CN205953497U - Electron level arsenic hydride, hydrogen phosphate and passivation treating device that mixes gas cylinder thereof - Google Patents
Electron level arsenic hydride, hydrogen phosphate and passivation treating device that mixes gas cylinder thereof Download PDFInfo
- Publication number
- CN205953497U CN205953497U CN201620741164.4U CN201620741164U CN205953497U CN 205953497 U CN205953497 U CN 205953497U CN 201620741164 U CN201620741164 U CN 201620741164U CN 205953497 U CN205953497 U CN 205953497U
- Authority
- CN
- China
- Prior art keywords
- steel cylinder
- gas
- switch valve
- air exhauster
- arsenic hydride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
The utility model relates to an electron level arsenic hydride, hydrogen phosphate and passivation treating device that mixes gas cylinder thereof. Including the first steel bottle of treating passivation treating, still include output pipeline and the communicating replacement gas cylinder of first steel bottle, air supply steel bottle and input pipeline and the communicating recovery gas cylinder of first steel bottle and pump -line and the communicating air exhauster of first steel bottle, set up first, second switch valve on the output pipeline of replacement gas cylinder, air supply steel bottle, the input pipeline of recovery gas body steel bottle on set up the third ooff valve, the pump -line of air exhauster on set up the fourth ooff valve, first steel bottle arrange heating device's heating intracavity in, recovery gas body steel bottle arrange condensing equipment's condensation intracavity in, the heating intracavity set up thalposis the control unit, thalposis the control unit control heating device makes heating temperature in the cavity control 60 200 DEG C, the input pipeline of recovery gas body steel bottle upperly set up gaseous pumpback device in third ooff valve the next.
Description
Technical field
This utility model belongs to electron level gas field, is related to the inter-process of electron level gas bomb and in particular to one
Plant the passivation device of electron level arsenic hydride, hydrogen phosphide and its mixed gas steel cylinder.
Background technology
Electron level gas is super large-scale integration, flat panel display device, compound semiconductor device, solar-electricity
The electronics industries such as pond, optical fiber produce indispensable raw material, they be widely used in thin film, etching, doping, vapour deposition,
The techniques such as diffusion.And electron level arsenic hydride, hydrogen phosphide and its mixed gas are that in IC chip manufacture, most important doping is situated between
One of matter, plays very crucial effect in ion implantation technology, is also light emitting diode, high performance solar batteries system simultaneously
Make one of synthesis gaas compound semiconductor, the main raw material of gallium arsenide phosphide in technique.Either integrated circuit is still sent out
Optical diode, high performance solar batteries, all play vital effect in national economy life, the industry of national defence section.
The purity requirement of the arsenic hydride, hydrogen phosphide and its mixed gas of current application in above-mentioned field is all in 6N
（99.9999%）More than, main foreign gas content requires less than 0.1ppm.Here, under explaining, general purity reaches 5N
（99.999%）Above gas be known as electron level.Wherein moisture is the main impurity being also to be most difficult to removing.Produce
The gas of such high request, not only the moisture in production-process systems to strictly control, but if there is no qualified steel cylinder container,
It is also to produce quality qualified products.This is because passing through machining processes, inner wall of steel cylinder also can only achieve one
Fixed roughness, that is, still can there is very trickle pit in inner wall of steel cylinder surface, so remain in steel cylinder container
Water adsorption is on the pit of inner wall of steel cylinder, and existing electron level arsenic hydride, hydrogen phosphide and its mixed gas steel cylinder are using biography
The processing method of the heating evacuation of system, it is impossible to make moisture drop to below 0.1ppm, also arises that steel cylinder contains electron level
The purity of arsenic hydride, hydrogen phosphide and its mixed gas can reduce, and affects the qualification rate of product to be installed.
Content of the invention
This utility model purpose is the Passivation Treatment providing a kind of electron level arsenic hydride, hydrogen phosphide and its mixed gas steel cylinder
Device, is processed to interior of steel bottle by this device, moisture in steel cylinder is dropped to below 0.1ppm, such steel cylinder is used for containing electronics
The arsenic hydride of level, hydrogen phosphide and its mixed gas, the purity of arsenic hydride, hydrogen phosphide and its mixed gas greatly improves.These gas
Body is widely used in semiconductor chip, light emitting diode（LED）, flat pannel display（TFT）, solaode（PV）Manufacture field.
