CN105845608B - Silicon chip guiding mechanism, the fixture that quartz boat can be clamped and silicon chip handling system - Google Patents
Silicon chip guiding mechanism, the fixture that quartz boat can be clamped and silicon chip handling system Download PDFInfo
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- CN105845608B CN105845608B CN201510021849.1A CN201510021849A CN105845608B CN 105845608 B CN105845608 B CN 105845608B CN 201510021849 A CN201510021849 A CN 201510021849A CN 105845608 B CN105845608 B CN 105845608B
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- silicon chip
- conveyer belt
- quartz boat
- conducting bar
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Abstract
Silicon chip guiding mechanism provided in an embodiment of the present invention, the fixture that can clamp quartz boat and silicon chip handling system can promote the tooth socket for passing through into piece conducting bar and guiding silicon chip to be directed at quartz boat bottom stick into piece conducting bar by conducting bar propulsion cylinder.Since the crown spacing of the sawtooth into the zigzag side of piece conducting bar is more than the sawtooth crown spacing of the sawtooth of the bottom stick of the quartz boat, when the position of silicon chip deviates, the present invention can be conducted go back to the position opposite with the tooth socket of quartz boat bottom stick.The present invention can effectively guide the tooth socket of silicon chip alignment quartz boat bottom stick, to avoid silicon chip damaged.
Description
Technical field
The present invention relates to silicon wafer processing equipment technical fields, more particularly to silicon chip guiding mechanism, can clamp quartz boat
Fixture and silicon chip handling system.
Background technology
With the increasingly depleted of the non-renewable energy resources such as oil, coal, the new energy such as solar energy, wind energy have obtained new hair
Open up opportunity.
In the production process of silicon chip battery, need to take out silicon chip (i.e. quartz plate) from the gaily decorated basket for hold silicon chip, so
Afterwards per two panels it is back-to-back be combined to be inserted into quartz boat be diffused technique.Quartz boat is that one kind can be used for carrying silicon chip
Tool, be made of quartz.Quartz boat includes bottom stick and multiple paraphysis for being mutually parallel, and bottom stick is equipped with towards on the inside of quartz boat
Tooth socket, paraphysis be equipped with towards the tooth socket on the inside of quartz boat, silicon chip is inserted by quartz boat by bottom stick and paraphysis tooth socket
In.
Since silicon wafer thickness is smaller, silicon chip shakes in quartz boat in order to prevent, the space width on the stick of quartz boat bottom
Degree is smaller.But the tooth socket of smaller width improves the difficulty for the tooth socket that silicon chip is inserted on the stick of quartz boat bottom so that silicon chip misalignment
The case where tooth socket on the stick of bottom, increases.Since quartz boat is that quartz is constituted, hardness is larger, therefore when on the stick of silicon chip misalignment bottom
When tooth socket, silicon chip will be caused damaged.
Invention content
The fixture for being designed to provide a kind of silicon chip guiding mechanism, quartz boat being clamped and the silicon chip dress of the embodiment of the present invention
Unloading system, to avoid silicon chip breakage.
In order to achieve the above objectives, the embodiment of the invention discloses a kind of silicon chip guiding mechanisms, are adapted to quartz boat, the silicon
Piece guiding mechanism includes：Conducting bar propulsion cylinder and be set on the piston rod of the conducting bar propulsion cylinder into piece conducting bar；
It is described into piece conducting bar towards the quartz boat inside side be zigzag, it is described into piece conducting bar and the quartz boat
Bottom stick it is parallel, it is described into piece conducting bar towards the quartz boat inside side sawtooth tooth pitch and the quartz boat bottom stick
Sawtooth tooth pitch it is identical, it is described into piece conducting bar towards the quartz boat inside side sawtooth tooth space centerline with it is described
The tooth space centerline of the sawtooth of the bottom stick of quartz boat is in same plane, the crown of the sawtooth of the zigzag side into piece conducting bar
Spacing is more than the crown spacing of the sawtooth of the bottom stick of the quartz boat；
The conducting bar propulsion cylinder drive is described to move into piece conducting bar, described described into piece into piece conducting bar or withdrawal to promote
Conducting bar, the conducting bar propulsion cylinder promote it is described into piece conducting bar when, it is described into piece conducting bar cross the bottom stick of the quartz boat into
Enter inside the quartz boat, it is described to cross the stone into piece conducting bar when described in conducting bar propulsion cylinder withdrawal into piece conducting bar
The bottom stick of Ying Zhou leaves inside the quartz boat.
Optionally, the material of the silicon chip guiding mechanism is plastics and/or the saw of the zigzag side into piece conducting bar
The tooth of the sawtooth of the tall and big bottom stick in the quartz boat of tooth of tooth is high.
A kind of fixture clamping quartz boat, including：Bottom plate, two side plates being set on the bottom plate, silicon chip are oriented to
Mechanism, the side plate connecting plate of described two side sheet rooms and the rotation clamping cylinder that is separately positioned on described two side plates, it is described
Two side plates are respectively left plate and right plate；
The piston-rod end of the rotation clamping cylinder is provided with pressing plate, and the pressing plate is vertical with the piston rod, described
Rotation clamping cylinder rotation and shrink the piston rod, make the pressing plate enter the fixture inside quartz boat end plate bore simultaneously
It is in close contact with the bottom edge of the end plate bore；
The silicon chip guiding mechanism includes：It conducting bar propulsion cylinder and is set on the piston rod of the conducting bar propulsion cylinder
Into piece conducting bar；The conducting bar propulsion cylinder is fixedly installed on the bottom plate, it is described into piece conducting bar towards the quartz boat inside
Side be zigzag, it is described parallel with the bottom stick of the quartz boat into piece conducting bar, it is described into piece conducting bar towards the quartz boat
The tooth pitch of the sawtooth of internal side is identical as the tooth pitch of sawtooth of bottom stick of the quartz boat, described into described in piece conducting bar direction
The tooth space centerline of the tooth space centerline of the sawtooth of side inside quartz boat and the sawtooth of the bottom stick of the quartz boat is same
Plane, the crown spacing of the sawtooth of the zigzag side into piece conducting bar are more than the crown of the sawtooth of the bottom stick of the quartz boat
Spacing；
The conducting bar propulsion cylinder drive is described to move into piece conducting bar, described described into piece into piece conducting bar or withdrawal to promote
Conducting bar, the conducting bar propulsion cylinder promote it is described into piece conducting bar when, it is described into piece conducting bar cross the bottom stick of the quartz boat into
Enter inside the quartz boat, it is described to cross the stone into piece conducting bar when described in conducting bar propulsion cylinder withdrawal into piece conducting bar
The bottom stick of Ying Zhou leaves inside the quartz boat.
Optionally, the material of the silicon chip guiding mechanism is plastics and/or the saw of the zigzag side into piece conducting bar
The tooth of the sawtooth of the tall and big bottom stick in the quartz boat of tooth of tooth is high.
Optionally, further include：It is set to the locating piece of the bottom plate, the locating piece has first thickness, the positioning
Block is contacted with the bottom of the quartz boat in the fixture.
