CN201857259U - Lamp cap for synthetic furnace of hydrogen chloride - Google Patents
Lamp cap for synthetic furnace of hydrogen chloride Download PDFInfo
- Publication number
- CN201857259U CN201857259U CN2011200526930U CN201120052693U CN201857259U CN 201857259 U CN201857259 U CN 201857259U CN 2011200526930 U CN2011200526930 U CN 2011200526930U CN 201120052693 U CN201120052693 U CN 201120052693U CN 201857259 U CN201857259 U CN 201857259U
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- hydrogen chloride
- graphite
- synthetic furnace
- lamp holder
- shell
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Abstract
The utility model discloses a lamp cap for a synthetic furnace of hydrogen chloride, comprising a lamp cap base and a multi-sleeve spray nozzle (3) connected on the lamp cap base, wherein the lamp cap base comprises a shell (1) and a graphite lining (2), the shell is made of metal materials, and the multi-sleeve spray nozzle (3) is made of carbon-carbon composite materials. The lamp cap has extremely strong corrosion resistance, can effectively enhance the strength of the lamp cap and is easy to be produced and implemented due to the simple structure.
Description
Technical field
The utility model relates to a kind of combustion reactor lamp holder, is specifically related to a kind of hydrogen chloride synthetic furnace lamp holder.
Background technology
As the manufacture method of the high-purity polycrystalline silicon of semiconductor material, at present most widely used is the improvement Siemens Method.The detailed process of improvement Siemens Method is as follows: with high-purity chlorine and hydrogen at hydrogen chloride synthetic furnace internal reaction synthesising hydrogen, hydrogenchloride and industrial silica fume be synthesizing trichlorosilane at high temperature, to after the trichlorosilane purification rectifying, in hydrogen reduction furnace, carry out CVD (chemical gaseous phase deposition method) reaction again and produce high purity polycrystalline silicon then.Most this methods that adopt of domestic and international existing polysilicon factory are produced solar level and electronic-grade polycrystalline silicon.One of pilot process of this method is exactly that hydrogenchloride is synthetic.
Hydrogenchloride is synthetic to be that chlorine and hydrogen are fed hydrogen chloride synthetic furnace in proportion, and the mixed firing in hydrogen chloride synthetic furnace of chlorine and hydrogen generates hydrogen chloride gas.About 350 ℃ of the temperature of reaction of use chlorine and hydrogen synthesising hydrogen, the materials such as free chlorine that produce in reaction raw materials chlorine, reaction product hydrogenchloride and the reaction process all have severe corrosive, to Reaktionsofen, charging lamp holder particularly the nozzle material higher corrosion-resistant requirement is arranged.And hydrogen mixes with chlorine can form explosion gas, because of hydrogen flowing quantity fluctuation, chlorine flowrate fluctuation, mishandle etc. cause tempering, nozzle is burst in the reaction process.In order to improve per unit area yield, need to improve reaction pressure simultaneously, this just has higher requirement to the intensity and the lamp holder intensity of reactor.And existing hydrogen chloride synthetic furnace can not satisfy above-mentioned requirements.
The utility model content
Technical problem to be solved in the utility model is at above shortcomings in the prior art, a kind of hydrogen chloride synthetic furnace lamp holder is provided, this lamp holder has extremely strong corrosion resistance characteristic, and can effectively improve the intensity of lamp holder, it is simple in structure, be convenient to produce and implement, thereby can reduce the cost of equipment maintenance that causes because of corrosion and tempering etc.
The technical scheme that solution the utility model technical problem is adopted is that this hydrogen chloride synthetic furnace lamp holder comprises bulb socket and the many shell types nozzle that is connected on the bulb socket, described bulb socket comprises shell and graphite lining, described shell adopts metallic substance to make, and described many shell types nozzle adopts carbon-carbon composite to make.
Preferably, described graphite lining covers on the inwall of shell, and the graphite lining all covers the inwall of shell.Because graphite lining stability is strong, the inwall that covers whole bulb socket shell can prolong the work-ing life of lamp holder greatly.
