CN105702598B - The method and its device whether chip normally rises judged - Google Patents
The method and its device whether chip normally rises judged Download PDFInfo
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- CN105702598B CN105702598B CN201610210232.9A CN201610210232A CN105702598B CN 105702598 B CN105702598 B CN 105702598B CN 201610210232 A CN201610210232 A CN 201610210232A CN 105702598 B CN105702598 B CN 105702598B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention discloses a kind of methods and its device judging whether chip normally rises, it is related to semiconductor process technique field, it can judge whether chip normally rises, if chip rises abnormal, stop subsequent manipulator and takes piece, and the chip not risen normally is adjusted, to reduce the probability that manipulator hits chip and the manipulators such as wafer damage is caused to take piece failure.This judges the method whether chip normally rises, including：After supporting multiple thimbles of the chip to rise, measure the resistance value between any two thimble in the multiple thimble, and corresponding each thimble at least measures a resistance value, judge in all resistance values with the presence or absence of the resistance value for meeting default exceptional condition, if in the presence of confirming that the chip does not rise normally.During crystal plate taking after present invention is mainly used for semiconductor technology.
Description
Technical field
The present invention relates to semiconductor process technique field more particularly to it is a kind of judge method that whether chip normally rises and
Its device.
Background technology
In IC chip manufacturing process, need to carry out various types of processing technologys to chip, such as including light
Quarter, etching, ion implanting, metal deposit, die package etc. in many techniques, need chip first as depicted in figs. 1 and 2
1 is positioned on the indoor chuck of semiconductor processing equipment reaction chamber 2, then carries out technological operation to chip 1.Chuck 2 is mainly used
It is fixed in chip 1,1 lower section of chip is provided with multiple thimbles 3, as shown in figure 3, after technique terminates, chuck 2 discharges
Fixation for chip 1, later multiple thimbles 3 hold chip 1 and be raised up to predeterminated position, then manipulator is moved at chip 1
It carries out taking piece, then chip 1 is sent to except chamber.
According to the difference of fixed form, chuck 2 can be divided into electrostatic chuck and mechanical chuck.As shown in Figure 1, electrostatic chuck
Inside is embedded with chuck electrode, in technical process, loads DC voltage to chuck electrode, phase is generated between chuck electrode and chip
The electrostatic force mutually attracted discharges the fixation for chip 1 to which chip 1 to be fixed on chuck 2 to chuck electrode electric discharge；
As shown in Fig. 2, mechanical chuck surrounding is equipped with pressure ring, pressure ring contacts under cylinder traction with chip 1, will be brilliant by mechanical pressure
Piece 1 is fixed on chuck 2, the pressure ring of mechanical chuck 2 is increased to discharge the fixation for chip 1.However, chuck 2 is discharging
It is possible that problem, for example, for electrostatic chuck, technique can to chuck electrode electric discharge after terminating during chip
Energy can be insufficient, causes meeting residual charge on chip 1 to form electric field, it would still be possible to so that chip 1 is adsorbed on chuck 2, cause bonding die
Phenomenon when thimble 3 executes rise action at this time, is likely to result in the inclination of chip 1, if manipulator is moved to crystalline substance in this case
It carries out taking piece, manipulator that can hit chip 1 at piece, leads to that piece is taken to fail；For mechanical chuck, due to working continuously, press
The part that ring is contacted with chip 1 is often polluted by process byproducts,, can after technique terminates when build-up of process by-products is more
The adhesion that can cause chip 1 and pressure ring, chip 1 may be driven to tilt when pressure ring is increased even makes chip 1 be glued by pressure ring
It rises, takes piece, manipulator that may hit chip 1 or take less than crystalline substance if manipulator is moved to predetermined position in this case
Piece 1 leads to that piece is taken to fail.
Invention content
In view of this, the embodiment of the present invention provides a kind of method and its device judging whether chip normally rises, it can
Judge whether chip normally rises, if chip rises exception, stops subsequent manipulator and take piece, and the chip to not rising normally
It is adjusted, to reduce the probability that manipulator hits chip and the manipulators such as wafer damage is caused to take piece failure.
