CN105867029A - Lighting irradiation and light irradiation method - Google Patents

Lighting irradiation and light irradiation method Download PDF

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Publication number
CN105867029A
CN105867029A CN201510958689.3A CN201510958689A CN105867029A CN 105867029 A CN105867029 A CN 105867029A CN 201510958689 A CN201510958689 A CN 201510958689A CN 105867029 A CN105867029 A CN 105867029A
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CN
China
Prior art keywords
mentioned
workbench
irradiation area
outlet
move
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Granted
Application number
CN201510958689.3A
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Chinese (zh)
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CN105867029B (en
Inventor
木村淳治
石井正
石井一正
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Ushio Denki KK
Ushio Inc
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Ushio Denki KK
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Publication of CN105867029A publication Critical patent/CN105867029A/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

Abstract

The invention provides a light irradiation device and a light irradiation method thereof. In a dual-workplatform mode, the workplatforms do not interfere with each other and perform high-effectively light irradiation processing. The light irradiation device comprises a first workplatform, for carrying a first workpiece and being capable of reciprocating between a first standby position and a irradation area; a second workplatform, for carrying a second workpiece and capable of reciprocating between a second standby position and the irradation area; a controller, independently controlling the moving of the first workplatform and the second workplatform so as to make the first workpiece and the second workpiec passing alternatingly through the irradiation area. Furthermore the controller controls in the following mode: each workplatform moves in the irradiation area in a speed less than the maximu speed; each platform moves in a maximum speed when the platform comes back from and out of the irradiation area; the workplatform moves in such a speed that the distance between workplatforms is no less than a preset proximal distance.

Description

Light irradiation device and light illuminating method
Technical field
The present invention relates to light irradiation device and light illuminating method, particularly relating to possess can be in same axis On two workpiece workbench moving back and forth, and the workpiece on this workpiece workbench is alternately irradiated light Light irradiation device and light illuminating method.
Background technology
In recent years, alignment films, the angle of visual field about the liquid crystal display cells headed by liquid crystal panel compensate The orientation process of the oriented layer etc. of film, employing is taken by the polarised light of the wavelength that irradiation specifies To, be referred to as light orientation technology.
The light irradiation device used in light is orientated possesses: have suitable with the width of light irradiation area The bar-shaped light source of length；And make the polarizer of the light polarization from this light source, to along and light source The workpiece that is handled upside down of the orthogonal direction of long side direction irradiate polarised light.
As such light irradiation device, such as, there is the technology described in patent document 1.This technology Use double-workbench mode, possess: can be at the first Work mounting of the side being set in irradiation area The first workbench moved back and forth between position and irradiation area；And irradiation area can be set in Opposite side second workpiece loading position and irradiation area between the second workbench of moving back and forth.And And, by making the first workbench and the second workbench alternately move towards irradiation area, and to workbench On workpiece irradiate light, thus, and compared with the situation of the workbench only possessing a side produce interval time Between reduce.
Patent document 1: Japanese Unexamined Patent Publication 2014-174352 publication
In the technology described in above-mentioned patent document 1, in order to realize further producing interval time The purpose of shortening, it is also possible to be formed as: move (from irradiation area with the return road of the workbench of a side The movement returned towards Work mounting position) continuous mutually, the outlet of the workbench starting the opposing party move (from Work mounting is positioned against the movement of irradiation area).
But, period of each workbench movement in irradiation area (irradiating the period of polarised light) and The translational speed of the period workbench of movement outside irradiation area is different.Specifically, each workbench is worked as Move outside irradiation area and in the case of only carrying out the carrying of workpiece, it is possible to high-speed mobile, but when shining Penetrate the period of movement in region, exist to obtain the light exposure of regulation and situation that low speed moves.
Therefore, the timing of beginning and the workbench of the opposing party are moved in the return road only making the workbench of a side Outlet move the Timing Synchronization of beginning if, exist because above-mentioned translational speed difference workbench it Between produce the misgivings of interference.
Summary of the invention
Therefore, the problem of the present invention is, in double-workbench mode, it is provided that a kind of workbench is each other Will not interfere with and light irradiation device and the light illuminating method of photo-irradiation treatment can be carried out efficiently.
In order to solve above-mentioned problem, a mode of light irradiation device involved in the present invention is a kind of light Irradiation unit, irradiates light to by the workpiece of irradiation area set in advance, wherein, possesses: first Workbench, loads the first workpiece, and can be by will be from setting on the carrying axle of above-mentioned irradiation area The first position of readiness in the side of above-mentioned irradiation area towards the movement of above-mentioned irradiation area as outlet Move and move back and forth；Second workbench, loads second workpiece, and can be by above-mentioned photograph Penetrate region carrying axle on by from be set in above-mentioned irradiation area opposite side the second position of readiness towards The movement of above-mentioned irradiation area is moved as outlet and is moved back and forth；And control portion, to above-mentioned The movement of the first workbench and above-mentioned second workbench is controlled independently, in order to above-mentioned first work Part and above-mentioned second workpiece alternately pass through above-mentioned irradiation area, and above-mentioned control portion is carried out in the following manner Control: above-mentioned first workbench and above-mentioned second workbench move with first in above-mentioned irradiation area Speed moves, and the return road outside above-mentioned irradiation area is with the second shifting than above-mentioned first translational speed high speed Dynamic speed moves, the outlet outside above-mentioned irradiation area, when workbench spacing than set in advance Close to moving with above-mentioned second translational speed during distance, when above-mentioned workbench spacing be above-mentioned to connect most Move with above-mentioned first translational speed time below closely, and be controlled in the following manner: upper State in the first workbench and above-mentioned second workbench, be in return road and move in the workbench of a side Before period at least in above-mentioned irradiation area, the workbench of the opposing party proceeds by outlet and moves.
So, use two workbench possessing mounting workpiece, and each workpiece is alternately irradiated light So-called double-workbench mode.Thus, in the period irradiating light towards the workbench of a side, it is possible to carry out another The workpiece replacing operation etc. of the workbench of one side.Therefore, compared with the situation of workbench only Can reduce and produce interval time, it is possible to increase productivity ratio.Further, owing to making to enter outside irradiation area The workbench that row outlet is moved is so that workbench spacing is not less than the translational speed of closest-approach distance Mobile, therefore, i.e. there are the feelings of translational speed difference in box lunch between the first workbench and the second workbench Under condition, it is also possible to interference between workbench will not occur and photo-irradiation treatment can be carried out efficiently Mode make movable workbench.
Further, owing to entering with higher speed till the position of the interference not occurred between workbench Row outlet is moved, and makes it follow the workbench of movement in advance, therefore, it is possible to avoid between workbench afterwards Interference and it can be made to arrive irradiation area as early as possible.Therefore, it is possible to the workpiece of a side is being carried out At once the workpiece of the opposing party is carried out photo-irradiation treatment after photo-irradiation treatment, it is possible to when realizing producing interval Between further shortening.
Additionally, in above-mentioned light irradiation device, it is also possible to be formed as, when above-mentioned first workbench with And the workbench of the side in above-mentioned second workbench just carrying out outside above-mentioned irradiation area outlet move, And the workbench of the opposing party is just carrying out return road when moving, above-mentioned control portion makes the workbench of one side chase after Mobile with the workbench of above-mentioned the opposing party.
So, owing to making the workbench carrying out moving in outlet outside irradiation area with the work with the opposing party The translational speed that platform is identical moves, and therefore, i.e. box lunch is deposited between the first workbench and the second workbench In the case of translational speed difference, it is also possible to the interference being reliably prevented between workbench.
Further, in above-mentioned light irradiation device, it is also possible to be formed as, above-mentioned control portion is with following side Formula is controlled: when the workbench of the side in above-mentioned first workbench and above-mentioned second workbench exists Just carrying out outlet outside above-mentioned irradiation area to move and the workbench of the opposing party is just carrying out return road when moving, When above-mentioned irradiation area is compared in the rearward end position on the return road moving direction of the workbench of above-mentioned the opposing party The end position of position of readiness side of the workbench by one side and be positioned at the work of above-mentioned the opposing party During the position of readiness side of platform, the workbench of one side is made to move until arriving with above-mentioned second translational speed Till above-mentioned end position.
Thus, if the workbench of movement in advance is completely in irradiation area, then enter outside irradiation area The workbench that row outlet is moved unrelated with workbench spacing and can till the entrance of irradiation area Enough move with higher speed.Thus, it is also possible to be formed as the work at least one party in two workpiece Part carries out the state of photo-irradiation treatment all the time, it is possible to realize further producing the shortening of interval time.
Additionally, in above-mentioned light irradiation device, it is also possible to be formed as, when above-mentioned first workbench with And the workbench of the side in above-mentioned second workbench is just carried out the period that outlet is moved, above-mentioned control portion Forbid that the outlet of the workbench of the opposing party is moved.
Thereby, it is possible to proceed by the work starting the opposing party after return road is moved again at the workbench of a side The outlet of platform is moved, it is possible to avoid two workbench all to carry out the situation that outlet is moved.Therefore, it is possible to Reliably avoid workbench interference each other.
Further, in above-mentioned light irradiation device, it is also possible to be formed as, when above-mentioned first workbench with And the workbench of the side in above-mentioned second workbench is just carried out the period that outlet is moved, above-mentioned control portion The workbench making above-mentioned the opposing party carries out outlet initially towards target stop position and moves, wherein, above-mentioned Target stop position is set in moving to move towards return road from outlet and cutting of the workbench relative to one side That changes turns back position and the position of the above-mentioned closest-approach distance in position of readiness side of workbench by the opposing party, When above-mentioned the opposing party workbench arrive above-mentioned target stop position time, when one side workbench just Carry out outlet when moving, proceed by till return road moves until the workbench of one side, make above-mentioned The workbench of the opposing party stops at above-mentioned target stop position.
