CN105704903B - A kind of discharge electrode structure that the vacuum plasma based on magnetic fields generates - Google Patents

A kind of discharge electrode structure that the vacuum plasma based on magnetic fields generates Download PDF

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CN105704903B
CN105704903B CN201610151028.4A CN201610151028A CN105704903B CN 105704903 B CN105704903 B CN 105704903B CN 201610151028 A CN201610151028 A CN 201610151028A CN 105704903 B CN105704903 B CN 105704903B
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anode
cathode
cone
helix
insulation division
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CN105704903A (en
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刘文正
窦志军
陈修阳
崔伟胜
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Beijing Jiaotong University
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Beijing Jiaotong University
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/32Plasma torches using an arc
    • H05H1/34Details, e.g. electrodes, nozzles
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/02Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
    • H05H1/04Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using magnetic fields substantially generated by the discharge in the plasma

Abstract

The discharge electrode structure for the vacuum plasma generation based on magnetic fields that the invention discloses a kind of, it is placed in vacuum environment, including cathode, anode and insulating element, cathode includes a metal cylinder, one end of metal cylinder is provided with cone, discharge end of the tapered end of cone as cathode;Insulating element includes the tubular insulation division of suit package cathode, and one end of tubular insulation division is equipped with horn-like radiation insulation division;Anode includes an orificed anode and a helix anode;One end of tubular insulation division connects horn-like radiation insulation division by orificed anode;Helix anode is that the metal wire of single-layer or multi-layer band insulation is spirally wound on the outside of insulating element;The axis of orificed anode and helix anode is overlapped with the holding of the tapered end center line of cathode cone;Cathode is connected by binding post with the negative high voltage terminal of external circuit, and a terminal of helix anode is directly connected to orificed anode, and the other end of helix anode passes through wired earth.