A kind of silicon chip handling system, including：Quartz boat, rotary lifting mechanism, into piece vertical conveyer, first gaily decorated basket,
Two gailys decorated basket, the first lifting gear, the second lifting gear, lifting conveyer belt, a plurality of silicon chip conveyer belt, slicing apparatus, the first flaps
Device, the second flaps device, the first slice receiving mechanism of slice, the second slice receiving mechanism of slice, power control cabinet and above-mentioned any fixture,
The quartz boat is located in the fixture, and the fixture is connect with the rotary lifting mechanism, the rotation and lifting
Mechanism drives the fixture lifting and rotation；
It is provided with the first silicon chip conveyer belt between first gaily decorated basket and the first flaps device first end, described first liter
Falling unit is connect with first gaily decorated basket, and first gaily decorated basket is driven to be lifted so that the silicon chip in first gaily decorated basket with
The first silicon chip conveyer belt contact；It is provided with the second silicon chip conveyer belt between second gaily decorated basket and the lifting conveyer belt,
Silicon chip is transmitted on the third silicon chip conveyer belt by the second silicon chip conveyer belt by the lifting conveyer belt, and described second
Lifting gear is connect with second gaily decorated basket, drives second gaily decorated basket to be lifted, so that the silicon chip in second gaily decorated basket
It is contacted with the second silicon chip conveyer belt；
Third silicon chip conveyer belt and the transmission of the 4th silicon chip are set between the first flaps device second end and the quartz boat
Band, adjacent with the first flaps device second end for the third silicon chip conveyer belt, adjacent with the quartz boat is described
4th silicon chip conveyer belt；
The lifting conveyer belt is adjacent with the third silicon chip conveyer belt, and the silicon chip on the lifting conveyer belt is transmitted to
It is overlapped above silicon chip on the third silicon chip conveyer belt, forms silicon chip group；
Silicon chip group is transmitted on the 4th silicon chip conveyer belt by the third silicon chip conveyer belt, the 4th silicon chip transmission
Silicon chip group is transmitted in the quartz boat or the silicon chip group in the quartz boat is sent out the quartz boat by band；
Described vertically arranged into piece vertical conveyer, described one end into piece vertical conveyer is fixed, by the silicon chip
It is described vertically to be passed into piece when group transmits in the quartz boat or the silicon chip group in the quartz boat is sent out the quartz boat
The other end of band is sent to be stretched into the quartz boat by the end plate bore, and the end of the other end into piece vertical conveyer
It is in same plane with the conveyer belt in top of the 4th silicon chip conveyer belt and the plane is parallel with horizontal plane, in silicon chip
Group is conveyed into the quartz boat or during being transferred out the quartz boat, the other end into piece vertical conveyer
End contacted with silicon chip group bottom, silicon chip group is supported；
The 4th silicon chip conveyer belt, the 9th silicon chip conveyer belt are disposed between the quartz boat and the slicing apparatus
With the 5th silicon chip conveyer belt, the 5th silicon chip conveyer belt passes through the slicing apparatus, the slicing apparatus to be received with described first
Piece is inter-agency to be provided with the 6th silicon chip conveyer belt, is provided between the 5th silicon chip conveyer belt and the second flaps device first end
7th silicon chip conveyer belt is provided with the 8th silicon chip conveyer belt between the second flaps device second end and second slice receiving mechanism of slice；
After silicon chip group in the quartz boat is sent out the quartz boat by the 4th silicon chip conveyer belt, by the silicon chip
Group is transmitted on the 9th silicon chip conveyer belt, and the silicon chip group is transmitted to the 5th silicon chip by the 9th silicon chip conveyer belt
On conveyer belt, the silicon chip group that the slicing apparatus carrys out the 5th silicon chip conveyer belt transmission carries out fragment, by the silicon chip group
In upper side silicon wafer be placed on the 6th silicon chip conveyer belt, so that lower side silicon wafer in the silicon chip group is continued in the 5th silicon
It is transmitted on piece conveyer belt；
Silicon chip is passed to first slice receiving mechanism of slice by the 6th silicon chip conveyer belt, and the 8th silicon chip conveyer belt is by silicon chip
It is passed to second slice receiving mechanism of slice；
The appliance of the power control cabinet is respectively with rotary lifting mechanism, into piece vertical conveyer, the first lifting gear,
Two lifting gears, lifting conveyer belt, each silicon chip conveyer belt, slicing apparatus, the first flaps device, the second flaps device are electrically connected.
Optionally, first slice receiving mechanism of slice is identical with second slice receiving mechanism of slice, first slice receiving mechanism of slice and described
Second slice receiving mechanism of slice includes：Folded box, spring, horizontal support plate, side sliding rail, baffle, the first cylinder, guide rod, connecting plate and coaming plate,
The folded box includes folded box plate and three folded box side plates, and the folded box is towards the side of adjacent silicon chip conveyer belt
For opening, to receive the silicon chip of adjacent silicon chip conveyer belt transmission, the folded box plate is described folded horizontal by the first acute angle
The size of box plate and the size of silicon chip match, and opposite folded box side plate is rectangular side panels with the opening；
Through-hole is provided on the horizontal support plate, the aperture of the through-hole is less than the outer diameter of the spring and is led more than described
The diameter of bar；
The folded box is placed on the baffle, and the baffle lower surface is fixedly connected with one end of the guide rod, described to lead
It is surrounded with the spring on the outside of bar, the other side of the guide rod is fixedly connected across the horizontal support plate with the connecting plate, described
Guide rod perpendicular to the connecting plate, the spring between the baffle and the horizontal support plate, the baffle horizontal by
First acute angle, the horizontal support plate are horizontally disposed；
The horizontal support plate lower surface is fixedly installed first cylinder, the piston-rod end direction of first cylinder
The connecting plate, the piston rod of first cylinder can push the connecting plate and drive the baffle to moving down by the guide rod
It is dynamic, so that the folded box is fallen on the side sliding rail；
The side sliding rail is obliquely installed, and horizontal by acute angle, the side sliding rail is arranged below the baffle, and described
Side sliding rail is arranged above the horizontal support plate, and the folded box can be along the side sliding rail slide downward；
The coaming plate is set on the outside of the rectangular side panels, to stop the folded box slide downward, the lower end of the coaming plate
Vertical range between the side sliding rail is not less than the height of the folded box.
Optionally, the slicing apparatus includes：Upper sucker, lower sucker, the first slider-actuated motor, the first sliding block, first
Transmission mechanism, horizontal slide rail and the second cylinder,
The first slider-actuated motor is connect by first transmission mechanism with first sliding block, and described first slides
Block is set on the horizontal slide rail, and the first slider-actuated motor drives first sliding block sliding on the horizontal slide rail
It is dynamic；
First sliding block lower surface is fixedly connected with second cylinder, the piston-rod end of second cylinder and institute
It states sucker to be fixedly connected, second cylinder drives the upper sucker to move up and down；
The lower sucker is fixedly installed on the downside of the 5th silicon chip conveyer belt, to adsorb the 5th silicon chip conveyer belt
The lower side silicon wafer of the silicon chip group of transmission；
In the upper side silicon wafer during the slicing apparatus draws the silicon chip group, the 5th silicon chip conveyer belt stops fortune
Row, the upper sucker air-breathing adsorb side silicon wafer, and the lower sucker air-breathing adsorbs lower side silicon wafer, and the upper sucker is in institute
It states and is moved up under the drive of the second cylinder, the silicon chip group separation；After the silicon chip group separation, the lower sucker stops inhaling
Gas, the lower side silicon wafer in the silicon chip group continue to be transmitted by the 5th silicon chip conveyer belt.
Optionally, further include：First silicon chip buffer storage and the second silicon chip buffer storage, the first silicon chip buffer storage
Identical with the second silicon chip buffer storage, the first silicon chip buffer storage is sleeved on the third silicon chip conveyer belt, described
Second silicon chip buffer storage is sleeved on the 9th silicon chip conveyer belt；
The first silicon chip buffer storage and the second silicon chip buffer storage include：Cache driving motor, the second biography
Motivation structure and cache box, the caching driving motor are connect with second transmission mechanism, second transmission mechanism with it is described
Cache box connects, and the caching driving motor drives the cache box to move up and down through second transmission mechanism, the caching
It is both provided with sliding slot on the opposite side plate of two of case；
The 9th silicon chip conveyer belt passes through the cache box of the second silicon chip buffer storage, the third silicon chip conveyer belt
Across the cache box of the first silicon chip buffer storage.
Optionally, described to include into piece vertical conveyer：Vertical driving motor, support mainboard, into piece conveyer belt, belt wheel and
Main shaft, the vertical driving motor are fixedly connected with the main shaft, by the main shaft drive it is described into piece conveyer belt described
It is rotated on belt wheel, described support mainboard one end is fixed, and the other end is connect with the belt wheel, to support the support mainboard.
Silicon chip guiding mechanism provided in an embodiment of the present invention, the fixture that can clamp quartz boat and silicon chip handling system, can be with
It is promoted into piece conducting bar by conducting bar propulsion cylinder, by the tooth socket for guiding silicon chip alignment quartz boat bottom stick into piece conducting bar.Due into
The crown spacing of the sawtooth of the zigzag side of piece conducting bar is more than the sawtooth crown spacing of the sawtooth of the bottom stick of the quartz boat, because
, when the position of silicon chip deviates, the present invention can be conducted go back to the position opposite with the tooth socket of quartz boat bottom stick for this.This
Invention can effectively guide the tooth socket of silicon chip alignment quartz boat bottom stick, to avoid silicon chip damaged.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
Obtain other attached drawings according to these attached drawings.
