CN105830156B - Substrate for magnetic disc and disk - Google Patents
Substrate for magnetic disc and disk Download PDFInfo
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- CN105830156B CN105830156B CN201480069623.2A CN201480069623A CN105830156B CN 105830156 B CN105830156 B CN 105830156B CN 201480069623 A CN201480069623 A CN 201480069623A CN 105830156 B CN105830156 B CN 105830156B
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- substrate
- main surface
- inclined plane
- magnetic disc
- crest line
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/739—Magnetic recording media substrates
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- G11B5/7315—
Abstract
A kind of substrate for magnetic disc of remaining foreign matter on magnetosphere on main surface that will not be after film forming is provided.A kind of substrate for magnetic disc, it possesses：1st inclined plane, it is formed in the outside on the main surface of substrate；2nd inclined plane, it connects the side wall of the 1st inclined plane and substrate；And crest line, it is formed by the 1st inclined plane and the 2nd inclined plane, and the crest line is arranged at the position on the inside of the thickness direction that substrate is leaned on than the main surface.
Description
Technical field
The present invention relates to substrate for magnetic disc and disk.
Background technology
Currently, in PC or DVD (Digital Versatile Disc：Digital video laser disc) tape deck etc.
In, it is built-in with hard disk unit (HDD to carry out data record：Hard Disk Drive).In hard disk unit, use
Magnetospheric disk is provided with substrate, magnetic recording letter is carried out to magnetosphere using the magnetic head slightly suspended on the face of disk
The record of breath or reading.
In order to form magnetosphere on substrate, held on using the fixture of claw-like substrate end face 3~4 at position carry out
Keep, keep the state to deliver the substrate to film forming room, pass through the vapor phase growths such as vacuum vapour deposition, sputtering method, CVD, IBD methods
Method forms the film such as magnetosphere or protective layer on the main surface of substrate.
When carrying out the holding or conveying of substrate, end face may be produced small breach by friction, so as to produce dust
Or rupture, therefore chamfering is implemented to the end of the periphery of substrate.For example, having been recorded substrate in patent document 1
Main surface is set as the technology of more than 48 ° and less than 80 ° with fillet surface angulation.
Citation
Patent document
Patent document 1：Japanese Unexamined Patent Publication 11-265506 publications
The content of the invention
The invention problem to be solved
If keeping implementing peripheral part the peripheral end of the substrate of chamfering using fixture, and carry out being used to form disk
Magnetic film etc. into film process, then detected foreign matter on the main surface near the contact site with holder contacts of substrate.
Therefore, it is an object of the invention to provide a kind of disk base of remaining foreign matter on main surface that will not be after film forming
Plate.
The means used to solve the problem
In substrate for magnetic disc, for when with film forming the holding jig (holding jig) of used claw-like contact
After the detected foreign matter in the vicinity of contact site is analyzed, confirm：The composition of foreign matter is the film when forming magnetosphere etc.
The composition of composition.Due to observed stepped construction in a part for foreign matter, therefore, confirm after being examined to fixture
Arrive：At the abutting part abutted with substrate, a part for the composition for the film composition being deposited on the surface of fixture is peeled off.
This may be considered：In substrate and holder contacts, magnetic film being deposited on fixture etc. is peeled off, and the magnetic film of peeling is as different
Thing attachment (transfer attachment) is in the main near surface of substrate.Following situations are considered as the background of above-mentioned phenomenon：In recent years, in order to change
There is gradually increased tendency in kind production efficiency, transporting velocity, in order to prevent substrate during conveying from falling, and enhancing, which is utilized, holds folder
Have the power held, or the end of holding jig is formed as V-shape.
