CN103713203A - Miniature electric field sensor structure - Google Patents

Miniature electric field sensor structure Download PDF

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Publication number
CN103713203A
CN103713203A CN201310706890.3A CN201310706890A CN103713203A CN 103713203 A CN103713203 A CN 103713203A CN 201310706890 A CN201310706890 A CN 201310706890A CN 103713203 A CN103713203 A CN 103713203A
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China
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induction electrode
movable
electrode
polarity
sensor
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CN201310706890.3A
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Chinese (zh)
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CN103713203B (en
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叶天翔
王喆垚
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清华大学
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Abstract

The invention discloses a miniature electric field sensor structure. The miniature electric field sensor structure includes a movable induction electrode array and a fixed induction electrode array; the movable induction electrode array can move periodically in a reciprocating manner and includes at least one movable induction electrode unit; the movable induction electrode unit includes a positive polarity movable induction electrode and a negative polarity movable induction electrode which are connected with each other through an insulation structure; the fixed induction electrode array includes at least one fixed induction electrode unit; the fixed induction electrode unit includes a positive polarity fixed induction electrode and a negative polarity fixed induction electrode; the movable induction electrode unit and the fixed induction electrode unit are externally connected with a circuit respectively such that potential clamp can be realized; and when the movable induction electrodes move periodically in a reciprocating manner, electrical signals associated with electric field intensity can be generated, and therefore, electric field intensity measurement can be realized. With the miniature electric field sensor structure adopted, the problem of electric field waste of a direct grounding structure can be avoided, and a larger electric field induction area can be obtained; more induced charges can be generated in the same detection cycle; and the resolution of the measurement can be improved.

Description

A kind of micro field sensor structure

Technical field

The present invention relates to sensor technical field, particularly a kind of micro field sensor structure.

Background technology

Electric-field sensor is the device of measuring electric field intensity, and it is widely used in the key areas such as electric power, national defence, Aero-Space, commercial production, utilizes sensor to carry out Real-Time Monitoring to the electric field producing in equipment running process.Along with microelectromechanical systems (Micro-Electro-Mechanical Systems, referred to as MEMS) development of technology makes increasing sensor be miniaturizated to possibility, for example micro-acceleration gauge has been applied very ripely in the brake of automotive electronics and subsystem thereof, is also widely used in portable consumer electronic applications.Microsensor has the incomparable performance characteristics of traditional sensors.Microsensor volume is little, and its characteristic dimension is even less at micron, and under the application background of some limited spaces, the feature of microsensor is particularly evident; Microsensor is cheap simultaneously, is easy to batch production, has in addition and is easy to the advantages such as integrated.

Electric-field sensor based on MEMS technology is substantially all to rely on the motion generation induced charge of movable electrode array to carry out electric field measurement at present.Between the induction electrode of electric-field sensor and guarded electrode, by motion, produce alternating electric field, but no matter be selection level vibration electric-field sensor, still select vertical vibration electric-field sensor, all have a common problem, the electric field of falling on guarded electrode is not utilized.

Because the sensitivity of the electric-field sensor based on electric charge induction is relevant with the induction area of electric charge, so above-mentioned electric-field sensor all fails to make full use of the induction area of electric charge, the performance of electric-field sensor is very low.

Summary of the invention

(1) technical matters that will solve

The technical problem to be solved in the present invention is how to avoid the electric field dropping on guarded electrode to be wasted, and improves the utilization ratio of electric field and the resolution of electric field measurement.

(2) technical scheme

For solving the problems of the technologies described above, the invention provides a kind of micro field sensor structure, specifically comprise: periodically reciprocating movable induction electrode array and fixed fixedly induction electrode array;

Movable induction electrode array comprises at least one movable induction electrode unit, by elastic construction, be supported on substrate surface, described movable induction electrode unit comprises a straight polarity electrode and an electrode pair that negative polarity electrode forms, and is respectively the movable induction electrode of positive polarity and the movable induction electrode of negative polarity;

Fixedly induction electrode array comprises at least one fixedly induction electrode unit, by the strong point, be fixed on substrate surface, described fixedly induction electrode unit comprises the electrode pair that a straight polarity electrode and negative polarity electrode form, and is respectively the fixedly fixing induction electrode of induction electrode and negative polarity of positive polarity.

