CN105927851B - A kind of steel cylinder method for handling high-purity arsine - Google Patents

A kind of steel cylinder method for handling high-purity arsine Download PDF

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Publication number
CN105927851B
CN105927851B CN201610330685.5A CN201610330685A CN105927851B CN 105927851 B CN105927851 B CN 105927851B CN 201610330685 A CN201610330685 A CN 201610330685A CN 105927851 B CN105927851 B CN 105927851B
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Prior art keywords
steel cylinder
cylinder
arsine
helium
main line
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CN105927851A (en
Inventor
汤剑波
李东升
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HEFEI ZHENGFAN ELECTRONIC MATERIAL CO Ltd
SHANGHAI ZHENGFAN TECHNOLOGY Co Ltd
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HEFEI ZHENGFAN ELECTRONIC MATERIAL CO Ltd
SHANGHAI ZHENGFAN TECHNOLOGY Co Ltd
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/025—Special adaptations of indicating, measuring, or monitoring equipment having the pressure as the parameter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/01—Shape
    • F17C2201/0104—Shape cylindrical
    • F17C2201/0119—Shape cylindrical with flat end-piece
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/03—Orientation
    • F17C2201/032—Orientation with substantially vertical main axis
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/05—Size
    • F17C2201/056—Small (<1 m3)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0107—Single phase
    • F17C2225/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/01—Propulsion of the fluid
    • F17C2227/0128—Propulsion of the fluid with pumps or compressors
    • F17C2227/0135—Pumps
    • F17C2227/0142—Pumps with specified pump type, e.g. piston or impulsive type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06—Controlling or regulating of parameters as output values
    • F17C2250/0605—Parameters
    • F17C2250/0626—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/04—Reducing risks and environmental impact
    • F17C2260/044—Avoiding pollution or contamination
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)

Abstract

The invention discloses a kind of method for handling high-purity arsine steel cylinder：Valve export at the top of multiple pending steel cylinders is connected on main line by cylinder joint；The valve export that source gas cylinder equipped with arsine and cold-trap are collected to steel cylinder is connected on main line by cylinder joint；Line replacement is entered to main line using high-purity helium, it is ensured that pipeline is not contaminated, and then main line is vacuumized using vavuum pump；In the case where keeping vacuum pump operation, vacuum bakeout is carried out to pending steel cylinder, and backward pending steel cylinder is filled with helium, is then extracted out helium by vavuum pump；The cylinder valve of opening source gas cylinder, arsine gas is filled with into pending steel cylinder；Helium is filled with to pending steel cylinder, is then again extracted out helium by vavuum pump；The cylinder valve of pending steel cylinder is closed, so far pending steel cylinder is disposed.The present invention will be recycled for the arsine gas being passivated, and is reduced the discharge containing arsenic gas well, has been reached the purpose of recycling economy.

