CN105792493A - Static electricity removal device and static electricity removal method - Google Patents
Static electricity removal device and static electricity removal method Download PDFInfo
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- CN105792493A CN105792493A CN201510774168.2A CN201510774168A CN105792493A CN 105792493 A CN105792493 A CN 105792493A CN 201510774168 A CN201510774168 A CN 201510774168A CN 105792493 A CN105792493 A CN 105792493A
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Abstract
The invention provides a static electricity removal device and a static electricity removal method. The static electricity removal device can reliably avoid discharge caused by static, and avoid foreign body adsorption. An electro-dissociator (2) used for avoiding static is arranged on the back (1b) side of a fixing workbench (1), and the static is generated by utilizing a detaching mechanism (3) to detach a workbench (W) having a back surface (Wb) in a smooth surface shape from the surface (1a) of the fixing workbench (1). The static electricity removal device is configured to allow ions from the electro-dissociator (2) to flow through the hole (11) in the fixing workbench (1) to eject towards the gap formed between the surface (1a) of the fixing workbench (1) and the back surface (Wb) of the workbench (W).
Description
Technical field
The present invention relates to electrostatic removal device and electrostatic removes method.
Background technology
There is such electrostatic removal device to remove method with electrostatic: when liquid crystal panel, organic EL panel, quasiconductor, precise electronic part etc. being likely due to the electric discharge phenomena because electrostatic brings and destroyed workpiece separates from the fixing workbench of workpiece in the past, the ion stream (ionized gas) of self-ionization device blows to the upper surface of workpiece in the future, prevents the electric discharge phenomena (referring for example to patent documentation 1) because electrostatic (stripping charge) brings.
Patent documentation 1: Japanese Unexamined Patent Publication 7-312337 publication.
Summary of the invention
As shown in Figure 10, in the past when separating, the ion stream of self-ionization agent 92 in the future blows to the surface Wa of workpiece W to carry out removing electricity, but owing to the ion of ion stream is attached on the surface Wa of workpiece W, so by the workpiece W moment peeled off from fixing workbench 91, the electric charge (being positive charge in Fig. 10) being difficult to produce the back side Wb at workpiece W neutralizes with at the surface 91a of fixing workbench 91 electric charge (being negative charge in Fig. 10) produced, it is possible at workpiece W and fixing using, electric discharge phenomena occur between workbench 91.
Additionally, by ion stream so that the surface Wa and back side Wb of workpiece W looks like electrically neutralization, but is actually electric charge (being negative charge in Fig. 10) and accumulates in the state on the surface Wa of workpiece W.In this condition, if the foreign bodies such as dust suspension drop on the surface Wa of workpiece W with this charge contact, then have the problem that the Coulomb force brought by the electric field of electric charge makes foreign body adsorb.
Therefore, it is an object of the invention to provide a kind of electric discharge phenomena can being reliably prevented between the workpiece produced by electrostatic and fixing workbench and be prevented from the static arrester of absorption of foreign body.
In order to achieve the above object, the electrostatic removal device of the present invention, the rear side preventing the ionizer of electrostatic to be arranged on fixing workbench will be used for, described electrostatic is to produce when utilizing separating mechanism to be separated from the surface of above-mentioned fixing workbench by the workpiece that the back side is smooth planar, described electrostatic removal device is configured to, and makes the ion from above-mentioned ionizer flow through and is sprayed to the clearance space portion formed between the above-mentioned surface and the back side of above-mentioned workpiece of above-mentioned fixing workbench by the through hole being arranged in above-mentioned fixing workbench.
Additionally, be provided with the cylindric nozzle for making ion stream spray on above-mentioned ionizer, this nozzle is inserted in the above described holes of above-mentioned fixing workbench.
Link additionally, above-mentioned ionizer interlocks with above-mentioned separating mechanism, to move with the speed identical with workpiece separating rate to workpiece detaching direction, and be configured to remain constant by the size of space between front end and the above-mentioned back side of above-mentioned workpiece of said nozzle.
Or, above-mentioned separating mechanism includes the lift pin for pushing away on the back side of above-mentioned workpiece, above-mentioned ionizer is provided with the nozzle for making ion stream spray, the leading section Shi Yuan mountain shape of this nozzle and there is the squit hole for the ejection of above-mentioned ion stream, and then said nozzle is inserted in the above described holes of above-mentioned fixing workbench, this nozzle is also used as above-mentioned lift pin.
