CN106111587B - 液刀 - Google Patents
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- CN106111587B CN106111587B CN201610472903.9A CN201610472903A CN106111587B CN 106111587 B CN106111587 B CN 106111587B CN 201610472903 A CN201610472903 A CN 201610472903A CN 106111587 B CN106111587 B CN 106111587B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/14—Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0075—Cleaning of glass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
- B05B1/044—Slits, i.e. narrow openings defined by two straight and parallel lips; Elongated outlets for producing very wide discharges, e.g. fluid curtains
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/26—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with means for mechanically breaking-up or deflecting the jet after discharge, e.g. with fixed deflectors; Breaking-up the discharged liquid or other fluent material by impinging jets
- B05B1/262—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with means for mechanically breaking-up or deflecting the jet after discharge, e.g. with fixed deflectors; Breaking-up the discharged liquid or other fluent material by impinging jets with fixed deflectors
- B05B1/267—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with means for mechanically breaking-up or deflecting the jet after discharge, e.g. with fixed deflectors; Breaking-up the discharged liquid or other fluent material by impinging jets with fixed deflectors the liquid or other fluent material being deflected in determined directions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/041—Cleaning travelling work
- B08B3/042—Cleaning travelling work the loose articles or bulk material travelling gradually through a drum or other container, e.g. by helix or gravity
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor
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- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
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- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Treatment Of Sludge (AREA)
- Domestic Plumbing Installations (AREA)
Abstract
本发明提供一种液刀,该液刀包括入水口、出水槽口以及储废槽,出水槽口连通储废槽的上部,液体经入水口进入后,进入储废槽内,再经出水槽口排出。本发明提供的液刀通过储废槽进行残渣收集,可有效防止液刀的出水槽口堵塞。
Description
技术领域
本发明涉及液晶面板生产制造技术领域,特别涉及一种用于对玻璃基板表面进行清洗的液刀。
背景技术
目前在液晶面板生产所使用的湿法制程设备中,普遍使用SUS(Steel UseStainless,不锈钢)材质的液刀对玻璃基板表面进行清洗并达到隔绝前后制造模组间相互污染的问题。使用SUS材质主要是因为此种材质化学性能比较稳定,可以用于水区间及药液区间,且物理硬度高,不易变形。
现阶段采用的液刀设计,大都是双面SUS贴合式,在贴合面的底部留有固定大小的间隔距离以保证液体可以顺利流出。两面SUS使用等间距排布的螺丝固定,以确保水流的均一性和稳定性。总体结构可分为两部分,上部为注水储水部,下部为出水部。
