CN106148896B - 一种钼基片镀厚钌的方法 - Google Patents
一种钼基片镀厚钌的方法 Download PDFInfo
- Publication number
- CN106148896B CN106148896B CN201610619104.XA CN201610619104A CN106148896B CN 106148896 B CN106148896 B CN 106148896B CN 201610619104 A CN201610619104 A CN 201610619104A CN 106148896 B CN106148896 B CN 106148896B
- Authority
- CN
- China
- Prior art keywords
- ruthenium
- plating
- base piece
- molybdenum base
- molybdenum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 title claims abstract description 214
- 229910052707 ruthenium Inorganic materials 0.000 title claims abstract description 212
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 title claims abstract description 87
- 229910052750 molybdenum Inorganic materials 0.000 title claims abstract description 87
- 239000011733 molybdenum Substances 0.000 title claims abstract description 87
- 238000000034 method Methods 0.000 title claims abstract description 82
- 238000007747 plating Methods 0.000 claims abstract description 161
- 230000008569 process Effects 0.000 claims abstract description 52
- 239000000758 substrate Substances 0.000 claims abstract description 15
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000004065 semiconductor Substances 0.000 claims abstract description 8
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 7
- 239000007788 liquid Substances 0.000 claims description 21
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 18
- 238000001914 filtration Methods 0.000 claims description 13
- 238000001035 drying Methods 0.000 claims description 12
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 9
- 230000004913 activation Effects 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 238000009825 accumulation Methods 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 238000007654 immersion Methods 0.000 claims description 3
- 239000003643 water by type Substances 0.000 claims description 3
- 239000008367 deionised water Substances 0.000 claims description 2
- 229910021641 deionized water Inorganic materials 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 abstract description 9
- 238000000576 coating method Methods 0.000 abstract description 9
- 229910052751 metal Inorganic materials 0.000 abstract description 7
- 239000002184 metal Substances 0.000 abstract description 7
- 239000002932 luster Substances 0.000 abstract description 2
- 239000002352 surface water Substances 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 40
- 239000010970 precious metal Substances 0.000 description 5
- 230000000704 physical effect Effects 0.000 description 4
- 229910052703 rhodium Inorganic materials 0.000 description 4
- 239000010948 rhodium Substances 0.000 description 4
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 238000009713 electroplating Methods 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 2
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000002242 deionisation method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- OUFGXIPMNQFUES-UHFFFAOYSA-N molybdenum ruthenium Chemical compound [Mo].[Ru] OUFGXIPMNQFUES-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/06—Filtering particles other than ions
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/50—Electroplating: Baths therefor from solutions of platinum group metals
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/34—Pretreatment of metallic surfaces to be electroplated
- C25D5/38—Pretreatment of metallic surfaces to be electroplated of refractory metals or nickel
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- Mechanical Engineering (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610619104.XA CN106148896B (zh) | 2016-07-29 | 2016-07-29 | 一种钼基片镀厚钌的方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610619104.XA CN106148896B (zh) | 2016-07-29 | 2016-07-29 | 一种钼基片镀厚钌的方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106148896A CN106148896A (zh) | 2016-11-23 |
