CN113589411B - Plasma microcavity based on noble metal nanoparticle-J polymer dye and preparation method thereof - Google Patents
Plasma microcavity based on noble metal nanoparticle-J polymer dye and preparation method thereof Download PDFInfo
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Abstract
The invention relates to a plasma microcavity based on noble metal nano-particles-J-mer dye, which comprises a silver nano-film, a J-mer dye gap layer and noble metal nano-particles distributed on the J-mer dye gap layer. The preparation method comprises the steps of dissolving J polymer dye powder in a solvent to prepare J polymer dye solution; plating a Ti/Ag film on a clean silicon wafer by adopting an electron beam evaporation plating method; dripping the J-mer dye solution onto a silver nano film, and preparing a J-mer dye gap layer by adopting a spin coating method; and (3) dripping the noble metal nanoparticle solution on the PDMS, slightly pressing, and tearing off the PDMS to obtain the noble metal nanoparticle-J polymer dye plasma microcavity. The beneficial effects are that: the cost is effectively reduced, the reaction condition is mild, the post-treatment is simple, and the operation cost is greatly reduced.
Description
Technical Field
The invention relates to the technical field of plasma microcavity structures, in particular to a plasma microcavity based on noble metal nano-particle-J polymer dye and a preparation method thereof.
Background
In recent years, the interaction of light with substances has always been one of the core problems in research in the optical field, and at the micro-nano scale, excitons play an important role in the optical properties of organic molecules and semiconductor materials. Since excitons are much smaller in scale than the wavelength of light, the interaction of light with excitons is greatly hindered in application; the surface plasmons (Surface plasmon polaritons, SPPs) are surface local electromagnetic wave modes generated by collective oscillation of metal surface electrons, can effectively break through diffraction limit, have extremely strong near field enhancement effect, and provide possibility for realizing light regulation and control under nano scale.
The interaction of the surface plasmon mode generated in the microcavity structure with excitons around it can be classified into two cases of strong coupling and weak coupling according to whether the wave function around it is disturbed. The wave functions interacted during weak coupling are not disturbed, and the wave functions interacted during strong coupling are disturbed, so that a new concept of a strong coupling state is generated, the novel concept is mainly characterized in that surface plasmons and molecules are coupled to form a novel hybrid state, energy is subjected to resonance exchange between upper and lower energy levels of the novel hybrid state, namely Rabi oscillation is generated, and Rabi splitting occurs on a response spectrum of the novel hybrid state.
Based on the semi-light and semi-matter characteristics exhibited by the plasmon exciton microcavity structure, people limit photons on the surface of the metal nano particle, compress the distribution of a space electromagnetic field, and realize the regulation and control of the coupling strength between the plasmon and the exciton by regulating and controlling the size, the concentration, the interaction distance and other conditions of the exciton material, thereby also providing possibility for the development of an optical modulator under the nanoscale.
Based on the above application values, many groups have been dedicated to research on the construction of noble metal nanoparticle-J-mer dye plasma microcavity structures in recent years. The subject group utilizes gold core-silver shell nanowires integrated with two different J-mer dyes into a single hybrid structure (The journal of physical chemistry letters,2019, 10:6137), which observe extremely strong plasmonic coupling and dual-mode Rabi cleavage up to 338meV (175 meV and 163 meV), but the use of 2 dyes also increases the post cost. There is also a subject group to construct a monolayer WS separated by silver nanoprisms and by J-mer dyes 2 Composite systems (optical Express,2019, 27:16613) implementing WS in hybrid micro-nano structures 2 A strong coupling process between excitons, J-mer dye excitons and localized surface plasmon resonance, a dual mode Rabi cleavage of 300meV (130 meV and 170 meV) was observed. The regulation and control of strong coupling are realized by regulating the temperature and the concentration of J polymer, but the whole process is obtained only through software simulation and has no experimental support.
Therefore, the novel surface plasma microcavity structure with single material, simple preparation process and high coupling strength is constructed.
Disclosure of Invention
The invention aims to provide a plasma microcavity based on noble metal nano-particles-J polymer dye and a preparation method thereof, so as to overcome the defects in the prior art.
The technical scheme for solving the technical problems is as follows: a plasma microcavity based on noble metal nano-particles-J-mer dye comprises a silver nano-film, a J-mer dye gap layer and noble metal nano-particles distributed on the J-mer dye gap layer.