Fig. 1 is a kind of front view of silicon chip guiding mechanism provided in an embodiment of the present invention；
Fig. 2 is a kind of vertical view of silicon chip guiding mechanism provided in an embodiment of the present invention；
Fig. 3 is a kind of partial enlarged view of silicon chip guiding mechanism provided in an embodiment of the present invention；
Fig. 4 is schematic diagram when silicon chip guiding mechanism provided in an embodiment of the present invention is pushed into；
Fig. 5 is the enlarged drawing in region shown in circle in Fig. 4；
Fig. 6 is schematic diagram when silicon chip guiding mechanism provided in an embodiment of the present invention is retracted；
Fig. 7 is the enlarged drawing in region shown in circle in Fig. 6；
Fig. 8 is a kind of front view for the fixture clamping quartz boat provided in an embodiment of the present invention；
Fig. 9 is a kind of vertical view for the fixture clamping quartz boat provided in an embodiment of the present invention；
Figure 10 is regarding after a kind of vertical view of silicon chip handling system provided in an embodiment of the present invention is rotated by 90 ° counterclockwise
Figure；
Figure 11 is regarding after a kind of front view of silicon chip handling system provided in an embodiment of the present invention is rotated by 90 ° counterclockwise
Figure；
Figure 12 is the right view of slice receiving mechanism of slice provided in an embodiment of the present invention；
Figure 13 is the front view of slice receiving mechanism of slice provided in an embodiment of the present invention；
Figure 14 is the schematic diagram of slicing apparatus provided in an embodiment of the present invention；
Figure 15 is the schematic diagram of silicon chip buffer storage provided in an embodiment of the present invention；
Figure 16 be in Figure 15 on the directions A in silicon chip buffer storage cache box schematic diagram；
Figure 17 is the schematic diagram of lifting gear provided in an embodiment of the present invention；
Figure 18 is the front view of flaps device provided in an embodiment of the present invention；
Figure 19 is the vertical view of flaps device provided in an embodiment of the present invention；
Figure 20 is the front view of rotary lifting mechanism provided in an embodiment of the present invention；
Figure 21 is the vertical view of rotary lifting mechanism provided in an embodiment of the present invention；
Figure 22 is the front view provided in an embodiment of the present invention into piece vertical conveyer；
Figure 23 is the right view provided in an embodiment of the present invention into piece vertical conveyer；
Figure 24 is the schematic diagram that silicon chip enters quartz boat in the prior art；
Figure 25 is the schematic diagram provided in an embodiment of the present invention that spare folded box is placed on folded box.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Incorporated by reference to Fig. 1 to Fig. 7, a kind of silicon chip guiding mechanism provided in an embodiment of the present invention is adapted to quartz boat, such as Fig. 1
Shown, which can include：Conducting bar propulsion cylinder 805 and the piston for being set to the conducting bar propulsion cylinder 805
On bar into piece conducting bar 804；
It is described into piece conducting bar 804 towards the quartz boat inside side be zigzag, as shown in Fig. 2, described lead into piece
Item 804 is parallel with the bottom stick 809 of the quartz boat, and Fig. 3 is the enlarged drawing in region shown in circle 810 in Fig. 2, as shown in figure 3, institute
State the sawtooth of the tooth pitch of the sawtooth of the side inside into piece conducting bar 804 towards the quartz boat and the bottom stick 809 of the quartz boat
Tooth pitch it is identical, it is described into piece conducting bar 804 towards the quartz boat inside side sawtooth 812 center line of tooth socket with it is described
811 center line of tooth socket of the sawtooth of the bottom stick 809 of quartz boat is in same plane, as shown in Figures 4 and 5, described into piece conducting bar 804
Zigzag side sawtooth crown spacing be more than the quartz boat bottom stick 809 sawtooth crown spacing.
It, ought be into piece conducting bar 804 due to parallel with the bottom stick 809 of quartz boat into piece conducting bar 804 incorporated by reference to Fig. 4 to Fig. 7
It is promoted by conducting bar propulsion cylinder 805 and when crossing the bottom stick 809 of quartz boat, silicon chip 001 will be led into piece by between cog spacing is larger
Item 804 guides.When crossing 809 811 bottom end of tooth socket of bottom stick of quartz boat into 804 tooth socket of piece conducting bar, 812 bottom end, silicon chip 001 will
It is guided into piece conducting bar into 804 tooth socket of piece conducting bar, 812 bottom end.Since silicon chip 001 is transmitted by silicon chip conveyer belt in quartz boat,
Therefore it needs to rotate quartz boat when silicon chip 001 is packed into quartz boat, makes its opening towards horizontal direction, correspondingly, into piece
The also corresponding rotation of conducting bar 804 makes its zigzag side still towards inside quartz boat.In this way, after silicon chip 001 loads, it can
Again to rotate quartz boat, keep its opening up, equally, into piece conducting bar 804 also corresponding rotation, makes its zigzag side still
Towards inside quartz boat.
After silicon slice loading finishes and rotating quartz boat keeps its opening up, if got over into 804 tooth socket of piece conducting bar, 812 bottom end
Crossed 809 tooth socket of bottom stick, 811 bottom end of quartz boat, it is only necessary to by conducting bar propulsion cylinder 805 withdraw it is described into piece conducting bar 804 i.e.
Silicon chip may make to be fallen in 809 tooth socket of bottom stick, 811 bottom end of quartz boat by gravity.
Since the crown spacing of the sawtooth into the zigzag side of piece conducting bar 804 is more than the bottom stick 809 of the quartz boat
The sawtooth crown spacing of sawtooth, therefore silicon chip 001 is easy to be guided into piece conducting bar 804.Due into 804 sawtooth of piece conducting bar
812 center line of tooth socket and 811 center line of tooth socket of the sawtooth of the bottom stick 809 of the quartz boat are led in same plane, therefore into piece
Item 804 guides silicon chip 001 to reach into after 804 tooth socket of piece conducting bar, 812 bottom end, also allows for the bottom that silicon chip 001 is targeted by quartz boat
The tooth socket 811 of the sawtooth of stick 809.In this way, the saw of the bottom stick 809 of the alignment quartz boat of silicon chip 001 can be guided into piece conducting bar 804
The tooth socket 811 of tooth, so as to effectively avoid due to 809 tooth socket of silicon chip misalignment bottom stick and caused by silicon chip it is damaged.
The conducting bar propulsion cylinder 805 moves described in can driving into piece conducting bar 804, described into piece conducting bar 804 to promote
Or it withdraws described into piece conducting bar 804.Fig. 5 is the enlarged drawing in region shown in circle 814 in Fig. 4, as shown in Figures 4 and 5, described
Conducting bar propulsion cylinder 805 promote it is described into piece conducting bar 804 when, it is described into piece conducting bar 804 cross the bottom stick 809 of the quartz boat into
Enter inside the quartz boat.Fig. 7 is the enlarged drawing in region shown in circle 815 in Fig. 6, as shown in FIG. 6 and 7, in the conducting bar
Propulsion cylinder 805 withdraw it is described into piece conducting bar 804 when, the bottom stick 809 that the quartz boat is crossed into piece conducting bar 804 leaves institute
It states inside quartz boat.
Optionally, the material of above-mentioned silicon chip guiding mechanism can be plastics, rubber etc. and/or above-mentioned into piece conducting bar 804
The tooth of the sawtooth of the tall and big bottom stick 809 in the quartz boat of tooth of the sawtooth of zigzag side is high.
It is understood that plastics, rubber phase have preferably elasticity for quartz, therefore be conducive to further protect
Protect silicon chip.When the tooth of the sawtooth of the tall and big bottom stick 809 in the quartz boat of the sawtooth tooth into the zigzag side of piece conducting bar 804
Height is more conducive to silicon chip 001 and is contacted in advance with the sawtooth into piece conducting bar 804, to guide silicon chip 001 to be directed at the bottom stick of quartz boat
809 tooth socket.
A kind of silicon chip guiding mechanism provided in an embodiment of the present invention can be promoted by conducting bar propulsion cylinder into piece conducting bar,
By the tooth socket for guiding silicon chip alignment quartz boat bottom stick into piece conducting bar.Due to the crown of the sawtooth into the zigzag side of piece conducting bar
Spacing is more than the sawtooth crown spacing of the sawtooth of the bottom stick of the quartz boat, therefore when the position of silicon chip deviates, this hair
Bright can be conducted go back to the position opposite with the tooth socket of quartz boat bottom stick into piece conducting bar.The present invention can effectively guide silicon chip
It is directed at the tooth socket of quartz boat bottom stick, to avoid silicon chip damaged.
