moving gear rotates clockwise, and to drive lead screw to rotate clockwise, drives nut therewith and device moves downward thereon, such as
This repeatedly, eccentric wheel constantly strikes service sink bottom so that the silicon chip in service sink constantly stirs, and reaches uniform cleaning silicon chip
Effect, device for simultaneous heating up and down motion are evenly heated the water in service sink, reach the more thorough effect of the useless silicon chip of cleaning.When
Wafer Cleaning is completed and when heating device returns to initial position, control motor is stopped, then to control heater stop logical
Then electricity controls the second electrically-controlled valve opening, the water after the completion of cleaning is flowed out by outlet pipe, and the water after the completion of cleaning all flows
After going out, the second electrically-controlled valve of control is closed, and worker is again by the silicon chip extracting after the completion of cleaning.
Because further including having air-heater, top is equipped with air-heater on the right side of service sink, and control air-heater work, air-heater is to clear
Silicon chip drying in wash pool after the completion of cleaning.
Because bottom plate is high-quality steel, surface plating zinc layers so that the present apparatus is not perishable, improves service life.
(3) advantageous effect
Invention achieves cleanings completely, the effect that cleaning speed is fast, simple in structure.
Description of the drawings
Fig. 1 is the first main structure diagram of the present invention.
Fig. 2 is second of main structure diagram of the present invention.
Label in attached drawing be：1- bottom plates, the left framves of 2-, 3- sliding rails, 4- sliding blocks, 5- springs, 6- mounting bases, 7- eccentric wheels,
8- gears, 9- heater strips, 10- nuts, 11- heating devices, 12- lead screws, 13- bearing blocks, 14- water inlet pipes, 15- first are automatically controlled
Valve, 16- service sinks, 17- racks, 18- oscillating rods, 19- motors, 20- outlet pipes, the second electrically-controlled valves of 21-, 22- air-heaters, 23-
Recovery pond, 24- blocks, the inclined surface 25-.
Specific implementation mode
The present invention is further illustrated with reference to the accompanying drawings and examples.
Embodiment 1
A kind of manufacture of solar cells technique pinion and-rack silicon chip cleaning device includes as shown in Figs. 1-2 bottom plate
1, left frame 2, sliding rail 3, sliding block 4, spring 5, mounting base 6, eccentric wheel 7, gear 8, heater strip 9, nut 10, heating device 11, silk
Bar 12, bearing block 13, water inlet pipe 14, the first electrically-controlled valve 15, service sink 16, rack 17, oscillating rod 18, motor 19, outlet pipe 20
With the second electrically-controlled valve 21,1 top center of bottom plate is arranged with spring 5, and 5 top of spring is equipped with service sink 16,16 right side of service sink
Bottom is equipped with outlet pipe 20, and outlet pipe 20 is equipped with the second electrically-controlled valve 21, and 1 top of bottom plate between two springs 5 is equipped with mounting base
6, mounting base 6 is equipped with motor 19, and 19 front side of motor is equipped with eccentric wheel 7, and 1 top left side of bottom plate is equipped with left frame 2 and sliding rail 3, left
Frame 2 is located at 3 left side of sliding rail, and 2 right side of left frame is arranged with bearing block 13, lead screw 12, lead screw 12 are equipped between two bearings seat 13
On nut 10 is installed, nut 10 coordinates with lead screw 12, and 10 right side of nut is equipped with heating device 11, and heating device 11 is looped around clearly
The surrounding of wash pool 16 is uniformly provided with heater strip 9 in heating device 11, and 12 bottom end of lead screw is connected with gear 8, and sliding rail 3, which is equipped with, to be slided
Block 4, sliding block 4 are equipped with rack 17, and rack 17 is engaged with gear 8, and 17 right end of rack is hingedly connected with oscillating rod 18, oscillating rod 18
Right end is articulated and connected with 7 eccentric position of eccentric wheel, and 2 top of left frame is equipped with water inlet pipe 14, and water inlet pipe 14 is equipped with the first electrically-controlled valve
15, water inlet pipe 14 is located at 16 top of service sink.
Further include having air-heater 22,16 right side top of service sink is equipped with air-heater 22.
Bottom plate 1 is high-quality steel, surface plating zinc layers.
