CN106216314A - A kind of manufacture of solar cells technique pinion and-rack silicon chip cleaning device - Google Patents
A kind of manufacture of solar cells technique pinion and-rack silicon chip cleaning device Download PDFInfo
- Publication number
- CN106216314A CN106216314A CN201610686759.9A CN201610686759A CN106216314A CN 106216314 A CN106216314 A CN 106216314A CN 201610686759 A CN201610686759 A CN 201610686759A CN 106216314 A CN106216314 A CN 106216314A
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- Prior art keywords
- service sink
- silicon chip
- cleaning device
- manufacture
- solar cells
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- Granted
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- 238000004140 cleaning Methods 0.000 title claims abstract description 36
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 34
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 34
- 239000010703 silicon Substances 0.000 title claims abstract description 34
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 238000000034 method Methods 0.000 title claims abstract description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 29
- 238000011084 recovery Methods 0.000 claims description 11
- 229910000831 Steel Inorganic materials 0.000 claims description 5
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 5
- 238000007747 plating Methods 0.000 claims description 5
- 239000010959 steel Substances 0.000 claims description 5
- 239000011701 zinc Substances 0.000 claims description 5
- 229910052725 zinc Inorganic materials 0.000 claims description 5
- 230000000694 effects Effects 0.000 abstract description 11
- 238000010276 construction Methods 0.000 abstract description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 5
- 230000005611 electricity Effects 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- IXSZQYVWNJNRAL-UHFFFAOYSA-N etoxazole Chemical compound CCOC1=CC(C(C)(C)C)=CC=C1C1N=C(C=2C(=CC=CC=2F)F)OC1 IXSZQYVWNJNRAL-UHFFFAOYSA-N 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000034303 cell budding Effects 0.000 description 1
- 230000002925 chemical effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 210000004247 hand Anatomy 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Photovoltaic Devices (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The present invention relates to a kind of silicon chip cleaning device, particularly relate to a kind of manufacture of solar cells technique pinion and-rack silicon chip cleaning device.The technical problem to be solved in the present invention be to provide a kind of clean completely, cleaning speed is fast, the manufacture of solar cells technique pinion and-rack silicon chip cleaning device of simple in construction.In order to solve above-mentioned technical problem, the invention provides such a manufacture of solar cells technique pinion and-rack silicon chip cleaning device, include base plate, left frame, slide rail, slide block, spring, mounting seat, eccentric, gear, heater strip, nut, heater, screw mandrel, bearing block, water inlet pipe, the first electrically-controlled valve, service sink, tooth bar, swing arm, motor, outlet pipe and the second electrically-controlled valve, base plate top centrosymmetry is provided with spring, spring top is provided with service sink, and service sink bottom right side is provided with outlet pipe.Invention achieves cleaning completely, cleaning speed is fast, the effect of simple in construction.
Description
Technical field
The present invention relates to a kind of silicon chip cleaning device, particularly relate to a kind of manufacture of solar cells technique pinion and-rack
Silicon chip cleaning device.
Background technology
Solaode is also called " solar chip " or " light cell ", is a kind of photoelectricity utilizing the sunlight direct generation of electricity
Wafer.As long as it is satisfied the light of certain illumination conditions and shines, moment is with regard to exportable voltage and is having the situation in loop
Lower generation electric current.Physically it is referred to as photovoltaic light, is called for short photovoltaic.Solaode is by photoelectric effect or light
Chemical effect directly changes into luminous energy the device of electric energy.With photoelectric effect work thin-film type solar cell as main flow, and
With Photochemical effects work enforcement solaode then also in the budding stage.Along with constantly sending out of solaode industry
Exhibition, the competition of interior industry is also in constantly aggravation, and between large-sized solar battery enterprise, M&A integration is increased with capital operation, domestic excellent
Elegant manufacture of solar cells enterprise more and more payes attention to the research to industry market, particularly purchases industrial development environment and product
The further investigation of buyer.Just because of this, large quantities of domestic outstanding solaode brands emerge rapidly, are increasingly becoming the sun
Outstanding figure in energy battery industry.
Solar panel is by absorbing sunlight, and solar radiant energy is straight by photoelectric effect or Photochemical effects
Connecing or indirect conversion becomes the device of electric energy, the main material of major part solar panel be " silicon ", but because of cost of manufacture very greatly,
To such an extent as to it can't widely and commonly be used in a large number.For common batteries and rechargeable battery capable of circulation, the sun
Energy battery belongs to the green product of more energy efficient environmental protection.