On the basis of the technical scheme, the invention can be improved as follows.
As an improvement of the technical scheme, the noble metal nano-particles are gold or silver, and the particle size range of the noble metal nano-particles is 50nm-150nm.
Further, the noble metal nanoparticle is silver.
Still further, the noble metal nanoparticles have a particle size of 50nm, 70nm, 90nm, 110nm, 130nm, or 150nm.
As an improvement of the technical scheme, the silver nano film is a Ti/Ag film prepared by adopting an electron beam evaporation method, wherein the size ratio of Ti to Ag is 1: 6-1: 10, wherein the Ti material has activity, so Ag is easier to be attached to the surface of the Ti material in the film coating process, and the smoothness and stability of the film are ensured.
Still further, the size ratio of Ti to Ag is 1:7.5, i.e. 10nm of Ti, 75nm of Ag film was vapor deposited.
As an improvement of the above technical solution, the J-mer dye in the J-mer dye gap layer is a special dye molecule aggregate, its extremely high vibrator strength can also realize resonance excitation at room temperature, and it is preferably methylene blue dye, because in a certain concentration range, methylene blue can present the condition of coexistence of monomer and dimer, which also provides possibility for realizing a strong coupling based on noble metal nanoparticle-J-mer dye plasma microcavity.
A preparation method of a plasma microcavity based on noble metal nano-particles-J polymer dye comprises the following steps:
s01, preparing J polymer dye solution
Dissolving J-mer dye powder in a solvent to prepare J-mer dye solution;
s02, preparing silver nano film
Plating a Ti/Ag film on a clean silicon wafer by adopting an electron beam evaporation plating method, wherein Ti is used as a transition layer to enable the metal film to be combined with a Si substrate more tightly;
s03, preparing J-mer dye gap layer
Dripping the J-mer dye solution onto a silver nano film, and preparing a J-mer dye gap layer by adopting a spin coating method;
s04, preparing noble metal nano particle-J polymer dye plasma microcavity
And (3) dripping noble metal nanoparticle solution on the PDMS, standing for 8-15 min, bonding the PDMS with the noble metal nanoparticles with the J-mer dye gap layer, slightly pressing, and tearing off the PDMS after 1-5 min, wherein the noble metal nanoparticles are distributed on the J-mer dye gap layer, so as to obtain the noble metal nanoparticle-J-mer dye plasma microcavity.
As an improvement of the above technical scheme, the molar concentration of the J-polymer aqueous solution is 1.5X10-6-1.5X10-1 mol/L.
Further, the solvent is deionized water.
As an improvement of the technical proposal, the vacuum degree is less than or equal to 10 during coating -3 Pa, the evaporation rate is 1A/s-5A/s.
Further, the specific method for preparing the silver nano film comprises the following steps: and fixing the silicon wafer in a sample tray of a film plating machine by using high-temperature glue, and placing the silicon wafer in a cavity. Vacuum degree required in film plating is not higher than 10 -3 Pa, the evaporation speed is 1A/s-5A/s to ensure the smoothness of the silver surface, and the rotating speed of the sample tray is 3rpm-7 rpm.
Still further, the evaporation rate is preferably 1A/s; the sample tray rotation speed is preferably 3rpm.
As an improvement of the technical scheme, the spin coating rotating speed is 500rpm-3500rpm, and the spin coating time is 10-90s.
Further, spin coating is divided into two stages, wherein the spin coating speed in the first stage is 750rpm low for 20s and the spin coating speed in the second stage is 2000rpm high for 50s.
As an improvement of the technical scheme, the noble metal silver nanoparticle is prepared by taking ethanol as a dispersing agent, preparing silver nanoparticle assembly dispersion liquid with the mass fraction of 0.01mg/mL-10mg/mL, stirring and uniformly mixing by ultrasound.
Further, the mass fraction was set to 0.01mg/mL.
As an improvement of the above technical solution, in order to prevent ethanol in the noble metal nanoparticle solution from damaging the J-mer dye interstitial layer, polydimethylsiloxane (PDMS) is selected to transfer the noble metal nanoparticles in the ethanol.