Operation principle：When needing to clean silicon chip in manufacture of solar cells technique, worker first falls silicon chip
Enter service sink 16, then control the first electrically-controlled valve 15 opening, water is flowed by water inlet pipe 14 in service sink 16, when water in service sink 16
When reaching a certain amount of, control the first electrically-controlled valve 15 close, then control heating device 11 energization, heater strip 9 generate heat to service sink
Water heats in 16.Then, control motor 19 rotates clockwise, and motor 19 is rotated clockwise with movable eccentric wheel 7, when 7 turns of eccentric wheel
It moves to when being contacted with 16 bottom of service sink, spring 5 is stretched, while eccentric wheel 7 drives 18 left end of oscillating rod to move right, in turn
Band carry-over bar 17 and sliding block 4 move right on sliding rail 3, and rack 17 is rotated counterclockwise with moving gear 8, to drive lead screw 12 inverse
Hour hands rotate, and drive nut 10 therewith and device moves upwards thereon, and control motor 19 rotates counterclockwise, and motor 19 drives bias
Wheel 7 rotates counterclockwise, and when eccentric wheel 7, which turns to, leaves 16 bottom of service sink, spring 5 compresses, while eccentric wheel 7 drives and swings
18 left end of bar moves downward, and then is moved downward on sliding rail 3 with carry-over bar 17 and sliding block 4, and rack 17 is clockwise with moving gear 8
Rotation drives nut 10 and device moves downward thereon therewith to drive lead screw 12 to rotate clockwise, repeatedly, eccentric
Constantly 16 bottom of impact service sink of wheel 7 so that the silicon chip in service sink 16 constantly stirs, and achievees the effect that uniform cleaning silicon chip,
The up and down motion of device for simultaneous heating 11 is evenly heated the water in service sink 16, reaches the more thorough effect of the useless silicon chip of cleaning.When
Wafer Cleaning is completed and when heating device 11 returns to initial position, control motor 19 is stopped, then controls heating device 11
Stop being powered, then controls the second electrically-controlled valve 21 opening, the water after the completion of cleaning is flowed out by outlet pipe 20, after the completion of cleaning
Water all outflow after, control the second electrically-controlled valve 21 close, worker is again by the silicon chip extracting after the completion of cleaning.
In another embodiment, as shown in Fig. 2, eccentric wheel 7 is located at 16 lower left portion of service sink, the bottom of service sink 16
Right side of face is additionally provided with the inclined surface 25 tilted down, and 25 left side of inclined surface is equipped with the block 24 of inclined upward to the right, service sink 16
Lower section is additionally provided with recovery pond 23, and recovery pond 23 is located at the underface of inclined surface 25.Since eccentric wheel 7 is located at a 16 lower section left side of service sink
Side, when eccentric wheel 7 rotates, the left side of recovery pond 23 will carry out moving back and forth up and down, and be cleaned coming out on silicon chip consolidates
Body spot gradually pushes 23 right side of recovery pond to, and is slided in recovery pond 23 by inclined surface 25, and the block 24 in 25 left side of inclined surface
It can play and the solid spot of 23 bottom of recovery pond is prevented to move to left.
Because further including having air-heater 22,16 right side top of service sink is equipped with air-heater 22, and control air-heater 22 works, heat
Wind turbine 22 is to the silicon chip drying after the completion of cleaning in service sink 16.
Because bottom plate 1 is high-quality steel, surface plating zinc layers so that the present apparatus is not perishable, improves service life.
The preferred embodiment of the present invention above described embodiment only expresses, the description thereof is more specific and detailed, but simultaneously
Cannot the limitation to the scope of the claims of the present invention therefore be interpreted as.It should be pointed out that for those of ordinary skill in the art
For, without departing from the inventive concept of the premise, several deformations can also be made, improves and substitutes, these belong to this hair
Bright protection domain.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (4)
1. a kind of manufacture of solar cells technique pinion and-rack silicon chip cleaning device, which is characterized in that include bottom plate
(1), left frame (2), sliding rail (3), sliding block (4), spring (5), mounting base (6), eccentric wheel (7), gear (8), heater strip (9), spiral shell
Female (10), heating device (11), lead screw (12), bearing block (13), water inlet pipe (14), the first electrically-controlled valve (15), service sink (16),
Rack (17), oscillating rod (18), motor (19), outlet pipe (20) and the second electrically-controlled valve (21), bottom plate (1) top center are symmetrically set
There are spring (5), spring (5) top to be equipped with service sink (16), service sink (16) bottom right side is equipped with outlet pipe (20), outlet pipe
(20) it is equipped with the second electrically-controlled valve (21), is equipped with mounting base (6) at the top of the bottom plate (1) between two springs (5), in mounting base (6)
Equipped with motor (19), eccentric wheel (7) is equipped on front side of motor (19), bottom plate (1) top left side is equipped with left frame (2) and sliding rail (3), left
Frame (2) is located on the left of sliding rail (3), is arranged with bearing block (13) on the right side of left frame (2), two bearings seat is equipped with lead screw between (13)
(12), nut (10) is installed, nut (10) coordinates with lead screw (12), and heating device is equipped on the right side of nut (10) on lead screw (12)
(11), heating device (11) is looped around the surrounding of service sink (16), and heater strip (9), lead screw are uniformly provided in heating device (11)
(12) bottom end is connected with gear (8), and sliding rail (3) is equipped with sliding block (4), and sliding block (4) is equipped with rack (17), rack (17) and tooth
(8) engagement is taken turns, rack (17) right end is hingedly connected with oscillating rod (18), oscillating rod (18) right end and eccentric wheel (7) eccentric position
Articulated connection, left frame (2) top are equipped with water inlet pipe (14), and water inlet pipe (14) is equipped with the first electrically-controlled valve (15), water inlet pipe (14)
Above service sink (16).
