CN105910799A - Infinite and limited conjugated focus-searching photoelectric image analyzer and method thereof - Google Patents

Abstract

The invention belongs to the photoelectric testing technology field and relates to an infinite and limited conjugated focus-searching photoelectric image analyzer integrating light, machine, electricity, calculation and automatic control into one body and a realization method thereof, wherein the analyzer is one of basic component units of photoelectric testing equipment. In the invention, through high-precision confocal and fixed-focus performance of a transmission light path, clear acquisition and fixed focus of a target image of a reflected light path; through adding a photoelectric image analyzer measurement object lens, testing of a limited conjugated optical system parameter is realized; through translation and rotation of the photoelectric image analyzer, measurement of optical parameters of view fields on an axis and outside the axis of an optical system and a fold axis system is realized; and finally, high precision integration testing of optical parameters of view fields on an axis and outside the axis of an infinite and limited conjugated target optical imaging system is realized. By using the infinite and limited conjugated focus-searching photoelectric image analyzer, through a corresponding measurement method and software control, an image formed by the optical system can be rapidly and automatically collected, analyzed and processed in a high precision mode so that performance parameters of an infinite and limited conjugated photoelectric instrument are acquired.

Description

Infinite and Finite Conjugate Focus-finding Photoelectric Image Analyzer and Its Method

technical field

The invention relates to an infinite and finite conjugate focus-finding photoelectric image analyzer, which belongs to the technical field of photoelectric testing.

technical background

Photoelectric image analyzer is the basic unit of photoelectric test equipment, and its performance directly determines the degree of integration and high reliability of photoelectric test equipment. The photoelectric image analyzer is a comprehensive photoelectric test device integrating light, mechanics, electricity, calculation and automatic control. It is used to collect and process the target image formed by the optical system under test, in order to obtain various Module components of various performance parameters.

In the complex photoelectric imaging system, there are many infinite conjugate optical imaging systems and finite conjugate optical imaging systems, and the key to realize the comprehensive measurement of these complex optical parameters is how to break through the clear focus of the image plane of both the finite target and the infinite target. The technical bottleneck of acquisition, how to realize the accurate focus of the infinite and limited target of the photoelectric image analyzer.

In particular, the field testing and front-end support testing of complex optoelectronic equipment require optoelectronic testing equipment to have high reliability, high integration and high stability. Therefore, it is urgent to overcome the common technology and device of optoelectronic image analysis technology that constitutes the optoelectronic test system. , in order to meet the urgent needs of high reliability and high integration of photoelectric test equipment.

At present, products similar to photoelectric image analyzers include the photoelectric image analyzer probe of the Video MTFImage Analysis System of Optikos Corporation of the United States, which is used to measure optical parameters such as optical transfer function and focal length of the optical imaging system. Its disadvantages are:

1) It is not possible to perform focusing tests on infinite conjugate optical systems, and it is not possible to realize multi-vision tests;

2) The folding optical system cannot be tested;

3) There are few types of measurable optical parameters.

In order to make up for the above deficiencies, Beijing Institute of Technology applied for the Chinese patent "Infinite and Finite Conjugate Photoelectric Image Analyzer" (ZL200410090673.7). Measurement of optical parameters of the on-axis and off-axis field of view of the optical system; by replacing the collimating objective lens of different diopters on the object side of the image analyzer optical system, the test of the telescopic optical system of different diopters is realized; through the interface adding a microscope objective lens, Realize the test of finite conjugate optical system, etc. This invention patent not only realizes multi-dimensional adjustment and folding axis test, but also realizes multi-parameter testing of infinite and finite conjugate optical systems, such as: magnification, field of view, image tilt and reticle tilt, exit pupil diameter, exit pupil distance , diopter, visible light resolution, distortion, optical axis consistency of binocular instruments, etc.

However, the infinite and finite conjugate photoelectric image analyzer still adopts the conventional image focusing method in the aspect of image plane focusing, so there are many deficiencies in image focusing accuracy, focusing speed, etc., and the image plane focusing accuracy is limited. In order to further improve the detection accuracy of infinite and finite conjugate photoelectric imaging instruments, the fixed focus speed of the image plane limits the automation capability and efficiency of photoelectric imaging instrument performance parameter testing.

In view of this problem, the present invention proposes to divide the optical path of the image side of the photoelectric image analyzer into two paths, the reflected light path is used for image acquisition, and the transmitted light path is used for high-precision confocal focusing. The advantage of clear acquisition of reflected light path images is that it can greatly improve the focusing accuracy and speed of the image plane, and can also perform tomographic focusing on the internal geometry of the finite conjugate optical system, thereby expanding the detection range of photoelectric imaging system parameters.

Contents of the invention

The object of the present invention is to solve the problems in the above-mentioned prior art, and propose an infinite and finite conjugate focus-finding photoelectric image analyzer and its method.