这种设计基本可以满足设备对水流压力及流量的要求,但是液体从注液孔注入机构内部之后,直接通过两面SUS间的间隙处流出,中间没有任何的过滤措施。如果注液端有污染或者管道有残渣生成,极易造成液刀出水端堵塞,由于现有液刀不存在残渣防止的设计环节,导致经常出现液刀堵塞的情况,从而产生制程不良。
发明内容
本发明提供一种液刀,以解决现有液刀不存在残渣防止的设计环节,导致经常出现液刀堵塞的情况,从而产生制程不良的问题。
为解决上述技术问题,本发明采用的一个技术方案是:提供一种液刀,所述液刀包括入水口、出水槽口以及储废槽,所述出水槽口连通所述储废槽的上部,液体经所述入水口进入后,进入所述储废槽内,再经所述出水槽口排出。
据本发明一优选实施例,所述液刀包括第一板体和第二板体,所述第一板体和所述第二板体通过固定件夹紧配合。
据本发明一优选实施例,所述入水口为多个,开设于所述第一板体上。
据本发明一优选实施例,所述出水槽口设于所述第一板体的下部。
据本发明一优选实施例,所述第二板体对应于所述入水口处设有第一水槽。
据本发明一优选实施例,所述第二板体于所述第一水槽下方设有第二水槽。
据本发明一优选实施例,所述第二板体于所述第一水槽和第二水槽之间进一步设有导流块,所述导流块为多个椭圆形的凸起。
据本发明一优选实施例,所述储废槽设于所述第二水槽的下部。
据本发明一优选实施例,所述储废槽的两端进一步设有排卸口。
据本发明一优选实施例,所述第二板体进一步设有导向板,所述导向板位于所述出水槽口的下部。
本发明的有益效果是:区别于现有技术的情况,本发明提供的液刀通过储废槽进行残渣收集,可有效防止液刀的出水槽口堵塞。
附图说明
为了更清楚地说明本发明实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图,其中:
图1是本发明提供的液刀的截面结构示意图;
图2是本发明提供的液刀的第一板体的内表面的结构示意图;
图3是本发明提供的液刀的第二板体的内表面的结构示意图。
具体实施方式
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅是本发明的一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。
请参阅图1,图1是本发明提供的液刀的截面结构示意图。
如图1所示,本发明提供一种液刀200,该液刀200包括第一板体210和第二板体220,该第一板体210和第二板体220可通过固定件夹紧配合。
具体地,固定件可采用螺钉,在优选实施例中,第一板体210和第二板体220之间可设置防水垫,以避免漏水。
请一并参阅图2,图2是本发明提供的液刀的第一板体的内表面的结构示意图。
如图2所示,第一板体210上设置有多个入水口212和一个出水槽口214,出水槽口214设于第一板体210的下部,第一板体210上还设有多个螺孔211,该多个螺孔211的位置仅是示意性设设置,旨在示意第一板体210和第二板体220通过螺钉固定件夹紧配合,具体的螺孔位置并不构成对本发明的限定。
请一并参阅图3,图3是本发明提供的液刀的第二板体的内表面的结构示意图。
如图3所示,第二板体220设有多个螺孔221、第一水槽222、导流块224、第二水槽223、储废槽225、排卸口226以及导向板227。
其中,多个螺孔221与第一板体210上的多个螺孔211相对应。
第一水槽222与第一板体210上的入水口212相对应,液体经入水口212进入后,首先进入入水口212。
导流块224设于第一水槽222的下方,导流块224为多个椭圆形的凸起,进入第一水槽222的液体经导流块224导流。
第二水槽223设于导流块224的下方,液体经导流块224后流入第二水槽223。
储废槽225设于第二水槽223的下方,并与第一板体210上的出水槽口214相连通,其中,出水槽口214连通储废槽225的上部,当液体中有残渣时,残渣会在储废槽225内沉积于储废槽225的底部,由此可以使得进入出水槽口214内的液体为无残渣的液体。
排卸口226设于储废槽225的侧边,用于在储废槽225的沉积的残渣较多时,进行清理排卸。
导向板227位于出水槽口214的下部,导向板227具有预定角度,用于导引从出水槽口214喷射出的液体的喷射方向。
综上所述,本领域技术人员容易理解,本发明提供的液刀200通过储废槽225进行残渣收集,可有效防止液刀200的出水槽口214堵塞。本发明提供的液刀200可保证了设备对液体压力、流量及均一性的要求,又在原结构上进行了改进,通过增加残渣沉淀单元,可有效防止液刀200的出水槽口堵塞现象的发生,且在液刀200两端预留进行清洁的排卸口226,可定期对液刀200内的残渣进行清洗。
以上所述仅为本发明的实施例,并非因此限制本发明的专利范围,凡是利用本发明说明书及附图内容所作的等效结构或等效流程变换,或直接或间接运用在其他相关的技术领域,均同理包括在本发明的专利保护范围内。
Claims (5)
1.一种液刀,其特征在于,所述液刀包括入水口、出水槽口以及储废槽,所述出水槽口连通所述储废槽的上部,液体经所述入水口进入后,进入所述储废槽内,再经所述出水槽口排出,所述液刀包括第一板体和第二板体,所述第一板体和所述第二板体通过固定件夹紧配合,所述入水口为多个,开设于所述第一板体上,所述入水口贯通所述第一板体设置,所述出水槽口设于所述第一板体的下部,所述第二板体对应于所述入水口处设有第一水槽,所述第二板体于所述第一水槽下方设有第二水槽,所述第二板体于所述第一水槽和第二水槽之间进一步设有导流块。
2.如权利要求1所述的液刀,其特征在于,所述导流块为多个椭圆形的凸起。
3.如权利要求1所述的液刀,其特征在于,所述储废槽设于所述第二水槽的下部。
4.如权利要求1所述的液刀,其特征在于,所述储废槽的两端进一步设有排卸口。
5.如权利要求1所述的液刀,其特征在于,所述第二板体进一步设有导向板,所述导向板位于所述出水槽口的下部。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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CN201610472903.9A CN106111587B (zh) | 2016-06-23 | 2016-06-23 | 液刀 |
