CN106112703B - A kind of error compensating method of ion beam processing workpiece - Google Patents
A kind of error compensating method of ion beam processing workpiece Download PDFInfo
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- CN106112703B CN106112703B CN201610504489.5A CN201610504489A CN106112703B CN 106112703 B CN106112703 B CN 106112703B CN 201610504489 A CN201610504489 A CN 201610504489A CN 106112703 B CN106112703 B CN 106112703B
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- ion beam
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- error
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B39/00—Burnishing machines or devices, i.e. requiring pressure members for compacting the surface zone; Accessories therefor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
- C23F4/04—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00 by physical dissolution
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
Abstract
The present invention relates to a kind of error compensating methods of ion beam processing workpiece.Error compensating method includes the following steps；1）Measure the first face graphic data for obtaining workpieces processing sample；2）Workpieces processing sample is subjected to ion beam processing；3）Workpieces processing sample after processing is measured, obtains the second face graphic data；4）Acquisition face shape removal data are calculated, the sweep time progress mathematical relationship fitting that face shape is removed to data and ion beam obtains removal error relationship function；5）Workpieces processing is measured and obtains machined surface graphic data；6）Plan residence time data of the ion beam in track is scanned；7）Utilize the residence time compensating approach for removing error relationship function pair workpieces processing.The present invention effectively increases the precision of ion beam processing；Simultaneously without being detected during actual processing to the temperature of the scanning tracing point in workpieces processing, method is simpler, economical and effective.
Description
Technical field
The invention belongs to ion beam processing fields, and in particular to a kind of error compensating method of ion beam processing workpiece.
Background technology
At present, the basic principle of ion beam fabrication technology is using ion sputtering principle, and wide beam low energy ion source is sent out
The ion beam bombardment part to be processed surface with gaussian shape, during bombardment, when workpiece surface atom obtain it is enough
When energy can break away from dissimulated electricity energy, workpiece surface will be detached from.
In ion beam polishing or ion beam etching of Fresnel, gas generates plasma, ion by ionization in ion source
Source and ion beam temperature are all very high, when ion beam constantly bombards workpiece surface, workpiece material by ion beam high wind-warm syndrome,
Temperature constantly increases.According to the mechanics of materials and Material Intensity Science it is found that the raising of material temperature, the strength characteristics of material in itself and
Dislocation energy changes between lattice, changes so as to the destruction removal energy of material, so as to cause the variation of material removing rate,
This variation of the removal rate as caused by temperature change can bring mismachining tolerance, so as to influence machining accuracy.
Invention content
Temperature change pair adds during can removing ion beam processing the technical problem to be solved in the present invention is to provide one kind
The error compensating method of the ion beam processing workpiece of the influence of work Workpiece Machining Accuracy.
In order to solve the above-mentioned technical problem, a kind of technical solution for using of the present invention is：A kind of ion beam processing workpiece
Error compensating method includes the following steps；
1）Workpieces processing sample is chosen, measures the face shape figure of workpieces processing sample, obtains the first face of workpieces processing sample
Graphic data；
2）Workpieces processing sample is processed in ion beam process equipment；
3）Workpieces processing sample after processing is measured, obtains the second face figurate number of the workpieces processing sample after processing
According to；
4）Second face graphic data and the first face graphic data are subtracted each other into acquisition face shape removal data, by face shape removal data with from
The sweep time of beamlet carries out mathematical relationship fitting and obtains workpieces processing sample material removal error and the removal of sweep time mistake
Poor relation function；
5）The machined surface graphic data for obtaining workpieces processing is measured to workpieces processing；
6）Residence time data of the planning ion beam in track is scanned are calculated according to machined surface graphic data；
7）Processing after being compensated by the residence time compensating approach for removing error relationship function pair workpieces processing is stayed
Stay time complexity curve data；
8）The working process for being processed workpiece will be processed in residence time amendment data importing ion beam process equipment.
Specifically, the workpieces processing sample is identical with the material of workpieces processing.
Specifically, step 1）、3）With 5）In be using laser interferometer carry out face shape figure measurement and obtain the first face shape
Data, the second face graphic data and machined surface graphic data.
