CN106098605B - 一种集成电路检测线上的导向装置 - Google Patents
一种集成电路检测线上的导向装置 Download PDFInfo
- Publication number
- CN106098605B CN106098605B CN201610455262.6A CN201610455262A CN106098605B CN 106098605 B CN106098605 B CN 106098605B CN 201610455262 A CN201610455262 A CN 201610455262A CN 106098605 B CN106098605 B CN 106098605B
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- Prior art keywords
- integrated circuit
- guide roller
- nutted rod
- plugged
- rod
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000001514 detection method Methods 0.000 title claims abstract description 17
- 230000007246 mechanism Effects 0.000 claims abstract description 16
- 238000005096 rolling process Methods 0.000 claims abstract description 5
- 239000007787 solid Substances 0.000 claims description 4
- 238000000465 moulding Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 7
- 239000003990 capacitor Substances 0.000 abstract description 6
- 238000005299 abrasion Methods 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Control Of Conveyors (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610455262.6A CN106098605B (zh) | 2016-06-20 | 2016-06-20 | 一种集成电路检测线上的导向装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610455262.6A CN106098605B (zh) | 2016-06-20 | 2016-06-20 | 一种集成电路检测线上的导向装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106098605A CN106098605A (zh) | 2016-11-09 |
CN106098605B true CN106098605B (zh) | 2018-12-28 |
Family
ID=57238606
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610455262.6A Expired - Fee Related CN106098605B (zh) | 2016-06-20 | 2016-06-20 | 一种集成电路检测线上的导向装置 |
Country Status (1)
Country | Link |
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CN (1) | CN106098605B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108983552B (zh) * | 2017-05-31 | 2020-01-24 | 上海微电子装备(集团)股份有限公司 | 一种移入移出机构及光刻机工件台移入移出装置 |
CN107364717B (zh) * | 2017-07-27 | 2019-10-25 | 武汉华星光电技术有限公司 | 基板传送装置以及湿式设备 |
CN107381131A (zh) * | 2017-08-14 | 2017-11-24 | 奥士康科技股份有限公司 | 一种阳程回流线w3输送定位装置 |
CN111571713A (zh) * | 2020-05-13 | 2020-08-25 | 刘晓波 | 一种塑料制品加工用打孔设备 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN203922017U (zh) * | 2014-06-25 | 2014-11-05 | 浙江新瑞铭装饰材料有限公司 | 一种新型的装饰板输送校正装置 |
CN204039658U (zh) * | 2014-07-30 | 2014-12-24 | 绍兴闻翔远丰机械制造有限公司 | 一种小圆机输线器上的纱线张紧装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101186272B1 (ko) * | 2010-12-08 | 2012-09-27 | 엘아이지에이디피 주식회사 | 기판검사장치 |
KR101256651B1 (ko) * | 2011-11-24 | 2013-04-19 | 주식회사 에스아이이 | 박판 이송장치 |
CN104900552B (zh) * | 2014-03-06 | 2018-12-14 | 中芯国际集成电路制造(上海)有限公司 | 一种晶圆完整性的侦测方法及晶圆导向器 |
-
2016
- 2016-06-20 CN CN201610455262.6A patent/CN106098605B/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN203922017U (zh) * | 2014-06-25 | 2014-11-05 | 浙江新瑞铭装饰材料有限公司 | 一种新型的装饰板输送校正装置 |
CN204039658U (zh) * | 2014-07-30 | 2014-12-24 | 绍兴闻翔远丰机械制造有限公司 | 一种小圆机输线器上的纱线张紧装置 |
Also Published As
Publication number | Publication date |
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CN106098605A (zh) | 2016-11-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20181113 Address after: 516006 5th Floor, No. 1, Dongxiang South Road, Dongjiang High-tech Industrial Park, Zhongkai High-tech Zone, Huizhou City, Guangdong Province Applicant after: HUIZHOU CHANGSHENGJUN ELECTRONICS CO.,LTD. Address before: 523000 productivity building 406, high tech Industrial Development Zone, Songshan Lake, Dongguan, Guangdong Applicant before: Dongguan Lianzhou Intellectual Property Operation Management Co.,Ltd. |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181228 |