In addition, it is such method that the electrostatic of the present invention removes method: through providing holes in being used for the fixing workbench keeping the back side to be the workpiece smoothing planar, by be used for preventing by above-mentioned workpiece from above-mentioned fixing separates with workbench time generation the ionizer of electrostatic be disposed in the rear side of above-mentioned fixing workbench, when above-mentioned workpiece is separated from above-mentioned fixing workbench, make the ion from above-mentioned ionizer flow through and sprayed to the clearance space portion formed between the above-mentioned surface and the back side of above-mentioned workpiece of above-mentioned fixing workbench by above described holes.
In addition, a kind of method, is provided with the cylindric nozzle for making ion stream spray, when being separated from above-mentioned fixing workbench by above-mentioned workpiece on above-mentioned ionizer, make said nozzle run through and be inserted in above described holes, make the front end of said nozzle enter above-mentioned clearance space portion.
In addition, a kind of method, when above-mentioned workpiece is separated from above-mentioned fixing workbench, above-mentioned ionizer is made to move to workpiece detaching direction with the speed identical with workpiece separating rate, the size of space between front end and the above-mentioned back side of above-mentioned workpiece of said nozzle is remained constant while, carry out the ejection of ion stream.
In addition, a kind of method, in the way of separating rate when the separating rate when separating from above-mentioned fixing workbench to above-mentioned workpiece in the scope of the 1st predetermined separating distance separates than above-mentioned workpiece in more than the 1st predetermined separating distance to the scope of the 2nd predetermined separating distance is slow, above-mentioned workpiece is made to separate from above-mentioned fixing workbench.
Or, a kind of method, above-mentioned ionizer is arranged to the nozzle making ion stream spray, the leading section of this nozzle is formed as circle mountain shape and forms the squit hole for the ejection of above-mentioned ion stream, said nozzle is inserted in the above described holes of above-mentioned fixing workbench, utilize and the back side by above-mentioned workpiece, the leading section of said nozzle pushes away, make ion flow to the ejection of above-mentioned clearance space portion while making it separate from above-mentioned fixing workbench.
In accordance with the invention it is possible to by complete for the electric charge that produced on the surface of the back side of workpiece and fixing workbench by stripping charge with, it is possible to be reliably prevented the destruction of the workpiece caused because of electric discharge phenomena.By utilizing narrower clearance space portion, ion concentration is not made the two sides that there occurs stripping charge promptly to be blown ion stream with declining to a great extent, it is possible to efficiency carries out removing electricity (neutralization) well.Particularly can carry out removing electricity from the fixing moment separated with workbench by workpiece, it is possible to prevent the danger of electric discharge.The scope that an electrode needle can remove electricity is utilized to increase, it is possible to realize the simplicity of device.The foreign body absorption because electric charge brings can be reliably prevented, it is possible to make the foreign body of the first-class washer of dedusting remove effect and improve.
Accompanying drawing explanation
Fig. 1 indicates that the sectional front view of an embodiment of the static arrester of the present invention.
Fig. 2 is top view.
Fig. 3 indicates that the curve chart of separating distance and the relation of separating rate.
Fig. 4 indicates that the sectional front view of the state of the moment of separation.
Fig. 5 indicates that the sectional front view of the state of the moment of separation.
Fig. 6 indicates that the sectional front view separating the state after just completing.
Fig. 7 indicates that the curve chart separating number of times with the relation of carried charge.
Fig. 8 is used to illustrate the top view of the effect of embodiment, and Fig. 8 (a) indicates that the top view on the surface of the workpiece before dedusting, and Fig. 8 (b) indicates that the top view on the surface of the workpiece after dedusting.
Fig. 9 is used to illustrate the top view of the problem points of conventional example, and Fig. 9 (a) indicates that the top view on the surface of the workpiece before dedusting, and Fig. 9 (b) indicates that the top view on the surface of the workpiece after dedusting.
Figure 10 is used to illustrate the sectional front view of prior art.
Figure 11 is used to illustrate the sectional front view of the situation of workpiece flexure.
Figure 12 is the sectional front view of another embodiment.
Figure 13 is the major part amplification view of another embodiment.
Figure 14 indicates that the sectional front view separating beginning state of another embodiment.
Description of reference numerals
1 fixing workbench
1a surface
The 1b back side
2 ionizers
3 separating mechanisms
11 holes
20 nozzles
20a front end
20d leading section
20f squit hole
The predetermined separating distance of Ha the 1st
The predetermined separating distance of Hb the 2nd
J clearance space portion
The S size of space
W workpiece
Wa surface
The Wb back side.
Detailed description of the invention
The present invention is described in detail below based on embodiment illustrated.