In order to realize object above, the technical solution adopted in the utility model is：A kind of electron level arsenic hydride, hydrogen phosphide and
The passivation device of its mixed gas steel cylinder, including the first steel cylinder treating Passivation Treatment, described device also includes outlet tube
Substitution gas steel cylinder that road is communicated with the first steel cylinder, source of the gas steel cylinder, and the gas recovery steel that input channel is communicated with the first steel cylinder
Bottle and the air exhauster that communicates with the first steel cylinder of pump-line, on described substitution gas steel cylinder, the output channel of source of the gas steel cylinder
First, second switch valve is set, the described input channel of gas recovery steel cylinder arranges the 3rd switch valve, described air exhauster
Pump-line on the 4th switch valve is set, the first described steel cylinder is placed in the heating intracavity of heater, described recovery gas
Body steel cylinder is placed in the condensation intracavity of condensing units, and described heating intracavity arranges warming control unit, and warming control unit controls
Heater makes heating cavity temperature be controlled to 60-200 DEG C, and the described input channel of gas recovery steel cylinder is located at the 3rd
The next setting gas pumpback device of switch valve.
Of the present utility model have technical effect that：Processing procedure of the present utility model is such：First close first, the
2nd, the 3rd switch valve, opens the 4th switch valve, starts heater simultaneously, and heater coordinates heating devices heat intracavity
Warming control unit makes the heating cavity temperature of heater be controlled to 100-200 DEG C and lasts for hours so that the first steel
The moisture evaporation in moisture particularly concave pit on inner in bottle is simultaneously extracted out by pump-line by air exhauster, extracts out for a period of time
Afterwards, stop the pumping work of air exhauster, and close the 4th switch valve, then first opening on substitution gas steel cylinder output channel opens
Close valve so that the substitution gas in substitution gas steel cylinder pass through to carry out purging displacement in the first steel cylinder, because the first steel cylinder is added
Heat has simultaneously been evacuated by air exhauster so the air pressure in present first steel cylinder is relatively low, that is, the first steel cylinder is relative to substitution gas steel cylinder
For negative pressure, the substitution gas of substitution gas steel cylinder are directly drawn in the first steel cylinder, form water vapour and put in such first steel cylinder
The mixture of ventilation body, after this suction function terminates, then opens the 4th switch valve, closes first switch valve, starts air exhauster,
Air exhauster extracts the mixture of water vapour and substitution gas, with gradually extraction first of water vapour and the mixture of substitution gas
Steel pressure of the inside of a bottle is gradually lowered, and is vacuum state to the first steel cylinder, and compared with low pressure or even vacuum condition, water vapour is at 60 DEG C still
It is so steam condition, so the temperature of heating devices heat intracavity can be reduced to more than 60 DEG C.Like this or again with above-mentioned
Method circulates successively so that moisture drops to below 0.1ppm in steel cylinder, turns off the 4th switch valve, opens second switch valve, with
Reason, due to the negative pressure of vacuum effect of the first steel cylinder, arsenic hydride in source of the gas steel cylinder, hydrogen phosphide and its mixed gas suck the first steel
In bottle, after the completion of suction function, close second switch valve, start the first steel cylinder that heating devices heat heats intracavity, continue 10-
Form one layer of passivating film so that arsenic hydride, hydrogen phosphide and its mixed gas are located on first inner wall of steel cylinder within 48 hours, then open the
Three switch valves, put gas pumpback device and the arsenic hydride in the first steel cylinder, hydrogen phosphide and its mixed gas are all sucked recovery gas
In body steel cylinder, prevent in the first steel cylinder, thering is unnecessary toxicity arsenic hydride, hydrogen phosphide and its mixed gas, then by condensing units
Condensation chamber solidifies to the gas of gas recovery steel cylinder, prevents arsenic hydride, hydrogen phosphide and its mixed gas further due to gas
Bulk diffusion pollution.So far, the work of this device is fully completed.By this device, interior of steel bottle is processed, steel water in bottle
Divide and drop to below 0.1ppm, such steel cylinder is used for containing arsenic hydride, hydrogen phosphide and its mixed gas of electron level, arsenic hydride, phosphorus
Change hydrogen and its purity of mixed gas greatly improves.These gases are widely used in semiconductor chip, light emitting diode（LED）、
Flat pannel display（TFT）, solaode（PV）Manufacture field.