Further preferably, the gap between described many shell types nozzle and the graphite lining also is provided with graphite-filled layer, and described graphite-filled layer adopts Graphite Powder 99 and graphite caking agent to be mixed and made into.By graphite-filled layer is set, being connected between graphite-filled layer and the many shell types nozzle is bonding, its adhesiveproperties is good, and it is bonding easy, manufacturing cost is lower, thereby can reduce the manufacture difficulty of lamp holder, and can offset the thermal stresses that produces in the reaction process to greatest extent, improve lamp holder intensity and stopping property.
More preferably, described bulb socket and hydrogen chloride synthetic furnace flange connecting face are provided with the graphite lining.
Preferably, described many shell types nozzle comprises from inside to outside three sleeve pipes of suit successively, be inner sleeve, middle sleeve and outer tube, described inner sleeve, middle sleeve and outer tube all adopt carbon-carbon composite to make, by in described inner sleeve and outer tube, feeding hydrogen, feed chlorine in the described middle sleeve, can make combustion reactions more steady and reduce the generation of free chlorine.
In the utility model, because many shell types nozzle adopts the carbon-carbon composite of high-strength corrosion-resisting to make, and carbon-carbon composite has high corrosion resistance nature and intensity, thereby when satisfying corrosion-resistant requirement, have high intensity, thereby can effectively prolong work-ing life of lamp holder and maintenance intervals, reduction use cost.
Description of drawings
Fig. 1 is the structural representation of a specific embodiment of the utility model.
Among the figure: the 1-shell; 2-graphite lining; Many shell types of 3-nozzle; The graphite-filled layer of 4-.
Embodiment
For making those skilled in the art understand the technical solution of the utility model better, the utility model hydrogen chloride synthetic furnace lamp holder is described in further detail below in conjunction with accompanying drawing.
As shown in Figure 1, in the present embodiment, this hydrogen chloride synthetic furnace lamp holder comprises bulb socket and the many shell types nozzle 3 that is connected on the bulb socket, and described bulb socket comprises shell 1 and graphite lining 2, and graphite lining 2 covers on the inwall of shell 1.In the present embodiment, graphite lining 2 covers the inside of whole casing, comprises and hydrogen chloride synthetic furnace flange connecting face, all adopts graphite or carbon-carbon composite thereby lamp holder is inner with the hydrogen chloride gas contact part, and corrosion resistance nature is splendid.
Gap between described many shell types nozzle 3 and the graphite lining 2 is provided with graphite-filled layer 4.Like this, whole lamp holder is followed successively by shell 1, graphite lining 2, graphite-filled layer 4 and many shell types nozzle 3 from outside to inside.
In the present embodiment, shell 1 adopts metallic substance to make, and many shell types nozzle 3 adopts the corrosion-resistant carbon-carbon composite of three floor height intensity to make.Described graphite-filled layer 4 adopts Graphite Powder 99 and graphite caking agent to be mixed and made into, and has prolonged the work-ing life of hydrogen chloride synthetic furnace lamp holder greatly.
Described many shell types nozzle 3 comprises from inside to outside three sleeve pipes of suit successively, be inner sleeve, middle sleeve and outer tube, wherein inner sleeve, middle sleeve and outer tube all adopt carbon-carbon composite to make, and feed hydrogen in described inner sleeve and the outer tube, feed chlorine in the described middle sleeve.In inner sleeve and outer tube, feed hydrogen, in middle sleeve, feed chlorine, can make combustion reactions more steady and reduce the generation of free chlorine.
By above detailed description to the utility model embodiment, can understand many shell types nozzle 3 that the utility model adopts the high strength carbon-carbon composite to make, have high corrosion resistance nature and intensity, can increase the service life, prolong the maintenance of the equipment cycle, reduce use cost; This many shell types nozzle 3 is made separately, and itself and graphite-filled layer 4 are bonding, and its adhesiveproperties is good, and manufacturing cost is lower, can offset the thermal stresses that produces in the reaction process to greatest extent simultaneously, improves lamp holder intensity and stopping property.Graphite lining 2 stability are strong, cover whole bulb socket inside, can prolong the work-ing life of lamp holder.
