CN106093605A - A kind of torsional mode electric-field sensor - Google Patents
A kind of torsional mode electric-field sensor Download PDFInfo
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- CN106093605A CN106093605A CN201610404210.6A CN201610404210A CN106093605A CN 106093605 A CN106093605 A CN 106093605A CN 201610404210 A CN201610404210 A CN 201610404210A CN 106093605 A CN106093605 A CN 106093605A
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- electrode
- bucking electrode
- field sensor
- substrate
- torsional mode
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/12—Measuring electrostatic fields or voltage-potential
Abstract
A kind of torsional mode electric-field sensor, wherein, bucking electrode (3) is positioned in the plane outside substrate (1), and bucking electrode (3) wherein relative to two ends respectively with rotate spring beam (5) be connected, rotating spring beam (5) to be fixed on substrate (1) each via fixing described point (6), this setting makes bucking electrode (3) can carry out twisting vibration along rotating spring beam (5)；In induction electrode (4) also plane outside substrate (1), and it is the most right with the sidewall locations of the bucking electrode of non-twisting vibration (3), and is fixed with substrate (1) by fixed anchor point (6) and be connected；And drive structure (2) to be used for driving bucking electrode (3) to carry out described twisting vibration.Described sensor can realize back and forth shielding induction electrode, has that volume is little, induction efficiency is high, is simple to manufacture, the advantage of low cost, beneficially mass production, encapsulation and integrated.
Description
Technical field
The present invention relates to sensor field and MEMS (Micro-Electro-Mechanical System, abbreviation
MEMS) field, particularly relates to a kind of torsional mode electric-field sensor.
Background technology
Electric-field sensor is a kind of device for measuring electric field intensity, meteorological detection, Aero-Space, commercial production,
Intelligent grid, national defense and military and scientific research aspect have a very important role.
According to the difference of operation principle, electric-field sensor can be divided into optical profile type and the big class of charge inductive type two.In early days
Traditional electric-field sensor based on electric charge induction principle, such as double-ball type, rocket type, rotary vane type etc., distinct issues are
Volume is bigger, relatively costly；Along with the development of MEMS technology, electric-field sensor based on MEMS technology is suggested, one after another with it
Middle performance outstanding based on SOI (Silicon-On-Insulator) technique static broach exciting formula electric-field sensor as a example by, phase
Tradition electric-field sensor volume is reduced, is more easy to manufacture and integrated, but be limited to chip area and working method, also bring sensitive
Spend not high enough shortcoming.
Summary of the invention
Because the problems referred to above, the purpose of the present invention is to propose to a kind of torsional mode electric-field sensor.
For achieving the above object, the present invention provides a kind of torsional mode electric-field sensor, including substrate (1), drives structure, screen
Cover electrode, induction electrode, multiple rotation spring beams and multiple fixed anchor point, wherein:
Described bucking electrode is positioned in the plane outside substrate, and bucking electrode wherein relative to two ends respectively with rotation
Spring beam connects, and rotates spring beam and is fixed on substrate each via fixing described point, and this setting makes the bucking electrode can be along rotation
Spring beam carries out twisting vibration；
In described induction electrode also plane outside substrate, and its sidewall position with the bucking electrode of non-twisting vibration
It is the most right to put, and is connected by fixed anchor point and substrate are fixing；And
Described driving structure is used for driving bucking electrode to carry out described twisting vibration.
Preferably, insulate between described substrate and described bucking electrode, induction electrode.
Preferably, described driving structure is electro-static driving mechanism, Piezoelectric Driving structure, thermal actuator and/or magnetic force
Drive structure.
Preferably, described driving structure includes moving part and immovable part, and immovable part is fixed on described substrate
On, moving part is connected with described bucking electrode and rotation spring beam；By quiet between described moving part and immovable part
Electric drive, Piezoelectric Driving, thermal drivers and/or magnetically-actuated, the moving part after driving drives the motion of described bucking electrode.
Preferably, described driving structure includes a pair or multipair movable and immovable part.
