CN106054287B - A kind of the optic structure unit and optical device of visible light wave range transformation - Google Patents
A kind of the optic structure unit and optical device of visible light wave range transformation Download PDFInfo
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- CN106054287B CN106054287B CN201610628539.0A CN201610628539A CN106054287B CN 106054287 B CN106054287 B CN 106054287B CN 201610628539 A CN201610628539 A CN 201610628539A CN 106054287 B CN106054287 B CN 106054287B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3083—Birefringent or phase retarding elements
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Abstract
The present invention provides the optic structure unit and optical device of a kind of transformation of visible light wave range, the optic structure unit of the visible light wave range transformation includes TiO2Antenna, silver mirror and the silica substrate of material composition, wherein top layer is antenna structure, intermediate one layer is silver mirror, and bottom is silica base material, wherein width dimensions a=160nm to 180nm of antenna, length dimension b=240nm to 370nm of antenna, the length and width of silver mirror and silica substrate is equal, is denoted as P, period P=430 ± 10nm, antenna structure thickness t1=240 ± 5nm, silver mirror silver thickness t2=300 ± 20nm.The optical device of the present invention is using nano titania antenna as basic structural unit, and super structure surface subunit is that perfection realizes light beam abnormal reflection at 632 nm in wavelength, and the optical device formed has higher abnormal reflection transfer efficiency.
Description
Technical field
The invention belongs to the optic structure lists that integrated optics technique field more particularly to a kind of visible light wave range convert
Member and optical device.
Background technology
Traditional optical element such as plane mirror, prism, lens etc. and diffraction structure such as grating etc. are to pass through propagation path
Upper continuous phase accumulates to change the direction of propagation of wave beam, and the distance that wave is propagated in optical element is typically much deeper than wavelength.
When on the interface of electromagnetic wave incident to two media, back wave and transmitted wave abide by classical reflection law and the law of refraction
(Snell's law, Snell ' s Law).Meta Materials especially left-handed material studies have shown that can also make incidence using left-handed material
Wave is abnormal reflection, but it still follows the classical law of refraction, is only the introduction of the concept of negative index.In contrast, surpass
The structure that surface passes through deep sub-wavelength thickness, so that it may to realize freely controlling to reflected beam and refracted beam, no longer abide by
Classical catadioptric law, significantly reduces the thickness and volume of optical device.
Super structure surface is two-dimensional Meta Materials technology, and three-dimensional Meta Materials have been extended to two-dimensional structure, by two-dimensional
The array arrangement of small electric scatterer or cavity obtains a kind of novel Meta Materials in substrate material surface or medium interface.It utilizes
Super structure surface regulates and controls the phase of electromagnetic wave, can prepare transform optics device in the plane.
There are two big features by the preiodic type fine structure material that medium, metal are constituted：When abundant interface, second is that the period
Property.Since interface is abundant, this structure can support various electromagnetic mode (all kinds of bulk-modes and interface model, such as wave guide mode
Formula and surface plasmon mode)；Due to having periodicity, this structure can generate strong anisotropy, and have
Excite and modulate the ability of various electromagnetic modes.Therefore electromagnetic wave has in this kind of material and is varied considerably in general material
Propagation property：Extraordinary transmission, reflection, absorption, refraction effect etc. have novel physical significance to the research of this material
With good application prospect.
In optical communication field, super surface can be used for photoswitch, spatial light modulator of the design work in optical communicating waveband
And Wavelength-division multiplexer/demultiplexer etc..However, the super surface texture of most exception folding/reflection is only in non-visible light wave band
It changes.Such as to realize the abnormal reflection of visible light wave range, higher to material requirements, it is needed to have can in visible light wave range
The absorption loss ignored and there is higher refractive index.The material must be optically smooth, have than in the material
The much smaller surface roughness of the wavelength of light, high surface roughness cause extra light scattering, can bring apparent light loss
Consumption.In order to reduce roughness to the maximum extent, material must be amorphous or single crystallization, because of the crystal boundary of polycrystalline material
Roughness and light scattering can be increased.
