CN206036642U - Disilane storage tank - Google Patents
Disilane storage tank Download PDFInfo
- Publication number
- CN206036642U CN206036642U CN201620825790.1U CN201620825790U CN206036642U CN 206036642 U CN206036642 U CN 206036642U CN 201620825790 U CN201620825790 U CN 201620825790U CN 206036642 U CN206036642 U CN 206036642U
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- Prior art keywords
- storage tank
- disilicoethane
- storehouse
- explosion
- sealing
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Abstract
The utility model discloses a disilane storage tank, including the sealed storehouse of filling, the vacuum presss from both sides to be overlapped and the support frame, sealed packing storehouse be cylindrical casing, the casing vertical fixation is on the support frame, sealed top of filling the storehouse is equipped with fills the mouth, sealed lower part of filling the storehouse is equipped with sunken constant head tank. The utility model provides a disilane storage tank can make the storage tank load the disilane under vertical state, guarantees the packing effect of storage tank, avoids the storage tank emergence of the excessive condition that expires too early, presss from both sides the design of overlapping through the vacuum simultaneously, has improved the heat preservation effect of disilane, avoids the influence of ambient temperature to the disilane storage.
Description
Technical field
This utility model belongs to technical field of chemical, is related to a kind of magnesium silicide and reacts production Disilicoethane with ammonium chloride
Device, more particularly to a kind of Disilicoethane storage tank.
Background technology
Disilicoethane is a kind of up-and-coming silicon fiml elder generation body, be in semi-conductor industry quite attractive special gas it
One.Can be used as the good raw material of amorphous si film, photochemistry fibrous raw material and siloxanes etc., in quasiconductor, photoelectric material
Have a wide range of applications in field and real value.Compared with monosilane, it has, and deposition velocity is fast, temperature requirement is low,
The superioritys such as film uniformity height.But, the preparation method of existing Disilicoethane mainly because low yield, side-product are more, relative complex, no
Cause production cost too high beneficial to operation, which greatly limits its application.Therefore, develop more simple, yield
Higher synthesis technique and equipment make its industrially obtain it is larger range of promote it is very necessary, with highly important reality
Meaning.
Disilicoethane spontaneous combustion in atmosphere, ignition point is room temperature, runs into air moment and just burns, and is decomposed into SiH4And H2。
Burning concentration wide ranges, when more than 0.2%, burning sends flame, when below 0.2%, carries out oxidation reaction and generates white
SiO2, also explosively burn in chlorine, explosively react with halogen gas, such as in low temperature, then moderately carry out halogenation,
With SF6Contact is then exploded, and carbon tetrachloride and chloroform intense reaction, decompose with alkali metal and amalgam reaction generate silane and
Hydrogen, acts on the H that dissociates with caustic potash2, do not react with pure water and acid, but silicate and hydrogen is generated with alkali reaction.Even if from glass
The middle presence for dissolving the micro alkali for, hydrolyzes also can Disilicoethane.It is in the presence of KH or LiCl impurity, also slow in room temperature
Decompose on ground.
Si2H6—→ SiH4+(SiH2)x
Disilicoethane dissolves in Carbon bisulfide, ethyl alcohol, benzene and ethyl silicic acid.It corrodes rubber, butter class, lubricating oil, lead
Deng, but most metals are not corroded.Prior art Disilicoethane needs to keep in stowing operation relatively low temperature, and fills dress
Put inside and there is cooling vent, can there is a problem of that in cooling procedure cooling effect is uneven in cooling vent and other positions.
Utility model content
The purpose of this utility model is to overcome the deficiencies in the prior art, there is provided a kind of Disilicoethane storage tank.
This utility model is achieved through the following technical solutions：A kind of Disilicoethane storage tank, it is characterised in that including sealing filling
Storehouse, vacuum jacket and bracing frame, described sealing filling storehouse is cylindrical housings, and the outside of the cylindrical housings is vacuum clip
It is -30 DEG C of glycol-cooled media in set, the chuck, the cylindrical housings are vertically fixed on bracing frame, the sealing
Filling mouth is provided with the top of filling storehouse, and the bottom in the sealing filling storehouse is provided with the locating slot of depression.
Further, the filling mouth is connected on feed tube by valve, and the feed tube is coated with heat-insulation layer.
Further, the volume in the sealing filling storehouse is 0.5-2M3, preferably 1M3。
Further, the wall thickness in the sealing filling storehouse is 4-8mm, and internal pressure is 0.3-0.4MPa.
Further, the volume in the vacuum jacket is 0.05-0.2 M3, pressure is 2-10Pa.
Further, explosion-proof lamp is set in the sealing filling storehouse and/or vacuum jacket.
Further, the explosion-proof lamp is metal explosion-proof material, metal alloy explosion-proof lamp, non-metal explosion-proof material or logical
Cross Web materials prepared by one or a combination set of material that metal, nonmetallic paint-on technique are obtained.
Further, the explosion-proof lamp is reticulated polyurethane foam.
