CN108044408B - Workpiece's Tack Error calibration and compensation method suitable for ion beam polishing - Google Patents
Workpiece's Tack Error calibration and compensation method suitable for ion beam polishing Download PDFInfo
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- CN108044408B CN108044408B CN201711191975.7A CN201711191975A CN108044408B CN 108044408 B CN108044408 B CN 108044408B CN 201711191975 A CN201711191975 A CN 201711191975A CN 108044408 B CN108044408 B CN 108044408B
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
Abstract
The present invention realizes location of workpiece Accurate Calibration during ion beam polishing by the spatial relation of acquisition workpiece centre relative ion source beam center.Laser tracker passes through the reference informations such as line, the face on contact type measurement workpiece, then carries out solid geometry and workpiece centre spatial positional information is calculated.Ion source carries out Faraday cup scanning after opening, and obtains ion beam current distribution and its center, obtains ion beam center relative method and draws the centre coordinate system position.In the present invention, following transmitting: workpiece → target ball pedestal → Faraday cup → ion beam current is passed through in workpiece centre spatial position, the spatial position of workpiece centre relative ion beam center is obtained, to realize location of workpiece Accurate Calibration during ion beam polishing.Then residence time coordinate subtracts the spatial relation of workpiece centre relative ion beam center in CNC code, and position error is biased compensation by software.
Description
Technical field
The invention belongs to precision optics manufacturing field, it is related to being processed optical element and ion source during ion beam polishing
Location error Accurate Calibration and compensation method in Cutter coordinate system.
Background technique
The principle of ion beam polishing technology is that the energetic ion generated using ion source bangs optical element (workpiece) surface
It hits, the removal of workpiece surface material is realized based on Atomic Physics splash effect.There are this method many traditional diamond-making techniques not have
The advantages of having.Its removal function is rotationally symmetrical Gaussian, and highly stable, therefore ion beam polishing certainty is high,
Face shape error convergence is fast；Ion beam polishing is contactless polishing method, contact stress and strain is not present, in the edge of work
Removal function does not change, and does not generate the negative effect such as edge effect.Ion beam polishing technology is since machining accuracy is high, determines
Property is good, and application is more and more extensive, becomes one of polishing method preferred in high-precision optical element manufacturing process.
Position error is to influence one of the principal element of ion beam polishing precision.Position error is workpiece in lathe coordinate system
In physical location and theoretical position between deviation, be specifically described as the position of workpiece coordinate system relative ion source Cutter coordinate system
Set difference.Conventional process mode is, carries out accurate clamping to workpiece, guarantee the accurate mapping of workpiece and ion source Cutter coordinate system with
Design value is consistent, and makes position error zero as far as possible, to reduce influence of the position error to ion beam processing precision.But it is this
Mode requires to carry out the fixture of workpiece special design and precision manufactureing, and has required precision in each step of clamping, mentions
The high equipment cost and time cost of ion beam polishing.
Summary of the invention
The present invention is intended to provide workpiece is in ion beam processing during a kind of simple and easy, easily operated ion beam polishing
Position error method for precisely marking in coordinate system, and in process compensated position error by software.