Preferably, fixed anchor point is set to many groups, plays support and be connected work between bucking electrode, induction electrode and substrate
With.
Preferably, the described spring beam that spring beam is straight beam, folding beam, two-fold beam, Eriocheir sinensis shape beam and/or snakelike beam that rotates is tied
Structure.
Preferably, the induction electrode that described bucking electrode and induction electrode form is to arranging one group or many groups.
By technique scheme, having the beneficial effects that of the torsional mode electric-field sensor of the present invention:
(1) designed by bucking electrode torsional mode, it is possible to increase the amplitude of electric charge variable quantity on single induction electrode, thus
Improve the sensitivity of sensor measurement.
(2) belong to upper and lower from surface vibration due to torsional mode vibration, thus induction electrode and bucking electrode can be in the plane
Realize little width, Small Distance, highdensity layout, thus improve plane utilization rate, it is possible to achieve sensor area and volume
Reduce.
(3) by using MEMS technology to manufacture, it is of value to and realizes mass manufacture and the system integration, reduce into simultaneously
This.
Accompanying drawing explanation
Fig. 1 is the structural representation of a specific embodiment of the torsional mode electric-field sensor of the present invention；
Fig. 2 is in specific embodiment shown in Fig. 1, drives structure to drive bucking electrode that the driving principle that entirety is reversed occurs
Figure；
Fig. 3 a and 3b is in specific embodiment shown in Fig. 1, the schematic diagram of induction electrode charge inducing in the electric field, Qi Zhongtu
3a is the stereogram that bucking electrode deflects, and Fig. 3 b is the signal of induction electrode charge inducing in the electric field under corresponding profile
Figure；
Fig. 4 is the structural representation of another specific embodiment of the torsional mode electric-field sensor of the present invention；
Fig. 5 is the structural representation of another specific embodiment of the torsional mode electric-field sensor of the present invention.
Detailed description of the invention
The torsional mode electric-field sensor proposed in the present invention is a kind of electric-field sensor based on electric charge induction principle, its work
As principle it is:
Owing to driving structure can bucking electrode be driven, so when to when driving structure to apply excitation, screen can be driven
Covering electrode occurs entirety to reverse, thus causes the change of position between bucking electrode and induction electrode, and then causes induction electrode
On charge inducing change.
The torsional mode electric-field sensor proposed in the present invention, including substrate, drives structure, bucking electrode, induction electrode, turns
Dynamic elasticity beam and fixed anchor point, wherein:
Described bucking electrode is positioned in the plane outside substrate, and bucking electrode wherein relative to two ends respectively with rotation
Spring beam is connected (both connected modes can be to be directly connected to can also be to be indirectly connected with by other parts), rotates spring beam
Being fixed on substrate each via fixing described point, this setting makes bucking electrode can carry out twisting vibration along rotating spring beam；
In described induction electrode also plane outside substrate, and its sidewall position with the bucking electrode of non-twisting vibration
It is the most right to put, and is connected by fixed anchor point and substrate are fixing；And
Described driving structure is used for driving bucking electrode to carry out described twisting vibration.
Preferably, insulate between described substrate and described bucking electrode, induction electrode.
Described driving structure can be various driving structure used in the prior art, preferably electrostatic drive knot
Structure, Piezoelectric Driving structure, thermal actuator and/or magnetic drive structure.
Described driving structure includes moving part separated from one another and immovable part, and immovable part is fixed on described lining
, moving part is fixed on described bucking electrode at the end.
Preferably, can be by various drivings used in the prior art between described moving part and immovable part
Mode, preferably through electrostatic drive, Piezoelectric Driving, thermal drivers and/or magnetically-actuated, the moving part after driving drives institute
State bucking electrode motion.
Described driving structure arranges a pair or multipair movable and immovable part.
Fixed anchor point is set to many groups, plays support and interconnection function between bucking electrode, induction electrode and substrate.