So, when the workbench of a side just carrying out outlet move time, start the going of workbench of the opposing party Road is moved, therefore, it is possible to more efficiently carry out the photo-irradiation treatment for two workpiece.
Additionally, in above-mentioned light irradiation device, it is also possible to be formed as, be also equipped with rotation control unit, Independently controlled above-mentioned first workbench of this rotation control unit and above-mentioned second workbench are around relative to work Make the rotation of the orthogonal axle of table top, make the attitude of this workbench become attitude when light irradiates, when above-mentioned First workbench and above-mentioned second workbench from respective position of readiness until arriving above-mentioned irradiated region The interval till allowing position that rotates before territory is just carried out the period that outlet is moved, above-mentioned rotation control unit Above-mentioned rotation is controlled.
By possessing rotation control unit like this, such as in the case of workpiece is irradiated polarised light, energy Enough the direction of workpiece is arranged to the direction of regulation relative to the polarizing axis of polarised light and carries out light irradiation Process.Further, by being operated the rotation control of platform in outlet in moving, it is possible between suppression produces Interval is elongated.
Further, in above-mentioned light irradiation device, it is also possible to be formed as, when by above-mentioned rotation control unit The workbench of non-rotating control object controlled just is carrying out outlet when moving, and above-mentioned rotation allows position to set The position of turning back towards return road mobile handoff is moved from outlet due to the workbench comparing this non-rotating control object Put and by rotating the position of the above-mentioned closest-approach distance in position of readiness side of control object, when above-mentioned non-rotating The workbench of control object is just carrying out return road when moving, above-mentioned rotation allow position to be set in compare this non- The position of the workbench rotating control object connects most by the position of readiness side of above-mentioned rotation control object is above-mentioned In-plant position.
Thereby, it is possible to the rotation carried out while avoiding the interference between workbench during outlet is moved controls.
Further, in above-mentioned light irradiation device, it is also possible to be formed as, above-mentioned workbench spacing is The outlet of the front position on the outlet moving direction of above-mentioned first workbench and above-mentioned second workbench is moved Between front position on dynamic direction along the axial distance of above-mentioned carrying.
So, it is set to work due to the distance each other of the front position on the outlet moving direction of each workbench Station spacing, therefore, the shape of the most convenient each workbench or the rotation around the axle orthogonal with work top In the case of gyrations etc. produce difference, it is also possible to carry out avoiding the workbench of the interference between workbench Mobile control.
Additionally, in above-mentioned light irradiation device, above-mentioned light can be polarised light.So, it is also possible to It is applied to workpiece be irradiated polarised light and carries out the polarized light illumination device of light orientation process.
Further, in above-mentioned light irradiation device, can be to above-mentioned first workpiece and above-mentioned second work Part, moves in outlet and moves these both sides with return road and irradiate above-mentioned light.Thereby, it is possible to do not waste energy ground Carry out photo-irradiation treatment.
Additionally, another mode of light irradiation device involved in the present invention is a kind of light irradiation device, Irradiate light to by the workpiece of irradiation area set in advance, wherein, possess: the first workbench, carry Put the first workpiece, and can will be set in above-mentioned photograph by the carrying axle of above-mentioned irradiation area Penetrate between the first position of readiness and the above-mentioned irradiation area of the side in region from above-mentioned first position of readiness court Movement to above-mentioned irradiation area is moved as outlet and is moved back and forth；Second workbench, mounting Second workpiece, and can will be set in the opposite side of above-mentioned irradiation area on the above-mentioned carrying axle From above-mentioned second position of readiness towards above-mentioned irradiation area between second position of readiness and above-mentioned irradiation area Movement move as outlet and move back and forth；And control portion, to above-mentioned first workbench with And the movement of above-mentioned second workbench is controlled independently, in order to above-mentioned first workpiece and above-mentioned second Workpiece alternately passes through above-mentioned irradiation area；And rotation control unit, independently controlled above-mentioned first work Station and above-mentioned second workbench, around the rotation of the axle orthogonal relative to work top, make this workbench Attitude become light irradiate time attitude, above-mentioned control portion is controlled in the following manner: above-mentioned first Workbench and above-mentioned second workbench in above-mentioned irradiation area with than maximum mobile speed set in advance Spending slow translational speed to move, the return road outside above-mentioned irradiation area is moved with above-mentioned maximum translational speed, Outlet outside above-mentioned irradiation area, is not less than closest-approach distance set in advance with workbench spacing Translational speed move, above-mentioned rotation control unit is by above-mentioned first workbench and above-mentioned second workbench Rotating, before arriving above-mentioned irradiation area, the interval allowed till position from respective position of readiness The interval carrying out moving in outlet is set to carry out the spinning movement of above-mentioned rotation may be interval.
Further, in above-mentioned light irradiation device, it is also possible to be formed as, when by above-mentioned rotation control unit The workbench of non-rotating control object controlled just is carrying out outlet when moving, and above-mentioned rotation allows position to set The position of turning back towards return road mobile handoff is moved from outlet due to the workbench comparing this non-rotating control object Put and by rotating the position of the above-mentioned closest-approach distance in position of readiness side of control object, when above-mentioned non-rotating The workbench of control object is just carrying out return road when moving, above-mentioned rotation allow position to be set in compare this non- The position of the workbench rotating control object connects most by the position of readiness side of above-mentioned rotation control object is above-mentioned In-plant position.
Further, in above-mentioned light irradiation device, it is also possible to be formed as, when above-mentioned first workbench with And the workbench of the side in above-mentioned second workbench just carrying out outside above-mentioned irradiation area outlet move, And the workbench of the opposing party is just carrying out return road when moving, when above-mentioned workbench spacing is more closest than above-mentioned During distance, above-mentioned control portion makes the workbench of one side move with above-mentioned maximum translational speed, when When above-mentioned workbench spacing is below above-mentioned closest-approach distance, above-mentioned control portion makes the work of one side Station moves with the translational speed of the workbench of above-mentioned the opposing party.
Further, in above-mentioned light irradiation device, it is also possible to be formed as, when above-mentioned first workbench with And the workbench of the side in above-mentioned second workbench just carrying out outside above-mentioned irradiation area outlet move, And the workbench of the opposing party is just carrying out return road when moving, above-mentioned control portion makes the workbench of one side chase after Mobile with the workbench of above-mentioned the opposing party.
Further, in above-mentioned light irradiation device, it is also possible to be formed as, when above-mentioned first workbench with And the workbench of the side in above-mentioned second workbench just carrying out outside above-mentioned irradiation area outlet move, And the workbench of the opposing party is just carrying out return road when moving, when the return road of the workbench of above-mentioned the opposing party is moved The position of readiness of the workbench by one side of above-mentioned irradiation area is compared in rearward end position on direction The end position of side and when being positioned at the position of readiness side of the workbench of above-mentioned the opposing party, above-mentioned control portion makes The workbench of one side moves until to above-mentioned end position with above-mentioned maximum translational speed.
Further, in above-mentioned light irradiation device, it is also possible to be formed as, when above-mentioned first workbench with And the workbench of the side in above-mentioned second workbench is just carried out the period that outlet is moved, above-mentioned control portion Forbid that the outlet of the workbench of the opposing party is moved.
Further, in above-mentioned light irradiation device, it is also possible to be formed as, when above-mentioned first workbench with And the workbench of the side in above-mentioned second workbench is just carried out the period that outlet is moved, above-mentioned control portion The workbench making above-mentioned the opposing party carries out outlet initially towards target stop position and moves, wherein, above-mentioned Target stop position is set in moving to move towards return road from outlet and cutting of the workbench relative to one side That changes turns back position and the position of the above-mentioned closest-approach distance in position of readiness side of workbench by the opposing party, When above-mentioned the opposing party workbench arrive above-mentioned target stop position time, when one side workbench just Carry out outlet when moving, proceed by till return road moves until the workbench of one side, above-mentioned control Portion processed makes the workbench of above-mentioned the opposing party stop at above-mentioned target stop position.
Further, in above-mentioned light irradiation device, it is also possible to be formed as, above-mentioned workbench spacing is The outlet of the front position on the outlet moving direction of above-mentioned first workbench and above-mentioned second workbench is moved Between front position on dynamic direction along the axial distance of above-mentioned carrying.
Further, in above-mentioned light irradiation device, it is also possible to be formed as, above-mentioned just polarised light.
Further, in above-mentioned light irradiation device, it is also possible to be formed as, to above-mentioned first workpiece and Above-mentioned second workpiece, moves in outlet and moves these both sides with return road and irradiate above-mentioned light.
Additionally, another mode of light irradiation device involved in the present invention is a kind of light irradiation device, Irradiate light to by the workpiece of irradiation area set in advance, wherein, possess: the first workbench, carry Put the first workpiece, and can will be set in above-mentioned photograph by the carrying axle of above-mentioned irradiation area Penetrate between the first position of readiness and the above-mentioned irradiation area of the side in region from above-mentioned first position of readiness court Movement to above-mentioned irradiation area is moved as outlet and is moved back and forth；Second workbench, mounting Second workpiece, and can will be set in the opposite side of above-mentioned irradiation area on the above-mentioned carrying axle From above-mentioned second position of readiness towards above-mentioned irradiation area between second position of readiness and above-mentioned irradiation area Movement move as outlet and move back and forth；And control portion, to above-mentioned first workbench with And the movement of above-mentioned second workbench is controlled independently, in order to above-mentioned first workpiece and above-mentioned second Workpiece alternately passes through above-mentioned irradiation area, when in above-mentioned first workbench and above-mentioned second workbench The workbench of a side just carry out the period that outlet is moved, above-mentioned control portion makes the work of above-mentioned the opposing party Platform carries out outlet initially towards target stop position and moves, and wherein, above-mentioned target stop position is set in Moving from outlet towards the turning back position of return road mobile handoff by another relative to the workbench of one side The position of the above-mentioned closest-approach distance in position of readiness side of the workbench of one side, when the work of above-mentioned the opposing party Platform arrive above-mentioned target stop position time, when the workbench of one side just carrying out outlet move time, directly Proceeding by return road moves to the workbench of one side, above-mentioned control portion makes above-mentioned the opposing party's Workbench stops at above-mentioned target stop position.
