CN106154601A - Apparatus for baking and method for exhausting thereof - Google Patents
Apparatus for baking and method for exhausting thereof Download PDFInfo
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- CN106154601A CN106154601A CN201610519801.8A CN201610519801A CN106154601A CN 106154601 A CN106154601 A CN 106154601A CN 201610519801 A CN201610519801 A CN 201610519801A CN 106154601 A CN106154601 A CN 106154601A
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- air vent
- baking
- air
- processing procedure
- check apron
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Baking, Grill, Roasting (AREA)
Abstract
The present invention provides a kind of apparatus for baking and method for exhausting thereof, this apparatus for baking includes baking box, the main exhaust device connected with described baking box, and it is located on the side face of baking box the secondary gas deflation assembly near upper surface, wherein, described secondary gas deflation assembly is exhausting window, including: multiple air vents that the side face around described baking box is arranged in order, each air vent is equipped be close to described air vent one side surface can carry out, along described air vent one side surface, the check apron that lifts, the openings of sizes of each air vent can be controlled by controlling the lifting of described check apron, can make the air current flow within baking box more freely steadily, promote baking processing procedure quality and the apparatus for baking adaptability to different product.
Description
Technical field
The present invention relates to display fabrication techniques field, particularly relate to a kind of apparatus for baking and method for exhausting thereof.
Background technology
Along with plane display dresses such as the development of Display Technique, liquid crystal displays (Liquid Crystal Display, LCD)
Put because having that high image quality, power saving, fuselage be thin and the advantage such as applied range, and be widely used in mobile phone, TV, individual number
The various consumption electronic products such as word assistant, digital camera, notebook computer, desk computer, become the master in display device
Stream.
Generally display panels is by color membrane substrates (CF, Color Filter), thin film transistor base plate (TFT, Thin
Film Transistor), the liquid crystal (LC, Liquid Crystal) that is sandwiched between color membrane substrates and thin film transistor base plate and
Fluid sealant frame (Sealant) form, its moulding process generally comprises: leading portion array (Array) processing procedure (thin film, gold-tinted, etching and
Stripping), stage casing become box (Cell) processing procedure (TFT substrate with CF baseplate-laminating) and back segment module group assembling processing procedure (to drive IC and printing
Press fit of circuit boards).Wherein, leading portion Array processing procedure mainly forms TFT substrate, in order to control the motion of liquid crystal molecule；Stage casing
Cell processing procedure is mainly and adds liquid crystal between TFT substrate and CF substrate；Back segment module group assembling processing procedure mainly drives IC pressing
With the integration of printed circuit board (PCB), and then drive liquid crystal molecule rotate, show image.
In the manufacturing process of the flat display apparatus such as display panels, it is often required to adopt apparatus for baking to glass substrate etc.
Element carries out toasting processing procedure, and existing apparatus for baking generally includes open apparatus for baking and closed apparatus for baking two class, its
In, the internal limitations of open apparatus for baking is less, and the space around heater is bigger, and air-flow has bigger degree of freedom, no
Being limited by space, but be exposed to the external environment owing to its heater is substantially, the produced harmful sublimate of heating is difficult
To be controlled effectively, the leakage of sublimate easily occurs, to environment, make the staff of surrounding by poison
Evil.And closed apparatus for baking is that whole heater utilizes an airtight baking box be surrounded, whole processing procedure is made to exist completely
Carrying out in confined space, effectively reduce the probability of sublimate leakage, safety increases, but, due to whole device
Airless basic with free surrounding space exchanges, and air current flow during heating is completely dependent on air inlet system and exhaust system own and completes, if entering row
Gas design is unreasonable, and gas cannot be discharged in time, easily causes deficient manufacturing procedure, and equipment dependability is poor, simultaneously because different
The capacity that product produces when carrying out toasting processing procedure is different, and same gas extraction system is often difficult to meet multiple different product
Process requirements, cause it the most poor to the adaptability of different product.
Summary of the invention
It is an object of the invention to provide a kind of apparatus for baking, it is possible to improve the gas extraction system of apparatus for baking so that air-flow
Steadily discharge, it is to avoid aerofluxus is bad, promote baking processing procedure quality and the apparatus for baking adaptability to different product.
The present invention also aims to provide the method for exhausting of a kind of apparatus for baking, it is possible to improve the exhaust system of apparatus for baking
System so that air-flow is steadily discharged, it is to avoid aerofluxus is bad, promotes baking processing procedure quality and the apparatus for baking adaptation to different product
Property.