Brief description
Fig. 1 is structural representation of the present utility model.
Specific embodiment
Referring to the drawings, the passivation device of a kind of electron level arsenic hydride, hydrogen phosphide and its mixed gas steel cylinder, including treating
First steel cylinder 1 of Passivation Treatment, described device also includes substitution gas steel cylinder 9, the gas that output channel is communicated with the first steel cylinder 1
Source steel cylinder 3, and the gas recovery steel cylinder 6 that communicated with the first steel cylinder 1 of input channel and pump-line communicated with the first steel cylinder 1
Air exhauster 8, described substitution gas steel cylinder 9, the output channel of source of the gas steel cylinder 3 arrange first, second switch valve a, b, described
The input channel of gas recovery steel cylinder 6 on arrange the 3rd switch valve c, on the described pump-line of air exhauster 8 arrange the 4th
Switch valve d, the first described steel cylinder 1 is placed in the heating intracavity of heater 2, and described gas recovery steel cylinder 6 is placed in condensation dress
Put 7 condensation intracavity, described heating intracavity arranges warming control unit, warming control unit controls heater 2 to make to add
Hot cavity temperature is controlled to 60-200 DEG C, and the described input channel of gas recovery steel cylinder 6 is located at the bottom of the 3rd switch valve c
Setting gas pumpback device f.With reference to Fig. 1, processing procedure of the present utility model is such：First close first, second, third to open
Close valve a, b, c, open the 4th switch valve d, start heater 2 simultaneously, heater 2 coordinates heater 2 to heat intracavity
Warming control unit makes the heating cavity temperature of heater 2 be controlled to 100-200 DEG C and lasts for hours so that the first steel
The moisture evaporation in moisture particularly concave pit on inner in bottle 1 is simultaneously extracted out by pump-line by air exhauster 8, extracts out for a period of time
Afterwards, stop the pumping work of air exhauster 8, and close the 4th switch valve d, then open on substitution gas steel cylinder 9 output channel the
One switch valve a, so that the substitution gas in substitution gas steel cylinder 9 pass through to carry out purging displacement in the first steel cylinder 1, illustrates here
Under, the substitution gas in described substitution gas steel cylinder 9 must be the gas of stable performance, such as nitrogen, hydrogen and helium
The noble gases of gas, argon etc, and substitution gas must be nontoxic.When the substitution gas in substitution gas steel cylinder 9 are relatively light
Hydrogen or helium, the inner bottom part that the output channel of substitution gas steel cylinder 9 is goed deep into the first steel cylinder 1 carry out purging displacement, when
Substitution gas in substitution gas steel cylinder 9 are relatively heavy nitrogen or argon, can be by the outlet tube of substitution gas steel cylinder 9
, to the first steel cylinder 1 bottleneck, such as Fig. 1, then illustrate down, because the first steel cylinder 1 is heated and has been evacuated by air exhauster 8 for the direct UNICOM in road
So the air pressure in present first steel cylinder 1 is relatively low, that is, the first steel cylinder 1 substitution gas steel cylinder 9 relatively is negative pressure, substitution gas
The substitution gas of steel cylinder 9 are directly drawn in the first steel cylinder 1, form the mixing of water vapour and substitution gas in such first steel cylinder 1
Thing, after this suction function terminates, then opens the 4th switch valve d, closes first switch valve a, starts air exhauster 8, and air exhauster 8 is taken out
Water intaking steam and the mixture of substitution gas, with gradually extraction the first steel cylinder 1 with the mixture of substitution gas for the water vapour
Pressure is gradually lowered, and is vacuum state to the first steel cylinder 1, and compared with low pressure or even vacuum condition, water vapour remains at 60 DEG C
Steam condition, so the temperature that heater 2 heats intracavity can be reduced to more than 60 DEG C.Like this or again method described above
Circulation makes moisture in steel cylinder drop to below 0.1ppm successively, turns off the 4th switch valve d, opens second switch valve b, in the same manner,
Due to the negative pressure of vacuum effect of the first steel cylinder 1, arsenic hydride in source of the gas steel cylinder 3, hydrogen phosphide and its mixed gas suck the first steel
In bottle 1, after the completion of suction function, close second switch valve b, start the first steel cylinder 1 of heater 2 heating heating intracavity, hold
Continuous 10-48 hour forms one layer of passivating film so that arsenic hydride, hydrogen phosphide and its mixed gas are located on the first steel cylinder 1 inwall, then
Open the 3rd switch valve c, put gas pumpback device f and the arsenic hydride in the first steel cylinder 1, hydrogen phosphide and its mixed gas are all inhaled
Enter in gas recovery steel cylinder 6, prevent thering is unnecessary toxicity arsenic hydride, hydrogen phosphide and its mixed gas in the first steel cylinder 1, then pass through
The condensation chamber of condensing units 7 solidifies to the gas of gas recovery steel cylinder 6, prevents arsenic hydride, hydrogen phosphide further and its mixes
Close gas due to gas diffusion appearance pollution.So far, the work of this device is fully completed.