In contemporary optics, realize that the complete control to light propagation is the previous important research direction of mesh.In order to realize this
The control of sample needs to create the device that should control light amplitude with 0 to 2 π phase-modulations and realization.In traditional optical component
In such as birefringent wave plate and spherical lens, a significant propagation distance is needed for the light beam of different polarization states or different spaces
It to obtain out of phase accumulation, therefore prepares this kind of traditional devices and needs thicker material, but such device is difficult to be embedded in
To integrated optics system.One of solution of integration problem is using reflection and transmission antenna array.The initial quilt of this method
For microwave frequency and millimeter-wave frequency, the control to electromagnetic wave amplitude and phase is realized using single or several ultrathin antenna layers
System.As the variation of position changes simultaneously the geometric parameter of antenna, these antenna array can spatially be realized to light phase
Control.Recently, similar material realizes that same effect, this material are referred to as super structure surface in optical frequency section.Super structure
Scattering light phase of the surface using asymmetrical electric dipole resonance mechanism to polarization direction perpendicular to incident light polarization direction is real
The complete control of 0 to 2 π is showed.It, can be in Asia with the geometric parameter of position change resonant antenna as in transmissive arrays
The arbitrary control to light wave wave surface is realized in the thin layer of wavelength thickness.This kind of super structure surface has been presented applied to abnormal folding
It penetrates, a quarter and half wave plate, the control of lens and orbital angular momentum.
The constituent material on current super structure surface is mainly metal material.The plasmon mechanism being made of metal material
The shortcomings that super structure surface, which is this kind of metal structure, usually has metal ohmic loss and the weak coupling between incidence wave and back wave
Effect is closed, therefore the efficiency on this kind of super structure surface is very low.The super structure surface of multilayer or thickness greatly can be utilized to realize electric resonance
With the superposition of magnetic resonance, and then increase the working efficiency on super structure surface, but these methods all increases simultaneously prepare answering for material
Diamicton degree and volume.In another scheme, metal antenna array and a mirror surface can be utilized thin in sub-wavelength
Multiple reflections are introduced in film realizes efficient abnormal reflection and linear transfer conversion.Although this kind of scheme avoids answering for preparation
Diamicton degree, but since the ohmic loss of metal still limits the working efficiency on the super structure surface that this metal is constituted.
Invention content
For the above technical problem, the invention discloses the optic structure units and light of a kind of transformation of visible light wave range
Device is learned, realizes light beam abnormal reflection in visible light wave range, and there is higher abnormal reflection transfer efficiency.
In this regard, the technical solution adopted by the present invention is：
A kind of optic structure unit of visible light wave range transformation comprising TiO2Material composition antenna, silver mirror and
Silica substrate, wherein top layer are antenna structures, and intermediate one layer is silver mirror, and bottom is silica base material, wherein day
The width dimensions a=160nm to 180nm of line, the length dimension b=240nm to 370nm of antenna, silver mirror and silica substrate
Length and width it is equal, be denoted as P, period P=430 ± 10nm, antenna structure thickness t1=240 ± 5nm, the silver mirror silver layer
Thickness t2=300 ± 20nm.
In this technical solution, amorphous titanium dioxide has the surface more much smaller than the wavelength of light in the material thick
Rugosity, titanium dioxide, almost without absorption loss, will produce sufficiently high folding when wavelength is more than 350nm under the action of strong light
Penetrate rate.
