CN105777116A - Microwave dielectric ceramic and preparation method thereof - Google Patents

Microwave dielectric ceramic and preparation method thereof Download PDF

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CN105777116A
CN105777116A CN201610226988.2A CN201610226988A CN105777116A CN 105777116 A CN105777116 A CN 105777116A CN 201610226988 A CN201610226988 A CN 201610226988A CN 105777116 A CN105777116 A CN 105777116A
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medium ceramics
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CN105777116B (en
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张少林
崔立成
顾媛
王淳
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Suzhou Zibo Electronic Technology Co Ltd
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Abstract

The invention provides a microwave dielectric ceramic and a preparation method thereof.The microwave dielectric ceramic includes a main crystal phase, a chemical expression formula of the main crystal phase is (1-x) Zr0.5Sn0.5TiO4-x(Ni1/3Ta2/3)TiO, wherein x is greater than or equal to 0.1 but is smaller than or equal to 0.3.Experimental results show that the microwave dielectric ceramic material has good microwave dielectric properties: dielectric constant epsilon r is 40-44 and is adjustable within the range, quality factor Q * f is 45000 to 60000 GHz, frequency temperature coefficient tau f is -8.5 to +15.3 * 10-6/DEG C and is adjustable in the range, and temperature characteristics are stable.The preparation method of the microwave dielectric ceramic is lower in sintering temperature, saves energy costs and conforms to a low-carbon environmental-protection concept.In addition, the preparation process is simple, does not need special equipment and strict process conditions and is suitable for industrial production.

Description

A kind of microwave-medium ceramics and preparation method thereof
Technical field
The invention belongs to electronically materials and component field, particularly relate to a kind of microwave-medium Pottery and preparation method thereof.
Background technology
Microwave dielectric material is a kind of new function electricity developed rapidly over the past two decades Sub-ceramic material.It is that wave filter, duplexer, resonator and Medium Wave Guide loop etc. are micro- Critical material in wave device, is widely used in satellite communication, mobile communication, electronics In antagonism and the microwave telecommunication devices such as airborne communication, it it is one of the focus of current media material.
Zr0.8Sn0.2TiO4Pottery is as a kind of traditional microwave dielectric material, and microwave band is During millimere-wave band (wave-length coverage: 1~10mm), there is medium dielectric constant microwave medium (εr≈40)、 High quality factor q *f, the temperature coefficient of resonance frequency τ of nearly zerofDeng microwave dielectric property, But it is high (higher than 1400 DEG C) to there is sintering temperature, in preparation process, energy consumption is relatively big, does not meets The theory of low-carbon environment-friendly.
Along with mobile communication technology development, miniaturization and the high-quality to microwave device Proposing higher requirement, this just requires that microwave-medium ceramics dielectric material should meet following wanting Ask: (1) has suitable medium dielectric constant microwave medium εr;(2) high quality factor Q*f;(3) temperature Degree coefficient τfNearly zero;(4) low-carbon energy-saving.Therefore this area is necessary to provide a kind of microwave Microwave-medium ceramics that dielectric properties are preferable and price is relatively low and preparation method thereof.
Summary of the invention
In view of this, the invention provides a kind of microwave-medium ceramics, including principal crystalline phase, The chemical expression of described principal crystalline phase is (1-x) Zr0.5Sn0.5TiO4-x(Ni1/3Ta2/3) TiO, Wherein (0.1≤x≤0.3).
In some embodiments, property-modifying additive, described property-modifying additive are also included For MnO2、CeO2、Ga2O3In any or the combination of arbitrary two kinds.
In some embodiments, described property-modifying additive is institute in microwave-medium ceramics The percentage by weight accounted for is 1wt%~5.0wt%.
In some embodiments, described property-modifying additive is institute in microwave-medium ceramics The percentage by weight accounted for is 3wt%.
Present invention also offers the preparation method of a kind of microwave-medium ceramics, including following step Rapid:
(1) ZrO is taken according to the stoichiometric proportion of the chemical expression of principal crystalline phase2、SnO2、 NiO、Ta2O5、TiO2After carry out for the first time being dried to obtain the first mixing after ball milling or husky mill Thing;
(2) the first described mixture pre-burning is obtained powder;
(3) second time ball milling or sand are carried out after described powder being added property-modifying additive Mill, obtains the second mixture after drying;
(4) described second mixture is added binding agent pelletize, compressing after prepare Raw training;
(5) raw training described in is sintered obtains microwave-medium ceramics.