The metal explosion-proof material, metal alloy explosion-proof lamp include aluminum, titanium, magnesium, ferrum, copper or its alloy, and for example, aluminum is closed
Web materials prepared by gold.
This utility model has significant advantage and beneficial effect compared with prior art：Mainly facilitate storage tank vertical
Disilicoethane is loaded under state, it is ensured that the filling effect of storage tank, it is to avoid the generation of the too early flooded condition of storage tank, while passing through vacuum clip
The design of set, improves the cooling effect of Disilicoethane, it is to avoid the impact that ambient temperature is stored to Disilicoethane.
Description of the drawings
Structural representations of the Fig. 1 for this utility model Disilicoethane storage tank.
In figure, 1- sealing fillings storehouse, 2- vacuum jackets, 3- bracing frames, 4- filling mouths, 5- locating slots.
Specific embodiment
For further appreciating that content of the present utility model, feature and effect, below in conjunction with drawings and Examples, to this practicality
New detailed description.
Refering to Fig. 1, a kind of Disilicoethane storage tank, including sealing filling storehouse 1, vacuum jacket 2 and bracing frame 3, described sealing
Filling storehouse is cylindrical housings, and the outside of the cylindrical housings is vacuum jacket, is -30 DEG C of glycol-cooleds in the chuck
Medium, the cylindrical housings are vertically fixed on bracing frame, and the top in the sealing filling storehouse 1 is provided with filling mouth 4, described close
Packing fills the locating slot 5 that the bottom in storehouse 1 is provided with depression.In the sealing filling storehouse and/or vacuum jacket, explosion-proof lamp, institute are set
Stating explosion-proof lamp is metal explosion-proof material, alloy explosion-proof lamp, non-metal explosion-proof material or passes through metal, nonmetallic paint-on technique
One or a combination set of material of acquisition；The metal explosion-proof material, alloy explosion-proof lamp include aluminum, titanium, magnesium, ferrum, copper or its conjunction
Web materials prepared by gold, the non-metal explosion-proof material are prepared from by reticulated polyurethane foam.
For the ease of understanding the application, now carried out simply using the silane product manufacturing process of the application Disilicoethane storage tank
Introduce.The silane product manufacturing process is comprised the steps of：
A, magnesium silicide is generated with silica flour and magnesium powder first,
Si+2Mg------→Mg2Si
B, reacted with magnesium silicide and ammonia chloride, in the environment of liquefied ammonia and catalyst, generate silanes and magnesium chloride hexammoniate,
Reaction equation is：
NH3（l）
Mg2Si+NH4Cl----------------→SinHm+MgCl2•6NH3 +H2
Catalyst
Wherein m=2n+2
C, magnesium chloride hexammoniate are a solids product, then Jing is separated reaction and obtains magnesium chloride and liquefied ammonia, and liquefied ammonia can be with
Used in putting into above-mentioned processing procedure B and following processing procedure E again：
MgCl2•6NH3----------→MgCl2+6NH3
D, magnesium chloride and again Jing electrolysis and generate magnesium powder and chlorine, magnesium powder is solid phase, can be put in the A in above-mentioned processing procedure
Use：
MgCl2--------→Mg+Cl2
Electrolysis
E, chlorine generate ammonia chloride again with liquefied ammonia synthetic reaction, and the B that ammonia chloride is able to put in above-mentioned processing procedure is used, wherein
Liquefied ammonia comes from the C in above-mentioned processing procedure, and in other words, the ammonia of processing procedure C generations can be used for processing procedure B and E：
Cl2+H2-------→2HCl
NH3+HCl-------→NH4CL
Generate the product of silanes from the reactions above in formula in step B, although monosilane and Disilicoethane are all gas,
Molecular weight is had nothing in common with each other, and causes the temperature required difference of liquefaction/gasification.It is different with its physical characteristic, can be respectively through separating
Monosilane, Disilicoethane product is obtained, should different use demands to allow the variant paraffinic product side of being individually present to be able to.Specific works
Process is as follows：Reactor admixture of gas out enters the rectification tower system of series connection, controls the temperature in rectifying tower, cooling
To -120 DEG C to -170 DEG C, Disilicoethane is isolated：Then -170 DEG C to -196 DEG C are cooled to again, isolate monosilane.Will
To monosilane be warming up to more than -170 DEG C, make monosilane become gas phase from liquid phase, then lower the temperature again, in -180 DEG C to -196
High-purity monosilane is obtained in DEG C temperature；The Disilicoethane for obtaining is warming up to into -120 more than 0C, makes Disilicoethane become gas from liquid phase
Phase, then lowers the temperature again, obtains high-purity Disilicoethane in -130 DEG C to -160 DEG C temperature, and high-purity Disilicoethane is sent into second silicon
Alkane storage tank, Jing are determined, and Disilicoethane purity is up to 99.998%.