Description

A kind of discharge electrode structure that the vacuum plasma based on magnetic fields generates
Technical field
The invention belongs to the electric propulsion technology fields of microsatellite application, are related to a kind of discharge electrode that plasma generates Structure, more particularly relate to it is a kind of generation high density, high-energy, vectored injection plasma discharge electrode.
Background technique
Electric discharge generates metallic plasma in vacuum environment, these metallic plasmas have very high energy, characteristic It is closely related with electrode structure.When arc current is smaller, for the form of vacuum arc in diffusion state, generating has certain movement energy The plasma of amount.Metallic plasma can be applied to ion beam surface analysis technique and ion implantation technique;It is directed to universe The vacuum environment in space can generate thrust using electrode offer metallic plasma, without carrying additional propellant, and Anode solenoid portion is flowed through using discharge current and generates magnetic field without additional electromagnetic coil, is reduced propeller size, can be answered Propulsion system for grapefruit satellite fine adjustment of attitude.
In existing technology, vacuum discharge mostly uses greatly cone-plate electrode and cone-cylinder electrode.What cone-plate electrode generated Plasma can be stopped in Propagation by plate-shaped anode, and what can be utilized is only the plasma least partially radially propagated;Cone- The plasma that cylinder electrode generates is not blocked in axial propagation, but since the meeting in communication process that acts on of electric field line exists Radial diffusion, thus the density of axial plasma, energy can significantly reduce.
Chinese patent CN102869181A has mentioned " electrode structure and electrode fixing structure for plasma propeller ", By design cylindrical cathode and the anode for opening bell mouth shape, ablation of the plasma to insulation wall when utilizing electric discharge is generated high Energy, highdensity plasma, improve the propulsive performance of such propeller to a certain extent.But the electrode knot of the patent The plasma that structure generates during Propagation and the plasma not yet in effect for inhibiting radial diffusion, can lose it is certain plus Fast energy influences the performance of propeller." magnetic field plasma is raw in Dou Zhijun, Liu Wenzheng, Chen Xiuyang vacuum discharge for document At influence [J] vacuum of characteristic, 2015, the electrode mentioned in 03:59-62. " is cone spiral electrode, is proposed using spiral Shape anode generates the theory that axial magnetic field plasma generates constraint, orientation, compared to simultaneous quantitative cone cylinder shape electricity The plasma density that pole and cone spiral electrode generate, it was demonstrated that cone screw electrode can improve plasma using magnetic field and produce Raw density and directionality.But only plasma can effectively be fettered to the document by proposing and demonstrate helical anode structure Theory, there is no comprehensive electricity, magnetic field angles to optimize comprehensively to electrode structural designs.
The practical consequence that the present invention, that is, inventor is proposed based on the theoretical research formerly delivered.
Summary of the invention
The invention proposes a kind of discharge electrode structures generated for vacuum plasma.Pass through reasonable electrode structure Design, is cooperated using cathode and anode, and strong electric area is generated near cathode point, reduces the initial discharge electricity of electrode Pressure;Using anode solenoid portion, stronger axial magnetic field is generated in electrode interior cavity, can effectively constrain plasma Body reduces the radial diffusion of plasma, increases plasma density and energy that electrode ejects.
The purpose of the present invention is to provide a kind of vacuum plasma discharge electrode structures, both can solve existing cone-plate electricity Pole can only utilize the lesser problem of plasma density along electrode radial diffusion during discharge, and can solve cone-cylinder class Plasma causes axial energy to decline fast problem due to radial diffusion when electrode vacuum discharges.
For achieving the above object, the technical scheme is that a kind of vacuum plasma based on magnetic fields The discharge electrode structure of generation, is placed in vacuum environment, including cathode, anode and insulating element, and the cathode includes a metal Cylindrical body, one end of metal cylinder are provided with cone, discharge end of the tapered end of cone as cathode;Insulating element includes The tubular insulation division of one suit package cathode, one end of tubular insulation division is equipped with horn-like radiation insulation division;Anode includes a ring Shape anode and a helix anode;Wherein,
One end of tubular insulation division connects horn-like radiation insulation division by orificed anode;Helix anode be single layer or The metal wire of sandwich tape insulation is spirally wound on the outside of insulating element;The axis of orificed anode and helix anode and yin The tapered end center line of polar circle cone keeps being overlapped;Cathode is connected by binding post with the negative high voltage terminal of external circuit, helix tube One terminal of shape anode is directly connected to orificed anode, and the other end of helix anode passes through wired earth.
The tapered end of the cone is arc or spherical shape.The taper of the cone cone is 1:2 to 2:1.
The both ends of the orificed anode have groove structure, tubular insulation division and horn-like insulation division difference embedded rings shape sun The groove of pole.
Alternatively,
The both ends of the orificed anode have helicitic texture, tubular insulation division and horn-like insulation division and pass through screw thread and ring-type Anode connection.
The metal cylinder of the cathode is made of good magnetic conductive metal material.Other may be selected in the cone end of cathode Conductor material, and remain a good conductive body.
The cone end of cathode position within the scope of helix anode one third is adjustable.
The material of the insulator portion can use the biggish material of dielectric constant, such as polytetrafluoro material.
The beneficial effects of the present invention are:
Compared with prior art, the present invention the anode of discharge electrode is arranged to solenoidal structure by the present invention, cone cell cathode is inserted Enter to keep the center line of the two to be overlapped in the helical tube anode, electric discharge is generated in the cathode point.Electric current flows through spiral shell when electric discharge Spool can generate stronger axial magnetic field inside solenoid.During diffusion, charged particle is axially moved plasma Component is unaffected, and radial motion component can deflect under the action of Lorentz force to central axis, therefore reach constraint The effect of plasma, thus axially obtaining the plasma of high density, high-energy.Further, since the cathode trunk portion Divide and use the good metallic conductor of permeance, cathode can converge the magnetic line of force by cathode cylinder, deposit at cone cell tip In a high-intensity magnetic field area, the effective use in magnetic field ensure that.
