CN105978234A - Magnetic sensor and motor - Google Patents

Magnetic sensor and motor Download PDF

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Publication number
CN105978234A
CN105978234A CN201610131003.8A CN201610131003A CN105978234A CN 105978234 A CN105978234 A CN 105978234A CN 201610131003 A CN201610131003 A CN 201610131003A CN 105978234 A CN105978234 A CN 105978234A
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China
Prior art keywords
sensor
magnetic
base plate
substrate holder
center
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Granted
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CN201610131003.8A
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Chinese (zh)
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CN105978234B (en
Inventor
茑川友佑
斋藤豊
小田切秀行
上甲均
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Nidec Instruments Corp
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Sankyo Seiki Manufacturing Co Ltd
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Publication of CN105978234A publication Critical patent/CN105978234A/en
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Publication of CN105978234B publication Critical patent/CN105978234B/en
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  • Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measuring Magnetic Variables (AREA)

Abstract

Provided are a magnetic sensor and a motor. When the magnetic sensor is used on a sensor magnet and is fixed in a motor on the shaft end of a rotating shaft, the magnetic sensor can reduce deviation value between the center of the sensor magnet and the center of a magnetic induction region of a magnetic resistance element when observing from the axial direction of the rotating shaft. The magnetic sensor (11) comprises a magnetic resistance element, an element substrate (24) which is formed with the magnetic resistance element, a box-shaped package body (25) which holds the element substrate (24), and a transparent sealing component (26) which is arranged on the opening portion of the package body (25) in a sealed manner, so as to seal the element substrate (24). The element substrate (24) is provided with a mark (M1) used for aligning a position. The mark (M1) is used to align the position of the magnetic resistance element relative to an installation component (14) which installs the magnetic sensor (11).

Description

Magnetic Sensor and motor
Technical field
The present invention relates to a kind of Magnetic Sensor with magnetoresistive element.Further, the present invention relates to one and there is this The motor of Magnetic Sensor.
Background technology
The currently known motor (for example, referring to patent documentation 1) having with encoder.At patent documentation 1 In the motor recorded, encoder has: sensor-magnet, and described sensor-magnet is fixed on the axle of rotary shaft End;Magnetic Sensor, described Magnetic Sensor configures in opposite directions with sensor-magnet;Sensor base plate, described sensing Device substrate is equipped with Magnetic Sensor;And substrate holder, described substrate holder fixes sensor base plate. Substrate holder is fixed on motor shell.Magnetic Sensor has magnetoresistive element.Further, sense currently as magnetic Device, and it is known to that there is magnetoresistive element with the Magnetic Sensor of the device substrate being formed with magnetoresistive element (such as, With reference to patent documentation 2).
Patent documentation 1: Japanese Unexamined Patent Publication 2012-168016 publication
Patent documentation 2: International Publication the 2014/155886th
Summary of the invention
Invent problem to be solved
In the motor that patent documentation 1 is recorded, if when the end on observation of rotary shaft sensor-magnet The heart is big with the departure at the center of the sense magnetic area of magnetoresistive element, then the accuracy of detection of encoder can reduce.Cause This, preferably in this motor, the center of sensor-magnet and magnetoresistive element when the end on observation of rotary shaft The departure at the center of sense magnetic area is little.
Therefore, the problem of the present invention is to provide a kind of Magnetic Sensor with magnetoresistive element, when this magnetic senses When device is used in the motor of the axle head that sensor-magnet is fixed on rotary shaft, it is possible to reduce from rotary shaft End on observation time sensor-magnet the departure at center of sense magnetic area of center and magnetoresistive element.And And, the problem of the present invention is to provide a kind of motor with this Magnetic Sensor.
Technical teaching for solving the problem was
In order to solve above-mentioned problem, the Magnetic Sensor of the present invention has magnetoresistive element, the spy of described Magnetic Sensor Levying and be, it has: device substrate, and described device substrate is formed with magnetoresistive element;The packaging part of box like is originally Body, described packaging part body receiving element substrate;And transparent seal member, described seal member is closed It is formed at the peristome of packaging part body, thus potted component substrate, it is formed with alignment position at device substrate Labelling, described labelling for aligned magnetic resistance element relative to the position of installing component installing Magnetic Sensor Put.
In the Magnetic Sensor of the present invention, the device substrate be formed with magnetoresistive element is formed with alignment position Labelling, described labelling for aligned magnetic resistance element relative to the position of installing component installing Magnetic Sensor Put.Further, in the present invention, the seal member sealed device substrate is transparent.Therefore, exist In the present invention, when Magnetic Sensor is installed to installing component, it is possible to confirm the labelling of alignment position, While implementing the aligned magnetic resistance element position relative to installing component.Therefore, in the present invention, it is possible to accurately Magnetoresistive element is installed to installing component by ground.As a result of which it is, in the present invention, when Magnetic Sensor is used in During the motor of the axle head that sensor-magnet is fixed on rotary shaft, if accurately installing component to be installed to rotation Rotating shaft, then can reduce the center of sensor-magnet and the sense magnetic of magnetoresistive element when the end on observation of rotary shaft The departure at the center in region.