Preferably, described source of the gas steel cylinder 3 is directly reacted through persalt and is purified using device and obtains arsenic hydride, hydrogen phosphide
And its steel cylinder of mixed gas, or using the first described steel cylinder 1.
Here, under illustrating, react through persalt and purify and obtain arsenic hydride, hydrogen phosphide and its mixed gas and can directly fill
Enter steel cylinder and form source of the gas steel cylinder 3, the arsenic hydride of this source of the gas steel cylinder 3, hydrogen phosphide and its mixed gas purity are not very high relatively,
But the passivating film as the first steel cylinder 1 uses gas, and the purity of the first steel cylinder 1 can reach 6N, but some electron levels
The purity of arsenic hydride, hydrogen phosphide and its mixed gas need reach 7N, and the passivating film that this is accomplished by source of the gas steel cylinder 3 uses the pure of gas
Degree is purer, the gas of the first steel cylinder 1 so reaching 6N using above-mentioned purity as using gas, the first new steel of so obtaining
The passivating film of bottle 1 is can to reach 7N or even purity is higher using its purity of gas.
Further, the described pump-line of air exhauster 8 arranges attemperating unit 4, the temperature control temperature of attemperating unit 4 is
60-200 DEG C, described substitution gas steel cylinder 9, the output channel of source of the gas steel cylinder 3, the input channel of gas recovery steel cylinder 6 all connect
On the pump-line of air exhauster 8, the 4th described switch valve d is arranged at the suction opeing being located at air exhauster 8 on pump-line.
Control the pump-line temperature of air exhauster 8 and heater 2 to heat intracavity and match by attemperating unit 4, prevent
From the first steel cylinder 1 gas out, particularly vapor liquefy on the pump-line of air exhauster 8 condensation, be back to first again
Steel cylinder 1, causes the increasing of workload.
Further, on the pump-line of air exhauster 8, the connection position of substitution gas steel cylinder 9 output channel is located at source of the gas steel
Bottle 3 output channel connection positions and gas recovery steel cylinder 6 input channel connection position upper.
As Fig. 1, here, the substitution gas of substitution gas steel cylinder 9 adopt nitrogen or argon, such substitution gas steel cylinder 9
Air inlet closest to the first steel cylinder 1 relative to the air inlet of source of the gas steel cylinder 3 and gas recovery steel cylinder 6 air entry,
Be exactly substitution gas steel cylinder 9 substitution gas shorter relative to the path of the first steel cylinder 1, improve substitution gas displacement efficiency.
Further, the pump-line of air exhauster 8 sets positioned at substitution gas steel cylinder 9 the upper of output channel connection position
Put substitution gas detection means 5.
