CN110044752A - High/low temperature impression test device in situ for cone-beam CT imaging - Google Patents

High/low temperature impression test device in situ for cone-beam CT imaging Download PDF

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CN110044752A
CN110044752A CN201910348219.3A CN201910348219A CN110044752A CN 110044752 A CN110044752 A CN 110044752A CN 201910348219 A CN201910348219 A CN 201910348219A CN 110044752 A CN110044752 A CN 110044752A
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low temperature
platform
imaging
cone
sample
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CN110044752B (en
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王顺博
张建海
赵宏伟
周水龙
张世忠
孟凡越
赵久成
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Jilin University
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Jilin University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/40Investigating hardness or rebound hardness
    • G01N3/54Performing tests at high or low temperatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0001Type of application of the stress
    • G01N2203/0003Steady
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0014Type of force applied
    • G01N2203/0016Tensile or compressive
    • G01N2203/0019Compressive
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/003Generation of the force
    • G01N2203/005Electromagnetic means
    • G01N2203/0051Piezoelectric means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0058Kind of property studied
    • G01N2203/0076Hardness, compressibility or resistance to crushing
    • G01N2203/0078Hardness, compressibility or resistance to crushing using indentation
    • G01N2203/0082Indentation characteristics measured during load
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/022Environment of the test
    • G01N2203/0222Temperature
    • G01N2203/0226High temperature; Heating means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/022Environment of the test
    • G01N2203/0222Temperature
    • G01N2203/0228Low temperature; Cooling means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/022Environment of the test
    • G01N2203/0244Tests performed "in situ" or after "in situ" use
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/06Indicating or recording means; Sensing means
    • G01N2203/0617Electrical or magnetic indicating, recording or sensing means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/06Indicating or recording means; Sensing means
    • G01N2203/0641Indicating or recording means; Sensing means using optical, X-ray, ultraviolet, infrared or similar detectors
    • G01N2203/0647Image analysis
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/06Indicating or recording means; Sensing means
    • G01N2203/067Parameter measured for estimating the property
    • G01N2203/0682Spatial dimension, e.g. length, area, angle

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
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Abstract

The present invention relates to a kind of high/low temperature impression test devices in situ for cone-beam CT imaging, belong to mechanical-electrical integration precision scientific instrument and field of material testing.Including cone-beam CT imaging unit, high/low temperature impression test unit, electric rotating platform, vibration isolation table and silicone oil temperature regulating device, cone-beam CT imaging unit, electric rotating platform and silicone oil temperature regulating device are mounted in vibration isolation table;High/low temperature impression test unit is fixed in electric rotating platform;High/low temperature impression test unit includes that high/low temperature load submodule, accurate load and detection sub-module, vacuum ensure submodule.The present invention can carry out the test of the in-situ micro-nano impression under -50 DEG C ~ 120 DEG C high/low temperature environments under the dynamic monitoring of cone-beam CT imaging unit, in-situ observation and three-dimensional imaging are carried out to microdeformation of the material under high stress effects of strain and damage process, provide effective technological means to disclose the mechanical behavior of material and its constitutive relation of microstructure variation under power thermal coupling loading environment.

Description

High/low temperature impression test device in situ for cone-beam CT imaging
Technical field
The present invention relates to mechanical-electrical integration precision scientific instrument field and field of material testing, in particular to a kind of for boring The high/low temperature impression test device in situ of beam CT imaging.The original position that can be achieved under -50 DEG C of -120 DEG C of high/low temperature environments is micro-nano Impression test provides to disclose the mechanical behavior of material and its constitutive relation of microstructure variation under power thermal coupling loading environment New technological means.
Background technique
Micro nanometer mechanics measuring technology in situ, which refers to, carries out Mechanics Performance Testing process to measured material under micro-nano-scale In, the micro- of lower material generation is acted on to load by Image-forming instruments such as electron microscope, atomic force microscope or optical microscopies Deformation, damage are seen until the process of failure damage carries out the measuring technology of real-time dynamic monitoring.CT imaging technique is a kind of novel Material non-destructive testing technology;CT imaging be under the premise of not destroying object structures, according to acquired in sample periphery certain The data for projection of physical quantity (such as X-ray light intensity), by computer disposal, rebuild two dimensional image in the specific level of sample and The technology of 3-D image is constituted according to resulting two dimensional image.