Description

A kind of steel cylinder method for handling high-purity arsine
Technical field
The present invention relates to a kind of high-purity arsine steel cylinder processing method, belongs to electronics special gas correlative technology field.
Background technology
Arsine（AsH3）It is a kind of very important electronic gas, as n-type dopant, in extension and ion implantation technology In play very crucial effect.Arsine is also synthesis gaas compound semiconductor simultaneously（GaAs）, gallium arsenide phosphide（GaAsP） Important source material.Compound semiconductor is widely used in light emitting diode（LED）With the manufacture of high performance solar batteries.
Arsine（AsH3）Synthesis can not be reacted to realize by simple simple substance, typically used metal arsenide hydrolysis and come Prepare.Its yield depends on the property of metallic element in arsenide and uses which kind of distintegrant.Normal yield 14%-86% it Between.
It is applied to the purity of the arsine of electronics industry at present all in 6N（99.9999%）Left and right, it is mainly transnational by external two Company produces and sells.China can only produce the arsine of 3N-4N or so purity, and yield very little due to technical reason, therefore The domestic basic processing system without high-purity arsine steel cylinder.Because high-purity arsine can be used for the manufacture of war products, foreign countries are to it Outlet takes strict licensing and " client credentials certification " system.Therefore, domestic high-purity arsine is chronically at that supply falls short of demand Situation.Electronics special material is considered as the strategic materials of development in Hi-Tech.There is no electronics special material technology, just do not know where to begin The sustainable development of high-tech industry.So the electronics special material production domesticization of China is extremely urgent, it is significant.
The content of the invention
The technical problems to be solved by the invention are to provide a kind of method for handling arsine steel cylinder, to ensure that steel cylinder can be held The high-purity arsine of more than 99.9999% purity is filled, simultaneously as arsine has hypertoxicity, and high-purity arsine value is very high, so Need to recycle arsine.
In order to solve the above-mentioned technical problem, the technical scheme is that providing a kind of side for handling high-purity arsine steel cylinder Method, it is characterised in that comprise the following steps：
Step 1：Valve export at the top of multiple pending steel cylinders is connected on main line by cylinder joint；
Step 2：The valve export that source gas cylinder equipped with arsine and cold-trap are collected to steel cylinder is connected to by cylinder joint On main line；
Step 3：Line replacement is entered to main line using high-purity helium, it is ensured that pipeline is not contaminated, then using vavuum pump pair Main line is vacuumized；
Step 4：In the case where keeping vacuum pump operation, vacuum bakeout 4 ~ 8 is carried out at 60 ~ 100 DEG C to pending steel cylinder Hour, and it is 1 ~ 1.5bar that backward pending steel cylinder, which is filled with pressure in helium to main line, then again by vavuum pump by helium Extract out, to main line in vacuum be 0；
Step 5：The cylinder valve of opening source gas cylinder, the Stress control of the arsine gas of the source gas cylinder port of export for 1 ~ 3bar, the Stress control that arsine gas is filled with into pending steel cylinder is 0.1-0.5bar, pending steel cylinder is carried out arsine blunt Change baking 12-24 hours；
Step 6：The cylinder valve that cold-trap collects steel cylinder is opened, by the arsine gas collection after being toasted in pending steel cylinder to cold Trap is collected in steel cylinder, to reuse；
Step 7：Helium is filled with to pending steel cylinder, helium pressure control is 1-1.5bar, then again will by vavuum pump Helium is extracted out, and the vacuum to main line is 0；
Step 8：The cylinder valve of pending steel cylinder is closed, so far pending steel cylinder is disposed.
Preferably, the cold-trap is collected steel cylinder and is immersed in all the time in raw and cold liquid.
More there is rotation ground, the raw and cold liquid is liquid nitrogen.
The present invention will be recycled for the arsine gas being passivated, and reduce the same of the discharge containing arsenic gas well When, reach the purpose of recycling economy.
Brief description of the drawings
Fig. 1 is a kind of device of the steel cylinder of processing high-purity arsine employed in embodiment 1-3.
Embodiment
To become apparent the present invention, hereby with preferred embodiment, and accompanying drawing is coordinated to be described in detail below.