The present invention realizes the clear collection and fixed focus of the target image of the reflected light path through the high-precision confocal focusing of the transmitted light path, and realizes the high-precision testing of the parameters of the optical imaging system; the selection and addition of the objective lens and axial focusing are measured by the photoelectric image analyzer The displacement of the clear image collector can realize the test of the parameters of the finite conjugate optical system; through the translation and rotation of the photoelectric image analyzer, the comprehensive measurement of the optical system's on-axis, off-axis field of view and optical parameters of the folded axis system can be realized.

The purpose of the present invention is achieved through the following technical solutions.

The infinite and finite conjugate focus-finding photoelectric image analyzer of the present invention includes: a zero-degree collimating mirror, a collimating mirror support mechanism, a five-degree-of-freedom x-y-z-α-θ adjustment workbench, an image analyzer support mechanism, and an x-direction Focusing moving guide rail, x-direction focusing guide rail displacement monitoring system, focusing clear image collector, measuring objective lens and computer measurement and control system; the focusing clear image collector includes spectroscope, area array detection CCD, pinhole and photoelectric detector ; The image analyzer support mechanism is located on the five-degree-of-freedom x-y-z-α-θ adjustment table, and the zero-degree collimator, the collimator support mechanism, the x-direction focusing moving guide rail, the x-direction focusing guide rail displacement monitoring system, The focus-seeking clear image collector is located on the support mechanism of the image analyzer, and together with the support mechanism of the image analyzer, the infinity conjugate target optical system and the finite conjugate target optical system can be adjusted through the five-degree-of-freedom x-y-z-α-θ adjustment table Relative position when testing.

The detection surface of the area array detection CCD is located at the focal plane of the reflected image-side convergent beam reflected by the beam splitter.

The pinhole is located at the focal point of the transmitted image-side convergent beam transmitted by the beam splitter, and the photodetector is located behind the pinhole.

The infinite and finite conjugate focus-finding photoelectric image analyzer of the present invention can also include the front end of the collimating mirror support mechanism as a connecting joint, so that the zero-degree collimating mirror and the measuring objective lens can be used in combination to meet the finite-distance conjugate target Testing of optical system parameters.

The infinite and finite conjugate focus-finding photoelectric image analysis method of the present invention includes the following contents:

1) Use the spectroscope to divide the image-side converging beam into two ways: the transmitted image-side converging beam and the reflected image-side converging beam, and achieve the reflection of the spectroscopic reflection by performing high-precision confocal focusing on the transmitted image-side converging beam transmitted by the spectroscope Precise focusing of the image-side converging beam realizes the clear acquisition and position measurement of the focal plane image of the image-side converging beam of the infinity conjugate target optical system, and finally realizes the high-precision testing of the parameters of the infinity conjugate target optical system;

2) By measuring the addition of the objective lens in the zero diopter collimator, and then using the focus-seeking clear image collector to measure the focal point change position of the converging light beam at the image side, the test of the optical system parameters of the finite-distance conjugate target is realized;

3) Adjust the translation and rotation of the worktable through the five degrees of freedom x-y-z-α-θ to realize the synthesis of optical parameters of the infinity conjugate target optical system and the finite conjugate target optical system on-axis, off-axis field of view and folding axis system Measurement.

The infinite and finite conjugate focusing photoelectric image analysis method of the present invention realizes the high-precision testing of the parameters of the optical system of the infinite conjugate target, including the following steps:

Step 1: Adjust the five-degree-of-freedom x-y-z-α-θ adjustment table so that the infinite conjugate target object-space beam emitted by the infinite conjugate target optical system enters the zero-vision collimator;

Step 2: Use the focus-seeking clear image collector to clearly collect the focal plane image of the image-side converged light beam converged by the zero-division collimator;

Step 3: Use a beam splitter to divide the image-side convergent beam into a transmitted image-side convergent beam and a reflected image-side convergent beam, and the computer measurement and control system controls the x-direction focusing moving guide rail to scan and reciprocate along the x-direction;

Step 4: The computer measurement and control system simultaneously detects the confocal axial intensity response curve and the x-direction focusing moving guide rail when the x-direction focusing moving guide scans and reciprocates along the x direction through the photodetector and the x-direction focusing guide rail displacement monitoring system s position;

Step 5: The computer measurement and control system processes the simultaneously detected confocal axial intensity response curve and the position of the x-direction focus-seeking moving guide rail, and obtains the position of the x-direction focus-seeking moving guide rail corresponding to the maximum value of the confocal axial intensity response curve N;

Step 6: The computer measurement and control system controls the x-direction focusing moving rail to move to the position N, and at this time, the area array detection CCD can collect a clear image of the infinite conjugate target optical system.

Step 7: The computer measurement and control system can calculate the parameters of the infinite conjugate target optical system by using the clear image and its position N of the conjugate target optical system at infinity.

