CN105978234B - magnetic sensor and motor - Google Patents
magnetic sensor and motor Download PDFInfo
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- CN105978234B CN105978234B CN201610131003.8A CN201610131003A CN105978234B CN 105978234 B CN105978234 B CN 105978234B CN 201610131003 A CN201610131003 A CN 201610131003A CN 105978234 B CN105978234 B CN 105978234B
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- base plate
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- 239000000758 substrate Substances 0.000 claims abstract description 149
- 238000004806 packaging method and process Methods 0.000 claims abstract description 42
- 230000002093 peripheral effect Effects 0.000 claims description 40
- 239000011521 glass Substances 0.000 claims description 26
- 239000007767 bonding agent Substances 0.000 claims description 18
- 238000003780 insertion Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims description 4
- 238000009434 installation Methods 0.000 abstract description 12
- 238000007789 sealing Methods 0.000 abstract description 3
- 238000001514 detection method Methods 0.000 description 10
- 239000011347 resin Substances 0.000 description 10
- 229920005989 resin Polymers 0.000 description 10
- 238000012360 testing method Methods 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 9
- 238000012544 monitoring process Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 230000002745 absorbent Effects 0.000 description 2
- 239000002250 absorbent Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
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- Microelectronics & Electronic Packaging (AREA)
- Measuring Magnetic Variables (AREA)
Abstract
A kind of Magnetic Sensor and motor, when in the motor that the Magnetic Sensor is used in the shaft end that sensor-magnet is fixed on rotary shaft, the departure at the center of the sense magnetic area at the center and magnetoresistive element of sensor-magnet when can reduce from the end on observation of rotary shaft.Magnetic Sensor (11) includes magnetoresistive element；Device substrate (24), is formed with magnetoresistive element；The packaging part ontology (25) of box-like, receiving element substrate (24)；And transparent seal member (26), it closes the opening portion for being formed in packaging part ontology (25), to sealing element substrate (24), it is formed with the label (M1) of alignment position in device substrate (24), the label (M1) is used to be aligned the position of installing component (14) of the magnetoresistive element relative to installation Magnetic Sensor (11).
Description
Technical field
The present invention relates to a kind of Magnetic Sensors with magnetoresistive element.Also, the present invention relates to one kind to have magnetic sensing
The motor of device.
Background technique
The currently known motor having with encoder (for example, referring to patent document 1).In motor described in Patent Document 1
In, encoder includes sensor-magnet, and the sensor-magnet is fixed on the shaft end of rotary shaft；Magnetic Sensor, the magnetic sensing
Device configures in opposite directions with sensor-magnet；Sensor base plate, the sensor base plate are equipped with Magnetic Sensor；And substrate is kept
Frame, the fixed sensor base plate of the substrate holder.Substrate holder is fixed on motor shell.Magnetic Sensor has magnetic resistance member
Part.Also, currently as Magnetic Sensor, and there is known the magnetic biographies with magnetoresistive element and the device substrate for being formed with magnetoresistive element
Sensor (for example, referring to patent document 2).
Patent document 1: Japanese Unexamined Patent Publication 2012-168016 bulletin
Patent document 2: International Publication No. 2014/155886
Summary of the invention
Problems to be solved by the invention
In motor described in Patent Document 1, if the center of sensor-magnet and magnetic when from the end on observation of rotary shaft
The departure at the center of the sense magnetic area of resistance element is big, then the detection accuracy of encoder can reduce.It is therefore preferable that in the motor
In, the departure at the center of the sense magnetic area at the center and magnetoresistive element of sensor-magnet is small when from the end on observation of rotary shaft.
Therefore, the issue of the present invention is to provide a kind of Magnetic Sensors with magnetoresistive element, when the Magnetic Sensor is answered
When being fixed on used in sensor-magnet in the motor of the shaft end of rotary shaft, sensing when can reduce from the end on observation of rotary shaft
The departure at the center of the sense magnetic area at the center and magnetoresistive element of device magnet.Also, the issue of the present invention is to provide one kind
Motor with the Magnetic Sensor.
Technical teaching for solving the problem was
In order to solve the above problems, Magnetic Sensor of the invention has magnetoresistive element, and the Magnetic Sensor is characterized in that,
It includes device substrate, and the device substrate is formed with magnetoresistive element；The packaging part ontology of box-like, the packaging part ontology hold
Receive device substrate；And transparent seal member, the seal member closing is formed in the opening portion of packaging part ontology, thus close
Device substrate is sealed, is formed with the label of alignment position in device substrate, the label is for being directed at magnetoresistive element relative to peace
Fill the position of the installing component of Magnetic Sensor.
In Magnetic Sensor of the invention, the mark of alignment position is formed on the device substrate for be formed with magnetoresistive element
Note, the label is for being directed at position of the magnetoresistive element relative to the installing component of installation Magnetic Sensor.Also, in the present invention
In, it is transparent to the seal member that device substrate is sealed.Therefore, in the present invention, Magnetic Sensor is being installed to peace
When filling component, the label of alignment position can be confirmed on one side, implement position of the alignment magnetoresistive element relative to installing component on one side
It sets.Therefore, in the present invention, magnetoresistive element accurately can be installed to installing component.As a result, in the present invention, when
When Magnetic Sensor is used in the motor for the shaft end that sensor-magnet is fixed on rotary shaft, if accurately installing component pacified
It is attached to rotary shaft, then the center of sensor-magnet and the sense magnetic area of magnetoresistive element when can reduce from the end on observation of rotary shaft
Center departure.