It is furthermore observed that defect as follows：It is starting point in disk that the defect, which has using the contact site with fixture,
Radial such vestige that disperses on main surface.Analyzed in detail, find to be mixed with magnetic film or the centre for disk
The metal ingredient of layer etc..On its reason, distinguish that reason is：Due to passing through plasma CVD method or ion beam deposition
(IBD) bias of substrate is put on during the diaphragm of method formation DLC (DLC), causes the contact with disk in holding jig
Arc discharge is there occurs at point.Currently, in order to realize filming on diaphragm, above-mentioned film build method turns into main flow, still,
In order to obtain finer and close film, it is found that bias has increased tendency.
So, for conventional substrate, when being contacted at chamfered section with holding jig, it some times happens that various failures.
In the production of disk, multiple substrates of feeding are kept successively using multiple holding jigs in 1 film formation device
And they are delivered to film forming room's progress film forming.Now, there is such situation：Strictly speaking, the shape of holding jig is not
It is all identical, but there is subtle difference.Further, since holding jig is reused, thus surface state according to away from
Change from the time that film forming starts.If for example, the accumulating amount accumulated on the surface of fixture of composition of film composition with when
Between process and increase, then when fixture is contacted with substrate, the composition of the film accumulated composition is easily peeled off as foreign matter.By
In the reason for these are complicated, the position of the contact point of each substrate and holding jig or the foreign matter peeled off can produce deviation.
The inventors have found that：In the case where contact point is in the main near surface of substrate, above mentioned problem becomes notable, and it was found that：
Studied by the shape to end, the random swing of the position of contact point can be eliminated, so as to alleviate above mentioned problem.
In order to solve above-mentioned problem, the first form of the invention is substrate for magnetic disc, it is characterised in that the disk base
Plate possesses：1st inclined plane, it is connected with the outboard wheel profile on the main surface of substrate；2nd inclined plane, it connects the described 1st and inclined
The side wall on inclined-plane and substrate；And crest line, it is formed by the 1st inclined plane and the 2nd inclined plane, and the crest line is set
At the position on the inside of the thickness direction than the main surface by substrate.
Preferably, the main surface is being set with obtuse angle formed by the 1st inclined plane as θ1When, 130 °≤θ1≦170°。
Preferably, the 1st inclined plane is being set with obtuse angle formed by the 2nd inclined plane as θ3When, 110 °≤θ3≦
170°。
Preferably, obtuse angle formed by the side wall of the 2nd inclined plane and substrate is being set as θ4When, 130 °≤θ4≦
170°。
Preferably, from radial distance untill the crest line of the outboard wheel profile on the main surface more than 10 μm.
Preferably, distance of the crest line relative to the main surface on the thickness direction of substrate is more than 10 μm.
Another form of the present invention is substrate for magnetic disc, it is characterised in that the substrate for magnetic disc has：Main surface；Side
Wall, it is vertical with the main surface；And fillet surface, it has in the section vertical with the main surface and side wall connects
2 straight line portions of the main surface and the side wall are connect, the boundary portion of 2 straight line portions is on the surface of the substrate
It is upper to form the shape protruded laterally.
Another form of the present invention is disk, it is characterised in that on the main surface of any one above-mentioned substrate for magnetic disc
Top at least provided with magnetosphere.
The effect of invention
Crest line and folder that the substrate of the present invention is formed in the fillet surface by the 1st inclined plane and the 2nd this 2 stages of inclined plane
Tool is abutted.Abutting part even in crest line and fixture produces spall, is tilted due to having the 1st between crest line and main surface
Face, therefore, if the splashing distance of spall is not above the distance from crest line untill the outboard wheel profile on main surface, is shelled
Junk will not reach main surface, and spall can be prevented relative to the attachment on main surface.On the other hand, flying even in spall
Splash distance and exceeded distance from crest line untill the outboard wheel profile on main surface, substrate is leaned on than main surface because crest line is arranged on
Thickness direction on the inside of position, and the 1st inclined plane tilts relative to main surface, therefore, on the path of the anticipation of spall
Or main surface is not present on moving direction, so as to prevent spall relative to the attachment on main surface.
