CN105928812A - In-situ high-temperature indentation test system based on scanning electron microscope - Google Patents
In-situ high-temperature indentation test system based on scanning electron microscope Download PDFInfo
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- CN105928812A CN105928812A CN201610522131.5A CN201610522131A CN105928812A CN 105928812 A CN105928812 A CN 105928812A CN 201610522131 A CN201610522131 A CN 201610522131A CN 105928812 A CN105928812 A CN 105928812A
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- 238000012360 testing method Methods 0.000 title claims abstract description 49
- 238000011065 in-situ storage Methods 0.000 title claims abstract description 27
- 238000007373 indentation Methods 0.000 title abstract description 11
- 230000007246 mechanism Effects 0.000 claims abstract description 13
- 238000010894 electron beam technology Methods 0.000 claims abstract description 7
- 238000004891 communication Methods 0.000 claims abstract description 4
- 239000013307 optical fiber Substances 0.000 claims abstract description 4
- 230000001105 regulatory effect Effects 0.000 claims description 36
- 239000000919 ceramic Substances 0.000 claims description 33
- 238000009413 insulation Methods 0.000 claims description 24
- 238000003825 pressing Methods 0.000 claims description 13
- 238000013519 translation Methods 0.000 claims description 12
- 238000006073 displacement reaction Methods 0.000 claims description 9
- 230000006835 compression Effects 0.000 claims description 2
- 238000007906 compression Methods 0.000 claims description 2
- 229910052573 porcelain Inorganic materials 0.000 claims description 2
- 238000003384 imaging method Methods 0.000 abstract description 2
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 11
- 238000011161 development Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 208000037656 Respiratory Sounds Diseases 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/40—Investigating hardness or rebound hardness
- G01N3/54—Performing tests at high or low temperatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
- G01N3/06—Special adaptations of indicating or recording means
- G01N3/068—Special adaptations of indicating or recording means with optical indicating or recording means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/0076—Hardness, compressibility or resistance to crushing
- G01N2203/0078—Hardness, compressibility or resistance to crushing using indentation
- G01N2203/0082—Indentation characteristics measured during load
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/022—Environment of the test
- G01N2203/0222—Temperature
- G01N2203/0226—High temperature; Heating means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/0641—Indicating or recording means; Sensing means using optical, X-ray, ultraviolet, infrared or similar detectors
Abstract
The invention provides an in-situ high-temperature indentation test system based on a scanning electron microscope. The in-situ high-temperature indentation test system comprises a scanning electron microscope, a high-temperature indentation test unit, a control unit and a computer; the high-temperature indentation test unit comprises a base, an adjusting platform arranged at one side of the upper surface of the base, and a high-temperature indentation mechanism arranged at the other side of the upper surface of the base; the scanning electron microscope comprises an electron microscope pole shoe, a sample chamber, a cabin door, a function expansion interface, a communication interface and an optical-fiber interface; the adjusting platform is provided with a sample table, an X-axis adjusting device, a Y-axis adjusting device and a Z-axis adjusting device; and the high-temperature indentation mechanism comprises a heating device, a pressure head seat arranged on the base, and a pressure head arranged on the pressure head seat, and the pressure head is disposed below the electron microscope pole shoe. The scanning electron microscope is reasonably combined with the high-temperature indentation test unit, and the electron beam scanning imaging and the high-temperature indentation can be simultaneously carried out and do not interfere with each other, so that the actual in-situ temperature-field test for mechanical properties can be realized.
Description
Technical field
The present invention relates to microstructure performance detection apparatus technical field, particularly relate to a kind of based on scanning electricity
The microscopical in-situ high temperature impression test system of son.
Background technology
Along with the fast development of material science and technology, how to characterize material, structure and device from microcosmic angle and exist
Various physics under the effect of high-temperature field, chemistry, mechanical property become the study frontier of materials science field
And focus, therefore research invention in-situ high temperature impression test system based on scanning electron microscope is being sought newly
Material, new technique, new technology aspect are particularly important.
The device of current research material mechanical property has high temperature impression device, can test material under high-temperature field
The stress-strain diagram of material, carrys out, with this, the mechanical property that research material is relevant, such as hardness, elastic modelling quantity etc..