In the present invention, it is preferred to seal member be by by the opening portion of packaging part ontology it is closed in a manner of be fixed on packaging part
Lid made of the transparent glass of ontology.It is to be filled in a manner of closed peristome with seal member if constituted like this
To packaging part ontology resin the case where compare, be able to suppress magnetoresistive element detection accuracy reduce.That is, magnetoresistive element
Detection accuracy can be reduced because acting on the influence of stress of magnetoresistive element, the influence of humidity, seal member be filled into
In the case where the resin of packaging part ontology, it is possible to there are the detection accuracy of magnetoresistive element because the resin is acted on magnetoresistive element
The influence of stress, the influence of Resin Absorbent moisture and the problem of reduce.In view of this, if seal member is to close opening
The mode in portion is fixed on the lid of the transparent glass system of packaging part ontology, then will not lead to the problem of this.Therefore, it is able to suppress magnetic
The detection accuracy of resistance element reduces.Also, if seal member is to be fixed on packaging part ontology in a manner of closed peristome
Whether reliably the lid of transparent glass system is able to confirm that lid then for example when securing the cap to packaging part ontology by bonding
It is Nian Jie with packaging part ontology and fixed.Therefore, reliably device substrate can be sealed by lid.
In the present invention, it is preferred to which label is formed in the sense across magnetoresistive element when from the thickness direction of device substrate
Two positions on first imaginary line at the center of magnetic area and across the different from the first imaginary line of the center of sense magnetic area
Total four positions at two positions on the second imaginary line.It, can be according to being formed in four positions if constituted like this
Label come detection magnetic sensillary area domain center.Also, if constituted like this, with a position at the center of sense magnetic area
The case where forming label is compared, the position for the label easy to form that label can be formed on device substrate.Therefore, Neng Gourong
It changes places and label is formed in device substrate.Also, if constituted like this, Magnetic Sensor can also be installed to mounting portion
When part, adjust Magnetic Sensor by from the thickness direction of device substrate when sense magnetic area center centered on rotation side
To.
When in the present invention, from the thickness direction of device substrate, label also may be formed at the sense magnetic region of magnetoresistive element
The center in domain.In this case, it is capable of the forming part of minimally setting flag.
Magnetic Sensor of the invention can be applied to motor, and the motor includes rotor, and the rotor has rotary shaft；
Stator；Motor shell, the motor shell accommodate stator；Sensor-magnet, the sensor-magnet are fixed on the axis of rotary shaft
End；Sensor base plate, the sensor base plate are equipped with Magnetic Sensor；And the substrate holder as installing component, it is described
The fixed sensor base plate of substrate holder is simultaneously fixed on motor shell.In this case, Magnetic Sensor is with the axial direction of rotary shaft
It is configured in opposite directions with the consistent mode of thickness direction of device substrate with sensor-magnet.In the motor, passed magnetic will be assembled with
When the sensor base plate of sensor is installed to substrate holder, the label of alignment position can be confirmed on one side, implement alignment on one side
Position of the magnetoresistive element relative to substrate holder.Therefore, magnetoresistive element accurately can be installed to substrate holder.It is tied
Fruit is, by the way that substrate holder is accurately installed to motor shell, sensor when can reduce from the end on observation of rotary shaft
The departure at the center of the sense magnetic film at the center and magnetoresistive element of magnet.
In the present invention, it is preferred to which the peripheral side on radially of the axis of rotation of substrate holder is formed when from end on observation
There are the circular datum level as the substrate holder diametrically opposed positioning datum in motor shell or multiple arc-shapeds
Datum level, when from end on observation, the center of curvature of datum level is consistent with the sense center of magnetic area.It, can if constituted like this
It is enough that magnetoresistive element is accurately installed to motor shell on radially of the axis of rotation.Therefore, it can be effectively reduced from rotary shaft
End on observation when sensor-magnet center and magnetoresistive element sense magnetic area center departure.
In this present invention, preferably it is formed with that be axially toward sensor base plate outstanding multiple in substrate holder
Pin is formed with the through hole that supply and marketing runs through insertion, the shape between the outer peripheral surface of pin and the inner peripheral surface of through hole in sensor base plate
At the gap having for adjusting magnetoresistive element relative to the position of substrate holder.If constituted like this, will be assembled with
It, can be the shape for running through and being inserted into through hole will be sold when the sensor base plate of the state of Magnetic Sensor is installed to substrate holder
State adjusts installation site of the sensor base plate relative to substrate holder.Therefore, sensor base plate will not be adjusted on one side and be passed
Installation site of the sensor substrate relative to substrate holder, relative to base when sensor base plate being installed to substrate holder on one side
Plate retainer deviation obtains greatly.As a result, can easily implement the installation operation for installing sensor base plate to substrate holder.
It is inserted into the present invention, it is preferred to sell and run through in such a way that a face of the tip side of pin from sensor base plate is outstanding
In through hole, and bonding agent quilt in a manner of across from a face of the tip side of sensor base plate pin outstanding and sensor base plate
Coating.If constituted like this, due to that can confirm the bonding agent being coated on one side, implement bonding operation, therefore example on one side
Such as compared with bonding agent to be flowed into the another side of sensor base plate between substrate holder the case where, it can be easy to implement viscous
Connect operation.Also, if constituted like this, the label of alignment position can be confirmed on one side, implement alignment magnetic resistance on one side
After element is relative to the position of substrate holder, by bonding agent come temporary fixed sensor base plate and substrate holder.
Invention effect
As described above, being fixed on the shaft end of rotary shaft in sensor-magnet when applying in Magnetic Sensor of the invention
Motor in when, when can reduce from the end on observation of rotary shaft in the center of sensor-magnet and the magnetic strength film of magnetoresistive element
The departure of the heart.Also, in motor of the invention, the center of sensor-magnet when can reduce from the end on observation of rotary shaft
With the departure at the center of the magnetic strength film of magnetoresistive element.
Detailed description of the invention
Fig. 1 (A) is the perspective view of motor involved in embodiments of the present invention, and Fig. 1 (B) is the horse shown in Fig. 1 (A)
Up to the perspective view for removing the state after shell.
