CN106090598A - A kind of Disilicoethane storage tank - Google Patents

A kind of Disilicoethane storage tank Download PDF

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Publication number
CN106090598A
CN106090598A CN201610469359.2A CN201610469359A CN106090598A CN 106090598 A CN106090598 A CN 106090598A CN 201610469359 A CN201610469359 A CN 201610469359A CN 106090598 A CN106090598 A CN 106090598A
Authority
CN
China
Prior art keywords
disilicoethane
storage tank
storehouse
sealing
filling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610469359.2A
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Chinese (zh)
Inventor
黄晓东
谢嵩嶽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Xunding Semiconductor Material Technology Co Ltd
Original Assignee
Zhejiang Xunding Semiconductor Material Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang Xunding Semiconductor Material Technology Co Ltd filed Critical Zhejiang Xunding Semiconductor Material Technology Co Ltd
Priority to CN201610469359.2A priority Critical patent/CN106090598A/en
Publication of CN106090598A publication Critical patent/CN106090598A/en
Pending legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C1/00Pressure vessels, e.g. gas cylinder, gas tank, replaceable cartridge
    • F17C1/12Pressure vessels, e.g. gas cylinder, gas tank, replaceable cartridge with provision for thermal insulation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00Details of vessels or of the filling or discharging of vessels
    • F17C13/08Mounting arrangements for vessels
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C5/00Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
    • F17C5/02Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures for filling with liquefied gases

Abstract

The invention discloses a kind of Disilicoethane storage tank, storehouse is filled including sealing, vacuum jacket and bracing frame, it is cylindrical housings that storehouse is filled in described sealing, described housing is vertically fixed on bracing frame, the described top sealing filling storehouse is provided with filling mouth, and the bottom in described sealing filling storehouse is provided with the locating slot of depression.The Disilicoethane storage tank of the application can make storage tank load Disilicoethane under vertical state, ensure the filling effect of storage tank, it is to avoid the generation of the too early flooded condition of storage tank, simultaneously by the design of vacuum jacket, improve the heat insulation effect of Disilicoethane, it is to avoid the impact that Disilicoethane is stored by ambient temperature.