As it is shown in figure 1, the electrostatic removal device of the present invention includes: fixing with workbench 1, it is used for workpiece (base material) W keeping (mounting) back side Wb to be smooth planar；Workpiece fixed mechanism, it is illustrated that omit, is used for the back side Wb making workpiece W and is close to the surface 1a of workbench 1 with fixing and fix；Separating mechanism (mechanism for stripping) 3, is used for after by the fixing releasing undertaken by workpiece fixed mechanism making fixing separating with the back side Wb of the surface 1a and workpiece W of workbench 1；Ionizer (except electrical equipment) 2, for preventing from being made the workpiece W electrostatic produced when separating from fixing workbench 1 by separating mechanism 3.
Ionizer 2 has the electrode needle 21 for making cation and anion alternately produce and by purifying the outlet 22 that the conveying gas such as air or delivery gas is discharged, and also has the nozzle 20 of the cylindrical shape (chimney-like) making produced ion spray together as ion stream (also referred to as ionized gas stream) with conveying gas.
Further, ionizer 2 is arranged on the back side Wb of the back side 1b(workpiece W of fixing workbench 1) side.
Under state before separation, the front end 20a of nozzle 20 is inserted arranging and fixes with in the hole 11 of the nozzle on workbench 1 to through being arranged on.
Additionally, as in figure 2 it is shown, it is clathrate (the intersection point shape of grid) that the front end 20a of nozzle 20 arranges in vertical view, make multiple ionizer 2 corresponding to a workpiece W and fixing workbench 1.It addition, nozzle 20 and hole 11 can also arrange in vertical view staggeredly.Arrange in a word as scatterplot shape.
Separating mechanism 3 include multiple lift pins that leading section 31a movably arranges relative to the fixing surface 1a of workbench 1 31,31, for making the electric actuator 32 that multiple lift pin 31 drives (lifting) and the connecting member 33 lift pin 31 and electric actuator 32 linked.
Under state before separation, the leading section 31a of lift pin 31 is inserted arranging and fixes with in the through hole 12 of the lift pin on workbench 1 to through being arranged at.
The separating mechanism 3 rectilinear motion by electric actuator 32, the leading section 31a making lift pin 31 highlights from the surface 1a of fixing workbench 1, fixing abut with the back side Wb of the workpiece W on workbench 1 with being positioned in, make the back side Wb of workpiece W concurrently separate (stripping) what remain horizontal planar.
And, ionizer 2 is installed on above-mentioned connecting member 33, link with lift pin 31 and electric actuator 32, arrange in the way of interlocking with lift pin 31, be configured to make ionizer 2 increase with the speed identical with the lift pin rate of climb to the moving direction of lift pin 31.
Namely, it is configured to, even if ionizer 2 moves to workpiece detaching direction with the speed identical with workpiece separating rate, lift pin 31 is prominent and the back side Wb of workpiece W leaves from fixing with the surface 1a of workbench 1, the size of space S between the front end 20a and the back side Wb of workpiece W of nozzle 20 also remains constant.
And then, including for controlling to make the control portion 5 of the workpiece W CPU from the separating rate fixed when leaving or sequencer, computer etc. with workbench 1.
Control portion 5 is electrically connected with electric actuator 32, in Fig. 3 with solid line or double dot dash line represent control separating mechanism 3 so that from fixing separate with workpiece W in the scope of the predetermined separating distance Ha of surface 1a to the 1st of workbench 1 time separating rate separate than workpiece W in the scope more than the 1st predetermined predetermined separating distance Hb of separating distance Ha to the 2nd time separating rate slow.
In other words, control for make from fixing separate with workpiece W in the scope of the predetermined separating distance Ha of surface 1a to the 1st of workbench 1 time separating rate be below benchmark separating rate Ua, and separating rate when controlling as making that workpiece W separates in the scope more than the 1st predetermined predetermined separating distance Hb of separating distance Ha to the 2nd is faster than benchmark separating rate Ua.
Distance He is terminated from the surface 1a of fixing workbench 1 distance to the back side Wb of the workpiece W separating done state as separating if set, then the 1st predetermined separating distance Ha is more than 1% 35% value below separating and terminating distance He, preferably more than 1% 20% value below, the 2nd predetermined separating distance Hb preferably separates more than 70% 100% value below terminating distance He.
Diagram elliptical workpiece fixed mechanism can be the adsorption hole as the surface opening at fixing workbench 1, for by workpiece W vacuum suction fixing suction pump (vacuum pump) and attraction road or attracting pipe arrangement etc. attract fixing device or push the mechanical clamp forceps device etc. of workpiece W via adsorption hole, as long as the back side Wb of workpiece W can be made to contact (being close to) with the surface 1b of workbench 1 with fixing and fix.Or, also sometimes workpiece fixed mechanism can be omitted.
Additionally, workpiece W is parts likely charged because of stripping charge when separating from the surface 1a of fixing workbench 1 as precise electronic part, the glass substrates etc. such as quasiconductor, liquid crystal panel, organic EL panel, integrated circuit package, cmos sensor.