With the development of novel film material, micromechanics and microelectric technique etc., mechanical property of the material under micro-scale The acquisition of energy parameter becomes more important.But it is special that these micro-members can usually show the mechanics different under macroscopic conditions Property.Therefore micro-nano impression test technology is proposed on the basis of traditional macro hardness test.Micro-nano impression test technology It measures by high-precision, high-resolution load and displacement sensor, synchronous precise and acquires the load in process of press in and position Data are moved, indentation finally obtains load-displacement curves.It, can be with by analyzing curve to establishing mechanical model appropriate Accurately obtain the mechanical property parameters such as hardness, elasticity modulus, creep properties, fracture toughness and the viscous-elastic behaviour of material.Due to micro- Nano-indenter test technology is minimum to measured material surface damage, and has many advantages, such as that sample preparation is simple, test content is abundant, Have become the important technical of domestic and international testing of materials.
The mechanical property of material always can inevitably be influenced by practical Service Environment especially environment temperature, mesh It is preceding more about impression Testing Technology Study under hot environment and product, but for being especially high/low temperature environment under low temperature environment Under impression test technical research it is less.Due to low temperature for the dislocation activity of material, phase transition process, fracture mechanism etc. there is Completely different influence mode, hot and cold alternation high temperature and the state of low temperature can then be carried out coupling cause more it is difficult to predict material Material behavior.However the load of high temperature or low temperature can only be implemented separately in current impression test device, and most of impression is surveyed Trial assembly, which is set, all lacks in-situ observation means.Such as Chinese patent (CN106404574A), the high temperature being related under a kind of vacuum environment is micro- Nanoindentation test device and method, be placed on test device in vacuum chamber using atmosphere formula heating furnace to pressure head and sample into Row heating, ensure that pressure head is consistent with sample temperature to greatest extent, but it is only able to achieve high temperature load, and without integrated In-situ observation means.For another example Chinese patent (CN104697872A) is related to a kind of micro-nano impression of continuous regulating temperature type high vacuum low temperature Test method and device, using the cryostat and internal heater for being connected with liquid nitrogen alternating temperature objective table cooperation, it can be achieved that 77K-500K's continuously contacts with alternating temperature, greatly extends Range of measuring temp, but can not incite somebody to action due to lacking in-situ observation means The micro deformation mechanism of material is united with mechanical property.
Therefore, the original position developed a kind of integrated in-situ observation means, can be realized the load of hypo-hyperthermia continuous temperature Micro-nano impression test device is very urgent.
Summary of the invention
The purpose of the present invention is to provide a kind of high/low temperature impression test devices in situ for cone-beam CT imaging, solve The above problem of the existing technology.The present invention loads lower material for realizing -50 DEG C in vacuum environment ~ 120 DEG C high/low temperatures Compression, impression etc. micro mechanical property test, obtain the mechanical properties such as hardness, the elasticity modulus under material military service environment ginseng Number.The present invention on the basis of CT imaging technique, by cone-beam CT imaging unit can material under high/low temperature environment impression or To the carry out Real-time Two-dimensional tomographic imaging of the microstructure variation and defect of sample during compression verification, and can be by subsequent Three-dimensional reconstruction carries out three-dimensional imaging, the material mechanical performance that can obtain the Microstructure evolution under material impression behavior with test Parameter association is got up, and true mechanical behavior and deformation damage machine under research material and its practical service state of product are conducive to System.The present invention is that the mechanical property of specimen material under high/low temperature loading environment is studied from microcosmic angle;Reinforce to mechanics of materials row To provide technological means with the understanding of microscopic damage mechanism, there is great application prospect in materials science field.
Above-mentioned purpose of the invention is achieved through the following technical solutions:
It is surveyed for the high/low temperature impression test device in situ of cone-beam CT imaging, including cone-beam CT imaging unit, high/low temperature impression Try unit 4, electric rotating platform 8, vibration isolation table 1 and silicone oil temperature regulating device 9, the cone-beam CT imaging unit, electric rotating platform 8 It is mounted in vibration isolation table 1 with silicone oil temperature regulating device 9;The high/low temperature impression test unit 4 is fixed on 8 in electric rotating platform, To realize 360 ° of rotations of sample 19;
The high/low temperature impression test unit 4 includes that high/low temperature load submodule, accurate load and detection sub-module, vacuum are protected Hedge module, the high/low temperature load submodule is: sample 19 is bonded in 20 lower section of loading copper platform, and thermocouple 24 is bonded in sample On the outside of 19 cylindrical surface of product;It is placed with circulating type silicone oil slot 22 and thermal grease conduction 32 inside loading copper platform 20, is wrapped outside loading copper platform 20 It is with thermal insulation layer 21;By silicone oil temperature regulating device 9 by the oil circulation of target temperature be passed through circulating type silicone oil slot 22 to sample into Trip temperature control;
The accurate load and detection sub-module drive platform 11 to be used as power source by Z axis Precision Piezoelectric, drive ram 18 with Capacitive displacement transducer 14Z is mobile to precision, and pressure head 18 is finally pressed into sample 19, passes through force snesor 27 and condenser type position Displacement sensor 14 is detected to load/displacement signal real-time accurate and feedback control;The pressure head 18 is fixed on by pinching screw On heat-insulated compression bar 15;Force snesor 27, which is connected through a screw thread, to be connected between heat-insulated compression bar 15 and connecting rod 28;Capacitive displacement Sensor 14 is fixed on 26 end of displacement sensor bracket by holding screw 25;Connecting rod 28 and displacement sensor bracket 26 are solid It is scheduled on 29 top of XY axis piezoelectric drive platform, XY axis piezoelectric drive platform 29 is fixed on Z axis Precision Piezoelectric driving platform 11;Position Displacement sensor conductive sheet 16 and conductive plate rack 17 are bonded on 13 inner wall of quartz glass outer wall;
The vacuum ensures submodule by creation vacuum environment to avoid 19 surface frosting of sample or oxidation, polyimide flange Plate 23 and quartz glass outer wall 13 are by cementing fixation, between quartz glass outer wall 13 and vacuum chamber pedestal 10, polyimides method It is respectively adopted between blue plate 23 and loading copper platform 20 and is threadedly coupled fixation, and pinch seal encloses sealing effect;Pass through fixation Vacuum ball valve 12, aviation plug 30 and exhaust valve 31 outside vacuum chamber pedestal 10 is to progress gas exchanges in vacuum chamber and electricity The connection of gas route.