But these Mechanics Performance Testing parameters macroscopic view often, the observation and analysis of rear position, it is impossible to from micro-nano meter ruler
Essential mechanism is explained on degree, also cannot the change observing material microstructure in situ.Due at present
Related experiment test analysis yardstick and the limitation of the degree of depth, this patent design invention one combines scanning electron and shows
The feature such as micro mirror bulk resolution height, amplification continuously adjustabe, sample chamber are big, at scanning electron
In-situ high temperature impression test device is carried out under microscopic conditions.By this device using scanning electron microscope as
In-situ observation means, carry out indentation test to material under conditions of high temperature, are obtaining its stress-strain diagram
While in-situ observation analyze pressure head press-in test materials process in its microstructure development law with its with
The constitutive relation of mechanical property parameters.
Summary of the invention
It is an object of the invention to invent a kind of in-situ high temperature impression test system based on scanning electron microscope,
To solve the problem that above-mentioned prior art exists, in-situ observation material is pressed at pressure head at different ambient temperatures
In test materials process, the development law of its microstructure is with itself and the constitutive relation of mechanical property parameters.
For achieving the above object, the invention provides following scheme: the present invention provides a kind of based on scanning electron
Microscopical in-situ high temperature impression test system, including scanning electron microscope, high temperature impression test cell,
Control unit and computer, described high temperature impression test cell is located at the sample of described scanning electron microscope
Chamber interior, described control unit respectively with described scanning electron microscope, described high temperature impression test cell
Being connected, described computer is connected with described control unit；Described high temperature impression test cell include base,
Regulating platform and high temperature creasing mechanism, described regulating platform is provided with described sample stage, and described regulating platform is arranged at
Described base upper surface side, described high temperature creasing mechanism is arranged at described base upper surface opposite side；Described
High temperature creasing mechanism includes pressure head, pressure head calandria, pressure head thermal insulation layer, pressing head seat, force transducer, sample
Calandria and sample thermal insulation layer；Described pressing head seat is located on described base, and described pressure head is arranged at described pressure
Among head calandria, the tip of described pressure head is stretched out from described pressure head calandria, described pressure head thermal insulation layer and pressure
Head calandria is all arranged on described pressing head seat, and described pressure head thermal insulation layer is positioned at described pressure head calandria with described
Between force transducer, described force transducer is arranged between described pressure head thermal insulation layer and pressing head seat, described pressure head
Calandria is oppositely arranged with described sample calandria, and described sample calandria, institute are pointed in the tip of described pressure head
State force transducer, pressure head calandria, sample calandria are all connected with described control unit, described pressure head position
Lower section in the Electronic Speculum pole shoe of described scanning electron microscope.
Preferably, described sample chamber is provided with hatch door, and described hatch door is provided with Function Extension interface, communication connects
Mouth, interface of the ground wire and optical fiber interface are connected with described control unit by connecting line.
Preferably, X-axis piezoelectric ceramics, Y-axis piezoelectricity pottery it are sequentially provided with between described regulating platform and sample stage
Porcelain and Z axis piezoelectric ceramics, described X-axis piezoelectric ceramics is used for the displacement fine setting along X axis of the described sample stage,
Described Y-axis piezoelectric ceramics is finely tuned along the displacement of Y-axis for described sample stage, described Z axis piezoelectric ceramics
Finely tune along the displacement of Z-axis direction for described sample stage, described X-axis piezoelectric ceramics, Y-axis piezoelectric ceramics and Z
Axial compression electroceramics is connected with described control unit respectively.
Preferably, described sample stage is arranged on described sample calandria, and described sample calandria is arranged on institute
Stating on Z axis piezoelectric ceramics, described sample thermal insulation layer is arranged on described sample calandria and described Z axis piezoelectricity
Between pottery.
Preferably, described regulating platform includes X-axis adjusting means, Y-axis adjusting means, Z axis adjusting means；
The axis direction of the electron beam that described Electronic Speculum pole shoe is launched is 30 ° with the angle of described sample stage table top,
The tip of described electron beam is irradiated to the tip of described pressure head.