In the present invention, it is preferred to seal member is to be fixed in the way of by the closing of the peristome of packaging part body The lid that the transparent glass of packaging part body is made.If constituted like this, then it is to close with seal member The situation of the resin that the mode of peristome is filled into packaging part body is compared, it is possible to the detection of suppression magnetoresistive element Precision reduces.It is to say, the impact of the stress that the accuracy of detection meeting of magnetoresistive element is because acting on magnetoresistive element, The impact of humidity and reduce, in the case of seal member is the resin being filled into packaging part body, it is possible to Exist the accuracy of detection of magnetoresistive element because of this resin affected by the stress acting on magnetoresistive element, Resin Absorbent The impact of dampness and the problem that reduces.It is directed to this, if seal member is solid in the way of closed peristome Due to the lid of the transparent glass of packaging part body, then will not produce this problem.Therefore, it is possible to suppression The accuracy of detection of magnetoresistive element reduces.Further, if seal member is to be fixed in the way of closed peristome The lid of the transparent glass of packaging part body, the most such as, securing the cap to packaging part body by bonding Time, it is possible to confirm that lid is reliably the most bonding with packaging part body and fixes.Therefore, it is possible to it is reliable by lid Device substrate is sealed by ground.
In the present invention, it is preferred to when the thickness direction of device substrate is observed, labelling is formed at through magnetic resistance unit Two positions on first imaginary line at the center of the sense magnetic area of part and through sense magnetic area center with Four positions of total at two positions on the second imaginary line that the first imaginary line is different.If structure like this Become, then can detect the center in magnetic strength region according to the labelling being formed at four positions.Further, if picture So constitute, then compared with the situation that a position at the center in sense magnetic area forms labelling, it is possible to will mark The position easily forming labelling that note is formed on device substrate.Therefore, it is possible to easily labelling is formed at Device substrate.Further, if constituted like this, then can also when Magnetic Sensor is installed to installing component, Adjust Magnetic Sensor centered by the center of the sense magnetic area when the thickness direction of device substrate is observed Direction of rotation.
In the present invention, when the thickness direction of device substrate is observed, labelling also may be formed at magnetoresistive element The center of sense magnetic area.In this case, it is possible to the forming part of labelling is minimally set.
The Magnetic Sensor of the present invention can be applied to motor, and described motor has: rotor, and described rotor has Rotary shaft;Stator;Motor shell, described motor shell accommodates stator;Sensor-magnet, described sensor Magnet is fixed on the axle head of rotary shaft;Sensor base plate, described sensor base plate is equipped with Magnetic Sensor;With And the substrate holder as installing component, described substrate holder is fixed sensor base plate and is fixed on motor Housing.In this case, axially the most consistent with the thickness direction of device substrate with rotary shaft of Magnetic Sensor Mode configures in opposite directions with sensor-magnet.In this motor, the sensor base plate of Magnetic Sensor will be assembled with When being installed to substrate holder, it is possible to confirm the labelling of alignment position, while it is first to implement alignment magnetic resistance Part is relative to the position of substrate holder.Therefore, it is possible to accurately magnetoresistive element is installed to substrate holder. As a result of which it is, by substrate holder being accurately installed to motor shell, it is possible to reduce the axle from rotary shaft The departure at the center of the sense magnetic film of center and the magnetoresistive element of sensor-magnet in time observing.
In the present invention, it is preferred to when end on observation, substrate holder in the periphery gone up radially of the axis of rotation Side is formed with the circular benchmark as the diametrically opposed positioning datum in motor shell of substrate holder Face or the datum level of multiple arc-shaped, when end on observation, in the center of curvature of datum level and sense magnetic area The heart is consistent.If constituted like this, then going up radially of the axis of rotation, magnetoresistive element accurately can be installed to Motor shell.Therefore, it is possible to be effectively reduced when the end on observation of rotary shaft the center of sensor-magnet with The departure at the center of the sense magnetic area of magnetoresistive element.
In this present invention, preferably it is formed at substrate holder and is axially toward what sensor base plate highlighted Multiple pins, are formed with supply and marketing at sensor base plate and run through the through hole of insertion, at outer peripheral face and the through hole of pin Inner peripheral surface between be formed for adjusting the magnetoresistive element gap relative to the position of substrate holder.If Constitute like this, then the sensor base plate in the state by being assembled with Magnetic Sensor is installed to substrate holder Time, it is possible to pin is run through the state being inserted in through hole to adjust sensor base plate relative to substrate holding The installation site of frame.Therefore, sensor base plate will not keep relative to substrate adjusting sensor base plate The installation site of frame, relative to substrate holder deviation when being installed to substrate holder by sensor base plate Obtain greatly.As a result of which it is, the installation operation installing sensor base plate to substrate holder can be easily implemented with.
In the present invention, it is preferred to pin runs through in the way of sensor base plate face is prominent by the tip side of pin It is inserted in through hole, and bonding agent is with across the tip side of the pin prominent from sensor base plate and sensor base plate The mode in a face coated.If constituted like this, then coated bonding owing to confirming Agent, implements bonding operation, the most such as with another side and the base that bonding agent is flowed into sensor base plate Situation between plate retainer is compared, it is possible to easily implement bonding operation.Further, if constituted like this, Then can implement aligned magnetic resistance element keep relative to substrate while confirming the labelling of alignment position After the position of frame, temporarily fixed sensor base plate and substrate holder by bonding agent.
