CN106154601B - Apparatus for baking and its method for exhausting - Google Patents
Apparatus for baking and its method for exhausting Download PDFInfo
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- CN106154601B CN106154601B CN201610519801.8A CN201610519801A CN106154601B CN 106154601 B CN106154601 B CN 106154601B CN 201610519801 A CN201610519801 A CN 201610519801A CN 106154601 B CN106154601 B CN 106154601B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Baking, Grill, Roasting (AREA)
Abstract
The present invention provides a kind of apparatus for baking and its method for exhausting, the apparatus for baking includes oven, the main exhaust device being connected to the oven, and close to the secondary gas deflation assembly of upper surface on the circumferential surface of oven, wherein, the pair gas deflation assembly is exhausting window, it include: the multiple exhaust outlets being arranged successively around the circumferential surface of the oven, the check apron that can be gone up and down along one side surface of exhaust outlet for being close to one side surface of exhaust outlet is equipped on each exhaust outlet, lifting by controlling the check apron can control the openings of sizes of each exhaust outlet, the air-flow inside oven can be made to flow more freely steady, baking processing procedure quality and apparatus for baking are promoted to the adaptability of different product.
Description
Technical field
The present invention relates to display fabrication techniques field more particularly to a kind of apparatus for baking and its method for exhausting.
Background technique
With the development of display technology, the planes such as liquid crystal display (Liquid Crystal Display, LCD) display dress
It sets because having many advantages, such as that high image quality, power saving, fuselage is thin and has a wide range of application, and is widely used in mobile phone, TV, a number
The various consumer electrical products such as word assistant, digital camera, laptop, desktop computer, become the master in display device
Stream.
Usual liquid crystal display panel is by color membrane substrates (CF, Color Filter), thin film transistor base plate (TFT, Thin
Film Transistor), the liquid crystal (LC, Liquid Crystal) that is sandwiched between color membrane substrates and thin film transistor base plate and
Sealing glue frame (Sealant) composition, moulding process generally comprises: leading portion array (Array) processing procedure (film, yellow light, etching and
Stripping), middle section is at box (Cell) processing procedure (TFT substrate is bonded with CF substrate) and back segment module group assembling processing procedure (driving IC and printing
Press fit of circuit boards).Wherein, leading portion Array processing procedure mainly forms TFT substrate, in order to control the movement of liquid crystal molecule；Middle section
Cell processing procedure mainly adds liquid crystal between TFT substrate and CF substrate；Back segment module group assembling processing procedure mainly drives IC pressing
With the integration of printed circuit board, and then drive liquid crystal molecule rotation, show image.
In the manufacturing process of the flat display apparatus such as liquid crystal display panel, it is often required to adopt apparatus for baking to glass substrate etc.
Element carries out baking processing procedure, and existing apparatus for baking generally includes two class of open apparatus for baking and closed apparatus for baking,
In, the inside less-restrictive of open apparatus for baking, the space around heating device is bigger, and air-flow has biggish freedom degree, no
It is limited by space, but since its heating device is substantially exposed to the external environment, it is difficult to heat generated harmful sublimate
To be controlled effectively, it is easy to appear the leakage of sublimate, is polluted the environment, makes the staff of surrounding by poison
Evil.And closed apparatus for baking is to be surrounded entire heating device using a closed oven, and entire processing procedure is made to exist completely
A possibility that carrying out in confined space, effectively reducing sublimate leakage, safety increases, however, due to whole device
It is exchanged with the basic airless of free surrounding space, air-flow flowing when heating is completely dependent on air inlet system and exhaust system itself to complete, if into row
Gas design is unreasonable, and gas can not be discharged in time, easily lead to deficient manufacturing procedure, and equipment dependability is poor, simultaneously because different
The capacity that product is generated when carrying out baking processing procedure is different, and the same exhaust system is often difficult to meet a variety of different products
Process requirements, cause it also poor to the adaptability of different product.
Summary of the invention
The purpose of the present invention is to provide a kind of apparatus for baking, can improve the exhaust system of apparatus for baking, so that air-flow
Steady discharge, avoids being vented bad, promotes baking processing procedure quality and apparatus for baking to the adaptability of different product.
The object of the invention is also to provide a kind of method for exhausting of apparatus for baking, can improve the exhaust system of apparatus for baking
System avoids being vented bad, the adaptation of promotion baking processing procedure quality and apparatus for baking to different product so that air-flow is steadily discharged
Property.