The invention also discloses a kind of optical devices of visible light wave range transformation comprising visible light wave range as described above
The optic structure unit of transformation, the antenna of the optical device unit is in period profile in y-axis, from side to the other side
Distribution serial number is followed successively by 1,2,3,4,5,6,7,8,9,10, and the geometric parameter of corresponding antenna number is：The parameter a=of antenna 1
180 ± 2nm, b=370 ± 2nm；Parameter a=170 ± the 2nm, b=350 ± 2nm of antenna 2；The parameter a=160 of antenna 3 ±
2nm, b=335 ± 2nm；Parameter a=160 ± the 2nm, b=278 ± 2nm of antenna 4；Parameter a=160 ± the 2nm, b=of antenna 5
240±2nm；Antenna 6 rotates clockwise 90 ° relative to antenna 1；Antenna 7 rotates clockwise 90 ° relative to antenna 2；8 phase of antenna
90 ° are rotated clockwise for antenna 3；Antenna 9 rotates clockwise 90 ° relative to antenna 4；Antenna 10 is clockwise relative to antenna 5
It is rotated by 90 °.
The preparation method of the optical device of above-mentioned visible light wave range transformation, includes the following steps：
The first step is to cover one layer of silverskin on silicon oxide substrates using electron beam evaporation methods, then on silverskin surface
On continue with electron beam evaporation plating cover filled layer titanium dioxide；
Second step is the spin coating photoresist on titanium dioxide film, and the etching of photoresist is then completed with electron beam lithography
And development；
Third step is the etching realized using reactive ion beam etching technique to titanium dioxide film；
4th step is to obtain final nano-titanium dioxide antenna by stripping process.
The beneficial effects of the invention are as follows：
First, the optical device of visible light wave range of the invention transformation realizes abnormal reflection in visible light wave range, it is adopted
Use simple nano titania antenna as basic structural unit, super structure surface subunit is that perfection is real at 632nm in wavelength
Light beam abnormal reflection is showed.
Second, for the optical device of visible light wave range of the invention transformation from the point of view of the parameter of structure, the thickness of Meta Materials can
To reach 600nm ranks, for micro-nano photonic device utilizability height.
Third selects TiO2As the material of resonant antenna, by rationally designing the physical size and material parameter of device,
As the variation of position changes simultaneously the geometric parameter of antenna, these antenna array can spatially realize the control to light phase
System so that there is higher abnormal reflection transfer efficiency, reflection transfer efficiency to be up to 69% at operation wavelength 632nm.
Description of the drawings
Fig. 1 is the schematic three dimensional views of structure of the invention unit；
Fig. 2 is the vertical view of structure of the invention unit；
Fig. 3 is the side view of structure of the invention unit；
Fig. 4 is TiO2Periodic structure is distributed schematic three dimensional views；
Fig. 5 is TiO2Periodic structure is distributed two-dimensional representation；
Fig. 6 is abnormal reflection field distribution schematic diagram.
Specific implementation mode
Below in conjunction with the accompanying drawings, the preferably embodiment of the present invention is described in further detail.
For deficiency of the existing transform optics device on service band, in order to realize in the abnormal anti-of visible light wave range
It penetrates, using the super structure surface of titanium dioxide periodic structure, this super structure surface that dielectric layer is not added, which can be realized, compares metal
Add dielectric layer to be used as the better experiment effect of super surfacing, goes masking step to make knot after reactive ion beam etching (RIBE) in an experiment
Structure is more complete.The design service band is in visible light wave range, but the design can extend to other wave-length coverages.It sets at this
In meter, using titanium dioxide as the material of dielectric resonator antenna, the optical property using the higher refractive index of titanium dioxide makes to receive
Rice optical antenna has the phase performance of regulation and control scattering light.The dielectric Meta Materials resonant antenna being made of high-index material because
The response of electric dipole and magnetic dipole can be supported for Michaelis resonance.
The phase change at any point on geometrical plane can be designed using nano titania antenna, by changing
Becoming the size of certain dimension of nano-antenna can make to generate phase delay along the polarised light of this dimension, certain to realize
Phase gradient.Rational choice TiO2The size of basic structural unit realizes the covering of 2 π phases, instead in a super cell
It is small to penetrate light wave front distortion, with higher abnormal reflection transfer efficiency operation wavelength 632nm at, up to 69%.
Specific embodiment is as follows：The structural schematic diagram is as shown in Figure 1：Super structure surface material structure unit includes TiO2It
Line, silver mirror and silica substrate, wherein top layer are TiO2Antenna structure, intermediate one layer is silver mirror, and bottom is base material.