Invention effect
As it has been described above, in the Magnetic Sensor of the present invention, be fixed on rotary shaft when applying in sensor-magnet Axle head motor in time, it is possible to reduce the center of sensor-magnet and magnetic resistance when the end on observation of rotary shaft The departure at the center of the magnetic strength film of element.Further, in the motor of the present invention, it is possible to reduce from rotary shaft End on observation time sensor-magnet the departure at center of magnetic strength film of center and magnetoresistive element.
Accompanying drawing explanation
Fig. 1 (A) is the axonometric chart of the motor involved by embodiments of the present invention, and Fig. 1 (B) is from figure Motor shown in 1 (A) takes off the axonometric chart of the state after housing.
Fig. 2 is the axonometric chart of the cap assembly shown in Fig. 1.
Fig. 3 for be fixed on the rotary shaft shown in Fig. 1 (B) export contrary side sensor-magnet and The axonometric chart of Magnetic Sensor.
Fig. 4 is the axonometric chart of the testing agency shown in Fig. 1.
Fig. 5 is the exploded perspective view of the testing agency shown in Fig. 4.
Fig. 6 is the plane graph illustrating the Magnetic Sensor shown in Fig. 1 and sensor base plate from outlet side.
Fig. 7 is the plane graph illustrating the substrate holder shown in Fig. 1 from outlet side.
Fig. 8 is the sectional view of the sensor base plate shown in Fig. 4 and the bonding site of pin.
Fig. 9 is the axonometric chart illustrating the Magnetic Sensor shown in Fig. 3 from outlet side.
Figure 10 is the plane graph of the device substrate being accommodated in the packaging part body shown in Fig. 9.
Figure 11 is the installation side when the sensor base plate shown in Fig. 5 is installed to substrate holder by explanation The figure of method.
(description of reference numerals)
1 motor
2 rotary shafts
3 motor shells
10 sensor-magnet
11 Magnetic Sensors
13 sensor base plates
13b through hole
14 substrate holders (installing component)
14e sells
14h outer peripheral face (datum level)
19 bonding agents
23 MR elements (magnetoresistive element)
24 device substrates
25 packaging part bodies
26 glass covers (seal member, lid)
36 sense magnetic area
The center of curvature (center of curvature of datum level) of C1 outer peripheral face
The center of C2 sense magnetic area
L1, L11 first imaginary line
L2, L12 second imaginary line
M1, M11 labelling
Detailed description of the invention
Hereinafter, referring to the drawings embodiments of the present invention are illustrated.
(overall structure of motor)
Fig. 1 (A) is the axonometric chart of the motor 1 involved by embodiments of the present invention, Fig. 1 (B) be from Motor 1 shown in Fig. 1 (A) takes off the axonometric chart of the state after housing 12.Fig. 2 is the cover shown in Fig. 1 The axonometric chart of parts 8.Fig. 3 is for being fixed on the biography exporting contrary side of the rotary shaft 2 shown in Fig. 1 (B) Sensor Magnet 10 and the axonometric chart of Magnetic Sensor 11.
The motor 1 of present embodiment is inner-rotor type motor.This motor 1 has: stator (omits diagram), Described stator is shaped generally as cylindrical shape;Rotor, described rotor has rotary shaft 2 and is arranged in the interior of stator All sides;And motor shell 3, described motor shell 3 accommodates stator.A side in stator and rotor has Driving and use Magnet (omitting diagram), the opposing party in stator and rotor has driving coil (omitting diagram). In the present embodiment, rotor has driving Magnet, and stator has driving coil.Further, motor 1 There is the testing agency 4 of position of rotation for detecting rotor.
In the following description, it is " radially " with the radial direction (that is, the radial direction of rotor) of rotary shaft 2, with The circumference (that is, the circumference of rotor) of rotary shaft 2 is " circumferential ", and axial with rotary shaft 2 (that is, turns Sub is axial) it is " axially ".Further, with the outlet side (Z1 of Fig. 1 etc. of the rotary shaft 2 on axially Side, direction) it is " front " side, with (the Z2 direction of Fig. 1 etc., output opposition side of the rotary shaft 2 on axially Side) it is " afterwards " side.
As it is shown in figure 1, motor shell 3 has: the shell body 6 of tubular, described shell body 6 constitutes motor The side of housing 3;Cap assembly 7, described cap assembly 7 is fixed on the front end of shell body 6;And cap assembly 8, described cap assembly 8 is fixed on the rear end of shell body 6.As in figure 2 it is shown, cap assembly 8 diametrically Be centrally formed with the most through through hole 8a.Through hole 8a is formed as circular hole with the level. The inner peripheral surface of the rear end side part of through hole 8a becomes datum level 8b, described datum level 8b for diametrically The substrate holder described later 14 constituting testing agency 4 is positioned.Datum level 8b is formed as barrel surface Shape.It is to say, when axle looks up datum level 8b be shaped so as to circle.Through hole 8a's Front part is provided with the bearing (omitting diagram) rotary shaft 2 supported as rotating, from axially During observation, the center of datum level 8b is consistent with the center of rotary shaft 2.It addition, in FIG, omission is passed through The diagram of through hole 8a.