The oil circulation of equilibrium temperature is passed through placement by silicone oil temperature regulating device 4 by the high/low temperature load submodule Circulating type silicone oil slot 22 inside loading copper platform 20, is flooded with thermal grease conduction between loading copper platform 20 and circulating type silicone oil slot 22 32, the thermal grease conduction 32 plays thermally conductive effect, and sample 19 is bonded in 20 lower section of loading copper platform;Silicone oil passes through in flow process Heat is passed to/is spread out of in loading copper platform 20 and sample 19 by the mode of heat transfer, and such liquid stream loop temperature-control mode can be at it Continual and steady temperature control is carried out between boiling point and freezing point to sample 19;Thermocouple 24 is bonded in 19 surface real-time measurement sample of sample The surface temperature of product 19 carries out accurate temperature control to sample 19 at -50 DEG C ~ 120 DEG C.
The sample 19 is inverted in 18 top of pressure head, in order in the loading copper platform 20 rotated with electric rotating platform 8 Interior placement circulating type silicone oil slot 22;Loading copper platform 20 and circulating type silicone oil slot 22 are flooded with thermal grease conduction 32, but do not have therebetween Any rigid connection;The thermal grease conduction 32 had not only played conductive force but also had played lubrication, made circulating type silicone oil slot 22 not with copper The rotation of objective table 20 will not be influenced by rotary force;Guarantee to pass through between circulating type silicone oil slot 22 and silicone oil temperature regulating device 9 Silicone oil pipe is connected without the interference rotated.
The accurate load and detection sub-module load power source, Z axis pressure using accurate piezotable as nano impress Electric 11 drive ram 18 of precision actuation platform is pressed into sample with 14 synchronous shift of capacitive displacement transducer, and XY axis Piezoelectric Driving is flat With dynamic head 19, accurate displacement replaces pushed position to platform 29 in the horizontal plane;Force snesor 27 and capacitive displacement in process of press in Sensor 14 is synchronous to carry out Precision measurement and feedback control, using power control and Bit andits control two ways control indentation rate; Different types of impression or compression verification can be carried out by replaceable pressure head.
The vacuum ensures that submodule is connect by Vacuum ball valve 12 with external vacuum pump, surveys to high/low temperature impression Examination unit 4 vacuumizes;Vacuum ball valve 12 is closed, test device is internal after disconnection is controlled to a vacuum pump to keep high vacuum, avoids Vacuum line influences test device rotation;Intake valve 31 is opened after the completion of test, makes pressure in high/low temperature impression test unit 4 Restore atmospheric pressure.
The quartz glass outer wall 13 of the high/low temperature impression test unit 4 is using the quartz glass material for not blocking X-ray Material, polyimide flange plate 23 and conductive plate rack 19 are all made of the polyimide material for not blocking X-ray.
Electric wiring in the high/low temperature impression test unit 4 is connected by aviation plug 30 and external computer It connects, electric wiring is a branch of in high/low temperature impression test 4 external harmoniousness of unit, and there are surplus length, and electronic rotation is flat in test Platform 8 is at the uniform velocity rotated by 360 ° cooperation cone-beam CT imaging unit and carries out three-dimensional imaging, and 360 ° of rotations were both slowly returned after completing three-dimensional imaging Go to initial position.