Incorporated by reference to Fig. 8 and Fig. 9, the embodiment of the present invention additionally provides a kind of fixture clamping quartz boat, may include：Bottom
Side plate between plate 806, two side plates 807 being set on the bottom plate 806, silicon chip guiding mechanism, described two side plates 807 connects
Fishplate bar 801 and the rotation clamping cylinder 802 being separately positioned on described two side plates 807, described two side plates are respectively left side
Plate and right plate；
For convenience of viewing, quartz boat is not showed that in Fig. 8 and Fig. 9.Fig. 8 is to bottom plate 806 and conducting bar propulsion cylinder 805 simultaneously
Contact area carry out perspective processing, by open conducting bar propulsion cylinder 805 be mounted on bottom plate 806 it is a kind of in a manner of.
The piston-rod end of the rotation clamping cylinder 802 is provided with pressing plate, and the pressing plate is vertical with the piston rod, institute
It states the rotation of rotation clamping cylinder 802 and shrinks the piston rod, make the pressing plate into the end of the quartz boat inside the fixture
Plate hole is simultaneously in close contact with the bottom edge of the end plate bore.
It is understood that rotation clamping cylinder 802 can make pressing plate enter above-mentioned end plate bore by rotary-piston bar first, so
After-contraction piston rod is to compress the bottom edge of end plate bore, to realize the fixation to quartz boat.Certainly, clamping cylinder 802 is rotated
It can rotate and shrink simultaneously piston rod.
The silicon chip guiding mechanism includes：Conducting bar propulsion cylinder 805 and the piston for being set to the conducting bar propulsion cylinder 805
On bar into piece conducting bar 804；The conducting bar propulsion cylinder 805 is fixedly installed on the bottom plate 806, described into piece conducting bar 804
It is zigzag towards the side inside the quartz boat, as shown in Fig. 2, the bottom stick into piece conducting bar 804 and the quartz boat
809 is parallel, and Fig. 3 is the enlarged drawing in region shown in circle 810 in Fig. 2, as shown in figure 3, described into piece conducting bar 804 towards the stone
The tooth pitch of the sawtooth of side inside Ying Zhou is identical as the tooth pitch of sawtooth of bottom stick 809 of the quartz boat, described into piece conducting bar
804 towards the bottom stick 809 of 812 center line of the tooth socket and quartz boat of the sawtooth of the side inside the quartz boat sawtooth
811 center line of tooth socket is in same plane, as shown in Figures 4 and 5, the tooth of the sawtooth of the zigzag side into piece conducting bar 804
Sharp spacing is more than the crown spacing of the sawtooth of the bottom stick 809 of the quartz boat.
The conducting bar propulsion cylinder 805 moves described in can driving into piece conducting bar 804, described into piece conducting bar 804 to promote
Or it withdraws described into piece conducting bar 804.Fig. 5 is the enlarged drawing in region shown in circle 814 in Fig. 4, as shown in Figures 4 and 5, described
Conducting bar propulsion cylinder 805 promote it is described into piece conducting bar 804 when, it is described into piece conducting bar 804 cross the bottom stick 809 of the quartz boat into
Enter inside the quartz boat.Fig. 7 is the enlarged drawing in region shown in circle 815 in Fig. 6, as shown in FIG. 6 and 7, in the conducting bar
Propulsion cylinder 805 withdraw it is described into piece conducting bar 804 when, the bottom stick 809 that the quartz boat is crossed into piece conducting bar 804 leaves institute
It states inside quartz boat.
Optionally, the material of above-mentioned silicon chip guiding mechanism can be plastics, rubber etc. and/or above-mentioned into piece conducting bar 804
The tooth of the sawtooth of the tall and big bottom stick 809 in the quartz boat of tooth of the sawtooth of zigzag side is high.
As can be seen from figures 8 and 9, another kind provided in an embodiment of the present invention can clamp can also wrap in the fixture of quartz boat
It includes：Be set to the locating piece 803 of the bottom plate 806, the locating piece 803 has a first thickness, the locating piece 803 with it is described
The bottom of quartz boat in fixture contacts.
The positioning to quartz boat may be implemented by locating piece 803, side plate 807, facilitate the pressing plate of rotation clamping cylinder 802
Into the quartz boat inside the fixture end plate bore and compress the bottom edge of the end plate bore, to fix quartz boat.
A kind of fixture clamping quartz boat provided in an embodiment of the present invention, can be promoted by conducting bar propulsion cylinder into piece
Conducting bar, by the tooth socket for guiding silicon chip alignment quartz boat bottom stick into piece conducting bar.Due to the sawtooth into the zigzag side of piece conducting bar
Crown spacing be more than the quartz boat bottom stick sawtooth sawtooth crown spacing, therefore when the position of silicon chip deviates
When, it is of the invention that the position opposite with the tooth socket of quartz boat bottom stick can be conducted go back into piece conducting bar.The present invention can be effective
The tooth socket for guiding silicon chip alignment quartz boat bottom stick, to avoid silicon chip damaged.Meanwhile the present invention can also clamp gas by rotation
Cylinder clamps quartz boat and causes silicon chip to damage so that quartz boat is not in movement during rotation and use.
Incorporated by reference to Figure 10 and Figure 11, the embodiment of the present invention additionally provides a kind of silicon chip handling system, may include：Quartz boat
101, rotary lifting mechanism 102, into piece vertical conveyer 103, first gaily decorated basket 104, second gaily decorated basket 105, the first lifting gear
106, the second lifting gear (the second lifting gear is blocked by the first lifting gear 106 in fig. 11, is not shown), lifting conveyer belt
108, a plurality of silicon chip conveyer belt, slicing apparatus 109, the first flaps device 110, the second flaps device 111, the first slice receiving mechanism of slice 112,
Any one of two slice receiving mechanism of slice 113, power control cabinet (not shown) and previous embodiment can clamp the fixture 115 of quartz boat,
The quartz boat 101 is located in the fixture 115, and the fixture 115 is connect with the rotary lifting mechanism 102,
The rotary lifting mechanism 102 drives the fixture 115 to lift and rotate；
It is provided with the first silicon chip conveyer belt 116 between first gaily decorated basket 104 and 110 first end of the first flaps device,
First lifting gear 106 is connect with first gaily decorated basket 104, drives first gaily decorated basket 104 to be lifted, so that described
Silicon chip in first gaily decorated basket 104 is contacted with the first silicon chip conveyer belt 116；It is contacted with the first silicon chip conveyer belt 116 in silicon chip
Afterwards, silicon chip can be transmitted on the first flaps device 110 by the first silicon chip conveyer belt 116 and be overturn.
It is provided with the second silicon chip conveyer belt 117 between second gaily decorated basket 105 and the lifting conveyer belt 108, described
Silicon chip is transmitted on third silicon chip conveyer belt 118 by two silicon chip conveyer belts 117 by the lifting conveyer belt 108, and described second
Lifting gear is connect with second gaily decorated basket 105, drives second gaily decorated basket 105 to be lifted, so that second gaily decorated basket 105
Interior silicon chip is contacted with the second silicon chip conveyer belt 117；After silicon chip is contacted with the second silicon chip conveyer belt 117, silicon chip can
To be transmitted by the second silicon chip conveyer belt 117, silicon chip can be transmitted on lifting conveyer belt 108 by the second silicon chip conveyer belt 117.