For achieving the above object, the invention provides a kind of apparatus for baking, including: the master that baking box connects with described baking box
Gas deflation assembly and be located on the side face of baking box the secondary gas deflation assembly near upper surface；
Described secondary gas deflation assembly is exhausting window, including: multiple air vents that the side face around described baking box is arranged in order；
The check apron being close to described air vent one side surface it is equipped with, by controlling each air vent on each air vent
The size blocked by check apron is to adjust the openings of sizes of each air vent.
Described air vent is paliform, including: it is perpendicular that framework and the multiple uniform intervals being located in described framework arrange
Straight catch.
Also include: the air-extractor connected with described secondary gas deflation assembly.
Described check apron can lift along described air vent one side surface, each by controlling the elevating control of described check apron
The openings of sizes of individual air vent；
Described apparatus for baking also includes: the stepper motor being connected with described check apron, is controlled described by described stepper motor
The lifting of check apron.
Described main exhaust assembly is the multiple discharge ducts connected with described baking box.
The present invention also provides for the method for exhausting of a kind of apparatus for baking, comprises the steps:
Step 1, provide an apparatus for baking, including: main exhaust assembly that baking box connects with described baking box and be located at baking box
Side face near the secondary gas deflation assembly of upper surface；
Described secondary gas deflation assembly is exhausting window, including: multiple air vents that the side face around described baking box is arranged in order；
The check apron being close to described air vent one side surface it is equipped with, by controlling each air vent on each air vent
The size blocked by check apron is to adjust the openings of sizes of each air vent；
Step 2, provide the product of multiple different model, and the product of each model is exhausted test, determine each
The product of the individual model openings of sizes that each air vent needs when it carries out toasting processing procedure；
During venting test, first select the product of a model and carry out this product toasting processing procedure, opening main exhaust group
Part, is all transferred to maximum by the opening of all of air vent of secondary gas deflation assembly simultaneously, and monitors the air-flow of each exhaust ports
Size, then according to monitoring the air-flow size of each exhaust ports, adjusts the openings of sizes of each air vent, and air-flow is the biggest
The opening of the air vent of its correspondence of position is the biggest, does not has the exhaust close of its correspondence of position of air-flow, draws the product of this model
The openings of sizes that when product carry out toasting processing procedure, each air vent needs；
Step 3, to record the product of each model opening that each air vent needs when it carries out toasting processing procedure big
Little；
Step 4, carry out toasting processing procedure, open main exhaust assembly, carry out toasting the type of the product of processing procedure the most as required simultaneously
In record, number find the openings of sizes that when it carries out toasting processing procedure, each air vent needs, and by the opening of each air vent
The openings of sizes that the product that size adjusts to this model needs when carrying out toasting processing procedure, to carry out the baking system of the product of this model
Journey.
Air vent in described step 1 is paliform, including: framework and be located in described framework multiple uniform between
Vertical catch every arrangement.
Described step 4 also includes: provide an air-extractor, and the air vent having air-flow to discharge all is communicated to this bleeds and set
Standby.
Described check apron can lift along described air vent one side surface, each by controlling the elevating control of described check apron
The openings of sizes of individual air vent；
Described apparatus for baking also includes: the stepper motor being connected with described check apron, is controlled described by described stepper motor
The lifting of check apron.
Described main exhaust assembly is the multiple discharge ducts connected with described baking box.
Beneficial effects of the present invention: the invention provides a kind of apparatus for baking, this apparatus for baking includes baking box and described roasting
The main exhaust device of case connection and be located on the side face of baking box the secondary gas deflation assembly near upper surface, wherein, described secondary aerofluxus group
Part is exhausting window, including: multiple air vents that the side face around described baking box is arranged in order, each air vent is equipped with
That is close to described air vent one side surface can carry out, along described air vent one side surface, the check apron that lifts, by controlling described check apron
Lifting can control the openings of sizes of each air vent, by setting up exhausting window, provide an opening freely discharged for air-flow, make
The flowing of internal gas flow more freely steadily, promotes baking processing procedure quality, and by different model product is exhausted test,
Determine each type product openings of sizes that each air vent needs when toasting processing procedure, thus when toasting processing procedure, it is possible to root
Adjust exhaust mode according to product type in real time, promote the apparatus for baking adaptability to different product.The present invention also provides for a kind of baking
The method for exhausting of roasting device, it is possible to improve the gas extraction system of apparatus for baking so that air-flow is steadily discharged, it is to avoid aerofluxus is bad, carry
Rise baking processing procedure quality and the apparatus for baking adaptability to different product.