Then, the using method (effect) that the electrostatic of the present invention removes method and electrostatic removal device illustrates.
First, through providing holes 11 in fixing workbench 1, and nozzle 20 is set on ionizer 2.
Then, ionizer 2 is disposed in the 1b side, the back side of fixing workbench 1, and the front end 20a of nozzle 20 is arranged in hole 11.Additionally, the leading section 31a of lift pin 31 is arranged in through hole 12.
Then, the back side Wb of workpiece W is placed on the surface 1a of fixing workbench 1 so that its contact, workpiece W is fixed to fixing with on workbench 1 by workpiece fixed mechanism.
The coating that workpiece W is carried out surface conditioning agent and the coating being close to hardening agent or the workpiece W flow chart predetermined with the combination of miscellaneous part, heat treatment etc..
Further, after predetermined flow chart, the fixing releasing of workpiece W that will be undertaken by workpiece fixed mechanism.
After the fixing releasing of workpiece, in order to carry out the ensuing predetermined flow charts such as cleaning or the conveying of workpiece W, and make lift pin 31 increase (making separating mechanism 3 action), make the back side Wb of workpiece W separate from the surface 1a of fixing workbench 1.
Here, as it is shown in figure 1, before being about to utilize separating mechanism 3 to be separated by workpiece W (before separating the several seconds started), make ionizer 2 start, start the generation (except electrically separated operation starts) of anion and cation.
As shown in Figure 4, when being initially separated, spray ion stream via hole 11 to the clearance space portion J between the surface 1a and the back side Wb of workpiece W of fixing workbench 1.
When disengaged, make fixing electronegative with workbench 1 by stripping charge immediately and make workpiece W positively charged (there is positive charge at the back side Wb of workpiece W, and there is negative charge fixing with on the surface 1a of workbench 1).If keeping this state to advance to separate, then electric discharge phenomena are occurred likely to destroy workpiece W.
But, as shown in Fig. 4 to Fig. 5, from separation start instantaneously (from separation start within 0.1 second) positive charge that will be present on the back side Wb of workpiece W and be present in and fixing utilize the cation of ion stream and anion to neutralize completely with the negative charge on the surface 1a of workbench 1, prevent electric discharge phenomena.
Additionally, when being separated from fixing workbench 1 by workpiece W (except electrically separated operation), ion stream is blown on the back side Wb of workpiece W by nozzle 20, and flow along workpiece W.As the circle represented with single dotted broken line in fig. 2, ion stream is made to be diffused as the circle centered by nozzle 20 and flow.
Such as, when towards workpiece W surface Wa blow out ion stream conventional, need to carry out electrode needle 21 so that 50～100mm interval arranges removing electricity, but in apparatus and method of the present invention, removing of radius 200～300mm can be carried out electric, it is possible to make the radical of the electrode needle 21 required for the per unit area of workpiece W reduce by an electrode needle 21.
In addition, when workpiece W is separated from fixing workbench 1, make nozzle 20 run through and be inserted in hole 11, so that the size of space S between the front end 20a and the back side Wb of workpiece W of nozzle 20 is remained constant, while making the front end 20a of nozzle 20 enter to clearance space portion J, carry out blowing of ion stream.
Blow to the ionic weight (concentration) on the back side Wb of workpiece W stable, it is possible to reliably obtain electric removing effect.It addition, clearance space portion J and size of space S is illustrated by Fig. 4 and Fig. 5 than actual the earth.
And then, making the separating rate when from fixing workpiece W separation in the scope of the predetermined separating distance Ha of workbench 1 to the 1st is benchmark separating rate Ua speed below.
Clearance space portion J does not expand sharp, it is prevented that the sharply decline of the sharply diffusion velocity of decline or ion of ion concentration (concentration), thus efficiency carries out electric removing effect well.
If it exceeds the 1st predetermined separating distance Ha, then terminate distance He to the 2nd predetermined separating distance Hb(or separation), make separating rate faster than benchmark separating rate Ua, make production efficiency (speed of production) improve.
Further, as shown in Figure 6, if workpiece W is separated to separation and terminates distance He, then the action of ionizer 2 is stopped (except electrically separated operation terminates).
On the surface Wa and back side Wb of workpiece W, there is no the electric charge because stripping charge brings, the surface Wa of workpiece W will not accumulate electric charge (ion) in a large number that brought by ion stream, even if the foreign bodies such as dust suspension fall and fall on the surface Wa of workpiece W, without producing absorption because of charge contact, it is possible to make the foreign body produced by dust removal head 7 washer such as grade remove effect and improve.