To achieve the above object, the present invention provides a kind of apparatus for baking, comprising: oven, the master being connected to the oven
Gas deflation assembly and on the circumferential surface of oven close to upper surface secondary gas deflation assembly；
The pair gas deflation assembly is exhausting window, comprising: the multiple exhaust outlets being arranged successively around the circumferential surface of the oven；
The check apron for being close to one side surface of exhaust outlet is equipped on each exhaust outlet, by controlling each exhaust outlet
The openings of sizes of each exhaust outlet is adjusted by size that check apron blocks.
The exhaust outlet is in paliform, comprising: framework and erecting set on the intracorporal multiple uniform intervals arrangements of the frame
Straight baffle.
Further include: the air-extractor being connected to the secondary gas deflation assembly.
The check apron can be gone up and down along one side surface of exhaust outlet, each by the elevating control for controlling the check apron
The openings of sizes of a exhaust outlet；
The apparatus for baking further include: the stepper motor being connect with the check apron, by described in stepper motor control
The lifting of check apron.
The main exhaust component is the multiple exhaust pipes being connected to the oven.
The present invention also provides a kind of method for exhausting of apparatus for baking, include the following steps:
Step 1 provides an apparatus for baking, comprising: oven, the main exhaust component being connected to the oven and set on oven
Circumferential surface on close to upper surface secondary gas deflation assembly；
The pair gas deflation assembly is exhausting window, comprising: the multiple exhaust outlets being arranged successively around the circumferential surface of the oven；
The check apron for being close to one side surface of exhaust outlet is equipped on each exhaust outlet, by controlling each exhaust outlet
The openings of sizes of each exhaust outlet is adjusted by size that check apron blocks；
Step 2 provides the product of multiple and different models, and test is exhausted to the product of each model, determines each
The product of a model openings of sizes that each exhaust outlet needs when it carries out baking processing procedure；
When venting test, the product of a model selected first simultaneously carries out baking processing procedure to the product, opens main exhaust group
Part, while the opening of all exhaust outlets of secondary gas deflation assembly is all transferred to maximum, and monitor the air-flow of each exhaust ports
Size adjusts the openings of sizes of each exhaust outlet then according to the air-flow size for monitoring each exhaust ports, and air-flow is bigger
The opening of its corresponding exhaust outlet of position is bigger, and its corresponding exhaust close of the position of air-flow, does not obtain the production of the model
Product carry out the openings of sizes that each exhaust outlet needs when baking processing procedure；
Step 3, the product opening that each exhaust outlet needs when it carries out baking processing procedure for recording each model are big
It is small；
Step 4 carries out baking processing procedure, opens main exhaust component, while carrying out the type of the product of baking processing procedure as needed
Its number is found in record and carries out the openings of sizes that each exhaust outlet needs when baking processing procedure, and by the opening of each exhaust outlet
Size adjusts the openings of sizes needed when carrying out baking processing procedure to the product of the model, to carry out the baking system of the product of the model
Journey.
Exhaust outlet in the step 1 is in paliform, comprising: framework and be set to the frame it is intracorporal it is multiple uniformly between
Every the vertical baffle of arrangement.
The step 4 a further include: air-extractor is provided, and the exhaust outlet for having air-flow to be discharged all is connected to the pumping and is set
It is standby.
The check apron can be gone up and down along one side surface of exhaust outlet, each by the elevating control for controlling the check apron
The openings of sizes of a exhaust outlet；
The apparatus for baking further include: the stepper motor being connect with the check apron, by described in stepper motor control
The lifting of check apron.
The main exhaust component is the multiple exhaust pipes being connected to the oven.
Beneficial effects of the present invention: the present invention provides a kind of apparatus for baking, the apparatus for baking include oven, with it is described roasting
The main exhaust device of case connection and on the circumferential surface of oven close to the secondary gas deflation assembly of upper surface, wherein the pair exhaust group
Part is exhausting window, comprising: the multiple exhaust outlets being arranged successively around the circumferential surface of the oven are equipped on each exhaust outlet
It is close to the check apron that can be gone up and down along one side surface of exhaust outlet of one side surface of exhaust outlet, by controlling the check apron
Lifting can control the openings of sizes of each exhaust outlet to provide an opening being freely discharged by adding exhausting window for air-flow, make
The flowing of internal gas flow is more freely steady, promotes baking processing procedure quality, and by the way that test is exhausted to different model product,
Determine each type product openings of sizes that each exhaust outlet needs when toasting processing procedure, thus when toasting processing procedure, Neng Gougen
Exhaust mode is adjusted in real time according to product type, promotes apparatus for baking to the adaptability of different product.The present invention also provides a kind of bakings
The method for exhausting of roasting device can improve the exhaust system of apparatus for baking, so that air-flow is steadily discharged, avoid being vented bad, mention
Baking processing procedure quality and apparatus for baking are risen to the adaptability of different product.