To achieve the above object, the invention adopts the following technical scheme: providing 1, a kind of work suitable for ion beam polishing
The calibration of part position error and compensation method, provide: workpiece mounting plate, ion source, laser tracker, target ball, commercial measurement phase
Machine, target ball pedestal, Faraday cup, which comprises the steps of:
Step 1: workpiece is fixed on workpiece mounting plate；
Step 2: setting up laser tracker, wherein the measurement range of laser tracker covers entire workpiece and target ball pedestal；
Step 3: laser tracker combination target ball measures the spatial positional information of workpiece centre, is set as (xw,yw,zw)；
Step 4: target ball being placed on target ball pedestal, obtain target ball base central measures coordinate system in laser tracker
In spatial position, be set as (xb,yb,zb)；
Step 5: the spatial position data that step 3 and step 4 obtain being calculated using laser tracker, the two subtracts each other to obtain work
Space coordinate transformation (Δ x of the part center with respect to target ball base central1,Δy1,Δz1), shown in transformation matrix such as formula (0.1)；
Step 6: passing through commercial measurement camera precision calibration target ball pedestal and Faraday cup centre bore (xf,yf,zf) it is opposite
Position (Δ x2,Δy2,Δz2)；Step 5 data are substituted into, the space that workpiece centre is calculated with respect to Faraday cup centre bore is sat
Mark transformation relation, transformation matrix as shown in formula:
Step 7: closing the vacuum door of ion beam process equipment, extract vacuum, open ion after reaching predetermined vacuum level
Source；
Step 8: carrying out Faraday cup scanning, obtain the distribution of ion beam line, ion beam is obtained by gaussian curve approximation
Center is set as (Δ x with respect to the bias relation of Faraday cup centre bore3,Δy3)；
Step 9: in conjunction with step 6 and step 8 as a result, being obtained in 1 center relative ion beam 10 of workpiece by coordinate transform
The spatial relation of the heart, as the workpiece position error in ion beam processing coordinate system, i.e. the workpiece centre of location relative to from
The physical location of beamlet flow center are as follows:
Step 10: process equipment is based on workpiece coordinate system and generates CNC code；To wherein CNC residence time coordinate (xC0,
yC0, zC0, TC0) subtract the spatial relation (x of workpiece centre relative ion beam centerwa, ywa, zwa), it will be positioned by software
Error is biased compensation, generates the CNC code (x finally executedC, yC, zC, TC):
In step 3, target ball contact workpiece datum level measures target ball central space position by laser tracker, uses laser
The subsidiary software of tracker, which calculates, obtains workpiece datum-plane position.
In step 3, laser tracker measurement obtains datum level Y on workpiecetop, lower datum level YBottom, left datum level XLeft、
Right datum level XRightSpatial position, calculate obtain workpiece centre measurement coordinate system in spatial position:
In step 5, target ball pedestal and Faraday cup are successively critically fixed on mechanical fastener, and pass through mechanical connection
Part is connect with workpiece mounting plate, is placed within the scope of machine tool travel and does not influence the workpiece mounting plate corner location of workpiece installation.
It further include pedestal, the workpiece mounting plate is in vertically or horizontally to place, and the mechanical fastener is fixed on
On the pedestal, mechanical fastener mounting surface is parallel with workpiece mounting plate.
In step 3, it can be obtained in workpiece using measurement arm, light pen measuring instrument, coordinate measuring machine, touch trigger probe system
The spatial positional information of the heart.
Beneficial effects of the present invention: workpiece centre during the ion beam polishing that one kind is simple and easy, versatility is good is provided
The position Accurate Calibration in ion beam processing coordinate system, and position error is biased by compensation by software in process
Method.Method is easy to operate, data processing is concise, versatility is good, does not need to carry out workpiece special accurate clamping, improves
The efficiency and precision of ion beam polishing.
Detailed description of the invention
Such as the schematic diagram that Fig. 1 is ion polishing beam burnishing device.
It is illustrated in figure 2 the flow chart of the Workpiece's Tack Error calibration and compensation method suitable for ion beam polishing.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with attached drawing and specific implementation
Example, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only to explain this hair
It is bright, but not to limit the present invention.
The technical problem to be solved by the present invention is to, overcome the defect of the above-mentioned prior art, provide it is a kind of it is simple and easy, be easy to
Workpiece position error method for precisely marking in ion beam processing coordinate system during the ion beam polishing of operation, and processed
Position error is compensated by software in journey.To reduce or eliminate Workpiece's Tack Error to the shadow of ion beam processing result
It rings.Be different from it is conventional to workpiece precision clamping in a manner of reducing position error, the present invention by obtain workpiece in ion beam
Position in coordinate system is polished, realizes location of workpiece Accurate Calibration during ion beam polishing, and pass through software in process
Position error is compensated.
In embodiment as shown in Figure 1, the technical solution adopted by the present invention need to use workpiece 1, workpiece mounting plate 2, ion
Source 3, laser tracker 4, target ball 5, commercial measurement camera 6, in addition, further including following device: target ball pedestal 7, Faraday cup
8, mechanical fastener 9.