In some embodiments, in described step (2), the first mixture pre-burning obtains Before powder, also include that the first mixture by described crosses the operation of 40 mesh sieves.
In some embodiments, in described step (4), the second mixture adds viscous Mixture granulation, compressing rear preparing before life is trained also include the second described mixture mistake The operation of 40 mesh sieves.
In some embodiments, in described step (2), the first mixture through 800 DEG C~ 1000 DEG C of pre-burnings obtain powder;In described step (5), raw training is through 1300 DEG C~1360 DEG C Sintering obtains microwave-medium ceramics.
In some embodiments, in described step (5), raw training is through 1340 DEG C of sintering Obtain microwave-medium ceramics.
In some embodiments, in described step (1), ball milling or husky mill for the first time Time is 8~16 hours;In described step (3), ball milling or husky time consuming for the second time It it is 8~24 hours.
Compared with prior art, the microwave-medium ceramics that the present invention provides has the advantage that
(1) microwave dielectric property is preferable: DIELECTRIC CONSTANT εr=40~44, and in this scope Interior scalable;Quality factor q *f=45000GHz~60000GHz;Frequency-temperature coefficient τf=-8.5~+15.3 × 10-6/ DEG C in the range of scalable, temperature characterisitic is stable.
(2), in the preparation method of the microwave-medium ceramics that the present invention provides, sintering temperature is relatively Low, save energy cost, meet the theory of low-carbon environment-friendly;
(3) preparation technology of the present invention is simple, it is not necessary to special installation and stringent process conditions, It is suitable for industrialized production.
It follows that the microwave-medium ceramics that the present invention provides is with a wide range of applications.
Accompanying drawing explanation
Fig. 1 is (1-x) Zr0.5Sn0.5TiO4-x(Ni1/3Ta2/3)TiO4Microwave-medium ceramics SEM schemes.
Detailed description of the invention
The claim of the present invention is done further by the mode below in conjunction with specific embodiment Describing in detail, elaborating a lot of detail in the following description so that fully understanding The present invention.
But the present invention can implement to be much different from alternate manner described here, Those skilled in the art can do similar improvement in the case of intension of the present invention, Therefore the present invention is not limited by following public being embodied as.
The invention provides a kind of microwave-medium ceramics, including principal crystalline phase, the change of principal crystalline phase Learning expression formula is (1-x) Zr0.5Sn0.5TiO4-x(Ni1/3Ta2/3)TiO4, wherein (0.1≤x≤ 0.3), wherein (Ni1/3Ta2/3)4+Interpolation significantly improve the quality factor of material and dielectric is normal Number, can adjust temperature coefficient of resonance frequency simultaneously.
Above-mentioned, microwave-medium ceramics is in addition to belonging to ionic crystal structural polysilicon material, past Toward still composite diphase material, generally by principal crystalline phase, one or more miscellaneous, pore etc. forms.
Wherein, Ti in principal crystalline phase4+、Zr4+、Ta5+The existence of ion and microwave-medium ceramics High-k be correlated with, furthermore by regulation Sn4+Content can make frequency temperature system Number τfIt is adjusted to zero.
It is to be appreciated that structure and the simple niobates of component are develop in recent years new Type microwave dielectric ceramic materials, all of niobates is all columbite structure, and τfFor Negative value.
Preferably, microwave ceramic dielectric material also includes property-modifying additive, described modification Additive is MnO2、CeO2、Ga2O3In any or the combination of arbitrary two kinds.
Above-mentioned, ion substitution to the internal structure change of microwave ceramic dielectric material with produced Raw corresponding dielectric properties change difference, by the phase structure of modified principal crystalline phase, aobvious Micro-assembly robot, Analysis of Dielectric Properties, it appeared that different ionic radius, polarizability, electricity The ion doping of negativity and valence state is relatively big to the performance impact of principal crystalline phase, the experiment proved that MnO2、CeO2And Ga2O3Be respectively provided with improve microwave ceramic dielectric material dielectric properties, Reduce the effect of sintering temperature.