The cone-beam CT imaging unit is: X-ray microscope 3 is mounted on three-freedom degree precision displacement platform 2, and X is penetrated Line flat panel detector 5 is fixed on detector Z axis slide unit 7, and detector Z axis slide unit 7 is fixed on detector X-axis slide unit 6.It is described X-ray microscope 3 and X-ray flat panel detector 5 are located at the two sides of high/low temperature impression test unit 4.
The beneficial effects of the present invention are: it is novel, compact-sized.Lack original position for current impression test device The problem of observation method, provides a kind of high/low temperature impression test device in situ for cone-beam CT imaging.May be implemented in it is high/ Under low temperature loading environment during the micro mechanical property tests such as the compression of material, impression, by CT imaging technique to tested The microstructure variation of material carries out real-time monitoring and two dimension and three-dimensional imaging.The present invention is to study high/low temperature from microcosmic angle The physical and mechanical properties of specimen material under loading environment;Reinforce providing the understanding of material behavior and microscopic damage mechanism Technological means.Aiming at the problem that high temperature can only be implemented separately in current impression test device both domestic and external or low temperature loads, this hair The a wide range of temperature of the bright low temperature that can be achieved -50~120 DEG C to high temperature loads, and greatly extends the temperature model of impression test It encloses.There is important directive significance to the material behavior research carried out under power thermal coupling loading environment.
Detailed description of the invention
The drawings described herein are used to provide a further understanding of the present invention, constitutes part of this application, this hair Bright illustrative example and its explanation is used to explain the present invention, and is not constituted improper limitations of the present invention.
Fig. 1 is overall structure diagram of the invention;
Fig. 2 is high/low temperature impression test unit cut-away illustration of the invention;
Fig. 3 is the cross-sectional view of high/low temperature loading unit of the invention;
Fig. 4 is cone-beam CT imaging cellular construction schematic diagram of the invention;
Fig. 5 is cone-beam CT imaging unit X-ray light path schematic diagram of the invention.
In figure: 1, vibration isolation table;2, three-freedom degree precision displacement platform;3, X-ray microscope;4, high/low temperature impression test Unit;5, X-ray flat panel detector;6, detector X-axis slide unit;7, detector Z axis slide unit;8, electric rotating platform;9, silicone oil Temperature regulating device;10, vacuum chamber pedestal;11, Z axis Precision Piezoelectric drives platform;12, Vacuum ball valve;13, quartz glass outer wall;14, Capacitive displacement transducer;15, heat-insulated compression bar;16, displacement sensor conductive sheet;17, conductive plate rack;18, pressure head;19, sample Product;20, loading copper platform;21, thermal insulation layer;22, circulating type silicone oil slot;23, polyimide flange plate;24, thermocouple;25, tightening Screw;26, displacement sensor bracket;27, force snesor;28, connecting rod;29, XY axis piezoelectric drive platform;30, aviation plug; 31, intake valve;32, thermal grease conduction.
Specific embodiment
Detailed content and its specific embodiment of the invention are further illustrated with reference to the accompanying drawing.
Referring to figs. 1 to 5, the high/low temperature impression test device in situ for cone-beam CT imaging of the invention, by CT Non-destructive testing technology is organically combined together with impression test technology;It can carry out under the dynamic monitoring of cone-beam CT imaging unit In-situ nano impression test under high/low temperature environment.The present invention can be for the material power under -50 DEG C ~ 120 DEG C high/low temperature environments It learns performance change and carries out micro-nano impression test, it also can be to microdeformation and damage process of the material under high stress effects of strain In-situ observation and three-dimensional imaging are carried out, for physics, the mechanical property for carrying out specimen material under high/low temperature loading environment from microcosmic angle It can study and provide new technological means.High/low temperature impression test device in situ for cone-beam CT imaging of the invention, including Cone-beam CT imaging unit, high/low temperature impression test unit 4, electric rotating platform 8, vibration isolation table 1 and silicone oil temperature regulating device 9, it is described Cone-beam CT imaging unit, electric rotating platform 8 and silicone oil temperature regulating device 9 are mounted in vibration isolation table 1;The high/low temperature impression is surveyed Examination unit 4 is fixed on 8 in electric rotating platform, to realize 360 ° of rotations of sample 19;
The high/low temperature impression test unit 4 includes that high/low temperature load submodule, accurate load and detection sub-module, vacuum are protected Hedge module, the high/low temperature load submodule is: sample 19 is bonded in 20 lower section of loading copper platform, and thermocouple 24 is bonded in sample On the outside of 19 cylindrical surface of product;It is placed with circulating type silicone oil slot 22 and thermal grease conduction 32 inside loading copper platform 20, is wrapped outside loading copper platform 20 It is with thermal insulation layer 21;By silicone oil temperature regulating device 9 by the oil circulation of target temperature be passed through circulating type silicone oil slot 22 to sample into Trip temperature control;