Testing agency 4 is magnetic-type rotary encoder, as it is shown on figure 3, testing agency 4 has: sensor magnetic Ferrum 10;And Magnetic Sensor 11, described Magnetic Sensor 11 configures in opposite directions with sensor-magnet 10.This inspection Survey mechanism 4 to be arranged in than rotor and the position of stator side rearward.Testing agency 4 as shown in Fig. 1 (A), The housing 12 being fixed in cap assembly 8 covers.Magnetic Sensor 11 is assemblied in sensor base plate 13.Sensor Substrate 13 is fixed on substrate holder 14.Substrate holder 14 is fixed on cap assembly 8.Present embodiment Substrate holder 14 is the installing component installed for Magnetic Sensor 11, and Magnetic Sensor 11 is by sensor base Plate 13 is installed on substrate holder 14.Keep about Magnetic Sensor 11, sensor base plate 13 and substrate The concrete structure of frame 14 will be described later.
Sensor-magnet 10 is to be formed as discoideus permanent magnet.Sensor-magnet 10 is directly or by regulation Magnet retainer (omit diagram) be fixed on the axle head of rotary shaft 2 (specifically after rotary shaft 2 End), and the rear surface of sensor-magnet 10 is across the gap of regulation with Magnetic Sensor 11 in opposite directions.Further, When end on observation, sensor-magnet 10 is consistent with the center of rotary shaft 2 with the center of sensor-magnet 10 Mode be fixed on rotary shaft 2.
Sensor-magnet 10 with Magnetic Sensor 11 face (that is, the rear table of sensor-magnet 10 in opposite directions Face) circumferentially magnetized respectively and a N pole and a S pole.It is to say, sensor-magnet 10 Circumferentially it is magnetized out two poles with the forward surface of Magnetic Sensor 11.The sensor-magnet 10 of present embodiment It is made up of two the flat thin magnet 10a being formed as semicircle tabular, a flat thin magnet 10a in two flat thin magnet 10a Rear surface be magnetized to N pole, the rear surface of another flat thin magnet 10a is magnetized to S pole.It addition, pass Sensor Magnet 10 also can be constituted by being formed as a discoideus flat thin magnet.
(sensor base plate, the structure of substrate holder)
Fig. 4 is the axonometric chart of the testing agency 4 shown in Fig. 1.Fig. 5 is the testing agency 4 shown in Fig. 4 Exploded perspective view.Fig. 6 is to illustrate the Magnetic Sensor 11 shown in Fig. 1 and sensor base plate from outlet side The plane graph of 13.Fig. 7 is the plane graph illustrating the substrate holder 14 shown in Fig. 1 from outlet side.Fig. 8 Sectional view for the sensor base plate 13 shown in Fig. 4 with the bonding site of pin 14e.
Sensor base plate 13 is for being formed as flat printed wiring board.This sensor base plate 13 is with sensing The thickness direction of device substrate 13 configures with the most consistent mode.Magnetic Sensor 11 is assembled in sensor base The center of the front surface of plate 13.In the way of surrounding Magnetic Sensor 11, it is formed with two at sensor base plate 13 Individual slit 13a.Further, it is formed in axially (that is, the thickness of sensor base plate 13 at sensor base plate 13 Degree direction) go up the most through through hole 13b and the outer circumference end from sensor base plate 13 to lacking that central side cuts Oral area 13c.
Slit 13a is to be formed in the axial direction in the way of through for sensor base plate 13, and is shaped generally as L Shape.Through hole 13b is formed as circular hole and is formed at the vicinity of outer circumference end of sensor base plate 13.And And, through hole 13b is formed at three positions.Three through hole 13b pass through with connection three when end on observation The imaginary line of through hole 13b forms the mode of approximate right angle triangle and is formed at the position being separated from each other.Notch part 13c is formed as U-shaped.This notch part 13c is formed at two positions in the way of clipping Magnetic Sensor 13.Separately Outward, the rear surface at sensor base plate 13 is equipped with adapter 15.
Substrate holder 14 is formed by resin material.This substrate holder 14 has: be formed as the cylinder of tubular Portion 14a;And from prominent three the protuberance 14b of the lateral radial outside in front end of the outer peripheral face of cylinder portion 14a. The inner peripheral surface of cylinder portion 14a is barrel surface.It is to say, the inner peripheral surface of cylinder portion 14a is circle when end on observation Shape.The rear end face of cylinder portion 14a is formed as orthogonal to the axial direction plane.Sensor base plate 13 is fixed on cylinder The rear end side of portion 14a.
Rear end face at cylinder portion 14a is formed: two cylindric protuberance 14c that side is prominent backward;And The columned protuberance 14d that side is prominent backward.The top end face of protuberance 14c, 14d be formed as with axially the most just That hands over is plane.The front surface of sensor base plate 13 abuts with the top end face of protuberance 14c, 14d.At protuberance The inner peripheral surface of 14c is formed with screwed hole.It is fastened with at this screwed hole for sensor base plate 13 is fixed on The screw 18 of substrate holder 14.Screw 18 is by the way of the notch part 13c of sensor base plate 13 Configuration.
Further, the rear end face at cylinder portion 14a be formed three pin 14e, described pin 14e be axially toward Sensor base plate 13 prominent (side highlights i.e., backward).Pin 14e is formed as with the level cylindric, It is formed with circular step surface 14f orthogonal to the axial direction at pin 14e.Three pin 14e are extended through slotting Enter in three through hole 13b of sensor base plate 13.Specifically, the front surface of sensor base plate 13 Abut with step surface 14f, and the tip side of pin 14e runs through and is inserted in through hole 13b.Further, pin 14e Tip side than sensor base plate 13 side backward, rear surface highlight.