Further, step 2）Include procedure below：
2.1）Ion-beam scanning track and sweep time are planned to workpieces processing sample, generated in ion beam process equipment
Scan code；
2.2）Ion-beam scanning is carried out to workpieces processing sample；
2.3）It after the completion of ion-beam scanning, is taken out from ion beam process equipment, constant temperature, cooling.
Specifically, step 2.1）In by grating track scanning mode planned on workpieces processing sample formation scanning track.
It scans track and includes multiple scanning tracing points, the scan code includes scanning the two-dimensional coordinate of tracing point；
Step 2.2）Intermediate ion beam scanning is to carry out at the uniform velocity traverse scanning, ion to workpieces processing sample by scanning track S
Beam is since the scanning tracing point of the head end of scanning track up to the scanning tracing point of end terminates.
Specifically, step 4）In, two-dimensional coordinate and scan going for tracing point that shape removal data in face include scanning tracing point
Except amount error, the one-dimensional matrix R for sequentially forming removal amount error of the removal amount error of tracing point by scanning track is scanned,
R=[r1, r2 ..., rm],
The sweep time of ion beam sequentially forms sweep time one-dimensional matrix T by scanning track,
T=[t1, t2 ..., tm],
Wherein, t1=0, tm are the lineal measure divided by sweep speed of scan path,
To the one-dimensional matrix R of removal amount error and by the way of retouching time one-dimensional matrix T using mathematical relationship fitting, acquisition
Workpieces processing sample material removes error and the removal error relationship function of sweep time.
Specifically, step 6）According to ion beam scanning tracing point two-dimensional coordinate formed residence time functional relation
For：
,
Wherein,（x,y）To scan the two-dimensional coordinate of tracing point, D is residence time, and Z is machined surface graphic data, and Rel is goes
Except Jacobian matrix.
Further, step 7）In, according to ion-beam scanning tracing point and the one-dimensional square of residence time formation residence time
Battle array D, D=[1,2 ..., i ...], wherein i are i-th point scanned in track；
The functional relation of residence time after the compensating approach formed by removing error relationship function is：
Wherein Doffset（i）For the residence time after compensating approach, D（i）For the residence time of planning,For
Remove error relationship function.
The scope of the present invention, however it is not limited to the technical solution that the specific combination of above-mentioned technical characteristic forms, while should also contain
Other technical solutions that lid is carried out arbitrary combination by above-mentioned technical characteristic or its equivalent feature and formed.Such as features described above with this
Disclosed in application（But it is not limited to）Technical solution that technical characteristic with similar functions is replaced mutually and formed etc..
Since above-mentioned technical proposal is used, the present invention has following advantages compared with prior art：
The present invention forms removal error relationship letter by extracting influence relationship of the ion beam processing time to material removing rate
Number, respectively scans the residence time of tracing point by removing in error relationship function correction-compensation ion-beam scanning track, and then
Error compensation caused by realizing workpiece temperature variation is connect, effectively increases the precision of ion beam processing；Simultaneously without actually adding
The temperature of the scanning tracing point in workpieces processing is detected during work, method is simpler, economical and effective.
Description of the drawings
Fig. 1 is the scanning track schematic diagram of ion-beam scanning workpieces processing sample.
Specific embodiment
A kind of error compensating method of ion beam processing workpiece of the present invention, includes the following steps；
1）The workpieces processing sample identical with workpieces processing material is chosen, workpieces processing is measured using laser interferometer
The face shape figure of sample obtains the first face graphic data M1 of workpieces processing sample.In the present embodiment, using the stone of Φ 100mm bores
English element is as workpieces processing sample.
2）Workpieces processing sample in ion beam process equipment is processed, is specifically included：
2.1）Workpieces processing sample is fitted into ion beam process equipment, it is straight to carry out debugging operations to ion beam process equipment
It can machining state to being in；
2.2）Ion-beam scanning track and sweep time are planned to workpieces processing sample, generated in ion beam process equipment
Scan code.In the present embodiment, formation scanning track S, scanning are planned on workpieces processing sample by grating track scanning mode
Track S is as shown in Figure 1.It scans track S and includes multiple scanning tracing point A, the scan code includes scanning the two of tracing point A
Dimension coordinate；
2.3）Ion-beam scanning is carried out to workpieces processing sample, in the present embodiment, ion-beam scanning is by scanning track pair
Workpieces processing sample carries out at the uniform velocity traverse scanning, and ion beam is since the scanning tracing point of the head end of scanning track up to end
Scanning tracing point terminates, and the two-dimensional coordinate for scanning tracing point is（xi, yi）.