Detailed description of the invention
For further understanding of the features and technical contents of the present invention, it please refers to below in connection with of the invention detailed
Illustrate and attached drawing, however, the drawings only provide reference and explanation, is not intended to limit the present invention.
In attached drawing,
Fig. 1 is the structural schematic diagram of apparatus for baking of the invention；
Fig. 2 is the structural schematic diagram of the exhaust outlet of apparatus for baking of the invention；
Fig. 3 is the flow chart of the method for exhausting of apparatus for baking of the invention.
Specific embodiment
Further to illustrate technological means and its effect adopted by the present invention, below in conjunction with preferred implementation of the invention
Example and its attached drawing are described in detail.
Referring to Fig. 1, present invention firstly provides a kind of apparatus for baking, comprising: oven 1, the main row being connected to the oven 1
Pneumatic module 3 and on the circumferential surface of oven 1 close to upper surface secondary gas deflation assembly 2；
The pair gas deflation assembly 2 is exhausting window, comprising: the multiple exhaust outlets being arranged successively around the circumferential surface of the oven 1
21；
The check apron 22 for being close to 21 1 side surface of exhaust outlet is equipped on each exhaust outlet 21, it is each by controlling
The size of exhaust outlet blocked by check apron 22 adjusts the openings of sizes of each exhaust outlet 21.
Specifically, the check apron 22 can be gone up and down along 21 1 side surface of exhaust outlet, by controlling the check apron
22 lifting is to control the size of each exhaust outlet 21 blocked by check apron 22, so that the opening for controlling each exhaust outlet 21 is big
It is small.Certainly, other than the lifting of check apron 22, being blocked by check apron 22 for each exhaust outlet can also be adjusted by other methods
Size, merely illustrative herein, not limitation of the present invention.
Further, the apparatus for baking further include: the stepper motor connecting with the check apron 22 passes through the stepping horse
Up to the lifting for controlling the check apron 22, the corresponding stepper motor of each check apron 22 keeps the opening of each exhaust outlet 21 big
It is small individually to be controlled.
Specifically, the main exhaust component 3 is main air exit in baking processing procedure, and most of gas all passes through main row
Pneumatic module 3 is discharged, and secondary gas deflation assembly 2 is used for during toasting processing procedure, when main exhaust component 3 is unable to satisfy actual demand
When, auxiliary main exhaust component 3 is exhausted, i.e., the insufficient part of 3 capacity of main exhaust component is compensated by secondary gas deflation assembly 2.
Specifically, when carrying out baking processing procedure, test is exhausted to the product for carrying out baking processing procedure first, really
Determine and record the openings of sizes that each exhaust outlet 21 needs, test method is to open main exhaust component 3, while by secondary gas deflation assembly
The opening of 2 all exhaust outlets 21 is all transferred to maximum, and monitors the air-flow size at each exhaust outlet 21, then according to prison
The air-flow size at each exhaust outlet 21 is measured, the openings of sizes of each exhaust outlet 21 is adjusted.
Wherein, the opening of its corresponding exhaust outlet 21 of the bigger position of air-flow is bigger, and its is not corresponding for the position of air-flow
Exhaust outlet 21 is closed, and show that the product of the model carries out the openings of sizes that each exhaust outlet 21 needs when baking processing procedure.
Then, carry out baking processing procedure, carry out as needed baking processing procedure product model found in record its into
The openings of sizes that each exhaust outlet 21 needs when row baking processing procedure, and the openings of sizes of each exhaust outlet 21 is adjusted to the model
Product carry out the openings of sizes needed when baking processing procedure, to carry out the baking processing procedure of the product of the model.