Brief description of the drawings
Fig. 1 is the side view of the substrate for magnetic disc of present embodiment.
Fig. 2 is the enlarged drawing in the II portions in Fig. 1.
Fig. 3 is the enlarged drawing of the abutting part abutted with fixture of substrate for magnetic disc.
Fig. 4 be the substrate for magnetic disc of comparative example 2 with Fig. 2 identical enlarged drawings.
Embodiment
Hereinafter, the substrate for magnetic disc of embodiments of the present invention is described in detail.
Substrate for magnetic disc is circular plate shape, and is the ring-type for diging up the circular centre bore concentric with periphery.
Magnetosphere (posting field) is formed with the area on the two sides of substrate for magnetic disc, disk is consequently formed.It is used as disk
With substrate, metal substrate (aluminium alloy base plate, the aluminium alloy base plate for being coated with NiP systems alloy) or glass base can be used
Plate.In particular it is preferred that using glass substrate, wherein, glass substrate is with the property for being difficult to be plastically deformed than metal substrate etc.
Matter.In the following description, illustrated for using glass as the situation of substrate for magnetic disc, but substrate for magnetic disc can also
It is metal substrate.
Fig. 1 is the side view of the substrate of embodiments of the present invention, and Fig. 2 is the enlarged drawing in the II portions in Fig. 1.
In the substrate 1 of present embodiment, falling for 2 stages is provided with the part being connected with main surface of end face
Edged surface.That is, substrate 1 has main surface 10 and end face 20, and end face 20 has the 21, the 1st inclined plane 22 of side and the 2nd inclined plane
23.As shown in Fig. 2 in the section vertical with side wall 21 with main surface 10, fillet surface has main surface 10 and side wall
21 2 straight line portions (the 1st inclined plane 22 and the 2nd inclined plane 23) connected.
As shown in Fig. 2 the 1st inclined plane 22 is connected with the contour line C (outboard wheel profile) of the radial outside on main surface 10.
That is, contour line C is the boundary line (boundary portion) of the main inclined plane 22 of surface 10 and the 1st.1st inclined plane 22 with main surface 10 and side
There is the part as straight line in the vertical section of wall 21.
2nd inclined plane 23 connects the 1st inclined plane 22 and side wall 21.2nd inclined plane 23 with main surface 10 and side wall
There is the part as straight line in 21 vertical sections.
By the 1st inclined plane 22 and the 2nd inclined plane 23, crest line E is formed as ring-type.Crest line E is the connection He of the 1st inclined plane 22
The connecting portion of 2nd inclined plane 23, and be the boundary portion of the 1st inclined plane 22 and the 2nd inclined plane 23.Crest line E is arranged on than main table
Face 10 is leaned at the position on the inside of the thickness direction of substrate 1.Crest line E forms the shape protruded towards outside on the surface of substrate 1.
When forming magnetosphere, substrate 1 is kept at end face 20 by fixture 30 (reference picture 3).Fig. 3 is to show forming magnetic
Property layer when substrate 1 and fixture 30 abutting part enlarged drawing.As shown in figure 3, substrate 1 is abutted at crest line E with fixture 30.
At the abutting part abutted with fixture 30 of substrate 1, be attached to foreign matter on fixture 30 and peel off, even if producing spall, due to
There is the 1st inclined plane 22 between crest line E and main surface 10, therefore, if the splashing distance of spall is not above from crest line E
Distance untill the outboard wheel profile C on main surface 10, then spall will not reach main surface 10.Therefore, it is possible to prevent from peeling off
Attachment of the thing relative to main surface 10.On the other hand, exceeded even in the splashing distance of spall from crest line E to main surface 10
Outboard wheel profile C untill distance, due to crest line E be arranged on than main surface 10 by substrate 1 thickness direction on the inside of position,
And the 1st inclined plane 22 tilted relative to main surface 10, therefore, on the track of spall be not present main surface 10, so as to
Prevent spall relative to the attachment on main surface 10.
