CN203533192U - Disilane liquefaction steel cylinder filling device - Google Patents
Disilane liquefaction steel cylinder filling device Download PDFInfo
- Publication number
- CN203533192U CN203533192U CN201320559464.7U CN201320559464U CN203533192U CN 203533192 U CN203533192 U CN 203533192U CN 201320559464 U CN201320559464 U CN 201320559464U CN 203533192 U CN203533192 U CN 203533192U
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- CN
- China
- Prior art keywords
- disilane
- steel cylinder
- seal casinghousing
- liquefaction
- filling apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a disilane liquefaction steel cylinder filling device. The filling device has an airtight tank structure and comprises an airtight housing, a sealing cover and a refrigerating machine, wherein the refrigerating machine is connected with a venthole in the side of the airtight housing, an electronic weighing board is arranged at the bottom of the airtight housing, two steel cylinder fixing frames are arranged on the electronic weighing board, and a switch-over valve is arranged on the side surface opposite to the venthole in the airtight housing. According to the disilane liquefaction steel cylinder filling device, the operation is extremely simple and convenient, the filling efficiency is extremely high, the equipment failure rate is low, the safety is improved, the equipment investment is reduced, and the filling is rapid.
Description
Technical field
The utility model relates to the Filling apparatus field of steel cylinder, relates in particular to a kind of Filling apparatus of disilane liquefaction steel cylinder.
Background technique
Disilane molecular formula: Si
2h
6, molecular weight: 62.2, fusing point :-132.5 ℃, boiling point :-14.15 ℃ (during 1 atm).Disilane (Si
2h
6) be water white gas at normal temperatures and pressures, meeting air can spontaneous combustion, and its saturation vapour pressure is 0.5MPa at normal temperatures, and the disilane of high-purity 99.995% is applied to the high-end chip manufacturing below vlsi circuit 20 nanometers.The current whole world is the U.S., Japan and Korea S San Jia manufacturing enterprise only, and domestic is blank.According to interrelated data, domesticly to similar special gas, conventionally adopt compressor boost to fill technology, the quantity of equipment is many, and valve is many, and pipeline is many, and joint is many, and the rate that breaks down is higher, leaks the also corresponding increase of probability of the security incident causing.
Model utility content
For the problem of above-mentioned existence, the Filling apparatus of the disilane liquefaction steel cylinder that the utility model object is to provide simple and practical.
In order to achieve the above object, the technical solution adopted in the utility model is as follows: a kind of disilane liquefaction steel cylinder Filling apparatus, described Filling apparatus is the tank structure of sealing, comprise seal casinghousing, sealing cover and refrigerator, described refrigerator is connected with the vent of seal casinghousing side, and the bottom of described seal casinghousing is provided with electronic weighing plate, described electronic weighing plate is provided with two tank brackets, the vent of described seal casinghousing side is provided with to switching valve.
As a kind of improvement of the present utility model, threaded gas port is established at the top of described switching valve, and the outside of described gas port is provided with the fixedly steel loop structure with seal ring; By worm structure, stablize and connect steel cylinder structure, by the fixedly steel loop sealing structure with seal ring, be fixedly connected with position, prevent the leakage of disilane, good sealing effect.
As a kind of improvement of the present utility model, described seal casinghousing is provided with electronic control screen, described electronic control screen via line is connected on electronic weighing plate, the quality that can show intuitively the disilane of filling in steel cylinder by electronic display, bagging weight requirement that can be different according to client, convenient adjustment at any time.
As a kind of improvement of the present utility model, the bottom of described seal casinghousing and refrigerator is provided with roller structure, by roller structure, can conveniently move and carry this covering device, efficient and convenient.
The utility model has the advantage of: the physical property of utilizing disilane low-temperature liquefaction of the present utility model, by refrigerator, regulate the temperature environment in Filling apparatus, simplified process route, without practical booster compressor, reduced number of devices, valve quantity and pipe joint quantity, improved Security, saved cost, bagging weight requirement that can be different according to client, at any time convenient adjustment.
Accompanying drawing explanation
Fig. 1 is the utility model structure diagram;
Wherein, 1 seal casinghousing, 2 switching valves, 3 sealing covers, 4 tank brackets, 5 electronic weighing plates, 6 roller structures, 7 refrigerators, 8 electronic control screens, 9 vents, 10 gas ports, 11 fixing steel loop structures.