The accurate load and detection sub-module drive platform 11 to be used as power source by Z axis Precision Piezoelectric, drive ram 18 with Capacitive displacement transducer 14Z is mobile to precision, and pressure head 18 is finally pressed into sample 19, passes through force snesor 27 and condenser type position Displacement sensor 14 is detected to load/displacement signal real-time accurate and feedback control;The pressure head 18 is fixed on by pinching screw On heat-insulated compression bar 15;Force snesor 27, which is connected through a screw thread, to be connected between heat-insulated compression bar 15 and connecting rod 28;Capacitive displacement Sensor 14 is fixed on 26 end of displacement sensor bracket by holding screw 25;Connecting rod 28 and displacement sensor bracket 26 are solid It is scheduled on 29 top of XY axis piezoelectric drive platform, XY axis piezoelectric drive platform 29 is fixed on Z axis Precision Piezoelectric driving platform 11;Position Displacement sensor conductive sheet 16 and conductive plate rack 17 are bonded on 13 inner wall of quartz glass outer wall;
The vacuum ensures submodule by creation vacuum environment to avoid 19 surface frosting of sample or oxidation, polyimide flange Plate 23 and quartz glass outer wall 13 are by cementing fixation, between quartz glass outer wall 13 and vacuum chamber pedestal 10, polyimides method It is respectively adopted between blue plate 23 and loading copper platform 20 and is threadedly coupled fixation, and pinch seal encloses sealing effect;Pass through fixation Vacuum ball valve 12, aviation plug 30 and exhaust valve 31 outside vacuum chamber pedestal 10 is to progress gas exchanges in vacuum chamber and electricity The connection of gas route.
The oil circulation of equilibrium temperature is passed through placement by silicone oil temperature regulating device 4 by the high/low temperature load submodule Circulating type silicone oil slot 22 inside loading copper platform 20, is flooded with thermal grease conduction between loading copper platform 20 and circulating type silicone oil slot 22 32, the thermal grease conduction 32 plays thermally conductive effect, and sample 19 is bonded in 20 lower section of loading copper platform;Silicone oil passes through in flow process Heat is passed to/is spread out of in loading copper platform 20 and sample 19 by the mode of heat transfer, and such liquid stream loop temperature-control mode can be at it Continual and steady temperature control is carried out between boiling point and freezing point to sample 19;Thermocouple 24 is bonded in 19 surface real-time measurement sample of sample The surface temperature of product 19 is used for feedback control, and the surface temperature of sample 19 directly can be accurately measured by this bonding mode;This Invention can carry out accurate temperature control to sample 19 at -50 DEG C ~ 120 DEG C.
Pressure head and driving unit are arranged in the form above sample different from conventional indentation test device, the present invention uses Sample 19 is inverted in the arrangement form of 18 top of pressure head, can be in order to the rotation of electric rotating platform 8 using this arrangement Circulating type silicone oil slot 22 is placed in the loading copper platform 20 turned;Loading copper platform 20 and circulating type silicone oil slot 22 are flooded with thermal grease conduction 32, But therebetween without any rigid connection;The thermal grease conduction 32 had not only played conductive force but also had played lubrication, made circulating type Silicone oil slot 22 will not be influenced with the rotation of copper objective table 20 by rotary force;Guarantee circulating type silicone oil slot 22 and silicone oil temperature control It is connected by silicone oil pipe without the interference rotated between device 9.
The accurate load and detection sub-module load power source, Z axis pressure using accurate piezotable as nano impress Electric 11 drive ram 18 of precision actuation platform is pressed into sample with 14 synchronous shift of capacitive displacement transducer, and XY axis Piezoelectric Driving is flat With dynamic head 19, accurate displacement replaces pushed position to platform 29 in the horizontal plane;Force snesor 27 and capacitive displacement in process of press in Sensor 14 is synchronous to carry out Precision measurement and feedback control, using power control and Bit andits control two ways control indentation rate; Different types of impression or compression verification can be carried out by replaceable pressure head.
The vacuum ensures that submodule is connect by Vacuum ball valve 12 with external vacuum pump, surveys to high/low temperature impression Examination unit 4 vacuumizes;Vacuum environment avoids the accelerated oxidation of material surface frosting and material under high temperature under low temperature from influencing test knot Fruit.Vacuum ball valve 12 is closed, test device is internal after disconnection is controlled to a vacuum pump to keep high vacuum, and vacuum line is avoided to influence Test device rotation;Intake valve 31 is opened after the completion of test, and pressure in high/low temperature impression test unit 4 is made to restore atmospheric pressure, It is conveniently replaceable sample and carries out follow-up test.
Quartz glass outer wall 13, polyimide flange plate 23 and the conductive sheet branch of the high/low temperature impression test unit 4 Quartz glass used by frame 19 and polyimide material are all made of and do not block X-ray, do not influence cone-beam CT imaging unit to sample The image quality of product 19.The temperature that the low thermal conductivity of polyimide flange plate 23 can reduce loading copper platform 20 again simultaneously passes to Other seal members avoid temperature change from influencing sealing effect.