Accompanying drawing explanation
In order to be able to be further understood that inventive feature and technology contents, refer to below in connection with the present invention is detailed
Illustrate and accompanying drawing, but accompanying drawing only provides reference and explanation use, be not used for the present invention is any limitation as.
In accompanying drawing,
Fig. 1 is the structural representation of the apparatus for baking of the present invention；
Fig. 2 is the structural representation of the air vent of the apparatus for baking of the present invention；
Fig. 3 is the flow chart of the method for exhausting of the apparatus for baking of the present invention.
Detailed description of the invention
By further illustrating the technological means and effect, being preferable to carry out below in conjunction with the present invention that the present invention taked
Example and accompanying drawing thereof are described in detail.
Refer to Fig. 1, present invention firstly provides a kind of apparatus for baking, including: the main row that baking box 1 connects with described baking box 1
Pneumatic module 3 and be located on the side face of baking box 1 the secondary gas deflation assembly 2 near upper surface；
Described secondary gas deflation assembly 2 is exhausting window, including: multiple air vents that the side face around described baking box 1 is arranged in order
21；
Be equipped with on each air vent 21 be close to described air vent 21 1 side surface check apron 22, by controlling each
The size blocked by check apron 22 of air vent is to adjust the openings of sizes of each air vent 21.
Specifically, described check apron 22 can lift along described air vent 21 1 side surface, by controlling described check apron
The lifting of 22 controls the size blocked by check apron 22 of each air vent 21, thus the opening controlling each air vent 21 is big
Little.Certainly, in addition to the lifting of check apron 22, it is also possible to adjust being blocked by check apron 22 of each air vent by additive method
Size, the most merely illustrative, not limitation of the present invention.
Further, described apparatus for baking also includes: the stepper motor being connected with described check apron 22, by described stepping horse
Reaching the lifting controlling described check apron 22, the corresponding stepper motor of each check apron 22, the opening making each air vent 21 is big
Little can individually be controlled.
Specifically, described main exhaust assembly 3 is air exit main in baking processing procedure, and major part gas all passes through main row
Pneumatic module 3 is discharged, and secondary gas deflation assembly 2 is for during baking processing procedure, when main exhaust assembly 3 cannot meet actual demand
Time, auxiliary main exhaust assembly 3 is exhausted, and the part that i.e. main exhaust assembly 3 capacity is not enough is compensated by secondary gas deflation assembly 2.
Specifically, carry out toast processing procedure time, first to need carry out toast processing procedure product be exhausted test, really
Determining and record the openings of sizes that each air vent 21 needs, method of testing is for opening main exhaust assembly 3, simultaneously by pair gas deflation assembly
The opening of all of air vent 21 of 2 is all transferred to maximum, and monitors the air-flow size at each air vent 21, then according to prison
Measure the air-flow size at each air vent 21, adjust the openings of sizes of each air vent 21.
Wherein, the opening of the air vent 21 of its correspondence of position that air-flow is the biggest is the biggest, does not has its correspondence of position of air-flow
Air vent 21 cuts out, and draws the openings of sizes that when product of this model carries out toasting processing procedure, each air vent 21 needs.
Then, carrying out toasting processing procedure, the model of the product carrying out baking processing procedure as required finds it in record and enters
The openings of sizes that during row baking processing procedure, each air vent 21 needs, and the openings of sizes of each air vent 21 is adjusted to this model
Product carry out toast processing procedure time need openings of sizes, to carry out the baking processing procedure of the product of this model.
It should be noted that by the product of different model is exhausted test respectively, determine the product of different model
The openings of sizes that each air vent 21 needs when toasting processing procedure, thus for the different aerofluxus side of different model product design
Formula, it is possible to promote the apparatus for baking adaptability to different product.By secondary gas deflation assembly 2, freely discharge for air-flow offer one
Opening, makes the flowing of internal gas flow more freely steadily, promotes baking processing procedure quality, it is to avoid the bad processing procedure caused of aerofluxus is not
Good.