The beneficial effects of the invention are as follows:
1. the preparation method of the plasma microcavity is simple;
2. according to the invention, only one J polymer dye is used, so that 349meV dual-mode Rabi cleavage (178 meV and 171 meV) is realized, and compared with dual-mode Rabi cleavage realized by multiple dyes, the cost is effectively reduced;
3. the solvent selected by the invention is ethanol and deionized water, does not contain organic solvent, has mild reaction conditions and simple post-treatment, and greatly reduces the running cost.
Drawings
FIG. 1 is a graph of normalized absorption spectra of J-mer dyes at different concentrations;
FIG. 2 is a graph of the scattering spectra of noble metal nanoparticles of different sizes;
FIG. 3 is a plot of exciton dispersion versus amount of detuning for a high energy branch, a medium energy branch, and a low energy branch;
fig. 4 is a schematic representation of monomer and dimer excitons of a J-mer dye to generate 3 hybridized multi-exciton states and dual mode Rabi cleavage.
Detailed Description
The principles and features of the present invention are described below with reference to the drawings, the examples are illustrated for the purpose of illustrating the invention and are not to be construed as limiting the scope of the invention.
The invention is based on constructing a noble metal nanoparticle-J-mer dye plasma microcavity, which comprises a silver nano film, a J-mer dye gap layer and noble metal nanoparticles distributed on the J-mer dye gap layer; wherein the molar concentration of the J-mer dye solution is 1.5X10 -6 -1.5×10 -1 mol/L。
The preparation process of the plasma microcavity based on the noble metal silver nanoparticle-J polymer dye is convenient, the microcavity structure can realize the dual-mode Rabi cleavage (178 meV and 171 meV) of 349meV, the invention lays a research foundation for the development of an advanced hybrid system and the research of interaction among a plurality of emitters mediated by local plasmons of different metal nanostructures in the field of quantum electrodynamics, and also provides potential guidance for the development of integrated optical devices.
The preparation process is as follows:
1) Preparation of J Polymer dye solution
Dissolving J-mer dye powder in solvent to obtain a molar concentration of 1.5X10 -6 -1.5×10 -1 A mol/L J polymer dye solution;
2) Preparation of noble metal nanomembranes
And plating a layer of Ti/noble metal film on the clean silicon wafer by adopting an electron beam evaporation plating method, wherein the thickness of Ti is 10nm, and the thickness of the noble metal nano film is 75nm.
Wherein the noble metals are silver, gold and platinum.
3) Preparation of J-mer dye gap layer
Dripping J polymer solution with a certain concentration onto a silver nano film, and preparing a J polymer dye gap layer by adopting a spin coating method;
4) Preparation of noble Metal nanoparticle-J Polymer dye plasma microcavity
And (3) a certain amount of noble metal nanoparticle solution is dripped on Polydimethylsiloxane (PDMS), and the mixture is placed for 8-15 min, so that the PDMS with the noble metal nanoparticles is fully adhered to the J-mer dye gap layer, and after the mixture is pressed for 1-5 min, the PDMS is removed, and the noble metal nanoparticles are distributed on the J-mer dye gap layer, so that the novel noble metal nanoparticle-J-mer dye plasma microcavity is prepared.
Wherein the noble metal nano-particles are silver or gold, and the J-mer dye is methylene blue dye.
In the following examples, the preparation and characterization of the novel plasma microcavities of noble metal nanoparticle-J-mer dyes of the present invention are described in detail.
The J mer dyes described in the examples are provided by Beijing Inocat technologies Inc. During the detection, the dark field scattering spectrum in the examples was measured with an optical microscope (BX 53, olympus) equipped with a 100W halogen lamp; scattered light was collected by CCD (QIMAding, QICAM B series) or spectrometer (Princeton Instruments Acton 2500 i).
Preparation of noble metal nanoparticle films: and (3) adopting an electron beam evaporation method in the prior art to obtain the noble metal nanoparticle film coating. Wherein the noble metals are silver, gold and platinum. Further preferably, the noble metal is silver.
Preparation of methylene blue J Polymer dye solution: 1.6g of methylene blue solid powder is dissolved in 5mL of deionized water to obtain methylene blue J polymer dye stock solution with the concentration of 1mol/L, and the methylene blue J polymer dye stock solution is diluted by the deionized water to obtain the methylene blue with the concentration of 1.5X10 -6 mol/L，2.5×10 -3 mol/L，1.25×10 -2 mol/L，1.5×10 - 2 mol/L，2.5×10 -2 mol/L and 1.5X10 -1 mol/L。
And spin-coating J-polymer dye solutions with different concentrations onto the silver nanoparticle film to form a J-polymer dye gap layer.