Target ball pedestal 7 and Faraday cup 8 are successively accurate to be fixed on mechanical fastener 9, and by mechanical fastener 9 with
Workpiece mounting plate 2 connects, and is placed within the scope of machine tool travel and does not influence 2 corner location of workpiece mounting plate of the installation of workpiece 1.Its
In, target ball pedestal 7 and 8 precision of Faraday cup are mounted adjacent to position.
The present invention is suitable for the Workpiece's Tack Error calibration and compensation method of ion beam polishing, and the technical solution of use is real
When existing ion beam polishing process, location of workpiece Accurate Calibration is as follows the step of simultaneously software compensates:
Step 1: workpiece 1 is fixed on workpiece mounting plate 2；
Step 2: setting up laser tracker 4, position guarantees that measurement range covers entire workpiece 1 and target ball pedestal 7；
Step 3: laser tracker 4 combines the spatial positional information at the measurement of target ball 51 center of workpiece, and target ball 5 contacts work
1 datum level of part measures 5 central space position of target ball by laser tracker 4 and obtains 1 datum-plane position of workpiece.Laser tracker 4
Measurement obtains the spatial position of datum level, lower datum level, left datum level, right datum level on workpiece 1, calculates and obtains 1 center of workpiece
Spatial position in measurement coordinate system, is set as (xw,yw,zw), specifically:
In step 3, laser tracker measurement obtains datum level Y on workpiecetop, lower datum level YBottom, left datum level XLeft、
Right datum level XRightSpatial position, calculate obtain workpiece centre measurement coordinate system in spatial position:
Step 4: target ball 5 being placed on target ball pedestal 7, measuring in laser tracker 4 for 7 center of target ball pedestal is obtained and sits
Spatial position in mark system, is set as (xb,yb,zb)；
Step 5: the spatial position data that step 3 and step 4 obtain being calculated using laser tracker 4, the two subtracts each other to obtain
Space coordinate transformation (Δ x of 1 center of workpiece with respect to 7 center of target ball pedestal1,Δy1,Δz1), transformation matrix such as formula (0.1) institute
Show:
In step 5, target ball pedestal and Faraday cup are successively critically fixed on mechanical fastener, and pass through mechanical connection
Part is connect with workpiece mounting plate, is placed within the scope of machine tool travel and does not influence the workpiece mounting plate corner location of workpiece installation；
Step 6: passing through 6 precision calibration target ball pedestal 7 and 8 centre bore (x of Faraday cup of commercial measurement cameraf,yf,zf)
Relative position (Δ x2,Δy2,Δz2) relationship；Step 5 data are substituted into, 1 center of workpiece is calculated with respect to 8 center of Faraday cup
The space coordinate transformation relationship in hole, transformation matrix as shown in formula:
Step 7: closing the vacuum door of ion beam process equipment, extract vacuum, open ion after reaching predetermined vacuum level
Source 3；
Step 8: carrying out Faraday cup scanning, obtain the distribution of 10 line of ion beam, ion is obtained by gaussian curve approximation
10 center of beam is set as (Δ x with respect to the bias relation of 8 centre bore of Faraday cup3,Δy3)；
Step 9: in conjunction with step 6 and step 8 as a result, being obtained in 1 center relative ion beam 10 of workpiece by coordinate transform
The spatial relation of the heart, as workpiece 1 in ion beam processing coordinate system position error, that is, workpiece centre of location relative to from
The physical location of beamlet flow center are as follows:
Step 10: process equipment is based on 1 coordinate system of workpiece and generates CNC code；To wherein CNC residence time coordinate (xC0,
yC0, zC0, TC0) subtract the spatial relation (x at 1 center relative ion beam of workpiece, 10 centerwa, ywa, zwa), it will be determined by software
Position error is biased compensation, generates the CNC code (x finally executedC, yC, zC, TC):
It further include pedestal in one embodiment, the workpiece mounting plate 2 is in vertically or horizontally placing, and the machine
Tool connector 9 is fixed on the base, and the mounting surface of mechanical fastener 9 is parallel with workpiece mounting plate 2.
In step 3, it can be obtained in workpiece using measurement arm, light pen measuring instrument, coordinate measuring machine, touch trigger probe system
The spatial positional information of the heart.