Need exist under explanation, in order to be further ensured that in the first steel cylinder 1 other this impurity of impurity no that may be present
It is likely due to put gas pumpback device f and the first steel cylinder 1 is evacuated what evacuation in other words did not led to only, then open first and open
Close valve a, the substitution gas due to suction function substitution gas steel cylinder 9 enter the first steel cylinder 1, turn off first switch valve a, open
4th switch valve d, is evacuated by air exhauster 8 again（Here under illustrating, the substitution gas that are pumped here and arsenic hydride, hydrogen phosphide and
The gaseous mixture toxicity of its mixed gas is extremely low, is fully achieved the standard of nature discharge）, and circulated with this, by displacement
The detection of gas-detecting device 5 checks that in the first steel cylinder 1, pumping only has substitution gas no any impurity gas, so obtains the
The arsenic hydride of one steel cylinder 1 device, hydrogen phosphide and its mixed gas electron level purity can be higher.
Preferably, the upper setting first that the described output channel of substitution gas steel cylinder 9 is located at first switch valve a subtracts
Pressure feeder e1, the described output channel of source of the gas steel cylinder 3 is located at the upper setting second decompression supply of second switch valve b
Device e2.
First decompression feeder e1 of setting, the second decompression feeder e2 make from substitution gas steel cylinder 9 and gas
The gas pressure of source steel cylinder 3 output is relatively low, and then gas transmission is steadily exported.
Claims (6)
1. the passivation device of a kind of electron level arsenic hydride, hydrogen phosphide and its mixed gas steel cylinder, including treating Passivation Treatment
First steel cylinder（1）It is characterised in that：Described device also includes output channel and the first steel cylinder（1）The substitution gas steel communicating
Bottle（9）, source of the gas steel cylinder（3）, and input channel and the first steel cylinder（1）The gas recovery steel cylinder communicating（6）And pump-line with
First steel cylinder（1）The air exhauster communicating（8）, described substitution gas steel cylinder（9）, source of the gas steel cylinder（3）Output channel on arrange
First, second switch valve（a、b）, described gas recovery steel cylinder（6）Input channel on arrange the 3rd switch valve（c）, described
Air exhauster（8）Pump-line on arrange the 4th switch valve（d）, described the first steel cylinder（1）It is placed in heater（2）Plus
Hot intracavity, described gas recovery steel cylinder（6）It is placed in condensing units（7）Condensation intracavity, described heating intracavity setting warming
Control unit, warming control unit controls heater（2）So that heating cavity temperature is controlled to 60-200 DEG C, described recovery
Gas bomb（6）Input channel on be located at the 3rd switch valve（c）The next setting gas pumpback device（f）.
2. the passivation device of electron level arsenic hydride according to claim 1, hydrogen phosphide and its mixed gas steel cylinder, its
It is characterised by：Described source of the gas steel cylinder（3）Directly reacted through persalt using device and purify obtain arsenic hydride, hydrogen phosphide and its
The steel cylinder of mixed gas, or using the first described steel cylinder（1）.
3. the passivation device of electron level arsenic hydride according to claim 1, hydrogen phosphide and its mixed gas steel cylinder, its
It is characterised by：Described air exhauster（8）Pump-line on arrange attemperating unit（4）, attemperating unit（4）Temperature control temperature be
60-200 DEG C, described substitution gas steel cylinder（9）, source of the gas steel cylinder（3）Output channel, gas recovery steel cylinder（6）Input pipe
Road is all connected on air exhauster（8）Pump-line on, described the 4th switch valve（d）It is arranged on pump-line and be located at air exhauster
（8）Suction opeing at.
4. the passivation device of electron level arsenic hydride according to claim 3, hydrogen phosphide and its mixed gas steel cylinder, its
It is characterised by：Air exhauster（8）Pump-line on substitution gas steel cylinder（9）The connection position of output channel is located at source of the gas steel cylinder（3）
Output channel connection position and gas recovery steel cylinder（6）Input channel connection position upper.
5. the passivation device of electron level arsenic hydride according to claim 1, hydrogen phosphide and its mixed gas steel cylinder, its
It is characterised by：Described substitution gas steel cylinder（9）Output channel on be located at first switch valve（a）Upper setting first reduce pressure
Feeder（e1）, described source of the gas steel cylinder（3）Output channel on be located at second switch valve（b）Upper setting second reduce pressure
Feeder（e2）.