Preparation of noble metal silver nano particles: ethanol is used as a dispersing agent, silver nanoparticle assembly dispersion liquid with the mass fraction of 0.01mg/mL is prepared, stirred and mixed uniformly by ultrasound.
And (3) dripping 0.01mg/mL noble metal nanoparticle solution on Polydimethylsiloxane (PDMS), standing for 10 minutes, fully adhering the PDMS with the noble metal nanoparticles to the J-mer dye gap layer, pressing for 3 minutes, removing the PDMS, and distributing the noble metal nanoparticles on the J-mer dye gap layer to obtain the novel noble metal nanoparticle-J-mer dye plasma microcavity.
Referring to fig. 1, it can be seen that: at all concentrations, the J-mer dye exhibited 2 distinct absorption peaks at 610nm and 662nm, corresponding to the dimer and monomer absorption intensities of the J-mer dye, respectively. It can be seen that the corresponding absorption intensity of the dimer increases progressively with increasing concentration of the J-mer dye, indicating that with increasing concentration, the amount of dimer compared to monomer increases. When the J-mer concentration was 1.5X10 -4 At mol/L, it can be clearly seen that the shoulder shape appears at 650nm, which results from the increased dimer.
Example 1
A novel plasma microcavity of noble metal nano-particles-J-mer dye comprises a silver nano-film, a J-mer dye gap layer and noble metal nano-particles distributed on the J-mer dye gap layer.
Taking a certain amountThe concentration by weight is 1.5X10 -6 mol/L J-mer methylene blue dye is spin-coated in two stages, wherein the spin-coating speed in the first stage is 750rpm and low rotation speed for 20s, the spin-coating speed in the second stage is 2000rpm and high rotation speed for 50s, and a J-mer dye gap layer is formed'
And (3) taking a certain amount of 0.01mg/mL silver nanoparticle solution, dripping the silver nanoparticle solution on Polydimethylsiloxane (PDMS), standing for 10 minutes, fully adhering the PDMS with the silver nanoparticles to the J-mer dye gap layer, pressing for 3 minutes, removing the PDMS, and distributing the noble metal nanoparticles on the J-mer dye gap layer to obtain the novel silver nanoparticle-J-mer dye plasma microcavity.
Example 2
A novel plasma microcavity of noble metal nano-particles-J-mer dye comprises a silver nano-film, a J-mer dye gap layer and noble metal nano-particles distributed on the J-mer dye gap layer.
Taking a certain concentration of 2.5X10 -3 The method comprises the steps of (1) carrying out two-stage spin coating on a mol/L J-polymer methylene blue dye, wherein the spin coating speed in the first stage is 750rpm, the spin coating speed is low, the spin coating lasts for 20s, the spin coating speed in the second stage is 2000rpm, the spin coating speed in the second stage is high, and the spin coating speed in the second stage lasts for 50s, so that a J-polymer dye gap layer is formed;
and (3) taking a certain amount of 0.01mg/mL silver nanoparticle solution, dripping the silver nanoparticle solution on Polydimethylsiloxane (PDMS), standing for 10 minutes, fully adhering the PDMS with the silver nanoparticles to the J-mer dye gap layer, pressing for 3 minutes, removing the PDMS, and distributing the noble metal nanoparticles on the J-mer dye gap layer to obtain the novel silver nanoparticle-J-mer dye plasma microcavity.
Example 3
A novel plasma microcavity of noble metal nano-particles-J-mer dye comprises a silver nano-film, a J-mer dye gap layer and noble metal nano-particles distributed on the J-mer dye gap layer.
Taking a certain concentration of 1.25X10 -2 The J-polymer methylene blue dye with mol/L is spin-coated in two stages, wherein the spin-coating speed in the first stage is 750rpm, the low rotation speed lasts for 20s, and the spin-coating speed in the second stage is 2000rpm, the high rotation speedRotating for 50s to form a J-polymer dye gap layer;
and (3) taking a certain amount of 0.01mg/mL silver nanoparticle solution, dripping the silver nanoparticle solution on Polydimethylsiloxane (PDMS), standing for 10 minutes, fully adhering the PDMS with the silver nanoparticles to the J-mer dye gap layer, pressing for 3 minutes, removing the PDMS, and distributing the noble metal nanoparticles on the J-mer dye gap layer to obtain the novel silver nanoparticle-J-mer dye plasma microcavity.