First flaps device, 110 second end and can clamping is set between the quartz boat 101 in the fixture 115 of quartz boat
Third silicon chip conveyer belt 118 and the 4th silicon chip conveyer belt 119 are set, adjacent with the first flaps 110 second ends of device is described
Third silicon chip conveyer belt 118 is adjacent with the quartz boat 101 for the 4th silicon chip conveyer belt 119；
The lifting conveyer belt 108 is adjacent with the third silicon chip conveyer belt 118, will be on the lifting conveyer belt 108
It is overlapped above the silicon chip that silicon chip is transmitted on the third silicon chip conveyer belt 118, forms silicon chip group；
Silicon chip group is transmitted on the 4th silicon chip conveyer belt 119 by the third silicon chip conveyer belt 118, the 4th silicon
Silicon chip group is transmitted in the quartz boat 101 or is sent out the silicon chip group in the quartz boat 101 described by piece conveyer belt 119
Quartz boat 101；
Described vertically arranged into piece vertical conveyer 103, described one end into piece vertical conveyer 103 is fixed, such as Figure 22
And shown in Figure 23, the silicon chip group is being transmitted in the quartz boat 101 or transmitting the silicon chip group in the quartz boat 101
When going out the quartz boat 101, the other end into piece vertical conveyer 103 is stretched into described by the end plate bore of quartz boat
In quartz boat 101, and the place of the end of the other end into piece vertical conveyer 103 and the 4th silicon chip conveyer belt 119
Conveyer belt in top is in same plane and the plane is parallel with horizontal plane, and the quartz boat 101 is conveyed into silicon chip group
It is interior or during being transferred out the quartz boat 101, end and the silicon chip group of the other end into piece vertical conveyer 103
Bottom contacts, and is supported to silicon chip group；
It can make the silicon chip and second in first gaily decorated basket 104 by the first flaps device 110 and lifting conveyer belt 108
The back-to-back formation silicon chip group of a silicon chip in the gaily decorated basket 105.After the silicon chip group transmits in quartz boat 101, rotary lifting mechanism
102 drive 87 degree of the rotation counterclockwise of the fixture 115, and drive the rise of fixture 115 to be put into diffusion furnace and be diffused to silicon chip group
Technique.
The 4th silicon chip conveyer belt the 119, the 9th is disposed between the quartz boat 101 and the slicing apparatus 109
Silicon chip conveyer belt 124 and the 5th silicon chip conveyer belt 120, the 5th silicon chip conveyer belt 120 pass through the slicing apparatus 109, institute
It states and is provided with the 6th silicon chip conveyer belt 121 between slicing apparatus 109 and first slice receiving mechanism of slice 112, the 5th silicon chip transmission
The 7th silicon chip conveyer belt 122, the second flaps device 111 second are provided between band 120 and 111 first end of the second flaps device
It is provided with the 8th silicon chip conveyer belt 123 between end and second slice receiving mechanism of slice 113；
After silicon chip group in the quartz boat 101 is sent out the quartz boat 101 by the 4th silicon chip conveyer belt 119,
The silicon chip group is transmitted on the 9th silicon chip conveyer belt 124, the 9th silicon chip conveyer belt 124 passes the silicon chip group
It is sent on the 5th silicon chip conveyer belt 120, the silicon that the slicing apparatus 109 carrys out the 5th silicon chip conveyer belt 120 transmission
Piece group carries out fragment, and the upper side silicon wafer in the silicon chip group is placed on the 6th silicon chip conveyer belt 121, the silicon chip group is made
In lower side silicon wafer continuation transmitted on the 5th silicon chip conveyer belt 120, to be transmitted to the 7th silicon chip conveyer belt 122
On；
Silicon chip is passed to first slice receiving mechanism of slice 112, the 8th silicon chip conveyer belt by the 6th silicon chip conveyer belt 121
Silicon chip is passed to second slice receiving mechanism of slice 113 by 123；
After silicon chip group completes diffusion technique, rotary lifting mechanism 102 drives fixture 115 to decline, and drives fixture 115 suitable
Hour hands rotate 87 degree so that the silicon chip group of bottom is contacted with the 4th silicon chip conveyer belt 119 in quartz boat.It is transmitted in the 4th silicon chip
After being transmitted the silicon chip group of bottom with 119, rotary lifting mechanism 102 continues that fixture 115 is driven to decline, and makes residue successively
Silicon chip group is contacted with the 4th silicon chip conveyer belt 119 so that remaining silicon chip group is transmitted by the 4th silicon chip conveyer belt 119 successively.
After the slicing apparatus 109 carries out fragment to the silicon chip group that the 5th silicon chip conveyer belt 120 transmission comes, silicon chip group
In two silicon chips transmitted on the 6th silicon chip conveyer belt 121 and the 5th silicon chip conveyer belt 120 respectively, the second flaps device 111 will
The silicon chip of 7th silicon chip conveyer belt 122 transmission is overturn, in this way, eventually falling into the first slice receiving mechanism of slice 112 and the second plate collecting machine
The direction of silicon chip in structure 113 will be identical.
The appliance of the power control cabinet is lifted with rotary lifting mechanism 102, into piece vertical conveyer 103, first respectively
Device 106, the second lifting gear, lifting conveyer belt 108, each silicon chip conveyer belt, slicing apparatus 109, the first flaps device 110, the
Two flaps devices 111 are electrically connected.
Power control cabinet can control rotary lifting mechanism 102, into piece vertical conveyer 103, the first lifting gear 106, second
Lifting gear, lifting conveyer belt 108, each silicon chip conveyer belt, slicing apparatus 109, the first flaps device 110, the second flaps device 111
Working condition, to realize the above-mentioned course of work.Specific control mode those skilled in the art can disclose according to the present invention
Content learn, for the sake of convenient, repeat no more.
It will be appreciated by persons skilled in the art that each component in Figure 10 and system shown in Figure 11 may be mounted at frame
On, it can also be mounted on mounting plate or floor.
It optionally, can be with incorporated by reference to Figure 10 and Figure 11, in another kind silicon chip handling system provided in an embodiment of the present invention
Including：Push jack cylinder 127, the push jack cylinder 127 are arranged in the side for the fixture 115 that can clamp quartz boat, can clamp
When silicon chip group sends out quartz boat in quartz boat in the fixture 115 of quartz boat, quartz boat is pushed.It is appreciated that
It is that the speed that silicon chip group sends out quartz boat can be accelerated by push jack cylinder 127, ensures that silicon chip group can efficiently be sent out
Quartz boat.
Figure 10 and first slice receiving mechanism of slice 112 in embodiment illustrated in fig. 11 and second slice receiving mechanism of slice 113 are identical,
As shown in FIG. 12 and 13, first slice receiving mechanism of slice 112 and second slice receiving mechanism of slice 113 may each comprise：Folded box 201,
Spring 202, horizontal support plate 203, side sliding rail 204, baffle 205, the first cylinder 206, guide rod 207, connecting plate 208 and coaming plate 209,
The folded box 201 includes folded box plate and three folded box side plates, and the folded box 201 is towards adjacent silicon chip conveyer belt
002 side is opening, and to receive the silicon chip 001 of adjacent silicon chip conveyer belt transmission, the folded box plate is horizontal by the
One acute angle, the size of the folded box plate and the size of silicon chip match, and opposite folded box side plate is rectangular side with the opening
Plate；
Through-hole is provided on the horizontal support plate 203, the aperture of the through-hole is less than the outer diameter of the spring 202 and is more than
The diameter of the guide rod 207；
The folded box 201 is placed on the baffle 205, and one end of 205 lower surface of the baffle and guide rod 207, which is fixed, to be connected
Connect, the outside of the guide rod 207 is surrounded with the spring 202, the other side of the guide rod 207 pass through the horizontal support plate 203 with
Connecting plate 208 is fixedly connected, the guide rod 207 perpendicular to the connecting plate 208, the spring 202 be located at the baffle 205 with it is described
Between horizontal support plate 203, for the baffle 205 horizontal by the first acute angle, the horizontal support plate 203 is horizontally disposed；
203 lower surface of the horizontal support plate is fixedly installed first cylinder 206, the piston of first cylinder 206
Bar end can push the connecting plate 208 and by the guide rod towards the connecting plate 208, the piston rod of first cylinder 206
207 drive the baffle 205 to move down, and the folded box 201 is made to fall on the side sliding rail 204；
The side sliding rail 204 is obliquely installed, and horizontal by acute angle, the side sliding rail 204 is arranged under the baffle 205
Side, and the side sliding rail 204 is arranged above the horizontal support plate 203, the folded box 201 can be downward along the side sliding rail 204
Sliding；
The coaming plate 209 is set on the outside of the rectangular side panels, to stop 201 slide downward of folded box, the coaming plate
Vertical range between 209 lower end and the side sliding rail 204 is not less than the height of the folded box 201.
In this way, when the silicon chip in slice receiving mechanism of slice is less, by 202 elastic effect of spring, folded box 201 will keep certain height
Degree ensures that drop when silicon chip is passed to slice receiving mechanism of slice from silicon chip conveyer belt is not too large, avoids that silicon chip is caused to damage.With receipts
The increase of silicon chip, is affected by gravity in piece mechanism, and spring 202 is compressed, and folds box 201 and declines, after declining to a certain extent, the
The piston rod of one cylinder 206 pushes the connecting plate 208 and drives the baffle 205 to move down by the guide rod 207, makes institute
Folded box 201 is stated to fall on the side sliding rail 204.Since folded box 201 is fallen on the side sliding rail 204, coaming plate 209 no longer hinders
201 slide downward of folded box is kept off, in this way, under gravity, folding box 201 along 204 slide downward of side sliding rail, into folded box
In storehouse.Optionally, as shown in figure 25, spare folded box 210 can also be placed on folded box 201, in this way when folded box 201 loads centainly
Silicon chip and after 204 slide downward of side sliding rail, the spare folded box 210 of top are fallen under then relying on gravity automatic on baffle 205, from
And realize continuous load.