Embodiment 1
Above-mentioned Disilicoethane storage tank, including sealing filling storehouse 1, vacuum jacket 2 and bracing frame 3, described sealing filling storehouse
For cylindrical housings, the outside of the cylindrical housings is vacuum jacket, is -30 DEG C of glycol-cooled media in the chuck,
The cylindrical housings are vertically fixed on bracing frame, and the top in the sealing filling storehouse 1 is provided with filling mouth 4, and the sealing is filled out
The bottom for filling storehouse 1 is provided with the locating slot 5 of depression.The filling mouth is connected on feed tube by valve, the feed tube cladding
There is heat-insulation layer.The volume in the sealing filling storehouse is 0.5M3.The wall thickness in the sealing filling storehouse is 4mm, and internal pressure is
0.3MPa.Volume in the vacuum jacket is 0.05M3, pressure is 2Pa.
Embodiment 2
Repeat embodiment 1, difference is that the volume in the sealing filling storehouse is 2M3.The wall in the sealing filling storehouse
Thick is 8mm, and internal pressure is 0.4MPa.Volume in the vacuum jacket is 0.2M3, pressure is 10Pa.In the vacuum clip
Explosion-proof lamp is set in set, and the explosion-proof lamp is metal explosion-proof material, and the metal explosion-proof material is Web materials.
Embodiment 3
Repeat embodiment 1, difference is that the volume in the sealing filling storehouse is 1M3.The wall in the sealing filling storehouse
Thick is 6mm.Volume in the vacuum jacket is 0.12M3, pressure is 6Pa.Set in the sealing filling storehouse and vacuum jacket
Explosion-proof lamp is put, the explosion-proof lamp is non-metal explosion-proof material, the non-metal explosion-proof material is reticulated polyurethane foam material
Material.
Embodiment 4
Repeat embodiment 2, difference is that the volume in the vacuum jacket is 0.15M3.In the sealing
Filling arranges explosion-proof lamp in storehouse, and the explosion-proof lamp is metal alloy explosion-proof lamp.
Embodiment 5
Repeat embodiment 3, difference is that the wall thickness in the sealing filling storehouse is 7mm.Set in the vacuum jacket
Explosion-proof lamp is put, the explosion-proof lamp is the net anti-explosion material obtained by metallic coating technique.
Embodiment 6
Repeat embodiment 4, difference is that the volume in the sealing filling storehouse is 1M3.In the sealing filling storehouse
Explosion-proof lamp is set, and the explosion-proof lamp is aluminium alloy explosion-proof lamp.
The above is only preferred implementation of the present utility model, it is noted that for the common skill of the art
Art personnel without departing from scope of the present utility model can some changes in addition, therefore shown in described above included and accompanying drawing
Structure should be regarded as it is exemplary, and be not used to limit this utility model patent protection domain.
Claims (8)
1. a kind of Disilicoethane storage tank, it is characterised in that including sealing filling storehouse, vacuum jacket and bracing frame, described sealing is filled out
It is cylindrical housings to fill storehouse, and the outside of the cylindrical housings is vacuum jacket, is situated between for -30 DEG C of glycol-cooleds in the chuck
Matter, the cylindrical housings are vertically fixed on bracing frame, are provided with filling mouth at the top of the sealing filling storehouse, and the sealing is filled out
The bottom for filling storehouse is provided with the locating slot of depression, arranges explosion-proof lamp in the sealing filling storehouse or vacuum jacket, or described close
Packing fills.
2. Disilicoethane storage tank according to claim 1, it is characterised in that the filling mouth is connected to feed tube by valve
On, the feed tube is coated with heat-insulation layer.
3. Disilicoethane storage tank according to claim 1, it is characterised in that the volume in the sealing filling storehouse is 0.5-2M3。
4. Disilicoethane storage tank according to claim 1, it is characterised in that the volume in the sealing filling storehouse is 1M3。
5. Disilicoethane storage tank according to claim 1, it is characterised in that the wall thickness in the sealing filling storehouse is 4-8mm, interior
Portion's pressure is 0.3-0.4MPa.
6. Disilicoethane storage tank according to claim 1, it is characterised in that the volume in the vacuum jacket is 0.05-0.2
M3, pressure is 2-10Pa.
7. Disilicoethane storage tank according to claim 1, it is characterised in that the explosion-proof lamp is metal explosion-proof material, gold
Web materials prepared by category alloy explosion-proof lamp or non-metal explosion-proof material.
8. Disilicoethane storage tank according to claim 1, it is characterised in that the explosion-proof lamp is reticulated polyurethane foam material
Material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620825790.1U CN206036642U (en) | 2016-08-02 | 2016-08-02 | Disilane storage tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620825790.1U CN206036642U (en) | 2016-08-02 | 2016-08-02 | Disilane storage tank |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206036642U true CN206036642U (en) | 2017-03-22 |
Family
ID=58308043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620825790.1U Active CN206036642U (en) | 2016-08-02 | 2016-08-02 | Disilane storage tank |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206036642U (en) |
-
2016
- 2016-08-02 CN CN201620825790.1U patent/CN206036642U/en active Active
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