CN1058087C - 抗静电显微镜 - Google Patents

抗静电显微镜 Download PDF

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Publication number
CN1058087C
CN1058087C CN94194793A CN94194793A CN1058087C CN 1058087 C CN1058087 C CN 1058087C CN 94194793 A CN94194793 A CN 94194793A CN 94194793 A CN94194793 A CN 94194793A CN 1058087 C CN1058087 C CN 1058087C
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microscope
electrostatic
electrostatic charge
components
plastics
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Expired - Lifetime
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CN94194793A
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CN1141085A (zh
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小H·A·迈耶
V·瓦卡雷利
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Leica Microsystems Schweiz AG
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Lycra Corp
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/16—Anti-static materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/1334—Nonself-supporting tubular film or bag [e.g., pouch, envelope, packet, etc.]

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Elimination Of Static Electricity (AREA)
  • Compositions Of Macromolecular Compounds (AREA)

Abstract

使用能使静电电荷消散的塑料代替常规塑料，使具有旋钮、盖子、和目镜环等塑料部件的显微镜成为抗静电的。这种抗静电显微镜特别适用于制造和检验在暴露于静电电荷作用下易受损坏的半导体。

Description

抗静电显微镜
发明的背景
本发明涉及显微镜，更具体地是涉及具有能使静电电荷消散的塑料部件的显微镜。
在制造和检验半导体元件时，要使用如1987年9月1日颁发的美国专利4,690,519所揭示的常规立体显微镜，或使用如美国专利4,573,771所揭示的复合显微镜。早期的这类显微镜，除了光学部件以外，是用金属制造的，但近年来已用塑料取代了这类显微镜中许多常用的部件。这些部件的典型例子为聚焦旋钮、变焦旋钮、目镜调节环、镜体罩、以及双筒组件盖等，它们目前都用塑料制造。但是，虽然各制造商使用了许多不同的塑料，有些制造商甚至使用特定的塑料，这些塑料缺乏能使静电电荷消散的优点，因而会使半导体器件和其中所用的元件因暴露于静电电荷作用下，而发生永久损坏或失去效用的危险。半导体器件及其中所用元件被放在显微镜载物台上检验时，就会暴露于这些静电电荷的作用下。在本说明书中，显微镜这个词包括复合显微镜或立体显微镜的镜座和聚焦机构。
1986年10月21日颁发的美国专利4,618,222说明了一种置放于显微镜与承载待检验物体的载物台之间的保护罩。该专利指出了需要在塑料上涂覆抗静电膜，以防止元件被静电电荷损坏。该膜是接地的。
发明概述
本发明涉及一种抗静电显微镜，它至少具有一个易于积聚静电电荷的塑料部件，而该部件是用能使静电电荷消散的塑料制造的。较好的情况下，该塑料可在环境相对湿度(rh)为15％时，在10秒钟之内使5000伏的静电电荷消散至0伏。静电电荷是通过显微镜的一个或多个金属部件消散到地。
有许多塑料能使静电电荷消散。这些材料通常是使用导电的填料(如碳或碳纤维)或粉状的金属构成，也可与导电性聚合物相结合构成。具有金属或碳之类导电填料的塑料是众所周知的，无需多加说明，但使用导电性聚合物来提供静电消散性质的塑料却是比较新的。具有静电消散性质的聚合物的一个例子，是可从B.F.Goodrich Company购得的一族称为Stat-Rite的静电消散聚合物，它适合与丙烯腈-丁二烯-苯乙烯(ABS)、聚碳酸酯、聚苯乙烯、和改性的聚对苯氧等聚合物一起使用。Electrafil族静电消散合金是用Stat-Rite聚合物使静电积聚材料成为静电消散材料的一个例子。ElectrafilABS系列静电消散的热塑性塑料可从DSM Engineering Plastics(位于2267 West Mill Road，Evansville，Indiana)购得。这些塑料在快速消散静电电荷以外，还具有抗阻静电电荷积聚的优点。
较佳实施例的说明
使用从DSM Engineering Plastics购得的ElectrafilABS-1200/SD塑料以注塑方法制造了如美国专利4,690,519所揭示的立体显微镜的变焦控制旋钮、目镜聚焦环、镜体罩、和双筒盖，以及如美国专利4,729,646所揭示的镜座的聚焦旋钮。这些显微镜塑料部件在相对湿度为15％时，静电电荷消散速率是在2秒之内从5000伏降至0伏(按美国联邦测试标准101℃方法46测定)。积聚在聚焦旋钮上的静电电荷是通过金属聚焦旋轴消散至接地的金属镜座。积聚在镜体罩上的静电电荷直接消散至支承显微镜的接地的金属镜座。积聚在双筒盖和目镜聚焦环上的静电电荷则通过金属的显微镜框架和镜体罩消散至接地的金属镜座。

Claims (5)