In order to achieve the above objectives, present invention generally provides following technical solutions：
On the one hand, a kind of method for judging chip and whether normally rising is provided, the bottom of wafer is conductor or semiconductor,
The judgment method includes：
After supporting multiple thimbles of the chip to rise, the electricity between any two thimble in the multiple thimble is measured
Resistance value, and corresponding each thimble at least measures a resistance value：
Judge in all resistance values with the presence or absence of the resistance value for meeting default exceptional condition；
If in the presence of confirming that the chip does not rise normally.
Specifically, specific with the presence or absence of the resistance value for not meeting default exceptional condition in the whole resistance values of the judgement
For：
Judge in all resistance values with the presence or absence of infinitely great resistance value；
Specifically, if it is described in the presence of confirming that the chip does not rise normally is specially：
If there is infinitely great resistance value, confirm that the chip does not rise normally.
Specifically, the above-mentioned method for judging chip and whether normally rising further includes：
If all the resistance value is finite value, confirm that the chip normally rises.
Specifically, the resistance value measured in the multiple thimble between any two thimble is specially：
So that first thimble in any two thimble is grounded, makes arbitrary two in multiple thimbles to be measured
The second thimble connects power input in a thimble；
The current value flowed through between first thimble and second thimble is obtained, if first thimble and described the
The current value flowed through between two thimbles is zero, then confirms that the resistance value between first thimble and second thimble is infinite
Greatly.
Specifically, the above-mentioned method for judging chip and whether normally rising further includes：
When it is abnormal rise to confirm the chip, outputting alarm information and stopping take piece to instruct.
On the other hand, a kind of device for judging chip and whether normally rising is provided, the bottom of wafer is conductor or partly leads
Body, the judgment means include：
Measurement module, for after supporting multiple thimbles of the chip to rise, measuring arbitrary two in the multiple thimble
Resistance value between a thimble, and corresponding each thimble at least measures a resistance value；
Judgment module, for judging in all resistance values with the presence or absence of the resistance value for meeting default exceptional condition；
Confirmation module, if judging there is the electricity for meeting default exceptional condition in all resistance values for judgment module
Resistance value then confirms that the chip does not rise normally.
The judgment module is specifically used for judging in all resistance values with the presence or absence of infinitely great resistance value；
The confirmation module, if judging, in the presence of infinitely great resistance value, to confirm the crystalline substance specifically for judgment module
Piece does not rise normally.
The confirmation module, if being additionally operable to judgment module judges that all the resistance value is finite value, confirms institute
Chip is stated normally to rise.
Specifically, the measurement module includes：
Circuit access unit makes to wait for when for resistance value between any two thimble in measuring the multiple thimble
The first thimble is grounded in any two thimble in the multiple thimbles surveyed, and is made in multiple thimbles to be measured second in any two thimble
Thimble connects power input；
Electric current acquiring unit obtains when for resistance value between any two thimble in measuring the multiple thimble
The current value flowed through between first thimble and second thimble；
The judgment module is specifically used for, when resistance value between any two thimble in measuring the multiple thimble,
If the current value flowed through between first thimble and second thimble is zero, first thimble and described second is judged
Whether the resistance value between thimble is infinitely great.
Specifically, the above-mentioned device for judging chip and whether normally rising further includes：
Alarm module, for when it is abnormal rise to confirm the chip, outputting alarm information and stopping to take piece to instruct.
The method and its device provided by the invention for judging whether chip normally rises, can be by between two thimbles
Resistance value is infinity to judge that chip for normal rise, if can not be formed into a loop between the two thimbles and chip, is said
Bright chip does not contact all with the two thimbles, i.e., chip is normal rise, according to judging result, stops subsequent machine at this time
Tool hand takes piece, is adjusted to the chip not risen normally, and to reduce, manipulator hits chip and causes the machineries such as wafer damage
Hand takes the probability of piece failure.
