CN106083035A - 一种使用纳米钛酸钡陶瓷制备的压电式加速度传感器 - Google Patents
一种使用纳米钛酸钡陶瓷制备的压电式加速度传感器 Download PDFInfo
- Publication number
- CN106083035A CN106083035A CN201610458933.4A CN201610458933A CN106083035A CN 106083035 A CN106083035 A CN 106083035A CN 201610458933 A CN201610458933 A CN 201610458933A CN 106083035 A CN106083035 A CN 106083035A
- Authority
- CN
- China
- Prior art keywords
- sample
- nano barium
- annealing
- heated
- annealing furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 54
- MTZOKGSUOABQEO-UHFFFAOYSA-L barium(2+);phthalate Chemical compound [Ba+2].[O-]C(=O)C1=CC=CC=C1C([O-])=O MTZOKGSUOABQEO-UHFFFAOYSA-L 0.000 title claims abstract description 31
- 230000001133 acceleration Effects 0.000 title claims abstract description 16
- 229910002113 barium titanate Inorganic materials 0.000 claims abstract description 21
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims abstract description 21
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 18
- 238000001514 detection method Methods 0.000 claims abstract description 4
- 238000004519 manufacturing process Methods 0.000 claims abstract description 4
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 4
- 238000000137 annealing Methods 0.000 claims description 44
- 238000000034 method Methods 0.000 claims description 21
- 238000010438 heat treatment Methods 0.000 claims description 17
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 15
- 239000010439 graphite Substances 0.000 claims description 15
- 229910052903 pyrophyllite Inorganic materials 0.000 claims description 15
- 229910052582 BN Inorganic materials 0.000 claims description 12
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 12
- 241000209456 Plumbago Species 0.000 claims description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- 239000001301 oxygen Substances 0.000 claims description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 6
- 229910000831 Steel Inorganic materials 0.000 claims description 6
- 229910052709 silver Inorganic materials 0.000 claims description 6
- 239000004332 silver Substances 0.000 claims description 6
- 239000010959 steel Substances 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 239000005030 aluminium foil Substances 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000036772 blood pressure Effects 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 238000011049 filling Methods 0.000 claims description 3
- 239000012634 fragment Substances 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000000843 powder Substances 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 238000005245 sintering Methods 0.000 description 12
- 239000013078 crystal Substances 0.000 description 7
- 238000011161 development Methods 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- VKJLWXGJGDEGSO-UHFFFAOYSA-N barium(2+);oxygen(2-);titanium(4+) Chemical compound [O-2].[O-2].[O-2].[Ti+4].[Ba+2] VKJLWXGJGDEGSO-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000008358 core component Substances 0.000 description 2
- 238000000280 densification Methods 0.000 description 2
- 230000005621 ferroelectricity Effects 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 239000011858 nanopowder Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005056 compaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009770 conventional sintering Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000007306 functionalization reaction Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000013517 stratification Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
- C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
- C04B35/465—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates
- C04B35/468—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610458933.4A CN106083035B (zh) | 2016-06-22 | 2016-06-22 | 一种使用纳米钛酸钡陶瓷制备的压电式加速度传感器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610458933.4A CN106083035B (zh) | 2016-06-22 | 2016-06-22 | 一种使用纳米钛酸钡陶瓷制备的压电式加速度传感器 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106083035A true CN106083035A (zh) | 2016-11-09 |
CN106083035B CN106083035B (zh) | 2018-11-02 |
Family
ID=57239017
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610458933.4A Active CN106083035B (zh) | 2016-06-22 | 2016-06-22 | 一种使用纳米钛酸钡陶瓷制备的压电式加速度传感器 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN106083035B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109632157A (zh) * | 2018-12-07 | 2019-04-16 | 哈尔滨工程大学 | 一种螺栓结合面动态应力监测装置 |
CN110470373A (zh) * | 2019-08-16 | 2019-11-19 | 东南大学 | 一种双向桥梁振动监测装置 |