Electric wiring in the high/low temperature impression test unit 4 is connected by aviation plug 30 and external computer It connects, electric wiring is a branch of in high/low temperature impression test 4 external harmoniousness of unit, and that there are certain surplus length is high/low to prevent Temperature and pressure trace test cell 4 breaks electric wiring when rotating 360 °.Electric rotating platform 8 is at the uniform velocity rotated by 360 ° cooperation in test Cone-beam CT imaging unit carries out three-dimensional imaging, and 360 ° of rotations both slowly return back to initial position after completing three-dimensional imaging.The present invention Cone-beam CT imaging unit can be cooperated to complete three-dimensional imaging under the premise of not destroying electric wiring by this rotation mode.
Shown in Figure 4, the cone-beam CT imaging unit is that X-ray microscope 3 is mounted on three-freedom degree precision displacement On platform 2, X-ray flat panel detector 5 is fixed on detector Z axis slide unit 7, and detector Z axis slide unit 7 is fixed on detector X-axis On slide unit 6.The X-ray microscope 3 is located at the two sides of high/low temperature impression test unit 4 with X-ray flat panel detector 5.
Referring to figs. 1 to 5, the high/low temperature impression test device in situ for cone-beam CT imaging of the invention, can be - 50 DEG C in vacuum environment ~ 120 DEG C of high/low temperatures carry out impression to measured material under loading and Compressive Mechanical Properties are tested, it adopts simultaneously Real-time in-situ monitoring is carried out to sample with X-ray microscope.The present invention is microcosmic for studying material under power thermal coupling loading environment The constitutive relation of tissue change and its mechanical property parameters.The component and concrete model being directed to are as follows: Z axis piezoelectricity drives Model ECSZ5050, the XY axis Piezoelectric Driving of moving platform 11 changes model ECSxy5050/AL/RT, the condenser type of a platform 29 Model capaNCDT CS02 of displacement sensor 14, model Model31 Mid-1000g of force snesor 27, electronic rotation Turn the model RAK100 of platform 8.Z axis Precision Piezoelectric drives platform 11 to drive capacitive displacement transducer 14 and pressure head 18 same Step displacement loads sample 19, and accurate displacement replaces pushed position to XY axis piezoelectric drive platform band dynamic head 19 in the horizontal plane. The progress Precision measurement synchronous with capacitive displacement transducer 14 of force snesor 27 and feedback control in process of press in.Power can be used Control and Bit andits control two ways control indentation rate.Electric rotating platform 8 drives high/low temperature impression test unit 4 and sample At the uniform velocity 360 ° of product 19 rotations, cone-beam CT imaging unit carry out real-time monitoring and two-dimentional tomography to 19 interior microscopic tissue change of sample Imaging.Three-dimensionalreconstruction is carried out to two-dimensional ct image obtained in 19 rotary course of sample by the later period, finally obtains sample 19 The three-dimensional image of internal microstructure and the three-dimensional dimension information of internal flaw.
The present invention is in specific test process, firstly, sample is processed into fixed dimension by the way of wire cutting Cylindrical specimen.Polishing is carried out to 19 surface of sample with sand paper and makes it have preferable finish in order to in-situ observation.To sample Product 19 are pressed into surface and carry out electrobrightening to reduce influence of the surface roughness to test result.Sample 19 is bonded in copper loading Thermocouple 24, is bonded in the periphery of sample 19 by 20 lower section of platform.Pressure head 18 is selected according to the type of test, tightens clamping spiral shell Pressure head 18 is fixed on heat-insulated 15 top of compression bar by nail.By the internal screw thread of the external screw thread of force snesor 27 and heat-insulated compression bar 15 by two Person is fixedly connected.Force snesor 28 is fixed on 29 top of XY axis piezoelectric drive platform by connecting rod 28.It then will by screw Quartz glass outer wall 13 is fixed with copper objective table 20 with vacuum chamber pedestal 10, polyimide flange plate 23 and compresses sealing ring and play Sealing effect.It is vacuumized by external vacuum pump, Vacuum ball valve 12 is closed after the completion of vacuumizing and disconnects vacuum pipe.By ring Wound silicone oil slot 22 is placed on 20 top of loading copper platform, the thermal insulation layer 21 in loading copper platform outer cover.Open silicone oil temperature regulating device 9 The oil circulation of target temperature is passed through circulating type silicone oil slot 22, heating/refrigerating is carried out to sample 19, by thermocouple 24 to sample 19 temperature of product carries out detection and feedback control.