2. manufacture of solar cells technique pinion and-rack silicon chip cleaning device according to claim 1, feature exist
In, the eccentric wheel (7) it is located at service sink (16) lower left portion, is additionally provided with and tilts down on the right side of the bottom surface of service sink (16)
Inclined surface (25) is equipped with the block (24) of inclined upward to the right, recycling is additionally provided with below service sink (16) on the left of inclined surface (25)
Pond (23), recovery pond (23) are located at the underface of inclined surface (25).
3. manufacture of solar cells technique pinion and-rack silicon chip cleaning device according to claim 1, feature exist
In further including having air-heater (22), top is equipped with air-heater (22) on the right side of service sink (16).
4. manufacture of solar cells technique pinion and-rack silicon chip cleaning device according to claim 1, feature exist
In bottom plate (1) is high-quality steel, surface plating zinc layers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610686759.9A CN106216314B (en) | 2016-08-17 | 2016-08-17 | A kind of manufacture of solar cells technique pinion and-rack silicon chip cleaning device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610686759.9A CN106216314B (en) | 2016-08-17 | 2016-08-17 | A kind of manufacture of solar cells technique pinion and-rack silicon chip cleaning device |
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| Publication Number | Publication Date |
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| CN106216314A CN106216314A (en) | 2016-12-14 |
| CN106216314B true CN106216314B (en) | 2018-09-28 |
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| CN107039562B (en) * | 2017-06-06 | 2019-03-05 | 滑县恒琢信息科技有限公司 | A kind of solar battery sheet processing cleaning equipment |
| CN107695018B (en) * | 2017-11-22 | 2019-07-09 | 宁波江北清锐汽车零部件有限公司 | A kind of bearing cleaner |
| CN107927869B (en) * | 2017-11-30 | 2019-11-26 | 申亚农牧科技股份有限公司 | A kind of feed processing prilling granulator |
| CN108480306B (en) * | 2018-04-13 | 2020-04-07 | 宁波德深机械设备有限公司 | Automatic cleaning equipment |
| CN108493138B (en) * | 2018-05-03 | 2020-07-07 | 浙江海顺新能源有限公司 | Silicon wafer cleaning process |
| CN110813898A (en) * | 2019-11-26 | 2020-02-21 | 徐州铁手五金工具制造有限公司 | General spare part belt cleaning device |
| CN112536301B (en) * | 2020-12-07 | 2022-05-13 | 威海光大光电有限公司 | Optical glass lens cleaning equipment with automatic unloading and automatic slag removal function |
| CN113725322B (en) * | 2021-11-01 | 2022-01-25 | 苏州威尔阳光智能科技有限公司 | Silicon wafer soaking equipment for manufacturing solar photovoltaic glass |
| CN117457804B (en) * | 2023-12-21 | 2024-03-22 | 阳光中科（福建）能源股份有限公司 | Silicon wafer surface cleaning device for solar cell |
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| JP3544336B2 (en) * | 2000-01-25 | 2004-07-21 | 東京エレクトロン株式会社 | Substrate processing method |
| CN202155333U (en) * | 2011-07-07 | 2012-03-07 | 苏州赤诚洗净科技有限公司 | Ultrasonic cleaning device of solar battery silicon chip with throwing device |
| CN203648915U (en) * | 2013-12-25 | 2014-06-18 | 浙江工贸职业技术学院 | Rocker supersonic cleaning device |
| JP2015191952A (en) * | 2014-03-27 | 2015-11-02 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate processing method and substrate processing apparatus |
| CN203944596U (en) * | 2014-05-19 | 2014-11-19 | 苏州经贸职业技术学院 | A kind of Novel remote dynamic formula bearing cleaning machine |
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