Fig. 2 is the perspective view of cover member shown in FIG. 1.
Fig. 3 is the sensor-magnet and Magnetic Sensor for being fixed on the output opposite side end of rotary shaft shown in Fig. 1 (B)
Perspective view.
Fig. 4 is the perspective view of testing agency shown in FIG. 1.
Fig. 5 is the exploded perspective view of testing agency shown in Fig. 4.
Fig. 6 is the plan view that Magnetic Sensor and sensor base plate shown in FIG. 1 are shown from outlet side.
Fig. 7 is the plan view that substrate holder shown in FIG. 1 is shown from outlet side.
Fig. 8 is the cross-sectional view of the bonding site of sensor base plate shown in Fig. 4 and pin.
Fig. 9 is the perspective view that Magnetic Sensor shown in Fig. 3 is shown from outlet side.
Figure 10 is the plan view for being accommodated in the device substrate of packaging part ontology shown in Fig. 9.
Figure 11 is the figure for illustrating installation method when sensor base plate shown in fig. 5 to be installed to substrate holder.
(description of symbols)
1 motor
2 rotary shafts
3 motor shells
10 sensor-magnets
11 Magnetic Sensors
13 sensor base plates
13b through hole
14 substrate holders (installing component)
14e pin
14h outer peripheral surface (datum level)
19 bonding agents
23 MR elements (magnetoresistive element)
24 device substrates
25 packaging part ontologies
26 glass covers (seal member, lid)
36 sense magnetic areas
The center of curvature (center of curvature of datum level) of C1 outer peripheral surface
The center of C2 sense magnetic area
The first imaginary line of L1, L11
The second imaginary line of L2, L12
M1, M11 label
Specific embodiment
Hereinafter, the embodiments of the present invention will be described with reference to the drawings.
(overall structure of motor)
Fig. 1 (A) is the perspective view of motor 1 involved in embodiments of the present invention, and Fig. 1 (B) is shown in Fig. 1 (A)
Motor 1 removes the perspective view of the state after shell 12.Fig. 2 is the perspective view of cover member 8 shown in FIG. 1.Fig. 3 is to be fixed on Fig. 1
(B) sensor-magnet 10 at the output opposite side end of rotary shaft 2 shown in and the perspective view of Magnetic Sensor 11.
The motor 1 of present embodiment is inner-rotor type motor.The motor 1 includes stator (illustration omitted), the stator shape
As substantially cylindric；Rotor, the rotor has rotary shaft 2 and configuration is in the inner circumferential side of stator；And motor shell 3, institute
It states motor shell 3 and accommodates stator.A side in stator and rotor has driving with magnet (illustration omitted), in stator and rotor
Another party has driving with coil (illustration omitted).In the present embodiment, rotor has driving magnet, and stator has driving
Use coil.Also, motor 1 has the testing agency 4 for detecting the rotation position of rotor.
In the following description, with the radial direction of rotary shaft 2 (that is, radial direction of rotor) for " radial direction ", with the circumferential direction of rotary shaft 2
(that is, circumferential direction of rotor) is " circumferential direction ", with the axial direction (that is, axial direction of rotor) of rotary shaft 2 for " axial direction ".Also, in axial direction
Rotary shaft 2 outlet side (the Z1 direction side of Fig. 1 etc.) be " preceding " side, with output opposite side (Fig. 1 of the rotary shaft 2 in axial direction
Deng Z2 direction side) be " rear " side.
As shown in Figure 1, motor shell 3 includes the shell ontology 6 of tubular, the shell ontology 6 constitutes the side of motor shell 3；
Cover member 7, the cover member 7 are fixed on the front end of shell ontology 6；And cover member 8, the cover member 8 are fixed on shell ontology 6
Rear end.As shown in Fig. 2, cover member 8 in the radial direction is centrally formed with the through hole 8a penetrated through in the axial direction.Through hole 8a shape
As circular hole with the level.The inner peripheral surface of the rear end side section of through hole 8a becomes datum level 8b, and the datum level 8b is used for
The aftermentioned substrate holder 14 for constituting testing agency 4 is positioned radially.Datum level 8b is formed as cylinder planar.?
That is datum level 8b is shaped as circle when looking up from axis.The front end section of through hole 8a be equipped with by
The bearing of rotary shaft 2 is the bearing (illustration omitted) that can be rotated, when being looked up from axis, the center of datum level 8b and rotary shaft 2
Center it is consistent.In addition, omitting the diagram of through hole 8a in Fig. 1.
Testing agency 4 is magnetic-type rotary encoder, as shown in figure 3, testing agency 4 includes sensor-magnet 10；And magnetic
Sensor 11, the Magnetic Sensor 11 configure in opposite directions with sensor-magnet 10.The testing agency 4 configures than rotor and stator
By the position of rear side.Such as shown in Fig. 1 (A), the shell 12 for being fixed in cover member 8 is covered for testing agency 4.Magnetic Sensor 11 assembles
In sensor base plate 13.Sensor base plate 13 is fixed on substrate holder 14.Substrate holder 14 is fixed on cover member 8.This reality
The substrate holder 14 for applying mode is the installing component installed for Magnetic Sensor 11, and Magnetic Sensor 11 is pacified by sensor base plate 13
Loaded on substrate holder 14.Specific structure about Magnetic Sensor 11, sensor base plate 13 and substrate holder 14 will be rear
Face narration.
Sensor-magnet 10 is to be formed as disk-shaped permanent magnet.Sensor-magnet 10 is protected directly or by defined magnet
The shaft end (the specifically rear end of rotary shaft 2) that frame (illustration omitted) is fixed on rotary shaft 2 is held, and after sensor-magnet 10
Surface is opposite across defined gap and Magnetic Sensor 11.Also, when from end on observation, sensor-magnet 10 is with sensor-magnet
10 center and the consistent mode in center of rotary shaft 2 are fixed on rotary shaft 2.