As shown in figure 14, the slicing apparatus 109 in Figure 10 and embodiment illustrated in fig. 11 may include：Upper sucker 301, lower suction
Disk 302, the first slider-actuated motor 303, the first sliding block 304, the first transmission mechanism 305, horizontal slide rail 306 and the second cylinder
307,
The first slider-actuated motor 303 is connect by first transmission mechanism 305 with first sliding block 304,
First sliding block 304 is set on the horizontal slide rail 306, and the first slider-actuated motor 303 drives described first to slide
Block 304 slides on the horizontal slide rail 306；Optionally, the first transport mechanism 305 and horizontal slide rail 306 can form KK moulds
Group.
First sliding block, 304 lower surface is fixedly connected with second cylinder 307, the piston of second cylinder 307
Bar end is fixedly connected with the upper sucker 301, and second cylinder 307 drives the upper sucker 301 to move up and down；
The lower sucker 302 is fixedly installed on the downside of the 5th silicon chip conveyer belt 120, to adsorb the 5th silicon chip
The lower side silicon wafer for the silicon chip group that conveyer belt 120 transmits；
In the upper side silicon wafer during the slicing apparatus 109 draws the silicon chip group, the 5th silicon chip conveyer belt 120 stops
It only runs, 301 air-breathing of upper sucker adsorbs side silicon wafer, and 302 air-breathing of lower sucker adsorbs lower side silicon wafer, upper suction
Disk 301 moves up under the drive of the second cylinder 307, the separation of silicon chip group；After the separation of silicon chip group, the lower sucker 302 stops
Air-breathing, the lower side silicon wafer continuation in the silicon chip group are transmitted by the 5th silicon chip conveyer belt 120.
It is damaged by the separation of silicon chip group can be avoided upper lower silicon slice from rubbing in separation process by upper and lower sucker
Silicon chip, therefore the slicing apparatus of the present invention, the effective protection silicon chip not frayed in separation that may be implemented silicon chip group.
As shown in Figures 10 and 11, another silicon chip handling system provided in an embodiment of the present invention can also include：First
Silicon chip buffer storage 125 and the second silicon chip buffer storage 126, the first silicon chip buffer storage 125 and the second silicon chip buffer storage 126
Identical, the first silicon chip buffer storage 125 is sleeved on the third silicon chip conveyer belt 118, the second silicon chip buffer storage
126 are sleeved on the 9th silicon chip conveyer belt 124；
As shown in Figure 15 and Figure 16, the first silicon chip buffer storage 125 and the second silicon chip buffer storage 126
To include：Cache driving motor 401, the second transmission mechanism 402 and cache box 403, the caching driving motor 401 and described the
Two transmission mechanisms 402 connect, and second transmission mechanism 402 is connect with the cache box 403, the caching driving motor 401
The cache box 403 is driven to move up and down through second transmission mechanism 402.Figure 16 is cache box in Figure 15 on the directions A
Schematic diagram is both provided with sliding slot on two opposite side plates of the cache box 403 as shown in figure 16；
The 9th silicon chip conveyer belt 124 passes through the cache box of the second silicon chip buffer storage 126, the third silicon chip
Conveyer belt 118 passes through the cache box of the first silicon chip buffer storage 125.
In practical silicon chip production process, the speed of silicon chip group disengaging quartz boat (namely fill boat and unload boat) is than silicon chip lamination
It is fast with the speed of fragment, therefore efficiency can be improved by above-mentioned two silicon chip buffer storage.Detailed process is as follows：Work as quartz boat
In navicular state is unloaded, the silicon chip come out from the gaily decorated basket is after lamination, into buffer storage, when quartz boat is in dress navicular state,
The silicon chip folded is discharged, dress boat speed is accelerated.When unloading boat, first group of silicon chip (two panels) directly reaches slicing apparatus and is divided
Piece, second group enters silicon chip buffer storage, and third group directly reaches slicing apparatus and carries out fragment again, and the 4th group enters silicon chip caching
Device ... and so on, when all silicon chip groups are drawn off from quartz boat, there are 50 groups of fragment completions, 50 groups are stored in silicon chip and delay
In cryopreservation device.Hereafter quartz boat works into luggage boat, and at the same time, the silicon chip group for unloading boat caching constantly discharges, and carries out fragment.
As shown in figure 17, the first lifting gear 106 in Figure 10 and embodiment illustrated in fig. 11 is identical with the second lifting gear,
It may each comprise：Gaily decorated basket driving motor 501, KK modules 502, the second sliding block 503, connecting plate 504 and gaily decorated basket positioning plate 505, flower
Basket driving motor 501 is connect with KK modules 502, and the second sliding block 503 is arranged on KK modules 502, and gaily decorated basket driving motor 501 can be with
The second sliding block 503 is driven to be slided on KK modules 502.Gaily decorated basket positioning plate 505 is connected by connecting plate 504 with the second sliding block 503
It connects.
It is driven by gaily decorated basket driving motor 501, gaily decorated basket positioning plate 505 can move up and down with the gaily decorated basket for being placed on above, work as flower
When basket moves downward, the silicon chip being placed in the gaily decorated basket touches silicon chip conveyer belt, with the rotation of silicon chip conveyer belt, silicon chip quilt
Spread out of the gaily decorated basket.
As shown in Figure 18 and Figure 19, above-mentioned Figure 10 and the first flaps device in embodiment illustrated in fig. 11 and the second flaps device phase
Together, it may each comprise：Flaps driving motor 601, central shaft 602 and turnover panel 603, flaps driving motor 601 are solid with central shaft 602
Fixed connection, turnover panel 603 are arranged on the central shaft 602.
Silicon chip 001 is from the slot that the silicon chip conveyer belt of flaps device side is passed to turnover panel 603.Driving motor 601 drives center
Axis 602 rotates, to drive the turnover panel 603 on centrally disposed axis 602 to rotate.When turnover panel 603 turns over 180 degree, silicon chip 001 from
The side of turnover panel 603 goes to the other side and realizes flaps (top and bottom are exchanged).
As shown in Figure 20 and Figure 21, the rotary lifting mechanism 102 in above-mentioned Figure 10 and embodiment illustrated in fig. 11 may include：
Plane bearing 702, synchronous belt 703, lifter plate 704, sliding block 705, synchronous pulley 706, electric rotating machine 707, feed screw nut 708,
Lifting motor 709, lead screw 710, sliding rail 711 and quartz boat clamping cylinder 712,
Plane bearing 702 is located on lifter plate 704, the round end of plane bearing 702 and the fixture 115 that can clamp quartz boat
Connection, electric rotating machine 707 are located on lifter plate 704 and are connect with synchronous pulley 706, drive synchronous pulley 706 to rotate, by same
The synchronous belt walked on belt wheel 706 drives plane bearing 702 to rotate, and then the fixture 115 that can clamp quartz boat is driven to rotate.
Lifter plate 704 is set to by sliding block 705 on sliding rail 711, and lifting motor 709 is connect with lead screw 710, lead screw 710
Feed screw nut 708 is mounted on lifter plate 704.Lifting motor 709 is by driving lead screw 710 to rotate so that lifter plate 704 is in silk
Elevating movement is carried out along sliding rail 711 under the effect of stem nut 708, and then the fixture 115 that can clamp quartz boat is driven to carry out lifting fortune
It is dynamic.
As shown in FIG. 22 and 23, can be wrapped into piece vertical conveyer 103 in above-mentioned Figure 10 and embodiment illustrated in fig. 11
It includes：Vertical driving motor 1801 supports mainboard 1803, into piece conveyer belt 1804, belt wheel 1805 and main shaft 1807, and vertical driving is electric
Machine 1801 is fixedly connected with main shaft 1807, is driven into piece conveyer belt 1804 by main shaft 1807 and is rotated on belt wheel 1805, described
1803 one end of support mainboard is fixed, and the other end is connect with the belt wheel 1805, to support the support mainboard 1803.