As shown in Figure 8, run through the pin 14e being inserted in through hole 13b tip side outer peripheral face with pass through It is formed with gap between the inner peripheral surface of through hole 13b.Specifically, on direction orthogonal to the axial direction, it is used for Adjust sensor base plate 13 and be formed at the top of pin 14e relative to the gap of the fixed position of substrate holder 14 Between outer peripheral face and the inner peripheral surface of through hole 13b of side.More specifically, for orthogonal to the axial direction Side adjust upward the magnetoresistive element described later 23 of the Magnetic Sensor 11 that is assemblied in sensor base plate 13 The gap of position is formed between the outer peripheral face of the tip side of pin 14e and the inner peripheral surface of through hole 13b.
In the present embodiment, sensor base plate 13 by screw 18 be fixed to substrate holder 14 it Before, utilize bonding agent 19 to be temporarily fixed to substrate holder 14.As shown in Figure 8, bonding agent 19 with across than The tip side of the pin 14e that side backward, the rear surface of sensor base plate 13 is prominent and the rear table of sensor base plate 13 The mode in face is applied.This bonding agent 19 for example, ultraviolet (UV) atherosclerotic type bonding agent.
When from end on observation, the center of three protuberance 14b inner peripheral surface relative to cylinder portion 14a is with substantially The spacing configuration of 120 degree.It is formed with through hole 14g, described through hole 14g for being used at protuberance 14b The screw 20 (with reference to Fig. 4) that substrate holder 14 is fixed to cap assembly 8 runs through insertion.It addition, Cap assembly 8 is formed with the screw hole of trip bolt 20, but in fig. 2, omits the diagram of screw hole.
The outer peripheral face 14h of protuberance 14b is formed as the curved that the shape when end on observation is arc-shaped. As it is shown in fig. 7, when end on observation, center of curvature C1 mono-of the outer peripheral face 14h of three protuberance 14b Cause.In the present embodiment, the outer peripheral face 14h of protuberance 14b becomes substrate holder 14 diametrically Relative to the positioning datum i.e. datum level of cap assembly 8, when substrate holder 14 is fixed to cap assembly 8, Determine that substrate holder 14 exists by the outer peripheral face 14h of the datum level 8b and protuberance 14b of cap assembly 8 Diametrically opposite in the position of cap assembly 8.It is to say, in the present embodiment, when end on observation, Outer circumferential side radially at substrate holder 14 be formed become substrate holder 14 diametrically opposed in The datum level of multiple arc-shapeds of the positioning datum of motor shell 3.
When substrate holder 14 is fixed in cap assembly 8, when end on observation, three prominent Center of curvature C1 of the outer peripheral face 14h of portion 14b is consistent with the center of datum level 8b.It is as noted previously, as When end on observation, the center of datum level 8b is consistent with the center of rotary shaft 2, therefore, from end on observation Time, center of curvature C1 of the outer peripheral face 14h of three protuberance 14b is consistent with the center of rotary shaft 2.And And, when end on observation, center of curvature C1 of the outer peripheral face 14h of three protuberance 14b and cylinder portion 14a The center of inner peripheral surface consistent.
(structure of Magnetic Sensor)
Fig. 9 is the axonometric chart illustrating the Magnetic Sensor 11 shown in Fig. 3 from outlet side.Figure 10 is for being accommodated in The plane graph of the device substrate 24 of the packaging part body 25 shown in Fig. 9.
Magnetic Sensor 11 has: magnetoresistive element 23 (hereinafter referred to as " MR element 23 ");Device substrate 24, described device substrate 24 is formed with MR element 23;The packaging part body 25 of box like, described packaging part Body 25 receiving element substrate 24;And seal member 26, described seal member 26 closes packaging part originally The peristome of body 25, thus device substrate 24 is sealed (that is, being sealed by MR element 23).Envelope Piece installing body 25 is formed as the box like of the cuboid of front opening.The seal member 26 of present embodiment is The lid (glass cover) of transparent glass.Therefore, below seal member 26 is referred to as " glass cover 26 ".
The tabular that glass cover 26 is formed as a generally rectangular.This glass cover 26 is to close packaging part body 25 The mode of peristome be fixed on the front end of packaging part body 25.Further, glass cover 26 passes through bonding, Gu Due to the front end of packaging part body 25, and formed receiving element base by packaging part body 25 and glass cover 26 The confined space of plate 24.It is being contained in shape between the device substrate 24 of packaging part body 25 and glass cover 26 Become to have gap, and device substrate 24 does not contacts with glass cover 26.Owing to glass cover 26 is transparent, because of If this observes Magnetic Sensor 11 from front-surface side, then it can be seen that be accommodated in the unit of packaging part body 25 The front surface of part substrate 24.
Device substrate 24 is the flat printed wiring board being formed as rectangle.This device substrate 24 is with unit The thickness direction of part substrate 24 configures with the most consistent mode.Not only on device substrate 24, it is formed with MR Element 23, is also formed with temperature monitoring resistive film 29 and heating electric resistance film 30.MR element 23, temperature Degree monitoring resistive film 29 and heating electric resistance film 30 are formed at the front surface of device substrate 24.MR unit Part 23, temperature monitoring resistive film 29 and heating electric resistance film 30 are covered by dielectric film.