Described rotation spring beam is straight beam, folding beam, two-fold beam, Eriocheir sinensis shape beam and/or snakelike beam, and has deformability
Elastic beam structure.
The induction electrode that described bucking electrode and induction electrode form is to arranging one group or many groups.
Below by embodiment, and combine accompanying drawing, technical scheme is described in further detail.In explanation
In book, same or analogous drawing reference numeral indicates same or analogous parts.Following referring to the drawings to embodiment of the present invention
Illustrate to be intended to the present general inventive concept of the present invention is explained, and be not construed as a kind of restriction to the present invention.
Fig. 1 is the structural representation of a specific embodiment of the torsional mode electric-field sensor of the present invention, including four
Group drives structure, two groups of induction electrodes pair.
As it can be seen, embodiment includes substrate 1, drive structure 2, bucking electrode 3, induction electrode 4, rotate spring beam 5,
Fixed anchor point 6, wherein drives structure 2 to use electrostatic drive, is made up of with lower drive electrode upper drive electrode, and upper drive electrode
It is immovable part for moving part, lower drive electrode.
In the present embodiment, bucking electrode 3, upper drive electrode, rotation spring beam 5 are connected, and by fixed anchor point 6 and substrate
1 connects；Induction electrode 4 is the most right with bucking electrode 3 sidewall, and is connected by fixed anchor point 6 with between substrate 1.
In the present embodiment, bucking electrode 3 and induction electrode 4 are list structure；Rotating spring beam 5 is straight beam；Drive structure
In upper drive electrode and lower drive electrode be slab construction.
Fig. 2 is in the embodiment in figure 1, and upper drive electrode drives bucking electrode 3 that the driving principle figure of overall torsion occurs,
In figure, the stressing conditions to upper drive electrode both sides has carried out schematic mark.
Wherein, the lower drive electrode of left and right sides independence applies different alternating voltage V respectivelya1、Va2, thus on drive
Left and right two parts of moving electrode produce the electrostatic force F of corresponding size respectivelye1、Fe2, it as shown is Fe1＞ Fe2In the case of, on
Reverse counterclockwise away from lower drive electrode near lower drive electrode, right side on the left of drive electrode；Reverse while occurring, by turning
The moment of torsion effect of dynamic elasticity beam 5 and be applied to elastic force F on drive electrode both sidesmProduce, and size is identical, direction phase
Instead, along with the change of windup-degree, elastic force also increases, the final and balance of making a concerted effort of electrostatic force, reaches maximum twist angle；With
After, due to voltage Va1、Va2Change, electrostatic force Fe1、Fe2Strong or weak relation change therewith, so that upper drive electrode is in ancient times
Beginning position is recovered, and then carries out the most contrary torsion；The twisting vibration so gone round and begun again brings bucking electrode 3 and sensing
Being continually changing relative to position between electrode 4.
Fig. 3 a and Fig. 3 b is the schematic diagram of induction electrode 4 charge inducing in the electric field.
Fig. 3 a is the stereogram that bucking electrode 3 deflects.Because applying different alternating voltages on lower drive electrode, make
Drive electrode plane torsion must be gone up, cause relative position between bucking electrode 3 with induction electrode 4 to change, thus cause sense
Answer the change of electrode 4 produced charge inducing amount.
Fig. 3 b is the schematic diagram of induction electrode 4 charge inducing in the electric field under corresponding profile.As it can be seen, because of shielding electricity
Pole 3 ground connection all the time, when reversing counterclockwise, the induction electrode 4 in left side arrives because of more external electric field and concentrates, and will produce
Raw more charge inducing；The induction electrode 4 on right side subtracts in a large number because of the shielding action of blocking of bucking electrode, the external electric field of arrival
It is weak, so the electric charge of sensing is less.When bucking electrode 3 does periodically twisting vibration, the induction electrode 4 of arranged on left and right sides is felt
The quantity of electric charge answered also will produce cyclically-varying, thus form the faradic current being directly proportional to electric field E intensity to be measured.