Here, the curve chart of the comparative test result of the carried charge of the workpiece W separated under completion status is measured when representing in the figure 7 and separate every time.
The comparative example fork that make workpiece W repeatedly contact relative to fixing workbench 1 by not making ionizer 2 start, to separate (×) mark represents, embodiments of the invention (referring to figs. 1 through Fig. 6) stain (●) mark is represented, conventional example triangle (△) mark being configured to as shown in Figure 10 be blown to by ionizer 92 on the surface Wa of workpiece W is represented.Workpiece W is glass substrate.
According to Fig. 7 it will be clear that comparative example (× mark) is not owing to starting ionizer 2, so carried charge is minimum in the separation of the 1st time, but workpiece W is not electrically neutralized, it is possible to the electric discharge phenomena because electrostatic brings occur.And then, increasing along with separating number of times, carried charge increases.
Conventional example (△ mark) seems to have carried out electric neutralization by ionizer 92, but owing to being accumulated on the surface Wa of workpiece W from the ion of ionizer 92, so carried charge increases.I.e., it is possible to say that the probability of the foreign body absorption such as dust suspension is high.
Embodiment (● mark) in, carry out electric neutralization by ionizer 2, even if being easily separated repeatedly, carried charge is also considerably less compared with comparative example and conventional example, it may be said that almost without the probability of foreign body absorption.
As shown in Figure 8 (a), embodiment is few due to carried charge, so under separating completion status, even if foreign body drops on the surface Wa of workpiece W, the absorption (adhesive force is weak) because electric charge brings is not produced yet, carry out dedusting if, with dust removal head 7, then as shown in Figure 8 (b) shows can dedusting neatly.
But, if as carried charge conventional example or comparative example is many, then as shown in Fig. 9 (a), the surface Wa of workpiece W adsorbs substantial amounts of foreign body.Further, even if making dust removal head 7(with reference to Fig. 6) carry out dedusting, the absorption affinity of electric charge is also relatively strong, and as shown in Figure 9 (b), foreign body remains as corrugated (striated), it is impossible to give full play to the performance of dust removal head 7.
It addition, dust removal head 7 is to advance abreast with workpiece W, spray air towards the surface Wa of workpiece W, make foreign body peel off from workpiece W, air and foreign body are carried out dedusting from attraction nozzle suction.Additionally, in figs. 8 and 9 by foreign body than actual the earth diagram.
Here, as shown in figure 11, when workpiece W be as little in rigidity thin glass plate or thin plastic plate and easily bend parts, sometimes (stripping) is separated from the position pushed away on elevated pin 31, separation near the front end 20a of nozzle 20 does not start to (region of the Y shown in Figure 11 is held against state), and ion stream does not flow immediately to separating beginning position (near the leading section 31a of lift pin 31) Q and can not prevent electrostatic.
Then, in other the embodiment shown in Figure 12 to Figure 14, nozzle 20 is also used as lift pin 31.
As shown in figure 13, the leading section 20d of nozzle 20 is formed as circle mountain shape (bulb shape), offers the squit hole 20f for the ejection of ion stream at the foot of a mountain portion 20e on circle mountain.Squit hole 20f is provided with multiple around the axle center of nozzle 20, arranges in the way of opening obliquely upward.Even if top (front end) 20a abuts on the workpiecew, squit hole 20f is not blocked yet and can reliably spray ion stream, and ion stream along the back side Wb of workpiece W with thin membranaceous (plane) diffusion while flowing.
As shown in figure 14, nozzle 20 being inserted in the hole 11 of fixing workbench 1, utilize the leading section 20d of nozzle 20 will the back side Wb of workpiece W push away, separating while making ion stream spray with workbench 1 from fixing.Even if workpiece W is the parts of easily flexure, the front end 20a of nozzle 20 is also connected on the back side Wb of workpiece W, it is possible to starts position Q conveying ion stream with fixing with separating between the surface 1a of workbench 1 to the back side Wb of workpiece W and prevents electrostatic.And then, illustrating such as use Fig. 4 to Fig. 6, spray ion stream to clearance space portion J and prevent electrostatic.It addition, at Figure 11, Figure 12, Tu14Zhong, eliminate the diagram of (representing in Fig. 1, Fig. 4, Fig. 5 etc.) positive charge, negative charge.
It addition, the present invention can design alteration, fixing can also be surface 1a with workbench 1 be skewed or vertical shape structure.Namely, however it is not limited to the structure that workpiece W separates in the vertical direction as illustrated, it is also possible to be the structure separated in the horizontal direction.Separating mechanism 3 is not limited to use the structure of lift pin 31, it is possible to so that vacuum suction parts are make sucker parts be adsorbed onto on workpiece W to make the workpiece W structure separated.