It can be driven by the rotation into piece conveyer belt 1804 of vertical conveyer 103 and be contacted with into piece conveyer belt 1804
Silicon chip movement, and silicon chip is supported, prevents silicon chip vacantly damaged due to side.
As shown in figure 24, in the prior art not over 103 supporting silicon chip 001 of vertical conveyer, then silicon chip 001 is hanging
Side may bend because of gravity, occur damaged.And the vertical conveyer 103 of the present invention can prop up silicon chip
Support, prevents silicon chip since side is vacantly damaged, protects silicon chip.Meanwhile it being uploaded from silicon chip conveyer belt in silicon chip and being sent into quartz boat
When, the part for entering quartz boat with silicon chip increases, and the part that silicon chip is contacted with silicon chip conveyer belt gradually decreases so that silicon chip passes
Band is sent to become smaller the propulsive force of silicon chip.In this case, the present invention can continue to push away silicon chip by vertical conveyer 103
Into ensure that silicon chip enters the efficiency of quartz boat.
It should be noted that herein, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also include other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that
There is also other identical elements in process, method, article or equipment including the element.
Each embodiment in this specification is all made of relevant mode and describes, identical similar portion between each embodiment
Point just to refer each other, and each embodiment focuses on the differences from other embodiments.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the scope of the present invention.It is all
Any modification, equivalent replacement, improvement and so within the spirit and principles in the present invention, are all contained in protection scope of the present invention
It is interior.
Claims (10)
1. a kind of silicon chip guiding mechanism, which is characterized in that be adapted to quartz boat, the silicon chip guiding mechanism includes：Conducting bar promotes
Cylinder and be set on the piston rod of the conducting bar propulsion cylinder into piece conducting bar；
It is described into piece conducting bar towards the quartz boat inside side be zigzag, the bottom into piece conducting bar and the quartz boat
Stick is parallel, it is described into piece conducting bar towards the quartz boat inside side sawtooth tooth pitch and the quartz boat bottom stick saw
The tooth pitch of tooth is identical, it is described into piece conducting bar towards the quartz boat inside side sawtooth tooth space centerline and the quartz
The tooth space centerline of the sawtooth of the bottom stick of boat is in same plane, the crown spacing of the sawtooth of the zigzag side into piece conducting bar
More than the crown spacing of the sawtooth of the bottom stick of the quartz boat；
The conducting bar propulsion cylinder drive is described to move into piece conducting bar, is led into described in piece conducting bar or withdrawal into piece so that propulsion is described
Item, when described in conducting bar propulsion cylinder propulsion into piece conducting bar, the bottom stick that the quartz boat is crossed into piece conducting bar enters
It is described to cross the quartz into piece conducting bar when described in conducting bar propulsion cylinder withdrawal into piece conducting bar inside the quartz boat
The bottom stick of boat leaves inside the quartz boat.
2. silicon chip guiding mechanism according to claim 1, which is characterized in that the material of the silicon chip guiding mechanism is modeling
The tooth of the sawtooth of the tall and big bottom stick in the quartz boat of tooth of material and/or the sawtooth of the zigzag side into piece conducting bar is high.
3. a kind of fixture clamping quartz boat, which is characterized in that including：Bottom plate, two side plates being set on the bottom plate,
Silicon chip guiding mechanism, the side plate connecting plate of described two side sheet rooms and the rotation that is separately positioned on described two side plates clamp gas
Cylinder, described two side plates are respectively left plate and right plate；
The piston-rod end of the rotation clamping cylinder is provided with pressing plate, and the pressing plate is vertical with the piston rod, the rotation
Clamping cylinder rotate and shrink the piston rod, make the pressing plate enter the fixture inside quartz boat end plate bore and with institute
The bottom edge for stating end plate bore is in close contact；
The silicon chip guiding mechanism includes：Conducting bar propulsion cylinder and be set on the piston rod of the conducting bar propulsion cylinder into piece
Conducting bar；The conducting bar propulsion cylinder is fixedly installed on the bottom plate, it is described into piece conducting bar towards the quartz boat inside one
Side is zigzag, described parallel with the bottom stick of the quartz boat into piece conducting bar, it is described into piece conducting bar towards the quartz boat inside
Side sawtooth tooth pitch it is identical as the tooth pitch of sawtooth of bottom stick of the quartz boat, it is described into piece conducting bar towards the quartz
The tooth space centerline of the sawtooth of the bottom stick of the tooth space centerline of the sawtooth of side inside boat and the quartz boat in same plane,
The crown spacing of the sawtooth of the zigzag side into piece conducting bar is more than the crown spacing of the sawtooth of the bottom stick of the quartz boat；
The conducting bar propulsion cylinder drive is described to move into piece conducting bar, is led into described in piece conducting bar or withdrawal into piece so that propulsion is described
Item, when described in conducting bar propulsion cylinder propulsion into piece conducting bar, the bottom stick that the quartz boat is crossed into piece conducting bar enters
It is described to cross the quartz into piece conducting bar when described in conducting bar propulsion cylinder withdrawal into piece conducting bar inside the quartz boat
The bottom stick of boat leaves inside the quartz boat.
4. fixture according to claim 3, which is characterized in that the material of the silicon chip guiding mechanism is plastics and/or institute
State the tooth height into the sawtooth of the tall and big bottom stick in the quartz boat of tooth of the sawtooth of the zigzag side of piece conducting bar.
5. fixture according to claim 3 or 4, which is characterized in that further include：It is set to the locating piece of the bottom plate, institute
Stating locating piece, there is first thickness, the locating piece to be contacted with the bottom of the quartz boat in the fixture.
6. a kind of silicon chip handling system, which is characterized in that including：Quartz boat, rotary lifting mechanism, into piece vertical conveyer,
One gaily decorated basket, second gaily decorated basket, the first lifting gear, the second lifting gear, lifting conveyer belt, a plurality of silicon chip conveyer belt, slicing apparatus,
Any one of first flaps device, the second flaps device, the first slice receiving mechanism of slice, the second slice receiving mechanism of slice, power control cabinet and claim 3 to 5
The fixture,
The quartz boat is located in the fixture, and the fixture is connect with the rotary lifting mechanism, the rotary lifting mechanism
The fixture is driven to lift and rotate；
The first silicon chip conveyer belt, the first lifting dress are provided between first gaily decorated basket and the first flaps device first end
Set and connect with first gaily decorated basket, first gaily decorated basket is driven to be lifted so that the silicon chip in first gaily decorated basket with it is described
First silicon chip conveyer belt contacts；The second silicon chip conveyer belt is provided between second gaily decorated basket and the lifting conveyer belt, it is described
Silicon chip is transmitted on third silicon chip conveyer belt by the second silicon chip conveyer belt by the lifting conveyer belt, second lifting gear
It is connect with second gaily decorated basket, second gaily decorated basket is driven to be lifted, so that the silicon chip in second gaily decorated basket and described the
Two silicon chip conveyer belts contact；
The third silicon chip conveyer belt and the transmission of the 4th silicon chip are set between the first flaps device second end and the quartz boat
Band, adjacent with the first flaps device second end for the third silicon chip conveyer belt, adjacent with the quartz boat is described
4th silicon chip conveyer belt；
The lifting conveyer belt is adjacent with the third silicon chip conveyer belt, the silicon chip on the lifting conveyer belt is transmitted to described
It is overlapped above silicon chip on third silicon chip conveyer belt, forms silicon chip group；
Silicon chip group is transmitted on the 4th silicon chip conveyer belt by the third silicon chip conveyer belt, and the 4th silicon chip conveyer belt will
Silicon chip group transmits in the quartz boat or the silicon chip group in the quartz boat is sent out the quartz boat；
Described vertically arranged into piece vertical conveyer, described one end into piece vertical conveyer is fixed, and is passed by the silicon chip group
It is described into piece vertical conveyer when being sent into the quartz boat or the silicon chip group in the quartz boat being sent out the quartz boat
The other end stretched into the quartz boat by end plate bore, and the end of the other end into piece vertical conveyer and described the
The conveyer belt in top of four silicon chip conveyer belts is in same plane and the plane is parallel with horizontal plane, is transmitted in silicon chip group
Enter in the quartz boat or during being transferred out the quartz boat, the end of the other end into piece vertical conveyer with
Silicon chip group bottom contacts, and is supported to silicon chip group；
The 4th silicon chip conveyer belt, the 9th silicon chip conveyer belt and are disposed between the quartz boat and the slicing apparatus
Five silicon chip conveyer belts, the 5th silicon chip conveyer belt pass through the slicing apparatus, the slicing apparatus and first plate collecting machine
It is provided with the 6th silicon chip conveyer belt between structure, the 7th is provided between the 5th silicon chip conveyer belt and the second flaps device first end
Silicon chip conveyer belt is provided with the 8th silicon chip conveyer belt between the second flaps device second end and second slice receiving mechanism of slice；
After silicon chip group in the quartz boat is sent out the quartz boat by the 4th silicon chip conveyer belt, the silicon chip group is passed
It is sent on the 9th silicon chip conveyer belt, the silicon chip group is transmitted to the 5th silicon chip and transmitted by the 9th silicon chip conveyer belt
It takes, the silicon chip group that the slicing apparatus carrys out the 5th silicon chip conveyer belt transmission carries out fragment, will be in the silicon chip group
Upper side silicon wafer is placed on the 6th silicon chip conveyer belt, and the lower side silicon wafer in the silicon chip group is made to continue to pass in the 5th silicon chip
It send and takes transmission；
Silicon chip is passed to first slice receiving mechanism of slice by the 6th silicon chip conveyer belt, and silicon chip is passed to by the 8th silicon chip conveyer belt
Second slice receiving mechanism of slice；
The appliance of the power control cabinet respectively with rotary lifting mechanism, into piece vertical conveyer, the first lifting gear, second liter
Falling unit, lifting conveyer belt, each silicon chip conveyer belt, slicing apparatus, the first flaps device, the second flaps device are electrically connected.