Description of the drawings
Fig. 1 be in the prior art electrostatic chuck fixed wafer when structural schematic diagram；
Fig. 2 be in the prior art mechanical chuck fixed wafer when structural schematic diagram；
Fig. 3 is structural schematic diagram of the thimble from chuck pop-up when chip in the prior art；
Fig. 4 is a kind of structural schematic diagram of ejector pin mechanism in the embodiment of the present invention；
Fig. 5 is a kind of structural schematic diagram of semiconductor processing equipment in the embodiment of the present invention；
Fig. 6 is a kind of flow chart judging method that whether chip normally rises in the embodiment of the present invention；
Fig. 7 is another flow chart for judging method that whether chip normally rises in the embodiment of the present invention；
Fig. 8 is a kind of structure diagram judging device that whether chip normally rises in the embodiment of the present invention；
Fig. 9 is a kind of structure diagram of measurement module in the embodiment of the present invention；
Figure 10 is another structural schematic diagram for judging device that whether chip normally rises in the embodiment of the present invention；
Figure 11 is another structural schematic diagram for judging device that whether chip normally rises in the embodiment of the present invention.
Specific implementation mode
The present invention is described in further detail with reference to the accompanying drawings and examples.
The embodiment of the present invention provides a kind of method for judging chip and whether normally rising, and ejector pin mechanism is used for, such as Fig. 4 and figure
Shown in 5, above-mentioned ejector pin mechanism includes thimble chassis 4 and multiple thimbles 3, and thimble 3 is fixedly connected on thimble chassis 4, and thimble 3 is used
In holding up chip 1, chip 1 is the chip that bottom is conductor or semiconductor, in semiconductor fabrication process, most chip bottom
Portion is conductor or semiconductor, and the present embodiment is suitable for judging whether such chip normally rises, as shown in fig. 6, on
It states and judges that the method whether chip normally rises includes：
Step 101, when support chip 1 multiple thimbles 3 rise after, measure in multiple thimbles between any two thimble 3
Resistance value, and corresponding each thimble 3 at least measures a resistance value, and the thimble 3 is made of conductor material.
Step 102 judges in all resistance values with the presence or absence of the resistance value for meeting default exceptional condition.
It should be noted that default exceptional condition is the resistance value that resistance value is infinity.
If step 103, in the presence of the resistance value for meeting default exceptional condition, confirms that chip 1 is normal and rise.
If chip 1 rises, each thimble 3 can be contacted with 1 bottom of chip, the electricity between judging any two thimble 3
When resistance value meets the resistance value of exceptional condition, then illustrate that the two thimbles 3 are not formed into a loop with chip 1, i.e., chip 1 not with it is all
Thimble 3 contact, judge that chip 3 is normal rise.
It should be noted that number for thimble in ejector pin mechanism and be not construed as limiting, as long as chip can be supported,
It is 4 to have 3 to 6 thimbles, preferred thimble quantity in usual ejector pin mechanism.Ejector pin mechanism is generally arranged at semiconductor machining
In the reaction chamber of equipment, as shown in figure 5, being provided with chuck 2 and above-mentioned ejector pin mechanism in the reaction chamber.The semiconductor adds
Construction equipment can be plasma etching equipment etc., as long as needing chuck 2 that chip 1 is fixed, then carry out process
Semiconductor processing equipment, can apply the present embodiment in scheme.
The method for judging chip and whether normally rising in the present embodiment is infinite by the resistance value between two thimbles
It is big to judge that chip is normal rise, if can not be formed into a loop between the two thimbles and chip, illustrate chip not with this
Two thimbles all contact, i.e., chip is normal rise, according to judging result, stops subsequent manipulator at this time and takes piece, right
The chip not risen normally is adjusted, and to reduce, manipulator hits chip and the manipulators such as wafer damage is caused to take piece failure
Probability.
Specifically, above-mentioned judgement is all in the resistance value with the presence or absence of the resistance value for not meeting default exceptional condition, if
In the presence of then confirming that the chip does not rise normally includes：Judge the resistance value with the presence or absence of infinity in all resistance values,
If there is infinitely great resistance value, confirm that the chip does not rise normally.