Currently, crystalline silicon material (including polysilicon and monocrystal silicon) is topmost photovoltaic material, and its market share exists
More than 90%, and the mainstay material of solaode also it is still that period at the most considerably long one.Polycrystalline silicon material
Production technology rests in 10 factory's handss of 7 companies of 3 countries such as U.S., day, moral for a long time, forms blockade on new techniques, city
The situation of field monopolization.The demand of polysilicon mostlys come from quasiconductor and solaode.Different by purity requirement, it is divided into electricity
Sub-level and solar level.Wherein, accounting for about 55% for electronic-grade polycrystalline silicon, solar-grade polysilicon accounts for 45%, along with photovoltaic
The fast development of industry, solaode is higher than the development of polycrystalline silicon semiconductor to the growth rate of polysilicon demand, it is contemplated that
Demand to solar energy polycrystalline silicon in 2008 will exceed electronic-grade polycrystalline silicon.The total output of whole world solaode in 1994
Only 69MW, and 2004 just close to 1200MW, in short 10 years, just increase 17 times.Scholarly forecast photovoltaic produces
Industry will exceed nuclear power in first half 21st century becomes one of most important basic energy resource.
The existence of existing silicon chip cleaning device is cleaned not exclusively, cleaning speed shortcoming slow, baroque, therefore needs badly and grinds
Send out a kind of to clean completely, cleaning speed is fast, the manufacture of solar cells technique pinion and-rack Wafer Cleaning dress of simple in construction
Put.
Summary of the invention
(1) to solve the technical problem that
Cleaning is incomplete, cleaning speed is slow, baroque in order to overcome existing silicon chip cleaning device to exist for the present invention
Shortcoming, the technical problem to be solved in the present invention be to provide a kind of clean completely, cleaning speed is fast, the solaode of simple in construction
Production technology pinion and-rack silicon chip cleaning device.
(2) technical scheme
In order to solve above-mentioned technical problem, the invention provides such a manufacture of solar cells technique rack-and-pinion
Formula silicon chip cleaning device, include base plate, left frame, slide rail, slide block, spring, mounting seat, eccentric, gear, heater strip, nut,
Heater, screw mandrel, bearing block, water inlet pipe, the first electrically-controlled valve, service sink, tooth bar, swing arm, motor, outlet pipe and the second electricity
Control valve, base plate top centrosymmetry is provided with spring, and spring top is provided with service sink, and service sink bottom right side is provided with outlet pipe, goes out
Water pipe is provided with the second electrically-controlled valve, and the base plate top between two springs is provided with mounting seat, and mounting seat is provided with motor, on front side of motor
Being provided with eccentric, base plate top left side is provided with left frame and slide rail, and left frame is positioned on the left of slide rail, is arranged with bearing on the right side of left frame
Seat, is provided with screw mandrel, screw mandrel is provided with nut between two bearings seat, nut coordinates with screw mandrel, is provided with and adds hot charging on the right side of nut
Putting, heater is looped around the surrounding of service sink, is uniformly provided with heater strip in heater, and screw mandrel bottom connects gear, sliding
Rail is provided with slide block, and slide block is provided with tooth bar, and rack and pinion engages, and tooth bar right-hand member is hingedly connected with swing arm, and swing arm is right
End is articulated and connected with eccentric eccentric position, and left frame top is provided with water inlet pipe, and water inlet pipe is provided with the first electrically-controlled valve, water inlet pipe position
Above service sink.
Preferably, eccentric is located at service sink lower left portion, is additionally provided with downward-sloping inclining on the right side of the bottom surface of service sink
Inclined-plane, is provided with the block of inclined upward to the right on the left of inclined plane, be additionally provided with recovery pond below service sink, and recovery pond is located at inclined plane
Underface.
Preferably, also including hot-air blower, on the right side of service sink, top is provided with hot-air blower.
Preferably, base plate is high-quality steel, surface plating zinc layers.