Preferably, described X-axis adjusting means can make described sample stage move along described regulating platform length direction,
Described X-axis adjusting means includes the X axis translation stage being located at described regulating platform upper surface, is located at described X
X-axis load bearing seat on axial translation platform, described X-axis load bearing seat is equipped with X-axis and drives motor, described X
Axle load bearing seat is fixedly connected with the X-axis drive rod of one and described X-axis driving motor parallel, and described X-axis is driven
The end of lever is provided with X-axis driven gear, and described X-axis drives motor to be provided with and described X-axis passive tooth
X-axis described in the X-axis driving gear that wheel is meshed drives motor to be connected with described control unit.
Preferably, described Y-axis adjusting means can make described sample stage along being perpendicular to described regulating platform length side
To and be perpendicular to the direction of described base upper surface and move, described Y-axis adjusting means includes being located at described sample
Y-axis translation stage between sample platform and described regulating platform, the Y-axis being located on described Y-axis translation stage is held
Carrying seat, described Y-axis load bearing seat is worn and has been penetrated Y-axis driving motor, and described Y-axis load bearing seat is fixedly connected with one
With the Y-axis drive rod that described Y-axis drives motor parallel, the end of described Y-axis drive rod is provided with Y-axis quilt
Moving gear, described Y-axis drives motor to be provided with the Y-axis driving tooth being meshed with described Y-axis driven gear
Wheel, described Y-axis drives motor to be connected with described control unit.
Preferably, described Z axis adjusting means can make sample stage along be perpendicular to described regulating platform length direction and
The direction being parallel to described bottom surface upper surface is moved, and described Z axis adjusting means includes that the first Z axis drives horse
Reach, the first Z axis driving gear, the first Z axis driven gear, the first Z axis drive rod and the second Z axis drive
Dynamic motor, the second Z axis driving gear, the second Z axis driven gear, the second Z axis drive rod and the 3rd Z
Shaft drive motor, the 3rd Z axis driving gear, the 3rd Z axis driven gear, the 3rd Z axis drive rod, institute
State the tune that the first Z axis drives motor and described second Z axis to drive motor to be vertical at described sample stage side
On joint platform, described 3rd Z axis drives motor to be vertical on the regulating platform of described sample stage opposite side, described
The first Z axis driven gear on first Z axis drive rod is meshed with described first Z axis driving gear, institute
The the second Z axis driven gear stated on the second Z axis drive rod is meshed with described second Z axis driving gear,
The 3rd Z axis driven gear on described 3rd Z axis drive rod is meshed with described 3rd Z axis driving gear；
Described Z axis adjusting means can make described regulating platform rotate, and described first Z axis drives motor, the second Z axis
Motor and the 3rd Z axis is driven to drive motor to be connected with described control unit respectively.
Preferably, described pressure head calandria is cylinder, and described force transducer is cylinder hat, described pressure head
Calandria is set in described pressure head thermal insulation layer and fits with described pressure head thermal insulation layer, described force transducer upper
Fitting with described pressure head thermal insulation layer in surface, fits with described pressing head seat in the side of described force transducer.
The specific embodiment provided according to the present invention, the invention discloses techniques below effect: this set is the highest
Temperature and pressure trace apparatus structure is the compactest, stable drive, be effectively combined temperature field and stress field, at scanning electricity
The microdeformation of material, damage can be carried out in-situ observation with fracture process under sub-microscopy imaging system, for
Disclose material and provide brand-new method of testing at different temperatures mechanical characteristic after the match and damage mechanisms.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to enforcement
In example, the required accompanying drawing used is briefly described, it should be apparent that, the accompanying drawing in describing below is only
Some embodiments of the present invention, for those of ordinary skill in the art, are not paying creative work
On the premise of, it is also possible to other accompanying drawing is obtained according to these accompanying drawings.