CN106148896B true CN106148896B (zh) | 2019-10-15 |
Family
ID=57328132
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610619104.XA Active CN106148896B (zh) | 2016-07-29 | 2016-07-29 | 一种钼基片镀厚钌的方法 |
Country Status (1)
Country | Link |
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CN (1) | CN106148896B (zh) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1067457A (zh) * | 1991-04-08 | 1992-12-30 | Skw金属(英国)有限公司 | 镀覆过的钼部件及其制造方法 |
CN1319148A (zh) * | 1999-08-03 | 2001-10-24 | 株式会社日矿材料 | 黑色钌电镀液 |
CN101096769A (zh) * | 2006-06-26 | 2008-01-02 | 比亚迪股份有限公司 | 一种电镀方法 |
CN101845629A (zh) * | 2010-04-14 | 2010-09-29 | 江苏时代华宜电子科技有限公司 | 钼片复合镀钌工艺 |
CN102162087A (zh) * | 2011-03-30 | 2011-08-24 | 宜兴市科兴合金材料有限公司 | 一种热补偿钼圆片表面涂层加工方法 |
CN103194723A (zh) * | 2013-03-13 | 2013-07-10 | 河海大学 | 一种大功率晶闸管的改性钼基片及其制备方法 |
CN104342731A (zh) * | 2013-07-23 | 2015-02-11 | 深圳中宇昭日科技有限公司 | 一种半导体钼材电镀钌方法 |
CN105543736A (zh) * | 2016-01-20 | 2016-05-04 | 宜兴市科兴合金材料有限公司 | 镀钌钼片等离子体表面处理方法 |
-
2016
- 2016-07-29 CN CN201610619104.XA patent/CN106148896B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1067457A (zh) * | 1991-04-08 | 1992-12-30 | Skw金属(英国)有限公司 | 镀覆过的钼部件及其制造方法 |
CN1319148A (zh) * | 1999-08-03 | 2001-10-24 | 株式会社日矿材料 | 黑色钌电镀液 |
CN101096769A (zh) * | 2006-06-26 | 2008-01-02 | 比亚迪股份有限公司 | 一种电镀方法 |
CN101845629A (zh) * | 2010-04-14 | 2010-09-29 | 江苏时代华宜电子科技有限公司 | 钼片复合镀钌工艺 |
CN102162087A (zh) * | 2011-03-30 | 2011-08-24 | 宜兴市科兴合金材料有限公司 | 一种热补偿钼圆片表面涂层加工方法 |
CN103194723A (zh) * | 2013-03-13 | 2013-07-10 | 河海大学 | 一种大功率晶闸管的改性钼基片及其制备方法 |
CN104342731A (zh) * | 2013-07-23 | 2015-02-11 | 深圳中宇昭日科技有限公司 | 一种半导体钼材电镀钌方法 |
CN105543736A (zh) * | 2016-01-20 | 2016-05-04 | 宜兴市科兴合金材料有限公司 | 镀钌钼片等离子体表面处理方法 |
Also Published As
Publication number | Publication date |
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CN106148896A (zh) | 2016-11-23 |
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C06 | Publication | ||
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TA01 | Transfer of patent application right |
Effective date of registration: 20190918 Address after: 362100 Shangxue 78 101, Huangling Village, Zhangbanzhen, Quanzhou City, Fujian Province Applicant after: Quanzhou Dacun Industrial Design Co., Ltd. Address before: 610000, No. 9, building 1, No. 612, 1700, Tianfu Avenue, north section, Tianfu Road, Chengdu, Sichuan. 6 Applicant before: Chengdu Liwei Technology Co., Ltd. |
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EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20161123 Assignee: QUANZHOU TAIWANESE INVESTMENT ZONE BAIYA NETWORK TECHNOLOGY Co.,Ltd. Assignor: Quanzhou Dacun Industrial Design Co., Ltd. Contract record no.: X2020350000030 Denomination of invention: Method for plating thick ruthenium onto molybdenum substrate Granted publication date: 20191015 License type: Common License Record date: 20200409 |
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EC01 | Cancellation of recordation of patent licensing contract |
Assignee: QUANZHOU TAIWANESE INVESTMENT ZONE BAIYA NETWORK TECHNOLOGY Co.,Ltd. Assignor: Quanzhou Dacun Industrial Design Co.,Ltd. Contract record no.: X2020350000030 Date of cancellation: 20200707 |
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TR01 | Transfer of patent right |
Effective date of registration: 20201217 Address after: 277000 Xuecheng circular economy industrial park, zouwu Town, Xuecheng District, Zaozhuang City, Shandong Province Patentee after: Shandong Zhongke Green Carbon Technology Co., Ltd Address before: No.101, No.78, shangxue, Huangling village, zhangban Town, Taishang investment zone, Quanzhou City, Fujian Province Patentee before: Quanzhou Dacun Industrial Design Co.,Ltd. |
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TR01 | Transfer of patent right |