MR element 23 has A phase (SIN) sense magnetic film 31,32 and B phase (COS) sense magnetic film 33,34. Sense magnetic film 31 to 34 is formed at the center of device substrate 24.In the present embodiment, as shown in Figure 10, By sense magnetic film 31 to 34 shape conglobate sense magnetic area 36.A phase feels phase place and the B phase of magnetic film 31,32 The phase 90 degree of sense magnetic film 33,34.It is to say, A phase feels magnetic film 31,32 feels magnetic film with B phase 33,34 have the phase contrast of 90 degree.Further, at A phase, the phase place of sense magnetic film 31 and sense magnetic film 32 Phase 180 degree, at B phase, the phase place of sense magnetic film 33 and the phase 180 degree of sense magnetic film 34.
Sense magnetic film 31,32 constitutes bridge circuit, and one end of this bridge circuit is connected with power supply terminal VccA, The other end is connected with ground terminal GNDA.Further, the point midway of sense magnetic film 31 is connected with lead-out terminal+A, The point midway of sense magnetic film 32 is connected with lead-out terminal-A.Equally, sense magnetic film 33,34 constitutes bridge circuit, And one end of this bridge circuit is connected with power supply terminal VccB, the other end is connected with ground terminal GNDB.And And, the point midway of sense magnetic film 33 is connected with lead-out terminal+B, the point midway of sense magnetic film 34 and outfan Son-B connects.
Heating electric resistance film 30 is formed as the frame-shaped of rectangle.Further, heating electric resistance film 30 is along element base The end face of plate 24 is formed, and configures in the way of Sensurround magnetic area 36.Heating electric resistance film 30 and electricity Source terminal VccH connects, and is connected with ground terminal GNDA.Temperature monitoring resistive film 29 is arranged in sense Between magnetic area 36 and heating electric resistance film 30.Temperature monitoring is with resistive film 29 with power supply terminal VccS even Connect and be connected with ground terminal GNDB.In the present embodiment, based on the temperature monitoring electricity of resistive film 29 Resistive, implements temperature control, controls the power supply to heating electric resistance film 30.
Further, it is formed for being directed at MR element 23 relative to substrate holder 14 at device substrate 24 The labelling M1 of position.Specifically, direction orthogonal to the axial direction (radially) is used for being directed at MR unit Part 23 is formed at device substrate 24 relative to the labelling M1 of the position of substrate holder 14.Labelling M1 is formed Front surface at device substrate 24.As shown in Figure 10, when the thickness direction of device substrate 24 is observed, If with the imaginary line of center C2 through sense magnetic area 36 for imaginary line L1, through sense magnetic area 36 Center C2 and the imaginary line different from imaginary line L1 are imaginary line L2, then from the thickness side of device substrate 24 Two positions in time observing, on two positions that labelling M1 is formed on imaginary line L1 and imaginary line L2 Four positions of total.In the present embodiment, imaginary line L1, L2 orthogonal and with device substrate 24 End face parallel.Further, the labelling M1 on imaginary line L1 two positions it is formed to clip sense magnetic area The mode of 36 is formed, and is formed at the labelling M1 on imaginary line L2 two positions to clip sense magnetic area 36 Mode formed.The imaginary line L1 of present embodiment is the first imaginary line, and imaginary line L2 is the second imaginary line.
(installation method of sensor base plate is installed to substrate holder)
Figure 11 is when the sensor base plate 13 shown in Fig. 5 is installed to substrate holder 14 by explanation The figure of installation method.
When the sensor base plate 13 of the state by being assembled with Magnetic Sensor 11 is installed to substrate holder 14, First, the pin 14e of substrate holder 14 is run through it is inserted into the sensing of the state being assembled with Magnetic Sensor 11 In the through hole 13b of device substrate 13.Specifically, pin 14e is inserted in through hole 13b until passing The front surface of sensor substrate 13 abuts with the step surface 14f of pin 14e.Afterwards, by image procossing, meter Calculate center of curvature C1 of the outer peripheral face 14h of three protuberance 14b when end on observation, and use four Labelling M1, by image procossing, calculates the center C2 of sense magnetic area 36 when end on observation.
It follows that as shown in figure 11, when end on observation, with center of curvature C1 and the sense of outer peripheral face 14h The mode consistent for center C2 of magnetic area 36, relative to substrate holder 14 in plane orthogonal to the axial direction Movable sensor substrate 13.When end on observation, if center of curvature C1 of outer peripheral face 14h and sense magnetic region The center C2 in territory 36 is consistent, then with the pin 14e prominent across side backward, the rear surface than sensor base plate 13 The mode of rear surface of tip side and sensor base plate 13 coat bonding agent 19, thus by sensor base plate 13 are temporarily fixed to substrate holder 14.It follows that utilize screw 18, sensor base plate 13 is fixed to Substrate holder 14.
Consequently, it is possible to the sensor base plate 13 of the state owing to being assembled with Magnetic Sensor 11 is installed in substrate Retainer 14, therefore, if the sensor base plate 13 being assembled with the state of Magnetic Sensor 11 is installed to base Plate retainer 14, then when end on observation, in center of curvature C1 of outer peripheral face 14h and sense magnetic area 36 Heart C2 is consistent.