CN116845152A (zh) * | 2023-07-25 | 2023-10-03 | 江西兆驰半导体有限公司 | 一种led芯片制备方法及led芯片 |
CN118145995A (zh) * | 2024-03-04 | 2024-06-07 | 西南科技大学 | 一种高压烧结提升压电陶瓷压电性能的方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1603282A (zh) * | 2004-10-15 | 2005-04-06 | 中国科学院物理研究所 | 高密度纳米陶瓷的制备方法 |
CN101648813A (zh) * | 2009-09-11 | 2010-02-17 | 中国科学院物理研究所 | 一种改善单相多铁陶瓷材料铁电性能的方法 |
CN101872680A (zh) * | 2009-04-23 | 2010-10-27 | 深圳先进技术研究院 | 电介质薄膜、薄膜电容器及其制作方法 |
US20110130268A1 (en) * | 2009-12-01 | 2011-06-02 | National Taipei University Technology | Dielectric ceramic composition |
CN203101420U (zh) * | 2013-03-18 | 2013-07-31 | 厦门乃尔电子有限公司 | 一种超高温压电式加速度传感器 |
CN103675341A (zh) * | 2013-12-26 | 2014-03-26 | 中国科学院上海硅酸盐研究所 | 压电式加速度传感器 |
CN203561647U (zh) * | 2013-11-27 | 2014-04-23 | 黑龙江科技大学 | 压电式加速度传感器 |
-
2016
- 2016-06-22 CN CN201610458933.4A patent/CN106083035B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1603282A (zh) * | 2004-10-15 | 2005-04-06 | 中国科学院物理研究所 | 高密度纳米陶瓷的制备方法 |
CN101872680A (zh) * | 2009-04-23 | 2010-10-27 | 深圳先进技术研究院 | 电介质薄膜、薄膜电容器及其制作方法 |
CN101648813A (zh) * | 2009-09-11 | 2010-02-17 | 中国科学院物理研究所 | 一种改善单相多铁陶瓷材料铁电性能的方法 |
US20110130268A1 (en) * | 2009-12-01 | 2011-06-02 | National Taipei University Technology | Dielectric ceramic composition |
CN203101420U (zh) * | 2013-03-18 | 2013-07-31 | 厦门乃尔电子有限公司 | 一种超高温压电式加速度传感器 |
CN203561647U (zh) * | 2013-11-27 | 2014-04-23 | 黑龙江科技大学 | 压电式加速度传感器 |
CN103675341A (zh) * | 2013-12-26 | 2014-03-26 | 中国科学院上海硅酸盐研究所 | 压电式加速度传感器 |
Non-Patent Citations (2)
Title |
---|
肖长江等: "超高压烧结纳米钛酸钡陶瓷的氧空位和它对铁电性能的影响", 《功能材料2010年论文集》 * |
胡向东等: "《现代检测技术与系统》", 28 February 2015, 机械工业出版社 * |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109632157A (zh) * | 2018-12-07 | 2019-04-16 | 哈尔滨工程大学 | 一种螺栓结合面动态应力监测装置 |
CN110470373A (zh) * | 2019-08-16 | 2019-11-19 | 东南大学 | 一种双向桥梁振动监测装置 |
CN116845152A (zh) * | 2023-07-25 | 2023-10-03 | 江西兆驰半导体有限公司 | 一种led芯片制备方法及led芯片 |
CN116845152B (zh) * | 2023-07-25 | 2024-06-07 | 江西兆驰半导体有限公司 | 一种led芯片制备方法及led芯片 |
CN118145995A (zh) * | 2024-03-04 | 2024-06-07 | 西南科技大学 | 一种高压烧结提升压电陶瓷压电性能的方法 |
CN118145995B (zh) * | 2024-03-04 | 2024-09-06 | 西南科技大学 | 一种高压烧结提升压电陶瓷压电性能的方法 |
Also Published As
Publication number | Publication date |
---|---|
CN106083035B (zh) | 2018-11-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN106083035A (zh) | 一种使用纳米钛酸钡陶瓷制备的压电式加速度传感器 | |
Gao et al. | Preparation and electric properties of dense nanocrystalline zinc oxide ceramics | |
US8675344B2 (en) | Nanostructured dielectric materials for high energy density multi layer ceramic capacitors | |
US9652569B2 (en) | Nanostructured dielectric materials for high energy density multi layer ceramic capacitors | |
CN107698252B (zh) | 一种陶瓷材料作为高温稳定压电能量收集材料的应用及制备方法 | |
CN105254306A (zh) | 一种高导热氮化硅陶瓷的制备方法 | |
CN101712549B (zh) | 一种镍酸镧陶瓷靶的制备方法 | |
CN112830790A (zh) | 一种铪铌基三元固溶体硼化物的导电陶瓷及其制备方法和应用 | |
CN107056291A (zh) | 一种亚微米晶尺度压电能量收集材料及其制备方法 | |
Mazaheri et al. | Hot pressing of nanocrystalline zinc oxide compacts: Densification and grain growth during sintering | |
CN107162593A (zh) | 一种铌酸钾钠无铅压电陶瓷的制备方法 | |
CN107602115A (zh) | 一种无铅高储能密度和宽温稳定陶瓷材料及其制备方法 | |
CN107055490A (zh) | 一种多孔纳米氮化钒微晶的制备方法 | |
CN102976748A (zh) | 高致密钛酸锶钡陶瓷及其制备方法 | |
CN101347838A (zh) | 一种Ag纳米颗粒复合CoSb3基热电材料的制备方法 | |
CN113979742A (zh) | Magnéli相亚氧化钛陶瓷及其制备方法和惰性电极 | |
De Florio et al. | Master sintering curve for Gd-doped CeO 2 solid electrolytes | |
Xiao et al. | Sintering and electrical properties of commercial PZT powders modified through mechanochemical activation | |
CN103951414A (zh) | 具有低介电损耗巨电容率和压敏特性陶瓷材料的制造方法 | |
CN109456055A (zh) | 一种高击穿高极化钛酸铋钠陶瓷材料、制备方法及应用 | |
CN106116567A (zh) | 高密度纳米钛酸钡陶瓷的制备方法 | |
CN108101537A (zh) | 一种纳米压电陶瓷能量收集材料及其制备方法 | |
CN104505146B (zh) | 一种具有纳米核壳及内晶型结构的介电复合材料及制备方法 | |
CN116693285A (zh) | 一种超顺电相钛酸铋钠基弛豫储能陶瓷材料及其制备方法 | |
JP7537181B2 (ja) | 酸化物焼結体の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information | ||
CB02 | Change of applicant information |
Address after: 315171 189 collection ring road, Ji Shi Gang Town, Haishu District, Ningbo, Zhejiang Applicant after: Liu Helai Address before: 315137 55 yunyun Road, Yunlong Town, Yinzhou District, Ningbo, Zhejiang Applicant before: Liu Helai |
|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20190724 Address after: 201613 Two Blocks 303 Songdong Road, Songjiang Industrial Zone, Shanghai Patentee after: Shanghai Ruiyisen Sensor Co., Ltd. Address before: 315171 Jishigang Town, Haishu District, Ningbo City, Zhejiang Province, No. 189 Jihuan Road Patentee before: Liu Helai |