The characteristics of the infinite and finite conjugate focus-finding optical image analysis method to realize the test of the optical parameters of the finite conjugate target optical system include the following steps:

Step 1: Adjust the five-degree-of-freedom x-y-z-α-θ adjustment table so that the finite-distance conjugate target object beam emitted by the finite-distance conjugate target optical system enters the zero-vision collimator through the measurement objective lens;

Step 2: Use the focus-seeking clear image collector to clearly collect the focal plane image of the image-side converged light beam converged by the zero-division collimator;

Step 3: Use a beam splitter to divide the image-side convergent beam into a transmitted image-side convergent beam and a reflected image-side convergent beam, and the computer measurement and control system controls the x-direction focusing moving guide rail to scan and reciprocate along the x-direction;

Step 4: The computer measurement and control system simultaneously detects the confocal axial intensity response curve and the x-direction focusing moving guide rail when the x-direction focusing moving guide scans and reciprocates along the x direction through the photodetector and the x-direction focusing guide rail displacement monitoring system s position;

Step 5: The computer measurement and control system processes the simultaneously detected confocal axial intensity response curve and the position of the x-direction focus-seeking moving guide rail, and obtains the position of the x-direction focus-seeking moving guide rail corresponding to the maximum value of the confocal axial intensity response curve N;

Step 6: The computer measurement and control system controls the x-direction focus-seeking moving guide rail to move to position N, and at this time, the area array detection CCD can acquire a clear image of the finite-distance conjugate target optical system.

Step 7: The computer measurement and control system can calculate the parameters of the infinite conjugate target optical system by using the clear image of the finite conjugate target optical system and the change amount Δx of the focal plane position.

The infinite and finite conjugate focus-finding photoelectric image analysis method realizes the comprehensive measurement of the on-axis, off-axis field of view and optical parameters of the folding axis system of the infinity conjugate target optical system, including the following steps:

Step 1: Adjust the five-degree-of-freedom x-y-z-α-θ adjustment table so that the square beam of the infinite conjugate target optical system emitted by the infinite conjugate target optical system enters the zero-vision collimator;

Step 2: Adjust the five-degree-of-freedom x-y-z-α-θ adjustment table so that the zero-vision collimator is aimed at the on-axis, off-axis field of view and folding axis system of the infinity conjugate target optical system respectively;

Step 3: Use the focus-seeking clear image collector to aim at the focal plane images of the converged image-side converging light beams of the on-axis, off-axis field of view and folding axis system of the infinity conjugate target optical system through the zero-division collimator respectively Carry out clear acquisition and realize the comprehensive measurement of the optical parameters of the infinity conjugate target optical system on-axis, off-axis field of view and folding axis system.

The infinite and finite conjugate focusing photoelectric image analysis method realizes the comprehensive measurement of the on-axis, off-axis field of view and optical parameters of the folding axis system of the finite conjugate target optical system, including the following steps:

Step 1: Adjust the five-degree-of-freedom x-y-z-α-θ adjustment table, so that the finite-distance conjugate target optical system square beam emitted by the finite-distance conjugate target optical system enters the zero-vision collimator through the measuring objective lens;

Step 2: Adjust the five-degree-of-freedom x-y-z-α-θ adjustment table so that the zero-degree collimator is aimed at the on-axis, off-axis field of view and folding axis system of the finite conjugate target optical system respectively;

Step 3: Use the focus-seeking clear image collector to aim at the focal plane images of the converged image-side converging light beams of the on-axis, off-axis field of view and folding axis system of the finite-distance conjugate target optical system respectively through the zero-division collimator Carry out clear acquisition, and realize the comprehensive measurement of the optical parameters of the on-axis, off-axis field of view and folding axis system of the finite conjugate target optical system.

Beneficial effect:

Compared with the prior art, the present invention has the following significant advantages:

1) The present invention proposes to divide the image square optical path of the photoelectric image analyzer into two paths, the reflected optical path is used for image acquisition, and the transmitted optical path is used for high-precision confocal fixed focus, and then the reflected optical path is realized through the high-precision confocal fixed focus of the transmitted optical path The clear collection of images is one of the innovative points different from the existing technology.

2) The present invention uses a focus-seeking clear image collector based on confocal high-precision, high-speed fixed-focus technology to perform confocal detection and focus on the focal point of the converging light beam at the image side, which greatly improves the ability to accurately measure the position of a large-scale focus change, and is convenient for 0 The high-precision comprehensive test of diopter and non-zero diopter telescopic optical system parameters is the second innovation point different from the existing technology.

3) In the present invention, by adding a measuring objective lens in front of the zero diopter collimating mirror, and performing confocal detection and focusing on the focal point of the converging light beam at the image side through the focus-seeking clear image collector, etc., the finite-distance conjugate photoelectric The high-precision comprehensive test of system parameters is the third innovation point different from the existing technology.