Wherein, above-mentioned microwave-medium ceramics, by doping Mn ion, attracts free electron It is changed into the electronics of tight-binding, the reduction of Ti ion can be suppressed, prevent sintered Due to oxygen deficiency, Ti in journey4+It is reduced to Ti3+, thus cause dielectric loss to increase, micro- The dielectric properties of ripple media ceramic deteriorate.
The study on the modification of host crystal system is mainly collected by lanthanide series Ce and boron group element Ga In in ion pair crystal structure and the impact of dielectric properties.Meanwhile, by improving crystal knot The compactness extent of crystal when structure also improves sintering pottery, thus reduce sintering temperature.
It is understood that the mode of doping vario-property additive is divided into two kinds: one to be first to close Become principal crystalline phase compound, then doping vario-property additive;Two is at synthesis principal crystalline phase compound The feed proportioning stage with regard to doping vario-property additive.
Preferably, the weight hundred that described property-modifying additive is shared in microwave-medium ceramics Proportion by subtraction is 1wt%~5.0wt%.
Preferably, the weight hundred that described property-modifying additive is shared in microwave-medium ceramics Proportion by subtraction is 3wt%.
Above-mentioned, the change in dielectric constant of composite diphase material obeys logarithm mixing rule, controls miscellaneous Item content, particularly reduces air vent content, makes ceramics sample densified sintering product seem the heaviest Want.
When property-modifying additive consumption should be avoided too high, the liquid that pottery produces in sintering process Meet more, while promoting grain growth, also result in individual crystalline grains abnormal growth, brilliant Particle size uniformity is deteriorated, and is unfavorable for the raising of density on the contrary, i.e. exceedes when amount of liquid phase Good content is the most no longer beneficial to densification process.
When the addition of property-modifying additive controls within the specific limits, microwave-medium ceramics exists During sintering, when consistency reaches preferably, being hardly visible pore, grain development is relatively complete, Grain size concordance is preferable.But when exceeding certain value, the surface liquid of microwave-medium ceramics Gradually increasing mutually, grain size concordance is poor, by the compactness of impact pottery.
The experiment proved that, above-mentioned microwave dielectric ceramic materials has low-loss and good micro- Ripple dielectric properties DIELECTRIC CONSTANT ε=40~44, and scalable in this range;Quality factor Q*f=45000GHz~60000GHz;Frequency-temperature coefficient τf=-8.5~+15.3 × 10-6/ DEG C in the range of scalable, temperature characterisitic is stable.
The invention provides the preparation method of a kind of microwave-medium ceramics, comprise the following steps:
Step (1): take ZrO according to the stoichiometric proportion of the chemical expression of principal crystalline phase2、 SnO2、NiO、Ta2O5、TiO2After carry out being dried to obtain after ball milling or husky mill for the first time the One mixture;
Above-mentioned, in step (1), it is preferable that be more than the ZrO of 99.5% with purity2、SnO2、 NiO、Ta2O5、TiO2For initial feed;Put into ball milling in ball mill.Ball milling for the first time Purpose be to make powder refine and mixing all.
Preferably, initial feed is put in polyester tank, adds deionized water, adds zirconium ball, Some hours of ball milling on planetary ball mill, rotating speed is 300~800 revs/min.
It is understood that deionized water can also be ethanol.
Preferably, initial feed, zirconium ball, the volume ratio of deionized water (ethanol) are 1:5:0.7~1.5.
Described planetary-type grinding machine is by ball grinder, fangs, rotating disk, fixed pulley and electricity Motivations etc. form, and have four ball grinders on rotating disk, and when rotating disk rotates, ball grinder is with turning Armor makees planetary motion around same axle center i.e. central shaft, and in tank, abrasive material is in high-speed motion Grind and mix the raw material being submerged.This kind of ball grinder rotating speed is fast, and grinding efficiency is high, and structure is tight Gather, easy to operate, seal sampling, safe and reliable, noise is low, pollution-free, lossless.
Of course, it should be understood that can also use other ball milling method and other Mixer-mill.
It is to be understood that utilize high pure raw material, it is possible to reduce powder particle size, preparation ratio The pure superfines that surface area is big, activity is high, can increase sintering power, promotes activity Sintering, thus effectively reduce sintering temperature.
