CN105728708B - 一种高密度长寿命钨钼合金坩埚的生产方法 - Google Patents
一种高密度长寿命钨钼合金坩埚的生产方法 Download PDFInfo
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- CN105728708B CN105728708B CN201610133825.XA CN201610133825A CN105728708B CN 105728708 B CN105728708 B CN 105728708B CN 201610133825 A CN201610133825 A CN 201610133825A CN 105728708 B CN105728708 B CN 105728708B
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- powder
- tungsten
- molybdenum
- crucible
- molybdenum alloy
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- 229910001182 Mo alloy Inorganic materials 0.000 title claims abstract description 21
- MGRWKWACZDFZJT-UHFFFAOYSA-N molybdenum tungsten Chemical compound [Mo].[W] MGRWKWACZDFZJT-UHFFFAOYSA-N 0.000 title claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 56
- 239000000843 powder Substances 0.000 claims abstract description 42
- 238000000034 method Methods 0.000 claims abstract description 37
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 29
- 239000010937 tungsten Substances 0.000 claims abstract description 29
- 238000003825 pressing Methods 0.000 claims abstract description 25
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 239000011812 mixed powder Substances 0.000 claims abstract description 23
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 27
- 229910000831 Steel Inorganic materials 0.000 claims description 17
- 239000010959 steel Substances 0.000 claims description 17
- 239000008188 pellet Substances 0.000 claims description 16
- 238000009413 insulation Methods 0.000 claims description 13
- 238000012216 screening Methods 0.000 claims description 13
- 238000012545 processing Methods 0.000 claims description 10
- 238000000137 annealing Methods 0.000 claims description 9
- 239000007789 gas Substances 0.000 claims description 9
- WSWMGHRLUYADNA-UHFFFAOYSA-N 7-nitro-1,2,3,4-tetrahydroquinoline Chemical compound C1CCNC2=CC([N+](=O)[O-])=CC=C21 WSWMGHRLUYADNA-UHFFFAOYSA-N 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 8
- 229910052739 hydrogen Inorganic materials 0.000 claims description 8
- 239000001257 hydrogen Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- 238000002156 mixing Methods 0.000 claims description 8
- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 claims description 8
- 238000005229 chemical vapour deposition Methods 0.000 claims description 7
- 230000003068 static effect Effects 0.000 claims description 7
- 238000010792 warming Methods 0.000 claims description 7
- 238000000498 ball milling Methods 0.000 claims description 6
- 238000003754 machining Methods 0.000 claims description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 239000006104 solid solution Substances 0.000 claims description 2
- -1 wherein Substances 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 238000012856 packing Methods 0.000 claims 1
- 238000005245 sintering Methods 0.000 abstract description 7
- 239000013078 crystal Substances 0.000 abstract description 4
- 238000004381 surface treatment Methods 0.000 abstract description 3
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 238000009826 distribution Methods 0.000 abstract description 2
- 238000000465 moulding Methods 0.000 abstract description 2
- 238000002360 preparation method Methods 0.000 abstract description 2
- 238000005056 compaction Methods 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000004663 powder metallurgy Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 238000004062 sedimentation Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 208000037656 Respiratory Sounds Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000001513 hot isostatic pressing Methods 0.000 description 1
- YNBADRVTZLEFNH-UHFFFAOYSA-N methyl nicotinate Chemical compound COC(=O)C1=CC=CN=C1 YNBADRVTZLEFNH-UHFFFAOYSA-N 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/14—Treatment of metallic powder
- B22F1/142—Thermal or thermo-mechanical treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/02—Compacting only
- B22F3/03—Press-moulding apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/02—Compacting only
- B22F3/04—Compacting only by applying fluid pressure, e.g. by cold isostatic pressing [CIP]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/12—Both compacting and sintering
- B22F3/14—Both compacting and sintering simultaneously
- B22F3/15—Hot isostatic pressing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
- B22F5/10—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product of articles with cavities or holes, not otherwise provided for in the preceding subgroups
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/08—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal halides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