The face (that is, rear surface of sensor-magnet 10) opposite with Magnetic Sensor 11 of sensor-magnet 10 circumferentially by
Magnetize the pole N out and the pole S respectively.That is, sensor-magnet 10 with the forward surface of Magnetic Sensor 11 circumferentially
Be magnetized out two poles.The sensor-magnet 10 of present embodiment is made of two flat thin magnet 10a for being formed as semicircle plate, and two
The rear surface of a flat thin magnet 10a in a flat thin magnet 10a is magnetized to the pole N, the rear surface of another flat thin magnet 10a is magnetized
At the pole S.In addition, sensor-magnet 10 can also be constituted by being formed as a disk-shaped flat thin magnet.
(structure of sensor base plate, substrate holder)
Fig. 4 is the perspective view of testing agency 4 shown in FIG. 1.Fig. 5 is the exploded perspective view of testing agency 4 shown in Fig. 4.
Fig. 6 is the plan view that Magnetic Sensor 11 and sensor base plate 13 shown in FIG. 1 are shown from outlet side.Fig. 7 is to show from outlet side
The plan view of substrate holder 14 shown in FIG. 1 out.Fig. 8 is the bonding site of sensor base plate 13 and pin 14e shown in Fig. 4
Cross-sectional view.
Sensor base plate 13 is to be formed as flat printed wiring board.The sensor base plate 13 is with sensor base plate 13
Thickness direction configured with axial consistent mode.Magnetic Sensor 11 is assembled in the center of the front surface of sensor base plate 13.
Slit 13a there are two being formed in a manner of surrounding Magnetic Sensor 11 in sensor base plate 13.Also, in the formation of sensor base plate 13
There is the through hole 13b penetrated through on axial (that is, thickness direction of sensor base plate 13) and from the outer circumference end of sensor base plate 13
The notch section 13c cut to central side.
Slit 13a is formed in a manner of in the axial direction penetrating through sensor base plate 13, and is shaped generally as L shape.Perforation
Hole 13b is formed as circular hole and is formed near the outer circumference end of sensor base plate 13.Also, through hole 13b is formed in three
Position.Approximate right angle triangle is formed with the imaginary line for connecting three through hole 13b when three through hole 13b are from end on observation
Mode is formed in position separated from each other.Notch section 13c is formed as U-shaped.Notch section 13c is in a manner of clipping Magnetic Sensor 13
It is formed in two positions.In addition, the rear surface in sensor base plate 13 is equipped with connector 15.
Substrate holder 14 is formed by resin material.The substrate holder 14 includes the canister portion 14a for being formed as tubular；With
And from the front end side of the outer peripheral surface of canister portion 14a to radial outside three protruding portion 14b outstanding.The inner peripheral surface of canister portion 14a is in circle
Cylinder face.That is, the inner peripheral surface of canister portion 14a is rounded when from end on observation.The rear end face of canister portion 14a is formed as with axial direction just
That hands over is planar.Sensor base plate 13 is fixed on the rear end side of canister portion 14a.
It is formed in the rear end face of canister portion 14a: two protrusion 14c of side cylindrical shape outstanding backward；And pleurapophysis backward
A columned protrusion 14d out.The top end face of protrusion 14c, 14d are formed as orthogonal to the axial direction planar.Sensor base
The front surface of plate 13 is abutted with the top end face of protrusion 14c, 14d.In protrusion, the inner peripheral surface of 14c is formed with threaded hole.In the screw thread
The screw 18 for sensor base plate 13 to be fixed on to substrate holder 14 is fastened at hole.Screw 18 is to pass through sensor base plate
The mode of 13 notch section 13c configures.
Also, pin 14e there are three being formed in the rear end face of canister portion 14a, the pin 14e are axially toward sensor base plate
13 prominent (that is, side is prominent backward).Pin 14e is formed as with the level cylindric, and circle orthogonal to the axial direction is formed at pin 14e
Cricoid step surface 14f.Three pin 14e are extended through in three through hole 13b for being inserted into sensor base plate 13.Specifically
It says, the front surface of sensor base plate 13 is abutted with step surface 14f, and sells the tip side of 14e through being inserted into through hole 13b.
Also, side is prominent backward than the rear surface of sensor base plate 13 for the tip side of pin 14e.
As shown in figure 8, in the outer peripheral surface through the tip side for selling 14e being inserted into through hole 13b with through hole 13b's
Gap is formed between inner peripheral surface.Specifically, on direction orthogonal to the axial direction, for adjust sensor base plate 13 relative to
The gap of the fixation position of substrate holder 14 be formed in the tip side of pin 14e outer peripheral surface and through hole 13b inner peripheral surface it
Between.More specifically, for adjusting upward the Magnetic Sensor 11 for being assemblied in sensor base plate 13 in side orthogonal to the axial direction
Aftermentioned magnetoresistive element 23 position gap be formed in pin 14e tip side outer peripheral surface and through hole 13b inner peripheral surface
Between.
In the present embodiment, sensor base plate 13 is before being fixed to substrate holder 14 by screw 18, using viscous
It connects agent 19 and is temporarily fixed to substrate holder 14.As shown in figure 8, bonding agent 19 with across the rear surface than sensor base plate 13 backward
The mode of the rear surface of the tip side and sensor base plate 13 of side pin 14e outstanding is coated.The bonding agent 19 is for example, ultraviolet
Line (UV) constrictive type bonding agent.
When from end on observation, three protruding portion 14b are spent relative to the center of the inner peripheral surface of canister portion 14a with substantially 120
Spacing configuration.It is formed with through hole 14g in protruding portion 14b, the through hole 14g is supplied for substrate holder 14 to be fixed to cover
The screw 20 (referring to Fig. 4) of component 8 is through insertion.In addition, being formed with the screw hole of fastening screw 20 in cover member 8, but in Fig. 2
In, omit the diagram of screw hole.
