CN105974293B - A kind of elimination field-effect tube avalanche test inductance error circuit and its test method - Google Patents

A kind of elimination field-effect tube avalanche test inductance error circuit and its test method Download PDF

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CN105974293B
CN105974293B CN201610450767.3A CN201610450767A CN105974293B CN 105974293 B CN105974293 B CN 105974293B CN 201610450767 A CN201610450767 A CN 201610450767A CN 105974293 B CN105974293 B CN 105974293B
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inductance
value
test
current
effect tube
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CN105974293A (en
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孙铣
陈跃俊
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Beijing Hua Feng measurement and control technology Limited by Share Ltd
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Beijing Huafeng Test & Control Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2607Circuits therefor
    • G01R31/2621Circuits therefor for testing field effect transistors, i.e. FET's
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2601Apparatus or methods therefor

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  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

The invention discloses a kind of elimination field-effect tube avalanche test inductance error circuit and its test methods, drain electrode and the source electrode both ends of tested field-effect tube are successively applied to through the first controllable switch, inductance and current sampling measuring circuit including test voltage source and voltage source, the control grid of tested field-effect tube accesses switch control signal, and the freewheeling diode for inductance is provided between inductance and first switch;The second controllable switch is provided between the current sampling measuring circuit and tested field-effect tube, a third controllable switch is connected across the second controllable switch being serially connected and tested field-effect tube both ends.The present invention passes through increased inductance test circuit, increase the measurement to actual inductance in method, solve the problems, such as that existing avalanche test circuit can not detect inductance, improve the correctness and accuracy of measurement, reduce because of maloperation inductance bring production accident hidden danger, there is biggish application value.

Description

A kind of elimination field-effect tube avalanche test inductance error circuit and its test method
Technical field
The invention belongs to semiconductor test fields, and in particular to a kind of elimination field-effect tube avalanche test inductance error
Circuit and its test method.
Background technique
MOSFET(Metal Oxide Semiconductor Field Effect Transistor), i.e., with metal oxygen Compound field effect transistor.Due to the advantages that manufacturing process is simple, integrated level is high, strong antijamming capability, and speed is fast, low in energy consumption, It is widely applied in power electronic equipment.As MOSFET element and diode are in the particular surroundings such as HF switch and automotive electronics More and more uses, snowslide failure has become the main failure mode of power MOSFET device.
The ability of load energy influences whether safety operation area and the service life of device when avalanche breakdown, it is considered to be device peace The important indicator of full property, thus it is also particularly important to the test of MOSFET element avalanche energy.Avalanche test process is exactly by setting Constant voltage, electric current, inductance condition generate the process of snowslide, see whether measured device occurs when analog device practical application turns off Damage, the device that cannot bear this predetermined energy is exactly substandard product.Voltage, the electric current of pervious avalanche test process can Correct to be guaranteed by circuit detection, inductance can not but detect, and there is the possibility using wrong inductance, will lead under extreme case Serious erroneous judgement and production accident.
The Chinese patent of publication number CN101750539B discloses " a kind of power MOSFET device avalanche test instrument circuit ", The circuit describes the measuring circuit and calculation method of avalanche energy, but this method is the measurement side based on the setting of correct inductance Method, correct inductance value should be able to store the energy of tested field effect transistor avalanche current peak value;And it actual measured The inductance of setting and actual inductance are accessed in journey there may be inconsistent, therefore pass through the calculated avalanche energy of this method Measurement has error, can generate erroneous judgement, and the circuit can not detect inductance with method, and accordingly, there exist production safeties Hidden danger.
Summary of the invention
The purpose of the present invention is to propose to a kind of elimination field-effect tube avalanche test inductance error circuit and its test methods, are Ensure to access the correct circuit of inductance and test method and solves existing avalanche test circuit by increasing the measurement to inductance The whether correct problem of inductance can not be detected.