- B22F2998/10—Processes characterised by the sequence of their steps
Abstract
Description
Claims (3)
Priority Applications (1)
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CN201610133825.XA CN105728708B (zh) | 2016-03-10 | 2016-03-10 | 一种高密度长寿命钨钼合金坩埚的生产方法 |
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CN201610133825.XA CN105728708B (zh) | 2016-03-10 | 2016-03-10 | 一种高密度长寿命钨钼合金坩埚的生产方法 |
Publications (2)
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CN105728708A CN105728708A (zh) | 2016-07-06 |
CN105728708B true CN105728708B (zh) | 2018-02-06 |
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CN201610133825.XA Active CN105728708B (zh) | 2016-03-10 | 2016-03-10 | 一种高密度长寿命钨钼合金坩埚的生产方法 |
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Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106591613B (zh) * | 2016-11-10 | 2018-02-13 | 洛阳科威钨钼有限公司 | 利用有益元素掺杂制备钨钼合金的方法 |
CN106567024B (zh) * | 2016-11-11 | 2018-02-13 | 洛阳科威钨钼有限公司 | 蓝宝石生产用钼合金坩埚的旋压制备方法 |
CN106623934B (zh) * | 2017-03-03 | 2019-11-05 | 大族激光科技产业集团股份有限公司 | Slm成型钢模具毛坯件的后处理方法及slm成型钢模具的制备方法 |
US20200122233A1 (en) * | 2018-10-19 | 2020-04-23 | United Technologies Corporation | Powder metallurgy method using a four-wall cylindrical canister |
CN109482869A (zh) * | 2018-12-02 | 2019-03-19 | 泰州市华诚钨钼制品有限公司 | 大直径中空钼合金顶头成型装置 |
CN113000085B (zh) * | 2021-02-23 | 2022-09-20 | 山东省科学院新材料研究所 | 一种扩散偶原位检测用自锁定式坩埚及其制备方法与应用 |
CN115466893A (zh) * | 2022-09-19 | 2022-12-13 | 宁波江丰电子材料股份有限公司 | 一种高密度钼钨合金材料及其制备方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2142935B (en) * | 1982-08-14 | 1985-09-18 | Heraeus Gmbh W C | Seamless sintered iridium crucibles |
CN103350227A (zh) * | 2013-05-23 | 2013-10-16 | 安泰科技股份有限公司 | 一种大尺寸高密度钨坩埚及其制备方法 |
CN204220989U (zh) * | 2014-10-29 | 2015-03-25 | 厦门虹鹭钨钼工业有限公司 | 一种钨坩埚冷等静压压制成型的模具 |
CN104480446A (zh) * | 2014-12-30 | 2015-04-01 | 山东昊轩电子陶瓷材料有限公司 | 钼钛合金靶材及其生产方法 |
CN104744051A (zh) * | 2015-03-24 | 2015-07-01 | 烟台同立高科新材料股份有限公司 | 一种氮化硅坩埚的制作方法 |
CN205032729U (zh) * | 2015-10-14 | 2016-02-17 | 山东格美钨钼材料有限公司 | 一种压圈、钢套结构钨坩埚成型模具 |
-
2016
- 2016-03-10 CN CN201610133825.XA patent/CN105728708B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2142935B (en) * | 1982-08-14 | 1985-09-18 | Heraeus Gmbh W C | Seamless sintered iridium crucibles |
CN103350227A (zh) * | 2013-05-23 | 2013-10-16 | 安泰科技股份有限公司 | 一种大尺寸高密度钨坩埚及其制备方法 |
CN204220989U (zh) * | 2014-10-29 | 2015-03-25 | 厦门虹鹭钨钼工业有限公司 | 一种钨坩埚冷等静压压制成型的模具 |
CN104480446A (zh) * | 2014-12-30 | 2015-04-01 | 山东昊轩电子陶瓷材料有限公司 | 钼钛合金靶材及其生产方法 |
CN104744051A (zh) * | 2015-03-24 | 2015-07-01 | 烟台同立高科新材料股份有限公司 | 一种氮化硅坩埚的制作方法 |
CN205032729U (zh) * | 2015-10-14 | 2016-02-17 | 山东格美钨钼材料有限公司 | 一种压圈、钢套结构钨坩埚成型模具 |
Non-Patent Citations (1)
Title |
---|
钨坩埚的生产工艺及其改进;郭国洲;《中国钨业》;19920930(第09期);29-31 * |
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Denomination of invention: Production method of high-density long-life tungsten-molybdenum alloy crucible Effective date of registration: 20200414 Granted publication date: 20180206 Pledgee: Bank of China Limited by Share Ltd. Luoyang branch Pledgor: Achemetal Tungsten AND Molybdenum Co.,Ltd. Registration number: Y2020980001482 |
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Date of cancellation: 20210422 Granted publication date: 20180206 Pledgee: Bank of China Limited by Share Ltd. Luoyang branch Pledgor: Achemetal Tungsten AND Molybdenum Co.,Ltd. Registration number: Y2020980001482 |
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Denomination of invention: A production method of high density and long life W-Mo alloy crucible Effective date of registration: 20210426 Granted publication date: 20180206 Pledgee: Bank of China Limited by Share Ltd. Luoyang branch Pledgor: Achemetal Tungsten AND Molybdenum Co.,Ltd. Registration number: Y2021980003028 |
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Date of cancellation: 20220413 Granted publication date: 20180206 Pledgee: Bank of China Limited by Share Ltd. Luoyang branch Pledgor: Achemetal Tungsten AND Molybdenum Co.,Ltd. Registration number: Y2021980003028 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A production method of high density and long life tungsten molybdenum alloy crucible Effective date of registration: 20220418 Granted publication date: 20180206 Pledgee: Bank of China Limited by Share Ltd. Luoyang branch Pledgor: Achemetal Tungsten AND Molybdenum Co.,Ltd. Registration number: Y2022980004337 |
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Granted publication date: 20180206 Pledgee: Bank of China Limited by Share Ltd. Luoyang branch Pledgor: Achemetal Tungsten AND Molybdenum Co.,Ltd. Registration number: Y2022980004337 |