(main efficacy results of present embodiment)
As described above, in the present embodiment, before the device substrate 24 being formed with MR element 23 Surface is formed with the alignment position for being directed at the MR element 23 position relative to substrate holder 14 Labelling M1.Further, in the present embodiment, it is fixed on and accommodates the packaging part body 25 of device substrate 24 Glass cover 26 be transparent, if from front-surface side observe Magnetic Sensor 11, then it can be seen that be received Front surface at the device substrate 24 of packaging part body 25.Therefore, in the present embodiment, as it has been described above, When the sensor base plate 13 being assembled with Magnetic Sensor 11 is installed to substrate holder 14, utilize labelling M1, with from end on observation time outer peripheral face 14h center of curvature C1 with sense magnetic area 36 center C2 consistent Mode, alignment MR element 23 is relative to the position of substrate holder 14.Therefore, in present embodiment In, it is possible to accurately MR element 23 is installed to substrate holder 14.
Further, in the present embodiment, sensor-magnet 10 with from end on observation time, protuberance 14b's Center of curvature C1 of outer peripheral face 14h is consistent with the center of rotary shaft 2 and the center of sensor-magnet 10 and rotation The mode that the center of rotating shaft 2 is consistent is fixed on rotary shaft 2.In sum, in the present embodiment, it is possible to Reduce the departure of the center C2 of the center of sensor-magnet 10 and sense magnetic area 36 when end on observation.
In the present embodiment, the opening of the front of packaging part body 25 is closed by glass cover 26, and It is housed inside between the device substrate 24 of packaging part body 25 and glass cover 26 and is formed with gap.Therefore, In the present embodiment, the seal member with closure elements substrate 24 is the tree being filled into packaging part body 25 The situation of fat is compared, it is possible to the accuracy of detection of suppression MR element 23 reduces.It is to say, MR element 23 Accuracy of detection can because of act on the impact of the stress of MR element 23, the impact of humidity and reduce, seal In the case of parts are the resin being filled into packaging part body 25, it is possible to there is the detection of MR element 23 Precision because of this resin, affected by the stress acting on MR element 23, the impact of Resin Absorbent dampness and drop Low problem.It is directed to this, in the present embodiment, due in the unit being accommodated in packaging part body 25 It is formed with gap, thus without producing this problem between part substrate 24 and glass cover 26.Therefore, at this In embodiment, it is possible to the accuracy of detection of suppression MR element 23 reduces.
Further, in the present embodiment, owing to utilizing transparent glass cover 26 to close packaging part body 25 The opening of front, therefore, by bonding glass cover 26 is fixed on packaging part body 25 time, energy Enough confirm that glass cover 26 is whether by the most bonding and be fixed on packaging part body 25.Therefore, it is possible to pass through Glass cover 26 reliably potted component substrate 24.
In the present embodiment, at the outer peripheral face of tip side of pin 14e and the sensor of substrate holder 14 It is formed for adjusting upward MR in side orthogonal to the axial direction between the inner peripheral surface of the through hole 13b of substrate 13 The gap of the position of element 23.Therefore, in the present embodiment, as it has been described above, pass magnetic will be assembled with When the sensor base plate 13 of the state of sensor 11 is installed to substrate holder 14, it is possible to so that pin 14e is passed through Wear the state being inserted in through hole 13b to adjust the sensor base plate 13 peace relative to substrate holder 14 Holding position.Therefore, in the present embodiment, sensor base plate 13 will not adjust sensor base plate Sensor base plate 13, relative to the installation site of substrate holder 14, is installed to substrate holder by 13 When 14, obtain greatly relative to substrate holder 14 deviation.As a result of which it is, in the present embodiment, it is possible to hold Change places and implement to install to substrate holder 14 the installation operation of sensor base plate 13.
In the present embodiment, with the pin 14e's prominent across side backward, the rear surface than sensor base plate 13 The mode adhesive-applying 19 of the rear surface of tip side and sensor base plate 13.Therefore, in present embodiment In, it is possible to the bonding agent 19 coated by Que Rening, while implementing bonding operation.Therefore, this embodiment party In formula, such as with the rear end face of cylinder portion 14a and the sensor base plate that bonding agent is flow to substrate holder 14 Situation between the front surface of 13 and with bonding agent is flow to the step surface 14f of substrate holder 14 after Compared with situation between end face with the front surface of sensor base plate 13, it is possible to be easily implemented with bonding operation.
(other embodiments)
Above-mentioned embodiment is an example of the preferred embodiment for the present invention, but is not limited to this, Do not change in the range of the purport of the present invention, it is possible to implement various deformation.
In the above-described embodiment, imaginary line L1, L2 of center C2 of sense magnetic area 36 are passed each other Orthogonal and parallel with the end face of device substrate 24.In addition, such as, as shown in Figure 10, through sense magnetic Imaginary line L11, L12 of the center C2 in region 36 also can be with the heating electric resistance of the frame-shaped being formed as rectangle The diagonal of film 30 is substantially uniform.In this case, two positions on imaginary line L11 and imagination Four positions of the total at two positions on line L12 are formed for being directed at MR element 23 relative to substrate guarantor Hold the labelling M11 of the position of frame 14.Further, in this case, imaginary line L11 is the first imaginary line, Imaginary line L12 is the second imaginary line.Further, it is used for being directed at MR element 23 relative to substrate holder 14 The labelling of position both may be formed at a position, two positions or three positions, it is possible to be formed at five with On position.Such as, when observing from the thickness direction of device substrate 24, labelling also may be formed at sense magnetic This position of center C2 in region 36.In this case, it is possible to the shape of labelling is minimally set Become position.