The working principle of the invention: the space bit that the present invention passes through acquisition 1 center relative ion source line of workpiece, 10 center
Relationship is set, realizes location of workpiece Accurate Calibration during ion beam polishing.Laser tracker 4 passes through on contact type measurement workpiece 1
The reference informations such as line, face, then carry out solid geometry and workpiece centre spatial positional information be calculated.Ion source 3 is opened laggard
The scanning of row Faraday cup obtains the distribution of ion beam current 10 and its center, obtains 10 center of ion beam with respect in Faraday cup 8
Heart co-ordinate system location.In the present invention, following transmitting: workpiece 1 → target ball, 7 → faraday of pedestal is passed through in workpiece centre spatial position
Cup 8 → ion beam current 10, obtains the spatial position at 1 center relative ion line of workpiece, 10 center, to realize ion beam polishing
Location of workpiece Accurate Calibration in the process.Then residence time coordinate subtracts workpiece centre relative ion beam center in CNC code
Position error is biased compensation by software by spatial relation.
The above described specific embodiments of the present invention are not intended to limit the scope of the present invention..Any basis
Any other various changes and modifications made by technical concept of the invention should be included in the guarantor of the claims in the present invention
It protects in range.
Claims (6)
1. a kind of Workpiece's Tack Error calibration and compensation method suitable for ion beam polishing, provides: workpiece mounting plate, ion
Source, laser tracker, target ball, commercial measurement camera, target ball pedestal, Faraday cup, which comprises the steps of:
Step 1: workpiece is fixed on workpiece mounting plate；
Step 2: setting up laser tracker, wherein the measurement range of laser tracker covers entire workpiece and target ball pedestal；
Step 3: laser tracker combination target ball measures the spatial positional information of workpiece centre, is set as (xw,yw,zw)；
Step 4: target ball being placed on target ball pedestal, obtains target ball base central in laser tracker measurement coordinate system
Spatial position is set as (xb,yb,zb)；
Step 5: the spatial position data that step 3 and step 4 obtain being calculated using laser tracker, the two subtracts each other to obtain in workpiece
Space coordinate transformation (Δ x of the heart with respect to target ball base central1,Δy1,Δz1), shown in transformation matrix such as formula (1.1)；
；
Step 6: passing through commercial measurement camera precision calibration target ball pedestal and Faraday cup centre bore (xf,yf,zf) relative position
(Δx2,Δy2,Δz2)；Step 5 data are substituted into, the space coordinate that workpiece centre is calculated with respect to Faraday cup centre bore becomes
Relationship is changed, shown in transformation matrix such as formula (1.2):
；
Step 7: closing the vacuum door of ion beam process equipment, extract vacuum, open ion source after reaching predetermined vacuum level；
Step 8: carrying out Faraday cup scanning, obtain the distribution of ion beam line, ion beam center is obtained by gaussian curve approximation
The bias relation of opposite Faraday cup centre bore, is set as (Δ x3,Δy3)；
Step 9: in conjunction with step 6 and step 8 as a result, obtaining the space of workpiece centre relative ion beam center by coordinate transform
Positional relationship, as the workpiece position error in ion beam processing coordinate system, i.e. the workpiece centre of location is relative in ion beam current
The physical location of the heart are as follows:
；
Step 10: process equipment is based on workpiece coordinate system and generates CNC code；To wherein CNC residence time coordinate (xC0,yC0,zC0,
TC0) subtract the spatial relation (x of workpiece centre relative ion beam centerwa,ywa,zwa), position error is carried out by software
Bias compensation generates the CNC code (x finally executedC,yC,zC, TC):
。
2. the Workpiece's Tack Error calibration suitable for ion beam polishing and compensation method, feature exist as described in claim 1
In, in step 3, target ball contact workpiece datum level by laser tracker measurement target drone ball center spatial position, with laser with
The subsidiary software of track instrument, which calculates, obtains workpiece datum-plane position.