2.4）It after the completion of ion-beam scanning, is taken out from ion beam process equipment, constant temperature, cooling.
3）Workpieces processing sample after processing using laser interferometer is measured, obtains the processing work after processing
Second face graphic data M2 of part sample；
4）Second face graphic data M2 and the first face graphic data M1 are subtracted each other into acquisition face shape removal error information, face shape is removed
Error informationWith sweep time of ion beam carry out mathematical relationship fitting obtain workpieces processing sample material removal error with
The removal error relationship function of sweep time.Face shape removal error informationInclude the two-dimensional coordinate of scanning tracing point（xi,
yi）With the removal amount error of scanning tracing point, the removal amount error for scanning tracing point sequentially forms removal amount by scanning track
The one-dimensional matrix R of error,
R=[r1, r2 ..., rm],
The sweep time of ion beam sequentially forms sweep time one-dimensional matrix T by scanning track, and T=[t1, t2 ...,
Tm], wherein, t1=0, tm are the lineal measure divided by sweep speed of scan path,
To the one-dimensional matrix R of removal amount error and by the way of retouching time one-dimensional matrix T using mathematical relationship fitting, acquisition
Workpieces processing sample material removes the removal error relationship function with sweep time：
。
5）The machined surface graphic data Z for obtaining workpieces processing is measured using laser interferometer to workpieces processing；
6）Residence time data of the planning ion beam in track is scanned are calculated according to machined surface graphic data.Specifically, it presses
According to ion beam scanning tracing point two-dimensional coordinate formed residence time functional relation be：
,
Wherein,（x,y）The two-dimensional coordinate of tracing point is scanned, D is residence time, and Z is machined surface graphic data, and Rel is removal
Jacobian matrix.
7）Processing after being compensated by the residence time compensating approach for removing error relationship function pair workpieces processing is stayed
Stay time complexity curve data.Specifically, the one-dimensional matrix D of residence time, D are formed according to ion-beam scanning tracing point and residence time
=[1,2 ..., i ...], wherein i are i-th point scanned in track；
The functional relation of residence time after the compensating approach formed by removing error relationship function is：
Wherein Doffset（i）For the residence time after compensating approach, D（i）For the residence time of planning,For
Remove error relationship function.
8）The working process for being processed workpiece will be processed in residence time amendment data importing ion beam process equipment.
The present invention forms removal error relationship letter by extracting influence relationship of the ion beam processing time to material removing rate
Number, respectively scans the residence time of tracing point by removing in error relationship function correction-compensation ion-beam scanning track, and then
Error compensation caused by realizing workpiece temperature variation is connect, effectively increases the precision of ion beam processing；Simultaneously without actually adding
The temperature of the scanning tracing point in workpieces processing is detected during work, method is simpler, economical and effective.
As described above, we are illustrated fully according to spirit of the invention, but the present invention is not limited to above-mentioned reality
Apply example and implementation.The practitioner of correlative technology field can carry out different in the range of the technological thought license of the present invention
Variation and implementation.
Claims (8)
1. a kind of error compensating method of ion beam processing workpiece, it is characterised in that：
Include the following steps；
1) workpieces processing sample is chosen, measures the face shape figure of workpieces processing sample, obtains the first face figurate number of workpieces processing sample
According to；
2) workpieces processing sample is processed in ion beam process equipment；
3) the workpieces processing sample after processing is measured, obtains the second face graphic data of the workpieces processing sample after processing；
4) the second face graphic data and the first face graphic data are subtracted each other into acquisition face shape removal data, face shape is removed into data and ion beam
Sweep time carry out mathematical relationship fitting and obtain workpieces processing sample material removal amount error and the removal error of sweep time
Relation function；
5) the machined surface graphic data for obtaining workpieces processing is measured to workpieces processing；
6) residence time data of the planning ion beam in track is scanned are calculated according to machined surface graphic data；
7) processing after being compensated by the residence time compensating approach of removal amount error relationship function pair workpieces processing is resident
Time complexity curve data；
8) working process for being processed workpiece will be processed in residence time amendment data importing ion beam process equipment.