Example 4
A novel plasma microcavity of noble metal nano-particles-J-mer dye comprises a silver nano-film, a J-mer dye gap layer and noble metal nano-particles distributed on the J-mer dye gap layer.
Taking a certain concentration of 1.5X10 -2 The method comprises the steps of (1) carrying out two-stage spin coating on a mol/L J-polymer methylene blue dye, wherein the spin coating speed in the first stage is 750rpm, the spin coating speed is low, the spin coating lasts for 20s, the spin coating speed in the second stage is 2000rpm, the spin coating speed in the second stage is high, and the spin coating speed in the second stage lasts for 50s, so that a J-polymer dye gap layer is formed;
and (3) taking a certain amount of 0.01mg/mL silver nanoparticle solution, dripping the silver nanoparticle solution on Polydimethylsiloxane (PDMS), standing for 10 minutes, fully adhering the PDMS with the silver nanoparticles to the J-mer dye gap layer, pressing for 3 minutes, removing the PDMS, and distributing the noble metal nanoparticles on the J-mer dye gap layer to obtain the novel silver nanoparticle-J-mer dye plasma microcavity.
Example 5
A novel plasma microcavity of noble metal nano-particles-J-mer dye comprises a silver nano-film, a J-mer dye gap layer and noble metal nano-particles distributed on the J-mer dye gap layer.
Taking a certain concentration of 2.5X10 -2 The method comprises the steps of (1) carrying out two-stage spin coating on a mol/L J-polymer methylene blue dye, wherein the spin coating speed in the first stage is 750rpm, the spin coating speed is low, the spin coating lasts for 20s, the spin coating speed in the second stage is 2000rpm, the spin coating speed in the second stage is high, and the spin coating speed in the second stage lasts for 50s, so that a J-polymer dye gap layer is formed;
and (3) taking a certain amount of 0.01mg/mL silver nanoparticle solution, dripping the silver nanoparticle solution on Polydimethylsiloxane (PDMS), standing for 10 minutes, fully adhering the PDMS with the silver nanoparticles to the J-mer dye gap layer, pressing for 3 minutes, removing the PDMS, and distributing the noble metal nanoparticles on the J-mer dye gap layer to obtain the novel silver nanoparticle-J-mer dye plasma microcavity.
Example 6
A novel plasma microcavity of noble metal nano-particles-J-mer dye comprises a silver nano-film, a J-mer dye gap layer and noble metal nano-particles distributed on the J-mer dye gap layer.
Taking a certain concentration of 1.5X10 -1 The method comprises the steps of (1) carrying out two-stage spin coating on a mol/L J-polymer methylene blue dye, wherein the spin coating speed in the first stage is 750rpm, the spin coating speed is low, the spin coating lasts for 20s, the spin coating speed in the second stage is 2000rpm, the spin coating speed in the second stage is high, and the spin coating speed in the second stage lasts for 50s, so that a J-polymer dye gap layer is formed;
and (3) taking a certain amount of 0.01mg/mL silver nanoparticle solution, dripping the silver nanoparticle solution on Polydimethylsiloxane (PDMS), standing for 10 minutes, fully adhering the PDMS with the silver nanoparticles to the J-mer dye gap layer, pressing for 3 minutes, removing the PDMS, and distributing the noble metal nanoparticles on the J-mer dye gap layer to obtain the novel silver nanoparticle-J-mer dye plasma microcavity.
In the data test, the novel plasma microcavities of noble metal nanoparticle-J-mer dyes described in examples 1-6 were observed with an optical microscope (BX 53, olympus), as shown in FIG. 2. It can be seen that when the concentration does not exceed 1.25X10 - 2 At mol/L, only one single Rabi cleavage peak can be observed at 670 nm; as the J-mer dye concentration continued to increase, the occurrence of double Rabi cleavage was evident, i.e., a scattering peak was observed at 610nm in addition to the peak around 670 nm.