Features of the present invention:

1) The adoption of confocal detection and focusing technology, in addition to greatly improving the focusing accuracy and speed of the image plane, can also perform tomographic focusing on the internal geometric structure of the finite conjugate optical system, thereby expanding the detection range of the parameters of the photoelectric imaging system Wait;

2) There is no need to replace the zero diopter collimation objective lens of the image analyzer optical system, and the parameters of the telescopic optical system with different diopters can be directly tested;

3) Cooperate the zero diopter collimating mirror with the measuring objective lens, through the adjustment of the five-degree-of-freedom x-y-z-α-θ adjustment table and the adjustment of the x-direction focus-finding moving guide rail, the infinite and limited conjugate focus-finding photoelectric image analyzer can be equipped with Photoelectric focusing, photoelectric alignment angle measurement, photoelectric photometry, photoelectric modulation degree, photoelectric measurement point expansion function and digital image processing functions, greatly improving the integration ability, comprehensive parameter testing ability and measurement accuracy of photoelectric test equipment, etc. ;

4) Due to the adoption of automatic photoelectric confocal focusing technology, the present invention has the advantages of strong comprehensive measurement capability and automatic measurement capability. It can not only realize multi-dimensional adjustment and folding axis test, but also can adjust the magnification ratio of infinite and finite conjugate optical systems. , field of view, image tilt and reticle tilt, exit pupil diameter, exit pupil distance, diopter, visible light resolution, distortion, binocular instrument optical axis consistency and other parameters for comprehensive measurement.

Description of drawings

Fig. 1 is infinite and finite conjugate focus-seeking photoelectric image analyzer and method schematic diagram thereof of the present invention;

Fig. 2 is the embodiment diagram of infinite and finite conjugate focus-finding photoelectric image analyzer of the present invention;

Fig. 3 is a diagram of an embodiment of the infinite conjugate focusing photoelectric image analysis method of the present invention;

Fig. 4 is a diagram of an embodiment of the limited conjugate focus-finding photoelectric image analyzer method of the present invention;

Among them, 1-zero diopter collimating mirror, 2-converging light beam at the image side, 3-five degrees of freedom x-y-z-α-θ adjustment table, 4-image analyzer support mechanism, 5-x-direction focusing moving guide, 6 -X-direction focusing guide rail displacement monitoring system, 7-focusing clear image collector, 8-beam splitter, 9-area detection CCD, 10-pinhole, 11-photodetector, 12-infinity conjugate target optics System, 13-collimating mirror support mechanism, 14-measuring objective lens, 15-infinity conjugate target optical system, 16-reflection image square converging light beam, 17-transmission image square converging light beam, 18-infinity conjugate target object space Beam, 19-Focal Airy disk, 20-Confocal axial intensity response curve, 21-Finite conjugate target beam, 22-Computer measurement and control system, 23-Illumination light source system, 24-Illumination beam.

detailed description

The present invention will be further described below in conjunction with drawings and embodiments.

The basic idea of the present invention is: through the high-precision confocal fixed focus of the transmitted light path, the clear collection and fixed focus of the target image of the reflected light path are realized; The translation and rotation of the image analyzer realize the measurement of the optical parameters of the optical system on-axis, off-axis field of view and folding axis system, and finally realize the high-precision synthesis of the optical parameters of the infinite and limited conjugate target optical imaging system on-axis and off-axis field of view test.

Example 1

Present embodiment is described as follows with reference to Fig. 2:

As shown in Figure 2, the infinite and finite conjugate focus-finding photoelectric image analyzer includes: an illumination light source system 23, an infinite conjugate target optical system 12, a finite conjugate target optical system 15, a measuring objective lens 14, and a zero diopter Collimating mirror 1, collimating mirror support mechanism 13, five-degree-of-freedom x-y-z-α-θ adjustment table 3, image analyzer support mechanism 4, x-direction focusing moving guide rail 5, x-direction focusing guide rail displacement monitoring system 6, Focus-finding clear image collector 7 , computer measurement and control system 22 , and spectroscope 8 , area array detection CCD 9 , pinhole 10 and photodetector 11 integrated on focus-finding clear image collector 7 .

Among them, the image analyzer support mechanism 4 is located on the five-degree-of-freedom x-y-z-α-θ adjustment table 3, and the zero-degree collimator 1, the collimator support mechanism 13, the x-direction focusing moving guide 5, and the x-direction focusing The guide rail displacement monitoring system 6 and the focus-seeking clear image collector 7 are located in the image analyzer support mechanism 4, and together with the image analyzer support mechanism 4, adjust the infinity conjugate target optics through the five-degree-of-freedom x-y-z-α-θ adjustment table 3 The relative positions of the system 12 and the finite conjugate target optical system 15 during testing.

The computer measurement and control system 22 controls the x-direction focusing moving guide rail 5 so that the focus-finding clear image collector 7 performs focus scanning measurement on the converging point of the converging light beam 2 along the x-direction, and at the same time through the x-direction focusing guide rail displacement monitoring system 6, The position signal collected by the photodetector 11 obtains the confocal axial intensity response curve 20, and the computer measurement and control system 22 processes the confocal axial intensity response curve 20 to determine the position point corresponding to the maximum value of the confocal axial intensity response curve 20 N, and then the computer measurement and control system 22 controls the x-direction focus-finding moving guide rail 5 to move the focus-finding clear image collector 7 to the position N, and at this time, the area array detection CCD 9 can collect a clear image, and at the same time obtain a parallel light incident with the ideal The change amount Δx of the focus position of the converging light beam 2 on the image side behind the zero diopter collimator 1 can also measure the diopter parameters of the infinity conjugate target optical system 12 .

Example 2

The optical instrument measurement method of the infinite conjugate target optical system is explained as follows with reference to FIG. The far-conjugate object-side beam 18 enters the zero diopter collimator 1, and is converged into the image-side convergent beam 2, and the image-side convergent beam 2 is divided into a reflected image-side convergent beam 16 and a transmitted image-side convergent beam by using a beam splitter 8 17 two parts, the computer measurement and control system 22 controls the x-direction focusing moving guide rail 5 to make the focus-seeking clear image collector 7 perform focus-finding scanning measurement on the converging point of the beam 2 on the image side along the x-direction, and the area detection CCD 9 is used to detect Reflecting the image of the converging light beam 16 on the image side, the pinhole 10 with an aperture of 20 microns is used to filter the side lobes of the converging light beam 17 on the image side and allow the transmitted light beam to be detected by the photodetector 11 . The computer measurement and control system 22 processes the confocal axial intensity response curve 20 detected by the photodetector 11, and then determines the position point N corresponding to the maximum value of the confocal axial intensity response curve 20, and then the computer measurement and control system 22 controls the x-direction search The focus moving guide rail 5 moves the focus-seeking clear image collector 7 to the position N. At this time, the area array detection CCD 9 can collect a clear image, and at the same time, the ideal parallel light incident zero-degree collimating mirror 1 can be obtained. The variation Δx of the focus position of the light beam 2 can also be used to measure the diopter parameters of the infinity conjugate target optical system 12 and the like.

The specific measurement steps are as follows:

Step 1: Adjust the five-degree-of-freedom x-y-z-α-θ adjustment table 3, so that the infinite conjugate target object beam 18 emitted by the infinite conjugate target optical system 12 enters the zero-vision collimator 1;

Step 2: using the focus-seeking clear image collector 7 to clearly collect the focal plane image of the image-side converging light beam 2 converged by the zero diopter collimator 1;

Step 3: using the beam splitter 8 to transmit the image-side converging beam 2 to the image-side converging beam 17 and reflect the image-side converging beam 16, and the computer measurement and control system 22 controls the x-direction focusing moving guide rail 5 to scan and reciprocate along the x-direction;

Step 4: The computer measurement and control system 22 simultaneously detects the confocal axial intensity response curve 20 and x when the x-direction focus-finding moving guide rail 5 scans and reciprocates along the x-direction through the photodetector 11 and the x-direction focusing guide rail displacement monitoring system 6 Move the position of guide rail 5 toward focusing;

Step 5: The computer measurement and control system 22 processes the simultaneously detected confocal axial intensity response curve 20 and the position of the x-direction focus-seeking moving rail, and obtains the x-direction focus-seeking movement corresponding to the maximum value of the confocal axial intensity response curve 20 The position N of the guide rail 5;

Step 6: The computer measurement and control system 22 controls the x-direction focusing moving guide rail 5 to move to the position N, and at this time, the area array detection CCD 9 can collect a clear image of the conjugate target optical system 12 at infinity.

Step 7: The computer measurement and control system 22 can calculate the parameters of the infinite conjugate target optical system 12 by using the collected clear image of the infinite conjugate target optical system 12 and its position N.

Example 3

The optical instrument measurement method of the finite-distance conjugate target optical system is explained as follows with reference to FIG. The five-degree-of-freedom x-y-z-α-θ adjustment table 3 makes the finite-distance conjugate target beam 21 enter the measurement objective lens 14 and the zero-diopter collimator 1, and converges the imaging-side converging beam 2 through the zero-division collimator 1 , using the beam splitter 8 to divide the image-side converging beam 2 into two parts: the reflected image-side converging beam 16 and the transmitted image-side converging beam 17, and the computer measurement and control system 22 controls the x-direction focusing moving guide rail 5 to make the focusing clear image collector 7 along the Focusing scanning measurement is performed on the converging point of the converging light beam 2 on the image side in the x direction. The area array detection CCD 9 is used to detect the image of the converging light beam 16 on the reflected image side, and the pinhole 10 with an aperture of 20 microns is used to filter out the converging light beam on the transmitted image side. The side lobes of the beam make the transmitted beam detectable by the photodetector 11. The computer measurement and control system 22 processes the confocal axial intensity response curve 20 detected by the photodetector 11, and then determines the position point N corresponding to the maximum value of the confocal axial intensity response curve 20, and then the computer measurement and control system 22 controls the x-direction search The focus moving guide rail 5 moves the focus-seeking clear image collector 7 to the position N, and at this time, the area array detection CCD 9 can collect clear image parameters and the like.

The specific measurement steps are as follows:

Step 1: Adjust the five-degree-of-freedom x-y-z-α-θ adjustment table 3, so that the finite-distance conjugate target object beam 21 emitted by the finite-distance conjugate target optical system 15 enters the zero diopter collimator 1 through the measuring objective lens 14;

Step 2: using the focus-seeking clear image collector 7 to clearly collect the focal plane image of the image-side converging light beam 2 converged by the zero diopter collimator 1;

Step 3: using the beam splitter 8 to transmit the image-side converging beam 2 to the image-side converging beam 17 and reflect the image-side converging beam 16, and the computer measurement and control system 22 controls the x-direction focusing moving guide rail 5 to scan and reciprocate along the x-direction;

Step 4: The computer measurement and control system 22 simultaneously detects the confocal axial intensity response curve 20 and x when the x-direction focus-finding moving guide rail 5 scans and reciprocates along the x-direction through the photodetector 11 and the x-direction focusing guide rail displacement monitoring system 6 Move the position of guide rail 5 toward focusing;

Step 5: The computer measurement and control system 22 processes the simultaneously detected confocal axial intensity response curve 20 and the position of the x-direction focus-seeking moving rail, and obtains the x-direction focus-seeking movement corresponding to the maximum value of the confocal axial intensity response curve 20 The position N of the guide rail 5;

Step 6: The computer measurement and control system 22 controls the x-direction focusing moving guide rail 5 to move to the position N. At this time, the area array detection CCD 9 can acquire a clear image of the finite-distance conjugate target optical system 15 .

Step 7: The computer measurement and control system 22 can calculate the parameters of the infinity conjugate target optical system 12 by using the clear image of the finite conjugate target optical system 15 and the change amount Δx of the focal plane position.

Example 4

The steps to realize the comprehensive measurement method of the optical parameters of the 12-axis, off-axis field of view and folding axis system of the infinite conjugate target optical system are explained as follows with reference to FIG. 3 :

Step 1: Illuminate the infinite conjugate target optical system 12 with the illumination light source system 23 to form the target object;

Step 2: adjust the five-degree-of-freedom x-y-z-α-θ adjustment table 3, so that the infinite conjugate target object beam 18 emitted by the infinite conjugate target optical system 12 enters the zero-vision collimator 1;

Step 3: Adjust the five-degree-of-freedom x-y-z-α-θ adjustment table 3 so that the zero-vision collimator 1 is aimed at the 12-axis, off-axis field of view and folding axis system of the infinity conjugate target optical system;

Step 4: Use the focus-seeking clear image collector 7 to aim at the convergent image-space converging light beam 2 of the infinity conjugate target optical system 12 on-axis, off-axis field of view and folding axis system respectively through the zero diopter collimating mirror 1 The focal plane image is clearly collected, and the comprehensive measurement of the optical parameters of the 12-axis, off-axis field of view and folding axis system of the infinity conjugate target optical system is realized.

Example 5

The steps to realize the comprehensive measurement method of the 15-axis, off-axis field of view and optical parameters of the folded axis system of the finite conjugate target optical system are explained as follows with reference to FIG. 4 :

Step 1: Assemble the measuring objective lens 14 on the collimator support mechanism 13, and illuminate the finite-distance conjugate target optical system 15 with the illumination light source system 23 to form the target object;

Step 2: Adjust the five-degree-of-freedom x-y-z-α-θ adjustment table 3 so that the finite-distance conjugate target object beam 21 enters the measurement objective lens 14 and the zero-diopter collimator 1, and converges and forms the image through the zero-diopter collimator 1 square converging beam 2;

Step 3: Adjust the five-degree-of-freedom x-y-z-α-θ adjustment table 3, so that the zero-vision collimator 1 is aimed at the finite-distance conjugate target optical system 15 on-axis, off-axis field of view and folding axis system;

Step 4: Use the focus-seeking clear image collector 7 to aim at the convergent image-space converging light beam 2 of the on-axis, off-axis field of view and folding axis system of the finite-distance conjugate target optical system 15 respectively through the zero diopter collimating mirror 1 The focal plane image is clearly collected, and the comprehensive measurement of the 15-axis, off-axis field of view and optical parameters of the folding axis system of the finite conjugate target optical system is realized.