Operation principle: when needing to be carried out silicon chip in manufacture of solar cells technique, first silicon chip is fallen by workman
Entering service sink, then control the first electrically-controlled valve and open, water flows in service sink by water inlet pipe, reaches certain when clean pool inner water
During amount, controlling the first electrically-controlled valve and close, then control heater energising, heater strip heating is to cleaning pool inner water heating.Then, control
Motor processed rotates clockwise, and driven by motor eccentric rotates clockwise, when eccentric turn to when contacting bottom service sink, bullet
Spring is stretched, and eccentric drives swing arm left end to move right simultaneously, and then band carry-over bar and slide block move right on slide rail,
Rack drives gear rotates counterclockwise, thus drives screw mandrel to rotate counterclockwise, and drives nut and upper device thereof to move upward therewith,
Controlling motor to rotate counterclockwise, driven by motor eccentric rotates counterclockwise, when eccentric turns to leave bottom service sink, and bullet
Spring compress, simultaneously eccentric drive swing arm left end to left movement, and then band carry-over bar and slide block on slide rail to left movement, tooth
Bar driven gear rotates clockwise, thus drives screw mandrel to rotate clockwise, and drives nut and upper device thereof to move downward therewith, as
This repeatedly, eccentric constantly impacts bottom service sink so that the silicon chip in service sink constantly stirs, and reaches uniform cleaning silicon chip
Effect, device for simultaneous heating moves up and down and uniformly heats the water in service sink, reaches to clean the more thorough effect of useless silicon chip.When
Wafer Cleaning is completed and time heater returns to initial position, control motor and quit work, then control heater stop and lead to
Electricity, then controls the second electrically-controlled valve and opens, and the water after having cleaned is flowed out by outlet pipe, and the water after having cleaned all flows
After going out, control second electrically-controlled valve close, workman again cleaning is completed after silicon chip extracting.
Because also including hot-air blower, on the right side of service sink, top is provided with hot-air blower, controls hot-air blower work, and hot-air blower is to clearly
Silicon chip drying after having cleaned in wash pool.
Because base plate is high-quality steel, surface plating zinc layers so that this device is the most perishable, improves service life.
(3) beneficial effect
Invention achieves cleaning completely, cleaning speed is fast, the effect of simple in construction.
Accompanying drawing explanation
Fig. 1 is the first main TV structure schematic diagram of the present invention.
Fig. 2 is the second main TV structure schematic diagram of the present invention.
Being labeled as in accompanying drawing: 1-base plate, the left frame of 2-, 3-slide rail, 4-slide block, 5-spring, 6-mounting seat, 7-eccentric,
8-gear, 9-heater strip, 10-nut, 11-heater, 12-screw mandrel, 13-bearing block, 14-water inlet pipe, 15-first is automatically controlled
Valve, 16-service sink, 17-tooth bar, 18-swing arm, 19-motor, 20-outlet pipe, 21-the second electrically-controlled valve, 22-hot-air blower, 23-
Recovery pond, 24-block, 25-inclined plane.
Detailed description of the invention
The present invention is further illustrated with embodiment below in conjunction with the accompanying drawings.
Embodiment 1
A kind of manufacture of solar cells technique pinion and-rack silicon chip cleaning device, as shown in Figure 1-2, includes the end
Plate 1, left frame 2, slide rail 3, slide block 4, spring 5, mounting seat 6, eccentric 7, gear 8, heater strip 9, nut 10, heater 11,
Screw mandrel 12, bearing block 13, water inlet pipe the 14, first electrically-controlled valve 15, service sink 16, tooth bar 17, swing arm 18, motor 19, outlet pipe
20 and second electrically-controlled valve 21, base plate 1 top center is arranged with spring 5, and spring 5 top is provided with service sink 16, and service sink 16 is right
Side bottom is provided with outlet pipe 20, and outlet pipe 20 is provided with the second electrically-controlled valve 21, and base plate 1 top between two springs 5 is provided with installation
Seat 6, mounting seat 6 is provided with motor 19, is provided with eccentric 7 on front side of motor 19, and base plate 1 top left side is provided with left frame 2 and slide rail 3,
Left frame 2 is positioned on the left of slide rail 3, is arranged with bearing block 13, is provided with screw mandrel 12, screw mandrel between two bearings seat 13 on the right side of left frame 2
Being provided with nut 10 on 12, nut 10 coordinates with screw mandrel 12, is provided with heater 11 on the right side of nut 10, and heater 11 is looped around
The surrounding of service sink 16, is uniformly provided with heater strip 9 in heater 11, screw mandrel 12 bottom connects has gear 8, slide rail 3 to be provided with
Slide block 4, slide block 4 is provided with tooth bar 17, and tooth bar 17 engages with gear 8, and tooth bar 17 right-hand member is hingedly connected with swing arm 18, swing arm
18 right-hand members are articulated and connected with eccentric 7 eccentric position, and left frame 2 top is provided with water inlet pipe 14, and it is automatically controlled that water inlet pipe 14 is provided with first
Valve 15, water inlet pipe 14 is positioned at above service sink 16.