Also, as shown in figure 4, if chamfered section between main surface 10 and side wall 21 is circle, due to substrate with
The deviation of the relative position of fixture and make it that the contact point of substrate and fixture is likely to be at the optional position of chamfered section, therefore, fall
Vicinity of the contact point that corner is contacted with holding jig sometimes in main surface 10.Master is in the contact point of chamfered section and fixture
In the case of the vicinity on surface 10, there is following worry：It is starting point in master using the contact point on substrate for magnetic disc to be manufactured
Adhere to foreign matter on surface, or form defect.
On the other hand, in the present embodiment, there is deviation, substrate 1 in the relative position of substrate 1 and fixture 30
With the contact point of fixture 30 all the time at crest line E position.Therefore, it is possible to make the contact point of substrate 1 and fixture 30 fully remote
From main surface 10, so as to suppress foreign matter relative to the attachment on main surface 10 and the formation of defect.
Obtuse angle formed by the main inclined plane 22 of surface 10 and the 1st is being set as θ1When, preferably 130 °≤θ1≦170°。
If θ1110 ° of ＜, then be difficult to make substrate 1 be kept by fixture 30 at crest line E.If substrate 1 is not in crest line E
Place is kept but is kept at the 1st inclined plane 22 or at the outboard wheel profile C on main surface 10, then is supported with fixture 30
At the abutting part connect, peeled off in the foreign matter for being attached to fixture 30 and in the case of producing spall, spall may reach master
Surface 10.
On the other hand, if θ1170 ° of ＞, then can not open the crest line E abutted against from substrate 1 and fixture 30 of spall
The track of beginning is sufficiently far apart main surface 10, and spall may be attached to main surface 10.
Here, outboard wheel profile C of the 1st inclined plane 22 along circular main surface 10 is set, and be formed as the frustum of a cone
Side shape, wherein, the frustum of a cone with main surface 10 for upper bottom, using the plane containing crest line E to go to the bottom, and the circular cone
The central shaft of platform is consistent with the central shaft of substrate 10.Obtuse angle θ1Be the frustum of a cone side bus with it is blunt formed by main surface 10
Angle.That is, obtuse angle θ1Be in the section (plane of the central shaft comprising substrate 1) of the radial direction of substrate 1 by the 1st inclined plane 22 with
Angle formed by main surface 10.
Obtuse angle formed by the main inclined plane 23 of surface 10 and the 2nd is being set as θ2When, θ2＜ θ1.If θ2≧θ1, then can not be formed
Crest line E.
Here, the 2nd inclined plane 23 is formed as the shape of the side of such frustum of a cone：The frustum of a cone is to contain crest line
E plane is upper bottom, using the plane containing the crest line F being made up of the 2nd inclined plane 23 with side wall 21 as bottom, and the circular cone
The central shaft of platform is consistent with the central shaft of substrate 10, obtuse angle θ2Be the frustum of a cone side bus with it is blunt formed by main surface 10
Angle.That is, obtuse angle θ2It is by the 2nd inclined plane 23 and main surface in the section (plane for including central shaft) of the radial direction of substrate 1
Angle formed by 10.
Obtuse angle formed by the 1st inclined plane 22 and the 2nd inclined plane 23 is being set as θ3When, preferably 110 °≤θ3≦170°.If
θ3110 ° of ＜, then when keeping substrate 1 using fixture 30 at crest line E, breach may be produced on substrate 1.On the other hand, if
θ3170 ° of ＞, then be likely difficult at crest line E keep substrate 1 using fixture 30.
Here, θ3It is the frustum of a cone of the 2nd inclined plane 23 of bus and formation of the side for the frustum of a cone to form the 1st inclined plane 22
Side bus formed by obtuse angle.That is, obtuse angle θ3Be the radial direction of substrate 1 section (central shaft comprising substrate 1 it is flat
Face) in the angle as formed by the 1st inclined plane 22 and the 2nd inclined plane 23.Now, θ3+θ1-θ2=180 °.