Shape when the outer peripheral surface 14h of protruding portion 14b is formed as from end on observation is in the curved of arc-shaped.Such as Fig. 7 institute
Show, when from end on observation, the center of curvature C1 of the outer peripheral surface 14h of three protruding portion 14b is consistent.In the present embodiment, prominent
The outer peripheral surface 14h of portion 14b becomes the diametrically opposed positioning datum, that is, datum level in cover member 8 of substrate holder 14, is inciting somebody to action
When substrate holder 14 is fixed to cover member 8, determined by the outer peripheral surface 14h of the datum level 8b and protruding portion 14b of cover member 8
The diametrically opposed position in cover member 8 of substrate holder 14.That is, in the present embodiment, when from end on observation,
It is formed in the peripheral side radially of substrate holder 14 diametrically opposed in motor shell 3 as substrate holder 14
The datum level of multiple arc-shapeds of positioning datum.
In the state that substrate holder 14 is fixed in cover member 8, when from end on observation, three protruding portion 14b's is outer
The center of curvature C1 of circumferential surface 14h is consistent with the center of datum level 8b.As noted previously, as when from end on observation, datum level 8b's
Center is consistent with the center of rotary shaft 2, therefore, when from end on observation, the center of curvature of the outer peripheral surface 14h of three protruding portion 14b
C1 is consistent with the center of rotary shaft 2.Also, when from end on observation, the center of curvature C1 of the outer peripheral surface 14h of three protruding portion 14b
It is consistent with the center of the inner peripheral surface of canister portion 14a.
(structure of Magnetic Sensor)
Fig. 9 is the perspective view that Magnetic Sensor 11 shown in Fig. 3 is shown from outlet side.Figure 10 is shown in Fig. 9 to be accommodated in
The plan view of the device substrate 24 of packaging part ontology 25.
Magnetic Sensor 11 includes magnetoresistive element 23 (hereinafter referred to as " MR element 23 ")；Device substrate 24, the device substrate
24 are formed with MR element 23；The packaging part ontology 25 of box-like, the 25 receiving element substrate 24 of packaging part ontology；And sealing
Part 26, the seal member 26 closes the opening portion of packaging part ontology 25, to be sealed device substrate 24 (that is, by MR
Element 23 seals).Packaging part ontology 25 is formed as the box-like of the cuboid of front end side opening.The seal member 26 of present embodiment
For the lid (glass cover) of transparent glass system.Therefore, seal member 26 is referred to as " glass cover 26 " below.
The tabular that glass cover 26 is formed as a generally rectangular.The glass cover 26 is with the opening portion of closing packaging part ontology 25
Mode is fixed on the front end of packaging part ontology 25.Also, glass cover 26 is fixed on the front end of packaging part ontology 25 by bonding,
And the confined space of receiving element substrate 24 is formed by packaging part ontology 25 and glass cover 26.It is being contained in packaging part ontology 25
Gap is formed between device substrate 24 and glass cover 26, and device substrate 24 is not contacted with glass cover 26.Due to glass cover 26
It is transparent, so if Magnetic Sensor 11 from front-surface side, then it can be seen that being accommodated in the member of packaging part ontology 25
The front surface of part substrate 24.
Device substrate 24 is the flat printed wiring board for being formed as rectangle.The device substrate 24 is with device substrate 24
Thickness direction configured with axial consistent mode.It is not only formed with MR element 23 on device substrate 24, is also formed with temperature
Monitoring resistive film 29 and heating electric hinder film 30.MR element 23, temperature monitoring resistive film 29 and heating electric hinder film 30
It is formed in the front surface of device substrate 24.MR element 23, temperature monitoring resistive film 29 and heating electric resistance film 30 are insulated
Film covering.
There is MR element 23 A phase (SIN) sense 31,32 and B of magnetic film phase (COS) to feel magnetic film 33,34.Feel the formation of magnetic film 31 to 34
At the center of device substrate 24.In the present embodiment, as shown in Figure 10, circular sense magnetic area is formed by sense magnetic film 31 to 34
36.A phase feels the phase of magnetic film 31,32 and feels 90 degree of phase phase difference of magnetic film 33,34 with B phase.That is, A phase feels magnetic film 31,32
The phase difference that magnetic film 33,34 has 90 degree is felt with B phase.Also, in A phase, feel the phase and the phase phase of sense magnetic film 32 of magnetic film 31
Poor 180 degree feels the phase and the phase phase difference 180 degree of sense magnetic film 34 of magnetic film 33 in B phase.
Feel magnetic film 31,32 and constitute bridge circuit, and one end of the bridge circuit is connect with power supply terminal VccA, the other end and
Ground terminal GNDA connection.Also, feel magnetic film 31 midpoint connect with output terminal+A, sense magnetic film 32 midpoint and
Output terminal-A connection.Equally, sense magnetic film 33,34 constitutes bridge circuit, and one end of the bridge circuit and power supply terminal VccB
Connection, the other end are connect with ground terminal GNDB.Also, the midpoint for feeling magnetic film 33 is connect with output terminal+B, feels magnetic film
34 midpoint is connect with output terminal-B.
Heating electric resistance film 30 is formed as the frame-shaped of rectangle.Also, heating electric hinders film 30 along the end of device substrate 24
Face is formed, and is configured in a manner of Sensurround magnetic area 36.Heating electric resistance film 30 connect with power supply terminal VccH, and with ground connection
Terminal GNDA connection.Temperature monitoring resistive film 29 configures between sense magnetic area 36 and heating electric resistance film 30.Temperature monitoring
It is connect with resistive film 29 with power supply terminal VccS and is connect with ground terminal GNDB.In the present embodiment, it is based on temperature monitoring
The power supply to heating electric resistance film 30 is controlled with the resistance variations of resistive film 29 to implement temperature control.