Fig. 1 is the structural representation that high temperature impression test cell is installed in scanning electron microscope sample room；
Fig. 2 is the structural representation at a kind of visual angle of described high temperature impression test cell；
Fig. 3 is the structural representation at the another kind of visual angle of described high temperature impression test cell；
Fig. 4 is the partial sectional view of described high temperature impression test cell；
Fig. 5 is the partial schematic diagram of described high temperature impression test cell.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clearly
Chu, be fully described by, it is clear that described embodiment be only a part of embodiment of the present invention rather than
Whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art are not making creation
The every other embodiment obtained under property work premise, broadly falls into the scope of protection of the invention.
It is an object of the invention to provide a kind of in-situ high temperature impression test system based on scanning electron microscope,
To solve the problem that prior art exists, in-situ observation material is at different ambient temperatures in pressure head press-in test
In materials process, the development law of its microstructure is with itself and the constitutive relation of mechanical property parameters..
Understandable for enabling the above-mentioned purpose of the present invention, feature and advantage to become apparent from, below in conjunction with the accompanying drawings and
The present invention is further detailed explanation for detailed description of the invention.
The present invention provides a kind of in-situ high temperature impression test system based on scanning electron microscope, including scanning
Ultramicroscope 38, high temperature impression test cell 39, control unit 40 and computer, high temperature impression is surveyed
The sample chamber 41 that examination unit 39 is located at scanning electron microscope 38 is internal, control unit 40 respectively with sweep
Retouch ultramicroscope 38, high temperature impression test cell 39 is connected, and computer is connected with control unit 40
Connect；High temperature impression test cell 39 includes base 1, regulating platform 2 and high temperature creasing mechanism, regulating platform 2
On be provided with sample stage 32, regulating platform 2 is arranged at base 1 upper surface side, and high temperature creasing mechanism is arranged
In base 1 upper surface opposite side；High temperature creasing mechanism includes that pressure head 37, pressure head calandria 36, power sense
Device 34, pressing head seat 33, pressure head thermal insulation layer 35, sample calandria 31 and sample thermal insulation layer 30；Pressure head
Seat 33 is located on base 1, and pressure head 37 is arranged among pressure head calandria 36, and the tip of pressure head 37 is from pressure
Head calandria 36 stretches out, and pressure head thermal insulation layer 35 and pressure head calandria 36 are all arranged on pressing head seat 33, pressure
Head thermal insulation layer 35 is between pressure head calandria 36 and force transducer 34, and force transducer 34 is arranged at pressure head
Between seat 33, pressure head calandria 36 is oppositely arranged with sample calandria 31, and the most advanced and sophisticated of pressure head 37 points to sample
Product calandria 31, force transducer 35, pressure head calandria 36, sample calandria 31 all with control unit 40
Being connected, pressure head 37 is positioned at the lower section of the Electronic Speculum pole shoe 42 of scanning electron microscope 38.
Sample chamber 41 is provided with hatch door 44, hatch door 44 be provided with Function Extension interface 45, communication interface 46,
Interface of the ground wire and optical fiber interface 47 are connected with control unit 40 by connecting line.
X-axis piezoelectric ceramics 27, Y-axis piezoelectric ceramics 28 it is sequentially provided with between regulating platform 2 and sample stage 32
With Z axis piezoelectric ceramics 29, X-axis piezoelectric ceramics 27 is used for the sample stage 32 displacement fine setting along X axis,
Y-axis piezoelectric ceramics 28 is finely tuned along the displacement of Y-axis for sample stage 32, and Z axis piezoelectric ceramics 29 is used for
Sample stage 32 is finely tuned along the displacement of Z-axis direction, X-axis piezoelectric ceramics 27, Y-axis piezoelectric ceramics 28 and Z axis
Piezoelectric ceramics 29 is connected with control unit 40 respectively.
Sample stage 32 is arranged on sample calandria 31, and sample calandria 31 is arranged on Z axis piezoelectric ceramics
On 29, sample thermal insulation layer 30 is arranged between sample calandria 31 and Z axis piezoelectric ceramics 29.
Regulating platform 2 includes X-axis adjusting means, Y-axis adjusting means, Z axis adjusting means；Electronic Speculum pole shoe
The axis direction of the electron beam 43 that 42 are launched is 30 ° with the angle of sample stage 32 table top, electron beam 43
Tip be irradiated to the tip of pressure head 37.