Further, described fixedly induction electrode unit and movable induction electrode unit are with comb teeth-shaped cross arrangement.

Further, in described fixedly induction electrode unit, the polarity of electrode is identical with the polarity of electrode in adjacent described movable induction electrode unit.

Further, the movable induction electrode of positive polarity and the movable induction electrode of negative polarity that in described movable induction electrode unit, form electrode pair carry out mechanical connection by insulation system, the movable induction electrode of positive polarity and the movable induction electrode of negative polarity can be synchronized with the movement under the driving of drives structure, and keep electrical isolation.

Further, the positive polarity in described fixedly induction electrode unit fixedly induction electrode and negative polarity is fixedly fixed the position of induction electrode, and keeps electrical isolation.

Further, described insulation system is arranged in the upper surface of the described movable induction electrode movable induction electrode of unit positive polarity and the movable induction electrode of negative polarity, or the side between the movable induction electrode of positive polarity and the movable induction electrode of negative polarity.

Further, by signal processing circuit, the movable induction electrode of positive polarity and the movable induction electrode of negative polarity in described movable induction electrode unit are carried out to current potential and clamp down on, make the current potential of the two remain on respectively fixed value; By signal processing circuit to positive polarity in described fixedly induction electrode unit fixedly induction electrode and negative polarity induction electrode carry out current potential and clamp down on, make the current potential of the two remain on respectively fixed value.

Further, described insulation system is inorganic material, below any one: silicon dioxide, silicon nitride or silicon oxynitride;

Or organic material, below any one: polyimide or benzocyclobutene.

Further, between the movable induction electrode of positive polarity in described movable induction electrode unit and the movable induction electrode of negative polarity or the fixing fixing fixing all or part of fill insulant in the gap between induction electrode of induction electrode and negative polarity of the positive polarity in induction electrode unit.

(3) beneficial effect

The embodiment of the present invention provides a kind of micro field sensor structure, comprise: movable induction electrode array and fixedly induction electrode array, movable periodically to-and-fro movement of induction electrode array, comprise at least one movable induction electrode unit, movable induction electrode unit comprises the movable induction electrode of positive polarity and the movable induction electrode of negative polarity, and the two connects by insulation system; Fixedly induction electrode array comprises at least one fixedly induction electrode unit, and fixedly induction electrode array is determined induction electrode unit and comprised the fixedly fixing induction electrode of induction electrode and negative polarity of positive polarity.Micro field sensor structure provided by the invention is utilized insulation system and current potential clamping technology, by movable induction electrode unit and fixedly induction electrode unit respectively external circuits realize current potential and clamp down on, when movable induction electrode periodicity to-and-fro movement, produce the electric signal relevant to electric field intensity, realize electric field intensity measuremenrt.This sensor construction can be avoided the electric field waste problem of direct ground structure, obtains larger electric field induction area, in same detection, in the cycle, can produce more induced charge, improves the resolution of measuring.

Accompanying drawing explanation

The perspective view that Fig. 1 is a kind of micro field sensor structure of providing in the embodiment of the present invention;

The diagrammatic cross-section of Fig. 2 when movable induction electrode unit motion is to the left side in the electric-field sensor providing in the embodiment of the present invention;

The diagrammatic cross-section of Fig. 3 when movable induction electrode unit motion is to the right in the electric-field sensor providing in the embodiment of the present invention;

The schematic diagram that Fig. 4 is the signal processing circuit that provides in the embodiment of the present invention.

Embodiment

Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples are used for illustrating the present invention, but are not used for limiting the scope of the invention.