Also, the label for being directed at MR element 23 relative to the position of substrate holder 14 is formed in device substrate 24
M1.Specifically, (radial direction) is for being directed at position of the MR element 23 relative to substrate holder 14 on direction orthogonal to the axial direction
The label M1 set is formed in device substrate 24.Label M1 is formed in the front surface of device substrate 24.As shown in Figure 10, from element base
When the thickness direction observation of plate 24, if passing through sense magnetic using the imaginary line for the center C2 for passing through sense magnetic area 36 as imaginary line L1
The center C2 in region 36 and the imaginary line different from imaginary line L1 are imaginary line L2, then from the thickness direction of device substrate 24
When, label M1 is formed in total four positions at two positions on imaginary line L1 and two positions on imaginary line L2.At this
In embodiment, imaginary line L1, L2 are orthogonal and parallel with the end face of device substrate 24.Also, it is formed on imaginary line L1
Two positions label M1 by clip sense magnetic area 36 in a manner of formed, be formed in the label at two positions on imaginary line L2
M1 is formed in a manner of clipping sense magnetic area 36.The imaginary line L1 of present embodiment is the first imaginary line, and imaginary line L2 is second
Imaginary line.
(to the installation method of substrate holder installation sensor base plate)
Figure 11 is for illustrating installation method when sensor base plate 13 shown in fig. 5 to be installed to substrate holder 14
Figure.
When the sensor base plate 13 for being assembled with the state of Magnetic Sensor 11 is installed to substrate holder 14, firstly, will
The pin 14e of substrate holder 14 runs through the through hole 13b for being inserted into the sensor base plate 13 for the state for being assembled with Magnetic Sensor 11
In.Specifically, pin 14e is inserted into through hole 13b until the step surface of the front surface of sensor base plate 13 and pin 14e
14f is abutted.Later, by image procossing, the curvature of the outer peripheral surface 14h of three protruding portion 14b when calculating from end on observation
Center C1, and four label M1 are used, by image procossing, the center C2 of the sense magnetic area 36 when calculating from end on observation.
Next, as shown in figure 11, when from end on observation, with the center of curvature C1 of outer peripheral surface 14h and sense magnetic area 36
The consistent mode of center C2, relative to 14 movable sensor substrate 13 of substrate holder in plane orthogonal to the axial direction.From axis
To observation when, if the center of curvature C1 of outer peripheral surface 14h with feel the center C2 of magnetic area 36 it is consistent, across than sensor base plate
The mode of the 13 rear surface rear surface of the tip side and sensor base plate 13 of side pin 14e outstanding backward coats bonding agent 19,
To which sensor base plate 13 is temporarily fixed to substrate holder 14.Next, using screw 18, sensor base plate 13 is fixed
To substrate holder 14.
In this way, since the sensor base plate 13 for the state for being assembled with Magnetic Sensor 11 is installed in substrate holder
14, therefore, if the sensor base plate 13 for being assembled with the state of Magnetic Sensor 11 is mounted to substrate holder 14, from axial direction
When observation, the center of curvature C1 of outer peripheral surface 14h is consistent with the sense center C2 of magnetic area 36.
(main effect of present embodiment)
As described above, in the present embodiment, it is formed in the front surface for the device substrate 24 for being formed with MR element 23
For being directed at label M1 of the MR element 23 relative to the alignment position of the position of substrate holder 14.Also, in this embodiment party
In formula, it is fixed on that accommodate the glass cover 26 of the packaging part ontology 25 of device substrate 24 be transparent, if seen from front-surface side
Magnetic Sensor 11 is examined, then it can be seen that being accommodated in the front surface of the device substrate 24 of packaging part ontology 25.Therefore, in this implementation
In mode, as described above, utilizing mark when the sensor base plate 13 for being assembled with Magnetic Sensor 11 is installed to substrate holder 14
Remember M1, the center of curvature C1 of the outer peripheral surface 14h when from end on observation and the center C2 of sense magnetic area 36 it is consistent in a manner of, be directed at MR
Position of the element 23 relative to substrate holder 14.Therefore, in the present embodiment, accurately MR element 23 can be installed to
Substrate holder 14.
Also, when in the present embodiment, sensor-magnet 10 is with from end on observation, the outer peripheral surface 14h's of protruding portion 14b
Center of curvature C1 is consistent with the center of rotary shaft 2 and the center of sensor-magnet 10 and the consistent mode in center of rotary shaft 2 are solid
Due to rotary shaft 2.In conclusion in the present embodiment, when can reduce from end on observation the center of sensor-magnet 10 with
Feel the departure of the center C2 of magnetic area 36.
In the present embodiment, the opening of the front end side of packaging part ontology 25 is closed by glass cover 26, and is being housed inside
Gap is formed between the device substrate 24 and glass cover 26 of packaging part ontology 25.Therefore, in the present embodiment, first with closing
The seal member of part substrate 24 is to compare the case where being filled into the resin of packaging part ontology 25, is able to suppress the detection of MR element 23
Precision reduces.That is, the detection accuracy of MR element 23 can be because acting on the influence of the stress of MR element 23, the influence of humidity
And reduce, in the case where seal member is to be filled into the resin of packaging part ontology 25, it is possible to which there are the detections of MR element 23
Precision because of the resin, influenced by the stress for acting on MR element 23, the influence of Resin Absorbent moisture and the problem of reduce.For
In this, in the present embodiment, due to being formed being accommodated between the device substrate 24 of packaging part ontology 25 and glass cover 26
There is gap, therefore will not lead to the problem of this.Therefore, in the present embodiment, it is able to suppress the detection accuracy drop of MR element 23
It is low.
Also, in the present embodiment, due to the front end side using the transparent closing packaging part ontology 25 of glass cover 26
Therefore opening when glass cover 26 is fixed on packaging part ontology 25 by bonding, is able to confirm that whether glass cover 26 is reliable
Ground is bonded and is fixed on packaging part ontology 25.Therefore, the reliably sealing element substrate 24 of glass cover 26 can be passed through.