Additionally, light illuminating method involved in the present invention mode relates to by set in advance The workpiece of irradiation area irradiates the light illuminating method of light, wherein, to the first workbench and the second workbench It is controlled so that the first workpiece and second workpiece alternately pass through above-mentioned irradiation area independently, wherein, Above-mentioned first workbench loads above-mentioned first workpiece, and can be by the carrying axle of above-mentioned irradiation area On by from being set in first position of readiness of side of above-mentioned irradiation area towards the shifting of above-mentioned irradiation area Action is that outlet is moved and moved back and forth, and above-mentioned second workbench loads above-mentioned second workpiece, and Can by the carrying axle of above-mentioned irradiation area by from the opposite side being set in above-mentioned irradiation area Second position of readiness moves as outlet towards the movement of above-mentioned irradiation area and moves back and forth, this Time, it is controlled in the following manner: above-mentioned first workbench and above-mentioned second workbench are at above-mentioned photograph Moving with the first translational speed in penetrating region, the return road outside above-mentioned irradiation area is to move than above-mentioned first Dynamic speed the second translational speed at a high speed moves, and the outlet outside above-mentioned irradiation area, when between workbench Move with above-mentioned second translational speed when distance is longer than closest-approach distance set in advance, when above-mentioned work Move with above-mentioned first translational speed when platform spacing is below above-mentioned closest-approach distance, and with following Mode is controlled: in above-mentioned first workbench and above-mentioned second workbench, be in return road move Before the workbench of the side in the Dong period at least in above-mentioned irradiation area, the workbench of the opposing party Proceed by outlet to move.
So, use two workbench possessing mounting workpiece, and each workpiece is alternately irradiated light So-called double-workbench mode.Thus, in the period irradiating light towards the workbench of a side, it is possible to carry out another The workpiece replacing operation etc. of the workbench of one side.Therefore, compared with the situation of workbench only Can reduce and produce interval time, it is possible to increase productivity ratio.Further, owing to making to enter outside irradiation area The workbench that row outlet is moved is so that workbench spacing is not less than the translational speed of closest-approach distance Mobile, therefore, i.e. there are the feelings of translational speed difference in box lunch between the first workbench and the second workbench Under condition, it is also possible to so that interfering and photo-irradiation treatment can be carried out efficiently between workbench will not be there is Mode makes movable workbench.
Additionally, another mode of light illuminating method involved in the present invention relates to a kind of light illuminating method, Light is irradiated, wherein, to the first workbench and the second work to by the workpiece of irradiation area set in advance Station is controlled independently, in order to the first workpiece and second workpiece alternately pass through above-mentioned irradiation area, Wherein, above-mentioned first workbench loads above-mentioned first workpiece, and can be by above-mentioned irradiation area On carrying axle, by the first position of readiness and above-mentioned irradiated region in the side being set in above-mentioned irradiation area Move as outlet towards the movement of above-mentioned irradiation area from above-mentioned first position of readiness between territory and carry out Move back and forth, above-mentioned second workbench load above-mentioned second workpiece, and can on above-mentioned carrying axle, By be set between second position of readiness of opposite side of above-mentioned irradiation area and above-mentioned irradiation area from Above-mentioned second position of readiness moves as outlet towards the movement of above-mentioned irradiation area and back and forth moves Dynamic, now, it is controlled in the following manner: above-mentioned first workbench and above-mentioned second workbench exist Move, above-mentioned with the translational speed slower than maximum translational speed set in advance in above-mentioned irradiation area Return road outside irradiation area is moved with above-mentioned maximum translational speed, the outlet outside above-mentioned irradiation area, The translational speed being not less than closest-approach distance set in advance with workbench spacing moves, by above-mentioned One workbench and above-mentioned second workbench from respective position of readiness until arriving above-mentioned irradiation area The interval that the front interval till rotation permission position carries out moving in outlet is as carrying out above-mentioned rotation Spinning movement may be interval, independently controlled above-mentioned first workbench and above-mentioned second workbench around The rotation of the axle orthogonal relative to work top, makes the attitude of this workbench become attitude when light irradiates.
Additionally, another mode of light illuminating method involved in the present invention relates to a kind of light illuminating method, Light is irradiated, wherein, to the first workbench and the second work to by the workpiece of irradiation area set in advance Station is controlled independently, in order to the first workpiece and second workpiece alternately pass through above-mentioned irradiation area, Wherein, above-mentioned first workbench loads above-mentioned first workpiece, and can be by above-mentioned irradiation area On carrying axle, by the first position of readiness and above-mentioned irradiated region in the side being set in above-mentioned irradiation area Move as outlet towards the movement of above-mentioned irradiation area from above-mentioned first position of readiness between territory and carry out Move back and forth, above-mentioned second workbench load above-mentioned second workpiece, and can on above-mentioned carrying axle, By be set between second position of readiness of opposite side of above-mentioned irradiation area and above-mentioned irradiation area from Above-mentioned second position of readiness moves as outlet towards the movement of above-mentioned irradiation area and back and forth moves Dynamic, now, it is controlled in the following manner: above-mentioned first workbench and above-mentioned second workbench exist Move, above-mentioned with the translational speed slower than maximum translational speed set in advance in above-mentioned irradiation area Return road outside irradiation area is moved with above-mentioned maximum translational speed, the outlet outside above-mentioned irradiation area, The translational speed being not less than closest-approach distance set in advance with workbench spacing moves, when above-mentioned The workbench of the side in one workbench and above-mentioned second workbench is just carried out the period that outlet is moved, The workbench of above-mentioned the opposing party carries out outlet initially towards target stop position and moves, wherein, and above-mentioned mesh Mark stop position is set in moving towards return road mobile handoff from outlet of the workbench relative to one side Turn back position and the position of the above-mentioned closest-approach distance in position of readiness side of workbench by the opposing party, when When the workbench of above-mentioned the opposing party arrives above-mentioned target stop position, when the workbench of one side just enters When row outlet is moved, proceed by till return road moves until the workbench of one side, above-mentioned another The workbench of side stops at above-mentioned target stop position.
Invention effect
In the light irradiation device of the present invention, in double-workbench mode, it is possible to make to carry out outlet and move Workbench so that and workbench spacing between the workbench of the opposing party be not less than closest to away from From translational speed move.Therefore, i.e. there is shifting in box lunch between the first workbench and the second workbench In the case of dynamic speed difference, workbench the most also will not interfere with, it is possible to carries out photo-irradiation treatment efficiently.
Accompanying drawing explanation
Fig. 1 is the summary construction diagram of the polarized light illumination device illustrating present embodiment.
Fig. 2 is the figure that the moving section to each workbench illustrates.
Fig. 3 is the figure illustrating workbench spacing.
Fig. 4 is the figure illustrating workbench spacing.
Fig. 5 is to illustrate the flow chart that the speed of table of the first embodiment controls processing sequence.
Fig. 6 is the figure that the action to the first embodiment illustrates.
Fig. 7 is the figure that the action to the first embodiment illustrates.
Fig. 8 is the figure that the action to the first embodiment illustrates.
Fig. 9 is the figure that the action to the first embodiment illustrates.
Figure 10 is the figure that the action to the first embodiment illustrates.
Figure 11 is to illustrate the flow chart that the speed of table of the second embodiment controls processing sequence.
Figure 12 is the figure that the action to the second embodiment illustrates.
Figure 13 is the figure that the action to the second embodiment illustrates.
Figure 14 is the figure that the action to the second embodiment illustrates.
Figure 15 is the figure that the action to the 3rd embodiment illustrates.
Figure 16 is the figure that the action to the 3rd embodiment illustrates.
Label declaration
10A, 10B ... illumination part；11 ... discharge lamp；12 ... speculum；13 ... polarization unit；14… Lampshade；15 ... irradiation area；20 ... trucking department；21A ... the first workbench；21B ... the second workbench； 22 ... guiding piece；23A, 23B ... electromagnet；24A, 24B ... θ travel mechanism；30 ... control portion； 31 ... linear movement pick-up；100 ... polarized light illumination device.
Detailed description of the invention
Hereinafter, based on accompanying drawing, embodiments of the present invention are illustrated.
(the first embodiment)
Fig. 1 is the summary construction diagram of the polarized light illumination device illustrating present embodiment.
Polarized light illumination device 100 possesses removing of illumination part 10A and 10B and carrying workpiece W Fortune portion 20.Here, workpiece W is to be formed with optical alignment film, be such as shaped as the size of liquid crystal panel Rectangular-shaped substrate.
Polarized light illumination device 100 while irradiating the wavelength of regulation from illumination part 10A and 10B Polarised light (light of polarization) is while utilizing trucking department 20 to make workpiece W move linearly, to workpiece W's Optical alignment film irradiates above-mentioned polarised light and carries out light orientation process.
Illumination part 10A and 10B possesses respectively: the light source of wire i.e. lamp 11；And to lamp 11 Light carry out the speculum 12 that reflects.Further, illumination part 10A and 10B possesses respectively and is arranged in The polarization unit 13 of its light emitting side.Additionally, light injection part 10A and 10B possesses storage lamp respectively 11, the lampshade 14 of speculum 12 and polarization unit 13.