The discharge electrode structure is simple, discharge stability and reproducible.
Detailed description of the invention
It is considered in conjunction with the accompanying, by referring to following detailed description, the present invention can be more completely and better understood and is easy Learn many adjoint advantages, the drawings described herein are used to provide a further understanding of the present invention, constitutes this hair Bright a part, the illustrative embodiments of the present invention and their descriptions are used to explain the present invention, does not constitute to of the invention improper It limits, in which:
Fig. 1 is the two-dimensional structure schematic diagram of the embodiment of discharge electrode structure of the invention;
Fig. 2 is the specific discharge circuit figure comprising discharge electrode shown in FIG. 1;
Fig. 3 indicates the Density Distribution situation of the surrounding them plasma measured using Langmuir probe method.
Specific embodiment
Below in conjunction with attached drawing to the present invention, technical scheme in the embodiment of the invention is clearly and completely described.
Fig. 1 is the structure two-dimensional representation of discharge electrode embodiment of the invention.Referring to Fig. 1, in the present embodiment, electric discharge electricity Pole includes the cathode 1 with cone end, orificed anode 3a, solenoidal structure anode 3b and tubular insulating element 2a, horn-like Insulating element 2b.
Wherein, the cathode 1 is the structure that one end has cone tapered end, discharge end of the tapered end as cathode 1.Pass through Tapered end is set and is used as discharge end, can enhanced discharge effect, and plasma is made to appear in electrode centers region, convenient for magnetically confined Control, but the tip of the cone of cone is not easy too sharp, otherwise point of discharge can be caused to deviate, influence discharge stability.This implementation In example, cathode 1 includes metal cylinder and the conical structure for being set to the metal cylinder one end, the cone of conical structure Degree is 1:2 to 2:1, is specially 1:1 in the present embodiment.Cathode is connected with the negative high voltage terminal of external circuit.
The material of the columnar part of the metal cylinder of the cathode 1 can use the good permeance metal of irony.
In addition, the tip of the tapered end of cathode 1 will keep certain circularity to further increase the stability of electric discharge, for example, It can set tapered end tip to arcuation or spherical.
The helix anode 3b is a solenoid structure, is made for enameled conducting wire, and solenoidal enameled conducting wire is straight Diameter and helical pipe diameter and solenoidal screw pitch etc. can be accordingly arranged with discharge voltage.
For ease of understanding, the detailed dimensions of one group of discharge electrode are given below.Electric discharge orificed anode 3a is cylinder ring, internal diameter It is 4mm for 5mm width, is plugged between tubular insulating element 2a and horn-like insulating element 2b by groove, helix sun Pole 3b uses diameter for 8.0mm, the enamel-cover copper conductor of long 34.5mm it is double-deck it is close around the number of turns be 230 circles spiral electrode, spiral A terminal of sheath 3b is welded on the outside of orificed anode 3a.Cathode cone tips use lead metal, metal cylinder Body uses stainless steel material, cathode overall length 25mm, and metal cylinder diameter is 5mm, and cone taper is 1:1.Cathode and anode Between tubular insulating element 2a and horn-like insulating element 2b be polytetrafluoroethylene material.
Discharge power supply uses pulsed discharge form, and specific discharge circuit is as shown in Figure 2.220V AC power source, by becoming Depressor boosting is charged after voltage doubling rectifing circuit transformation to capacitor C2.When applying firing pulse to 3 gaps, 3 gaps are led It is logical, circuit is constituted through C2,27 Ω resistance, 160 μ H inductance and vacuum gap, vacuum gap breakdown generates electric discharge phenomena.Cathode is logical It crosses binding post and connects power supply high-voltage end, orificed anode passes through wired earth.
Fig. 3 shows the density that cone-screw electrode and cone-cylinder electrode plasma have been surveyed by Langmuir probe method, It is 3mm, 10 circles, the steel spiral electrode of internal diameter 10mm and the tubular of internal diameter 10mm that wherein screw pitch, which is respectively adopted, in discharge anode Electrode.The cathode that discharges uses 60 ° of cone angle, the lead matter cone cell electrode of internal diameter 5mm.In identical discharge current, with cone-cylinder electrode phase Than the plasma density that cone-screw electrode generates is larger.Illustrate can to obtain high density, big using cone-screw electrode structure The metallic plasma of area.
In the present embodiment, helix is set by the anode of discharge electrode, cone cell cathode and solenoid are same center Line.Electric current, which flows through anode solenoid, when due to electric discharge to generate a biggish axial magnetic field, this magnetic field meeting by the heart in the electrodes Constraint effect is generated to the radial motion component of charged particle, density, the energy of plasma can be increased.That is, phase To traditional cone-cylinder and cone-plate electrode, in the plasma that the cone screw electrode that the present invention program proposes generates in axial density Have large increase, it can be achieved that high-density plasma generation.Moreover, the discharge electrode structure is simple, discharge stability and It is reproducible.
Above-mentioned discharge electrode can be applied in plasma device, can realize pulsed discharge using the plasma device Plasma implantation techniques and pulse metal ion propulsion technology.
Although the present invention is disclosed as above with preferred embodiment, it is not for limiting the present invention, any this field skill Art personnel without departing from the spirit and scope of the present invention, can make possible variation and modification, therefore guarantor of the invention Shield range should be subject to the range that the claims in the present invention are defined.Described embodiment is only that a part of the invention is implemented Example, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not making creativeness Every other embodiment obtained, shall fall within the protection scope of the present invention under the premise of labour.