Meanwhile, described apparatus for baking also includes: the air-extractor connected with described secondary gas deflation assembly 2, passes through air-extractor
To be taken away by secondary gas deflation assembly 2 expellant gas, it is to avoid pollute environment, it is ensured that the health of processing procedure personnel.
Preferably, referring to Fig. 2, described air vent 21 is in paliform, including: framework 211 and be located at described framework
The vertical catch 212 of the multiple uniform intervals arrangement in 211.Described main exhaust assembly 3 is multiple with what described baking box 1 connected
Discharge duct, discharges gas by described discharge duct.
Referring to Fig. 3, the present invention also provides for the method for exhausting of a kind of apparatus for baking, comprises the steps:
Step 1, refer to Fig. 1, it is provided that an apparatus for baking, including: the main exhaust assembly that baking box 1 connects with described baking box 1
3 and be located on the side face of baking box 1 the secondary gas deflation assembly 2 near upper surface；
Described secondary gas deflation assembly 2 is exhausting window, including: multiple air vents that the side face around described baking box 1 is arranged in order
21；
Be equipped with on each air vent 21 be close to described air vent 21 1 side surface check apron 22, by controlling each
The size blocked by check apron 22 of air vent is to adjust the openings of sizes of each air vent 21.
Specifically, described check apron can lift along described air vent one side surface, by controlling the liter of described check apron
Fall controls the size blocked by check apron 22 of each air vent, thus controls the openings of sizes of each air vent.Certainly, except
Beyond the lifting of check apron 22, it is also possible to adjusted the size blocked by check apron 22 of each air vent by additive method, herein
Merely illustrative, not limitation of the present invention.
Further, described apparatus for baking also includes: the stepper motor being connected with described check apron 22, by described stepping horse
Reaching the lifting controlling described check apron 22, the corresponding stepper motor of each check apron 22, the opening making each air vent 21 is big
Little can individually be controlled.
Specifically, described main exhaust assembly 3 is air exit main in baking processing procedure, and major part gas all passes through main row
Pneumatic module 3 is discharged, and secondary gas deflation assembly 2 is for during baking processing procedure, when main exhaust assembly 3 cannot meet actual demand
Time, auxiliary main exhaust assembly 3 is exhausted, and the part that i.e. main exhaust assembly 3 capacity is not enough is compensated by secondary gas deflation assembly 2.
Preferably, referring to Fig. 2, described air vent 21 is in paliform, including: framework 211 and be located at described framework
The vertical catch 212 of the multiple uniform intervals arrangement in 211.Described main exhaust assembly 3 is multiple with what described baking box 1 connected
Discharge duct, discharges gas by described discharge duct.
Step 2, provide the product of multiple different model, and the product of each model is exhausted test, determine each
The product of the individual model openings of sizes that each air vent 21 needs when it carries out toasting processing procedure.
It should be noted that due to different model product when carrying out toasting processing procedure, the throughput of generation is different, therefore
Need the product to different model to be exhausted test respectively, and design corresponding aerofluxus scheme according to venting test, thus suitable
Profit ground by the product of each model carry out toast processing procedure time generation air-flow discharge, it is to avoid the processing procedure caused because aerofluxus is bad is not
Good.
Specifically, during venting test, first select the product of a model and carry out this product toasting processing procedure, opening main
Gas deflation assembly 3, is all transferred to maximum by the opening of all of air vent 21 of secondary gas deflation assembly 2 simultaneously, and monitors each aerofluxus
Air-flow size at mouth 21, then according to the air-flow size monitored at each air vent 21, adjusts opening of each air vent 21
Mouth size, the opening of the air vent 21 of its correspondence of position that air-flow is the biggest is the biggest, does not has the air vent of its correspondence of position of air-flow
21 close, and draw the openings of sizes that when product of this model carries out toasting processing procedure, each air vent 21 needs.
It is noted that all do not have air-flow at all of air vent 21, namely the capacity of main exhaust assembly 3 can
When meeting the process requirement of this type product, then closing all of air vent 21, secondary gas deflation assembly 2 does not works.
Step 3, record the product of each model opening that each air vent 21 needs when it carries out toasting processing procedure
Size.
Step 4, carry out toasting processing procedure, open main exhaust assembly 3, carry out toasting the type of the product of processing procedure the most as required simultaneously
In record, number find the openings of sizes that when it carries out toasting processing procedure, each air vent 21 needs, and by each air vent 21
The openings of sizes that the product that openings of sizes adjusts to this model needs when carrying out toasting processing procedure, to carry out the baking of the product of this model
Baking journey.