The 2nd inclined plane 23 is being set with obtuse angle formed by side wall 21 as θ4When, preferably 130 °≤θ4≦170°.If θ4
130 ° of ＜, then be likely difficult at crest line E keep substrate 1 using fixture 30.On the other hand, if θ4170 ° of ＞, then in crest line E
When place keeps substrate 1 using fixture 30, breach may be produced on substrate 1.
Here, θ4It is the bus and obtuse angle formed by side wall 21 of the side for the frustum of a cone to form the 2nd inclined plane 23.That is,
Obtuse angle θ4It is by the 2nd inclined plane 23 and side wall in the section (plane of the central shaft comprising substrate 1) of the radial direction of substrate 1
Angle formed by 21.Now, θ1+θ3+θ4=450 °.
Radial distance W (reference picture 2) from the substrate 1 of the outboard wheel profile C on main surface 10 untill crest line E is preferably 10
More than μm.If W is less than 10 μm, prevent spall from may diminish relative to the effect of the attachment on main surface 10.
In addition, crest line E relative to main surface 10 on the thickness direction of substrate 1 apart from H (reference picture 2) preferably at 10 μm
More than.If H is less than 10 μm, prevent spall from may diminish relative to the effect of the attachment on main surface 10.
Next, the manufacture method to the substrate for magnetic disc of embodiments of the present invention is described in detail.
(manufacture method of glass substrate for disc)
Next, as the example of substrate for magnetic disc, the manufacture method to glass substrate for disc is illustrated.First,
Disk is made with glass blanket (pressure forming processing) by pressure forming, wherein, the disk is with a pair with glass blanket
The blank of the glass substrate for disc of the tabular on main surface.Here, disk glass blanket (being only called glass blanket later) is
The glass plate of the toroidal made by pressure forming, is the form before digging out centre bore.
Next, forming circular hole in the core for the glass blanket produced so as to form the glass of ring-shaped (annular shape)
Glass substrate (circular hole formation processing).Next, carrying out shape processing (shape working process) to forming round-meshed glass substrate.
In shape processing, by carrying out the chamfer machining in 2 stages, formed above-mentioned the 1st inclined plane 22 and the 2nd inclined plane 23 by
This, generates glass substrate.
(shape working process)
In the shape working process of present embodiment, the end of the glass substrate after handling circular hole formation carries out 2
The chamfer machining in stage.Thus, the side wall 21 vertical with main surface 10 is formed on the end face of glass substrate and main table is connected
Face 10 and the fillet surface (the 1st inclined plane 22 and the 2nd inclined plane 23) in 2 stages of side wall 21.
For example, forming the 2nd inclined plane 23 in the chamfer machining in the 1st stage, then change in the chamfer machining in the 2nd stage
Varied angle and form the 1st inclined plane 22, be consequently formed the outboard wheel profile C and crest line E on main surface 10.
Alternatively, it is also possible to form the 1st inclined plane 22 in the chamfer machining in the 1st stage, then the chamfering in the 2nd stage adds
Change angle in work and form the 2nd inclined plane 23.
(processing after shape working process)
Next, carrying out end surface grinding (end surface grinding processing) for carrying out the glass substrate after shape processing.And to entering
The glass substrate after end surface grinding of having gone carries out the grinding (grinding processing) based on bonded-abrasive.Next, to glass substrate
Main surface carries out the 1st grinding (the 1st milled processed).Next, carrying out chemical enhanced (chemical intensification treatment) to glass substrate.Connect
Get off, to carried out it is chemical enhanced after glass substrate carry out the 2nd grinding (the 2nd milled processed).Processing more than, is obtained
Glass substrate for disc.