It should be noted that test is exhausted respectively by the product to different model, the product of different model is determined
The openings of sizes that each exhaust outlet 21 needs when toasting processing procedure, thus the exhaust side different for different model product design
Formula is able to ascend apparatus for baking to the adaptability of different product.By secondary gas deflation assembly 2, one is provided for air-flow and is freely discharged
It is open, keeps the flowing of internal gas flow more freely steady, promote baking processing procedure quality, avoid being vented bad caused processing procedure not
It is good.
Meanwhile the apparatus for baking further include: the air-extractor being connected to the secondary gas deflation assembly 2 passes through air-extractor
The gas being discharged by secondary gas deflation assembly 2 is taken away, environment is avoided pollution, guarantees the health of processing procedure personnel.
Preferably, referring to Fig. 2, the exhaust outlet 21 be in paliform, comprising: framework 211 and be set to the framework
The vertical baffle 212 of multiple uniform intervals arrangement in 211.The main exhaust component 3 is multiple to be connected to the oven 1
Gas is discharged by the exhaust pipe in exhaust pipe.
Referring to Fig. 3, including the following steps: the present invention also provides a kind of method for exhausting of apparatus for baking
Step 1, referring to Fig. 1, provide an apparatus for baking, comprising: oven 1, the main exhaust component being connected to the oven 1
3 and on the circumferential surface of oven 1 close to upper surface secondary gas deflation assembly 2；
The pair gas deflation assembly 2 is exhausting window, comprising: the multiple exhaust outlets being arranged successively around the circumferential surface of the oven 1
21；
The check apron 22 for being close to 21 1 side surface of exhaust outlet is equipped on each exhaust outlet 21, it is each by controlling
The size of exhaust outlet blocked by check apron 22 adjusts the openings of sizes of each exhaust outlet 21.
Specifically, the check apron can be gone up and down along one side surface of exhaust outlet, by the liter for controlling the check apron
Drop is to control the size of each exhaust outlet blocked by check apron 22, to control the openings of sizes of each exhaust outlet.Certainly, in addition to
Other than the lifting of check apron 22, the size of each exhaust outlet blocked by check apron 22 can also be adjusted by other methods, herein
It is merely illustrative, not limitation of the present invention.
Further, the apparatus for baking further include: the stepper motor connecting with the check apron 22 passes through the stepping horse
Up to the lifting for controlling the check apron 22, the corresponding stepper motor of each check apron 22 keeps the opening of each exhaust outlet 21 big
It is small individually to be controlled.
Specifically, the main exhaust component 3 is main air exit in baking processing procedure, and most of gas all passes through main row
Pneumatic module 3 is discharged, and secondary gas deflation assembly 2 is used for during toasting processing procedure, when main exhaust component 3 is unable to satisfy actual demand
When, auxiliary main exhaust component 3 is exhausted, i.e., the insufficient part of 3 capacity of main exhaust component is compensated by secondary gas deflation assembly 2.
Preferably, referring to Fig. 2, the exhaust outlet 21 be in paliform, comprising: framework 211 and be set to the framework
The vertical baffle 212 of multiple uniform intervals arrangement in 211.The main exhaust component 3 is multiple to be connected to the oven 1
Gas is discharged by the exhaust pipe in exhaust pipe.
Step 2 provides the product of multiple and different models, and test is exhausted to the product of each model, determines each
The product of a model openings of sizes that each exhaust outlet 21 needs when it carries out baking processing procedure.
It should be noted that the throughput of generation is different, therefore since different model product is when carrying out baking processing procedure
It needs that the product of different model is exhausted respectively test, and corresponding exhaust scheme is designed according to venting test, thus suitable
Generation air-flow sharply by the product of each model when carrying out baking processing procedure is discharged, avoid because be vented it is bad caused by processing procedure not
It is good.
Specifically, when venting test, the product of a model selected first simultaneously carries out baking processing procedure to the product, opens master
Gas deflation assembly 3, while the opening of all exhaust outlets 21 of secondary gas deflation assembly 2 is all transferred to maximum, and monitor each exhaust
Air-flow size at mouth 21 adjusts opening for each exhaust outlet 21 then according to the air-flow size monitored at each exhaust outlet 21
Mouth size, the opening of its corresponding exhaust outlet 21 of the bigger position of air-flow is bigger, not its corresponding exhaust outlet of the position of air-flow
21 close, and show that the product of the model carries out the openings of sizes that each exhaust outlet 21 needs when baking processing procedure.