1.一种用于检验易受静电电荷损坏的元件的显微镜，它具有一个导电性金属显微镜部件，该部件与一个易于积聚静电电荷的注塑的塑料显微镜部件相连接，其特征在于所述塑料显微镜部件基本上包括一种非静电消散的聚合物和一种静电消散的聚合物，静电电荷可通过所述的导电性金属显微镜部件迅速消散。
2.如权利要求1所述的显微镜，其特征还在于所述的非静电消散的聚合物是ABS聚合物，而所述的静电消散的聚合物分散在其中。
3.如权利要求2所述的显微镜，其特征还在于所述塑料部件是镜体罩、同轴盖、调节旋钮或调节环。
4.如权利要求3所述的显微镜，其特征还在于它具有多个所述的塑料部件。
5.如权利要求4所述的显微镜，其特征还在于所述塑料部件在相对湿度为15％时，其静电电荷衰减率是在10秒钟内从5000伏降至0伏。
CN94194793A 1994-01-12 1994-12-05 抗静电显微镜 Expired - Lifetime CN1058087C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/180,320 US5521756A (en) 1994-01-12 1994-01-12 Antistatic microscope
US08/180,320 1994-01-12

Publications (2)

Publication Number Publication Date
CN1141085A CN1141085A (zh) 1997-01-22
CN1058087C true CN1058087C (zh) 2000-11-01

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US (1) US5521756A (zh)
EP (1) EP0766840B1 (zh)
JP (1) JP3359035B2 (zh)
KR (1) KR100288024B1 (zh)
CN (1) CN1058087C (zh)
CA (1) CA2171321C (zh)
DE (1) DE69427376T2 (zh)
MY (1) MY112717A (zh)
SG (1) SG80534A1 (zh)
WO (1) WO1995019583A1 (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10104692A (ja) * 1996-09-30 1998-04-24 Minolta Co Ltd 帯電防止ファインダ
WO2000007633A1 (de) 1998-08-07 2000-02-17 Leica Microsystems Ag Medizinisches gerät
DE10352575B3 (de) * 2003-11-11 2005-05-04 Leica Microsystems Nussloch Gmbh Kryostat mit einem Innenbehälter zur Aufnahme eines Mikrotoms
JP2005215183A (ja) * 2004-01-28 2005-08-11 Olympus Corp 顕微鏡および顕微鏡の静電気放電対策方法
US20080166523A1 (en) * 2007-01-04 2008-07-10 Asahi Kasei Chemicals Corporation Tab leader tape made of polyphenylene ether-based resin
DE202006008329U1 (de) * 2006-03-30 2006-08-10 Leica Microsystems Nussloch Gmbh Mikrotom
KR102167328B1 (ko) 2017-04-27 2020-10-19 엘지전자 주식회사 전기집진장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3572499A (en) * 1967-01-19 1971-03-30 Custom Materials Inc Conductive packaging material and container for explosives
US4618222A (en) * 1984-08-27 1986-10-21 Northrop Corporation Protective structure and method for working on sensitive electronic devices
US5091229A (en) * 1989-10-13 1992-02-25 E. I. Du Pont De Nemours And Company Electronics protective packaging film

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4573771A (en) * 1984-07-02 1986-03-04 Warner-Lambert Technologies, Inc. Microscope adjustment apparatus
US4690519A (en) * 1985-05-17 1987-09-01 Bausch & Lomb Incorporated Zoom microscope having a crank and linkage mechanism
US4729646A (en) * 1986-05-15 1988-03-08 Bausch & Lomb Incorporated Multi-use microscope having modular construction of extruded parts
US4774272A (en) * 1986-08-08 1988-09-27 Minnesota Mining And Manufacturing Company Composite sheet material for storage envelopes for magnetic recording media
JPH03265644A (ja) * 1990-03-16 1991-11-26 Yazaki Corp 帯電防止性熱可塑性組成物

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3572499A (en) * 1967-01-19 1971-03-30 Custom Materials Inc Conductive packaging material and container for explosives
US4618222A (en) * 1984-08-27 1986-10-21 Northrop Corporation Protective structure and method for working on sensitive electronic devices
US5091229A (en) * 1989-10-13 1992-02-25 E. I. Du Pont De Nemours And Company Electronics protective packaging film

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Publication number Publication date
SG80534A1 (en) 2001-05-22
JP3359035B2 (ja) 2002-12-24
CA2171321A1 (en) 1995-07-20
DE69427376D1 (de) 2001-07-05
DE69427376T2 (de) 2001-09-13
CA2171321C (en) 1997-11-18
EP0766840A1 (en) 1997-04-09
EP0766840A4 (en) 1997-11-05
MY112717A (en) 2001-08-30
CN1141085A (zh) 1997-01-22
KR100288024B1 (ko) 2001-05-02
US5521756A (en) 1996-05-28
EP0766840B1 (en) 2001-05-30
KR960706095A (ko) 1996-11-08
WO1995019583A1 (en) 1995-07-20
JPH09506719A (ja) 1997-06-30

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