Preferably, the initial feed after ball milling is put in drying baker, in 100~120 DEG C of bakings Dry.
Step (2): the first described mixture pre-burning is obtained powder.
Above-mentioned, the purpose of pre-burning is to allow native oxide carry out preliminary reaction, and Crystallization needed for most of being formed, utilizes principal crystalline phase, and the contraction reducing porcelain becomes Shape, the structure of feed change is beneficial to molding and sintering, thus improves the dielectricity of pottery Can, to ensure the quality of final products.
When avoiding direct sintering after molding, ceramic shrinkage rate is big, and pottery easily deforms upon Cracking etc..
Step (3): carry out after described powder is added property-modifying additive and sintering aid Ball milling or husky mill, obtain the second mixture after drying for the second time;
Aforementioned, property-modifying additive mainly to microwave-medium ceramics dielectric properties main three Parameter dielectric constant, quality factor and temperature coefficient of resonance frequency carry out improving and optimizing. Microwave-medium ceramics is mainly made up of crystalline phase, crystal boundary, pore etc., belongs to ionic structure Polycrystalline material.The rising of ceramic material density can with the increase of population in unit volume To improve dielectric constant.Reduce the porosity, ceramic body sample sintering process can be formed perhaps Many pores, this reduces one of major reason that density of material causes dielectric constant to decline just.
The another kind of method to the macro adjustments and controls dielectric constant of ceramic material is can to select not Same radius size, the ion of different polarizability, by entering the A position of its principal phase, B position Row ion exchange, so that unit cell volume changes with polarizability.The of ceramic material Two-phase can affect the change of dielectric constant too, so controlling the growing amount of the second phase also It it is one of the factor of important consideration.
It is experimentally verified that Mn4+、Ce4+And Ga3+Have and improve microwave ceramic dielectric material Dielectric properties, the effect of reduction sintering temperature.
Preferably, the powder obtained after pre-burning, it is incubated 2~8 hours.
Furthermore, in step (3), second time ball milling makes, preburning powdered material and property-modifying additive Mixing and refine, being likely to there is also in the powder after pre-burning does not has solid phase reversal complete Initial feed, ball milling the most again, promote pilot process thing or initial feed to carry Supply to increase the chance of reaction.
If there is no the secondary ball milling process after pre-burning, crystal grain will be caused relatively big and size not All, also have impact on grain rearrangement and the densification of ceramic post sintering process.
Preferably, the powder after ball milling and property-modifying additive and the mixture of sintering aid Put in drying baker, in 100~120 DEG C of drying.
Step (4): described second mixture is added binding agent pelletize, compressing Rear prepared raw training.
Above-mentioned, pelletize is the leading technique of compressing;Because ceramic powder is more Tiny, and powder is the thinnest, surface activity is the biggest, then the gas of its surface adsorption is also more Many, thus its bulk density is the least, so the base after binding agent to be added raising dry-pressing Body density.It is understood that the amount adding binding agent should be appropriate, cross molding at least Difficulty, crosses the consistency that can reduce sample at most, affects its performance.
Adhesive can be polyvinyl alcohol (Polyvinyl alcohol, PVA), paraffin or phenol Novolac.Being appreciated that in actual applications, adhesive can also be other kinds of Adhesive.
Preferably, the polyvinyl alcohol that binding agent uses mass percent to be 8%~10% (Polyvinyl alcohol, PVA) solution, carries out pelletize as binding agent, after pelletize Crossing 80 mesh sieves, make green compact with powder compressing machine with the pressure of 4MPa, green compact are a diameter of 10mm, thickness is 5mm.
Preferably, binding agent uses mass percent to be 8% polyvinyl alcohol (Polyvinyl Alcohol, PVA) solution.
Preferably, 80 mesh sieves are crossed after the second mixture adds binding agent pelletize.
Preferably, binder removal at a certain temperature is trained in life.
Unsuitable too fast it is understood that heat up during binder removal, cause Sheng Peinei to there is pore.
Preferably, by green compact at 600 DEG C of binder removal 4h, then according to the speed of 3~5 DEG C/min Rate rises to temperature required during sintering some hours.
Step (5): described raw training is sintered obtains microwave-medium ceramics.