If chip 1 is normal rise, each thimble 3 is contacted with the bottom of chip 1, in all thimbles 3, simply by the presence of
Resistance value between two thimbles 3 is infinity, then illustrates that the two thimbles 3 are not formed into a loop with chip 1, i.e., chip 1 not with
All thimbles 3 contact, and judge that chip 3 rises to be abnormal.
As shown in fig. 7, specifically, it is above-mentioned to judge that the method whether chip normally rises include：
If step 104, all the resistance value is finite value, confirm that the chip normally rises, if chip 1 is just
It often rises, then each thimble 3 is contacted with the bottom of chip 1, at this point, any two of which thimble 3 is all formed back with chip 1
Road, i.e., the resistance value between any two thimble 3 is finite value.
Specifically, the resistance value in the multiple thimbles of above-mentioned measurement between any two thimble 3 includes：Make multiple tops to be measured
First thimble is grounded in any two thimble 3 in needle, makes the second thimble connection in any two thimble 3 in multiple thimbles to be measured
Power input；The current value flowed through between the first thimble and the second thimble is obtained, if between first thimble and the second thimble
The current value flowed through is zero, then confirms that the resistance value between the first thimble and the second thimble is infinity, that is, illustrate the first thimble
And second be not formed into a loop between thimble and chip；If the first thimble is grounded and after the second thimble connection power input, brilliant
Piece is contacted with the first thimble and the second thimble, then is formed into a loop between the first thimble and the second thimble, and have electric current to flow through, then
Confirm that the resistance value between the first thimble and the second thimble is finite value.To be to have by software realization automatic decision resistance value
Limit value or infinitely great more difficulty, and judge whether current value is zero fairly simple, therefore can be by judging current value
Whether it is zero to reflect that resistance value is finite value or infinitely great.
Step 105, when it is normal rise to confirm chip 1, outputting alarm information and stopping take piece to instruct, warning information
It can be simultaneously stopped for example, by being exported by indicator light or buzzer etc. and take piece instruction that can control semiconductor processing equipment and stop
Only subsequent mechanical hand takes piece to act, and operating personnel is waited for solve the problems, such as that chip does not rise normally.
As shown in figure 8, the embodiment of the present invention also provides a kind of device for judging chip and whether normally rising, which is bottom
Portion is the chip of conductor or semiconductor, which includes：Measurement module 6, for 3 liters of multiple thimbles when support chip 1
After rising, the resistance value between any two thimble 3 in multiple thimbles 3 is measured, and corresponding each thimble 3 at least measures a resistance
Value；Judgment module 7, for judging in whole resistance values with the presence or absence of the resistance value for meeting default exceptional condition；Confirmation module 8,
If for judging there is the resistance value for meeting default exceptional condition in all resistance values, confirms that chip 1 is not normal and rise
It rises.
Judge that method that whether chip normally rises and principle can be same as the previously described embodiments, details are not described herein.
The device for judging chip and whether normally rising in the present embodiment can be by the resistance value between two thimbles
Infinity judges that chip rises to be normal, if can not be formed into a loop between the two thimbles and chip, illustrates chip not
It is all contacted with the two thimbles, i.e., chip is normal rise, according to judging result, stops subsequent manipulator at this time and takes
Piece is adjusted the chip not risen normally, and to reduce, manipulator hits chip and the manipulators such as wafer damage is caused to take piece
The probability of failure.
As shown in figure 8, specifically, judgment module 7 can specifically include：Judge to whether there is nothing in all resistance values
Poor big resistance value.Confirmation module 8 can specifically include：If judgment module is judged, in the presence of infinitely great resistance value, to confirm
The chip does not rise normally.Confirmation module 8 can also include specifically：If judgment module judges that all the resistance value is
Finite value then confirms that the chip normally rises.
As shown in figure 9, specifically, measurement module 6 may include：Circuit access unit 61, for measuring multiple thimbles 3
When resistance value between middle any two thimble 3, make in multiple thimbles 3 to be measured that first thimble is grounded in any two thimble 3,
Second thimble in any two thimble 3 is set in multiple thimbles 3 to be measured to connect power input；Electric current acquiring unit 62, is used for
When resistance value between any two thimble 3 in measuring multiple thimbles 3, obtains and flowed through between the first thimble and the second thimble
Current value；Confirmation module 8 is specifically used for, when resistance value between any two thimble 3 in measuring multiple thimbles 3, if judging
The current value flowed through between first thimble and the second thimble is zero, then confirms that the resistance value between the first thimble and the second thimble is
It is infinitely great.