For movable induction electrode, according to the direction of motion of movable electrode, can be divided into two large classes, be horizontal vibration electric-field sensor and vertical vibration electric-field sensor, and horizontal vibration electric-field sensor comprises the horizontal component of electric field sensor of horizontal vibration and the vertical electric field sensor of horizontal vibration, vertical vibration electric-field sensor comprises again the tabular electric-field sensor of vertical vibration and vertical vibration comb teeth-shaped electric-field sensor.Wherein the induction electrode of the horizontal component of electric field sensor of horizontal vibration and guarded electrode are in same plane, both are with comb teeth-shaped cross arrangement, induction electrode carries out electric field induction by sidewall, directly grounded guarded electrode moves back and forth between induction electrode, electric field between modulation induction electrode and guarded electrode, thus the signal relevant to tested electric field intensity on induction electrode, obtained.The induction electrode of the vertical electric field sensor of horizontal vibration and guarded electrode be not or not a plane, and guarded electrode, above induction electrode, is comb teeth-shaped, mainly by induction electrode upper surface, carrys out induction field.Directly grounded guarded electrode is by moving back and forth in the horizontal direction, and the electric field on induction electrode is fallen in modulation, by the processing of subsequent conditioning circuit, obtains the signal relevant to tested electric field intensity; The induction electrode of the tabular electric-field sensor of vertical vibration and guarded electrode be not or not a plane, and guarded electrode is flat board with holes, above induction electrode.Directly grounded guarded electrode is by periodically moving back and forth in the vertical direction, and the electric field on induction electrode is fallen in modulation, by processing of circuit, obtains the signal relevant to tested electric field intensity.

And the induction electrode of the comb teeth-shaped electric-field sensor of vertical vibration and guarded electrode be or not a plane, guarded electrode and induction electrode are the comb structure staggering.Directly grounded guarded electrode, by induction electrode plane up-down vibration, is modulated and is fallen the electric field on induction electrode, by the processing of subsequent conditioning circuit, obtains the signal relevant to tested electric field intensity.All there is a common problem in above four kinds of electric-field sensors, the electric field of falling on guarded electrode is not utilized.Because the sensitivity of the electric-field sensor based on electric charge induction is relevant with the induction area of electric charge, so above four kinds of electric-field sensors all fail to make full use of the induction area of electric charge.

Therefore, in the embodiment of the present invention, provide a kind of micro field sensor structure, the earthy guarded electrode of tradition is replaced to non_direct ground but realized by signal processing circuit the structure that current potential is clamped down on, and utilized the electric charge of responding on it, specifically comprised:

Periodically reciprocating movable induction electrode array and fixed fixedly induction electrode array, movable induction electrode array comprises at least one movable induction electrode unit, by elastic construction, be supported on substrate surface, movable induction electrode unit comprises a straight polarity electrode and an electrode pair that negative polarity electrode forms, and is respectively the movable induction electrode of positive polarity and the movable induction electrode of negative polarity;

Fixedly induction electrode array comprises at least one fixedly induction electrode unit, by the strong point, be fixed on substrate surface, fixedly induction electrode unit comprises the electrode pair that a straight polarity electrode and negative polarity electrode form, and is respectively the fixedly fixing induction electrode of induction electrode and negative polarity of positive polarity.

The ultimate principle of the electric-field sensor of the sensor structure based on electric charge induction be directly grounded guarded electrode by the effect of drives structure, periodic modulation is fallen the electric field on induction electrode.Wherein modulated electric field can induce the quantity of electric charge that the cycle changes on induction electrode.The quantity of electric charge changing measuring period by signal processing circuit, can obtain the information relevant to tested electric field intensity, thereby obtain the intensity of tested electric field.The right effect of movable induction electrode is wherein equivalent to guarded electrode, but movable induction electrode is realized current potential by signal processing circuit and is clamped down on, rather than direct ground connection, it is by in-phase end ground connection that current potential is clamped down on, with the operational amplifier of backfeed loop, realize, positive-negative polarity induction electrode in movable induction electrode unit is received respectively to the backward end of the operational amplifier with above-mentioned functions, can be realized the current potential of electrode is clamped down on.Meanwhile, adopt the electric field that can utilize in this way on movable induction electrode unit, improve electric field utilization ratio, and obtain larger electric field resolution.

For the perspective view of the micro field sensor structure in the present embodiment as shown in Figure 1, mainly comprise substrate and induction electrode array, wherein 100 is substrates, the 101st, insulation course, the 102nd, the fixing metal lead wire of induction electrode array, the 103rd, the positive polarity press welding block that fixedly metal lead wire of induction electrode array is connected with signal processing circuit, the 104th, negative polarity is the metal lead wire of induction electrode array fixedly, the 105th, the negative polarity pressure welding that fixedly metal lead wire of induction electrode array is connected with signal processing circuit is fast, the 201st, the movable induction electrode of positive polarity, the 202nd, negative polarity is induction electrode fixedly, the 203rd, positive polarity is induction electrode fixedly, the 204th, the movable induction electrode of negative polarity, the 205th, for connecting the insulation system of the movable induction electrode of positive polarity and the movable induction electrode of negative polarity, 206 and 209 is mooring anchors of the movable induction electrode of positive polarity, the 207th, the elastic microstructure of the movable induction electrode of connection negative polarity, the 208th, the mooring anchor of the movable induction electrode of negative polarity, the 210th, the drives structure of the movable induction electrode of connection positive polarity.