Be understandable that above embodiment only is the illustrative embodiments that adopts for principle of the present utility model is described, yet the utility model is not limited thereto.For those skilled in the art, under the situation that does not break away from spirit of the present utility model and essence, can make various modification and improvement, these modification and improvement also are considered as protection domain of the present utility model.
Claims (5)
1. hydrogen chloride synthetic furnace lamp holder, comprise bulb socket and the many shell types nozzle (3) that is connected on the bulb socket, it is characterized in that described bulb socket comprises shell (1) and graphite lining (2), described shell (1) adopts metallic substance to make, and described many shell types nozzle (3) adopts carbon-carbon composite to make.
2. hydrogen chloride synthetic furnace lamp holder according to claim 1 is characterized in that described graphite lining (2) covers on the inwall of shell (1).
3. hydrogen chloride synthetic furnace lamp holder according to claim 2, it is characterized in that the gap between described many shell types nozzle (3) and the graphite lining (2) is provided with graphite-filled layer (4), described graphite-filled layer (4) adopts Graphite Powder 99 and graphite caking agent to be mixed and made into.
4. hydrogen chloride synthetic furnace lamp holder according to claim 1 is characterized in that described bulb socket and hydrogen chloride synthetic furnace flange connecting face are provided with graphite lining (2).
5. according to the described hydrogen chloride synthetic furnace lamp holder of one of claim 1-4, it is characterized in that described many shell types nozzle (3) comprises from inside to outside three sleeve pipes of suit successively, be inner sleeve, middle sleeve and outer tube, described inner sleeve, middle sleeve and outer tube all adopt carbon-carbon composite to make, feed hydrogen in described inner sleeve and the outer tube, feed chlorine in the described middle sleeve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200526930U CN201857259U (en) | 2011-03-02 | 2011-03-02 | Lamp cap for synthetic furnace of hydrogen chloride |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200526930U CN201857259U (en) | 2011-03-02 | 2011-03-02 | Lamp cap for synthetic furnace of hydrogen chloride |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201857259U true CN201857259U (en) | 2011-06-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200526930U Expired - Fee Related CN201857259U (en) | 2011-03-02 | 2011-03-02 | Lamp cap for synthetic furnace of hydrogen chloride |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201857259U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107200303A (en) * | 2017-05-25 | 2017-09-26 | 大同宇林德石墨设备股份有限公司 | A kind of hydrogen chloride synthesis graphite furnace burner |
| CN115367707A (en) * | 2022-08-24 | 2022-11-22 | 湖北兴福电子材料股份有限公司 | Production method of ultra-pure electronic grade hydrogen chloride and electronic grade hydrochloric acid |
-
2011
- 2011-03-02 CN CN2011200526930U patent/CN201857259U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107200303A (en) * | 2017-05-25 | 2017-09-26 | 大同宇林德石墨设备股份有限公司 | A kind of hydrogen chloride synthesis graphite furnace burner |
| CN107200303B (en) * | 2017-05-25 | 2020-05-12 | 大同宇林德石墨新材料股份有限公司 | Combustion device for hydrogen chloride synthetic graphite furnace |
| CN115367707A (en) * | 2022-08-24 | 2022-11-22 | 湖北兴福电子材料股份有限公司 | Production method of ultra-pure electronic grade hydrogen chloride and electronic grade hydrochloric acid |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: XINTE ENERGY CO., LTD. Free format text: FORMER NAME: TBEA XINJIANG SILICON INDUSTRY CO., LTD. |
|
| CP03 | Change of name, title or address |
Address after: 830011, room 716, Mustang building, No. 158, Kunming Road, the Xinjiang Uygur Autonomous Region, Urumqi Patentee after: Xinte Energy Co.,Ltd. Address before: 830011, Mustang business club No. 158, Kunming Road, 717, the Xinjiang Uygur Autonomous Region, Urumqi Patentee before: TBEA Xinjiang Silicon Industry Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110608 Termination date: 20200302 |