When improving sintering temperature, for the microwave-medium ceramics of 0.1≤x≤0.3, Q*f Value is all first to increase, and then begins to decline or saturated.
Preferably, the microwave-medium ceramics prepared after sintering should cool down with sintering furnace.
In sum, the present invention provides the preparation method of microwave-medium ceramics to include step (1) ~step (5);Utilize solid reaction process, by initial feed according to preset blending ratio physics Method mix homogeneously, after pre-burning, adds property-modifying additive and improves the crystal of principal crystalline phase Structure, when improve sintering raw training, the consistency in crystal, reduces pore, thus realizes Step (5) is sintered to low-temp liquid-phase sintering, reduces the burning in solid reaction process Junction temperature.The method technique is the most ripe, simple, with low cost, be easy to industry metaplasia Produce, for the prefered method of industrialized production.
Preferably, in described step (2), the first mixture pre-burning is gone back before obtaining powder Including the operation that the first described mixture is crossed 40 mesh sieves.
Above-mentioned, the first mixture disperses more uniform after sieving, the beneficially first mixture in Pre-burning in step (3) is more abundant, is not susceptible to the phenomenons such as caking.
Preferably, in described step (4), the second mixture addition binding agent pelletize, Also include that the second mixture by described crosses the behaviour of 40 mesh sieves before preparing raw training after compressing Make.
Above-mentioned, the second mixture disperses more uniform after sieving, the beneficially second mixture in Sintering in step (5) is more abundant, and the crystal grain in crystal is uniform, and pore is less and relatively Little.
Preferably, in described step (2), the first mixture is through 800 DEG C~1000 DEG C Pre-burning obtains powder;In described step (5), raw training is through 1300 DEG C~1360 DEG C sintering Obtain microwave-medium ceramics.
Preferably, in described step (5), raw training obtains microwave through 1340 DEG C of sintering and is situated between Matter pottery.
Above-mentioned, calcined temperature is unsuitable too high, and calcined temperature is too high, the reunion of preburning powdered material Seriously, it is difficult to carry out secondary ball milling.Calcined temperature is too low, can affect ceramic post sintering process Grain rearrangement and densification.
It is understood that sintering temperature should control within the specific limits, sintering temperature mistake Low, crystal grain coarsening rate is the slowest, even cannot grow up.Along with sintering temperature improves crystal grain Substantially growing up, grain circle gap is reduced, and grain development is abundant, and apparent porosity reduces.But When sintering temperature is too high, crystal grain will appear from abnormal growth, and apparent porosity raises, crystal grain The uniformity of growth, concordance decline.Meanwhile, excessive crystal grain is empty when Dislocations, oxygen The probability that the defects such as position occur increases, and result in Q*fValue declines rapidly.
The most too high and sintering temperature and low excessively all can affect the normal growth of crystal grain.
Being verified by experiments, raw training obtains microwave-medium ceramics grain development through 1340 DEG C of sintering Perfect, queueing discipline, pore is less, and compactness extent is preferable.
Preferably, in described step (2), the first mixture is through the powder of 1000 DEG C of pre-burnings Material, is incubated 4 hours.
Preferably, in described step (5), raw training is incubated 6 after 1340 DEG C of sintering Hour obtain microwave-medium ceramics.
Preferably, in described step (1), ball milling or husky time consuming for the first time be 8~ 16 hours.
Preferably, in described step (1), ball milling or husky time consuming are 10 for the first time Hour, rotating speed is 400 revs/min.
Preferably, in described step (3), ball milling or husky time consuming for the second time be 8~ 24 hours.
Preferably, in described step (3), ball milling or husky time consuming are 16 for the second time Hour, rotating speed is 400 revs/min.
Hereinafter, it is expanded on further by specific embodiment.
Specific embodiment and related process parameters refer to table 1.
Table 1
The test result of the relevant microwave dielectric property of specific embodiment refers to table 2.
Table 2
The microwave-medium ceramics that above-described embodiment 1~embodiment 12 prepare has good Good microwave dielectric property: DIELECTRIC CONSTANT εr=40~42, and scalable in this range; Quality factor q *f=45000GHz~60000GHz;Frequency-temperature coefficient τf=-8.5~ +15.3×10-6/ DEG C in the range of scalable, temperature characterisitic is stable.