By outer computer control Z axis Precision Piezoelectric driving platform 11 as load driver device band dynamic head in process of press in 18 are tested with the accurate movement of capacitive displacement transducer 14.By being fixed on the driving of Z axis Precision Piezoelectric after the completion of point test The XY axis piezoelectric drive platform 29 of 11 top of platform replaces next indentation point with 18 horizontal displacement of dynamic head.Capacitive displacement passes Sensor 14 is fixed on inside displacement sensor bracket 26 by holding screw 25.Displacement sensor conductive sheet 16 is fixed on conductive sheet 17 lower section of bracket, conductive plate rack 17 are bonded in inside quartz glass outer wall 13.Z axis Precision Piezoelectric drives platform drive ram 18 Force snesor 27 is displaced with 14 real-time accurate of capacitive displacement transducer detection loading of pressing in and indentation during being pressed into sample And data are sent into outer computer.
Detector X-axis slide unit 6 and detector Z axis slide unit 7 cooperate three-freedom degree precision displacement platform 2 to X-ray microscope 3 Fine adjustment is carried out with the position of X-ray flat panel detector 5;Guarantee that sample is in imaging center, is penetrated by X-ray microscope 3 and X Line flat panel detector 5 carries out the observation of Real-time Two-dimensional tomographic imaging to the sample 19 in test process.If expecting the three of sample 19 Dimension three-dimensional imaging should then start electric rotating platform 8 during the test and drive high/low temperature impression test unit 4 and sample 19360 ° of rotations carry out three-dimensional reconstruction to two-dimensional ct image obtained in rotary course after the completion of test and obtain three-dimensional dimension letter Breath and 3-D image.Electric wiring inside high/low temperature impression test unit 4 passes through the boat that is fixed on outside vacuum type pedestal 10 Blind plug 30 is connected to an external computer, and test closes silicone oil temperature regulating device 9 after being fully completed, and opens intake valve 31, electronic rotation Turn platform 8 and returns back to initial position.
Two-dimensional ct image obtained in binding test process and 3-D image, by mechanical model appropriate to testing To load-displacement curves analyzed, it is tough can accurately to obtain the characterization hardness of material mechanical performance, elasticity modulus, fracture The mechanical property parameters such as degree.
The foregoing is merely preferred embodiments of the invention, are not intended to restrict the invention, for the technology of this field For personnel, the invention may be variously modified and varied.All any modification, equivalent substitution, improvement and etc. made for the present invention, It should all be included in the protection scope of the present invention.

Claims (8)

1. a kind of high/low temperature impression test device in situ for cone-beam CT imaging, it is characterised in that: including cone-beam CT imaging list Member, high/low temperature impression test unit (4), electric rotating platform (8), vibration isolation table (1) and silicone oil temperature regulating device (9), the cone-beam CT imaging unit, electric rotating platform (8) and silicone oil temperature regulating device (9) are mounted on vibration isolation table (1);The high/low temperature impression Test cell (4) is fixed in electric rotating platform (8);
The high/low temperature impression test unit (4) includes high/low temperature load submodule, accurate load and detection sub-module, vacuum Ensure submodule, the high/low temperature load submodule is: sample (19) is bonded in below loading copper platform (20), thermocouple (24) It is bonded on the outside of sample (19) cylindrical surface;It is placed with circulating type silicone oil slot (22) and thermal grease conduction (32) inside loading copper platform (20), Thermal insulation layer (21) are surrounded by outside loading copper platform (20);The oil circulation of target temperature is passed through by silicone oil temperature regulating device (9) Circulating type silicone oil slot (22) carries out temperature control to sample;
The accurate load is used as power source, drive ram by Z axis Precision Piezoelectric driving platform (11) with detection sub-module (18) mobile with capacitive displacement transducer (14) Z-direction precision, pressure head (18) are finally pressed into sample (19), pass through force snesor (27) with capacitive displacement transducer (14) to the detection of load/displacement signal real-time accurate and feedback control;The pressure head (18) It is fixed on heat-insulated compression bar (15) by pinching screw;Force snesor (27) be connected through a screw thread be connected on heat-insulated compression bar (15) with Between connecting rod (28);Capacitive displacement transducer (14) is fixed on displacement sensor bracket (26) end by holding screw (25) End;Connecting rod (28) and displacement sensor bracket (26) are fixed on above XY axis piezoelectric drive platform (29), XY axis Piezoelectric Driving Platform (29) is fixed in Z axis Precision Piezoelectric driving platform (11);Displacement sensor conductive sheet (16) and conductive plate rack (17) It is bonded on quartz glass outer wall (13) inner wall;
The vacuum ensures submodule by creation vacuum environment to avoid sample (19) surface frosting or oxidation, polyimides method Blue plate (23) and quartz glass outer wall (13) by cementing fixation, between quartz glass outer wall (13) and vacuum chamber pedestal (10), It is respectively adopted between polyimide flange plate (23) and loading copper platform (20) and is threadedly coupled fixation, and pinch seal encloses sealing Effect;By being fixed on the external Vacuum ball valve (12) of vacuum chamber pedestal (10), aviation plug (30) with exhaust valve (31) to true Gas exchanges are carried out in empty room to be connected to electric wiring.