Wherein in said structure, the material as substrate 100 can be monocrystalline silicon disk, glass wafer, metal disk or other compound substance.Insulation course 101 can be used one or more in silicon dioxide, silicon nitride, silicon oxynitride, aluminium nitride or organic polymer.Metal lead wire 102 can adopt one or more in copper, aluminium, nickel, gold, silver, tin, platinum etc.

Preferably, the fixedly induction electrode unit in the present embodiment and movable induction electrode unit are with comb teeth-shaped cross arrangement.Wherein movable induction electrode unit comprises the electrode of a positive polarity and a negative polarity, is respectively the movable induction electrode 201 of positive polarity and the movable induction electrode 204 of negative polarity; Fixedly induction electrode unit comprises the electrode of a positive polarity and a negative polarity, is respectively the fixedly fixing induction electrode 202 of induction electrode 203 and negative polarity of positive polarity.The movable induction electrode 201 of positive polarity and the movable induction electrode 204 of negative polarity that in movable induction electrode unit, form electrode pair carry out mechanical connection by insulation system 205, the movable induction electrode 201 of positive polarity and the movable induction electrode 204 of negative polarity can be synchronized with the movement under the driving of drives structure 210, and keep electrical isolation; Drives structure 210 can adopt the modes such as electric heating, piezoelectricity, electromagnetism to drive double vibrations; Fixedly the positive polarity in induction electrode unit fixedly induction electrode 203 and negative polarity fixedly fix the position of induction electrode 202, and keep electrical isolation.

Concrete, in induction electrode array, negative polarity fixedly induction electrode 202 and positive polarity fixedly induction electrode 203, positive polarity fixedly the metal lead wire 102 of induction electrode and negative polarity fixedly the metal lead wire 104 of induction electrode array be positioned at the top of the insulation course 101 of substrate 100 upper surfaces, the electric charge that fixedly two electrodes in induction electrode unit sense can be drawn from the metal lead wire 102 and 104 on insulation course 101 surfaces.The movable induction electrode 201 of positive polarity and the movable induction electrode 204 of negative polarity are keys of the present invention, the movable induction electrode 201 of adjacent positive polarity, the movable induction electrode 204 of negative polarity are realized mechanical connection by insulation system 205, form movable induction electrode pair, but electrical isolation between the two.By structural connection, the movable induction electrode 201 of positive polarity and the movable induction electrode 204 of negative polarity can be synchronized with the movement under the driving of drives structure 210.Induction electrode wherein can be made various shape, and for example the straight beam structure in Fig. 1, also can make comb structure, or their distortion or combination.Meanwhile, in this example, the size of induction electrode is consistent, but the size of induction electrode can be inconsistent in other embodiments of the invention.

Insulation system 205 is wherein inorganic material, below any one: silicon dioxide, silicon nitride or silicon oxynitride; Or organic material, below any one: polyimide or benzocyclobutene.Insulation system 205 is arranged in the upper surface of the movable induction electrode of movable induction electrode unit positive polarity and the movable induction electrode of negative polarity, or the side between the movable induction electrode of positive polarity and the movable induction electrode of negative polarity

It should be noted that, fixedly in induction electrode unit, the polarity of electrode is identical with the polarity of electrode in adjacent movable induction electrode unit.Between the movable induction electrode 201 of positive polarity in described movable induction electrode unit and the movable induction electrode 204 of negative polarity or the fixing fixing fixing all or part of fill insulant in the gap between induction electrode 203 of induction electrode 202 and negative polarity of the positive polarity in induction electrode unit.

Preferably, in the present embodiment, mooring anchor 206 and 209 is arranged on the movable induction electrode 201 of positive polarity, elastic microstructure 207 connects the movable induction electrode array element 204 of negative polarity, mooring anchor 208 is arranged on the movable induction electrode 204 of negative polarity, and movable induction electrode array forms hanging structure by elastic microstructure 207 and mooring anchor 208.