3. the Workpiece's Tack Error calibration suitable for ion beam polishing and compensation method, feature exist as claimed in claim 2
In in step 3, laser tracker measurement obtains datum level Y on workpiecetop, lower datum level YBottom, left datum level XLeft, right base
Quasi- face XRightSpatial position, calculate obtain workpiece centre measurement coordinate system in spatial position:
。
4. the Workpiece's Tack Error calibration suitable for ion beam polishing and compensation method, feature exist as described in claim 1
In in step 5, target ball pedestal and Faraday cup are successively critically fixed on mechanical fastener mounting surface, and are connected by mechanical
Fitting is connect with workpiece mounting plate, is placed within the scope of machine tool travel and does not influence the workpiece mounting plate corner position of workpiece installation
It sets.
5. the Workpiece's Tack Error calibration suitable for ion beam polishing and compensation method, feature exist as claimed in claim 4
In further including pedestal, the workpiece mounting plate is in vertically or horizontally placing, and the mechanical fastener is fixed on the bottom
On seat, mechanical fastener mounting surface is parallel with workpiece mounting plate.
6. the Workpiece's Tack Error calibration suitable for ion beam polishing and compensation method, feature exist as described in claim 1
In workpiece centre can be obtained using measurement arm, light pen measuring instrument, coordinate measuring machine, touch trigger probe system in step 3
Spatial positional information.
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| DE102018219129B3 (en) | 2018-11-09 | 2019-11-07 | Trumpf Laser Gmbh | Method and computer program product for OCT measurement beam adjustment |
| CN111531410A (en) * | 2020-03-31 | 2020-08-14 | 中国科学院西安光学精密机械研究所 | Membrane surface shape ion beam polishing device of Sagnac type interferometer assembly and assembling and adjusting method thereof |
| CN112560220B (en) * | 2020-11-13 | 2022-08-09 | 中国人民解放军国防科技大学 | Inner cavity element ion beam processing method based on elimination function space transformation compensation |
| CN114088036B (en) * | 2021-11-12 | 2024-04-12 | 长沙埃福思科技有限公司 | Ion beam polishing machine for positioning workpiece coordinates and method for positioning workpiece coordinates |
| CN114393448B (en) * | 2022-01-21 | 2023-11-28 | 中国科学院长春光学精密机械与物理研究所 | Method for improving track precision of magnetorheological robot polishing equipment |
| CN115365979B (en) * | 2022-10-25 | 2023-01-24 | 中国科学院长春光学精密机械与物理研究所 | Optical processing tool calibration method, device, computer equipment and readable storage medium |
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| US6770867B2 (en) * | 2001-06-29 | 2004-08-03 | Fei Company | Method and apparatus for scanned instrument calibration |
| JP4939840B2 (en) * | 2006-05-31 | 2012-05-30 | オリンパス株式会社 | Ultra-precision polishing method using gas cluster ion beam |
| CN101490791B (en) * | 2006-06-12 | 2011-04-13 | 艾克塞利斯科技公司 | Beam angle adjustment in ion implanters |
| JP5243912B2 (en) * | 2008-01-24 | 2013-07-24 | 日本電子株式会社 | Beam position calibration method in charged particle beam apparatus |
| CN102005362B (en) * | 2009-09-03 | 2012-05-30 | 北京中科信电子装备有限公司 | Calibration system and calibration method for dual-Faraday cup measuring ratios of ion implantation machine |
| CN102744654B (en) * | 2012-07-30 | 2015-01-21 | 中国人民解放军国防科学技术大学 | Double-vacuum chamber ion beam polishing system and polishing method |
| CN102744653B (en) * | 2012-07-30 | 2014-11-05 | 中国人民解放军国防科学技术大学 | Device and method for installing and detaching large mirror for ion beam polisher for large-caliber optical parts |
| CN104907894B (en) * | 2015-06-12 | 2017-11-24 | 中国科学技术大学 | Method for polishing ion beam |
| CN105081926A (en) * | 2015-08-26 | 2015-11-25 | 成都森蓝光学仪器有限公司 | Calibration system and calibration method for ion source coordinate position of ion beam polishing |
| CN106112703B (en) * | 2016-06-30 | 2018-06-22 | 苏州至臻精密光学有限公司 | A kind of error compensating method of ion beam processing workpiece |
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