Illumination part 10A and illumination part 10B so that lamp 11 long side direction be orthogonal to workpiece The consistent state in the direction (Y-direction) in the carrying direction (X-direction) of W is along the carrying of workpiece W Direction (X-direction) is arranged side by side.
Hereinafter, the concrete structure of illumination part 10A and 10B is illustrated.
Lamp 11 is the lamp of strip, and its illuminating part has the side being orthogonal to carry direction with workpiece W To length corresponding to width.This lamp 11 for example, high-pressure mercury-vapor lamp or mercury be with the addition of other metals Metal halide lamp etc., radiation wavelength 200nm～400nm ultraviolet light.
As the material of optical alignment film, it is known to the material being orientated by the light of wavelength 254nm, by The material of the light orientation of wavelength 313nm, by the material etc. of the light orientation of wavelength 365nm, light source Kind suitably selects according to required wavelength.
Additionally, as light source, additionally it is possible to use by LED or LD of emitting ultraviolet light linearly The linear light source being arranged.In this case, the direction phase LED or LD being arranged When in the long side direction of lamp.
Speculum 12 by from lamp 11 radiating light towards regulation direction reflection, be its section be ellipse Shape or parabolic eaves gutter shape condenser.Speculum 12 is with the long limit of its long side direction Yu lamp 11 The consistent mode in direction configures.
Lampshade 14 have in its bottom surface for from lamp 11 radiating light and by speculum 12 reflect anti- Penetrate the light exit wound of bullet that light passes through.Polarization unit 13 is installed on the light exit wound of bullet of lampshade 14, makes by this The light polarization of light exit wound of bullet.
Polarization unit 13 has the knot being arranged by multiple polarizers along the long side direction of lamp 11 Structure.Above-mentioned multiple polarizer is such as supported by framework etc..
Polarizer e.g. wire grid type polarizer, the number of polarizer is according to the district of polarised light to be irradiated The size in territory suitably selects.Additionally, each polarizer is joined towards unidirectional mode with the axis of homology respectively Put.
Trucking department 20 possesses the first workbench 21A and the second workbench keeping workpiece W respectively 21B.Above-mentioned two workbench 21A, 21B are made by the method for vacuum suction etc. to be carried out workpiece W The flat workbench that absorption keeps.Additionally, in the present embodiment, by each workbench 21A, 21B and workpiece W is formed as rectangular-shaped, but is not limited to this, it is possible to be formed as arbitrary shape. And, however it is not limited to utilize the structure that the absorption of flat workbench keeps workpiece W, it is also possible to be profit The structure keeping workpiece W is adsorbed with multiple pins.
Further, trucking department 20 possesses: the moving direction along workbench 21A and 21B extends Article two, guiding piece 22；And constitute the travel mechanism of workbench 21A and 21B as an example Electromagnet 23A and 23B.Herein, as above-mentioned travel mechanism, for example with linear motor work Station.Linear motor workbench is following mechanism: checkerboard grid shape is being provided with ferromagnetic Salient pole plane platen on make moving body (workbench 21A, 21B) float by gas, right This moving body applies magnetic force, and makes the magnetic force change between moving body and the salient pole of platen, thus makes this Moving body moves.Additionally, as above-mentioned travel mechanism, also such as be able to employing and employ ball-screw Mechanism.
So, workbench 21A and 21B is configured to along shared carrying axle i.e. guiding piece 22 Move back and forth.
Workbench 21A and 21B is made to be able to along θ direction (around Z additionally, trucking department 20 possesses Axle) θ travel mechanism 24A and 24B that rotate.That is, workbench 21A and 21B is respectively with energy Enough modes rotated along θ direction are arranged on fixed pedestal 25A and 25B, and its anglec of rotation by θ travel mechanism 24A and 24B adjusts.
The mobile route of workbench 21A and 21B is designed by illumination part 10A and 10B Underface.Trucking department 20 is configured to irradiate partially workpiece W towards by illumination part 10A and 10B Shake the irradiation area carrying of light, and be passed to this irradiation area.Additionally, trucking department 20 is configured to Workpiece W is completely by making this workpiece W turn back after irradiation area and making it again by this irradiation area. Moving in this outlet and move this both sides with return road, the optical alignment film of workpiece W is carried out light orientation process.
Fig. 2 is the figure that the moving section to workbench 21A and 21B illustrates.
First workbench 21A can take at the workpiece of the side from the irradiation area 15 being set in polarised light Carry position i.e. substrate loading position (the first position of readiness) P11 until being set in the another of irradiation area 15 Interval till the position P12 that turns back of side moves back and forth.Further, the second workbench 21B can be From clipping the Work mounting position i.e. base that irradiation area 15 is set in the opposition side of substrate loading position P11 Plate loading position (the second position of readiness) P21 is set in, until clipping irradiation area 15, the position P12 that turns back Opposition side the position P22 that turns back till interval move back and forth.
Here, for the first workbench 21A, will be from substrate loading position P11 towards the position P12 that turns back Movement referred to as outlet move.Equally, for the second workbench, also will be from substrate loading position P21 Move towards the movement referred to as outlet of the position P22 that turns back.Further, substrate loading position is by mounting The replacing operation of the substrate (workpiece W) on workbench and the position of alignment operation, position of turning back Between the substrate loading position of the workbench being set in irradiation area 15 and the opposing party, workbench from The switching position that outlet mobile handoff to return road is moved.
Such as, X-direction distance L1 of the moving section (P11～P12) of the first workbench 21A with X-direction distance L2 of the moving section (P21～P22) of the second workbench 21B is set at essentially phase Deng.Further, between the substrate loading position and irradiation area 15 of the first workbench 21A, guarantee have i.e. Just the second workbench 21B becomes any attitude also be able to pass through irradiated region because of the in rotary moving of θ direction The space more than amount in territory 15.Equally, at substrate loading position and the irradiated region of the second workbench 21B Even if guaranteeing have the first workbench 21A to become any attitude because of the in rotary moving of θ direction between territory 15 It also is able to the space of more than the amount by irradiation area 15.
The elemental motion of each workbench 21A and 21B is as follows.
First workbench 21A carries out replacing operation and the alignment of workpiece W at substrate loading position P11 Operation, after alignment terminates, carries out in rotary moving by θ travel mechanism 24A.Thus, workpiece is made The direction of W becomes the direction of regulation relative to the polarizing axis of polarised light.
Subsequently, the first workbench 21A carries out outlet initially towards irradiation area 15 and moves.And, if Arrived the position P12 that turns back by irradiation area 15, then proceeding by return road moves, and is back to substrate Loading position P11.At this substrate loading position P11, again carry out workpiece W replacing operation and Alignment operation, after alignment terminates, the first workbench 21A starts again at and carries out towards irradiation area 15 Outlet is moved.This action is repeated.
Second workbench 21B too, carries out the replacing operation of workpiece W at substrate loading position P21 And alignment operation, after alignment terminates, carry out in rotary moving then opening by θ travel mechanism 24B Begin to carry out outlet towards irradiation area 15 to move.The anglec of rotation of the second workbench 21B now is sometimes Different from the anglec of rotation of the first workbench 21A.And, if the second workbench 21B passes through irradiated region Territory 15 arrives the position P22 that turns back and then proceeds by return road and move, and is back to substrate loading position P21. This action is repeated.
Further, for each workbench 21A and 21B, as usual action, from substrate loading position Return towards substrate loading position in moving towards the outlet of irradiation area 15 and from irradiation area 15 Return road move in translational speed be set to the first higher translational speed of speed (maximum mobile speed Degree) V1, region in addition (in irradiation area 15 and irradiation area 15 with turn back position it Between) translational speed be set to the second translational speed V2 than the first translational speed V1 low speed.
The travel mechanism i.e. each several part of trucking department 20 (with reference to Fig. 1) of workbench is carried out by control portion 30 Control to realize above-mentioned stage motion.Now, control portion 30 from carrying axle configured in parallel Linear movement pick-up 31 obtains the positional information of each workbench 21A and 21B, according to acquired The velocity information of positional information calculation each workbench 21A and 21B.And, control portion 30 based on Acquired positional information and the velocity information calculated, calculate each workbench 21A's and 21B Target shift position and target translational speed, and it is exported towards each several part of trucking department 20.
Further, the translational speed of each workbench 21A and 21B is controlled by control portion 30, with Box lunch the first workbench 21A and the second workbench 21B as described above on shared carrying axle repeatedly The period both moved back and forth will not interfere with.
Specifically, the workbench a side is carried out the period that outlet is moved, and only allows the work of the opposing party The return road of station is moved and is forbidden that outlet is moved.Further, to the movement carrying out the workbench that outlet is moved Speed is controlled, in order to the workbench a side carries out that return road is moved, the workbench of the opposing party is shining Penetrating and carry out the period that outlet is moved outside region, the workbench spacing (La described later) in X-direction is no Closest-approach distance set in advance (L0 described later) can be compared and closer to.
Here, closest-approach distance L0 is the distance more than needed of following degree: even if assuming the work of movement in advance In the case of station emergent stopping, it is also possible to make follow-up workbench with not interfering between workbench Stop.This closest-approach distance L0 such as can set based on maximum translational speed that is first translational speed V1 Fixed.
Each workbench 21A and 21B is configured as described above for can rotate along θ direction.Therefore, on State workbench spacing La be set to as shown in Figure 3 the first workbench 21A direction, outlet (Fig. 3's Right direction) on foremost position P13 and the (left of Fig. 3, direction, outlet of the second workbench 21B To) on foremost position P23 between distance in X direction.