Claims (5)

1. a kind of discharge electrode structure that the vacuum plasma based on magnetic fields generates, is placed in vacuum environment, including yin Pole, anode and insulating element, which is characterized in that the cathode includes a metal cylinder, and one end of metal cylinder is provided with Cone, discharge end of the tapered end of cone as cathode;
Insulating element includes the tubular insulation division of suit package cathode and the insulation division that one is arranged with horn-like radiation;
Anode includes an orificed anode and a helix anode;Wherein,
One end of tubular insulation division connects horn-like radiation insulation division by orificed anode;
Helix anode is that the metal wire of single-layer or multi-layer band insulation is spirally wound on the outside of insulating element;
The axis of orificed anode and helix anode is overlapped with the holding of the tapered end center line of cathode cone;
Cathode is connected by binding post with the negative high voltage terminal of external circuit, the terminal and orificed anode of helix anode It is directly connected to, the other end of helix anode passes through wired earth;The tapered end of the cone is arc or spherical shape;
The both ends of the orificed anode have groove structure, and tubular insulation division and horn-like insulation division distinguish embedded rings shape anode Groove.
2. the discharge electrode structure that a kind of vacuum plasma based on magnetic fields according to claim 1 generates, It is characterized in that, the taper of the cone cone is 1:2 to 2:1.
3. the discharge electrode structure that a kind of vacuum plasma based on magnetic fields according to claim 1 generates, It is characterized in that, the both ends of the orificed anode have helicitic texture, and tubular insulation division and horn-like insulation division pass through screw thread and ring The connection of shape anode.
4. the discharge electrode structure that a kind of vacuum plasma based on magnetic fields according to claim 1 generates, It is characterized in that, the metal cylinder of the cathode is made of good magnetic conductive metal material.
5. the discharge electrode structure that a kind of vacuum plasma based on magnetic fields according to claim 1 generates, It is characterized in that, the cone end of cathode position within the scope of helix anode is adjustable.
CN201610151028.4A 2016-03-16 2016-03-16 A kind of discharge electrode structure that the vacuum plasma based on magnetic fields generates Active CN105704903B (en)

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WO2017196622A2 (en) 2016-05-11 2017-11-16 Veeco Instruments Inc. Ion beam materials processing system with grid short clearing system for gridded ion beam source
SG10201705059TA (en) 2016-06-24 2018-01-30 Veeco Instr Inc Enhanced cathodic arc source for arc plasma deposition
CN108612599B (en) * 2016-12-10 2020-09-08 中国科学院大连化学物理研究所 Liquid-electric combined space thruster
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CN110225642A (en) * 2018-03-01 2019-09-10 郑州大学 A kind of mixed type plasma jet of novel spark discharge
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