To achieve the goals above, the technical scheme is that
A kind of elimination field-effect tube avalanche test inductance error circuit, including test voltage source, voltage source is successively through first Controllable switch, inductance and current sampling measuring circuit are applied to drain electrode and the source electrode both ends of tested field-effect tube, are tested field-effect The control grid connection switch of pipe controls signal, and the freewheeling diode for inductance is provided between inductance and first switch; Wherein, the second controllable switch is provided between the current sampling measuring circuit and tested field-effect tube, a third is controllable Switch is connected across the second controllable switch being serially connected and tested field-effect tube both ends.
Scheme is further: the inductance by connection terminal connect in circuit, by connection terminal can to inductance into Row replacement.
Scheme is further: first controllable switch, the second controllable switch, third controllable switch are that fet power is opened Guan Guan.
Scheme is further: the current sample frequency of the current sampling measuring circuit is 10MHz.
A kind of test method based on elimination field-effect tube avalanche test inductance error circuit, the circuit include test electricity Potential source, voltage source are successively applied to the drain electrode of tested field-effect tube through the first controllable switch, inductance and current sampling measuring circuit With source electrode both ends, the control grid connection switch for being tested field-effect tube controls signal, is provided between inductance and first switch Freewheeling diode for inductance;Second is provided between the current sampling measuring circuit and tested field-effect tube controllably to open It closes, a third controllable switch is connected across the second controllable switch being serially connected and tested field-effect tube both ends, the test side Method is: determining the current sample frequency of current sampling measuring circuit, sets test voltage according to tested field-effect tube technical conditions Source voltage, avalanche current test value and snowslide pendulous frequency, setting test inductance value, setting inductance error threshold value, select one Inductance is accessed circuit, wherein the method further includes:
Step 1: one waiting time threshold value of setting, by the first controllable switch, the second controllable switch, third controllable switch It is in an off state, accesses test voltage source voltage, the control grid for being tested field-effect tube accesses cut-off signals;
Step 2: carrying out inductance correction test, the first controllable switch is connected with third controllable switch, in the waiting of setting In time threshold, measurement flows into the current value of inductance, calculates inductance value, by the inductance value of calculating compared with the inductance value of access:
Test voltage source voltage is cut off if error is less than or equal to inductance error threshold value, it is believed that the inductance of access is correct, Then it is initially switched off the first controllable switch again to the inductive discharge of access to zero current, is then switched off third controllable switch, continues to hold Row third step;
Test voltage source voltage is cut off if error is greater than inductance error threshold value, it is believed that the inductance of access is incorrect, so It is initially switched off the first controllable switch afterwards to the inductive discharge of access to zero current, is then switched off third controllable switch, replacement one is not With the inductance of inductance value, circuit is accessed, accesses test voltage source voltage, repeats second step;
Step 3: carrying out field-effect tube avalanche test;
Step 4: asking whether that reaching into snowslide measurement setting number terminates measurement if completing setting number;If Setting number is not completed, third step is returned.
Scheme is further: measurement described in second step flows into the current value of inductance, and calculating inductance value is: when in the waiting time When the electric current tested in threshold value reaches the avalanche current test value of setting, inductance is calculated using the avalanche current test value of measurement Value;When the electric current tested in waiting time threshold value does not reach the avalanche current test value of setting, waiting time threshold is used The current value that the value time terminates measurement calculates inductance value.
Scheme is further: the current sample frequency of the current sampling measuring circuit is 10MHz.
A kind of test method based on elimination field-effect tube avalanche test inductance error circuit, the circuit include test electricity Potential source, voltage source are successively applied to the drain electrode of tested field-effect tube through the first controllable switch, inductance and current sampling measuring circuit With source electrode both ends, the control grid for being tested field-effect tube accesses switch control signal, is provided between inductance and first switch Freewheeling diode for inductance;Second is provided between the current sampling measuring circuit and tested field-effect tube controllably to open It closes, a third controllable switch is connected across the second controllable switch being serially connected and tested field-effect tube both ends, the test side Method is: determining the current sample frequency of current sampling measuring circuit, sets test voltage according to tested field-effect tube technical conditions Source voltage, avalanche current test value and snowslide pendulous frequency, setting test inductance value, setting inductance error threshold value, select one Inductance is accessed circuit, wherein the method further includes:
Step 1: access test voltage source voltage, the control grid for being tested field-effect tube accesses open signal, can by first Control switch is connected with the second controllable switch, and in the waiting time threshold value of setting, measurement flows into the current value of tested field-effect tube, When current value reaches avalanche current test value or current value in the waiting time threshold of setting in the waiting time threshold value of setting Do not reach avalanche current test value in value, but arrived waiting time threshold value, at this point, the avalanche current test that record has reached Value, or current value when arrived waiting time threshold value, cut off the first controllable switch, calculate inductance value, will calculate inductance value with Test inductance value compares:
If error is less than or equal to inductance error threshold value, it is believed that the inductance of access is correct, executes second step;
If error is greater than inductance error threshold value, it is believed that the inductance of access is incorrect, then is tested the control gate of field-effect tube Cut-off signal is accessed in pole, cuts off test voltage source voltage, is then initially switched off the first controllable switch and the second controllable switch, connects the Three controllable switches, to zero current, are then switched off third controllable switch, replace a different induction value to the inductive discharge of access Inductance is accessed circuit, repeats the first step;
Step 2: executing field-effect tube avalanche test, ask whether to reach into snowslide measurement setting number, if completing to set Determine number, terminates measurement;If not completing setting number, field-effect tube avalanche test is repeated until completing setting number.
Scheme is further: the current sample frequency of the current sampling measuring circuit is 10MHz.
The method further includes current values when arrived waiting time threshold value of: record if it is less than field-effect tube Minimum setting value is connected, then calculates and prompt to check that tested field-effect tube, the field-effect tube are connected minimum without inductance Setting value is arranged before entering the first step.
The beneficial effects of the present invention are:
The present invention is increased the measurement to actual inductance in method, is solved existing by increased inductance test circuit Avalanche test circuit can not detect the problem of inductance, improve the correctness and accuracy of measurement, reduce because of maloperation electricity Feel bring production accident hidden danger, there is biggish application value.
The present invention is described in detail with reference to the accompanying drawings and examples.
Detailed description of the invention
Fig. 1 is N-type metal-oxide-semiconductor avalanche test circuit diagram;
Fig. 2 is p-type metal-oxide-semiconductor avalanche test circuit diagram.
Specific embodiment
Measurement of the avalanche test of field-effect tube actually to the avalanche energy of field-effect tube passes through measurement field-effect tube Avalanche current and known inductance, pass through formulaIt is calculated, I thereinDSIt is avalanche current peak value.And Inductance L is the inductance of discreet value access, therefore the correctness of inductance directly affects test result.
Embodiment 1:
A kind of elimination field-effect tube avalanche test inductance error circuit, as depicted in figs. 1 and 2, including test voltage source 01, Voltage source is successively applied to tested field-effect tube 05 or 06 through the first controllable switch S1, inductance L and current sampling measuring circuit 03 Drain electrode and source electrode both ends, the control grid for being tested field-effect tube access switch control signal 04, inductance and first switch it Between be provided with freewheeling diode 02 for inductance;Wherein, between the current sampling measuring circuit and tested field-effect tube It is provided with the second controllable switch S2, a third controllable switch S3 and is connected across the second controllable switch being serially connected and tested field effect It should pipe both ends.First controllable switch, the second controllable switch and third controllable switch can be manual switch, be in the present embodiment Three switches controlled by a cyclelog.
In embodiment: electric induction described in measurement needs to be arranged different inductance to different field-effect tube, therefore, in order to Easy to operate, the inductance is connected in circuit by connection terminal, can be replaced to inductance by connection terminal, certainly The inductance for being pre-set at the different induction value that program controlled switch connects can be selected by program controlled switch.
In embodiment: first controllable switch, the second controllable switch, third controllable switch are fet power switches Pipe.
In embodiment: the current sample frequency of the current sampling measuring circuit is 10MHz.
Embodiment two:
A kind of test method for eliminating field-effect tube avalanche test inductance error circuit based on embodiment 1, the circuit packet Test voltage source is included, voltage source is successively applied to tested field-effect through the first controllable switch, inductance and current sampling measuring circuit The drain electrode of pipe and source electrode both ends, the control grid for being tested field-effect tube access switch control signal, inductance and first switch it Between be provided with freewheeling diode for inductance;Is provided between the current sampling measuring circuit and tested field-effect tube Two controllable switches, a third controllable switch are connected across the second controllable switch being serially connected and tested field-effect tube both ends, institute Stating test method is: determining the current sample frequency of current sampling measuring circuit;It is set according to tested field-effect tube technical conditions Test voltage source voltage, avalanche current test value and snowslide pendulous frequency, setting test inductance value, setting inductance error threshold value (3%-10% is generally selected, the present embodiment selects 5%), to select an inductance to be accessed circuit, wherein the method is further Include:
Step 1: one waiting time threshold value of setting, by the first controllable switch, the second controllable switch, third controllable switch It is in an off state, accesses test voltage source voltage, the control grid for being tested field-effect tube accesses cut-off signals;
Step 2: carrying out inductance correction test, the first controllable switch is connected with third controllable switch, in the waiting of setting In time threshold, measurement flows into the current value of inductance, calculates inductance value, will calculate inductance value compared with testing inductance value:
Test voltage source voltage is cut off if mutual error is less than or equal to inductance error threshold value, it is believed that access Inductance is correct, is then initially switched off the first controllable switch again to the inductive discharge of access to zero current, is then switched off third and controllably opens It closes, continues to execute third step;
Test voltage source voltage is cut off if mutual error is greater than inductance error threshold value, it is believed that the inductance of access It is incorrect, the first controllable switch is then initially switched off to the inductive discharge of access to zero current, is then switched off third controllable switch, more The inductance for changing a different induction value is accessed circuit, accesses test voltage source voltage, repeats second step;
Step 3: carrying out field-effect tube avalanche test;
Step 4: asking whether that reaching into snowslide measurement setting number terminates measurement if completing setting number;If Setting number is not completed, third step is returned.
Calculating inductance value therein: because measured device enters snowslide in discharge process, while generating avalanche voltage Vdss, Charge and discharge process is all fixed slope, and therefore, inductance can be obtained by formula L=U × t/I, in which: U is voltage source voltage (not being avalanche voltage Vdss) is set according to the technical testing condition of producer;T is (curent change process to be flowed through in inductance Time) to be equal to sampling unit time × sampling number N, I be the peak point current flowed through, and actual inductance is in microhenry Grade, therefore sampling the unit time should be as unit of microsecond, when it is reasonable value that the value unit time, which is 0.1 microsecond, the electricity The current sample frequency for flowing sampling measurement circuit is exactly 10MHz;Complete formula is L=U × 0.1 × N/I(microhenry) formula 1。
In embodiment: the current value that measurement described in second step flows into inductance, which calculates inductance value, is: when in waiting time threshold value When the electric current of interior test reaches the avalanche current test value of setting, inductance value is calculated using the avalanche current test value of measurement;When When the electric current tested in waiting time threshold value does not reach the avalanche current test value of setting, waiting time threshold time is used The current value for terminating measurement calculates inductance value.
Embodiment three:
A kind of test method for eliminating field-effect tube avalanche test inductance error circuit based on embodiment 1, the circuit packet Test voltage source is included, voltage source is successively applied to tested field-effect through the first controllable switch, inductance and current sampling measuring circuit The drain electrode of pipe and source electrode both ends, the control grid for being tested field-effect tube access switch control signal, inductance and first switch it Between be provided with freewheeling diode for inductance;Is provided between the current sampling measuring circuit and tested field-effect tube Two controllable switches, a third controllable switch are connected across the second controllable switch being serially connected and tested field-effect tube both ends, institute Stating test method is: determining the current sample frequency of current sampling measuring circuit, is set according to tested field-effect tube technical conditions Test voltage source voltage, avalanche current test value and snowslide pendulous frequency, setting test inductance value, setting inductance error threshold value (3%-10% is generally selected, the present embodiment selects 5%), to select an inductance to be accessed circuit, wherein the method is further Include:
Step 1: access test voltage source voltage, the control grid for being tested field-effect tube accesses open signal, can by first Control switch is connected with the second controllable switch, and in the waiting time threshold value of setting, measurement flows into the current value of tested field-effect tube, When current value reaches avalanche current test value or current value in the waiting time threshold of setting in the waiting time threshold value of setting Do not reach avalanche current test value in value, but arrived waiting time threshold value, at this point, the avalanche current test that record has reached Value, or current value when arrived waiting time threshold value, cut off the first controllable switch, calculate inductance value, will calculate inductance value with Test inductance value compares:
If mutual error is less than or equal to inductance error threshold value, it is believed that the inductance of access is correct, executes second step;
If mutual error is greater than inductance error threshold value, it is believed that the inductance of access is incorrect, then is tested field-effect The control grid of pipe accesses cut-off signal, cuts off test voltage source voltage, being then initially switched off the first controllable switch and second again can Control switch connects third controllable switch to the inductive discharge of access to zero current, is then switched off third controllable switch, replaces one The inductance of different induction value is accessed circuit, repeats the first step;
Step 2: executing field-effect tube avalanche test, ask whether to reach into snowslide measurement setting number, if completing to set Determine number, terminates measurement;If not completing setting number, field-effect tube avalanche test is repeated until completing setting number.
In embodiment: the current sample frequency of the current sampling measuring circuit is 10MHz.
The method further includes current values when arrived waiting time threshold value of: record if it is less than field-effect tube Minimum setting value is connected, then calculates and prompt to check that tested field-effect tube, the field-effect tube are connected minimum without inductance Setting value is arranged before entering the first step.Usual field-effect tube damage will appear such case without contacting, Setting value can be set in 10mA or left and right.
It is the concrete application citing to above-described embodiment below:
By taking Fig. 1 as an example: the anode of voltage source 01 is connected with one end of first switch S1 in node A, the cathode of voltage source 01 With reference it is connected, the other end of the first switch S1 is connected with one end of inductance L in node B, the node B and diode 02 cathode is connected, and the anode of the diode 02 is connected with reference to ground, the other end of the inductance L and the one of second switch S2 End is connected in node C, is connected with third switch S3 between node C and reference ground, current measurement circuit 03 is in B node and C node Between any position, the other end of second switch S2 is connected with the drain electrode of chip 05 to be measured, the source electrode of chip 05 to be measured and reference Ground is connected, and grid control circuit 04 is connected with the grid of the chip 05 to be measured and the reference respectively.
Ensure that inductance correctly comprises the concrete steps that in avalanche test circuit:
Step 1: all switches are being initially off-state, test condition is set, such as the voltage output of voltage source 01 is 50V, sets the inductance value of inductance L as 1mH, sets snowslide number, sets the avalanche test electric current of chip 05 to be measured as 10A, when To ensure to wait without limitation when electric current is unable to reach the avalanche current set, setting time-out is 400us;
Step 2: the voltage of voltage source 01 has reached 50V, first switch S1 is disconnected, disconnects second switch S2, closure Third switch S3;
Step 3: closure first switch S1, by voltage source 01, the electricity of first switch S1, inductance L and third switch S3 composition Flowing back to road will charge to inductance L, while current measurement circuit 03 is in running order, be acquired with the working frequency of 10MHz Electric current in the circuit inductance L, when finding that electric current reaches current value set by step 1 or the sampling time is greater than timeout value When the current value that 400us electric current is still not up to set, first switch S1 is cut off, record at this time adopt by current measurement circuit progress n times The current value I of sample can derive that unit is the inductance value of microhenry by formula 1, set by this inductance value and step 1 Inductance value is compared, if inductance value error is within 5%, it is believed that inductance is correct, step 4 is executed, if inductance value error Other than 5%, it is believed that inductance is incorrect, executes step 8.
Step 4: the voltage of voltage source 01 is maintained at 50V, first switch S1 is in an off state, the current measurement electricity When the current value of drive test amount is zero, third switch S3 is disconnected, is closed second switch S2;
Step 5: carrying out the avalanche test of chip 05 to be measured, it is closed first switch S1, while grid control circuit 04 exports 10V level, by voltage source 01, first switch S1, inductance L, second switch S2, the current loop that chip 05 to be measured forms will be to electricity Sense L charges, while current measurement circuit 03 is in running order, in the working frequency acquisition circuit inductance L of 10MHz Electric current, when finding that electric current reaches current value set by step 1 or the sampling time is greater than timeout value 400us electric current not yet When reaching the current value of setting, first switch S1 is cut off, while grid control circuit 04 exports 0V level, by judging that electric current is surveyed The current waveform that amount circuit 03 returns may determine that whether 05 avalanche test of chip to be measured passes through;
Step 6: no matter whether 05 avalanche test of chip to be measured passes through, as long as the electric current that current measurement circuit 03 returns is exhausted When being greater than zero to value, may be by formula (1) and derive inductance value, inductance value set by this inductance value and step 1 into Row compare, if inductance value error is within 5%, it is believed that inductance is correct, execute step 7, if inductance value error other than 5%, Think that inductance is incorrect, executes step 8.To avoid inductance L in test process mistake can occur for the step;Work as current measurement Circuit 03 return current absolute value be not more than zero when, can not judge at this time be inductance L occur mistake caused by electric current it is obstructed or Person is that electric current caused by chip 05 to be measured is obstructed, therefore does not infer to inductance value, continues to execute step 7;
Step 7: judging whether snowslide number reaches setting value, if reaching setting value executes step 8, if not up to Setting value executes step 5.
Step 8: replacement inductance retest or test terminate, voltage source setting is opened to 0V, first switch S1, second S2 is closed, third switch S3 is all in off-state.
It, can also be with while can be closure first switch S1 at the time of current measurement circuit 03 is started to work in step 3 Before being closure first switch S1, the data processing method of both side's situations is different.
Step 6 and Step 2: three can be and select a relationship, can also be with concurrency relation.
Diode 02 provides the current path of the inductance L after disconnecting first switch S1.
By taking Fig. 2 as an example: p-type metal-oxide-semiconductor avalanche test circuit and ensuring the correct method of inductance.
The cathode of voltage source 01 is connected with one end of first switch S1 in node A, anode and the reference ground phase of voltage source 01 Even, the other end of the first switch S1 is connected with one end of inductance L in node B, the anode phase of the node B and diode 02 Even, the cathode of the diode 02 is connected with reference to ground, and the other end of the inductance L and one end of second switch S2 are in node C It is connected, is connected with third switch S3, any position between B node and C node of current measurement circuit 03 between node C and reference ground It sets, the other end of second switch S2 is connected with the drain electrode of chip 06 to be measured, and the source electrode of chip 06 to be measured is connected with reference to ground, grid Control circuit 04 is connected with the grid of the chip 06 to be measured and the reference respectively.
Further, the second switch S2 is that relationship is connected in mutual exclusion with the third switch S3, when second switch S2 is closed When conjunction, third switch S3 is off-state, and when third switch S3 closure, second switch S2 is off-state.
In the second embodiment, it is ensured that inductance correctly comprises the concrete steps that in avalanche test circuit:
Step 1: all switches are being initially off-state, test condition, such as the voltage output of voltage source 01 are set For -50V, set the inductance value of inductance L as 1mH, set snowslide number, set the avalanche test electric current of chip 06 to be measured as - 10A, when electric current is unable to reach the avalanche current set to ensure to wait without limitation, setting time-out is 400us;
Step 2: the voltage of voltage source 01 has reached -50V, first switch S1 is disconnected, disconnects second switch S2, closure Third switch S3;
Step 3: closure first switch S1, by voltage source 01, the electricity of first switch S1, inductance L and third switch S3 composition Flowing back to road will charge to inductance L, while current measurement circuit 03 is in running order, be acquired with the working frequency of 10MHz Electric current in the circuit inductance L, when finding that electric current reaches current value set by step 1 or the sampling time is greater than timeout value When the current value that 400us electric current is still not up to set, first switch S1 is cut off, record at this time adopt by current measurement circuit progress n times The current value I of sample can derive that unit is the inductance value of microhenry by formula 1, set by this inductance value and step 1 Inductance value is compared, if inductance value error is within 5%, it is believed that inductance is correct, step 4 is executed, if inductance value error Other than 5%, it is believed that inductance is incorrect, executes step 8.
Step 4: the voltage of voltage source 01 is maintained at -50V, first switch S1 is in an off state, the current measurement When the current value of circuit measuring is zero, third switch S3 is disconnected, is closed second switch S2;
Step 5: carrying out the avalanche test of chip 06 to be measured, it is closed first switch S1, while grid control circuit 04 exports 10V level, by voltage source 01, first switch S1, inductance L, second switch S2, the current loop that chip 06 to be measured forms will be to electricity Sense L charges, while current measurement circuit 03 is in running order, in the working frequency acquisition circuit inductance L of 10MHz Electric current, when finding that electric current reaches current value set by step 1 or the sampling time is greater than timeout value 400us electric current not yet When reaching the current value of setting, first switch S1 is cut off, while grid control circuit 04 exports 0V level, by judging that electric current is surveyed The current waveform that amount circuit 03 returns may determine that whether 06 avalanche test of chip to be measured passes through;
Step 6: no matter whether 06 avalanche test of chip to be measured passes through, as long as the electric current that current measurement circuit 03 returns is exhausted When being greater than zero to value, may be by formula (1) and derive inductance value, inductance value set by this inductance value and step 1 into Row compare, if inductance value error is within 5%, it is believed that inductance is correct, execute step 7, if inductance value error other than 5%, Think that inductance is incorrect, executes step 8.To avoid inductance L in test process mistake can occur for the step;Work as current measurement Circuit 03 return current absolute value be not more than zero when, can not judge at this time be inductance L occur mistake caused by electric current it is obstructed or Person is that electric current caused by chip 06 to be measured is obstructed, therefore does not infer to inductance value, continues to execute step 7;
Step 7: judging whether snowslide number reaches setting value, if reaching setting value executes step 8, if not up to Setting value executes step 5.
Step 8: replacement inductance retest or test terminate, voltage source setting to 0V, first switch S1, second switch S2, third switch S3 is all in off-state.
It, can also be with while can be closure first switch S1 at the time of current measurement circuit 03 is started to work in step 3 Before being closure first switch S1, the data processing method of both side's situations is different.
Step 6 and Step 2: three can be and select a relationship, can also be with concurrency relation.
Diode 02 provides the current path of the inductance L after disconnecting first switch S1.
Above embodiments describe avalanche test circuit and ensure the correct method of inductance, is suitable for the snowslide of N-type metal-oxide-semiconductor and surveys Examination and p-type metal-oxide-semiconductor avalanche test, above-described embodiment is the description of the invention, rather than limiting the invention, it is any not Beyond the innovation and creation within the scope of true spirit, fall within the scope of the present invention.

Claims (6)

1. a kind of based on the test method for eliminating field-effect tube avalanche test inductance error circuit, the circuit includes test voltage Source, voltage source successively through the first controllable switch, inductance and current sampling measuring circuit be applied to tested field-effect tube drain electrode and Source electrode both ends, the control grid connection switch for being tested field-effect tube control signal, connect and be used between inductance and first switch The freewheeling diode cathode of inductance, freewheeling diode anode connect voltage source negative pole;In the current sampling measuring circuit and quilt It surveys between field-effect tube and is provided with the second controllable switch, a third controllable switch is connected across the second controllable switch being serially connected With tested field-effect tube both ends, the test method is: the current sample frequency of current sampling measuring circuit is determined, according to tested Field-effect tube technical conditions set test voltage source voltage, avalanche current test value and snowslide pendulous frequency, setting test inductance Value, setting inductance error threshold value, select an inductance to be accessed circuit, which is characterized in that the method further includes:
Step 1: one waiting time threshold value of setting, the first controllable switch, the second controllable switch, third controllable switch are in Off-state accesses test voltage source voltage, and the control grid for being tested field-effect tube accesses cut-off signals;
Step 2: carrying out inductance correction test, the first controllable switch is connected with third controllable switch, in the waiting time of setting In threshold value, measurement flows into the current value of inductance, calculates inductance value, by the inductance value of calculating compared with testing inductance value:
Test voltage source voltage is cut off if error is less than or equal to inductance error threshold value, it is believed that the inductance of access is correct, then It is initially switched off the first controllable switch again to the inductive discharge of access to zero current, is then switched off third controllable switch, continues to execute Three steps;
Test voltage source voltage is cut off if error is greater than inductance error threshold value, it is believed that the inductance of access is incorrect, then first The first controllable switch is cut off to the inductive discharge of access to zero current, third controllable switch is then switched off, replaces a different electricity The inductance of inductance value is accessed circuit, accesses test voltage source voltage, repeats second step;
Step 3: the second controllable switch of closure, carries out field-effect tube avalanche test;
Step 4: asking whether that reaching into snowslide measurement setting number terminates measurement if completing setting number;If not complete At setting number, third step is returned.
2. being calculated the method according to claim 1, wherein measurement described in second step flows into the current value of inductance Inductance value is: when the electric current tested in waiting time threshold value reaches the avalanche current test value of setting, using the snow of measurement It collapses testing current value and calculates inductance value;When the electric current tested in waiting time threshold value does not reach the avalanche current test of setting When value, inductance value is calculated using the current value that waiting time threshold time terminates measurement.
3. the method according to claim 1, wherein the current sample frequency of the current sampling measuring circuit is 10MHz。
4. a kind of based on the test method for eliminating field-effect tube avalanche test inductance error circuit, the circuit includes test voltage Source, voltage source successively through the first controllable switch, inductance and current sampling measuring circuit be applied to tested field-effect tube drain electrode and Source electrode both ends, the control grid for being tested field-effect tube access switch control signal, connect and be used between inductance and first switch The freewheeling diode cathode of inductance, freewheeling diode anode connect voltage source negative pole;In the current sampling measuring circuit and quilt It surveys between field-effect tube and is provided with the second controllable switch, a third controllable switch is connected across the second controllable switch being serially connected With tested field-effect tube both ends, the test method is: the current sample frequency of current sampling measuring circuit is determined, according to tested Field-effect tube technical conditions set test voltage source voltage, avalanche current test value and snowslide pendulous frequency, setting test inductance Value, setting inductance error threshold value, select an inductance to be accessed circuit, which is characterized in that the method further includes:
Step 1: access test voltage source voltage, the control grid for being tested field-effect tube accesses open signal, and first is controllably opened Pass is connected with the second controllable switch, and in the waiting time threshold value of setting, measurement flows into the current value of tested field-effect tube, works as electricity Flow valuve reaches avalanche current test value or current value in the waiting time threshold value of setting in the waiting time threshold value of setting Do not reach avalanche current test value, but arrived waiting time threshold value, at this point, the avalanche current test value that record has reached, Or current value when arrived waiting time threshold value, the first controllable switch is cut off, inductance value is calculated, inductance value and test will be calculated Inductance value compares:
If error is less than or equal to inductance error threshold value, it is believed that the inductance of access is correct, executes second step;
If error is greater than inductance error threshold value, it is believed that the inductance of access is incorrect, then the control grid for being tested field-effect tube connects Enter cut-off signal, cut off test voltage source voltage, be then initially switched off the first controllable switch and the second controllable switch, connecting third can Control switch is then switched off third controllable switch, replaces the inductance of a different induction value to the inductive discharge of access to zero current, Circuit is accessed, the first step is repeated;
Step 2: executing field-effect tube avalanche test, ask whether to reach into snowslide measurement setting number, if completing setting time Number terminates measurement;If not completing setting number, field-effect tube avalanche test is repeated until completing setting number.
5. according to the method described in claim 4, it is characterized in that, the current sample frequency of the current sampling measuring circuit is 10MHz。
6. according to the method described in claim 4, it is characterized in that, the method further includes: record arrived waiting Minimum setting value is connected if it is less than field-effect tube in current value when time threshold, then calculates without inductance and prompt to check quilt Field-effect tube is surveyed, minimum setting value, which is connected, in the field-effect tube is arranged before entering the first step.
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