Also including hot-air blower 22, on the right side of service sink 16, top is provided with hot-air blower 22.
Base plate 1 is high-quality steel, surface plating zinc layers.
Operation principle: when needing to be carried out silicon chip in manufacture of solar cells technique, first silicon chip is fallen by workman
Entering service sink 16, then control the first electrically-controlled valve 15 and open, water flows in service sink 16, when water in service sink 16 by water inlet pipe 14
When reaching a certain amount of, control the first electrically-controlled valve 15 and close, then control heater 11 and be energized, heater strip 9 generates heat to service sink
Water heating in 16.Then, controlling motor 19 and rotate clockwise, motor 19 band movable eccentric wheel 7 rotates clockwise, when eccentric 7 turns
Moving to when contacting bottom service sink 16, spring 5 is stretched, and eccentric 7 drives swing arm 18 left end to move right simultaneously, and then
Band carry-over bar 17 and slide block 4 move right on slide rail 3, and tooth bar 17 driven gear 8 rotates counterclockwise, thus drives screw mandrel 12
Rotating counterclockwise, drive nut 10 and upper device thereof to move upward therewith, control motor 19 and rotate counterclockwise, motor 19 drives partially
Heart wheel 7 rotates counterclockwise, and when eccentric 7 turns to leave bottom service sink 16, spring 5 compresses, simultaneously eccentric 7 band movable pendulum
Lever 18 left end to left movement, and then band carry-over bar 17 and slide block 4 on slide rail 3 to left movement, tooth bar 17 driven gear 8 up time
Pin rotates, thus drives screw mandrel 12 to rotate clockwise, and drives nut 10 and upper device thereof to move downward, the most repeatedly, partially therewith
Bottom heart wheel 7 constantly impact service sink 16 so that the silicon chip in service sink 16 constantly stirs, and reaches the effect of uniform cleaning silicon chip
Really, device for simultaneous heating 11 moves up and down and uniformly heats the water in service sink 16, reaches to clean the more thorough effect of useless silicon chip.
When Wafer Cleaning being completed and heater 11 returns to initial position, control motor 19 and quit work, then control heater
11 stop energising, then control the second electrically-controlled valve 21 and open, and the water after having cleaned is flowed out, when cleaning completes by outlet pipe 20
After water all flow out after, control the second electrically-controlled valve 21 and close, workman again cleaning is completed after silicon chip extracting.
In another embodiment, as in figure 2 it is shown, eccentric 7 is located at service sink 16 lower left portion, the end of service sink 16
Right side of face is additionally provided with downward-sloping inclined plane 25, is provided with the block 24 of inclined upward to the right, service sink 16 on the left of inclined plane 25
Lower section is additionally provided with recovery pond 23, and recovery pond 23 is located at the underface of inclined plane 25.Owing to eccentric 7 is located at below service sink 16 left
Sidepiece, when eccentric 7 rotates, the left side of recovery pond 23 will carry out movement the most back and forth, and what silicon chip was cleaned by out consolidates
Body spot is progressively pushed on the right side of recovery pond 23, and is slided in recovery pond 23 by inclined plane 25, and the block 24 on the left of inclined plane 25
Can play and stop the solid spot bottom recovery pond 23 to move to left.
Because also including hot-air blower 22, on the right side of service sink 16, top is provided with hot-air blower 22, controls hot-air blower 22 and works, heat
Blower fan 22 is to the silicon chip drying after having cleaned in service sink 16.
Because base plate 1 is high-quality steel, surface plating zinc layers so that this device is the most perishable, improves service life.