So, due to carrying out various processing after shape is processed, therefore, the crest line E in resulting substrate for magnetic disc can
To carry such as radius of curvature in cross sectional shape as less than 50 μm of circular arc.If radius of curvature is more than 50 μm, in the presence of such as
Lower situation：The holding position that holding jig holds substrate for magnetic disc is significantly offset.Crest line E radius of curvature more preferably 20 μm with
Under.Even if crest line E carries the circular arc of this degree, also can fully obtain prevents spall relative to the attachment on main surface 10
Effect.In addition, crest line E radius of curvature is preferably more than 1 μm, more preferably more than 5 μm.If less than 1 μm, then carrying out
Breach may be produced during holding.
As mentioned above, according to the substrate 1 of present embodiment, due to being abutted at crest line E with fixture 30, therefore, i.e.,
The abutting part abutted in substrate 1 with fixture 30 is produced spall, tilted due to having the 1st between crest line E and main surface 10
Face 22, therefore, if the splashing distance of spall be not above from crest line E untill the outboard wheel profile C on main surface 10 away from
From then spall will not reach main surface 10, and spall can be prevented relative to the attachment on main surface 10.On the other hand, even if
The distance from crest line E untill the outboard wheel profile C on main surface 10 is exceeded in the splashing distance of spall, because crest line E is set
The position on the inside of the thickness direction than main surface 10 by substrate 1 is put, and the 1st inclined plane 22 is tilted relative to main surface 10, because
This, is not present main surface 10, so as to prevent spall relative to the attachment on main surface 10 on the track of spall.
Also, the invention is not restricted to the above-described embodiment and examples, the scope of purport of the invention can not departed from
It is interior to carry out various improvement and change.
Hereinafter, the experimental example of the present invention is illustrated.
(embodiment)
In embodiment 1~9, the chamfer machining in 2 stages is carried out to substrate, substrate is manufactured that.In embodiment 1~9
In, change θ as shown in table 11、θ2、θ3、θ4Manufacture substrate.Substrate obtained by being kept using fixture as shown in Figure 3,
And sequentially form basalis, magnetosphere, protective layer using the film formation device for possessing multiple vacuum chambers.Also, basalis and magnetic
Property layer formed by sputtering method, also, on one side substrate is biased while by plasma CVD method formed DLC protective layer.
The disk of 10000 has been manufactured respectively.
(comparative example)
In comparative example 1, by the chamfer machining in 1 stage, the chamfer angle only formd relative to main surface is θ2
And be θ relative to the angle of side wall4Inclined plane.
In comparative example 2, as shown in figure 4, implementing chamfer machining to substrate using shaping grinding apparatus as follows：State into
Type grinding tool is formed as making chamfered section turn into the circle that radius of curvature R is 150 μm in cross sectional shape.
(measurement of foreign matter and defect)
Using the surface defect inspection apparatus of laser type, the master to foring the substrate after basalis, magnetosphere, protective layer
Surface is checked, the foreign matter detected on the main surface of disk or defect are carefully investigated by visual observation or using SEM,
Measure and observed because of the foreign matter (specific foreign matter) that the film that is deposited on holding jig is peeled off and produces or because electric arc is put
The number of the substrate of radial defect (specific defect) caused by electricity.
Result is shown in table 1.
[table 1]
In embodiment 1~9, compared with comparative example 1~2, foreign matter quantity can be reduced.
In comparative example 1, it is believed that：Substrate and holding jig are contacted on main surface with the boundary of fillet surface, with this
Contact point is that starting point is attached with foreign matter on main surface or forms defect.
In comparative example 2, the quantity of the substrate with foreign matter or defect is significantly increased compared with embodiment.In such as comparative example
2 make like that chamfered section for it is circular when, the contact point of substrate and holding jig is likely to be at the optional position of chamfered section, therefore, by
In substrate and the deviation of the relative position of holding jig, there is the contact point that chamfered section contacts with holding jig and be in main surface 10
Vicinity situation.It is therefore contemplated that：The contact point contacted in chamfered section with holding jig is in the vicinity on main surface 10
In substrate for magnetic disc, it is attached with foreign matter on main surface by starting point of the contact point or is formed defective.