As mentioned above, the electrostatic removal device of the present invention is configured to, the 1b side, the back side preventing the ionizer 2 of electrostatic to be arranged on fixing workbench 1 will be used for, described electrostatic is to produce when utilizing separating mechanism 3 to be separated from the surface 1a of fixing workbench 1 by the workpiece W that back side Wb is smooth planar, it is configured to make the ion from ionizer 2 flow through sprayed to the clearance space portion J formed between the surface 1a and the back side Wb of workpiece W of fixing workbench 1 by the through hole 11 being arranged in fixing use workbench 1, therefore, can by by the stripping charge back side Wb at workpiece W and fixing with the electric charge produced on the surface 1a of workbench 1 completely in and, can be reliably prevented because electric discharge phenomena are to the workpiece W destruction caused.By utilizing narrower clearance space portion J, ion concentration is made the two sides that there occurs stripping charge promptly to be blown ion stream with not declining to a great extent, it is possible to efficiency carries out removing electricity (neutralization) well.Particularly can carry out removing electricity from the fixing moment separated with workbench 1 by workpiece W, it is possible to prevent the danger of electric discharge.The scope that an electrode needle 21 can remove electricity is utilized to increase, it is possible to realize the simplicity of device.The foreign body absorption produced by electric charge can be reliably prevented, it is possible to make the foreign body brought by dust removal head 7 washer such as grade remove effect and improve.
Additionally, due to be provided with the cylindric nozzle 20 for making ion stream spray on ionizer 2, nozzle 20 is inserted in the hole 11 of fixing workbench 1, it is possible to the ion stream of stable ion concentration is blown on workpiece W.Ion stream can be made to be diffused as the circle centered by nozzle 20, it is possible to efficiency makes ionization well.The radical that can make the electrode needle 21 of the ionizer 2 corresponding with a workpiece W and fixing workbench 1 reduces, it is possible to contribute to the miniaturization of device, simplification.
In addition, ionizer 2 interlocks with separating mechanism 3 and links, to move to workpiece detaching direction with the speed identical with workpiece separating rate, it is configured to remain constant by the size of space S between the front end 20a and the back side Wb of workpiece W of nozzle 20, so the ionic weight blown on the back side Wb of workpiece W (concentration) is stable, it is possible to efficiency makes ionization in workpiece W well.Can reliably obtain electric removing effect.The charging neutrality produced of the back side Wb at workpiece W can be made instantaneously.
In addition, separating mechanism 3 includes the lift pin 31 for pushing away on the back side Wb of workpiece W, ionizer 2 is provided with the nozzle 20 for making ion stream spray, the leading section 20d of nozzle 20 is circle mountain shape, there is the squit hole 20f for the ejection of ion stream, and then, owing to nozzle 20 being inserted in the hole 11 of fixing workbench 1, nozzle 20 is also used as lift pin 31, even if so workpiece W is parts that are as little in rigidity thin glass plate and that easily bend, it also is able to start position Q and carry ion stream reliably and instantaneously to prevent the destruction of the workpiece W caused because of electric discharge phenomena to separating.
In addition, the electrostatic of the present invention removes method through providing holes 11 in being used for the fixing workbench 1 keeping back side Wb to be the workpiece W smoothing planar, arrange for preventing the ionizer 2 of the electrostatic of generation when being separated by workpiece W from fixing workbench 1 fixing with the 1b side, the back side of workbench 1, when workpiece W is separated from fixing workbench 1, make the ion from ionizer 2 flow through to be sprayed to the clearance space portion J formed between the surface 1a and the back side Wb of workpiece W of fixing workbench 1 by hole 11, it is possible to by by stripping charge the back side Wb of workpiece W and fixing with the electric charge produced on the surface 1a of workbench 1 completely in and, the destruction of the workpiece W caused because of electric discharge phenomena can be reliably prevented.By utilizing narrower clearance space portion J, ion concentration is made the two sides that there occurs stripping charge promptly to be blown ion stream with not declining to a great extent, it is possible to efficiency carries out removing electricity (neutralization) well.Particularly workpiece W can removed electricity from the moment that fixing workbench 1 separates, it is possible to prevent the danger of electric discharge.The scope that an electrode needle 21 can remove electricity is utilized to increase, it is possible to realize the simplicity of device.The foreign body absorption because electric charge produces can be reliably prevented, it is possible to make the foreign body of dust removal head 7 washer such as grade remove effect and improve.
