CN203269531U

CN203269531U - Simple equipment for bottling MO (metal organic) source

Info

Publication number: CN203269531U
Application number: CN 201320192278
Authority: CN
Inventors: 冯汝明; 李大亮; 俞爱斌; 陈微微; 王昕�; 汪亚兵; 金莉
Original assignee: SHANGHAI XINRUI NEW MATERIAL TECHNOLOGY Co Ltd
Current assignee: SHANGHAI XINRUI NEW MATERIAL TECHNOLOGY Co Ltd
Priority date: 2013-04-16
Filing date: 2013-04-16
Publication date: 2013-11-06
Anticipated expiration: 2023-04-16

Abstract

The utility model discloses simple equipment for bottling an MO (metal organic) source. The simple equipment comprises a first pipe, a second pipe, a third pipe and a plurality of valves; the valves are arranged on the first pipe, the second pipe and the third pipe respectively; the first pipe is communicated with a first MO-source bottle; the second pipe is connected with a second MO-source bottle and a third MO-source bottle; the third pipe is communicated with the first MO-source bottle, the second MO-source bottle and the third MO-source bottle; the input end of the third pipe is communicated with the input end of the second pipe. The MO source is transferred into the second low-volume MO-source bottle and the third low-volume MO-source bottle from the first high-volume MO-source bottle under the micro positive pressure with the high-purity argon serving as the gas source, and any external disturbance of water, oxygen and impurities are not involved into the whole process of bottling the MO source so that the purity of the MO source is guaranteed. In addition, the process of bottling the MO source is simple, and the efficiency is high. The simple equipment disclosed by the utility model can be well applied to the field of the industrial bottling of the MO source.

Description

The Simple separating packing equipment in MO source

Technical field

The utility model relates to the production technical field of high-purity metal organic compound, relates in particular to the Simple separating packing equipment in a kind of MO source.

Background technology

The MO source is high-purity metal organic compound, is the propping material of the technology growth Semiconductor Microstructure Materials such as advanced metal organic chemical vapor deposition (MOCVD), metal organic molecular beam epitaxy (MOMBE).Because the MO product-derived requires based on very high purity, and most MO source compound is extremely responsive to oxygen, steam, meets air spontaneous combustion can occur, and meets water can blast, and toxicity is large.

Therefore, production and the canned condition in MO source are all very harsh, even at subzero 70 degrees centigrade, still can with water, oxygen vigorous reaction, even therefore the impurity such as the water of trace, air have all had a strong impact on the quality in MO source.Due to the high activity of MO source electrode, therefore cause MO source can flow process comparatively complicated.

The utility model content

The utility model provides a kind of MO Simple separating packing equipment in source, can be in free of contamination situation the MO source be divided by large capacity source bottle to install to various low capacities sources bottle.

For solving the problems of the technologies described above, the utility model provides a kind of MO Simple separating packing equipment in source, comprising: first, second, third pipeline and be arranged at a plurality of valves on described first, second, third pipeline; Wherein, described first pipeline connection to a MO source bottle, described the second pipeline is connected with second, third MO source bottle respectively, and described the 3rd pipeline is communicated with described first, second, third MO source bottle respectively, and the input end of the input end of described the 3rd pipeline and described the second pipeline is interconnected.

As preferably, the mouth of described the 3rd pipeline lays respectively at the top of described second, third MO source bottle.

As preferably, the mouth of described the first pipeline is positioned at the top of a described MO source bottle.

As preferably, the mouth of described the second pipeline lays respectively at the top of described first, second, third MO source bottle.

As preferably, described valve comprises the first valve of the input end that is arranged at described first, second, third pipeline and is arranged at the second valve of mouth.

As preferably, described valve also comprises the input end that is arranged at described the 3rd pipeline and the 3rd valve between mouth.

As preferably, be the high-purity argon gas pipeline in described the first pipeline and the second pipeline.

As preferably, described the 3rd pipeline is vacuum pipeline.

Compared with prior art, the utlity model has following advantage: the utility model is take high-purity argon gas as source of the gas, be transferred to the MO source in second, third MO source bottle of low capacity by a MO source bottle of large volume under pressure-fired, whole minute process of assembling anhydrous and oxygen-free, and disturb without any introduced contaminants, guaranteed the purity in MO source, and of the present utility model minute process of assembling is simple, packing efficient is high, and the industry that can well be applied to the MO source divides in process of assembling.

Description of drawings

Fig. 1 is the structural representation of the Simple separating packing equipment in MO source in the utility model one specific embodiment.

In figure: L1-the first pipeline, L2-the second pipeline, L3-the 3rd pipeline, 110-the first valve, 120-the second valve, 130-the 3rd valve, 210-the one MO source bottle, 220-the 2nd MO source bottle, 230-the 3rd MO source bottle.

The specific embodiment

For above-mentioned purpose of the present utility model, feature and advantage can be become apparent more, below in conjunction with accompanying drawing, the specific embodiment of the present utility model is described in detail.It should be noted that, the utility model accompanying drawing all adopts the form of simplification and all uses non-ratio accurately, only in order to convenient, the purpose of aid illustration the utility model embodiment lucidly.