On the other hand, in embodiment 1~9, it is believed that be：Deposited in the relative position of substrate and holding jig
In deviation, the contact point that chamfered section is contacted with holding jig is in crest line E position all the time, therefore, it is possible to make contact point and master
Sufficient distance is left on surface, so as to suppress the attachment of foreign matter or the formation of defect.
Claims (12)
1. a kind of substrate for magnetic disc, wherein,
The substrate for magnetic disc possesses：
1st inclined plane, it is formed in the outside on the main surface of substrate；
2nd inclined plane, it connects the side wall of the 1st inclined plane and substrate；And
Crest line, it is formed by the 1st inclined plane and the 2nd inclined plane,
The crest line is arranged at the position on the inside of the thickness direction that substrate is leaned on than the main surface,
The main surface is being set with obtuse angle formed by the 1st inclined plane as θ1When, 130 °≤θ1≦170°。
2. a kind of substrate for magnetic disc, wherein,
The substrate for magnetic disc possesses：
1st inclined plane, it is formed in the outside on the main surface of substrate；
2nd inclined plane, it connects the side wall of the 1st inclined plane and substrate；And
Crest line, it is formed by the 1st inclined plane and the 2nd inclined plane,
The crest line is arranged at the position on the inside of the thickness direction that substrate is leaned on than the main surface,
The 1st inclined plane is being set with obtuse angle formed by the 2nd inclined plane as θ3When, 110 °≤θ3≦170°。
3. substrate for magnetic disc according to claim 1 or 2, wherein,
Obtuse angle formed by the side wall of the 2nd inclined plane and substrate is being set as θ4When, 130 °≤θ4≦170°。
4. substrate for magnetic disc according to claim 1 or 2, wherein,
From the radial distance of the outboard wheel profile on the main surface untill the crest line more than 10 μm.
5. substrate for magnetic disc according to claim 3, wherein,
From the radial distance of the outboard wheel profile on the main surface untill the crest line more than 10 μm.
6. substrate for magnetic disc according to claim 1 or 2, wherein,
Distance of the crest line relative to the main surface on the thickness direction of substrate is more than 10 μm.
7. substrate for magnetic disc according to claim 3, wherein,
Distance of the crest line relative to the main surface on the thickness direction of substrate is more than 10 μm.
8. substrate for magnetic disc according to claim 4, wherein,
Distance of the crest line relative to the main surface on the thickness direction of substrate is more than 10 μm.
9. substrate for magnetic disc according to claim 5, wherein,
Distance of the crest line relative to the main surface on the thickness direction of substrate is more than 10 μm.