In the present embodiment, in the outer peripheral surface and sensor base plate 13 of the tip side of the pin 14e of substrate holder 14
The gap of the position for adjusting upward MR element 23 in side orthogonal to the axial direction is formed between the inner peripheral surface of through hole 13b.
Therefore, in the present embodiment, as described above, the sensor base plate 13 for being assembled with the state of Magnetic Sensor 11 is installed to base
When plate retainer 14, can with will sell 14e run through the state that is inserted into through hole 13b adjust sensor base plate 13 relative to
The installation site of substrate holder 14.Therefore, in the present embodiment, sensor base plate 13 will not adjust sensor base on one side
Installation site of the plate 13 relative to substrate holder 14, when sensor base plate 13 being installed to substrate holder 14 on one side, relatively
It is obtained greatly in 14 deviation of substrate holder.As a result, in the present embodiment, can easily implement to pacify to substrate holder 14
Fill the installation operation of sensor base plate 13.
In the present embodiment, with across the rear surface than sensor base plate 13 backward the tip side of side pin 14e outstanding and
The mode of the rear surface of sensor base plate 13 applies bonding agent 19.Therefore, in the present embodiment, can confirm on one side coated
Bonding agent 19, on one side implement bonding operation.Therefore, in the present embodiment, such as with by bonding agent flow into substrate holder
The case where between the rear end face of 14 canister portion 14a and the front surface of sensor base plate 13 and with by bonding agent flow into substrate keep
Compared with the rear end face of the step surface 14f of frame 14 is between the front surface of sensor base plate 13 the case where, it can easily implement to glue
Connect operation.
(other embodiments)
Above-mentioned embodiment is an example of the preferred embodiment for the present invention, and but not limited to this, is not changing
In the range of purport of the invention, various modifications can be implemented.
In the above-described embodiment, across sense magnetic area 36 center C2 imaginary line L1, L2 it is orthogonal and with member
The end face of part substrate 24 is parallel.In addition to this, for example, as shown in Figure 10, across the imaginary line of the center C2 of sense magnetic area 36
The diagonal line that L11, L12 can also hinder film 30 with the heating electric for the frame-shaped for being formed as rectangle is roughly the same.In this case, exist
Total four positions at two positions on imaginary line L11 and two positions on imaginary line L12 are formed with for being directed at MR member
Label M11 of the part 23 relative to the position of substrate holder 14.Also, in this case, imaginary line L11 is the first imagination
Line, imaginary line L12 are the second imaginary line.Also, for being directed at label of the MR element 23 relative to the position of substrate holder 14
Both a position, two positions or three positions may be formed at, also may be formed at five or more positions.For example, from element
When the thickness direction observation of substrate 24, label also may be formed at this position center C2 of sense magnetic area 36.In such case
Under, it is capable of the forming part of minimally setting flag.
In addition, two positions on imaginary line L1 form with total four positions in two positions on imaginary line L2 and mark
Total four positions at the case where M1 and two positions on imaginary line L11 and two positions on imaginary line L12 are formed
Mark M11 the case where with feel magnetic area 36 this position center C2 formed label the case where compared with, can will label M1,
M11 is formed in the position of label M1, M11 easy to form on device substrate 24.It therefore, can be easily in 24 shape of device substrate
At label M1, M11.
In the above-described embodiment, it when from end on observation, is formed in the peripheral side radially of substrate holder 14
There is the datum level (outer peripheral surface 14h) of multiple arc-shapeds, the datum level becomes substrate holder 14 relative to motor shell 3 in diameter
Upward positioning datum.It in addition to this, both can be in the peripheral side shape radially of substrate holder 14 when such as from end on observation
It, can also be in substrate at the circular datum level as substrate holder 14 relative to the positioning datum in the radial direction of motor shell 3
The peripheral side of retainer 14 is formed as substrate holder 14 relative to the multiple convex of the positioning datum in the radial direction of motor shell 3
Portion.Also, in the above-described embodiment, seal member 26 is covers (glass cover) made of transparent glass, but seal member
26 can also be the transparent resin for being filled into packaging part ontology 25.Also, in the above-described embodiment, in substrate holder 14
It is formed with pin 14e, is formed with supply and marketing 14e through the through hole 13b of insertion in sensor base plate 13, but pin 14e can not also be formed
And through hole 13b.Also, in the above-described embodiment, bonding agent 19 is the bonding agent of ultraviolet ray hardening type, but bonding agent
19 can also be between the front surface of the rear end face and sensor base plate 13 that flow into the step surface 14f of substrate holder 14 and flow into
Moment bonding agent between the rear end face of protrusion 14c, 14d of substrate holder 14 and the front surface of sensor base plate 13.
Claims (6)
1. a kind of Magnetic Sensor has magnetoresistive element, which is characterized in that
The Magnetic Sensor includes
Device substrate, the device substrate are formed with the magnetoresistive element；
The packaging part ontology of box-like, the packaging part ontology accommodate the device substrate；And
Transparent seal member, the seal member closing are formed in the opening portion of the packaging part ontology thus by the element
Base plate seals,
It is formed with the label of alignment position in the device substrate, the label is for being directed at the magnetoresistive element relative to peace
The position of the installing component of the Magnetic Sensor is filled,
The seal member is made of the transparent glass for being fixed on the packaging part ontology in a manner of closing the opening portion
Lid,
It is formed with gap between the lid made of the device substrate and glass, can see from the opening portion and be housed inside
The label of the device substrate of the packaging part ontology.
2. Magnetic Sensor according to claim 1, which is characterized in that
When from the thickness direction of the device substrate, the label is formed in the sense magnetic area across the magnetoresistive element
Two positions on first imaginary line at center and across the center of the sense magnetic area and different from first imaginary line
Total four positions at two positions on the second imaginary line.