Specifically, the air-flow owing to producing in baking processing procedure often has contaminative, in order to avoid from each air vent 21
The air stream contamination environment that place discharges, affects the healthy of processing procedure personnel, it is also possible to provide an air-extractor, and air-flow will be had to arrange
The air vent 21 gone out all is communicated to this air-extractor, so that air-flow can flow smoothly and discharge, will not let out easily again
Leakage, pollutes context, has existing open apparatus for baking and the advantage of closed apparatus for baking concurrently.
In sum, the invention provides a kind of apparatus for baking, this apparatus for baking includes what baking box connected with described baking box
Main exhaust device and be located on the side face of baking box the secondary gas deflation assembly near upper surface, wherein, described secondary gas deflation assembly is aerofluxus
Window, this exhausting window surrounds the side face of described baking box, including: multiple air vents that the side face around described baking box is arranged in order,
Be equipped with on each air vent be close to described air vent one side surface can carry out lifting along described air vent one side surface
Check apron, can control the openings of sizes of each air vent, by setting up exhausting window, carry for air-flow by controlling the lifting of described check apron
For an opening freely discharged, make the flowing of internal gas flow more freely steadily, promote baking processing procedure quality, and by difference
Type product is exhausted test, determines each type product openings of sizes that each air vent needs when toasting processing procedure, from
And when toasting processing procedure, it is possible to adjust exhaust mode according to product type in real time, promote the apparatus for baking adaptation to different product
Property.The present invention also provides for the method for exhausting of a kind of apparatus for baking, it is possible to improve the gas extraction system of apparatus for baking so that air-flow is steady
Discharge, it is to avoid aerofluxus is bad, promote baking processing procedure quality and the apparatus for baking adaptability to different product.
The above, for the person of ordinary skill of the art, can be according to technical scheme and technology
Other various corresponding changes and deformation are made in design, and all these change and deformation all should belong to the claims in the present invention
Protection domain.
Claims (10)
1. an apparatus for baking, it is characterised in that including: main exhaust assembly (3) that baking box (1) connects with described baking box (1),
And it is located on the side face of baking box (1) the secondary gas deflation assembly (2) near upper surface；
Described secondary gas deflation assembly (2) is exhausting window, including: multiple air vents that the side face around described baking box (1) is arranged in order
(21)；
The check apron (22) being close to described air vent (21) side surface it is equipped with, by controlling each on each air vent (21)
The size blocked by check apron (22) of air vent is to adjust the openings of sizes of each air vent (21).
2. apparatus for baking as claimed in claim 1, it is characterised in that described air vent (21) is in paliform, including framework
(211) and be located in described framework (211) multiple uniform intervals arrangement vertical catch (212).
3. apparatus for baking as claimed in claim 1, it is characterised in that also include: with taking out that described secondary gas deflation assembly (2) connects
Gas equipment.
4. apparatus for baking as claimed in claim 1, it is characterised in that described check apron (22) can be along described air vent (21)
Side surface lifts, by controlling the openings of sizes of each air vent of the elevating control (21) of described check apron (22)；
Described apparatus for baking also includes: the stepper motor being connected with described check apron (22), is controlled described by described stepper motor
The lifting of check apron (22).
5. apparatus for baking as claimed in claim 1, it is characterised in that described main exhaust assembly (3) is with described baking box (1) even
Logical multiple discharge ducts.