As shown in Figure 10, circuit access unit 61 may include：Multiple thimble connecting pins 5 illustrate 4 thimbles in figure and connect
End 5 is connect, thimble connecting pin 5 is for connecting thimble, wherein each thimble connecting pin 5 connects a thimble, and thimble connecting pin 5 is wrapped
A first thimble connecting pin 51 and a second thimble connecting pin 52 are included, the first thimble connecting pin 51 is switched by one respectively
K is grounded；First resistor R1, the second thimble connecting pin 52 are connected to the first end of first resistor R1 by a switch K respectively, the
The second end of one resistance R1 is connected to power input Vcc；Above-mentioned electric current acquiring unit 62, is connected to the two of first resistor R1
End, for obtaining the current value for flowing through first resistor R1；Above-mentioned judgment module 7 is connected to electric current acquiring unit 62, for when stream
When the current value for crossing first resistor R1 is zero, judge that resistance value whether there is infinite resistance value；Switch control module is (in figure not
Show), it is connected to each switch K, for after supporting the thimble of the chip to rise, control to connect two with thimble connecting pin 5
A switch K conductings control the switch K cut-offs not connect with the thimble connecting pin 5.
During semiconductor processing equipment carries out technological operation to chip, such as during plasma etching, control
It is cut-off state to make switch K, to ensure that the thimble of conductor material will not impact technological operation, when the technique of chip is grasped
Work terminates, and after thimble rises, when progress manipulator being needed to take piece, then controls two switch K that thimble connecting pin 5 is connected and leads
It is logical, judge the two tops if the current value is zero to measure current value between two thimbles that thimble connecting pin 5 is connected
Resistance value between needle is infinity, that is, illustrates not to be formed into a loop between the two thimbles and chip, confirms that chip is not just
Often rise；If the current value is not zero, illustrate that the resistance value between the two thimbles is finite value, i.e. the two thimbles and crystalline substance
It is formed into a loop between piece, it can be determined that chip is normal rise, certainly, can also be to more in order to improve the accuracy of judgement
Resistance value between thimble is judged, controls other two switch K cut-offs that thimble connecting pin 5 is connected, control top at this time
Other two switch K conductings that needle connecting pin 5 is connected, judge what the thimble connecting pin 5 was connected in the same way
Whether the resistance value between two thimbles is infinity, and so on, the resistance value between multiple thimbles measures.As long as
It is infinity to have the resistance value between thimble, then confirms that chip is abnormal rises.
As shown in figure 11, electric current acquiring unit 62 includes：Operational amplifier U1, first input end are connected to first resistor
The first end of R1, the second input terminal are connected to the second end of first resistor R1, and output end is connected to by second resistance R2
Its second input terminal, the second input terminal are also grounded by 3rd resistor R3；Voltage follower U2, first input end pass through
Four resistance R4 are connected to the output end of operational amplifier U1, and for first input end also by the 5th resistance R5 ground connection, second is defeated
Enter end and be connected to its output end, for output end also by the 6th resistance R6 ground connection, output end is connected to judgment module 7；Judge
Module 7 is specifically used for, and when the output end voltage of voltage follower U2 is zero, judges whether resistance value is infinitely great.
Wherein, operational amplifier U1 output end voltages, wherein Rx is that switch K connects when being connected
Enter the resistance value between two thimble connecting pins 5 of circuit, i.e. resistance value between two thimbles, voltage follower U2 is for filtering
So that operational amplifier U1 output end voltages V1 can be judged module 7 and receive identification, in formula
In, parameter Rx is unknown number, and is the part in denominator, if Rx is infinity, V1=0, if Rx is finite value, V1 is not
Zero, judgment module 7 can judge that the resistance value between the two thimbles is infinitely great or limited according to whether V1 is zero
Value.