In a further test, the scattering spectra of silver nanoparticles of different sizes (65-95 nm) in example 5 were selected under conditions that ensure that the J-mer dye interstitial layer thickness was unchanged, as shown with reference to fig. 3. It can be seen that all normalized spectra show three peaks and two valleys at exciton resonance. Wherein, the peak near 610nm corresponds to exciton resonance of the J-mer dye dimer, and the peak near 680nm corresponds to the absorption peak of the J-mer dye monomer (the absorption peak of the J-mer dye monomer is red shifted after the aqueous solution is spin-coated into a thin film layer).
In fig. 4, the traces of all peaks exhibit an anti-crossover curve at zero detuning, comprising high-energy branches, mid-energy branches and low-energy branches, and this anti-crossover model structure is typical of multimode strong coupling between excitons and plasmons. Curves 1-3 are fitting curves of the corresponding high-level branch, medium-level branch and low-level branch, respectively, and the dots near the curves represent the data of the corresponding points extracted in example 5, respectively, and it can be seen that the fitting result of the anti-crossover curve substantially coincides with the experimental data. The method provided by references (The journal of physical chemistry C,2017, 121:25455) and (Opto-Electronic Advances,2019, 2:190008) fits to obtain a double Rabi cleavage value of a novel plasma microcavity of noble metal nanoparticle-J polymer dye, which is 349meV (178 meV and 171 meV), and has important significance for the development of micro-nano integrated devices.
The present invention can be realized by the respective raw materials listed in the present invention, and the upper and lower limits and interval values of the respective raw materials, and the upper and lower limits and interval values of the process parameters (such as temperature, time, etc.), and examples are not listed here.
While embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the invention, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the invention.
Claims (7)
1. The plasma microcavity based on the noble metal nano-particle-J-polymer dye is characterized by comprising a silver nano-film, a J-polymer dye gap layer and noble metal nano-particles distributed on the J-polymer dye gap layer;
the preparation method comprises the following steps:
s01, preparing J polymer dye solution
Dissolving J-mer dye powder in a solvent to prepare J-mer dye solution;
s02, preparing silver nano film
Coating a Ti/Ag film on a clean silicon wafer by adopting an electron beam evaporation coating method, wherein the size ratio of Ti to Ag is 1: 6-1: 10;
s03, preparing J-mer dye gap layer
Dripping the J-mer dye solution onto a silver nano film, and preparing a J-mer dye gap layer by adopting a spin coating method;
s04, preparing noble metal nano particle-J polymer dye plasma microcavity
Dripping noble metal nanoparticle solution on PDMS, standing for 8-15 min, bonding the PDMS with noble metal nanoparticles with the J-mer dye gap layer, slightly pressing, and removing the PDMS after 1-5 min, wherein the noble metal nanoparticles are distributed on the J-mer dye gap layer to obtain a noble metal nanoparticle-J-mer dye plasma microcavity;
the noble metal silver nano particles are obtained by taking ethanol as a dispersing agent, preparing silver nano particle assembly dispersion liquid with the mass fraction of 0.01mg/mL-10mg/mL, stirring and uniformly mixing by ultrasonic.
2. The plasma microcavity based on noble metal nanoparticles-J-mer dye of claim 1, characterized in that the noble metal nanoparticles are gold or silver and the noble metal nanoparticles have a particle size in the range of 50nm to 150nm.
3. The noble metal nanoparticle-J-mer dye-based plasma microcavity of claim 1, wherein the J-mer dye in the J-mer dye interstitial layer is a methylene blue dye.
4. The noble metal nanoparticle-J-mer dye plasma microcavity based on claim 1, wherein the vacuum degree is 10 or less during film plating -3 Pa, the evaporation rate is 1A/s-5A/s.
5. According to claim 1Plasma microcavity based on noble metal nanoparticle-J-mer dye, characterized in that the molar concentration of the aqueous J-mer solution is 1.5X10 -6 -1.5×10 -1 mol/L。
6. The noble metal nanoparticle-J-mer dye-based plasma microcavity according to claim 1, characterized in that the spin-coating speed is 500rpm-3500rpm and the spin-coating time is 10-90s.
7. The noble metal nanoparticle-J-mer dye-based plasma microcavity of claim 6, characterized in that spin coating is divided into two stages, wherein the spin coating speed in the first stage is 750rpm low for 20s and the spin coating speed in the second stage is 2000rpm high for 50s.
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