6. the method for exhausting of an apparatus for baking, it is characterised in that comprise the steps:
Step 1, provide an apparatus for baking, including: main exhaust assembly (3) that baking box (1) connects with described baking box (1) and be located at
Near the secondary gas deflation assembly (2) of upper surface on the side face of baking box (1)；
Described secondary gas deflation assembly (2) is exhausting window, including: multiple air vents that the side face around described baking box (1) is arranged in order
(21)；
The check apron (22) being close to described air vent (21) side surface it is equipped with, by controlling each on each air vent (21)
The size blocked by check apron (22) of air vent is to adjust the openings of sizes of each air vent (21)；
Step 2, provide the product of multiple different model, and the product of each model is exhausted test, determine each type
Number product each air vent (21) openings of sizes of needing when it carries out toasting processing procedure；
During venting test, first select the product of a model and carry out this product toasting processing procedure, opening main exhaust assembly
(3), the opening of all of air vent (21) of secondary gas deflation assembly (2) is all transferred to maximum simultaneously, and monitors each air vent
(21) the air-flow size at place, then according to monitoring the air-flow size at each air vent (21) place, adjusts each air vent (21)
Openings of sizes, the opening of the air vent (21) of its correspondence of position that air-flow is the biggest is the biggest, does not has its correspondence of position of air-flow
Air vent (21) cuts out, and draws the openings of sizes that when product of this model carries out toasting processing procedure, each air vent (21) needs；
Step 3, to record the product of each model opening that each air vent (21) needs when it carries out toasting processing procedure big
Little；
Step 4, carry out toasting processing procedure, open main exhaust assembly (3), carry out toasting the model of the product of processing procedure the most as required simultaneously
The openings of sizes that when it carries out toasting processing procedure, each air vent (21) needs is found in record, and by each air vent (21)
The openings of sizes that needs when carrying out toasting processing procedure of the product that adjusts to this model of openings of sizes, to carry out the product of this model
Baking processing procedure.
7. the method for exhausting of apparatus for baking as claimed in claim 6, it is characterised in that the air vent (21) in described step 1
In paliform, including: the vertical catch that framework (211) and the multiple uniform intervals being located in described framework (211) arrange
(212)。
8. the method for exhausting of apparatus for baking as claimed in claim 6, it is characterised in that described step 4 also includes: provide to take out
Gas equipment, and the air vent (21) having air-flow to discharge all is communicated to this air-extractor.
9. the method for exhausting of apparatus for baking as claimed in claim 6, it is characterised in that described check apron (22) can be along described row
QI KOU (21) one side surface lifts, big by controlling the opening of each air vent of the elevating control (21) of described check apron (22)
Little；
Described apparatus for baking also includes: the stepper motor being connected with described check apron (22), is controlled described by described stepper motor
The lifting of check apron (22).
10. the method for exhausting of apparatus for baking as claimed in claim 6, it is characterised in that described main exhaust assembly (3) for institute
State multiple discharge ducts that baking box (1) connects.
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| CN201610519801.8A CN106154601B (en) | 2016-07-04 | 2016-07-04 | Apparatus for baking and its method for exhausting |
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Cited By (4)
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| CN107422499A (en) * | 2017-07-28 | 2017-12-01 | 武汉华星光电技术有限公司 | Substrate heating equipment |
| CN107561747A (en) * | 2017-10-12 | 2018-01-09 | 惠科股份有限公司 | The preliminary drying roasting device and prebake conditions system of a kind of display base plate |
| CN111090182A (en) * | 2018-10-23 | 2020-05-01 | 李东明 | Hot air flow direction control mechanism of substrate baking machine table |
| CN112167999A (en) * | 2019-07-01 | 2021-01-05 | 宁波方太厨具有限公司 | Exhaust structure and exhaust method of steaming and baking integrated machine |
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| JP2002334823A (en) * | 2001-05-08 | 2002-11-22 | Matsushita Electric Ind Co Ltd | Baking method, baking device and manufacturing method for liquid crystal display element |
| CN1676231A (en) * | 2004-03-29 | 2005-10-05 | 芝浦机械电子株式会社 | Substrate processing device and method |
| CN101008547A (en) * | 2007-01-30 | 2007-08-01 | 友达光电股份有限公司 | Device suitable for roasting a substrate |
| JP2009281653A (en) * | 2008-05-21 | 2009-12-03 | Espec Corp | Heat treatment apparatus |
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| CN105116570A (en) * | 2015-09-15 | 2015-12-02 | 武汉华星光电技术有限公司 | Glass substrate baking device |
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| CN107561747A (en) * | 2017-10-12 | 2018-01-09 | 惠科股份有限公司 | The preliminary drying roasting device and prebake conditions system of a kind of display base plate |
| CN111090182A (en) * | 2018-10-23 | 2020-05-01 | 李东明 | Hot air flow direction control mechanism of substrate baking machine table |
| CN112167999A (en) * | 2019-07-01 | 2021-01-05 | 宁波方太厨具有限公司 | Exhaust structure and exhaust method of steaming and baking integrated machine |
| CN112167999B (en) * | 2019-07-01 | 2021-10-29 | 宁波方太厨具有限公司 | Exhaust structure and exhaust method of steaming and baking integrated machine |
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