2. a kind of error compensating method of ion beam processing workpiece according to claim 1, it is characterised in that：The processing
Workpiece sample is identical with the material of workpieces processing.
3. a kind of error compensating method of ion beam processing workpiece according to claim 1, it is characterised in that：Step 1),
And 5) 3) it is that the measurement of face shape figure is carried out using laser interferometer and obtains the first face graphic data, the second face graphic data and processing in
Face graphic data.
4. a kind of error compensating method of ion beam processing workpiece according to claim 1, it is characterised in that：In step 2)
Including procedure below：
2.1) ion-beam scanning track and sweep time are planned to workpieces processing sample, scanning is generated in ion beam process equipment
Code；
2.2) ion-beam scanning is carried out to workpieces processing sample；
2.3) it after the completion of ion-beam scanning, is taken out from ion beam process equipment, constant temperature cooling.
5. a kind of error compensating method of ion beam processing workpiece according to claim 4, it is characterised in that：Step 2.1)
In by grating track scanning mode planned on workpieces processing sample formation scanning track, scanning track include multiple scanning tracks
Point, the scan code include scanning the two-dimensional coordinate of tracing point；
Step 2.2) intermediate ion beam scanning is to carry out at the uniform velocity traverse scanning to workpieces processing sample by scanning track, and ion beam is from sweeping
The scanning tracing point for retouching the head end of track starts until the scanning tracing point of end terminates.
6. a kind of error compensating method of ion beam processing workpiece according to claim 5, it is characterised in that：Step 4)
In, shape removal data in face include the two-dimensional coordinate of scanning tracing point and the removal amount error of scanning tracing point, scan tracing point
Removal amount error by scanning track the one-dimensional matrix R for sequentially forming removal amount,
R=[r1, r2 ..., rm],
The sweep time of ion beam sequentially forms sweep time one-dimensional matrix T by scanning track,
T=[t1, t2 ..., tm],
Wherein, t1=0, tm are the lineal measure divided by sweep speed of scan path,
To the one-dimensional matrix R of removal amount error and sweep time one-dimensional matrix T by the way of mathematical relationship fitting, added
Work workpiece sample material removes error and the removal error relationship function of sweep time.
7. a kind of error compensating method of ion beam processing workpiece according to claim 6, it is characterised in that：In step 6)
Two-dimensional coordinate according to the scanning tracing point of ion beam forms residence time functional relation：
Wherein, (x, y) is the two-dimensional coordinate for scanning tracing point, and D is residence time, and Z is machined surface graphic data, and Rel is removal letter
Matrix number.
8. a kind of error compensating method of ion beam processing workpiece according to claim 7, it is characterised in that：Step 7)
In, form the one-dimensional matrix D of residence time according to ion-beam scanning tracing point and residence time, D=[1,2 ..., i ...],
Middle i is i-th point scanned in track；
The functional relation of residence time after the compensating approach formed by removing error relationship function is：
Wherein Doffset(i) it is the residence time after compensating approach, D (i) is the residence time of planning,It is missed for removal
Poor relation function.
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| CN108044408B (en) * | 2017-11-24 | 2019-06-28 | 中国科学院长春光学精密机械与物理研究所 | Workpiece's Tack Error calibration and compensation method suitable for ion beam polishing |
| CN109656197B (en) * | 2018-11-13 | 2020-05-29 | 上海狮迈科技有限公司 | Error correction method and device for high-energy beam machining |
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| CN109623560B (en) * | 2018-12-14 | 2021-09-14 | 中国兵器科学研究院宁波分院 | Method for determining ion beam polishing process parameters for six-axis motion polishing system |
| CN110677972A (en) * | 2019-10-17 | 2020-01-10 | 中国人民解放军国防科技大学 | Plasma generator for SiC optical mirror processing and application method thereof |
| CN111002111A (en) * | 2019-12-10 | 2020-04-14 | 中国空气动力研究与发展中心设备设计及测试技术研究所 | Sub-nanometer precision ion beam polishing-oriented surface shape error optimization removal method |
| CN114118439B (en) * | 2021-11-09 | 2022-05-13 | 北京得瑞领新科技有限公司 | Training data generation method, system and storage medium of decision level prediction model |
| CN115157272B (en) * | 2022-09-08 | 2022-11-22 | 山东芯合机器人科技有限公司 | Automatic programming system based on visual scanning |
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