A kind of device of the steel cylinder of processing high-purity arsine employed in embodiment 1-3 is as shown in figure 1, five pending steel Bottle 2 is placed in baking oven 3, and each pending steel cylinder 2 is connected by cylinder joint with main line 9；Source gas cylinder 1 equipped with arsine The port of export be connected by cylinder joint, pressure regulator valve 6 with main line 9；Main line 9 is provided with pressure gauge 7, vacuum meter 8；Vavuum pump 4 arrival end connection main line 9, the port of export are discharged for tail gas B, and tail gas B floss holes also are provided with main line 9；Main line 9 and height Pure helium A connections；Cold-trap is collected steel cylinder 5 and is also connected with main line 9, and cold-trap is collected steel cylinder 5 and is immersed in all the time in liquid nitrogen.
Embodiment 1
A kind of steel cylinder method for handling high-purity arsine：
Step 1：Line replacement is entered to whole main line 9 using high-purity helium A, it is ensured that pipeline is not contaminated, then using true Empty pump 4 vacuumizes to main line 9；
Step 2：The temperature of baking oven 3 is set in 60 DEG C, in the case where keeping vavuum pump 4 to run, pending steel cylinder 2 entered After row vacuum bakeout 8 hours, the pending steel cylinder 2 remains 60 ~ 100 DEG C；And backward pending steel cylinder 2 is filled with helium to pressure Power table 7 shows 1bar, then again extracts helium out by vavuum pump 4,0 is shown as to vacuum meter 8；
Step 3：The cylinder valve of opening source gas cylinder 1, the pressure of pressure regulator valve 6 is set to be filled into pending steel cylinder 2 in 1bar Enter arsine gas to pressure gauge 7 and be shown in 0.1bar, arsine passivation baking 24 hours is carried out to pending steel cylinder 2；
Step 4：The cylinder valve that cold-trap collects steel cylinder 5 is opened, the arsine gas collection after being toasted in pending steel cylinder 2 is arrived Cold-trap is collected in steel cylinder 5, to reuse；
Step 5：Helium to pressure gauge is filled with to pending steel cylinder 2 and shows 1bar, is then again taken out helium by vavuum pump Go out, 0 is shown as to vacuum meter；
Step 6：The cylinder valve of pending steel cylinder 2 is closed, pending steel cylinder 2 is taken out from baking oven 3 is interior, is so far disposed.
Embodiment 2
A kind of steel cylinder method for handling high-purity arsine：
Step 1：Line replacement is entered to whole main line 9 using high-purity helium A, it is ensured that pipeline is not contaminated, then using true Empty pump 4 vacuumizes to main line 9；
Step 2：The temperature of baking oven 3 is set in 100 DEG C, in the case where keeping vavuum pump 4 to run, to pending steel cylinder 2 Vacuum bakeout is carried out after 4 hours, the pending steel cylinder 2 remains 60 ~ 100 DEG C；And backward pending steel cylinder 2 is filled with helium extremely Pressure gauge 7 shows 1.5bar, then again extracts helium out by vavuum pump 4,0 is shown as to vacuum meter 8；
Step 3：The cylinder valve of opening source gas cylinder 1, the pressure of pressure regulator valve 6 is set to be filled into pending steel cylinder 2 in 3bar Enter arsine gas to pressure gauge 7 and be shown in 0.5bar, arsine passivation baking 12 hours is carried out to pending steel cylinder 2；
Step 4：The cylinder valve that cold-trap collects steel cylinder 5 is opened, the arsine gas collection after being toasted in pending steel cylinder 2 is arrived Cold-trap is collected in steel cylinder 5, to reuse；
Step 5：Helium to pressure gauge 7 is filled with to pending steel cylinder 2 and shows 1.5bar, then again by vavuum pump 4 by helium Gas is extracted out, and 0 is shown as to vacuum meter 8；
Step 6：The cylinder valve of pending steel cylinder 2 is closed, takes out pending steel cylinder 2 from baking oven 3 is interior, so far steel cylinder has been handled Finish.
Embodiment 3
A kind of steel cylinder method for handling high-purity arsine：
Step 1：Line replacement is entered to whole main line 9 using high-purity helium A, it is ensured that pipeline is not contaminated, then using true Empty pump 4 vacuumizes to main line 9；
Step 2：The temperature of baking oven 3 is set in 80 DEG C, in the case where keeping vavuum pump 4 to run, pending steel cylinder 2 entered After row vacuum bakeout 6 hours, the pending steel cylinder 2 remains 60 ~ 100 DEG C；And backward pending steel cylinder 2 is filled with helium to pressure Power table 7 shows 1.3bar, then again extracts helium out by vavuum pump 4,0 is shown as to vacuum meter 8；
Step 3：The cylinder valve of opening source gas cylinder 1, the pressure of pressure regulator valve 6 is set to be filled into pending steel cylinder 2 in 2bar Enter arsine gas to pressure gauge 7 and be shown in 0.3bar, arsine passivation baking 18 hours is carried out to pending steel cylinder 2；
Step 4：The cylinder valve that cold-trap collects steel cylinder 5 is opened, the arsine gas collection after being toasted in pending steel cylinder 2 is arrived Cold-trap is collected in steel cylinder 5, to reuse；
Step 5：Helium to pressure gauge 7 is filled with to pending steel cylinder 2 and shows 1.3bar, then again by vavuum pump 4 by helium Gas is extracted out, and 0 is shown as to vacuum meter 8；
Step 6：The cylinder valve of pending steel cylinder 2 is closed, takes out pending steel cylinder 2 from baking oven 3 is interior, so far steel cylinder has been handled Finish.