Embodiment
Below in conjunction with accompanying drawing explanation and embodiment, the utility model is described in further detail.
embodiment 1:as shown in Figure 1, a kind of disilane liquefaction steel cylinder Filling apparatus, described Filling apparatus is the tank structure of sealing, comprise seal casinghousing 1, sealing cover 3 and refrigerator 7, described refrigerator 7 is connected with the vent 9 of seal casinghousing 1 side, and the bottom of described seal casinghousing 1 is provided with electronic weighing plate 5, described electronic weighing plate 5 is provided with two tank brackets 4, the vent of described seal casinghousing to side be provided with switching valve 2.By refrigerator 7, the temperature in seal casinghousing 1 is adjusted to-20 ℃, by the gas phase disilane being stored in pans, by pipeline, is directly filled with in the packaging steel cylinder in seal casinghousing, simple to operation.
embodiment 2:as shown in Figure 1, threaded gas port 10 is established at the top of described switching valve 2, and the outside of described gas port 10 is provided with the fixedly steel loop structure 11 with seal ring; By worm structure, stablize and connect steel cylinder structure, by the position that is sealedly and fixedly connected of the fixedly steel loop structure 11 with seal ring, prevent the leakage of disilane, good sealing effect.
embodiment 3:as shown in Figure 1, described seal casinghousing 1 is provided with electronic control screen 8, described electronic control is shielded 8 via line and is connected on electronic weighing plate 5, the quality that can show intuitively the disilane of filling in steel cylinder by electronic display 8, bagging weight requirement that can be different according to client, convenient adjustment at any time.
embodiment 4:as shown in Figure 1, the bottom of described seal casinghousing 1 and refrigerator 7 is provided with roller structure 6, by roller structure 6, can conveniently move and carry this covering device, efficient and convenient.
It should be noted that, above-mentioned is only preferred embodiment of the present utility model, is not used for limiting protection domain of the present utility model, and the equivalents of having done on the basis of above-described embodiment all belongs to protection domain of the present utility model.
Claims (4)
1. disilane liquefaction steel cylinder Filling apparatus, described Filling apparatus is the tank structure of sealing, it is characterized in that, comprise seal casinghousing, sealing cover and refrigerator, described refrigerator is connected with the vent of seal casinghousing side, and the bottom of described seal casinghousing is provided with electronic weighing plate, described electronic weighing plate is provided with two tank brackets, the vent of described seal casinghousing side is provided with to switching valve.
2. disilane liquefaction steel cylinder Filling apparatus according to claim 1, is characterized in that, threaded gas port is established at the top of described switching valve, and the outside of described gas port is provided with the fixedly steel loop structure with seal ring.
3. disilane liquefaction steel cylinder Filling apparatus according to claim 1, is characterized in that, described seal casinghousing is provided with electronic control screen, and described electronic control screen via line is connected on electronic weighing plate.
4. disilane liquefaction steel cylinder Filling apparatus according to claim 1, is characterized in that, the bottom of described seal casinghousing and refrigerator is provided with roller structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320559464.7U CN203533192U (en) | 2013-09-10 | 2013-09-10 | Disilane liquefaction steel cylinder filling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320559464.7U CN203533192U (en) | 2013-09-10 | 2013-09-10 | Disilane liquefaction steel cylinder filling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203533192U true CN203533192U (en) | 2014-04-09 |
Family
ID=50419397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320559464.7U Expired - Fee Related CN203533192U (en) | 2013-09-10 | 2013-09-10 | Disilane liquefaction steel cylinder filling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203533192U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106090598A (en) * | 2016-06-25 | 2016-11-09 | 浙江迅鼎半导体材料科技有限公司 | A kind of Disilicoethane storage tank |
-
2013
- 2013-09-10 CN CN201320559464.7U patent/CN203533192U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106090598A (en) * | 2016-06-25 | 2016-11-09 | 浙江迅鼎半导体材料科技有限公司 | A kind of Disilicoethane storage tank |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140409 Termination date: 20140910 |
|
| EXPY | Termination of patent right or utility model |