It addition, two positions on imaginary line L1 add up to four positions with two positions on imaginary line L2 Form the situation of labelling M1 and two positions on imaginary line L11 and two portions on imaginary line L12 Four positions of the total of position form situation and this position of center C2 in sense magnetic area 36 of labelling M11 The situation forming labelling is compared, it is possible to easy formation labelling M1, M11 being formed on device substrate 24 The position of labelling M1, M11.Therefore, it is possible to easily form labelling M1, M11 at device substrate 24.
In the above-described embodiment, when from end on observation, substrate holder 14 radially outside Week, side was formed with the datum level (outer peripheral face 14h) of multiple arc-shaped, and described datum level becomes substrate holder 14 relative to motor shell 3 positioning datum diametrically.In addition, such as when end on observation, both Can be formed as substrate holder 14 relative to motor shell at the outer circumferential side radially of substrate holder 14 The circular datum level of 3 positioning datums diametrically, it is possible to the outer circumferential side at substrate holder 14 is formed to be made For substrate holder 14 relative to multiple protuberances of motor shell 3 positioning datum diametrically.Further, In the above-described embodiment, the lid (glass cover) that the glass that seal member 26 is transparent is made, but close Envelope parts 26 may also be the transparent resin being filled into packaging part body 25.Further, above-mentioned embodiment party In formula, it is formed with pin 14e at substrate holder 14, is formed with supply and marketing 14e at sensor base plate 13 and runs through The through hole 13b inserted, but also can be formed without pin 14e and through hole 13b.Further, in above-mentioned reality Executing in mode, bonding agent 19 is the bonding agent of ultraviolet ray hardening type, but bonding agent 19 may also be and flows to substrate Between rear end face and the front surface of sensor base plate 13 of the step surface 14f of retainer 14 and flow to substrate Moment between rear end face and the front surface of sensor base plate 13 of protuberance 14c, 14d of retainer 14 glues Connect agent.

Claims (8)

1. a Magnetic Sensor, has magnetoresistive element, it is characterised in that
Described Magnetic Sensor has:
Device substrate, described device substrate is formed with described magnetoresistive element;
The packaging part body of box like, described packaging part body accommodates described device substrate;And
Transparent seal member, described seal member closes the peristome being formed at described packaging part body Thus described device substrate is sealed,
Be formed with the labelling of alignment position at described device substrate, described labelling is used for being directed at described magnetic Resistance element is relative to the position of the installing component installing described Magnetic Sensor.
Magnetic Sensor the most according to claim 1, it is characterised in that
Described seal member is be fixed on described packaging part body in the way of closing described peristome saturating The lid that bright glass is made.
Magnetic Sensor the most according to claim 1 and 2, it is characterised in that
When the thickness direction of described device substrate is observed, described labelling is formed at through described magnetic resistance unit Two positions on first imaginary line at the center of the sense magnetic area of part and through in described sense magnetic area Four positions of total at two positions on the heart and the second imaginary line different from described first imaginary line.
Magnetic Sensor the most according to claim 1 and 2, it is characterised in that
When the thickness direction of described device substrate is observed, described labelling is formed at described magnetoresistive element The center of sense magnetic area.
5. a motor, it is characterised in that
Described motor has:
Rotor, described rotor has rotary shaft;
Stator;
Motor shell, described motor shell accommodates described stator;
Sensor-magnet, described sensor-magnet is fixed on the axle head of described rotary shaft;
Magnetic Sensor described in claim 2, described Magnetic Sensor is with the axial of described rotary shaft and institute The mode stating the thickness direction of device substrate consistent configures in opposite directions with described sensor-magnet;
Sensor base plate, described sensor base plate is equipped with described Magnetic Sensor;And
As the substrate holder of described installing component, described substrate holder fixes described sensor base Plate is also fixed on described motor shell.
Motor the most according to claim 5, it is characterised in that
When described end on observation, in the periphery gone up radially of the axis of rotation described in described substrate holder Side is formed becomes described substrate holder described diametrically opposite in the location base of described motor shell Accurate circular datum level or the datum level of multiple arc-shaped,
When described end on observation, the center of curvature of described datum level and the sense magnetic region of described magnetoresistive element The center in territory is consistent.
7. according to the motor described in claim 5 or 6, it is characterised in that
Described substrate holder be formed described axially on to prominent multiple of described sensor base plate Pin,
It is formed for described pin at described sensor base plate and runs through the through hole of insertion,
It is formed for adjusting described magnetic between the outer peripheral face and the inner peripheral surface of described through hole of described pin Resistance element is relative to the gap of the position of described substrate holder.
Motor the most according to claim 7, it is characterised in that
Described pin runs through in the way of a face of described sensor base plate is prominent by the tip side of described pin It is inserted in described through hole,
Bonding agent is with across the tip side of the described pin prominent from described sensor base plate and described sensor base The mode in one face of plate is coated.
CN201610131003.8A 2015-03-11 2016-03-08 magnetic sensor and motor Expired - Fee Related CN105978234B (en)

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JP2016169966A (en) 2016-09-23
TWI679401B (en) 2019-12-11

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