3. Magnetic Sensor according to claim 1, which is characterized in that
When from the thickness direction of the device substrate, the label is formed in the sense magnetic area of the magnetoresistive element
The heart.
4. a kind of motor, which is characterized in that
The motor includes
Rotor, the rotor have rotary shaft；
Stator；
Motor shell, the motor shell accommodate the stator；
Sensor-magnet, the sensor-magnet are fixed on the shaft end of the rotary shaft；
Magnetic Sensor as claimed in claim 2, the Magnetic Sensor is with the thickness of the axial direction of the rotary shaft and the device substrate
The degree consistent mode in direction configures in opposite directions with the sensor-magnet；
Sensor base plate, the sensor base plate are equipped with the Magnetic Sensor；And
As the substrate holder of the installing component, the fixed sensor base plate of the substrate holder is simultaneously fixed on described
Motor shell,
When from the end on observation, described in the substrate holder radially of the axis of rotation on peripheral side be formed with as institute
Substrate holder is stated in the circular datum level or multiple circular arcs of the diametrically opposite positioning datum in the motor shell
The datum level of shape,
When from the end on observation, the center of curvature of the datum level is consistent with the center of sense magnetic area of the magnetoresistive element.
5. motor according to claim 4, which is characterized in that
It is formed in the axial direction in the substrate holder to the sensor base plate multiple pins outstanding,
It is formed with the through hole for the pin through insertion in the sensor base plate,
Be formed between the outer peripheral surface of the pin and the inner peripheral surface of the through hole for adjust the magnetoresistive element relative to
The gap of the position of the substrate holder.
6. motor according to claim 5, which is characterized in that
The pin runs through in such a way that a face of the tip side of the pin from the sensor base plate is outstanding is inserted into described pass through
In through-hole,
Bonding agent is with a face across the tip side and sensor base plate from the sensor base plate pin outstanding
Mode is coated.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-048360 | 2015-03-11 | ||
| JP2015048360A JP2016169966A (en) | 2015-03-11 | 2015-03-11 | Magnetic sensor and motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105978234A CN105978234A (en) | 2016-09-28 |
| CN105978234B true CN105978234B (en) | 2019-01-18 |
Family
ID=56982297
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610131003.8A Expired - Fee Related CN105978234B (en) | 2015-03-11 | 2016-03-08 | magnetic sensor and motor |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2016169966A (en) |
| KR (1) | KR20160110157A (en) |
| CN (1) | CN105978234B (en) |
| TW (1) | TWI679401B (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2018084092A1 (en) * | 2016-11-04 | 2019-09-19 | 日本電産株式会社 | Reluctance motor and motor system including the reluctance motor |
| JP2018194458A (en) * | 2017-05-18 | 2018-12-06 | 矢崎総業株式会社 | Magnetic detector |
| JP6461438B1 (en) * | 2017-05-26 | 2019-01-30 | 三菱電機株式会社 | Rotating electric machine |
| CN107607867B (en) * | 2017-08-09 | 2020-04-28 | 杭州威衡科技有限公司 | Device and method for detecting rotation direction of motor stator magnetic field |
| FR3080233B1 (en) * | 2018-04-17 | 2021-04-16 | Valeo Equip Electr Moteur | SET INCLUDING A ROTATING ELECTRIC MACHINE AND A BELT TENSIONER |
| JP6494896B1 (en) * | 2018-06-12 | 2019-04-03 | 三菱電機株式会社 | Encoder and servo motor |
| JP2020012730A (en) * | 2018-07-18 | 2020-01-23 | 多摩川精機株式会社 | Magnetic encoder and method for attaching the same |
| CN112534287B (en) * | 2018-09-05 | 2024-05-31 | 阿尔卑斯阿尔派株式会社 | Mounting structure of sensor element, movement amount detecting device, and manufacturing method thereof |
| CN109666586B (en) * | 2018-12-31 | 2021-12-10 | 陈科 | Device capable of automatically cleaning articles for detecting viscosity of materials |
| JP7295686B2 (en) * | 2019-03-29 | 2023-06-21 | ミネベアミツミ株式会社 | absolute encoder |
| US11509193B2 (en) * | 2019-12-19 | 2022-11-22 | Black & Decker Inc. | Power tool with compact motor assembly |
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| JP2001227902A (en) * | 2000-02-16 | 2001-08-24 | Mitsubishi Electric Corp | Semiconductor device |
| JP2006086439A (en) * | 2004-09-17 | 2006-03-30 | Nidec Sankyo Corp | Magnetoresistive element |
| JP2011033601A (en) * | 2009-08-06 | 2011-02-17 | Koyo Electronics Ind Co Ltd | Method for fixing magnet in magnetic encoder and magnetic encoder using the same |
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| JP2014107903A (en) * | 2012-11-26 | 2014-06-09 | Nidec Sankyo Corp | Motor |
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2016
- 2016-02-24 TW TW105105538A patent/TWI679401B/en not_active IP Right Cessation
- 2016-03-08 CN CN201610131003.8A patent/CN105978234B/en not_active Expired - Fee Related
- 2016-03-08 KR KR1020160027550A patent/KR20160110157A/en unknown
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| CN1497749A (en) * | 2002-10-18 | 2004-05-19 | 雅马哈株式会社 | Magnetic inductor and its manufacturing method |
| CN102124304A (en) * | 2008-09-05 | 2011-07-13 | 日本电产三协株式会社 | Magnetic rotation detector and manufacturing method therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201632836A (en) | 2016-09-16 |
| KR20160110157A (en) | 2016-09-21 |
| CN105978234A (en) | 2016-09-28 |
| JP2016169966A (en) | 2016-09-23 |
| TWI679401B (en) | 2019-12-11 |
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