6. the passivation device of electron level arsenic hydride according to claim 4, hydrogen phosphide and its mixed gas steel cylinder, its
It is characterised by：Air exhauster（8）Pump-line on be located at substitution gas steel cylinder（9）The upper setting displacement of output channel connection position
Gas-detecting device（5）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620741164.4U CN205953497U (en) | 2016-07-14 | 2016-07-14 | Electron level arsenic hydride, hydrogen phosphate and passivation treating device that mixes gas cylinder thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620741164.4U CN205953497U (en) | 2016-07-14 | 2016-07-14 | Electron level arsenic hydride, hydrogen phosphate and passivation treating device that mixes gas cylinder thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205953497U true CN205953497U (en) | 2017-02-15 |
Family
ID=57970393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620741164.4U Active CN205953497U (en) | 2016-07-14 | 2016-07-14 | Electron level arsenic hydride, hydrogen phosphate and passivation treating device that mixes gas cylinder thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205953497U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106064807A (en) * | 2016-07-14 | 2016-11-02 | 合肥正帆电子材料有限公司 | Electron level arsenic hydride, hydrogen phosphide and the passivation device of mixed gas steel cylinder thereof |
| CN113399393A (en) * | 2021-06-18 | 2021-09-17 | 沧州华宇特种气体科技有限公司 | Diborane gas cylinder residual gas recovery and gas cylinder cleaning device and using method thereof |
-
2016
- 2016-07-14 CN CN201620741164.4U patent/CN205953497U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106064807A (en) * | 2016-07-14 | 2016-11-02 | 合肥正帆电子材料有限公司 | Electron level arsenic hydride, hydrogen phosphide and the passivation device of mixed gas steel cylinder thereof |
| CN106064807B (en) * | 2016-07-14 | 2018-07-17 | 合肥正帆电子材料有限公司 | The passivation device of electron level arsenic hydride, hydrogen phosphide and its mixed gas steel cylinder |
| CN113399393A (en) * | 2021-06-18 | 2021-09-17 | 沧州华宇特种气体科技有限公司 | Diborane gas cylinder residual gas recovery and gas cylinder cleaning device and using method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106185850B (en) | The passivation process of electron level arsenic hydride, hydrogen phosphide and its gas mixture steel cylinder | |
| CN105762097B (en) | Method and apparatus for being handled the discharge gas in lining treatment system | |
| CN205953497U (en) | Electron level arsenic hydride, hydrogen phosphate and passivation treating device that mixes gas cylinder thereof | |
| CN102428540B (en) | Method for boron doping silicon wafers | |
| KR19980080510A (en) | Substrate Processing Equipment and Substrate Processing Method | |
| TWI614368B (en) | MOCVD gas shower head pretreatment method | |
| CN110042459B (en) | Gallium nitride crystal production system and ammonia filling method thereof | |
| CN111218668A (en) | Semiconductor processing apparatus and thin film deposition method | |
| CN106064807B (en) | The passivation device of electron level arsenic hydride, hydrogen phosphide and its mixed gas steel cylinder | |
| CN110195855A (en) | A kind of heat power plant boiler feed water oxygenation equipment | |
| CN105927851A (en) | Method for processing steel bottles of high-purity arsine | |
| TW201627055A (en) | Vacuum foreline reagent addition for fluorine abatement | |
| CN103083699B (en) | Purification device applicable to hydrogen peroxide plasmid sterilizer | |
| CN109285766A (en) | Low pressure diffusion furnace low pressure diffusion technique | |
| CN1021528C (en) | Pressure-reducing process and system for gas epitaxy of semiconductors | |
| CN104190180B (en) | Gas filtration method | |
| CN204437683U (en) | Silane purification devices and bulking system | |
| CN109073302A (en) | Heat pump with air pocket, the method for running the heat pump with air pocket and the method for manufacturing the heat pump with air pocket | |
| CN207147306U (en) | A kind of heat exchanger condensed water open type steam trap connection | |
| CN207153396U (en) | A kind of purification devices of perfluoroethane or fluoroform | |
| CN201827656U (en) | High-purity phosphorus oxychloride storage and transportation device | |
| CN205152399U (en) | Quartz tube for diffusion furnace | |
| CN108786169A (en) | A kind of crystal system and its method of liquid | |
| CN213013085U (en) | Novel liquid source gasification system applied to MOCVD | |
| CN216418324U (en) | Hydrogen peroxide concentration and purification device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |