CN207458884U - A kind of Plasma-cathode e-gun - Google Patents
A kind of Plasma-cathode e-gun Download PDFInfo
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- CN207458884U CN207458884U CN201721129368.3U CN201721129368U CN207458884U CN 207458884 U CN207458884 U CN 207458884U CN 201721129368 U CN201721129368 U CN 201721129368U CN 207458884 U CN207458884 U CN 207458884U
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Abstract
The utility model is related to a kind of Plasma-cathode e-guns of plasma discharge,Mainly include hollow cathode,Trigger module,Insulating trip,Floating ground anode,Anode disc,Connector,Tracheae,Air accumulator,Drift region,Beam detector,Current feedthrough,Oscillograph,Discharge power supply,The pulse power,Supporting rod and cable,Supporting rod is hollow and its interior energy passes through cable,And the position of trigger module can be adjusted,Emit six cerium boride of tube material,Trigger module is mainly by dielectric disc,Finger-type contact electrode and metal electrode disk composition,Electronics is generated by applying 3kV 6kV potentials between finger-type contact electrode and metal electrode disk,Floating ground anode and anode disc are respectively provided with centre bore,Floating ground anode is annular electrode,Liang Gefudi anodes centre hole size is consistent,4 millimeters of spacing,Ceramic heating pipe,Spiral groove is respectively provided in coaxial heating tube,The groove is wound with the rhenium heater strip of solderless contact,Rhenium heater strip is embedded in spiral groove by aluminium housing.
Description
Technical field
The utility model is related to plasma discharging teclmiques field, particularly one kind can effectively control pseudo- spark discharge
The beam energy of hollow cathode and line in journey, by changing breakdown mechanism and discharge operation condition so that the energy of electron beam
Amount and line are easier to control, a kind of device lifetime longer Plasma-cathode e-gun.
Background technology
Pseudo- spark discharge is a kind of low pressure gaseous discharge phenomenon, by control arc chamber internal ionization gas operating air pressure and
Applied voltage reaches the discharging condition of Ba Shen curves, can complete vacuum breakdown within the extremely short time, in the negative and positive two of arc chamber
The ion beam and electron beam of high power density are drawn simultaneously in pole.The high-current pulsed electron beam that pseudo- spark discharge generates is in pulsed electron
The fields such as beam physics, material surface modifying have wide practical use.To effective initial ionization of this electrion and its control
System is technical research and applies upper difficult point, in order to reduce the difficulty of initial ionization, makes its ionization process smart within the specific limits
It is really controllable, usually using trigger.The trigger process of currently used electricity trigger mechanism is the trigger electrode in cathode cavity
Discharge breakdown occurs under high trigger voltage, since insulating layer material evaporation and gas are decomposed, near trigger electrode and cathode
Intracavitary preliminarily forms electron beam.Under the action of main electric field, movement collides the ionization in main discharge device to electron beam rapidly
Frequency dramatically increases, so as to greatly improve the intensity and width of the output characteristics such as discharge current and the electron beam density in main discharge area
The defects of value, the prior art, when, in the plasma cathode electron gun based on pseudo- spark discharge, electron beam is in hollow cathode electricity
It is more rambunctious from the energy under process and line;Second is that in general hollow cathode, thermionic emission materials are located at one
Conductive hollow cylindrical tube is also known as cathode tube, and heater is located at the outside of cathode tube, and it is conductive that cathode tube is wrapped in another
Cylindrical tube (cathode shield) in, cathode shield is for protecting cathode tube and heater.Heater is usually by heater strip coiling
Line configuration, in existing technical solution, heater strip does not have good thermal conductivity in end, results in and goes out current situation in the course of work
The situation of portion's overheat, reduces the service life of heater, and a kind of Plasma-cathode e-gun can solve the problems, such as.
Utility model content
To solve the above-mentioned problems, the utility model is a kind of Plasma-cathode e-gun based on pseudo- spark discharge,
It effectively generates electron beam of two ionization process with multiple electrodes gap, i.e. hollow cathode ionization process and subsequent
Conduct ionization process;The energy and beam current density of the electron beam of hollow cathode phase are controlled by different breakdown methods.
Technical solution is used by the utility model:
A kind of Plasma-cathode e-gun, mainly including hollow cathode, trigger module, insulating trip, floating ground anode,
Anode disc, connector, tracheae, air accumulator, drift region, beam detector, current feedthrough, oscillograph, discharge power supply, pulse electricity
Source and cable, the hollow cathode mainly include graphite cathode pipe, stainless steel base seat, aluminium inner sleeve, ceramic heating pipe, transmitting tube,
Radiation in graphite sleeve, tungsten spring, aluminium housing, ceramic cathode tube socket, the coaxial heating tube of graphite, ceramic radiation screen pedestal, tantalum system
Screen, tantalum external radiation screen, graphite cathode cover, stainless steel gas access, rhenium heater strip, supporting rod, stainless steel gas access position
In one end that cathode tube is connected with pedestal, the stainless steel gas access, tungsten spring, graphite sleeve, transmitting tube are successively to ground connection
In the graphite cathode pipe, the coaxial heating tube of ceramic cathode tube socket, graphite, ceramic heating pipe dock and are placed on graphite successively
Cathode tube periphery, supporting rod sequentially pass through stainless steel gas access, tungsten spring, graphite sleeve, the hollow cathode, floating ground sun
Pole, anode disc, connector, drift region, beam detector, current feedthrough are arranged in order connection, and the air accumulator passes through connection
Part and tracheae are connected to the drift region, the trigger module, the pulse power, discharge power supply, oscillograph cable connection successively,
The hollow cathode and discharge power supply cable connection, the beam detector pass through current feedthrough and cable connection to the oscillography
Device is so as to analysis line, 4 millimeters of graphite cathode bore, 6 millimeters of outer diameter, 48 millimeters of length, 2 millimeters of opening diameter, transmitting
4 millimeters of pipe outside diameter, 10 millimeters of length, 16 millimeters of graphite cathode cover outer diameter, 52 millimeters of length use 0.25 millimeter of rhenium system of diameter
Heater strip can heat cathode, have aluminium inner sleeve, ceramic cathode tube socket periphery between the coaxial heating tube of graphite and cathode tube
With ceramic radiation screen pedestal, the inner side and outer side surface of ceramic radiation screen pedestal respectively with radiation shield in tantalum system and the outer spoke of tantalum system
Screen connection is penetrated, graphite cathode cover covers in ceramic radiation screen pedestal periphery and the stainless steel base seat of connection, and the coaxial heating tube of graphite can
External power supply is connected by the high-field electrode for running through ceramic cathode tube socket;
Supporting rod is hollow and its interior energy is through cable, and trigger module is connected to supporting rod front end, and supporting rod can be along hollow the moon
Pole axis direction moves back and forth, so that trigger module can be suspended in transmitting in-pipe, so as to adjust trigger module
Position;Emit six cerium boride of tube material, trigger module is mainly by dielectric disc, finger-type contact electrode and metal electrode disk group
Into for the dielectric disc between finger-type contact electrode and metal electrode disk, dielectric disc material is based on barium titanate
Dielectric material, a certain proportion of calcium titanate, strontium titanates or lead titanates, wherein dielectric disc and finger-type contact electricity can also be included
Pole turns on, and metal electrode support dielectric disc simultaneously turns on, by applying 3kV- between finger-type contact electrode and metal electrode disk
6kV potentials generate electronics;The floating ground anode and anode disc are respectively provided with centre bore, float ground anode as an annular electrode, and two
The center hole size of a floating ground anode is consistent, 4 millimeters of spacing, has insulating trip between each adjacent floating ground anode,
The distance between each floating ground anode is equal, so that Potential Distributing is similar in breakdown process;On ceramic heat tube outer surface
With spiral groove, the groove is wound with rhenium heater strip, docked with ceramic heating pipe one section of the coaxial heating tube of graphite
Outer surface also has the spiral groove, and the rhenium heater strip of ceramic heat tube outer surface can continue to be added around coaxial
On this section of groove of heat pipe, a pit and ceramic heating pipe on one end of rhenium heater strip insertion graphite cathode pipe it
Between, aluminium jacket bottom has slit and when being fitted snugly over ceramic heating pipe and the coaxial heating tube periphery of part graphite, energy
Rhenium heater strip is enough kept to be embedded in the spiral groove, upper slit is covered outside rhenium heater strip other end insertion aluminium, and causes
Rhenium heater strip is fully wrapped around in solderless contact in aluminium housing and on rhenium heater strip, is entirely by ceramic heating pipe and graphite
Spiral groove in coaxial heating tube and mutual between the inner wall of aluminium housing squeeze to realize electrical contact so that fire end
With relatively low resistance, the Energy distribution that most of electric current generates is enabled in the region where transmitting tube;Heated current
Conducting path is successively:The coaxial heating tube of high-field electrode, graphite, rhenium heater strip, graphite cathode pipe, stainless steel base seat.
It is using a kind of method and step of Plasma-cathode e-gun generation electron beam:
One, is passed through hydrogen or argon gas by stainless steel gas access to hollow cathode;
Two, open air accumulator, and nitrogen is passed through into electron gun;
Three, are when air pressure reaches particular value in hollow cathode, rhenium heater strip galvanization, anode disc and hollow cathode it
Between apply voltage, anode keeps ground connection, while applies negative pressure on hollow cathode, progressively increases to -55kV from -2kV so that anode
Breakdown is generated between disk and hollow cathode;
Four, float the delay that ground anode causes breakdown so that generate between hollow cathode and floating ground anode and continuously hit
It wears, the field penetration in hollow cathode can dramatically increase at this time, so as to generate more electric discharge electronics;
Five, adjust trigger module position by supporting rod, that is, adjust the surface of trigger module and transmitting tube outer outlets
Distance to reach specific triggering breakdown condition, applies electricity between the finger-type contact electrode of trigger module and metal electrode disk
Gesture, when electrical potential difference arrives -3kV for 0, the trigger module also launches initiating electron;
Six, apply the axial electric field of voltage range 3kV-5kV, initiating electron and step 4 described in prime in drift region
The electric discharge electronics of middle generation accelerates and into drift region, is collided with the neutral gas atoms of drift region together;
Seven, adjust the air pressure of neutral gas in drift region, and electron beam is made to reach different focusing effects;
Eight, can analyze line by beam detector, oscillograph.
The cross section of the ceramic heating pipe and the groove on coaxial heating tube outer surface for triangle or semicircle or
Rectangle.
The beneficial effects of the utility model are:
The utility model is by changing breakdown mechanism and discharge operation condition without the variation on unit configuration, to have
The beam energy and line of hollow cathode, operate in the short pulse of present apparatus electron gun during the pseudo- spark discharge of effect control
In, by the gaseous species for changing triggering breakdown mode under the same conditions so that beam energy increases under original potential
Add.More stable, easily fabricated, the long lifespan of device work, replaces heater strip and special instrument is not required, simple and practicable.
Description of the drawings
It is further illustrated with reference to the figure of the utility model:
Fig. 1 is the utility model structure diagram;
Fig. 2 is hollow cathode side section enlarged structure schematic diagram.
In figure, 1. hollow cathodes, 1-1. graphite cathode pipes, the stainless steel base seats of 1-2., 1-3. aluminium inner sleeves, 1-4. ceramic heats
Pipe, 1-5. transmitting tubes, 1-6. graphite sleeves, 1-7. tungsten springs, 1-8. aluminium housings, 1-9. ceramic cathode tube sockets, 1-10. graphite are same
Axis heating tube, 1-11. ceramic radiation screen pedestals, radiation shield in 1-12. tantalum systems, 1-13. tantalum external radiation screens, 1-14. graphite are cloudy
Pole is covered, 1-15. stainless steels gas access, 1-16. rhenium heater strips, 1-17. supporting rods, 2. trigger modules, 3. insulating trips, and 4. is floating
Ground anode, 5. anode discs, 6. connectors, 7. tracheaes, 8. air accumulators, 9. drift regions, 10. beam detectors, the feedback of 11. electric currents
It is logical, 12. oscillographs, 13. discharge power supplies, 14. pulse powers.
Specific embodiment
If Fig. 1 is the utility model structure diagram, if Fig. 2 is hollow cathode side section enlarged structure schematic diagram, mainly
Including hollow cathode (1), trigger module (2), insulating trip (3), floating ground anode (4), anode disc (5), connector (6), tracheae
(7), air accumulator (8), drift region (9), beam detector (10), current feedthrough (11), oscillograph (12), discharge power supply
(13), the pulse power (14) and cable, the hollow cathode (1) mainly include graphite cathode pipe (1-1), stainless steel base seat (1-
2), aluminium inner sleeve (1-3), ceramic heating pipe (1-4), transmitting tube (1-5), graphite sleeve (1-6), tungsten spring (1-7), aluminium housing
(1-8), ceramic cathode tube socket (1-9), the coaxial heating tube of graphite (1-10), ceramic radiation screen pedestal (1-11), the interior radiation of tantalum system
Shield (1-12), tantalum external radiation screen (1-13), graphite cathode cover (1-14), stainless steel gas access (1-15), rhenium heater strip
(1-16), supporting rod (1-17), stainless steel gas access (1-15) are located at one end that cathode tube (1-1) is connected with pedestal (1-2),
The stainless steel gas access (1-15), tungsten spring (1-7), graphite sleeve (1-6), transmitting tube (1-5) are located at docking successively
In the graphite cathode pipe (1-1), ceramic cathode tube socket (1-9), the coaxial heating tube of graphite (1-10), ceramic heating pipe (1-4)
It docks successively and is placed on graphite cathode pipe (1-1) periphery, supporting rod (1-17) sequentially passes through stainless steel gas access (1-15), tungsten
Spring (1-7), graphite sleeve (1-6), the hollow cathode (1), floating ground anode (4), anode disc (5), connector (6), drift
Region (9), beam detector (10), current feedthrough (11) are arranged in order connection, the air accumulator (8) by connector (6) and
Tracheae (7) is connected to the drift region (9), the trigger module (2), the pulse power (14), discharge power supply (13), oscillograph
(12) cable connection, the hollow cathode (1) and discharge power supply (13) cable connection, the beam detector (10) pass through successively
Current feedthrough (11) and cable connection are to the oscillograph (12) so as to analysis line, 4 milli of graphite cathode pipe (1-1) internal diameter
Rice, 6 millimeters of outer diameter, 48 millimeters of length, 2 millimeters of opening diameter, 4 millimeters of transmitting tube (1-5) outer diameter, 10 millimeters of length, graphite are cloudy
Pole 16 millimeters of (1-14) outer diameter of cover, 52 millimeters of length, can be to cathode using 0.25 millimeter of rhenium heater strip (1-16) of diameter
It is heated, there is aluminium inner sleeve (1-3), ceramic cathode tube socket (1-9) between the coaxial heating tube of graphite (1-10) and cathode tube (1-1)
Periphery has a ceramic radiation screen pedestal (1-11), the inner side and outer side surface of ceramic radiation screen pedestal (1-11) respectively in tantalum system
Radiation shield (1-12) and tantalum external radiation screen (1-13) connection, graphite cathode cover (1-14) cover in ceramic radiation screen pedestal (1-11)
Periphery and the stainless steel base seat (1-2) of connection, the coaxial heating tube of graphite (1-10) can be by running through ceramic cathode tube socket (1-9)
High-field electrode connection external power supply;
Supporting rod (1-17) is hollow and its interior energy is through cable, and trigger module (2) is connected to supporting rod (1-17) front end, props up
Strut can be moved back and forth along hollow cathode axis direction, so that trigger module (2) can be suspended in transmitting in-pipe, so as to
The position of trigger module (2) can be adjusted;Six cerium boride of transmitting tube (1-5) material, trigger module (2) mainly by dielectric disc,
Finger-type contact electrode and metal electrode disk composition, the dielectric disc is between finger-type contact electrode and metal electrode disk, electricity
Medium disk material is the dielectric material based on barium titanate, can also include a certain proportion of calcium titanate, strontium titanates or metatitanic acid
Lead, wherein dielectric disc and finger-type contact electrode conduction, metal electrode support dielectric disc simultaneously turns on, by finger-type contact electricity
Apply 3kV-6kV potentials between pole and metal electrode disk to generate electronics;The floating ground anode (4) and anode disc (5) are respectively provided with
Centre bore, it is an annular electrode to float ground anode (4), and two center hole sizes for floating ground anode (4) are consistent, 4 millimeters of spacing,
It is equal with the distance between insulating trip (3), each floating ground anode (4) between each adjacent floating ground anode (4), so that
Potential Distributing is similar in breakdown process;There is spiral groove, the groove is wound on ceramic heating pipe (1-4) outer surface
Rhenium heater strip (1-16), one section of the outer surface that the coaxial heating tube of graphite (1-10) is docked with ceramic heating pipe (1-4) also have
There is the spiral groove, the rhenium heater strip (1-16) of ceramic heating pipe (1-4) outer surface can continue around coaxial
On this section of groove of heating tube (1-10), one on one end insertion graphite cathode pipe (1-1) of rhenium heater strip (1-16)
Between a pit and ceramic heating pipe (1-4), aluminium housing (1-8) bottom, which has slit and works as, is fitted snugly over ceramic heating pipe
When (1-4) and the coaxial heating tube of part graphite (1-10) are peripheral, the embedded spiral of rhenium heater strip (1-16) can be kept
Connected in star, rhenium heater strip (1-16) other end are inserted into the slit on aluminium housing (1-8), and so that rhenium heater strip (1-16) is complete
It is complete to be wrapped in aluminium housing (1-8) and solderless contact on rhenium heater strip (1-16), be entirely by ceramic heating pipe (1-4) and
Spiral groove in the coaxial heating tube of graphite (1-10) and mutual between the inner wall of aluminium housing (1-8) squeeze to realize that electricity connects
Tactile so that fire end has relatively low resistance, enables to the Energy distribution that most of electric current generates in transmitting tube (1-5) institute
Region;The conducting path of heated current is successively:The coaxial heating tube of high-field electrode, graphite (1-10), rhenium heater strip (1-
16), graphite cathode pipe (1-1), stainless steel base seat (1-2).
The cross section of the ceramic heating pipe (1-4) and the groove on coaxial heating tube (1-10) outer surface is triangle
Or semicircle or rectangle.
The utility model, can be in puppet by improving anode construction and working under specific breakdown mechanism and discharging condition
The effectively electron beam of control energy and line is generated during spark discharge, and is passed through and is improved the structure of hollow cathode and extend dress
The working life put.
Claims (4)
1. a kind of Plasma-cathode e-gun, mainly including hollow cathode (1), trigger module (2), insulating trip (3), floating ground sun
Pole (4), anode disc (5), connector (6), tracheae (7), air accumulator (8), drift region (9), beam detector (10), electric current feedback
Logical (11), oscillograph (12), discharge power supply (13), the pulse power (14) and cable, the hollow cathode (1) mainly include graphite
Cathode tube (1-1), stainless steel base seat (1-2), aluminium inner sleeve (1-3), ceramic heating pipe (1-4), transmitting tube (1-5), graphite sleeve
(1-6), tungsten spring (1-7), aluminium housing (1-8), ceramic cathode tube socket (1-9), the coaxial heating tube of graphite (1-10), ceramic radiation
Radiation shield (1-12), tantalum external radiation screen (1-13), graphite cathode cover (1-14), stainless steel gas in screen pedestal (1-11), tantalum system
Body entrance (1-15), rhenium heater strip (1-16), supporting rod (1-17), stainless steel gas access (1-15) are located at graphite cathode pipe
One end that (1-1) is connected with stainless steel base seat (1-2), the stainless steel gas access (1-15), tungsten spring (1-7), graphite cannula
Cylinder (1-6), transmitting tube (1-5) dock ground and are located in the graphite cathode pipe (1-1) successively, ceramic cathode tube socket (1-9), graphite
Coaxial heating tube (1-10), ceramic heating pipe (1-4) dock and are placed on graphite cathode pipe (1-1) periphery, supporting rod (1- successively
17) stainless steel gas access (1-15), tungsten spring (1-7), graphite sleeve (1-6) are sequentially passed through, the hollow cathode (1) is floated
Ground anode (4), anode disc (5), connector (6), drift region (9), beam detector (10), current feedthrough (11) are arranged in order
Connection, the air accumulator (8) are connected to the drift region (9), the trigger module by connector (6) and tracheae (7)
(2), cable connection, the hollow cathode (1) are electric with electric discharge successively for the pulse power (14), discharge power supply (13), oscillograph (12)
Source (13) cable connection, the beam detector (10) by current feedthrough (11) and cable connection to the oscillograph (12) with
Line, 4 millimeters of graphite cathode pipe (1-1) internal diameter, 6 millimeters of outer diameter, 48 millimeters of length, 2 millimeters of opening diameter, transmitting can be analyzed
4 millimeters of (1-5) outer diameter is managed, 10 millimeters of length, 16 millimeters of graphite cathode cover (1-14) outer diameter, 52 millimeters of length use diameter
0.25 millimeter of rhenium heater strip (1-16) can heat cathode, the coaxial heating tube of graphite (1-10) and graphite cathode pipe
There is aluminium inner sleeve (1-3), ceramic cathode tube socket (1-9) periphery has ceramic radiation screen pedestal (1-11), ceramic radiation between (1-1)
The inner side and outer side surface of screen pedestal (1-11) is connected respectively with radiation shield in tantalum system (1-12) and tantalum external radiation screen (1-13),
Graphite cathode cover (1-14) covers in ceramic radiation screen pedestal (1-11) periphery and the stainless steel base seat (1-2) of connection, and graphite coaxially adds
Heat pipe (1-10) can connect external power supply by running through the high-field electrode of ceramic cathode tube socket (1-9),
It is characterized in that:Supporting rod (1-17) is hollow and its interior energy passes through cable, before trigger module (2) is connected to supporting rod (1-17)
End, supporting rod can be moved back and forth along hollow cathode axis direction, be moved so that trigger module (2) can be suspended in transmitting tube
It is dynamic, so as to adjust the position of trigger module (2);Six cerium boride of transmitting tube (1-5) material, trigger module (2) is mainly by electricity
Dielectric disc, finger-type contact electrode and metal electrode disk composition, the dielectric disc are located at finger-type contact electrode and metal electrode disk
Between, dielectric disc material is the dielectric material based on barium titanate, can also include a certain proportion of calcium titanate, strontium titanates
Or lead titanates, wherein dielectric disc and finger-type contact electrode conduction, metal electrode support dielectric disc simultaneously turns on, by finger-type
Apply 3kV-6kV potentials between contact electrode and metal electrode disk to generate electronics;The floating ground anode (4) and anode disc (5)
Centre bore is respectively provided with, it is an annular electrode to float ground anode (4), and two center hole sizes for floating ground anode (4) are consistent, spacing
It is 4 millimeters, each equal with the distance between insulating trip (3), each floating ground anode (4) between the adjacent floating ground anode (4),
So that Potential Distributing is similar in breakdown process;There is spiral groove on ceramic heating pipe (1-4) outer surface, it is described recessed
Slot is wound with rhenium heater strip (1-16), one section of the appearance that the coaxial heating tube of graphite (1-10) is docked with ceramic heating pipe (1-4)
Face also has a spiral groove, the rhenium heater strip (1-16) of ceramic heating pipe (1-4) outer surface can continue around
Onto this section of groove of coaxial heating tube (1-10), one end insertion graphite cathode pipe (1-1) of rhenium heater strip (1-16)
On a pit and ceramic heating pipe (1-4) between, aluminium housing (1-8) bottom has slit and when being fitted snugly over ceramics
When heating tube (1-4) and the peripheral coaxial heating tube of part graphite (1-10), rhenium heater strip (1-16) can be kept to be embedded in institute
Spiral groove is stated, rhenium heater strip (1-16) other end is inserted into the slit on aluminium housing (1-8), and causes rhenium heater strip
(1-16) fully wrapped around solderless contact in aluminium housing (1-8) and on rhenium heater strip (1-16), is entirely by ceramic heating pipe
Mutual squeeze between (1-4) and spiral groove in the coaxial heating tube of graphite (1-10) and the inner wall of aluminium housing (1-8) is come
Realize electrical contact so that fire end has relatively low resistance, and the Energy distribution that most of electric current generates is enabled to emit
Manage the region where (1-5);The conducting path of heated current is successively:The coaxial heating tube of high-field electrode, graphite (1-10), rhenium system
Heater strip (1-16), graphite cathode pipe (1-1), stainless steel base seat (1-2).
2. a kind of Plasma-cathode e-gun according to claim 1, it is characterized in that:The ceramic heating pipe (1-4)
And the cross section of the groove on coaxial heating tube (1-10) outer surface is triangle.
3. a kind of Plasma-cathode e-gun according to claim 1, it is characterized in that:The ceramic heating pipe (1-4)
And the cross section of the groove on coaxial heating tube (1-10) outer surface is semicircle.
4. a kind of Plasma-cathode e-gun according to claim 1, it is characterized in that:The ceramic heating pipe (1-4)
And the cross section of the groove on coaxial heating tube (1-10) outer surface is rectangle.
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107507749A (en) * | 2017-08-25 | 2017-12-22 | 金华职业技术学院 | A kind of Plasma-cathode e-gun |
CN109411314A (en) * | 2018-12-10 | 2019-03-01 | 华北电力大学 | A kind of electron gun that electron energy is controllable |
CN111564353A (en) * | 2020-04-10 | 2020-08-21 | 西安电子科技大学 | High-energy electron beam source control system, method and device and part manufacturing method |
-
2017
- 2017-08-25 CN CN201721129368.3U patent/CN207458884U/en active Active
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107507749A (en) * | 2017-08-25 | 2017-12-22 | 金华职业技术学院 | A kind of Plasma-cathode e-gun |
CN107507749B (en) * | 2017-08-25 | 2023-09-19 | 金华职业技术学院 | Plasma cathode electron gun |
CN109411314A (en) * | 2018-12-10 | 2019-03-01 | 华北电力大学 | A kind of electron gun that electron energy is controllable |
CN109411314B (en) * | 2018-12-10 | 2020-11-10 | 华北电力大学 | Electron gun with controllable electron energy |
CN111564353A (en) * | 2020-04-10 | 2020-08-21 | 西安电子科技大学 | High-energy electron beam source control system, method and device and part manufacturing method |
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