In addition, ionizer 2 is provided with the cylindric nozzle 20 for making ion stream spray, when workpiece W is separated from fixing workbench 1, insertion nozzle 20 is run through to hole 11, the front end 20a making nozzle 20 enters in clearance space portion J, it is possible to blown on workpiece W by the ion of stable ion concentration.Ion stream can be diffused as the circle centered by nozzle 20, it is possible to efficiency makes ionization well.The radical that can make the electrode needle 21 of the ionizer 2 corresponding with a workpiece W and fixing workbench 1 reduces, it is possible to contribute to the miniaturization of device, simplification.
In addition, when workpiece W is separated from fixing workbench 1, ionizer 2 is made to move to workpiece detaching direction with the speed identical with workpiece separating rate, the size of space S between the front end 20a and the back side Wb of workpiece W of nozzle 20 is remained constant while, carry out the ejection of ion stream, so the ionic weight blown on the back side Wb of workpiece W (concentration) is stable, it is possible to efficiency makes ionization in workpiece W well.Can reliably obtain electric removing effect.Can make on the back side Wb of workpiece W produce electric charge instantaneously in and.
In addition, due in the way of the separating rate when separating from the separating rate fixed when separating with workpiece W in the scope of the predetermined separating distance Ha of workbench 1 to the 1st than workpiece W in the scope more than the 1st predetermined predetermined separating distance Hb of separating distance Ha to the 2nd is slow, workpiece W is made to separate from fixing workbench 1, so ion concentration (density) will not be made to be greatly reduced after just separating, spread along workpiece W without making ion stream lavishly, it is achieved instantaneous removes electricity.Removing during production efficiency (speed) can not be made to be easily separated with declining is electric.
In addition, ionizer 2 is provided with the nozzle 20 for making ion stream spray, the leading section 20d of nozzle 20 is formed as circle mountain shape and forms the squit hole 20f for the ejection of ion stream, nozzle 20 is inserted in the hole 11 of fixing workbench 1, the leading section 20d utilizing nozzle 20 will push away on the back side Wb of workpiece W, it is made to separate from fixing workbench 1 while making ion flow to clearance space portion J ejection, even if so workpiece W is parts that are as little in rigidity thin glass plate and that easily bend, it also is able to start position Q and carry ion stream reliably and instantaneously to prevent the destruction of the workpiece W caused because of electric discharge phenomena to separating.
Claims (9)
1. an electrostatic removal device, it is characterised in that
The back side (1b) side preventing the ionizer (2) of electrostatic to be arranged on fixing workbench (1) will be used for, described electrostatic is to produce when utilizing separating mechanism (3) to be separated from the surface (1a) of above-mentioned fixing workbench (1) by the workpiece (W) that the back side (Wb) is smooth planar, described electrostatic removal device is configured to, make the ion from above-mentioned ionizer (2) flow through to be sprayed to the clearance space portion (J) formed between the above-mentioned surface (1a) and the back side (Wb) of above-mentioned workpiece (W) of above-mentioned fixing workbench (1) by the through hole (11) being arranged in above-mentioned fixing workbench (1).
2. electrostatic removal device as claimed in claim 1, it is characterised in that
Above-mentioned ionizer (2) is provided with the cylindric nozzle (20) for making ion stream spray, this nozzle (20) is inserted in the above described holes (11) of above-mentioned fixing workbench (1).
3. electrostatic removal device as claimed in claim 2, it is characterised in that
Above-mentioned ionizer (2) interlocks with above-mentioned separating mechanism (3) and links, to move to workpiece detaching direction with the speed identical with workpiece separating rate, described electrostatic removal device is configured to, and remains constant by the size of space (S) between the front end (20a) of said nozzle (20) and the above-mentioned back side (Wb) of above-mentioned workpiece (W).
4. electrostatic removal device as claimed in claim 1, it is characterised in that
Above-mentioned separating mechanism (3) includes the lift pin (31) for the back side of above-mentioned workpiece (W) (Wb) above being pushed away,
Being provided with the nozzle (20) for making ion stream spray on above-mentioned ionizer (2), the leading section (20d) of this nozzle (20) is circle mountain shape and has the squit hole (20f) for the ejection of above-mentioned ion stream,
And then said nozzle (20) is inserted in the above described holes (11) of above-mentioned fixing workbench (1), this nozzle (20) is also used as above-mentioned lift pin (31).
5. an electrostatic removes method, it is characterised in that
Through providing holes (11) in being used for the fixing workbench (1) keeping the back side (Wb) to be the workpiece (W) smoothing planar,
The back side (1b) side preventing the ionizer (2) of the electrostatic produced when being separated by above-mentioned workpiece (W) to be disposed in above-mentioned fixing workbench (1) will be used for from above-mentioned fixing workbench (1),
When above-mentioned workpiece (W) is separated from above-mentioned fixing workbench (1), make the ion from above-mentioned ionizer (2) flow through and sprayed to the clearance space portion (J) formed between the above-mentioned surface (1a) and the back side (Wb) of above-mentioned workpiece (W) of above-mentioned fixing workbench (1) by above described holes (11).