Embodiment described above only have expressed the preferred embodiment of the present invention, and it describes more concrete and detailed, but also
Therefore the restriction to the scope of the claims of the present invention can not be interpreted as.It should be pointed out that, for those of ordinary skill in the art
For, without departing from the inventive concept of the premise, it is also possible to making some deformation, improve and substitute, these broadly fall into this
Bright protection domain.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (4)
1. a manufacture of solar cells technique pinion and-rack silicon chip cleaning device, it is characterised in that include base plate
(1), left frame (2), slide rail (3), slide block (4), spring (5), mounting seat (6), eccentric (7), gear (8), heater strip (9), spiral shell
Female (10), heater (11), screw mandrel (12), bearing block (13), water inlet pipe (14), the first electrically-controlled valve (15), service sink (16),
Tooth bar (17), swing arm (18), motor (19), outlet pipe (20) and the second electrically-controlled valve (21), base plate (1) top center symmetry sets
Having spring (5), spring (5) top to be provided with service sink (16), service sink (16) bottom right side is provided with outlet pipe (20), outlet pipe
(20) being provided with the second electrically-controlled valve (21), base plate (1) top between two springs (5) is provided with mounting seat (6), in mounting seat (6)
Being provided with motor (19), motor (19) front side is provided with eccentric (7), and base plate (1) top left side is provided with left frame (2) and slide rail (3), left
Frame (2) is positioned at slide rail (3) left side, and left frame (2) right side is arranged with bearing block (13), and two bearings seat is provided with screw mandrel between (13)
(12), screw mandrel (12) being provided with nut (10), nut (10) coordinates with screw mandrel (12), and nut (10) right side is provided with heater
(11), heater (11) is looped around the surrounding of service sink (16), is uniformly provided with heater strip (9), screw mandrel in heater (11)
(12) bottom connects has gear (8), slide rail (3) to be provided with slide block (4), and slide block (4) is provided with tooth bar (17), tooth bar (17) and tooth
Wheel (8) engagement, tooth bar (17) right-hand member is hingedly connected with swing arm (18), swing arm (18) right-hand member and eccentric (7) eccentric position
Being articulated and connected, left frame (2) top is provided with water inlet pipe (14), and water inlet pipe (14) is provided with the first electrically-controlled valve (15), water inlet pipe (14)
It is positioned at service sink (16) top.
Manufacture of solar cells technique pinion and-rack silicon chip cleaning device the most according to claim 1, its feature exists
In, described eccentric (7) is located at service sink (16) lower left portion, is additionally provided with downward-sloping on the right side of the bottom surface of service sink (16)
Inclined plane (25), inclined plane (25) left side is provided with the block (24) of inclined upward to the right, and service sink (16) lower section is additionally provided with recovery
Pond (23), recovery pond (23) is located at the underface of inclined plane (25).
Manufacture of solar cells technique pinion and-rack silicon chip cleaning device the most according to claim 1, its feature exists
In, also including hot-air blower (22), top, service sink (16) right side is provided with hot-air blower (22).
Manufacture of solar cells technique pinion and-rack silicon chip cleaning device the most according to claim 1, its feature exists
In, base plate (1) is high-quality steel, surface plating zinc layers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610686759.9A CN106216314B (en) | 2016-08-17 | 2016-08-17 | A kind of manufacture of solar cells technique pinion and-rack silicon chip cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610686759.9A CN106216314B (en) | 2016-08-17 | 2016-08-17 | A kind of manufacture of solar cells technique pinion and-rack silicon chip cleaning device |
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| Publication Number | Publication Date |
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| CN106216314A true CN106216314A (en) | 2016-12-14 |
| CN106216314B CN106216314B (en) | 2018-09-28 |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107039562A (en) * | 2017-06-06 | 2017-08-11 | 汤琴 | A kind of solar battery sheet processes cleaning equipment |
| CN107695018A (en) * | 2017-11-22 | 2018-02-16 | 宁波江北清锐汽车零部件有限公司 | A kind of bearing cleaner |
| CN107927869A (en) * | 2017-11-30 | 2018-04-20 | 王成科 | A kind of feed processing prilling granulator |
| CN108480306A (en) * | 2018-04-13 | 2018-09-04 | 宁波德深机械设备有限公司 | Automatic cleaning equipment |
| CN108493138A (en) * | 2018-05-03 | 2018-09-04 | 浙江海顺新能源有限公司 | A kind of silicon wafer cleaning process |
| CN110813898A (en) * | 2019-11-26 | 2020-02-21 | 徐州铁手五金工具制造有限公司 | General spare part belt cleaning device |
| CN112536301A (en) * | 2020-12-07 | 2021-03-23 | 宜昌市天信光学仪器有限公司 | Optical glass lens cleaning equipment with automatic unloading and automatic slag removal function |
| CN113725322A (en) * | 2021-11-01 | 2021-11-30 | 苏州威尔阳光智能科技有限公司 | Silicon wafer soaking equipment for manufacturing solar photovoltaic glass |
| CN117457804A (en) * | 2023-12-21 | 2024-01-26 | 阳光中科（福建）能源股份有限公司 | Silicon wafer surface cleaning device for solar cell |
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