PCT/CN2016/090627 WO2017219426A1 (zh) | 2016-06-23 | 2016-07-20 | 液刀 |
US15/123,679 US20180207687A1 (en) | 2016-06-23 | 2016-07-20 | Liquid blade |
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CN201610472903.9A CN106111587B (zh) | 2016-06-23 | 2016-06-23 | 液刀 |
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CN106111587A CN106111587A (zh) | 2016-11-16 |
CN106111587B true CN106111587B (zh) | 2018-09-11 |
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CN201610472903.9A Active CN106111587B (zh) | 2016-06-23 | 2016-06-23 | 液刀 |
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US (1) | US20180207687A1 (zh) |
CN (1) | CN106111587B (zh) |
WO (1) | WO2017219426A1 (zh) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1627993A (zh) * | 2002-06-05 | 2005-06-15 | 住友精密工业株式会社 | 喷嘴装置及具有喷嘴装置的基板处理装置 |
CN202362585U (zh) * | 2011-11-28 | 2012-08-01 | 深圳华映显示科技有限公司 | 一种液刀 |
CN103691623A (zh) * | 2013-12-23 | 2014-04-02 | 清华大学深圳研究生院 | 实现均匀喷涂低冲击的组合工艺喷嘴 |
CN104635437A (zh) * | 2013-11-07 | 2015-05-20 | 沈阳芯源微电子设备有限公司 | 幕状显影喷嘴 |
Family Cites Families (7)
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JP3964556B2 (ja) * | 1998-09-30 | 2007-08-22 | 芝浦メカトロニクス株式会社 | エアーナイフおよびそれを用いた乾燥処理装置 |
JP2005296722A (ja) * | 2004-04-07 | 2005-10-27 | Sharp Corp | 洗浄用ノズル |
JP2006102598A (ja) * | 2004-10-01 | 2006-04-20 | Matsushita Electric Ind Co Ltd | 塗布ノズル |
CN1803321B (zh) * | 2006-01-17 | 2010-05-12 | 友达光电股份有限公司 | 液刀机构 |
CN201086051Y (zh) * | 2007-07-23 | 2008-07-16 | 捷胤工业有限公司 | 刮刀 |
CN101311834B (zh) * | 2008-07-11 | 2010-12-01 | 友达光电股份有限公司 | 可提供均匀流体水幕至基板的液刀设备 |
KR20110062235A (ko) * | 2009-12-03 | 2011-06-10 | 주식회사 탑 엔지니어링 | 글래스 패널용 워터 나이프 |
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2016
- 2016-06-23 CN CN201610472903.9A patent/CN106111587B/zh active Active
- 2016-07-20 WO PCT/CN2016/090627 patent/WO2017219426A1/zh active Application Filing
- 2016-07-20 US US15/123,679 patent/US20180207687A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1627993A (zh) * | 2002-06-05 | 2005-06-15 | 住友精密工业株式会社 | 喷嘴装置及具有喷嘴装置的基板处理装置 |
CN202362585U (zh) * | 2011-11-28 | 2012-08-01 | 深圳华映显示科技有限公司 | 一种液刀 |
CN104635437A (zh) * | 2013-11-07 | 2015-05-20 | 沈阳芯源微电子设备有限公司 | 幕状显影喷嘴 |
CN103691623A (zh) * | 2013-12-23 | 2014-04-02 | 清华大学深圳研究生院 | 实现均匀喷涂低冲击的组合工艺喷嘴 |
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Publication number | Publication date |
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US20180207687A1 (en) | 2018-07-26 |
WO2017219426A1 (zh) | 2017-12-28 |
CN106111587A (zh) | 2016-11-16 |
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