7. system according to claim 6, which is characterized in that first slice receiving mechanism of slice and the second slice receiving mechanism of slice phase
Together, first slice receiving mechanism of slice and second slice receiving mechanism of slice include：Folded box, spring, horizontal support plate, side sliding rail, baffle, the
One cylinder, guide rod, connecting plate and coaming plate,
The folded box includes folded box plate and three folded box side plates, and the folded box is to open towards the side of adjacent silicon chip conveyer belt
Mouthful, to receive the silicon chip of adjacent silicon chip conveyer belt transmission, the folded box plate is horizontal by the first acute angle, the folded cassette bottom
The size of plate and the size of silicon chip match, and opposite folded box side plate is rectangular side panels with the opening；
Through-hole is provided on the horizontal support plate, the aperture of the through-hole is less than the outer diameter of the spring and more than the guide rod
Diameter；
The folded box is placed on the baffle, and the baffle lower surface is fixedly connected with one end of the guide rod, outside the guide rod
Gusset is wound with the spring, and the other side of the guide rod is fixedly connected across the horizontal support plate with the connecting plate, the guide rod
Perpendicular to the connecting plate, the spring is between the baffle and the horizontal support plate, and the baffle is horizontal by first
Acute angle, the horizontal support plate are horizontally disposed；
The horizontal support plate lower surface is fixedly installed first cylinder, and the piston-rod end of first cylinder is described in
The piston rod of connecting plate, first cylinder can push the connecting plate and drive the baffle to move down by the guide rod, make
The folded box is fallen on the side sliding rail；
The side sliding rail is obliquely installed, and horizontal by acute angle, the side sliding rail is arranged below the baffle, and the side is slided
Rail is arranged above the horizontal support plate, and the folded box can be along the side sliding rail slide downward；
The coaming plate is set on the outside of the rectangular side panels, to stop the folded box slide downward, the lower end of the coaming plate and institute
State the height that the vertical range between the sliding rail of side is not less than the folded box.
8. the system described according to claim 6 or 7, which is characterized in that the slicing apparatus includes：Upper sucker, lower sucker,
One slider-actuated motor, the first sliding block, the first transmission mechanism, horizontal slide rail and the second cylinder,
The first slider-actuated motor is connect by first transmission mechanism with first sliding block, and first sliding block is set
It is placed on the horizontal slide rail, the first slider-actuated motor drives first sliding block to be slided on the horizontal slide rail；
First sliding block lower surface is fixedly connected with second cylinder, the piston-rod end of second cylinder with it is described on
Sucker is fixedly connected, and second cylinder drives the upper sucker to move up and down；
The lower sucker is fixedly installed on the downside of the 5th silicon chip conveyer belt, is transmitted with adsorbing the 5th silicon chip conveyer belt
Silicon chip group lower side silicon wafer；
In the upper side silicon wafer during the slicing apparatus draws the silicon chip group, the 5th silicon chip conveyer belt is out of service, institute
It states sucker air-breathing and adsorbs side silicon wafer, the lower sucker air-breathing adsorbs lower side silicon wafer, and the upper sucker is described second
It is moved up under the drive of cylinder, the silicon chip group separation；After the silicon chip group separation, the lower sucker stops suction, described
Lower side silicon wafer in silicon chip group continues to be transmitted by the 5th silicon chip conveyer belt.
9. system according to claim 6, which is characterized in that further include：First silicon chip buffer storage and the second silicon chip are slow
Cryopreservation device, the first silicon chip buffer storage is identical with the second silicon chip buffer storage, the first silicon chip buffer storage set
On the third silicon chip conveyer belt, the second silicon chip buffer storage is sleeved on the 9th silicon chip conveyer belt；
The first silicon chip buffer storage and the second silicon chip buffer storage include：Cache driving motor, the second driver
Structure and cache box, the caching driving motor are connect with second transmission mechanism, second transmission mechanism and the caching
Case connects, and the caching driving motor drives the cache box to move up and down through second transmission mechanism, the cache box
It is both provided with sliding slot on two opposite side plates；
The 9th silicon chip conveyer belt passes through the cache box of the second silicon chip buffer storage, the third silicon chip conveyer belt to pass through
The cache box of the first silicon chip buffer storage.
10. system according to claim 6, which is characterized in that described to include into piece vertical conveyer：Vertical driving electricity
Machine supports mainboard, into piece conveyer belt, belt wheel and main shaft, and the vertical driving motor is fixedly connected with the main shaft, by described
Main shaft is rotated into piece conveyer belt on the belt wheel described in driving, and described support mainboard one end is fixed, the other end and the belt wheel
Connection, to support the support mainboard.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510021849.1A CN105845608B (en) | 2015-01-15 | 2015-01-15 | Silicon chip guiding mechanism, the fixture that quartz boat can be clamped and silicon chip handling system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201510021849.1A CN105845608B (en) | 2015-01-15 | 2015-01-15 | Silicon chip guiding mechanism, the fixture that quartz boat can be clamped and silicon chip handling system |
Publications (2)
| Publication Number | Publication Date |
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| CN105845608A CN105845608A (en) | 2016-08-10 |
| CN105845608B true CN105845608B (en) | 2018-09-04 |
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| CN201510021849.1A Expired - Fee Related CN105845608B (en) | 2015-01-15 | 2015-01-15 | Silicon chip guiding mechanism, the fixture that quartz boat can be clamped and silicon chip handling system |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106271316A (en) * | 2016-08-31 | 2017-01-04 | 苏州浩锐石英科技有限公司 | Quartz boat automatic sheet-feeding welding fixture |
| CN107681019A (en) * | 2017-09-19 | 2018-02-09 | 中建材浚鑫科技有限公司 | The feeding and blanking device for spreading or annealing for solar cell |
| CN108673374A (en) * | 2018-05-24 | 2018-10-19 | 苏州旭玛电子科技有限公司 | A kind of multiple tooth clamping device |
| CN108792619A (en) * | 2018-05-24 | 2018-11-13 | 苏州旭玛电子科技有限公司 | A kind of sheet glass neatening device |
| CN110813864B (en) * | 2019-11-18 | 2021-11-23 | 长江存储科技有限责任公司 | Wafer cleaning assembly, cleaning equipment and cleaning method |
| CN110739261B (en) * | 2019-11-20 | 2024-09-27 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Jacking mechanism of quartz boat silicon wafer |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101866990B (en) * | 2010-06-18 | 2011-11-23 | 无锡尚德太阳能电力有限公司 | Automatic wafer ascending and descending device of quartz boat |
| CN201753201U (en) * | 2010-06-18 | 2011-03-02 | 无锡尚德太阳能电力有限公司 | Automatic sheet retracting mechanism for load-bearing box |
| CN202076299U (en) * | 2011-03-18 | 2011-12-14 | 无锡尚德太阳能电力有限公司 | Silicon wafer guiding loading component and silicon wafer reloading device possessing the guiding loading component |
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