Further, each workbench 21A and 21B can the anglec of rotation in independently controlled θ direction, as Shown in Fig. 4, there is the situation that the direction of rotation of the first workbench 21A and the second workbench 21B is different. Even if in this case, also by foremost position P14 in the direction, outlet of the first workbench 21A with Distance between foremost position P24 in the direction, outlet of the second workbench 21B is set to above-mentioned workbench Spacing La.
Fig. 5 is to illustrate the flow chart that the speed of table performed by control portion 30 controls processing sequence.Should Process shown in Fig. 5 is control portion 30 in the feelings being controlled the translational speed of the first workbench 21A The process performed under condition.Additionally, about the place that the translational speed of the second workbench 21B is controlled Reason, as long as replacing with " the second workbench ", by " second by " the first workbench " in following description Workbench " replace with " the first workbench ", the most in this description will be omitted.
First, in step sl, control portion 30 judges whether the first workbench 21A is in return road and moves In Dong.Here, control portion 30 judges the first workbench according to the positional information of the first workbench 21A The position of 21A and moving direction, it is determined that whether the first workbench 21A is in during return road moves.
And, when being judged to that in this step S1 the first workbench 21A is in the feelings during return road is moved Under condition, transit to step S2.On the other hand, when being judged to that the first workbench 21A is not in return road In movement, i.e. it is in during outlet is moved or is in the feelings during substrate loading position stops Under condition, transit to step S3.
In step s 2, control portion 30 is so that the first workbench 21A carries out the mode of usual action Set target translational speed, and it is exported towards the travel mechanism of the first workbench 21A.That is, One workbench 21A is in during the outlet towards irradiation area 15 is moved or from irradiation area 15 court Substrate loading position return return road move in the case of, target translational speed is set as the first shifting Dynamic speed V1, in the case of being in region in addition, is set as second by target translational speed Translational speed V2.And, by set target translational speed towards the moving machine of the first workbench 21A Structure exports.
In step s3, control portion 30 judges whether the second workbench 21B is in during outlet moves. Here, control portion 30 judges the second workbench 21B's according to the positional information of the second workbench 21B Moving direction, it is determined that the second workbench 21B is the most just carrying out outlet and moving.And, when being judged to Two workbench 21B are just carrying out in the case of outlet moves, transitting to step S4, when being judged to the second work Station 21B is just carrying out in the case of return road moves, transitting to step S5.
In step s 4, control portion 30 makes the first workbench 21A standby at substrate loading position.That is, The target translational speed of the first workbench 21 is set as 0 to make the first workbench 21A by control portion 30 Stop, and it is exported towards the travel mechanism of the first workbench 21A, then transit to step described later S9。
In step s 5, control portion 30 judges whether at least some of of the first workbench 21A exists In irradiation area 15.And, when the first workbench 21A is present in the situation in irradiation area 15 Under transit to step S2, when be present in irradiation area 15 outer in the case of transit to step S6.
In step s 6, control portion 30 judges between the first workbench 21A and the second workbench 21B Workbench spacing La longer than closest-approach distance L0.Here, workbench spacing La is as above Foremost position on the described direction, outlet being the first workbench 21A is gone with the second workbench 21B's Distance in X direction between foremost position on direction, road.On the direction, outlet of each workbench Foremost position is by position based on workbench, bed dimension and the anglec of rotation of workbench Calculate and obtain.
And, in the case of workbench spacing La is longer than closest-approach distance L0, it is judged that for making One workbench 21A carries out usual action and transits to step S2, when workbench spacing La reaches Step S7 is transitted in the case of proximity distance L0.
In the step s 7, control portion 30 calculates until the first workbench 21A arrives irradiation area 15 Till distance (irradiation area arrive in distance Lb), and to this irradiation area arrival distance Lb with connect most Closely L0 compares.Here, irradiation area arrives distance Lb is from the first work as shown in Figure 6 Foremost position on the direction, outlet of station 21A to irradiation area 15 by the first workbench 21A Substrate loading position side end position till distance.Distance Lb is arrived for this irradiation area, Entrance (the left end of Fig. 6 of irradiation area 15 is compared when the foremost position of the first workbench 21A is positioned at Position, portion) when moving back the position of side (left side of Fig. 6) rearward, it is set to Lb ＞ 0, when the first workbench The foremost position of 21A is positioned at the entrance comparing irradiation area 15 by advance side (right side of Fig. 6) During position, it is set to Lb=0.
And, transit to step S8 when irradiation area arrives when distance Lb is more than closest-approach distance L0, Step S2 is transitted in short-term than closest-approach distance L0 when irradiation area arrives distance Lb.
In step s 8, the target translational speed of the first workbench 21A is set as by control portion 30 The translational speed of two workbench 21B, in order to make the first workbench 21A follow the second workbench 21B, And it is exported towards the travel mechanism of the first workbench 21A.
In step s 9, control portion 30 determines whether that the driving terminating the first workbench 21A controls, Step S1 is returned, in the case of being judged to finishing control in the case of being judged to proceed to control Power cut-off platform speeds control processes.
Hereinafter, with reference to Fig. 6～Figure 10, the action of present embodiment is described in detail.
In polarized light illumination device 100, as shown in Figure 6, make the first workbench 21A at substrate Under the state that loading position P11 stops, carrying out the replacing operation of substrate on the first workbench 21A with And the alignment operation of this substrate.And, when being directed at the end of job, become beginning the first workbench 21A The state (being no in step S1 of Fig. 5) being ready to complete that moves of outlet.
Now, as shown in Figure 6, (step in the case of outlet is moved just is being carried out as the second workbench 21B Rapid S3 is yes), the first workbench 21A does not start outlet and moves, but at substrate loading position Standby (step S4).Afterwards, turn back position if the second workbench 21B arrives and start return road and move, Then the first workbench 21A proceeds by outlet and moves.That is, the first workbench 21A and the second workbench 21B proceeds by the Timing Synchronization moved in return road and proceeds by outlet and move.
On the other hand, the state being ready to complete moved when the outlet becoming beginning the first workbench 21A Time, when the second workbench 21B proceeds by (being no in step S3) in the case of return road is moved, the One workbench 21A proceeds by outlet with keeping intact and moves.
Proceed by the translational speed of the first workbench 21A when this outlet is moved based on workbench spacing Arrive distance Lb from La and irradiation area to determine.Such as, as it is shown in fig. 7, work as workbench spacing (being yes in step S6), the first work in the case of La is longer than closest-approach distance L0 set in advance Station 21A carries out usual action (step S2).That is, the first workbench 21A is with than the of higher speed One translational speed V1 proceeds by outlet and moves.
Second workbench 21B in return road until completely by till irradiation area 15, to compare low speed The second translational speed V2 move.Therefore, if the first workbench 21A is with the first translational speed V1 Proceed by outlet to move, then the first workbench 21A gradually catch up with the second workbench 21B.
And, as shown in Figure 8, if the second workbench 21B rearward end (direction, outlet before End position) enter in irradiation area 15 before, workbench spacing La reaches closest-approach distance L0 (step Rapid S6 is no, step S7 is yes), then the translational speed of the first workbench 21A is decelerated to the Two translational speeds V2 (step S8).Thus, the first workbench 21A is by workbench spacing La The second workbench 21B is followed under the state remaining closest-approach distance L0.
Afterwards, if as it is shown in figure 9, the rearward end of the second workbench 21B (direction, outlet is foremost Position) enter in irradiation area 15, irradiation area arrives distance Lb and becomes ratio closest-approach distance L0 Short (step S7 being no), then the action of the first workbench 21A following from the second workbench 21B Action switches to usual action (step S2).That is, the translational speed of the first workbench 21A accelerate with Becoming is the first translational speed V1.
Now, due to the second workbench 21B just in irradiation area 15 with relatively low second the moving of speed Speed V2 moves, and therefore switches to usual action by the first workbench 21A and both are close, work Station spacing La becomes shorter than closest-approach distance L0 as shown in Figure 10.
But, if the first workbench 21A arrives irradiation area 15 (being yes in step S5), then make shifting Dynamic speed reduction is to the second translational speed V2 (step S2).Therefore, the first workbench 21A and second Workbench 21B all moves with the second translational speed V2, and both interference will not occur.
Afterwards, if the second workbench 21B is completely by irradiation area 15, the first translational speed is accelerated to V1 and towards substrate loading position return.Now, the first workbench 21A continues with the second translational speed V2 moves in irradiation area 15.If arriving position of turning back after the first workbench 21A, transit to Return road is moved, in return road, till returning substrate loading position, with the second workbench 21B's Position is unrelated and carries out usual action.
So, the so-called double-workbench mode that the polarized light illumination device employing of present embodiment is following: Possesses two workpiece workbench (the first workbench 21A and that can move back and forth in same axis Two workbench 21B), and the substrate (workpiece W) on this workpiece workbench is alternately irradiated polarised light. Thus, in the irradiation of the polarised light of the workbench towards a side, it is possible to carry out the workbench of the opposing party Operation changed by substrate.Therefore, compared with the situation of workpiece workbench only, it is possible to reduce raw Produce interval time, it is possible to increase productivity ratio.
Further, when the workbench of a side is just carried out the period that outlet is moved, the workbench of the opposing party is forbidden Start outlet to move, arrive with the workbench of a side and turn back position and proceed by the timing that return road is moved The outlet of the workbench synchronously starting the opposing party is moved, therefore, it is possible to avoid two workbench all to enter The situation that row outlet is moved, it is possible to reliably avoid workbench interference each other.Further, due to can The outlet moving the workbench that consecutive mode starts the opposing party with the return road with the workbench of a side is moved Dynamic, produce interval time therefore, it is possible to shorten further.