Description

A kind of Disilicoethane storage tank
Technical field
The invention belongs to technical field of chemical, relate to a kind of magnesium silicide and react the dress producing Disilicoethane with ammonium chloride Put, particularly relate to a kind of Disilicoethane storage tank.
Background technology
Disilicoethane is a kind of up-and-coming silicon fiml elder generation body, is one of the most attractive special gas in semi-conductor industry.Can As the good raw material of amorphous si film, photochemistry fibrous raw material and siloxanes etc., in the field such as quasiconductor, photoelectric material Have a wide range of applications and real value.Compared with monosilane, it has, and deposition velocity is fast, temperature requirement is low, film is uniform Spend high superiority.But, the preparation method of existing Disilicoethane mainly because productivity is low, side-product is many, relative complex, be unfavorable for behaviour Make to cause production cost too high, which greatly limits its application.Therefore, development is the simplest, productivity is higher It is the most necessary that synthesis technique and equipment make it industrially obtain larger range of popularization, has highly important practical significance.
Disilicoethane spontaneous combustion in atmosphere, ignition point is room temperature, runs into the just burning of air moment, and is decomposed into SiH4With H2.Burning concentration wide ranges, time more than 0.2%, burning sends flame, time below 0.2%, carries out oxidation reaction and generates white SiO2, the most explosively burn in chlorine, explosively react with halogen gas, as at low temperature, the most moderately carry out halogen Change, with SF6Contact is then exploded, and with carbon tetrachloride and chloroform intense reaction, reacts decomposition with alkali metal and amalgam and generates silane And hydrogen, dissociate H with caustic potash effect2, do not react with pure water and acid, but generate silicate and hydrogen with alkali reaction.Even if from glass Glass dissolves the existence of the trace alkali, Disilicoethane also can be made to hydrolyze.In the presence of KH or LiCl impurity, also delay at room temperature Slowly decompose.
Si2H6—→ SiH4+(SiH2)x
Disilicoethane dissolves in Carbon bisulfide, ethyl alcohol, benzene and ethyl silicic acid.Its corrosion rubber, butter class, lubricating oil, lead etc., but Most metals is not corroded.Prior art Disilicoethane needs to keep relatively low temperature in stowing operation, and in device for filling There is cooling vent in portion, can there is the problem that on cooling vent and other positions, cooling effect is uneven in cooling procedure.
Summary of the invention
It is an object of the invention to overcome the deficiencies in the prior art, it is provided that a kind of Disilicoethane storage tank.
The present invention is achieved through the following technical solutions: a kind of Disilicoethane storage tank, it is characterised in that includes sealing and fills storehouse, Vacuum jacket and bracing frame, it is cylindrical housings that storehouse is filled in described sealing, and the outside of described cylindrical housings is vacuum jacket, Being-30 DEG C of glycol-cooled media in described chuck, described cylindrical housings is vertically fixed on bracing frame, and described sealing is filled The top in storehouse is provided with filling mouth, and the bottom in described sealing filling storehouse is provided with the locating slot of depression.
Further, described filling mouth is connected on feed tube by valve, and described feed tube is coated with heat-insulation layer.
Further, the described volume sealing filling storehouse is 0.5-2M3, preferably 1M3
Further, the described wall thickness sealing filling storehouse is 4-8mm, and internal pressure is 0.3-0.4MPa.
Further, the volume in described vacuum jacket is 0.05-0.2 M3, pressure is 2-10Pa.
The present invention compared with prior art has significant advantage and beneficial effect: mainly facilitate storage tank in vertical state Lower filling Disilicoethane, it is ensured that the filling effect of storage tank, it is to avoid the generation of the too early flooded condition of storage tank, simultaneously by vacuum jacket Design, improves the cooling effect of Disilicoethane, it is to avoid the impact that Disilicoethane is stored by ambient temperature.
Accompanying drawing explanation
Fig. 1 is the structural representation of Disilicoethane storage tank of the present invention.
In figure, 1-seals and fills storehouse, 2-vacuum jacket, 3-bracing frame, 4-filling mouth, 5-locating slot.
Detailed description of the invention
For further appreciating that present disclosure, feature and effect, below in conjunction with drawings and Examples, detailed to the present invention Explanation.
Refering to Fig. 1, a kind of Disilicoethane storage tank, fill storehouse 1, vacuum jacket 2 and bracing frame 3, described sealing including sealing Filling storehouse is cylindrical housings, and the outside of described cylindrical housings is vacuum jacket, is-30 DEG C of glycol-cooled in described chuck Medium, described cylindrical housings is vertically fixed on bracing frame, and the described top sealing filling storehouse 1 is provided with filling mouth 4, described close Packing fills the bottom in storehouse 1 and is provided with the locating slot 5 of depression.
For the ease of understanding the application, the existing silane product manufacturing process by use the application Disilicoethane storage tank is carried out simply Introduce.Described silane product manufacturing process comprises the steps of
A, first generate magnesium silicide with silica flour and magnesium powder,
Si+2Mg------→Mg2Si
B, react with ammonia chloride with magnesium silicide, in the environment of liquefied ammonia and catalyst, generate silanes and magnesium chloride hexammoniate, reaction Formula is:
NH3(l)
Mg2Si+NH4Cl----------------→SinHm+MgCl2•6NH3+H2
Catalyst
Wherein m=2n+2
C, magnesium chloride hexammoniate are a solids product, then obtain magnesium chloride and liquefied ammonia through separating reaction in addition, and liquefied ammonia can be thrown again Enter in above-mentioned processing procedure B and following processing procedure E and use:
MgCl2•6NH3----------→MgCl2+6NH3
D, magnesium chloride also generate magnesium powder and chlorine again through electrolysis, and magnesium powder is solid phase, can put in the A in above-mentioned processing procedure and make With:
MgCl2--------→Mg+Cl2
Electrolysis
E, chlorine generate ammonia chloride with liquefied ammonia synthetic reaction again, and ammonia chloride is put into the B in above-mentioned processing procedure and uses, wherein liquefied ammonia Coming from the C in above-mentioned processing procedure, in other words, the ammonia of processing procedure C generation can use for processing procedure B and E:
Cl2+H2-------→2HCl
NH3+HCl-------→NH4CL
Formula generates in step B the product of silanes from the reactions above, although monosilane and Disilicoethane are all gas, but molecule Amount is had nothing in common with each other, and causes the temperature required difference that liquefies/gasify.Use its physical characteristic different, can respectively obtain through separating Monosilane, Disilicoethane product, to allow the variant paraffinic product side of being individually present be answered different use demand.Specific works process As follows: reactor admixture of gas out enters the rectification tower system of series connection, controls the temperature in rectifying tower, cools to-1200C to-1700C, isolates Disilicoethane: cool to-170 the most again0C to-196 0C, isolates monosilane.The first silicon that will obtain Alkane is warming up to-1700More than C, makes monosilane become gas phase from liquid phase, lowers the temperature, in-180 0C to-1960In C temperature Obtain high-purity monosilane;The Disilicoethane obtained is warming up to-1200More than C, makes Disilicoethane become gas phase from liquid phase, then Lower the temperature again, in-1300C to-1600C temperature obtains high-purity Disilicoethane, high-purity Disilicoethane is sent into Disilicoethane storage tank, After measured, Disilicoethane purity is up to 99.998%.
Embodiment 1
Above-mentioned Disilicoethane storage tank, fills storehouse 1, vacuum jacket 2 and bracing frame 3 including sealing, and described sealing fills storehouse for circle Cylindrical shell, the outside of described cylindrical housings is vacuum jacket, is-30 DEG C of glycol-cooled media in described chuck, described Cylindrical housings is vertically fixed on bracing frame, and the described top sealing filling storehouse 1 is provided with filling mouth 4, and described sealing fills storehouse 1 Bottom be provided with the locating slot 5 of depression.Described filling mouth is connected on feed tube by valve, and described feed tube is coated with insulation Layer.The described volume sealing filling storehouse is 0.5M3.The described wall thickness sealing filling storehouse is 4mm, and internal pressure is 0.3MPa.Institute Stating the volume in vacuum jacket is 0.05M3, pressure is 2Pa.
Embodiment 2
Repeating embodiment 1, difference is, the described volume sealing filling storehouse is 2M3.The wall thickness that storehouse is filled in described sealing is 8mm, internal pressure is 0.4MPa.Volume in described vacuum jacket is 0.2M3, pressure is 10Pa.
Embodiment 3
Repeating embodiment 1, difference is, the described volume sealing filling storehouse is 1M3.The wall thickness that storehouse is filled in described sealing is 6mm.Volume in described vacuum jacket is 0.12M3, pressure is 6Pa.
Embodiment 4
Repeating embodiment 2, difference is, the volume in described vacuum jacket is 0.15M3
Embodiment 5
Repeating embodiment 3, difference is, the described wall thickness sealing filling storehouse is 7mm.
Embodiment 6
Repeating embodiment 4, difference is, the described volume sealing filling storehouse is 1M3
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art Member without departing from the scope of the present invention can in addition some changes, therefore the structure shown in described above comprised and accompanying drawing should It is considered as exemplary, and is not used to limit the protection domain of patent of the present invention.