The specific embodiment of the present invention has been described above in conjunction with the accompanying drawings, but these descriptions can not be interpreted as limiting the scope of the present invention, the protection scope of the present invention is defined by the appended claims, any claims on the basis of the present invention All modifications are within the protection scope of the present invention.

Claims (7)

1. unlimited finite conjugate of holding concurrently seeks burnt light electric image analyzer, it is characterised in that including: zero diopter Collimating mirror (1), collimating mirror supporting mechanism (13), five degree of freedom x-y-z-α-θ adjustment workbench (3), As analyzer supporting mechanism (4), x are to seeking burnt moving guide rail (5), x to seeking burnt guide rail displacement monitoring system Unite (6), seek burnt picture rich in detail harvester (7), measure object lens (14) and computer measurement and control system (22), It is characterized in that: seek burnt picture rich in detail harvester (7) and include that spectroscope (8), face battle array detect CCD (9), pin hole (10) and photodetector (11)；

Wherein adjust workbench (3) as analyzer supporting mechanism (4) is positioned at five degree of freedom x-y-z-α-θ On, and zero diopter collimating mirror (1), collimating mirror supporting mechanism (13), x to seek burnt moving guide rail (5), X is to seeking burnt guide rail system for monitoring displacement (6), seeking burnt picture rich in detail harvester (7) and be positioned at as analyzer On supporting mechanism (4), and with as analyzer supporting mechanism (4) is by five degree of freedom x-y-z-α-θ Adjust workbench (3) regulation infinity conjugation objective optics system (12) and limited remote conjugation target Relative position during optical system (15) test；

The test surface of face battle array detection CCD (9) is positioned at image space converging beam (2) and is split mirror (8) The position of focal plane of reflection image space converging beam (16) of reflection；

Pin hole (10) is positioned at image space converging beam (2) and converges through the transmission image space of spectroscope (8) transmission The focal position of convergent pencil of rays (17), after photodetector (11) is positioned at pin hole (10).

Unlimited finite conjugate of holding concurrently the most according to claim 1 seeks burnt light electric image analyzer, and it is special Levy and be: can also include that the front end of collimating mirror supporting mechanism (13) manufactures connection knot mouth, make zero to regard Degree collimating mirror (1) is applied in combination with measuring object lens (14), to meet limited remote conjugation objective optics The test of system (15) parameter.

3. unlimited finite conjugate of holding concurrently is sought burnt light electric image and is analyzed method, it is characterised in that including:

1) utilize spectroscope (8) that image space converging beam (2) is divided into transmission image space converging beam (17) With reflection image space converging beam (16) two-way, by the transmission image space of spectroscope (8) transmission is converged Convergent pencil of rays (17) carries out the confocal reflection image space reaching to reflect spectroscope (8) that focuses of high accuracy and converges Accurately focusing of convergent pencil of rays (16), it is achieved infinity conjugation objective optics system (12) image space converges The clear of light beam (2) focal plane image gathers and position finding, finally realizes infinity conjugation target light The high precision measurement of system (12) parameter；

2) being joined by adding of measurement object lens (14) in zero diopter collimating mirror (1), recycling seeks Jiao The picture rich in detail harvester (7) mensuration to image space converging beam (2) focal variation position, realizes The test of limited remote conjugation objective optics system (15) optical parametric；

3) translation and the rotation of workbench (3) are adjusted by five degree of freedom x-y-z-α-θ, it is achieved unlimited On remote conjugation objective optics system (12) and limited remote conjugation objective optics system (15) axle, outside axle Visual field and the composite measurement of folding axle system optical parametric.

Unlimited finite conjugate of holding concurrently the most according to claim 3 is sought burnt light electric image and is analyzed method, its It is characterised by: the high precision measurement of infinity conjugation objective optics system (12) parameter, including following Step:

Step one: adjust five degree of freedom x-y-z-α-θ and adjust workbench (3), makes infinity be conjugated target Infinity conjugation object side's light beam (18) that optical system (12) sends, enters zero diopter collimation Mirror (1)；

Step 2: utilize and seek burnt picture rich in detail harvester (7) to through zero diopter collimating mirror (1) convergence The focal plane image of image space converging beam (2) clearly gather；

Step 3: utilize spectroscope (8) that image space converging beam (2) is divided into transmission image space converged light Bundle (17) and reflection image space converging beam (16), computer measurement and control system (22) controls x to seeking Burnt moving guide rail (5) moves back and forth along x to being scanned；

Step 4: computer measurement and control system (22) is led to seeking Jiao by photodetector (11) and x It is past to being scanned along x to seeking burnt moving guide rail (5) that rail system for monitoring displacement (6) detects x simultaneously Confocal axial strength response curve (20) when moving again and x are to the position seeking burnt moving guide rail (5) Put；

Step 5: computer measurement and control system (22) is to simultaneously detected confocal axial strength response song Line (20) and x process to the position seeking burnt moving guide rail (5), try to achieve confocal axial strength X corresponding to response curve (20) maximum is to the position N seeking burnt moving guide rail (5)；

Step 6: computer measurement and control system (22) controls x and moves to seeking burnt moving guide rail (5) Position N, now face battle array detection CCD (9) just can be adopted infinity and is conjugated objective optics system (12) Sharply defined image；

Step 7: computer measurement and control system (22) utilizes the infinity conjugation objective optics system adopted (12) sharply defined image and position N thereof, can calculate infinity conjugation objective optics system (12) Parameter.