And, now, it is considered to attend the meeting and exist between the first workbench 21A and the second workbench 21B Translational speed is poor, according to just carry out the position of the workbench that return road is moved, translational speed and to according to Penetrate and carry out the translational speed of the workbench that outlet is moved outside region 15 and be controlled.That is, when between workbench When distance La is longer than closest-approach distance L0 set in advance, so that just carrying out the work that outlet is moved Platform is controlled, when between workbench in the way of the first translational speed (maximum translational speed) V1 moves When distance La is below closest-approach distance L0, so that just carrying out the workbench that moves in outlet and just entering The workbench that row return road is moved is controlled in the way of identical translational speed moves.
Thus, proceed by the workbench moved in outlet until workbench spacing La reach closest to away from Move, if catching up with just at irradiation area with the first translational speed V1 of the highest speed till L0 The workbench that moves in return road is carried out and workbench in 15 with the second translational speed V2 than relatively low speed Spacing La becomes closest-approach distance L0, then translational speed switches to the second translational speed V2 and goes forward side by side Row is mobile.And, afterwards, workbench spacing La is maintained by the workbench just carrying out moving in outlet Closest-approach distance L0 and follow and just carry out the workbench that return road is moved.So, proceed by outlet to move Workbench can be so that workbench spacing La be not less than the mode of closest-approach distance L0 at a high speed Follow and just carry out the workbench that return road is moved.Therefore, the workbench that moves in return road is just being carried out just By after irradiation area, (according to closest-approach distance L0, the workbench just carrying out moving in return road passes through The when of irradiation area), it is possible to make the workbench just carrying out moving in outlet enter irradiation area.Therefore, Workbench will not interfere with each other, it is possible to carries out light orientation process efficiently.
Further, due to by the front position on the outlet moving direction of the first workbench 21A and the second work The distance between front position on the outlet moving direction of station 21B is set to workbench spacing La, Therefore, even if carrying out in rotary moving in θ direction respectively like that as shown in Figure 3 or Figure 4 at each workbench In the case of, it is also possible to suitably avoid workbench interference each other.And, now, due to based on The position of workbench, size, the anglec of rotation in θ direction calculate on the outlet moving direction of this workbench Front position, therefore, it is possible to be appropriately calculated workbench spacing La.
(the second embodiment)
It follows that second embodiment of the present invention is illustrated.
In the first above-mentioned embodiment, the workbench a side is just carried out the period that outlet is moved, Forbid that the outlet proceeding by the workbench of the opposing party is moved, on the other hand, at this second embodiment In, it is allowed to the outlet of the workbench proceeding by this opposing party is moved.
Figure 11 is that the speed of table control performed by control portion 30 illustrating the second embodiment processes The flow chart of order.Processing except step S4 of above-mentioned Fig. 5 is replaced with step shown in this Figure 11 The process as Fig. 5 is all carried out outside rapid S11.Therefore, to the process carried out as Fig. 5 Part marks identical number of steps, illustrates centered by the different piece processed at this.
In step s 11, first control portion 30 sets the target stop position of the first workbench 21A. Target stop position is the position P22 base towards the first workbench 21A of turning back from the second workbench 21B The position of predetermined distance (such as closest-approach distance L0) is left in plate loading position side.
It follows that whether the position that control portion 30 judges the first workbench 21A compares target stop position Substrate loading position side by this first workbench 21A.And, when being judged to that comparing target stops position In the case of resting against substrate loading position side, the first workbench 21A is made to move towards target stop position. Translational speed now is set to the first translational speed V1.On the other hand, arrive as the first workbench 21A In the case of target stop position, the first workbench 21A is made to stop at target stop position.
I.e., in the present embodiment, as shown in figure 12, the most convenient second workbench 21B just goes In the case of road is moved, if the first workbench 21A completes registration process at substrate loading position, then Outlet can be proceeded by with the first translational speed V1 to move.But, the first workbench 21A now Outlet move license interval be set to until leaving from the position P22 that turns back of the second workbench 21B Interval till the target stop position P15 of distance L0.
And, before the first workbench 21A arrives target stop position P15, if the second workbench 21B Proceed by return road to move, then carry out the action as the first above-mentioned embodiment.On the other hand, As shown in figure 13, even if when the first workbench 21A arrives target stop position P15 the second workbench 21B is the most just carrying out in the case of outlet moves, and the first workbench 21A stops at target stop position P15 Stop, and standby until the second workbench 21B proceeds by return road and moves.
Afterwards, as shown in figure 14, turn back position P22 if the second workbench 21B arrives and proceed by Return road is moved (being no in step S3), then the first workbench 21A starts to follow the second workbench 21B (step S6 being no, step S8 is yes).That is, the first workbench 21A is to work with second Translational speed (the second translational speed V2) identical for platform 21B starts mobile.Following action is with above-mentioned The first embodiment identical.
So, in the present embodiment, the workbench of the most convenient side is just carrying out the situation that outlet is moved Under, it is also possible to the outlet of the workbench proceeding by the opposing party is moved.Therefore, it is possible to more efficiently enter The hand-manipulating of needle light orientation process to two workpiece W.Particularly move in the first translational speed V1 and second In the case of speed difference between speed V2 is smaller, substrate loading position sets relative to irradiation area In the case of distant position etc., the workbench of the opposing party is hit in the illumination at the workbench of a side Start the way that moves of outlet, hit the workbench of the opposing party in this illumination and be difficult to catch up with the work of a side It is effective in the case of platform.
Further, when the workbench of a side is just carrying out in the case of outlet moves, by the workbench of the opposing party Outlet move license interval and be set to until from the position of turning back of the workbench of the opposing party towards one side Till the position of predetermined distance is left in the substrate loading position side of workbench.Therefore, it is possible to reliably prevent Only and just carry out the interference between the workbench of the opposing party that outlet is moved.
(the 3rd embodiment)
It follows that third embodiment of the present invention is illustrated.
In the above-mentioned first and second embodiment, it is operated the θ of platform at substrate loading position The spinning movement in direction, proceeds by outlet after this spinning movement terminates and moves, on the other hand, and should 3rd embodiment is formed as carrying out θ spinning movement while carrying out outlet and moving.
In the present embodiment, the first workbench 21A and the θ spinning movement of the second workbench 21B In entering the outlet before irradiation area 15 and moving and be able to ensure that more than closest-approach distance L0 The position of workbench spacing La is implemented.Additionally, time required for θ spinning movement than workbench from Substrate loading position moves to the time needed for irradiation area 15 short.
Such as, if finishing to carry towards the substrate of the first workbench 21A at substrate loading position, then should First workbench 21A carries out θ spinning movement while proceeding by outlet and moving.Now, such as figure Shown in 15, in the case of the second workbench 21B is in during outlet is moved, from substrate loading position to Interval till target stop position P15 becomes θ spinning movement may be interval.Here, target stops Position P15 is that the position P22 that turns back from the second workbench 21B takes towards the substrate of the first workbench 21A Carry side, position and leave the position of predetermined distance (such as, closest-approach distance L0).
Before arriving, at the second workbench 21B, the position P22 that turns back, the first workbench 21A arrival target is stopped In the case of stop bit puts P15, the first workbench 21A stops at target stop position P15 and carries out θ Spinning movement.
Here, whether the first workbench 21A arrives target stop position P15 according to the first workbench 21A Summit rotated by θ and whether arrive target stop position closest to the position of the second workbench 21B P15 judges.That is, target is arrived when the leading section, direction, outlet of the circle shown in the double dot dash line of Figure 15 During stop position P15, it is judged that be that the first workbench 21A arrives target stop position P15.
On the other hand, when the first workbench 21A substrate carry terminate and proceed by outlet move time, In the case of the second workbench 21B is in during return road is moved, as shown in figure 16, until from the second work The back-end location (foremost position in direction, outlet) of station 21B is towards the substrate of the first workbench 21A Interval till the position of closest-approach distance L0 is left in loading position side becomes the first workbench 21A's θ spinning movement may be interval.
In this case, the first workbench 21A is until workbench spacing La becomes closest-approach distance While carrying out outlet with common translational speed that is first translational speed V1 and moving while carrying out till L0 θ spinning movement.And, if workbench spacing La becomes closest-approach distance L0, then with Second the second identical for workbench 21B translational speed V2 is entered when remaining closest to distance L0 Row outlet is moved while carrying out θ spinning movement.Herein, the zequin of workbench spacing La is with upper State is that the summit of the first workbench 21A is rotated by θ and closest to the position of the second workbench 21B equally Put.
Action after the θ spinning movement of the first workbench 21A terminates is real with above-mentioned first and second Execute form same.
So, in the present embodiment, move carry out θ spinning movement owing to carrying out outlet, Interval time is produced therefore, it is possible to shorten further.Further, it is possible to will not be close to extremely at two workbench Position less than closest-approach distance L0 carries out θ spinning movement, therefore, it is possible to be reliably prevented at workbench Between interfere.
(variation)
In the respective embodiments described above, following situation is illustrated: when the workbench of a side just enters Row outlet is moved, the workbench of the opposing party is just carrying out return road when moving, and the workbench a side catch up with separately After the workbench of one side and workbench spacing La reach closest-approach distance L0, make the workbench of a side Follow the workbench (making it move) of the opposing party with the speed identical with the workbench of the opposing party, but, It is not limited to this.For example, it is also possible to move it in the outlet of the workbench just proceeding by a side It is the most just made to follow the workbench of the opposing party.Thus, according to the movement of the workbench of leading the opposing party Speed and the translational speed of the workbench of a side is controlled, the workbench of the most convenient above-mentioned the opposing party Translational speed according to the difference of moving section and in the case of difference, it is also possible to be reliably prevented in work Interfere between station.But, with produce interval time shorten to purpose further in the case of, Preferably as above-mentioned each embodiment, until workbench spacing La becomes closest-approach distance L0 Till, make follow-up workbench mobile with maximum translational speed (the first translational speed V1).