2. the high/low temperature impression test device in situ according to claim 1 for cone-beam CT imaging, it is characterised in that: The oil circulation of equilibrium temperature is passed through by the high/low temperature load submodule by silicone oil temperature regulating device (4) is placed on loading The internal circulating type silicone oil slot (22) of copper platform (20), is flooded with thermal grease conduction between loading copper platform (20) and circulating type silicone oil slot (22) (32), the thermal grease conduction (32) plays thermally conductive effect, and sample (19) is bonded in below loading copper platform (20);Silicone oil is flowing over Heat is passed to/is spread out of in loading copper platform (20) and sample (19), such liquid stream loop temperature-control by way of heat transfer in journey Mode can carry out continual and steady temperature control between its boiling point and freezing point to sample (19);Thermocouple (24) is bonded in sample (19) surface temperature of surface real-time measurement sample (19) carries out accurate temperature control to sample (19) at -50 DEG C ~ 120 DEG C.
3. the high/low temperature impression test device in situ according to claim 1 or 2 for cone-beam CT imaging, feature exist In: the sample (19) is inverted in above pressure head (18), in order in the loading copper platform rotated with electric rotating platform (8) (20) circulating type silicone oil slot (22) are placed in;Loading copper platform (20) and circulating type silicone oil slot (22) are flooded with thermal grease conduction (32), but Therebetween without any rigid connection;The thermal grease conduction (32) had not only played conductive force but also had played lubrication, made circulating type Silicone oil slot (22) will not be influenced with copper objective table (20) rotation by rotary force;Guarantee circulating type silicone oil slot (22) and silicon It is connected by silicone oil pipe without the interference rotated between oily temperature regulating device (9).
4. the high/low temperature impression test device in situ according to claim 1 for cone-beam CT imaging, it is characterised in that: The accurate load and detection sub-module load power source using accurate piezotable as nano impress, and Z axis Precision Piezoelectric drives Moving platform (11) drive ram (18) and capacitive displacement transducer (14) synchronous shift are pressed into sample, XY axis piezoelectric drive platform (29) accurate displacement replaces pushed position to band dynamic head (19) in the horizontal plane;Force snesor (27) and condenser type in process of press in Displacement sensor (14) is synchronous to carry out Precision measurement and feedback control, is pressed into using power control and the control of Bit andits control two ways Rate;Different types of impression or compression verification are carried out by replaceable pressure head.
5. the high/low temperature impression test device in situ according to claim 1 for cone-beam CT imaging, it is characterised in that: The vacuum ensures that submodule is connect by Vacuum ball valve (12) with external vacuum pump, to high/low temperature impression test unit (4) it vacuumizes;It closes Vacuum ball valve (12), test device is internal after disconnection is controlled to a vacuum pump to keep high vacuum, avoids true Blank pipe road influences test device rotation;Intake valve (31) are opened after the completion of test, make high/low temperature impression test unit (4) internal pressure It is strong to restore atmospheric pressure.
6. the high/low temperature impression test device in situ according to claim 1 for cone-beam CT imaging, it is characterised in that: The quartz glass outer wall (13) of the high/low temperature impression test unit (4) uses the silica glass material for not blocking X-ray, Polyimide flange plate (23) and conductive plate rack (19) are all made of the polyimide material for not blocking X-ray.
7. the high/low temperature impression test device in situ according to claim 1 for cone-beam CT imaging, it is characterised in that: Electric wiring in the high/low temperature impression test unit (4) is connect by aviation plug (30) with external computer, electricity Gas route is a branch of in high/low temperature impression test unit (4) external harmoniousness, and there are surplus length, electric rotating platform in test (8) it is at the uniform velocity rotated by 360 ° cooperation cone-beam CT imaging unit and carries out three-dimensional imaging, 360 ° of rotations were both slowly returned after completing three-dimensional imaging Go to initial position.
8. the high/low temperature impression test device in situ according to claim 1 for cone-beam CT imaging, it is characterised in that: The cone-beam CT imaging unit is: X-ray microscope (3) is mounted on three-freedom degree precision displacement platform (2), and X-ray is flat Partitioned detector (5) is fixed on detector Z axis slide unit (7), and detector Z axis slide unit (7) is fixed on detector X-axis slide unit (6); The X-ray microscope (3) and X-ray flat panel detector (5) are located at the two sides of high/low temperature impression test unit (4).
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