It is noted that all can without the capacity of air-flow namely main exhaust component 3 at all exhaust outlets 21
When meeting the process requirement of the type product, then all exhaust outlets 21 are closed, secondary gas deflation assembly 2 does not work.
Step 3, the product opening that each exhaust outlet 21 needs when it carries out baking processing procedure for recording each model
Size.
Step 4 carries out baking processing procedure, opens main exhaust component 3, while carrying out the type of the product of baking processing procedure as needed
Its number is found in record and carries out the openings of sizes that each exhaust outlet 21 needs when baking processing procedure, and by each exhaust outlet 21
Openings of sizes adjusts the openings of sizes needed when carrying out baking processing procedure to the product of the model, to carry out the baking of the product of the model
It is baked journey.
Specifically, due in baking processing procedure the air-flow that generates often there is pollution, in order to avoid from each exhaust outlet 21
The air stream contamination environment for locating discharge, influences the health of processing procedure personnel, can also provide an air-extractor, and will have air-flow row
Exhaust outlet 21 out is all connected to the air-extractor, so that air-flow can smoothly flow and be discharged and let out easily
Leakage, the advantages of being polluted to context, have both existing open apparatus for baking and closed apparatus for baking.
In conclusion the present invention provides a kind of apparatus for baking, which includes oven, is connected to the oven
Main exhaust device and on the circumferential surface of oven close to upper surface secondary gas deflation assembly, wherein it is described pair gas deflation assembly be exhaust
Window, the exhausting window surround the circumferential surface of the oven, comprising: the multiple exhaust outlets being arranged successively around the circumferential surface of the oven,
It is equipped on each exhaust outlet and is close to being gone up and down along one side surface of exhaust outlet for one side surface of exhaust outlet
Check apron, the lifting by controlling the check apron can control the openings of sizes of each exhaust outlet to mention by adding exhausting window for air-flow
The opening being freely discharged for one keeps the flowing of internal gas flow more freely steady, promotes baking processing procedure quality, and by difference
Test is exhausted in type product, determines each type product openings of sizes that each exhaust outlet needs when toasting processing procedure, from
And when toasting processing procedure, exhaust mode can be adjusted in real time according to product type, promote adaptation of the apparatus for baking to different product
Property.The present invention also provides a kind of method for exhausting of apparatus for baking, can improve the exhaust system of apparatus for baking, so that air-flow is steady
Discharge, avoids being vented bad, promotes baking processing procedure quality and apparatus for baking to the adaptability of different product.
The above for those of ordinary skill in the art can according to the technique and scheme of the present invention and technology
Other various corresponding changes and modifications are made in design, and all these change and modification all should belong to the claims in the present invention
Protection scope.
Claims (10)
1. a kind of apparatus for baking, system of the apparatus for baking for being toasted in the manufacturing process of flat display apparatus to element
Journey characterized by comprising oven (1), the main exhaust component (3) being connected to the oven (1) and the week for being set to oven (1)
Close to the secondary gas deflation assembly (2) of upper surface on face；
The pair gas deflation assembly (2) is exhausting window, comprising: multiple exhaust outlets that the circumferential surface around the oven (1) is arranged successively
(21)；
The check apron (22) for being close to (21) one side surface of exhaust outlet is equipped on each exhaust outlet (21), it is each by controlling
The size of exhaust outlet blocked by check apron (22) adjusts the openings of sizes of each exhaust outlet (21).
2. apparatus for baking as described in claim 1, which is characterized in that the exhaust outlet (21) is in paliform, comprising: framework
(211) the vertical baffle (212) of multiple uniform intervals arrangement and in the framework (211).
3. apparatus for baking as described in claim 1, which is characterized in that further include: the pumping being connected to the secondary gas deflation assembly (2)
Gas equipment.
4. apparatus for baking as described in claim 1, which is characterized in that the check apron (22) can be along the exhaust outlet (21) one
Side surface is gone up and down, the openings of sizes of each exhaust outlet of elevating control (21) by controlling the check apron (22)；
The apparatus for baking further include: the stepper motor being connect with the check apron (22), by described in stepper motor control
The lifting of check apron (22).
5. apparatus for baking as described in claim 1, which is characterized in that the main exhaust component (3) is to connect with the oven (1)
Logical multiple exhaust pipes.