Further, in the respective embodiments described above, to the workbench that workbench spacing La is set to a side Direction, outlet on foremost position and the opposing party workbench direction, outlet on foremost position Between the situation of distance be illustrated, but the size ratio of workpiece W (substrate) on the table In the case of bed dimension is big, workbench spacing La becomes workpiece spacing.In this case, Using the foremost position on the direction, outlet of workpiece W as the calculating basic point of workpiece spacing.
Additionally, in the respective embodiments described above, it is also possible to workbench spacing La is set to the work of a side Between limit on the direction, outlet of station and the limit on the direction, outlet of the workbench of the opposing party along X side To distance (distance of the most immediate part).
Further, in the respective embodiments described above, to using the measurement knot measured by linear movement pick-up The situation of the position and translational speed that really obtain each workbench is illustrated, but it is also possible to The component beyond linear movement pick-up is used to obtain position and the translational speed of each workbench.
Additionally, in the respective embodiments described above, to the feelings applying the present invention to polarized light illumination device Condition is illustrated, but is not limited to this.Such as, as long as the light with following structure irradiates Device, it becomes possible to obtain the effect as the respective embodiments described above by the application present invention: two Workbench has the structure that can move back and forth along same axis, and by two workbench respectively from clipping The position of readiness that light irradiation area is set in same axis is alternately carried towards light irradiation area.As this , such as, there is DI (direct image: directly draw) exposure device, utilize ultraviolet in the light irradiation device of sample Line carries out the ultraviolet lamp etc. of heat cure process.

Claims (24)

1. a light irradiation device, irradiates light to by the workpiece of irradiation area set in advance, and it is special Levy and be, possess:
First workbench, loads the first workpiece, and can be by the carrying axle of above-mentioned irradiation area By from being set in first position of readiness of side of above-mentioned irradiation area towards the movement of above-mentioned irradiation area Move as outlet and move back and forth；
Second workbench, loads second workpiece, and can be by the carrying axle of above-mentioned irradiation area By from being set in second position of readiness of opposite side of above-mentioned irradiation area towards the shifting of above-mentioned irradiation area Action is that outlet is moved and moved back and forth；And
Control portion, the movement to above-mentioned first workbench and above-mentioned second workbench is controlled independently System, in order to above-mentioned first workpiece and above-mentioned second workpiece alternately pass through above-mentioned irradiation area,
Above-mentioned control portion is controlled in the following manner: above-mentioned first workbench and above-mentioned second work Platform moves with the first translational speed in above-mentioned irradiation area, the return road outside above-mentioned irradiation area with than Above-mentioned first translational speed the second translational speed at a high speed moves, the outlet outside above-mentioned irradiation area, Move with above-mentioned second translational speed when workbench spacing is longer than closest-approach distance set in advance, Move with above-mentioned first translational speed when above-mentioned workbench spacing is below above-mentioned closest-approach distance,
And it is controlled in the following manner: in above-mentioned first workbench and above-mentioned second workbench , be in return road and move in period at least in above-mentioned irradiation area of the workbench of a side before, The workbench of the opposing party proceeds by outlet and moves.
Light irradiation device the most according to claim 1, it is characterised in that
When the workbench of the side in above-mentioned first workbench and above-mentioned second workbench is in above-mentioned irradiation Just carrying out outlet outside region to move and the workbench of the opposing party is just carrying out return road when moving, above-mentioned control Portion makes the workbench of one side follow the workbench of above-mentioned the opposing party and move.
Light irradiation device the most according to claim 1 and 2, it is characterised in that
Above-mentioned control portion is controlled in the following manner:
When the workbench of the side in above-mentioned first workbench and above-mentioned second workbench is in above-mentioned irradiation Just carrying out outlet outside region to move and the workbench of the opposing party is just carrying out return road when moving,
When above-mentioned irradiation is compared in the rearward end position on the return road moving direction of the workbench of above-mentioned the opposing party The end position of the position of readiness side of the workbench by one side in region and be positioned at above-mentioned the opposing party's During the position of readiness side of workbench, the workbench of one side is made to move directly with above-mentioned second translational speed To above-mentioned end position.
4. according to the light irradiation device according to any one of claims 1 to 3, it is characterised in that
When the workbench of the side in above-mentioned first workbench and above-mentioned second workbench is just carrying out outlet The period of movement, above-mentioned control portion forbids that the outlet of the workbench of the opposing party is moved.
5. according to the light irradiation device according to any one of claims 1 to 3, it is characterised in that
When the workbench of the side in above-mentioned first workbench and above-mentioned second workbench is just carrying out outlet The period of movement, above-mentioned control portion makes the workbench of above-mentioned the opposing party enter initially towards target stop position Row outlet is moved, and wherein, above-mentioned target stop position is set in the workbench relative to one side The position of readiness side of workbench by the opposing party is moved towards the turning back position of return road mobile handoff from outlet The position of above-mentioned closest-approach distance,
When the workbench of above-mentioned the opposing party arrives above-mentioned target stop position, when the work of one side Platform is just carrying out outlet when moving, and proceeds by till return road moves until the workbench of one side, on Stating control portion makes the workbench of above-mentioned the opposing party stop at above-mentioned target stop position.
6. according to the light irradiation device according to any one of Claims 1 to 5, it is characterised in that
Be also equipped with rotation control unit, independently controlled above-mentioned first workbench of this rotation control unit and on State the rotation around the axle orthogonal relative to work top of second workbench, make the attitude of this workbench become Attitude when light irradiates,
When above-mentioned first workbench and above-mentioned second workbench from respective position of readiness until arriving The interval till allowing position that rotates before above-mentioned irradiation area is just carried out the period that outlet is moved, above-mentioned Above-mentioned rotation is controlled by rotation control unit.
Light irradiation device the most according to claim 6, it is characterised in that
Move when the workbench of the non-rotating control object controlled by above-mentioned rotation control unit is just carrying out outlet Time, above-mentioned rotation allows position to be set in compare the workbench of this non-rotating control object and move from outlet Towards the turning back position of return road mobile handoff by rotate the position of readiness side of control object above-mentioned closest to away from From position,
When the workbench of above-mentioned non-rotating control object just carrying out return road move time, above-mentioned rotation allow position Install position the treating by above-mentioned rotation control object due to the workbench comparing this non-rotating control object The position of the above-mentioned closest-approach distance in side is put in seat in the plane.
8. according to the light irradiation device according to any one of claim 1～7, it is characterised in that
Above-mentioned workbench spacing be front position on the outlet moving direction of above-mentioned first workbench with Axial along above-mentioned carrying between front position on the outlet moving direction of above-mentioned second workbench Distance.
9. according to the light irradiation device according to any one of claim 1～8, it is characterised in that
Above-mentioned just polarised light.
10. according to the light irradiation device according to any one of claim 1～9, it is characterised in that
To above-mentioned first workpiece and above-mentioned second workpiece, move in outlet and move these both sides photograph with return road Penetrate above-mentioned light.
11. 1 kinds of light irradiation devices, irradiate light to by the workpiece of irradiation area set in advance, its It is characterised by possessing:
First workbench, loads the first workpiece, and can by the carrying axle of above-mentioned irradiation area, By be set between first position of readiness of side of above-mentioned irradiation area and above-mentioned irradiation area from State the first position of readiness to move as outlet towards the movement of above-mentioned irradiation area and move back and forth；
Second workbench, loads second workpiece, and can be on above-mentioned carrying axle, will be on being set in State between the second position of readiness and the above-mentioned irradiation area of the opposite side of irradiation area from above-mentioned second standby The movement being positioned against above-mentioned irradiation area is moved as outlet and is moved back and forth；And
Control portion, the movement to above-mentioned first workbench and above-mentioned second workbench is controlled independently System, in order to above-mentioned first workpiece and above-mentioned second workpiece alternately pass through above-mentioned irradiation area；And
Rotation control unit, independently controlled above-mentioned first workbench and above-mentioned second workbench are around relatively In the rotation of the orthogonal axle of work top, the attitude of this workbench is made to become attitude when light irradiates,
Above-mentioned control portion is controlled in the following manner: above-mentioned first workbench and above-mentioned second work Platform moves with the translational speed slower than maximum translational speed set in advance in above-mentioned irradiation area, Return road outside above-mentioned irradiation area is moved with above-mentioned maximum translational speed, going outside above-mentioned irradiation area Road, the translational speed being not less than closest-approach distance set in advance with workbench spacing moves,
Above-mentioned first workbench and above-mentioned second workbench are being treated by above-mentioned rotation control unit from respective Seat in the plane is put rotating before arriving above-mentioned irradiation area and is allowed the interval till position to carry out outlet to move Interval be set to carry out the spinning movement of above-mentioned rotation may be interval.
12. light irradiation devices according to claim 11, it is characterised in that
Move when the workbench of the non-rotating control object controlled by above-mentioned rotation control unit is just carrying out outlet Time, above-mentioned rotation allows position to be set in compare the workbench of this non-rotating control object and move from outlet Towards the turning back position of return road mobile handoff by rotate the position of readiness side of control object above-mentioned closest to away from From position,
When the workbench of above-mentioned non-rotating control object just carrying out return road move time, above-mentioned rotation allow position Install position the treating by above-mentioned rotation control object due to the workbench comparing this non-rotating control object The position of the above-mentioned closest-approach distance in side is put in seat in the plane.
13. according to the light irradiation device described in claim 11 or 12, it is characterised in that
When the workbench of the side in above-mentioned first workbench and above-mentioned second workbench is in above-mentioned irradiation Just carrying out outlet outside region to move and the workbench of the opposing party is just carrying out return road when moving,
When above-mentioned workbench spacing is longer than above-mentioned closest-approach distance, above-mentioned control portion makes one side Workbench move with above-mentioned maximum translational speed, when above-mentioned workbench spacing be above-mentioned closest to away from When following, above-mentioned control portion makes the workbench movement with the workbench of above-mentioned the opposing party of one side Speed moves.