The utility model provides a kind of MO Simple separating packing equipment in source, as shown in Figure 1, comprising: first, second, third pipeline L1, L2, L3 and be arranged at a plurality of valves on described first, second, third pipeline L1, L2, L3; Wherein, described the first pipeline L1 is communicated to a MO source bottle 210, described the second pipeline L2 is connected with second, third MO source bottle 220,230 respectively, described the 3rd pipeline L3 is communicated with described first, second, third MO source bottle 210,220,230 respectively, and the input end of the input end of described the 3rd pipeline L3 and described the second pipeline L2 is interconnected.

Please continue with reference to Fig. 1, described valve comprise the input end that is arranged at described first, second, third pipeline L1, L2, L3 the first valve 110, be arranged at described first, second, third pipeline L1, L2, L3 mouth the second valve 120 and be arranged at the input end of described the 3rd pipeline L3 and the 3rd valve 130 between mouth.Better, the mouth of described the first pipeline L1 is positioned at the top of a described MO source bottle 210; The mouth of described the second pipeline L2 lays respectively at the top of described first, second, third MO source bottle 210,220,230; The mouth of described the 3rd pipeline L3 lays respectively at the top of described second, third MO source bottle.

Please continue with reference to Fig. 1, adopt the working process of the Simple separating packing equipment in the utility model MO source to be:

Take the high purity trialkyl gallium as example, and the capacity of described first, second, third MO source bottle 210,220,230 is respectively 50L, 4L and 1L.At first, open valve on the first pipeline L1, open the second valve 120 on the second pipeline L2 and close the 3rd valve 130;

Pass into high-purity argon gas in described the first pipeline L1, make the sample (trialkyl gallium) in a MO source bottle 210 enter into second, third MO source bottle 220,230 through the second pipeline L2;

Then, close the valve on the first pipeline L1, open the 3rd valve 130 of the second pipeline L2 and close the second pipeline L2 and the second valve 120 of described MO source bottle 210 connectivity parts and each valve on the 3rd pipeline L3;

Pass into equally high-purity argon gas in the second pipeline L2, make argon gas enter second, third MO source bottle 220,230;

Close each valve on described the second pipeline L2, and open each valve on described the 3rd pipeline L3;

Described the 3rd pipeline L3 is vacuum pipeline, extracts trace amount of foreign gas in second, third MO source bottle 220,230 by described the 3rd pipeline L3;

Packing is completed, at this moment, and identical in the sample in second, third MO source bottle 220,230 and a MO source bottle 210.

The utility model is take high-purity argon gas as source of the gas, be transferred to the MO source in second, third MO source bottle 220,230 of low capacity by a MO source bottle 210 of large volume under pressure-fired, whole minute process of assembling anhydrous and oxygen-free, and disturb without any introduced contaminants, guaranteed the purity in MO source, and process of assembling was simple in of the present utility model minute, and packing efficient is high, and the industry that can well be applied to the MO source divides in process of assembling.

Obviously, those skilled in the art can carry out various changes and modification and not break away from spirit and scope of the present utility model utility model.Like this, if within of the present utility model these were revised and modification belongs to the scope of the utility model claim and equivalent technologies thereof, the utility model also was intended to comprise these change and modification.

Claims

1. the Simple separating packing equipment in a MO source, is characterized in that, comprising: first, second, third pipeline and be arranged at a plurality of valves on described first, second, third pipeline; Wherein, described first pipeline connection to a MO source bottle, described the second pipeline is connected with second, third MO source bottle respectively, and described the 3rd pipeline is communicated with described first, second, third MO source bottle respectively, and the input end of the input end of described the 3rd pipeline and described the second pipeline is interconnected.

2. the Simple separating packing equipment in MO as claimed in claim 1 source, is characterized in that, the mouth of described the first pipeline is positioned at the top of a described MO source bottle.

3. the Simple separating packing equipment in MO as claimed in claim 1 source, is characterized in that, the mouth of described the second pipeline lays respectively at the top of described first, second, third MO source bottle.

4. the Simple separating packing equipment in MO as claimed in claim 1 source, is characterized in that, the mouth of described the 3rd pipeline lays respectively at the top of described second, third MO source bottle.

5. the Simple separating packing equipment in MO as claimed in claim 1 source, is characterized in that, described valve comprises the first valve of the input end that is arranged at described first, second, third pipeline and is arranged at the second valve of mouth.

6. the Simple separating packing equipment in MO as claimed in claim 5 source, is characterized in that, described valve also comprises the input end that is arranged at described the 3rd pipeline and the 3rd valve between mouth.

7. the Simple separating packing equipment in MO as claimed in claim 1 source, is characterized in that, is the high-purity argon gas pipeline in described the first pipeline and the second pipeline.

8. the Simple separating packing equipment in MO as claimed in claim 7 source, is characterized in that, described the 3rd pipeline is vacuum pipeline.