Embodiment described above only have expressed the several embodiments of the present invention, and it describes relatively For concrete and detailed, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention. It should be pointed out that, for the person of ordinary skill of the art, without departing from this On the premise of bright design, it is also possible to make some deformation and improvement, these broadly fall into this Bright protection domain.Therefore, the protection domain of patent of the present invention should be with claims It is as the criterion.

Claims (10)

1. a microwave-medium ceramics, it is characterised in that: include principal crystalline phase, described oikocryst The chemical expression of phase is (1-x) Zr0.5Sn0.5TiO4-x(Ni1/3Ta2/3) TiO, wherein (0.1 ≤x≤0.3)。
2. microwave-medium ceramics as claimed in claim 1, it is characterised in that: also include Property-modifying additive, described property-modifying additive is MnO2、CeO2、Ga2O3In arbitrary A kind of combination of or arbitrary two kinds.
3. microwave-medium ceramics as claimed in claim 2, it is characterised in that: described Property-modifying additive accounts for 1 in microwave-medium ceramics Wt%~5.0wt%.
4. microwave-medium ceramics as claimed in claim 3, it is characterised in that: described Property-modifying additive accounts for 3wt% in microwave-medium ceramics.
5. a preparation method for microwave-medium ceramics as claimed in claim 1, it is special Levy and be:
(1) ZrO is taken according to the stoichiometric proportion of the chemical expression of principal crystalline phase2、SnO2、 NiO、Ta2O5、TiO2After carry out for the first time being dried to obtain the first mixing after ball milling or husky mill Thing;
(2) the first described mixture pre-burning is obtained powder;
(3) second time ball milling or sand are carried out after described powder being added property-modifying additive Mill, obtains the second mixture after drying;
(4) described second mixture is added binding agent pelletize, compressing after prepare Raw training;
(5) raw training described in is sintered obtains microwave-medium ceramics.
6. the preparation method of microwave-medium ceramics as claimed in claim 5, its feature exists In: in described step (2), the first mixture pre-burning also includes institute before obtaining powder The first mixture stated crosses the operation of 40 mesh sieves.
7. the preparation method of microwave-medium ceramics as claimed in claim 5, its feature exists In: in described step (4), the second mixture adds binding agent pelletize, compressing Rear preparing before life is trained also includes that the second mixture by described crosses the operation of 40 mesh sieves.
8. the preparation method of microwave-medium ceramics as claimed in claim 5, its feature exists In: in described step (2), the first mixture obtains through 800 DEG C~1000 DEG C of pre-burnings Powder;In described step (5), raw training obtains microwave through 1300 DEG C~1360 DEG C of sintering Media ceramic.
9. the preparation method of microwave-medium ceramics as claimed in claim 8, its feature exists In: in described step (5), raw training obtains microwave-medium ceramics through 1340 DEG C of sintering.
10. the preparation method of microwave-medium ceramics as claimed in claim 5, its feature Being: in described step (1), ball milling or husky time consuming are 8~16 hours for the first time; In described step (3), ball milling or husky time consuming are 8~24 hours for the second time.
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CN111384575A (en) * 2018-12-31 2020-07-07 深圳市大富科技股份有限公司 Dielectric filter, communication equipment, dielectric resonator and preparation method thereof
CN111384574A (en) * 2018-12-31 2020-07-07 深圳市大富科技股份有限公司 Dielectric filter, communication equipment, dielectric resonator and preparation method thereof
CN111384521A (en) * 2018-12-31 2020-07-07 深圳市大富科技股份有限公司 Dielectric filter, communication equipment, dielectric resonator and preparation method thereof
WO2024180832A1 (en) * 2023-02-28 2024-09-06 株式会社村田製作所 Dielectric ceramic and ceramic capacitor using same

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CN111384575A (en) * 2018-12-31 2020-07-07 深圳市大富科技股份有限公司 Dielectric filter, communication equipment, dielectric resonator and preparation method thereof
CN111384574A (en) * 2018-12-31 2020-07-07 深圳市大富科技股份有限公司 Dielectric filter, communication equipment, dielectric resonator and preparation method thereof
CN111384521A (en) * 2018-12-31 2020-07-07 深圳市大富科技股份有限公司 Dielectric filter, communication equipment, dielectric resonator and preparation method thereof
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