The nanocomposite optical antenna structure is TiO2Material selects TiO herein2As the material of resonant antenna, because of titanium dioxide
Loss in contrast smaller of the titanium in visible light wave range.Wherein preparing the difficulty of part, to be how to prepare loss smaller
Structure, and the smaller resonant antenna structure of defect is prepared, because titanium dioxide antenna geometries parameter is control scattered wave
Phase and amplitude factor, so the integrated degree of titanium dioxide antenna on its performance influence it is very big.It prepares in the world at present
The method of titanium dioxide film has electron beam evaporation plating, and the material purity obtained in this way is relatively high, and surface is more smooth, and loss is compared
It is small.The geometrical pattern for preparing titanium dioxide antenna then obtains photoresist mask plate by electron-beam exposure system, then utilizes reaction
Ion beam etching silicon fiml.
The geometry designs of structural unit are as shown in Figure 2 and Figure 3, and the wherein width dimensions a=180 of silica antenna ±
The length and width of 2nm, length dimension b=370 ± 2nm of silica antenna, silver mirror and silica substrate is equal, is denoted as
P, period P=430 ± 10nm, titanium dioxide antenna structure thickness t1=240 ± 5nm, silver thickness t3=300 ± 20nm.
Structure design such as Fig. 4 of visible light wave range transform optics device, shown in Fig. 5, the geometric parameters of corresponding antenna number
Number is：Parameter a=180 ± the 2nm, b=370 ± 2nm of antenna 1；Parameter a=170 ± the 2nm, b=350 ± 2nm of antenna 2；It
Parameter a=160 ± the 2nm, b=335 ± 2nm of line 3；Parameter a=160 ± the 2nm, b=278 ± 2nm of antenna 4；The ginseng of antenna 5
Number a=160 ± 2nm, b=240 ± 2nm；Antenna 6 rotates clockwise 90 ° relative to antenna 1；Antenna 7 is relative to 2 up time of antenna
Needle is rotated by 90 °；Antenna 8 rotates clockwise 90 ° relative to antenna 3；Antenna 9 rotates clockwise 90 ° relative to antenna 4；Antenna 10
90 ° are rotated clockwise relative to antenna 5.
It is discovered by experiment that above-mentioned visible light wave range transform optics device wavelength is that realize light beam different for perfection at 632nm
Abnormal reflections.The abnormal reflection field distribution schematic diagram of above-mentioned visible light wave range transform optics device is as shown in fig. 6, for vertically entering
Penetrate light, reflect light and reflected light is no longer direction along normal, but with find angled outgoing.In formulaSubstitute into corresponding numerical value P=430nm and λ0The angle of reflection that=632nm obtains abnormal reflection is=10.6 °.By
The abnormal reflection angle that Fig. 6 can measure numerical computations is=9.5 °, this and desirable angle angle value have faint deviation, but deviation is very
It is small.Lead to faint deviation the possible reason is the mutual phase step of antenna is not constant for constant and error to be not present
's.
Structure preparation flow：The first step is to cover one layer of silverskin on silicon oxide substrates using electron beam evaporation methods,
Then continue to cover filled layer titanium dioxide film with electron beam evaporation plating on silverskin surface.Second step is revolved on titanium dioxide film
Then resist coating completes etching and the development of photoresist with electron beam lithography.Third step is carved using reactive ion beam
Erosion technology realizes the etching to titanium dioxide film.4th step is to obtain final nano-titanium dioxide antenna by stripping process.
The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be said that
The specific implementation of the present invention is confined to these explanations.For those of ordinary skill in the art to which the present invention belongs, exist
Under the premise of not departing from present inventive concept, a number of simple deductions or replacements can also be made, all shall be regarded as belonging to the present invention's
Protection domain.