Specifically, above-mentioned switch K can be relay, it is to be understood that, above-mentioned switch K may be it is other kinds of can
Control switch.
Specifically, above-mentioned to judge that the device whether chip normally rises include：Alarm module (not shown),
For when it is abnormal rise to confirm chip 1, outputting alarm information and stopping to take piece to instruct.
The above described is only a preferred embodiment of the present invention, be not intended to limit the present invention in any form, according to
According to the technical spirit of the present invention to any simple modification, equivalent change and modification made by above example, this hair is still fallen within
In the range of bright technical solution.
Claims (8)
1. a kind of method for judging chip and whether normally rising, wherein the bottom of wafer is conductor or semiconductor, and feature exists
In, the method includes：
After supporting multiple thimbles of the chip to rise, the resistance between any two thimble in the multiple thimble is measured
Value, and corresponding each thimble at least measures a resistance value；
Judge in all resistance values with the presence or absence of the resistance value for meeting default exceptional condition；
If in the presence of confirming that the chip does not rise normally；
It is described to judge that whether there is the resistance value for meeting default exceptional condition in all resistance values includes：
Judge in all resistance values with the presence or absence of infinitely great resistance value.
2. the method according to claim 1 for judging chip and whether normally rising, which is characterized in that the whole institutes of the judgement
It states after whether there is infinitely great resistance value in resistance value, the method further includes：
If all the resistance value is finite value, confirm that the chip normally rises.
3. the method according to claim 1 for judging chip and whether normally rising, which is characterized in that the measurement is described more
Resistance value in a thimble between any two thimble is specially：
So that first thimble in any two thimble is grounded, makes any two top in multiple thimbles to be measured
The second thimble connects power input in needle；
The current value flowed through between first thimble and second thimble is obtained, if first thimble is pushed up with described second
The current value flowed through between needle is zero, then confirms that the resistance value between first thimble and second thimble is infinity.
4. the method according to claim 1 for judging chip and whether normally rising, which is characterized in that if it is described in the presence of,
After confirming that the chip does not rise normally, further include：
When confirming that the chip does not rise normally, outputting alarm information and stopping take piece to instruct.
5. a kind of device for judging chip and whether normally rising, the bottom of wafer is conductor or semiconductor, which is characterized in that institute
Stating judgment means includes：
Measurement module, for after supporting multiple thimbles of the chip to rise, measuring any two top in the multiple thimble
Resistance value between needle, and corresponding each thimble at least measures a resistance value；
Judgment module, for judging in all resistance values with the presence or absence of the resistance value for meeting default exceptional condition；
Confirmation module, if judging there is the resistance for meeting default exceptional condition in all resistance values for judgment module
Value, then confirm that the chip does not rise normally；
The judgment module is specifically used for judging in all resistance values with the presence or absence of infinitely great resistance value.
6. the device according to claim 5 for judging chip and whether normally rising, which is characterized in that
The confirmation module, if being additionally operable to judgment module judges that all the resistance value is finite value, confirms the crystalline substance
Piece normally rises.
7. the device according to claim 6 for judging chip and whether normally rising, which is characterized in that the measurement module packet
It includes：
Circuit access unit makes to be measured when for resistance value between any two thimble in measuring the multiple thimble
The first thimble is grounded in any two thimble in multiple thimbles, makes in multiple thimbles to be measured second thimble in any two thimble
Connect power input；
Electric current acquiring unit, when for resistance value between any two thimble in measuring the multiple thimble, described in acquisition
The current value flowed through between first thimble and second thimble；
The confirmation module is specifically used for, when resistance value between any two thimble in measuring the multiple thimble, if institute
It is zero to state the current value flowed through between the first thimble and second thimble, then confirms first thimble and second thimble
Between resistance value be infinity.
8. the device according to claim 7 for judging chip and whether normally rising, which is characterized in that further include：
Alarm module, for when confirming that the chip does not rise normally, outputting alarm information and stopping to take piece to instruct.
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| CN1513200A (en) * | 2001-03-30 | 2004-07-14 | ��ķ�о�����˾ | Semiconductor wafer lifting device and methods for implementing the same |
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