6. a kind of method for exhausting of apparatus for baking, the apparatus for baking in the manufacturing process of flat display apparatus to element into
The processing procedure of row baking, which comprises the steps of:
Step 1 provides an apparatus for baking, comprising: oven (1), the main exhaust component (3) being connected to the oven (1) and is set to
Close to the secondary gas deflation assembly (2) of upper surface on the circumferential surface of oven (1)；
The pair gas deflation assembly (2) is exhausting window, comprising: multiple exhaust outlets that the circumferential surface around the oven (1) is arranged successively
(21)；
The check apron (22) for being close to (21) one side surface of exhaust outlet is equipped on each exhaust outlet (21), it is each by controlling
The size of exhaust outlet blocked by check apron (22) adjusts the openings of sizes of each exhaust outlet (21)；
Step 2 provides the product of multiple and different models, and test is exhausted to the product of each model, determines each type
Number the product openings of sizes that each exhaust outlet (21) needs when it carries out baking processing procedure；
When venting test, the product of a model selected first simultaneously carries out baking processing procedure to the product, opens main exhaust component
(3), it all while by the opening of all exhaust outlets (21) of secondary gas deflation assembly (2) is transferred to maximum, and monitors each exhaust outlet
(21) the air-flow size at adjusts each exhaust outlet (21) then according to the air-flow size monitored at each exhaust outlet (21)
Openings of sizes, the opening of its corresponding exhaust outlet (21) of the bigger position of air-flow is bigger, and its is not corresponding for the position of air-flow
Exhaust outlet (21) is closed, and show that the product of the model carries out the openings of sizes that each exhaust outlet (21) needs when baking processing procedure；
Step 3, the product opening that each exhaust outlet (21) needs when it carries out baking processing procedure for recording each model are big
It is small；
Step 4 carries out baking processing procedure, opens main exhaust component (3), while carrying out the model of the product of baking processing procedure as needed
Its is found in record and carries out the openings of sizes that each exhaust outlet (21) needs when baking processing procedure, and by each exhaust outlet (21)
Openings of sizes adjust the openings of sizes needed when carrying out baking processing procedure to the product of the model, to carry out the product of the model
Toast processing procedure.
7. the method for exhausting of apparatus for baking as claimed in claim 6, which is characterized in that the exhaust outlet (21) in the step 1
In paliform, comprising: framework (211) and the vertical baffle of the multiple uniform intervals being set in the framework (211) arrangement
(212)。
8. the method for exhausting of apparatus for baking as claimed in claim 6, which is characterized in that the step 4 further include: provide one and take out
Gas equipment, and the exhaust outlet (21) for having air-flow to be discharged all is connected to the air-extractor.
9. the method for exhausting of apparatus for baking as claimed in claim 6, which is characterized in that the check apron (22) can be along the row
(21) one side surface of port is gone up and down, big by controlling the opening of each exhaust outlet of elevating control (21) of the check apron (22)
It is small；
The apparatus for baking further include: the stepper motor being connect with the check apron (22), by described in stepper motor control
The lifting of check apron (22).
10. the method for exhausting of apparatus for baking as claimed in claim 6, which is characterized in that the main exhaust component (3) for institute
State multiple exhaust pipes of oven (1) connection.
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| CN107422499A (en) * | 2017-07-28 | 2017-12-01 | 武汉华星光电技术有限公司 | Substrate heating equipment |
| CN107561747A (en) * | 2017-10-12 | 2018-01-09 | 惠科股份有限公司 | Pre-baking device and pre-baking system of display substrate |
| CN111090182A (en) * | 2018-10-23 | 2020-05-01 | 李东明 | Hot air flow direction control mechanism of substrate baking machine table |
| CN112167999B (en) * | 2019-07-01 | 2021-10-29 | 宁波方太厨具有限公司 | Exhaust structure and exhaust method of steaming and baking integrated machine |
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| CN101008547A (en) * | 2007-01-30 | 2007-08-01 | 友达光电股份有限公司 | Device suitable for roasting a substrate |
| JP2009281653A (en) * | 2008-05-21 | 2009-12-03 | Espec Corp | Heat treatment apparatus |
| CN105157365A (en) * | 2015-09-09 | 2015-12-16 | 武汉华星光电技术有限公司 | Baking equipment |
| CN105116570A (en) * | 2015-09-15 | 2015-12-02 | 武汉华星光电技术有限公司 | Glass substrate baking device |
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| CN106154601A (en) | 2016-11-23 |
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