Claims (3)

  1. A kind of 1. method for handling high-purity arsine steel cylinder, it is characterised in that comprise the following steps：
    Step 1：Valve export at the top of multiple pending steel cylinders (2) is connected on main line (9) by cylinder joint；
    Step 2：The valve export that source gas cylinder (1) equipped with arsine is collected to steel cylinder (5) with cold-trap is connected by cylinder joint Onto main line (9)；
    Step 3：Line replacement is entered to main line (9) using high-purity helium (A), it is ensured that pipeline is not contaminated, then using vavuum pump (4) main line (9) is vacuumized；
    Step 4：In the case where keeping vavuum pump (4) operation, vacuum bakeout 4 is carried out at 60~100 DEG C to pending steel cylinder (2) ~8 hours, and it is 1~1.5bar that backward pending steel cylinder (2), which is filled with helium to main line (9) interior pressure, then again by true Empty pump (4) extracts helium out, is 0 to main line (9) interior vacuum；
    Step 5：The cylinder valve of opening source gas cylinder (1), the Stress control of the arsine gas of source gas cylinder (1) port of export for 1~ 3bar, it is 0.1-0.5bar to the interior Stress control for being filled with arsine gas of pending steel cylinder (2), carries out pending steel cylinder (2) Arsine passivation baking 12-24 hours；
    Step 6：The cylinder valve that cold-trap collects steel cylinder (5) is opened, the arsine gas collection after being toasted in pending steel cylinder (2) is arrived Cold-trap is collected in steel cylinder (5), to reuse；
    Step 7：Helium is filled with to pending steel cylinder (2), helium pressure control is 1-1.5bar, then passes through vavuum pump (4) again Helium is extracted out, the vacuum to main line (9) is 0；
    Step 8：The cylinder valve of pending steel cylinder (2) is closed, so far pending steel cylinder (2) is disposed.
  2. 2. the method for processing high-purity arsine steel cylinder as claimed in claim 1, it is characterised in that the cold-trap collects steel cylinder (5) All the time it is immersed in raw and cold liquid.
  3. 3. the method for processing high-purity arsine steel cylinder as claimed in claim 2, it is characterised in that the raw and cold liquid is liquid nitrogen.
CN201610330685.5A 2016-05-18 2016-05-18 A kind of steel cylinder method for handling high-purity arsine Active CN105927851B (en)

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Citations (7)

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DE2404068A1 (en) * 1974-01-29 1975-08-07 Alexander Kessels Drying interior of steel compressed-gas bottles - by evacuation, with mild external heating
CN1082622A (en) * 1991-06-06 1994-02-23 乔治·克劳德工艺研究开发有限公司 Method with the anti-sealing absorption in the dry metallic surface of gaseous hydride
CN101922004A (en) * 2010-08-20 2010-12-22 南京特种气体厂有限公司 Method for treating inner wall of high-pressure seamless steel gas cylinder
CN203744694U (en) * 2014-02-19 2014-07-30 昆明鹏翼达气体产品有限公司 Drying and vacuumizing treatment device of special gas cylinders
CN104344704A (en) * 2013-08-02 2015-02-11 上海浦江特种气体有限公司 Automatic gas cylinder drying control device
CN104930342A (en) * 2015-06-12 2015-09-23 上海正帆科技有限公司 Steel cylinder filling device and method for high-purity arsine
CN205096196U (en) * 2015-11-09 2016-03-23 河南承明光电新材料股份有限公司 Clean system of steel bottle

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2404068A1 (en) * 1974-01-29 1975-08-07 Alexander Kessels Drying interior of steel compressed-gas bottles - by evacuation, with mild external heating
CN1082622A (en) * 1991-06-06 1994-02-23 乔治·克劳德工艺研究开发有限公司 Method with the anti-sealing absorption in the dry metallic surface of gaseous hydride
CN101922004A (en) * 2010-08-20 2010-12-22 南京特种气体厂有限公司 Method for treating inner wall of high-pressure seamless steel gas cylinder
CN104344704A (en) * 2013-08-02 2015-02-11 上海浦江特种气体有限公司 Automatic gas cylinder drying control device
CN203744694U (en) * 2014-02-19 2014-07-30 昆明鹏翼达气体产品有限公司 Drying and vacuumizing treatment device of special gas cylinders
CN104930342A (en) * 2015-06-12 2015-09-23 上海正帆科技有限公司 Steel cylinder filling device and method for high-purity arsine
CN205096196U (en) * 2015-11-09 2016-03-23 河南承明光电新材料股份有限公司 Clean system of steel bottle

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