10. a kind of substrate for magnetic disc, wherein,
The substrate for magnetic disc has：
Main surface；
Side wall, it is vertical with the main surface；And
Fillet surface, it has in the section vertical with the main surface and side wall is connected the main surface and the side wall
2 straight line portions,
The boundary portion of 2 straight line portions forms the shape protruded laterally on the surface of the substrate,
1st straight line portion of in 2 straight line portions are set and described main surface connection with it is blunt formed by the main surface
Angle is θ1When, 130 °≤θ1≦170°。
11. a kind of substrate for magnetic disc, wherein,
The substrate for magnetic disc has：
Main surface；
Side wall, it is vertical with the main surface；And
Fillet surface, it has in the section vertical with the main surface and side wall is connected the main surface and the side wall
2 straight line portions,
The boundary portion of 2 straight line portions forms the shape protruded laterally on the surface of the substrate,
Obtuse angle formed by 2 straight line portions is being set as θ3When, 110 °≤θ3≦170°。
12. a kind of disk, it is characterised in that
The disk has the substrate for magnetic disc described in any one in claim 1~11, in the substrate for magnetic disc
The top on main surface is at least provided with magnetosphere.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710918833.XA CN107665716B (en) | 2013-12-27 | 2014-12-26 | Magnetic disk substrate and magnetic disk |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-271530 | 2013-12-27 | ||
| JP2013271530 | 2013-12-27 | ||
| PCT/JP2014/084699 WO2015099177A1 (en) | 2013-12-27 | 2014-12-26 | Magnetic disk-use substrate and magnetic disk |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710918833.XA Division CN107665716B (en) | 2013-12-27 | 2014-12-26 | Magnetic disk substrate and magnetic disk |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105830156A CN105830156A (en) | 2016-08-03 |
| CN105830156B true CN105830156B (en) | 2017-10-20 |
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ID=53479015
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710918833.XA Active CN107665716B (en) | 2013-12-27 | 2014-12-26 | Magnetic disk substrate and magnetic disk |
| CN201480069623.2A Active CN105830156B (en) | 2013-12-27 | 2014-12-26 | Substrate for magnetic disc and disk |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710918833.XA Active CN107665716B (en) | 2013-12-27 | 2014-12-26 | Magnetic disk substrate and magnetic disk |
Country Status (5)
| Country | Link |
|---|---|
| JP (2) | JP5922313B2 (en) |
| CN (2) | CN107665716B (en) |
| MY (1) | MY183814A (en) |
| SG (2) | SG10201704694XA (en) |
| WO (1) | WO2015099177A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2012024899A (en) * | 2010-07-26 | 2012-02-09 | Showa Denko Kk | Method of manufacturing disk substrate, polishing device and program |
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| JP4274708B2 (en) * | 2001-05-14 | 2009-06-10 | Ｈｏｙａ株式会社 | Glass substrate for magnetic recording medium and manufacturing method thereof |
| JP4767476B2 (en) * | 2002-10-22 | 2011-09-07 | 昭和電工株式会社 | Method for manufacturing aluminum substrate for magnetic disk |
| JP2006099945A (en) * | 2004-08-30 | 2006-04-13 | Showa Denko Kk | Glass substrate for magnetic recording medium, and magnetic recording medium |
| JP2007087533A (en) * | 2005-09-22 | 2007-04-05 | Showa Denko Kk | Silicon substrate for magnetic recording media, and magnetic recording medium |
| JP2008282539A (en) * | 2008-08-25 | 2008-11-20 | Hoya Corp | Glass substrate for magnetic recording medium, and its manufacturing method |
| US9202505B2 (en) * | 2010-12-28 | 2015-12-01 | Konica Minolta, Inc. | Method for manufacturing glass substrate for magnetic recording medium |
| JP5327275B2 (en) * | 2011-05-27 | 2013-10-30 | 旭硝子株式会社 | End polishing brush and method for manufacturing glass substrate for magnetic recording medium |
| US8233233B1 (en) * | 2011-06-30 | 2012-07-31 | Seagate Technology Llc | Devices including a write pole tip with a convex shape |
| CN104700850A (en) * | 2013-12-06 | 2015-06-10 | 株式会社东芝 | Perpendicular magnetic recording media and manufacturing method for same |
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| JP2012024899A (en) * | 2010-07-26 | 2012-02-09 | Showa Denko Kk | Method of manufacturing disk substrate, polishing device and program |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2016154060A (en) | 2016-08-25 |
| SG10201704694XA (en) | 2017-07-28 |
| CN107665716A (en) | 2018-02-06 |
| JP5922313B2 (en) | 2016-05-24 |
| SG11201604589SA (en) | 2016-07-28 |
| MY183814A (en) | 2021-03-17 |
| WO2015099177A1 (en) | 2015-07-02 |
| JP6452639B2 (en) | 2019-01-16 |
| CN105830156A (en) | 2016-08-03 |
| CN107665716B (en) | 2019-12-24 |
| JPWO2015099177A1 (en) | 2017-03-23 |
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