14. according to the light irradiation device described in claim 11 or 12, it is characterised in that
When the workbench of the side in above-mentioned first workbench and above-mentioned second workbench is in above-mentioned irradiation Just carrying out outlet outside region to move and the workbench of the opposing party is just carrying out return road when moving, above-mentioned control Portion makes the workbench of one side follow the workbench of above-mentioned the opposing party and move.
15. according to the light irradiation device according to any one of claim 11～14, it is characterised in that
When the workbench of the side in above-mentioned first workbench and above-mentioned second workbench is in above-mentioned irradiation Just carrying out outlet outside region to move and the workbench of the opposing party is just carrying out return road when moving,
When above-mentioned irradiation is compared in the rearward end position on the return road moving direction of the workbench of above-mentioned the opposing party The end position of the position of readiness side of the workbench by one side in region and be positioned at above-mentioned the opposing party's During the position of readiness side of workbench, above-mentioned control portion makes the workbench of one side with above-mentioned maximum mobile Speed moves until to above-mentioned end position.
16. according to the light irradiation device according to any one of claim 11～15, it is characterised in that
When the workbench of the side in above-mentioned first workbench and above-mentioned second workbench is just carrying out outlet The period of movement, above-mentioned control portion forbids that the outlet of the workbench of the opposing party is moved.
17. according to the light irradiation device according to any one of claim 11～15, it is characterised in that
When the workbench of the side in above-mentioned first workbench and above-mentioned second workbench is just carrying out outlet The period of movement, above-mentioned control portion makes the workbench of above-mentioned the opposing party enter initially towards target stop position Row outlet is moved, and wherein, above-mentioned target stop position is set in the workbench relative to one side The position of readiness side of workbench by the opposing party is moved towards the turning back position of return road mobile handoff from outlet The position of above-mentioned closest-approach distance,
When the workbench of above-mentioned the opposing party arrives above-mentioned target stop position, when the work of one side Platform is just carrying out outlet when moving, and proceeds by till return road moves until the workbench of one side, on Stating control portion makes the workbench of above-mentioned the opposing party stop at above-mentioned target stop position.
18. according to the light irradiation device according to any one of claim 11～17, it is characterised in that
Above-mentioned workbench spacing be front position on the outlet moving direction of above-mentioned first workbench with Axial along above-mentioned carrying between front position on the outlet moving direction of above-mentioned second workbench Distance.
19. according to the light irradiation device according to any one of claim 11～18, it is characterised in that
Above-mentioned just polarised light.
20. according to the light irradiation device according to any one of claim 11～19, it is characterised in that
To above-mentioned first workpiece and above-mentioned second workpiece, move in outlet and move these both sides photograph with return road Penetrate above-mentioned light.
21. 1 kinds of light irradiation devices, irradiate light to by the workpiece of irradiation area set in advance, its It is characterised by possessing:
First workbench, loads the first workpiece, and can by the carrying axle of above-mentioned irradiation area, By be set between first position of readiness of side of above-mentioned irradiation area and above-mentioned irradiation area from State the first position of readiness to move as outlet towards the movement of above-mentioned irradiation area and move back and forth；
Second workbench, loads second workpiece, and can be on above-mentioned carrying axle, will be on being set in State between the second position of readiness and the above-mentioned irradiation area of the opposite side of irradiation area from above-mentioned second standby The movement being positioned against above-mentioned irradiation area is moved as outlet and is moved back and forth；And
Control portion, the movement to above-mentioned first workbench and above-mentioned second workbench is controlled independently System, in order to above-mentioned first workpiece and above-mentioned second workpiece alternately pass through above-mentioned irradiation area,
When the workbench of the side in above-mentioned first workbench and above-mentioned second workbench is just carrying out outlet The period of movement, above-mentioned control portion makes the workbench of above-mentioned the opposing party enter initially towards target stop position Row outlet is moved, and wherein, above-mentioned target stop position is set in the workbench relative to one side The position of readiness side of workbench by the opposing party is moved towards the turning back position of return road mobile handoff from outlet The position of above-mentioned closest-approach distance,
When the workbench of above-mentioned the opposing party arrives above-mentioned target stop position, when the work of one side Platform is just carrying out outlet when moving, and proceeds by till return road moves until the workbench of one side, on Stating control portion makes the workbench of above-mentioned the opposing party stop at above-mentioned target stop position.
22. 1 kinds of light illuminating methods, irradiate light to by the workpiece of irradiation area set in advance, its It is characterised by,
First workbench and the second workbench are controlled independently, in order to the first workpiece and the second work Part alternately passes through above-mentioned irradiation area, and wherein, above-mentioned first workbench loads above-mentioned first workpiece, And can by the carrying axle of above-mentioned irradiation area by from the side being set in above-mentioned irradiation area First position of readiness moves as outlet towards the movement of above-mentioned irradiation area and moves back and forth, on State the second workbench and load above-mentioned second workpiece, and can be by the carrying axle of above-mentioned irradiation area By from being set in second position of readiness of opposite side of above-mentioned irradiation area towards the shifting of above-mentioned irradiation area Action is that outlet is moved and moved back and forth,
Now,
It is controlled in the following manner: above-mentioned first workbench and above-mentioned second workbench are at above-mentioned photograph Moving with the first translational speed in penetrating region, the return road outside above-mentioned irradiation area is to move than above-mentioned first Dynamic speed the second translational speed at a high speed moves, and the outlet outside above-mentioned irradiation area, when between workbench Move with above-mentioned second translational speed when distance is longer than closest-approach distance set in advance, when above-mentioned work Move with above-mentioned first translational speed when platform spacing is below above-mentioned closest-approach distance,
And it is controlled in the following manner: in above-mentioned first workbench and above-mentioned second workbench , be in return road and move in period at least in above-mentioned irradiation area of the workbench of a side before, The workbench of the opposing party proceeds by outlet and moves.
23. 1 kinds of light illuminating methods, irradiate light to by the workpiece of irradiation area set in advance, its It is characterised by,
First workbench and the second workbench are controlled independently, in order to the first workpiece and the second work Part alternately passes through above-mentioned irradiation area, and wherein, above-mentioned first workbench loads above-mentioned first workpiece, And can be by the carrying axle of above-mentioned irradiation area, by the side being set in above-mentioned irradiation area The first position of readiness and above-mentioned irradiation area between from above-mentioned first position of readiness towards above-mentioned irradiated region The movement in territory is moved as outlet and is moved back and forth, and above-mentioned second workbench loads above-mentioned second work Part, and will can treat the second of the opposite side being set in above-mentioned irradiation area on above-mentioned carrying axle Seat in the plane is put between above-mentioned irradiation area from above-mentioned second position of readiness towards the movement of above-mentioned irradiation area Move as outlet and move back and forth,
Now,
It is controlled in the following manner:
Above-mentioned first workbench and above-mentioned second workbench preset with ratio in above-mentioned irradiation area The slow translational speed of maximum translational speed move, the return road outside above-mentioned irradiation area is with above-mentioned maximum Translational speed moves, the outlet outside above-mentioned irradiation area, is not less than with workbench spacing and sets in advance The translational speed of fixed closest-approach distance moves,
By above-mentioned first workbench and above-mentioned second workbench from respective position of readiness until arriving Rotating before above-mentioned irradiation area allows interval that the interval till position carries out moving in outlet as can The spinning movement carrying out above-mentioned rotation may be interval, independently controlled above-mentioned first workbench and above-mentioned Second workbench, around the rotation of the axle orthogonal relative to work top, makes the attitude of this workbench become light Attitude during irradiation.
24. 1 kinds of light illuminating methods, irradiate light to by the workpiece of irradiation area set in advance, its It is characterised by,
First workbench and the second workbench are controlled independently, in order to the first workpiece and the second work Part alternately passes through above-mentioned irradiation area, and wherein, above-mentioned first workbench loads above-mentioned first workpiece, And can be by the carrying axle of above-mentioned irradiation area, by the side being set in above-mentioned irradiation area The first position of readiness and above-mentioned irradiation area between from above-mentioned first position of readiness towards above-mentioned irradiated region The movement in territory is moved as outlet and is moved back and forth, and above-mentioned second workbench loads above-mentioned second work Part, and will can treat the second of the opposite side being set in above-mentioned irradiation area on above-mentioned carrying axle Seat in the plane is put between above-mentioned irradiation area from above-mentioned second position of readiness towards the movement of above-mentioned irradiation area Move as outlet and move back and forth,
Now,
It is controlled in the following manner:
Above-mentioned first workbench and above-mentioned second workbench preset with ratio in above-mentioned irradiation area The slow translational speed of maximum translational speed move, the return road outside above-mentioned irradiation area is with above-mentioned maximum Translational speed moves, the outlet outside above-mentioned irradiation area, is not less than with workbench spacing and sets in advance The translational speed of fixed closest-approach distance moves,
When the workbench of the side in above-mentioned first workbench and above-mentioned second workbench is just carrying out outlet The period of movement, the workbench of above-mentioned the opposing party carries out outlet initially towards target stop position and moves, Wherein, what above-mentioned target stop position was set in the workbench relative to one side moves court from outlet The turning back position of return road mobile handoff and by the position of readiness side of the workbench of the opposing party above-mentioned closest to away from From position,
When the workbench of above-mentioned the opposing party arrives above-mentioned target stop position, when the work of one side Platform is just carrying out outlet when moving, and proceeds by till return road moves until the workbench of one side, on The workbench stating the opposing party stops at above-mentioned target stop position.
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