Fig. 4 is the structural representation of another specific embodiment of the torsional mode electric-field sensor of the present invention, and it includes four
Group electro-static driving mechanism, two groups of induction electrodes pair, identical with the operation principle of Fig. 1 embodiment, but difference is, it drives structure
In upper drive electrode be designed as the slab construction of band square opening, it is intended that reduce the air damping under actual working state, can drop
The driving voltage of low non-vacuum lower sensor.
Fig. 5 is the structural representation of another specific embodiment of the torsional mode electric-field sensor of the present invention, including two groups
Electro-static driving mechanism, two groups of induction electrodes pair, the sensor in this embodiment is still that electro-static driving mechanism due to use, because of
And principle of dynamics is consistent with the embodiment in Fig. 1, Fig. 4, but distinguishes and be following 2 points:
(1) this embodiment drives structure be positioned at induction electrode to centre near torsional axis, make its bucking electrode send out
The raw acoplanarity displacement equal with the first two embodiment, in its driving structure, movable structure needs the acoplanarity displacement occurred less, because of
And driving voltage can be reduced；
(2) the rotation spring beam in this embodiment uses folding beam, relative to the straight beam structure in the first two embodiment,
It is more easy to twist and windup-degree can be bigger.
In sum, it is considered to the situation of the actual application of electric-field sensor, the torsional mode electric-field sensor proposed in the present invention
Have that volume is little, induction efficiency is high, be simple to manufacture, the advantage of low cost, beneficially mass production, encapsulation and integrated, favorably
In electric-field sensor at aspects such as meteorological detection, Aero-Space, commercial production, intelligent grid, national defense and military and scientific researches
Extensively application.
It is further to note that similar in claims, accompanying drawing, description in this patent, same section use phase
Same label, the part not indicating in accompanying drawing or describing, form known to a person of ordinary skill in the art in also should be art.And
Embodiment described above is not limited to the present invention, all within the spirit and principles in the present invention, any amendment of being made,
Equivalent, improvement etc., should be included within the scope of the present invention.
Claims (8)
1. a torsional mode electric-field sensor, it is characterised in that include substrate (1), drives structure (2), bucking electrode (3), sense
Answer electrode (4), multiple rotation spring beams (5) and multiple fixed anchor point (6), wherein:
Described bucking electrode (3) is positioned in the plane outside substrate (1), and bucking electrode (3) wherein relative to two ends respectively
Being connected with rotating spring beam (5), rotate spring beam (5) and be fixed on substrate (1) each via fixing described point (6), this setting makes
Bucking electrode (3) can carry out twisting vibration along rotating spring beam (5)；
In described induction electrode (4) also plane outside substrate (1), and its bucking electrode (3) with non-twisting vibration
Sidewall locations is the most right, and is connected by fixed anchor point (6) and substrate (1) are fixing；And
Described driving structure (2) is used for driving bucking electrode (3) to carry out described twisting vibration.
Torsional mode electric-field sensor the most according to claim 1, it is characterised in that described substrate (1) and described screen
Cover and insulate between electrode (3), induction electrode (4).
Torsional mode electric-field sensor the most according to claim 1, it is characterised in that described driving structure (2) is electrostatic
Drive structure, Piezoelectric Driving structure, thermal actuator and/or magnetic drive structure.
Torsional mode electric-field sensor the most according to claim 1, it is characterised in that described driving structure (2) includes movably
Part and immovable part, immovable part is fixed on described substrate, moving part and described bucking electrode (3) and rotation bullet
Property beam (5) connect；By electrostatic drive, Piezoelectric Driving, thermal drivers and/or magnetic force between described moving part and immovable part
Driving, the moving part after driving drives described bucking electrode (3) motion.
Torsional mode electric-field sensor the most according to claim 4, it is characterised in that described driving structure (2) includes one
To or multipair movable and immovable part.
Torsional mode electric-field sensor the most according to claim 1, it is characterised in that fixed anchor point (6) is set to many groups,
Support and interconnection function is played between bucking electrode (3), induction electrode (4) and substrate (1).