Claims (3)
1. a kind of optic structure unit of visible light wave range transformation, including silica substrate, it is characterised in that：It includes
TiO2The antenna and silver mirror of material composition, wherein top layer is antenna structure, and intermediate one layer is silver mirror, and bottom is silica substrate
Material, wherein width dimensions a=160nm to 180nm of antenna, length dimension b=240nm to 370nm of antenna, silver mirror and dioxy
The length and width of SiClx substrate is equal, is denoted as P, P=430 ± 10nm, antenna structure thickness t1=240 ± 5nm, the silver mirror
Silver thickness t2=300±20nm。
2. a kind of optical device of visible light wave range transformation, it is characterised in that：It includes visible light wave as described in claim 1
The optic structure unit of Duan Bianhuan, the antenna of the optic structure unit are in period profile in y-axis, from side to another
Side distribution serial number is followed successively by 1,2,3,4,5,6,7,8,9,10, and the geometric parameter of corresponding antenna number is：The parameter of antenna 1
A=180 ± 2nm, b=370 ± 2nm；Parameter a=170 ± the 2nm of antenna 2, b=350 ± 2nm；Parameter a=160 of antenna 3 ±
2nm, b=335 ± 2nm；Parameter a=160 ± the 2nm of antenna 4, b=278 ± 2nm；Parameter a=160 ± the 2nm of antenna 5, b=240 ±
2nm；Antenna 6 rotates clockwise 90 ° relative to antenna 1；Antenna 7 rotates clockwise 90 ° relative to antenna 2；Antenna 8 is opposite
90 ° are rotated clockwise in antenna 3；Antenna 9 rotates clockwise 90 ° relative to antenna 4；Antenna 10 revolves clockwise relative to antenna 5
Turn 90 °.
3. the preparation method of the optical device of the visible light wave range transformation described in claim 2, which is characterized in that including following step
Suddenly：
The first step is to cover one layer of silverskin on silicon oxide substrates using electron beam evaporation methods, then on silverskin surface after
It is continuous to cover filled layer titanium dioxide with electron beam evaporation plating；
Second step is the spin coating photoresist on titanium dioxide film, then completes the etching of photoresist with electron beam lithography and shows
Shadow；
Third step is the etching realized using reactive ion beam etching technique to titanium dioxide film；
4th step is to obtain final nano-titanium dioxide antenna by stripping process.
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| CN106405731B (en) * | 2016-12-12 | 2019-02-26 | 武汉邮电科学研究院 | Micro-structure class array waveguide grating and its implementation based on metal material |
| CN108490509B (en) * | 2018-04-08 | 2019-10-11 | 武汉大学 | The super surfacing of dielectric geometric phase of low depth-to-width ratio and its structural optimization method |
| CN108538858B (en) * | 2018-04-20 | 2020-12-18 | 哈尔滨工业大学深圳研究生院 | Display method of semiconductor |
| CN108535881B (en) * | 2018-04-20 | 2021-02-09 | 哈尔滨工业大学深圳研究生院 | Perovskite antenna with super surface and preparation method thereof |
| CN109143567A (en) * | 2018-10-18 | 2019-01-04 | 南方科技大学 | The reflective super structure surface primary mirror of one kind, auxiliary mirror and telescopic system |
| CN109597160B (en) * | 2019-01-02 | 2021-04-27 | 山东大学 | Demultiplexing device based on V-shaped optical antenna super-structure surface and working method thereof |
| CN110007451B (en) * | 2019-04-08 | 2022-04-01 | 哈尔滨工业大学（深圳） | Super-surface microscope, preparation method thereof and optical path measuring system |
| CN111221197B (en) * | 2019-11-05 | 2022-12-27 | 武汉邮电科学研究院有限公司 | Super-surface silicon-based liquid crystal composite spatial light modulator |
| CN112213800B (en) * | 2020-11-04 | 2022-04-19 | 中航华东光电有限公司 | Phase control type light deflection device based on micro-nano structure |
| CN113589411B (en) * | 2021-05-14 | 2023-07-21 | 武汉工程大学 | Plasma microcavity based on noble metal nanoparticle-J polymer dye and preparation method thereof |
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