Claims (6)

1. a Disilicoethane storage tank, it is characterised in that including sealing and fill storehouse, vacuum jacket and bracing frame, described sealing is filled out Filling storehouse is cylindrical housings, and the outside of described cylindrical housings is vacuum jacket, is that-30 DEG C of glycol-cooled are situated between in described chuck Matter, described cylindrical housings is vertically fixed on bracing frame, and the described top sealing filling storehouse is provided with filling mouth, and described sealing is filled out The bottom filling storehouse is provided with the locating slot of depression.
Disilicoethane storage tank the most according to claim 1, it is characterised in that described filling mouth is connected to feed tube by valve On, described feed tube is coated with heat-insulation layer.
Disilicoethane storage tank the most according to claim 1, it is characterised in that it is 0.5-2M that the volume in storehouse is filled in described sealing3
Disilicoethane storage tank the most according to claim 1, it is characterised in that it is 1M that the volume in storehouse is filled in described sealing3
Disilicoethane storage tank the most according to claim 1, it is characterised in that it is 4-8mm that the wall thickness in storehouse is filled in described sealing, interior Portion's pressure is 0.3-0.4MPa.
Disilicoethane storage tank the most according to claim 1, it is characterised in that the volume in described vacuum jacket is 0.05-0.2 M3, pressure is 2-10Pa.
CN201610469359.2A 2016-06-25 2016-06-25 A kind of Disilicoethane storage tank Pending CN106090598A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610469359.2A CN106090598A (en) 2016-06-25 2016-06-25 A kind of Disilicoethane storage tank

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610469359.2A CN106090598A (en) 2016-06-25 2016-06-25 A kind of Disilicoethane storage tank

Publications (1)

Publication Number Publication Date
CN106090598A true CN106090598A (en) 2016-11-09

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5140821A (en) * 1990-12-03 1992-08-25 Westinghouse Electric Corp. Apparatus and methods for thermal protection of liquid containers
WO2007026332A2 (en) * 2005-09-02 2007-03-08 Csir Storage of compressed gaseous fuel
CN101451650A (en) * 2007-12-04 2009-06-10 财团法人金属工业研究发展中心 Carbon dioxide source supplying system
CN203533192U (en) * 2013-09-10 2014-04-09 南京亚格泰新能源材料有限公司 Disilane liquefaction steel cylinder filling device
WO2015110216A1 (en) * 2014-01-24 2015-07-30 Bayerische Motoren Werke Aktiengesellschaft Method for amplifying the vacuum on a vacuum isolated storage container of a vehicle and evacuation station
CN205118649U (en) * 2015-10-21 2016-03-30 南京亚格泰新能源材料有限公司 Disilane liquefaction steel bottle fill device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5140821A (en) * 1990-12-03 1992-08-25 Westinghouse Electric Corp. Apparatus and methods for thermal protection of liquid containers
WO2007026332A2 (en) * 2005-09-02 2007-03-08 Csir Storage of compressed gaseous fuel
CN101451650A (en) * 2007-12-04 2009-06-10 财团法人金属工业研究发展中心 Carbon dioxide source supplying system
CN203533192U (en) * 2013-09-10 2014-04-09 南京亚格泰新能源材料有限公司 Disilane liquefaction steel cylinder filling device
WO2015110216A1 (en) * 2014-01-24 2015-07-30 Bayerische Motoren Werke Aktiengesellschaft Method for amplifying the vacuum on a vacuum isolated storage container of a vehicle and evacuation station
CN205118649U (en) * 2015-10-21 2016-03-30 南京亚格泰新能源材料有限公司 Disilane liquefaction steel bottle fill device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
戴雅康: "《金属材料常用力学性能试验方法》", 31 December 1990, 科学普及出版社 *

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Application publication date: 20161109