The mooring anchor 206 wherein arranging on the movable induction electrode 201 of positive polarity and 209 effect have two, and the one, support the movable induction electrode 201 of whole positive polarity unsettled, the 2nd, as the exit of movable induction electrode 201 induced charges of positive polarity.The movable induction electrode 201 of positive polarity can directly adopt mooring anchor 206 and 209 unsettled, also can realize unsettled with the combination that elastic construction is fixed anchor.And the hanging structure of the movable induction electrode 204 of negative polarity is the elastic microstructure 207 of the movable induction electrode 204 of negative polarity and the mooring anchor 208 of the movable induction electrode 204 of negative polarity.This structure is with respect to fixed beam structure, and elastic microstructure 207 can ensure that the movable induction electrode 204 of negative polarity can move towards fixed-direction in surface level.

It should be noted that, negative polarity fixedly induction electrode 203 and positive polarity fixedly induction electrode 202 by the drives structure 210 of the peripheral movable induction electrode of connection, surrounded, so must be by the fixing fixing induced charge of induction electrode 201 of induction electrode 204 and positive polarity of negative polarity, metal lead wire 102 and 104 electricity from substrate 100 upper surface insulation courses 101 are drawn.

Also it should be noted that, the insulation system in the present embodiment is inorganic material, below any one: silicon dioxide, silicon nitride or silicon oxynitride;

Or organic material, below any one: polyimide or benzocyclobutene.

Preferably, when the sensor arrangement works, in the present embodiment, by signal processing circuit, the movable induction electrode 204 of the movable induction electrode 201 of positive polarity and negative polarity in movable induction electrode unit is carried out to current potential and clamp down on, make the current potential of the two remain on respectively fixed value; By signal processing circuit to positive polarity in fixing induction electrode unit fixedly induction electrode 202 and negative polarity induction electrode 203 carry out current potential and clamp down on, make the current potential of the two remain on respectively fixed value.As shown in Figure 2, when the movable induction electrode of centre is when moving to the left side, more electric field can be fallen the fixedly sidewall of induction electrode 203 of the movable induction electrode 201 of positive polarity and positive polarity.Now positive polarity induction electrode can induce more electric charge, and negative polarity induction electrode can induce less electric charge.As shown in Figure 3, when the movable induction electrode of centre is when moving to the right, more electric field can be fallen the fixedly sidewall of induction electrode 202 of the movable induction electrode 204 of negative polarity and negative polarity, and at this moment negative polarity induction electrode can induce compared with multi-charge, and positive polarity induction electrode can induce less electric charge.Under the effect of drives structure, make movable induction electrode to periodically side-to-side movement, positive-negative polarity induction electrode can induce the electric charge that the cycle changes, and the electric charge that this cycle changes is an amount relevant to tested electric field intensity, so by the electric charge changing measuring period, can measure electric field intensity.

In addition, Fig. 4 shows the signal processing circuit schematic diagram that the embodiment of the present invention adopts, and method of attachment, wherein 301 is fixedly signal processing circuit exits of induction electrode 203 of positive polarity, the 302nd, negative polarity is the signal processing circuit exit of induction electrode 202 fixedly, the 303rd, the signal processing circuit exit of the movable induction electrode 204 of negative polarity, the 304th, the signal processing circuit exit of the movable induction electrode 201 of positive polarity.The current potential that act as induction electrode of signal processing circuit is clamped down on faradic and is amplified across resistance.

In sum, the microsensor structure providing in the present embodiment, than existing electric-field sensor, takes full advantage of the electric field that original conductively-closed electrode slatterns, movable periodically to-and-fro movement of induction electrode array.The movable induction electrode of this motion modulation pair and fixing induction electrode between electric field, generation induced charge.Micro field sensor structure provided by the invention is utilized insulation system and current potential clamping technology, by movable induction electrode unit and fixedly induction electrode unit realize electric field induction simultaneously, when movable induction electrode unit and when fixedly external circuits is realized current potential and clamped down on respectively in induction electrode unit, can produce the electric signal relevant to electric field intensity, realize the measurement of electric field intensity, can avoid directly grounded shielding construction, can not produce the problem of electric field waste, obtain larger electric field induction area, in same detection, in the cycle, can produce more induced charge, therefore improved the utilization ratio of electric field, increased device resolution, thereby improve the performance of electric-field sensor.