Torsional mode electric-field sensor the most according to claim 1, it is characterised in that described rotation spring beam (5) is straight
Beam, folding beam, two-fold beam, Eriocheir sinensis shape beam and/or the elastic beam structure of snakelike beam.
Torsional mode electric-field sensor the most according to claim 1, it is characterised in that described bucking electrode (3) and sensing
The induction electrode that electrode (4) forms is to arranging one group or many groups.
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| CN201610404210.6A CN106093605A (en) | 2016-06-08 | 2016-06-08 | A kind of torsional mode electric-field sensor |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107907749A (en) * | 2017-11-24 | 2018-04-13 | 中国科学院电子学研究所 | A kind of three-dimensional electric field sensor of low inter-axis coupling |
| CN108508284A (en) * | 2018-03-26 | 2018-09-07 | 中国科学院电子学研究所 | A kind of mutual shielded electric field sensor based on twisting vibration |
| WO2018187307A1 (en) * | 2017-04-04 | 2018-10-11 | The Charles Stark Draper Laboratory, Inc. | Miniature electric field detector |
| US10531805B2 (en) | 2016-09-30 | 2020-01-14 | The Charles Stark Draper Laboratory, Inc. | Biophysical sensing systems and methods using non-contact electric field detectors |
| US10564200B2 (en) | 2015-10-06 | 2020-02-18 | The Charles Stark Draper Laboratory, Inc. | Electric field detector system |
| US10585150B2 (en) | 2015-10-06 | 2020-03-10 | The Charles Stark Draper Laboratory, Inc. | Magnetic field detector system |
| CN111413653A (en) * | 2019-01-07 | 2020-07-14 | 中国科学院上海微系统与信息技术研究所 | Magnetic field sensor structure and preparation method thereof |
| CN113625064A (en) * | 2020-05-09 | 2021-11-09 | 中国科学院空天信息创新研究院 | Electric field sensor |
| US11525870B2 (en) | 2017-10-05 | 2022-12-13 | The Charles Stark Draper Laboratory, Inc. | Electromagnetic gradiometers |
| CN115598429A (en) * | 2022-11-23 | 2023-01-13 | 西安交通大学（Cn） | Piezoelectric-driven rotary type miniature electric field sensor and working method thereof |
| CN115980467A (en) * | 2023-03-20 | 2023-04-18 | 西安交通大学 | Piezoelectric driven MEMS type electric field sensor |
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Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10564200B2 (en) | 2015-10-06 | 2020-02-18 | The Charles Stark Draper Laboratory, Inc. | Electric field detector system |
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| CN107907749B (en) * | 2017-11-24 | 2021-02-23 | 中国科学院电子学研究所 | Three-dimensional electric field sensor of coupling between low axle |
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| CN108508284A (en) * | 2018-03-26 | 2018-09-07 | 中国科学院电子学研究所 | A kind of mutual shielded electric field sensor based on twisting vibration |
| CN111413653A (en) * | 2019-01-07 | 2020-07-14 | 中国科学院上海微系统与信息技术研究所 | Magnetic field sensor structure and preparation method thereof |
| CN113625064A (en) * | 2020-05-09 | 2021-11-09 | 中国科学院空天信息创新研究院 | Electric field sensor |
| CN113625064B (en) * | 2020-05-09 | 2023-06-27 | 中国科学院空天信息创新研究院 | Torque type miniature electric field sensor based on modal localization |
| CN115598429A (en) * | 2022-11-23 | 2023-01-13 | 西安交通大学（Cn） | Piezoelectric-driven rotary type miniature electric field sensor and working method thereof |
| CN115598429B (en) * | 2022-11-23 | 2023-03-07 | 西安交通大学 | Piezoelectric-driven rotary type miniature electric field sensor and working method thereof |
| CN115980467A (en) * | 2023-03-20 | 2023-04-18 | 西安交通大学 | Piezoelectric driven MEMS type electric field sensor |
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Application publication date: 20161109 |