6. electrostatic as claimed in claim 5 removes method, it is characterised in that
Above-mentioned ionizer (2) is provided with the cylindric nozzle (20) for making ion stream spray,
When above-mentioned workpiece (W) is separated from above-mentioned fixing workbench (1), make said nozzle (20) run through and be inserted in above described holes (11), make the front end (20a) of said nozzle (20) enter above-mentioned clearance space portion (J).
7. electrostatic as claimed in claim 6 removes method, it is characterised in that
When above-mentioned workpiece (W) is separated from above-mentioned fixing workbench (1), above-mentioned ionizer (2) is made to move to workpiece detaching direction with the speed identical with workpiece separating rate, the size of space (S) between front end (20a) and the above-mentioned back side (Wb) of above-mentioned workpiece (W) of said nozzle (20) is remained constant while, carry out the ejection of ion stream.
8. the electrostatic as described in claim 5,6 or 7 removes method, it is characterised in that
In the way of separating rate when the separating rate when separating from above-mentioned fixing workbench (1) to above-mentioned workpiece (W) in the scope of the 1st predetermined separating distance (Ha) separates than above-mentioned workpiece (W) in more than the 1st predetermined separating distance (Ha) to the scope of the 2nd predetermined separating distance (Hb) is slow, above-mentioned workpiece (W) is made to separate from above-mentioned fixing workbench (1).
9. electrostatic as claimed in claim 5 removes method, it is characterised in that
Above-mentioned ionizer (2) is arranged to the nozzle (20) making ion stream spray, the leading section (20d) of this nozzle (20) is formed as circle mountain shape and forms the squit hole (20f) for the ejection of above-mentioned ion stream,
Said nozzle (20) is inserted in the above described holes (11) of above-mentioned fixing workbench (1), the back side (Wb) of above-mentioned workpiece (W) is above pushed away by the leading section (20d) utilizing said nozzle (20), makes ion flow to the ejection of above-mentioned clearance space portion (J) while making it separate from above-mentioned fixing workbench (1).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-003219 | 2015-01-09 | ||
| JP2015003219A JP6077023B2 (en) | 2015-01-09 | 2015-01-09 | Static eliminator and static eliminator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105792493A true CN105792493A (en) | 2016-07-20 |
| CN105792493B CN105792493B (en) | 2018-06-08 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510774168.2A Active CN105792493B (en) | 2015-01-09 | 2015-11-13 | Electrostatic removal device and electrostatic remove method |
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| Country | Link |
|---|---|
| JP (1) | JP6077023B2 (en) |
| KR (1) | KR101747795B1 (en) |
| CN (1) | CN105792493B (en) |
| TW (1) | TWI559493B (en) |
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| CN107329289A (en) * | 2017-07-19 | 2017-11-07 | 武汉华星光电技术有限公司 | Remove electrostatic stripping off device and liquid crystal panel making apparatus |
| CN108633155A (en) * | 2018-06-19 | 2018-10-09 | 深圳市华星光电半导体显示技术有限公司 | Destatic support construction, substrate vehicle equipment |
| CN109068467A (en) * | 2018-09-18 | 2018-12-21 | 张家港康得新光电材料有限公司 | A kind of Destaticizing device and neutralizing method |
| CN109727541A (en) * | 2019-03-15 | 2019-05-07 | 广州林恩静电科学技术应用有限公司 | The two steps separation solution of flat panel display product electrostatic failure and application and device |
| CN111139632A (en) * | 2019-12-09 | 2020-05-12 | 亳州新诚达时装有限公司 | Retrieval device of clothing auxiliary material |
| CN111989988A (en) * | 2019-03-28 | 2020-11-24 | 大科防静电技术咨询（深圳）有限公司 | Apparatus and method for suppressing electrostatic charge |
| CN116298566A (en) * | 2023-05-19 | 2023-06-23 | 埃用仪器(苏州)有限公司 | Industrial electrostatic tester |
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| CN112788824A (en) * | 2020-12-24 | 2021-05-11 | Tcl华星光电技术有限公司 | Electrostatic removing device, vapor deposition device, and electrostatic removing method |
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Also Published As
| Publication number | Publication date |
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| TWI559493B (en) | 2016-11-21 |
| KR20160086257A (en) | 2016-07-19 |
| JP2016129107A (en) | 2016-07-14 |
| KR101747795B1 (en) | 2017-06-15 |
| CN105792493B (en) | 2018-06-08 |
| TW201626536A (en) | 2016-07-16 |
| JP6077023B2 (en) | 2017-02-08 |
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