Above embodiment is only for illustrating the present invention; and be not limitation of the present invention; the those of ordinary skill in relevant technologies field; without departing from the spirit and scope of the present invention; can also make a variety of changes and modification; therefore all technical schemes that are equal to also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.

Claims (9)

1. a micro field sensor structure, comprises periodically reciprocating movable induction electrode array and fixed fixedly induction electrode array, it is characterized in that:
Movable induction electrode array comprises at least one movable induction electrode unit, by elastic construction, be supported on substrate surface, described movable induction electrode unit comprises a straight polarity electrode and an electrode pair that negative polarity electrode forms, and is respectively the movable induction electrode of positive polarity and the movable induction electrode of negative polarity;
Fixedly induction electrode array comprises at least one fixedly induction electrode unit, by the strong point, be fixed on substrate surface, described fixedly induction electrode unit comprises the electrode pair that a straight polarity electrode and negative polarity electrode form, and is respectively the fixedly fixing induction electrode of induction electrode and negative polarity of positive polarity.
2. micro field sensor structure as claimed in claim 1, is characterized in that, described fixedly induction electrode unit and movable induction electrode unit are with comb teeth-shaped cross arrangement.
3. micro field sensor structure as claimed in claim 1, is characterized in that, in described fixedly induction electrode unit, the polarity of electrode is identical with the polarity of electrode in adjacent described movable induction electrode unit.
4. micro field sensor structure as claimed in claim 1, it is characterized in that, the movable induction electrode of positive polarity and the movable induction electrode of negative polarity that in described movable induction electrode unit, form electrode pair carry out mechanical connection by insulation system, the movable induction electrode of positive polarity and the movable induction electrode of negative polarity can be synchronized with the movement under the driving of drives structure, and keep electrical isolation.
5. micro field sensor structure as claimed in claim 1, is characterized in that, the positive polarity in described fixedly induction electrode unit fixedly induction electrode and negative polarity is fixedly fixed the position of induction electrode, and keeps electrical isolation.
6. micro field sensor structure as claimed in claim 4, it is characterized in that, described insulation system is arranged in the upper surface of the described movable induction electrode movable induction electrode of unit positive polarity and the movable induction electrode of negative polarity, or the side between the movable induction electrode of positive polarity and the movable induction electrode of negative polarity.
7. micro field sensor structure as claimed in claim 1, it is characterized in that, by signal processing circuit, the movable induction electrode of positive polarity and the movable induction electrode of negative polarity in described movable induction electrode unit are carried out to current potential and clamp down on, make the current potential of the two remain on respectively fixed value; By signal processing circuit to positive polarity in described fixedly induction electrode unit fixedly induction electrode and negative polarity induction electrode carry out current potential and clamp down on, make the current potential of the two remain on respectively fixed value.
8. the micro field sensor structure as described in claim 4 or 6, is characterized in that, described insulation system is inorganic material, below any one: silicon dioxide, silicon nitride or silicon oxynitride;
Or organic material, below any one :-polyimide or benzocyclobutene.
9. micro field sensor structure as claimed in claim 1, it is characterized in that, between the movable induction electrode of positive polarity in described movable induction electrode unit and the movable induction electrode of negative polarity or fixedly the fixing fixing all or part of fill insulant in the gap between induction electrode of induction electrode and negative polarity of the positive polarity in induction electrode unit.
CN201310706890.3A 2013-12-19 2013-12-19 A kind of Miniature electric field sensor structure CN103713203B (en)

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CN105911370A (en) * 2016-04-28 2016-08-31 中国科学院电子学研究所 Metal microstructure electric field sensor
CN106093605A (en) * 2016-06-08 2016-11-09 中国科学院电子学研究所 A kind of torsional mode electric-field sensor
CN109212328A (en) * 2018-10-24 2019-01-15 清华大学 High-precision high field intensity capacitance type minitype electric field measurement senser element based on piezoelectric effect
CN109831729A (en) * 2019-01-30 2019-05-31 武汉大学 Compact high sensitivity MEMS capacitive sensor

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CN109831729A (en) * 2019-01-30 2019-05-31 武汉大学 Compact high sensitivity MEMS capacitive sensor

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