Unlimited finite conjugate of holding concurrently the most according to claim 3 is sought burnt light electric image and is analyzed method, its It is characterised by: the test of limited remote conjugation objective optics system (15) optical parametric comprises the following steps:

Step one: adjust five degree of freedom x-y-z-α-θ and adjust workbench (3), make limited remote conjugation target Limited remote conjugation object side light beam (21) that optical system (15) sends is through measuring object lens (14) Enter zero diopter collimating mirror (1)；

Step 2: utilize and seek burnt picture rich in detail harvester (7) to through zero diopter collimating mirror (1) convergence The focal plane image of image space converging beam (2) clearly gather；

Step 3: utilize spectroscope (8) that image space converging beam (2) is divided into transmission image space converged light Bundle (17) and reflection image space converging beam (16), computer measurement and control system (22) controls x to seeking Burnt moving guide rail (5) moves back and forth along x to being scanned；

Step 4: computer measurement and control system (22) is led to seeking Jiao by photodetector (11) and x It is past to being scanned along x to seeking burnt moving guide rail (5) that rail system for monitoring displacement (6) detects x simultaneously Confocal axial strength response curve (20) when moving again and x are to the position seeking burnt moving guide rail (5) Put；

Step 5: computer measurement and control system (22) is to simultaneously detected confocal axial strength response song Line (20) and x process to the position seeking burnt moving guide rail, try to achieve confocal axial strength response song X corresponding to line (20) maximum is to the position N seeking burnt moving guide rail (5)；

Step 6: computer measurement and control system (22) controls x and moves to seeking burnt moving guide rail (5) Position N, now face battle array detection CCD (9) just can adopt limited remote conjugation objective optics system (15) Sharply defined image；

Step 7: computer measurement and control system (22) utilizes the limited remote conjugation objective optics system adopted (15) sharply defined image and position of focal plane variation delta x, can calculate limited remote conjugation objective optics system (15) parameter.

Unlimited finite conjugate of holding concurrently the most according to claim 3 is sought burnt light electric image and is analyzed method, real On conjugation objective optics system (12) axle of existing infinity, the outer visual field of axle and folding axle system optical parametric The feature of composite measurement comprises the following steps:

Step one: adjust five degree of freedom x-y-z-α-θ and adjust workbench (3), makes infinity be conjugated target Infinity conjugation object side's light beam (18) that optical system (12) sends, enters zero diopter collimation Mirror (1)；

Step 2: adjust five degree of freedom x-y-z-α-θ and adjust workbench (3), make zero diopter collimating mirror (1) Aim at visual field and folding axle system on conjugation objective optics system (12) axle of infinity, outside axle respectively；

Step 3: be utilized respectively and seek burnt picture rich in detail harvester (7) to through zero diopter collimating mirror (1) Aim at visual field and the remittance of folding axle system on conjugation objective optics system (12) axle of infinity, outside axle respectively The focal plane image of poly-image space converging beam (2) clearly gathers, it is achieved infinity conjugation target Visual field and the composite measurement of folding axle system optical parametric on optical system (12) axle, outside axle.

Unlimited finite conjugate of holding concurrently the most according to claim 3 is sought burnt light electric image and is analyzed method, real Existing limit is far conjugated on objective optics system (15) axle, the outer visual field of axle and folding axle system optical parametric The feature of composite measurement comprises the following steps:

Step one: adjust five degree of freedom x-y-z-α-θ and adjust workbench (3), make limited remote conjugation target Limited remote conjugation object side light beam (21) that optical system (15) sends is through measuring object lens (14) Enter zero diopter collimating mirror (1)；

Step 2: adjust five degree of freedom x-y-z-α-θ and adjust workbench (3), make zero diopter collimating mirror (1) Aim on limited remote conjugation objective optics system (15) axle respectively, the outer visual field of axle and folding axle system；

Step 3: be utilized respectively and seek burnt picture rich in detail harvester (7) to through zero diopter collimating mirror (1) Aim on limited remote conjugation objective optics system (15) axle respectively, the outer visual field of axle and the remittance of folding axle system The focal plane image of poly-image space converging beam (2) clearly gathers, it is achieved limited remote conjugation target Visual field and the composite measurement of folding axle system optical parametric on optical system (15) axle, outside axle.