X-axis adjusting means can make sample stage 32 move along regulating platform 2 length direction, X-axis adjusting means bag
Including the X axis translation stage 3 being located at regulating platform 2 upper surface, the X-axis being located on X axis translation stage 3 is held
Carry seat 4, X-axis load bearing seat 4 be equipped with X-axis drive motor 5, X-axis load bearing seat 4 be fixedly connected with one with
X-axis drives the X-axis drive rod 8 that motor 5 is parallel, and the end of X-axis drive rod 8 is provided with X-axis passive tooth
Wheel 7, X-axis drives motor 5 to be provided with the X-axis driving gear 6, X being meshed with X-axis driven gear 7
Shaft drive motor 5 is connected with control unit 40.
Y-axis adjusting means can make sample stage 32 along being perpendicular to regulating platform 2 length direction and being perpendicular to base 1
The direction of upper surface is moved, and Y-axis adjusting means includes the Y-axis being located between sample stage 32 and regulating platform 2
To translation stage 9, the Y-axis load bearing seat 10 being located on Y-axis translation stage 9, Y-axis load bearing seat 10 is worn and has been penetrated
Y-axis drives motor 11, and Y-axis load bearing seat 10 is fixedly connected with a Y parallel with Y-axis driving motor 11
Axle drive rod 14, the end of Y-axis drive rod 14 is provided with Y-axis driven gear 13, and Y-axis drives motor 11
Being provided with the Y-axis driving gear 12 being meshed with Y-axis driven gear 13, Y-axis drives motor 11 and control
Unit 40 processed is connected.
Z axis adjusting means can make sample stage 32 along being perpendicular to the length direction of regulating platform 2 and being parallel to bottom surface
The direction of upper surface is moved, and Z axis adjusting means includes that the first Z axis drives motor the 15, first Z axis actively
Gear the 16, first Z axis driven gear the 17, first Z axis drive rod 18 and the second Z axis drive motor 19,
Second Z axis driving gear the 20, second Z axis driven gear the 21, second Z axis drive rod 22 and the 3rd Z
Shaft drive motor the 23, the 3rd Z axis driving gear the 24, the 3rd Z axis driven gear the 25, the 3rd Z axis drives
Bar 26, the first Z axis drives motor 15 and the second Z axis to drive motor 19 to be vertical at sample stage 32 side
Regulating platform 2 on, the 3rd Z axis drives motor 23 to be vertical at the regulating platform 2 of sample stage 32 opposite side
On, the first Z axis driven gear 17 on the first Z axis drive rod 18 and the first Z axis driving gear 16 phase
Engagement, the second Z axis driven gear 21 and the second Z axis driving gear 20 on the second Z axis drive rod 22
It is meshed, the 3rd Z axis driven gear 25 and the 3rd Z axis driving gear on the 3rd Z axis drive rod 26
24 are meshed；Z axis adjusting means can make regulating platform 2 rotate, and the first Z axis drives motor the 15, the 2nd Z
Shaft drive motor 19 drives motor 23 to be connected with control unit 40 respectively with the 3rd Z axis.
Pressure head calandria 36 is in cylinder, and force transducer 35 is in cylinder hat, and pressure head calandria 36 is sheathed
Fitting in force transducer 35 and with force transducer, the upper surface of force transducer is fitted with pressure head thermal insulation layer 34,
Fit with pressing head seat 33 in the side of force transducer.
When carrying out high temperature impression test, first being kept flat by sample and be placed in sample stage, operator pass through computer
Opening X-axis drives motor 5, Y-axis to drive motor the 11, first Z axis to drive motor the 15, second Z axis to drive
Dynamic motor 19 and/or the 3rd Z axis drive motor to realize sample stage 32 in X, Y, the coarse adjustment of Z-direction, slightly
Tune makes sample be located substantially near pressure head 37；Then X-axis piezoelectric ceramics 27, Y-axis are controlled by computer
Piezoelectric ceramics 28 and/or Z axis piezoelectric ceramics 29 realize sample stage in X, Y, the fine setting of Z-direction, process
Fine setting makes sample be positioned at immediately below pressure head 37 accurately, conveniently carries out high temperature impression test.Then by meter
Calculation machine opens pressure head calandria 36 and sample calandria 31, heats pressure head 37 and sample simultaneously,
To be heated after assigned temperature, open Y-axis by computer and drive motor 11 to make the sample direction to pressure head
Motion, namely makes pressure head 37 press sample, force transducer 35 that computer is collected by control unit,
The signal of X-axis piezoelectric ceramics 27, Y-axis piezoelectric ceramics 28 and Z axis piezoelectric ceramics 29 calculates and obtains sample
The stress-strain diagram of product, can also monitor material dynamically in varying environment simultaneously by scanning electron microscope
At a temperature of in Indentation Process the change of its heterogeneous microstructure and the micro object scholarship and moral conduct such as the germinating of crackle, extension
For.
In this specification, each embodiment uses the mode gone forward one by one to describe, and what each embodiment stressed is
With the difference of other embodiments, between each embodiment, identical similar portion sees mutually.For
For system disclosed in embodiment, owing to it corresponds to the method disclosed in Example, so the comparison described
Simply, relevant part sees method part and illustrates.
Principle and the embodiment of the present invention are set forth by specific case used herein, above enforcement
The explanation of example is only intended to help to understand method and the core concept thereof of the present invention；Simultaneously for this area
Those skilled in the art, according to the thought of the present invention, the most all can change
Part.In sum, this specification content should not be construed as limitation of the present invention.
Claims (9)
1. an in-situ high temperature impression test system based on scanning electron microscope, it is characterised in that: bag
Include scanning electron microscope, high temperature impression test cell, control unit and computer, described high temperature impression
Test cell is located at inside the sample chamber of described scanning electron microscope, and described control unit is respectively with described
Scanning electron microscope, described high temperature impression test cell are connected, described computer and described control unit
It is connected；Described high temperature impression test cell includes base, regulating platform and high temperature creasing mechanism, described regulation
Being provided with described sample stage on platform, described regulating platform is arranged at described base upper surface side, described high-temperature high-pressure
Trace mechanism is arranged at described base upper surface opposite side；Described high temperature creasing mechanism includes that pressure head, pressure head heat
Body, pressure head thermal insulation layer, pressing head seat, force transducer, sample calandria and sample thermal insulation layer；Described pressure head
Seat be located on described base, described pressure head is arranged among described pressure head calandria, the tip of described pressure head from
Described pressure head calandria stretches out, and described pressure head thermal insulation layer and pressure head calandria are all arranged on described pressing head seat,
Described pressure head thermal insulation layer is between described pressure head calandria and described pressing head seat, and described force transducer is arranged at
Between described pressing head seat and described pressure head thermal insulation layer, described pressure head calandria is relative with described sample calandria to be set
Putting, described sample calandria, described force transducer, pressure head calandria, sample are pointed in the tip of described pressure head
Calandria is all connected with described control unit, and the tip of described pressure head is positioned at described scanning electron microscope
The underface of Electronic Speculum pole shoe.
In-situ high temperature impression test system based on scanning electron microscope the most according to claim 1,
It is characterized in that: described sample chamber is provided with hatch door, and described hatch door is provided with Function Extension interface, communication connects
Mouth, interface of the ground wire and optical fiber interface are connected with described control unit by connecting line.
In-situ high temperature impression test system based on scanning electron microscope the most according to claim 1,
It is characterized in that: between described regulating platform and sample stage, be sequentially provided with X-axis piezoelectric ceramics, Y-axis piezoelectricity pottery
Porcelain and Z axis piezoelectric ceramics, described X-axis piezoelectric ceramics is used for the displacement fine setting along X axis of the described sample stage,
Described Y-axis piezoelectric ceramics is finely tuned along the displacement of Y-axis for described sample stage, described Z axis piezoelectric ceramics
Finely tune along the displacement of Z-axis direction for described sample stage, described X-axis piezoelectric ceramics, Y-axis piezoelectric ceramics and Z
Axial compression electroceramics is connected with described control unit respectively.
In-situ high temperature impression test system based on scanning electron microscope the most according to claim 3,
It is characterized in that: described sample stage is arranged on described sample calandria, and described sample calandria is arranged on institute
Stating on Z axis piezoelectric ceramics, described sample thermal insulation layer is arranged on described sample calandria and described Z axis piezoelectricity
Between pottery.
In-situ high temperature impression test system based on scanning electron microscope the most according to claim 4,
It is characterized in that: described regulating platform includes X-axis adjusting means, Y-axis adjusting means, Z axis adjusting means；
The axis direction of the electron beam that described Electronic Speculum pole shoe is launched is 30 ° with the angle of described sample stage table top,
The tip of described electron beam is irradiated to the tip of described pressure head.
In-situ high temperature impression test system based on scanning electron microscope the most according to claim 5,
It is characterized in that: described X-axis adjusting means can make described sample stage move along described regulating platform length direction,
Described X-axis adjusting means includes the X axis translation stage being located at described regulating platform upper surface, is located at described X
X-axis load bearing seat on axial translation platform, described X-axis load bearing seat is equipped with X-axis and drives motor, described X
Axle load bearing seat is fixedly connected with the X-axis drive rod of one and described X-axis driving motor parallel, and described X-axis is driven
The end of lever is provided with X-axis driven gear, and described X-axis drives motor to be provided with and described X-axis passive tooth
X-axis described in the X-axis driving gear that wheel is meshed drives motor to be connected with described control unit.
In-situ high temperature impression test system based on scanning electron microscope the most according to claim 5,
It is characterized in that: described Y-axis adjusting means can make described sample stage along being perpendicular to described regulating platform length side
To and be perpendicular to the direction of described base upper surface and move, described Y-axis adjusting means includes being located at described sample
Y-axis translation stage between sample platform and described regulating platform, the Y-axis being located on described Y-axis translation stage is held
Carrying seat, described Y-axis load bearing seat is worn and has been penetrated Y-axis driving motor, and described Y-axis load bearing seat is fixedly connected with one
With the Y-axis drive rod that described Y-axis drives motor parallel, the end of described Y-axis drive rod is provided with Y-axis quilt
Moving gear, described Y-axis drives motor to be provided with the Y-axis driving tooth being meshed with described Y-axis driven gear
Wheel, described Y-axis drives motor to be connected with described control unit.
In-situ high temperature impression test system based on scanning electron microscope the most according to claim 5,
It is characterized in that: described Z axis adjusting means can make sample stage along be perpendicular to described regulating platform length direction and
The direction being parallel to described bottom surface upper surface is moved, and described Z axis adjusting means includes that the first Z axis drives horse
Reach, the first Z axis driving gear, the first Z axis driven gear, the first Z axis drive rod and the second Z axis drive
Dynamic motor, the second Z axis driving gear, the second Z axis driven gear, the second Z axis drive rod and the 3rd Z
Shaft drive motor, the 3rd Z axis driving gear, the 3rd Z axis driven gear, the 3rd Z axis drive rod, institute
State the tune that the first Z axis drives motor and described second Z axis to drive motor to be vertical at described sample stage side
On joint platform, described 3rd Z axis drives motor to be vertical on the regulating platform of described sample stage opposite side, described
The first Z axis driven gear on first Z axis drive rod is meshed with described first Z axis driving gear, institute
The the second Z axis driven gear stated on the second Z axis drive rod is meshed with described second Z axis driving gear,
The 3rd Z axis driven gear on described 3rd Z axis drive rod is meshed with described 3rd Z axis driving gear；
Described Z axis adjusting means can make regulating platform rotate, and described first Z axis drives motor, the second Z axis to drive
Motor and the 3rd Z axis drive motor to be connected with described control unit respectively.
In-situ high temperature impression test system based on scanning electron microscope the most according to claim 1,
It is characterized in that: described pressure head calandria is cylinder, described force transducer is cylinder hat, described pressure head
Calandria is set in described pressure head thermal insulation layer and fits with described pressure head thermal insulation layer, described force transducer upper
Fitting with described pressure head thermal insulation layer in surface, fits with described pressing head seat in the side of described force transducer.
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